CN109059959B - Complete machine detection system and method for water pipe inclinometer - Google Patents
Complete machine detection system and method for water pipe inclinometer Download PDFInfo
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Abstract
The invention discloses a complete machine detection system and method for a water pipe inclinometer, and relates to the earth crust deformation observation technology. The water pipe inclinometer comprises a 1 st bowl body, a 2 nd bowl body, a communicating water pipe and a calibrator, wherein the 1 st bowl body, the calibrator and the 2 nd bowl body are communicated sequentially through the communicating water pipe to form a whole water pipe inclinometer; the system is provided with a micro-displacement system, a controller and a 1 st, 2 nd and 3 rd interferometer system; the controller is respectively connected with the piezoelectric ceramics of the 1 st, 2 nd and 3 rd micro-displacement platforms, and the calibration rod of the calibrator is connected with the 1 st, 2 nd and 3 rd interferometer systems. The invention has the following advantages and positive effects: (1) "three-stage" structure: the integrity of the water pipe inclinometer is not damaged, and the detection error caused by the calibration of the calibration device is reduced; (2) diversification of calibration signals; (3) the precision is higher: when the piezoelectric ceramic is used as an input source, the output precision of the piezoelectric ceramic can reach the nanometer level, which also provides possibility for detecting the resolution of the water pipe inclinometer.
Description
Technical Field
The invention relates to a crust deformation observation technology, in particular to a complete machine detection system and method for a water pipe inclinometer.
Background
The water pipe inclinometer is used for measuring the surface change of the bottom shell, in particular to the inclination change amount of the ground surface length base line. With the development of the water pipe inclinometer, the processing technology, the chip, the sampling technology and the like are continuously improved, the water pipe inclinometer realizes higher sampling rate, and the sensitivity is also from 10 -7 Increase by 10 -9 . Therefore, it is necessary to study the entire frequency band of the water pipe inclinometer, so as to perfect the performance of the instrument itself and better record the crust change.
At present, as shown in fig. 1, a water pipe inclinometer widely used in the field of geometrics measurement comprises a 1 st bowl body 10, a 2 nd bowl body 20, a communicating water pipe 30 and a calibrator 40, wherein the 1 st bowl body 10 and the 2 nd bowl body 20 have the same structure; the 1 st float 12 of the 1 st bowl 10 floats on the water surface in the 1 st water cylinder 11; a calibrator 40 is arranged between the 1 st bowl body 10 and the 2 nd bowl body 20 and is connected through a communication water pipe 30, and water in the 1 st water tank 11, water in the 2 nd water tank 21 and water in the calibration water tank 41 form a passage.
For a long time, three indexes of the crust deformation instrument in China are not provided with a unified detection method, and the indexes are usually measured in a laboratory by an instrument developer; developers typically do not test the entire instrument system, but replace it by testing the parameter values of some of its components; the research result of the current test method only can represent part of the performance of the instrument, but cannot represent the whole machine performance of the instrument; for testing key parameters of the water pipe inclinometer, the whole instrument system is required to be regarded as a black box, and the key parameters of the instrument are analyzed and calculated through the input quantity and the output quantity of the system, so that the actual performance of the water pipe inclinometer can be accurately reflected by the parameter values.
The research and development of the complete machine detection system of the water pipe inclinometer establishes a detection platform system taking length and angle observation as cores, realizes the test of key technical indexes of the water pipe inclinometer, and has very important scientific significance for the quantitative evaluation of the quality and the overall performance of the water pipe inclinometer.
Disclosure of Invention
The invention aims to fill the technical blank of complete machine detection of a water pipe inclinometer and provides a complete machine detection system and a complete machine detection method of the water pipe inclinometer.
The purpose of the invention is realized in the following way:
the micro-displacement platform driven by the piezoelectric ceramic provides a calibration signal for the water pipe inclinometer, so that the linear ascending or descending of the water pipe inclinometer is realized, and meanwhile, the water pipe inclinometer is calibrated by the calibrator, so that the purpose of detecting the whole water pipe inclinometer is achieved.
Specifically:
the system comprises a water pipe inclinometer, which is an object to be detected, wherein the water pipe inclinometer comprises a 1 st bowl body, a 2 nd bowl body, a communicating water pipe and a calibrator, and the 1 st bowl body, the calibrator and the 2 nd bowl body are communicated through the communicating water pipe in sequence to form a whole water pipe inclinometer;
the system is provided with a micro-displacement system, a controller and a 1 st, 2 nd and 3 rd interferometer system;
the positions and the connection relations are as follows:
the 1 st, 2 nd and 3 rd micro-displacement platforms of the micro-displacement system are all placed on the ground and kept level with each other;
the 1 st water cylinder of the 1 st bowl body is arranged on the 1 st micro-displacement platform, the calibration water cylinder of the calibrator is arranged on the 2 nd micro-displacement platform, and the 2 nd water cylinder of the 2 nd bowl body is arranged on the 3 rd micro-displacement platform;
the calibration water cylinder of the calibrator is arranged between the 1 st water cylinder of the 1 st bowl body and the 2 nd water cylinder of the 2 nd bowl body and is communicated with each other through a communication water pipe;
the reflectors 7D of the 1 st, 2 nd and 3 rd interferometer systems are respectively arranged above the 1 st, 2 nd and 3 rd micro-displacement platforms;
the controller is respectively connected with the piezoelectric ceramics of the 1 st, 2 nd and 3 rd micro-displacement platforms, and the calibration rod of the calibrator is connected with the 1 st, 2 nd and 3 rd interferometer systems.
The invention has the following advantages and positive effects:
(1) "three-stage" structure: the water cylinder and the calibration device are split into three parts, and the micro-motion devices are respectively arranged below the three parts, but the three parts are also an interrelated whole, and the three parts are proportionally lifted or lowered through the controller, so that the three parts are always in the same plane, and the inclination change of the ground can be approximately simulated; the three-section structure not only does not damage the integrity of the water pipe inclinometer, but also reduces the detection error caused by the calibration of the calibration device;
(2) diversification of calibration signals: the novel structure realizes the input by using the controller, not only can input the needed step quantity, but also can realize sinusoidal signals, single-point output and the like, and lays a good foundation for the detection of key parameters of the water pipe inclinometer;
(3) the precision is higher: when the piezoelectric ceramic is used as an input source, the output precision of the piezoelectric ceramic can reach the nanometer level, which also provides possibility for detecting the resolution of the water pipe inclinometer.
Drawings
FIG. 1 is a schematic view of the structure of a water pipe inclinometer;
fig. 2 is a schematic structural diagram of a complete machine detection system of the water pipe inclinometer.
In the figure:
10-1 st bowl;
11-1 water cylinder, 12-1 float;
20-2 nd bowl;
21-2 nd water cylinder, 22-2 nd float;
30-communicating a water pipe;
40-a calibrator;
41-calibration water cylinder, 42-calibration rod;
50-a micro-displacement system, wherein,
51-1 st micro-displacement platform,
5A-linear guide rail, 5B-piezoelectric ceramics, 5C-supporting platform,
52-a 2 nd micro-displacement platform,
53-3 rd micro-displacement platform;
60-controller.
70-1 st interferometer system;
7A-interferometer holder; 7B-interferometers; 7C-interference mirror, 7D-mirror, 7E-interference mirror support;
80-2 nd interferometer system;
90-3 rd interferometer system.
Detailed Description
The following detailed description is made with reference to the accompanying drawings and examples:
nail and system
1. Overall (L)
As shown in fig. 1 and 2, the system comprises a water pipe inclinometer which is an object to be detected, wherein the water pipe inclinometer comprises a 1 st bowl body 10, a 2 nd bowl body 20, a communicating water pipe 30 and a calibrator 40, and the 1 st bowl body 10, the calibrator 40 and the 2 nd bowl body 20 are communicated sequentially through the communicating water pipe 30 to form a whole water pipe inclinometer;
provided with a micro displacement system 50, a controller 60 and 1 st, 2 nd, 3 rd interferometer systems 70, 80, 90;
the positions and the connection relations are as follows:
the 1 st, 2 nd and 3 rd micro-displacement platforms 51, 52 and 53 of the micro-displacement system 50 are all placed on the ground and kept horizontal with each other;
the 1 st water cylinder 11 of the 1 st bowl body 10 is arranged on the 1 st micro-displacement platform 51, the calibration water cylinder 41 of the calibrator 40 is arranged on the 2 nd micro-displacement platform 52, and the 2 nd water cylinder 21 of the 2 nd bowl body 20 is arranged on the 3 rd micro-displacement platform 53;
the calibration water cylinder 41 of the calibrator 40 is installed between the 1 st water cylinder 11 of the 1 st bowl 10 and the 2 nd water cylinder 21 of the 2 nd bowl 20 and is communicated with each other through the communication water pipe 30;
the mirrors 7D of the 1 st, 2 nd, 3 rd interferometer systems 70, 80, 90 are placed above the 1 st, 2 nd, 3 rd micro displacement stages 51, 52, 53, respectively;
the controller 60 is connected to the piezo-ceramic 5B of the 1 st, 2 nd, 3 rd micro-displacement stages 51, 52, 53, respectively, the calibration rod 42 of the calibrator 40 and the 1 st, 2 nd, 3 rd interferometer systems 70, 80, 90.
2. Functional component
1. 1 st bowl 10
1) 1 st water tank 11
The 1 st water tank 11 is a non-cover barrel-shaped container and is made of heat-resistant glass;
the functions are as follows: distilled water is stored, and the inclination amount of the crust change is reflected by the change of the inner liquid level.
2) 1 st float 12
1 st float 12 is a conical hollow float made of heat-resistant glass;
the functions are as follows: float in the water of the 1 st water tank 11 to accurately reflect the change of the liquid level in the 1 st water tank 11.
2. 2 nd bowl 20
The 2 nd bowl 20 is identical in structure and function to the 1 st bowl 10.
3. Communication water pipe 30
The communicating water pipe 30 is a long glass pipe and is connected with the 1 st bowl body 10, the 2 nd bowl body 20 and the calibrator 40;
the functions are as follows: the distilled water in the interconnected 1 st bowl 10, 2 nd bowl 20 and calibrator 40 is free flowing.
4. Calibrator 40
The calibrator 40 comprises a calibration water cylinder 41 and a calibration rod 42;
the functions are as follows: the liquid level in the calibration cylinder 41 is adjusted by the up-and-down expansion and contraction of the calibration rod 42.
1) Calibration water vat 41
The calibration cylinder 41 is a circular container made of heat-resistant glass;
the functions are as follows: distilled water is stored, and the change of the liquid level is regulated by changing the depth of the calibration rod 42 inserted into the calibration water cylinder 41, so that the inclination of the crust change is reflected.
2) Calibration rod 42
The calibration rod 42 is a long round rod, is made of heat-resistant glass, is internally provided with piezoelectric ceramics, and can be adjusted to be inserted into the calibration water cylinder 41 through the controller 60;
the functions are as follows: the liquid level in the calibration cylinder 41 is adjusted.
5. Micro displacement system 50
The micro-displacement system 50 comprises a 1 st micro-displacement platform 51, a 2 nd micro-displacement platform 52 and a 3 rd micro-displacement platform 53 which are identical in structure;
the 1 st micro-displacement platform 51 is placed on the ground, and the 1 st bowl 10 and the mirror 7D of the 1 st interferometer system 70 are placed on the 1 st micro-displacement platform 51;
the 2 nd micro-displacement platform 52 is placed on the ground, and the 2 nd micro-displacement platform 52 is placed with the scaler 40 and the mirror 7D of the 2 nd interferometer system 80;
the 3 rd micro-displacement stage 53 is placed on the ground, and the 2 nd bowl 20 and mirror 7D of the 3 rd interferometer system 90 are placed on the 3 rd micro-displacement stage 53;
each micro-displacement platform comprises a linear guide rail 5A, piezoelectric ceramics 5B and a supporting platform 5C; 3 linear guide rails 5A are uniformly distributed and connected between the outer edges of the upper and lower circular indium steel plates of the supporting platform 5C, and piezoelectric ceramics 5B are connected to the centers of the upper and lower circular indium steel plates of the supporting platform 5C.
The method is characterized in that:
(1) when the lengths of the communicating water pipes 30 of the water pipe inclinometers are different, the distances of the 1 st, 2 nd and 3 rd micro-displacement platforms 51, 52 and 53 can be adjusted according to the lengths of the communicating water pipes 30, and the positions of the 1 st, 2 nd and 3 rd micro-displacement platforms 51, 52 and 53 and the 1 st, 2 nd and 3 rd interferometer systems 70, 80 and 90 are fixed according to the specific size of the baseline of the water pipe inclinometers, so that the complete machine test of the water pipe inclinometers with different lengths is realized;
(2) when the number of the pot bodies of the water pipe inclinometers is increased or additional devices are arranged, the number of the micro-displacement platforms of the micro-displacement system 50 can be increased according to the increased number of the pot bodies and the number of the additional devices, so that the test requirements of different types of water pipe inclinometers are met, and the complete machine test of the different types of water pipe inclinometers is realized;
(3) the detection system has a test mechanism with an output unit and a detection unit which are independent, and the 1 st, 2 nd and 3 rd micro-displacement platforms 51, 52 and 53 respectively correspond to the 1 st, 2 nd and 3 rd interferometer systems 70, 80 and 90; the 1 st, 2 nd and 3 rd micro-displacement platforms 51, 52 and 53 and the 1 st, 2 nd and 3 rd interferometer systems 70, 80 and 90 are independently controlled by the controller 60 to work cooperatively, so that the function of long-baseline complete machine test is realized.
1) Linear guide 5A
The linear guide rail 5A is a precise component moving in the vertical direction, and the upper and lower ends of the 3 linear guide rails 51 are respectively connected and fixed with round indium steel plates which are parallel to the upper and lower sides of the supporting platform 5C;
the functions are as follows: the supporting platform 5C is borne, so that the supporting platform 5C can only vertically move up and down, and the piezoelectric ceramics 5B are prevented from bearing lateral force.
2) Piezoelectric ceramics 5B
The piezoelectric ceramic 5B is a functional ceramic based on the inverse piezoelectric effect, the lower end of the piezoelectric ceramic 5B is fixed with the lower indium steel plate of the supporting platform 5C, and the upper end of the piezoelectric ceramic 5B is connected with the upper indium steel plate table top of the supporting platform 5C;
the functions are as follows: providing a small displacement output for the support platform 5C.
3) Support platform 5C
The support platform 5C is a component formed by two upper and lower parallel round indium steel plates, the center of the lower indium steel plate of the support platform 5C is provided with 1 piezoelectric ceramic mounting hole, and 3 linear guide rail mounting holes are uniformly distributed on the outer circle of the lower indium steel plate of the support platform 5C;
the functions are as follows: the upper indium steel plate of the supporting platform 5C is used as a table top for placing a bowl body to be tested, and the lower indium steel plate of the supporting platform 5C is used for fixing the piezoelectric ceramics 5B and the linear guide rail 5A.
6. Controller 60
The controller 60 is a dedicated piezo ceramic control system and laser interferometer PC component, such as a dedicated E01 series piezo ceramic drive power supply and PC.
7. 1 st interferometer system 70
Interferometer system 70 1 includes interferometer holder 7A, interferometer 7B, interferometer mirror 7C, mirror 7D, and interferometer mirror holder 7E;
the positions and the connection relations are as follows:
the interferometer support 7A is fixed on the ground, the interferometer 7B is placed on the interferometer support 7A, the interferometer support 7E is fixedly installed on the ground on the left side of the 1 st micro-displacement platform 51, the interferometer 7C is placed on the interferometer support 7E, the interferometer 7B is identical to the interferometer 7C in height, the reflector 7D is fixed on the 1 st micro-displacement platform 51, and the interferometer 7C is aligned with the reflector 7D up and down.
The functions are as follows: the vertical displacement amount output from the 1 st micro displacement stage 51 was measured.
1) Interferometer holder 7A
The interferometer bracket 7A is formed by connecting 4 screw rods with an upper metal flat plate and a lower metal flat plate through threads;
the functions are as follows: the height position of the interferometer 7B is adjusted so that the two beams of light scattered by the interferometer 7C pass through the reflecting mirror and then overlap with a point of the laser head.
2) Interferometer 7B
The functions are as follows: for measuring the actual output displacement of the 1 st bowl 10 in the vertical direction.
3) Interference mirror 7C
The interference mirror 7C consists of a spectroscope and a reflecting mirror;
the functions are as follows: the laser emitted by the laser head is dispersed into two beams of light through a spectroscope, and one beam of light is reflected back to the laser head through a reflector.
4) Mirror 7D
The reflecting mirror 7D is an optical element having a function of reflecting light;
the functions are as follows: and the other beam of light dispersed by the spectroscope is reflected back to the laser head.
5) Interference mirror support 7E
The interference mirror bracket 7E is formed by connecting 1 thick screw rod with an upper metal flat plate and a lower metal flat plate through threads, the lower metal flat plate of the interference mirror bracket 7E is fixed on the ground at the left side of the 1 st micro-displacement platform 51, and the upper metal flat plate of the interference mirror bracket 7E is arranged above the 1 st micro-displacement platform 51;
the functions are as follows: for placing the interference mirror 7C.
8. 2 nd interferometer system
The 2 nd interferometer system has the same structure as the 1 st interferometer system;
the function is as follows: the amount of vertical displacement output from the 2 nd micro-displacement stage 52 was measured.
9. 3 rd interferometer system
The 3 rd interferometer system has the same structure as the 1 st interferometer system;
the function is as follows: the amount of displacement in the vertical direction output from the 3 rd micro displacement stage 53 is measured.
3. The working principle of the system
The system is mainly divided into a laser interferometer detection unit, namely 1 st, 2 nd and 3 rd interferometer systems 70, 80 and 90 and a micro-displacement output unit based on piezoelectric ceramics, namely a micro-displacement system 50; simulating the movement of the crust by the micro displacement system 50 as input to the water pipe inclinometer; the actual displacement output based on the micro displacement system 50 is recorded by the 1 st, 2 nd, 3 rd interferometer system 70, 80, 90.
1. Detection unit of laser interferometer
Since the micro displacement system 50 is placed under the 1 st bowl 10, the calibrator 40 and the 2 nd bowl 20, the detection of the actual output displacement is required for these 3 points; before actual detection, the position of the laser interferometer needs to be adjusted, so that the light emitted by the laser head can be dispersed into two beams of light through the interference mirror and can be finally overlapped on the laser head part through the two reflectors respectively;
during detection, the 1 st, 2 nd and 3 rd interferometer systems 70, 80 and 90 record displacement variation amounts of the 1 st micro-displacement platform 51, the 2 nd micro-displacement platform 52 and the 3 rd micro-displacement platform 53 at the same time, and key parameters of the water pipe inclinometer are calculated through multiple detection.
2. Micro-displacement output unit based on piezoelectric ceramics
The 3 micro displacement platforms 51, 52 and 53 of the micro displacement system 50 are controlled by the controller 60 to output linear displacement, and the 1 st bowl 10 is lifted by 2ΔhThe calibrator 40 is raised by deltahThe 2 nd bowl 20 is stationary, and from the baseline length L of the plumbing meter, the simulated ground tilt angle can be found as:
due to deltahThe distance of rise is typically tens of microns, while the baseline length of the plumbing meter is 1m or 10m, thus the simulated tilt angle is
。
Second detection method
1. The detection method comprises the following steps:
(1) selecting any measuring point in the working range of the instrument, after the instrument is stable, sequentially unidirectionally regulating the micro displacement of the micro displacement platform driven by the piezoelectric ceramic for 3 times to change the water level of the bowl body (measured by an interferometer), wherein the increment of each change is 1/2 multiplied by 0.0002 "(10 m baseline 0.0025 mu m,30m baseline 0.007E mu m), recording the output reading of the instrument, and calculating the resolution;
(2) the method comprises the steps of utilizing a water pipe instrument self-calibration device to send an instruction to piezoelectric ceramics of a micro displacement system 50, controlling a calibration rod of a calibration device to move upwards or downwards, recording output values of a water pipe instrument calibration process by data acquisition of water level change of a pot body, and calculating single-end sensitivity (voltage change caused by each micron) of the water pipe instrument by taking a platform height change H recorded by an interferometer as a standard value;
(3) in the direct range, the piezoelectric ceramic 5B of the micro-displacement system 50 or the calibration rod 42 of the calibration device 40 is displaced, the output voltage is read and the inclination variation y is calculated according to the 10% interval variation (step distance is 20 μm or actual measurement value) of the full scale value (200 μm or interferometer actual measurement value) i (output voltage x grid value), calculating linearity error of the water pipe instrument;
(4) the whole instrument is arranged on the micro displacement system 50, a vertical micro-motion signal is added to the micro displacement system 50 through the piezoelectric ceramic 5B, the laser interferometer 7B records the displacement of the micro displacement system 50 and converts the inclination amount, the high-speed data acquisition device records the response curve of the inclinometer under the action of the step signal, and the equivalent transfer function of the instrument is calculated by fitting; the high end cut-off frequency, i.e. the instrument bandwidth, is obtained from the transfer function.
2. The micro-displacement system 50 of the present detection system may perform as desired:
(1) when the lengths of the communicated water pipes (30) of the water pipe inclinometers are different, the distances of the 1 st, 2 nd and 3 rd micro-displacement platforms (51, 52 and 53) can be adjusted according to the lengths of the communicated water pipes (30), the positions of the 1 st, 2 nd and 3 rd micro-displacement platforms (51, 52 and 53) and the 1 st, 2 nd and 3 rd interferometer systems (70, 80 and 90) are fixed according to the specific sizes of the base lines of the water pipe inclinometers, and the complete machine test of the water pipe inclinometers with different lengths is realized;
(2) when the number of the pot bodies of the water pipe inclinometers is increased or additional devices are arranged, the number of the micro-displacement platforms of the micro-displacement system (50) can be increased according to the increased number of the pot bodies and the number of the additional devices, so that the test requirements of different types of water pipe inclinometers are met, and the complete machine test of the different types of water pipe inclinometers is realized;
(3) the detection system has an independent testing mechanism of an output unit and a detection unit, and the 1 st, 2 nd and 3 rd micro-displacement platforms (51, 52 and 53) respectively correspond to the 1 st, 2 nd and 3 rd interferometer systems (70, 80 and 90); the 1 st, 2 nd and 3 rd micro-displacement platforms (51, 52 and 53) and the 1 st, 2 nd and 3 rd interferometer systems (70, 80 and 90) are independently controlled by a controller (60) to cooperatively work, so that the function of long-baseline complete machine test is realized.
Claims (2)
1. A complete machine detection system of a water pipe inclinometer is characterized in that:
the water pipe inclinometer comprises a detected object, namely a water pipe inclinometer, wherein the water pipe inclinometer comprises a 1 st bowl body (10), a 2 nd bowl body (20), a communicated water pipe (30) and a calibrator (40), and the 1 st bowl body (10), the calibrator (40) and the 2 nd bowl body (20) are communicated sequentially through the communicated water pipe (30) to form a whole water pipe inclinometer;
is provided with a micro-displacement system (50), a controller (60) and a 1 st, 2 nd and 3 rd interferometer system (70, 80, 90);
the positions and the connection relations are as follows:
the 1 st, 2 nd and 3 rd micro-displacement platforms (51, 52 and 53) of the micro-displacement system (50) are all placed on the ground and kept horizontal;
the 1 st water cylinder (11) of the 1 st bowl body (10) is arranged on the 1 st micro-displacement platform (51), the calibration water cylinder (41) of the calibrator (40) is arranged on the 2 nd micro-displacement platform (52), and the 2 nd water cylinder (21) of the 2 nd bowl body (20) is arranged on the 3 rd micro-displacement platform (53);
the calibration water cylinder (41) of the calibrator (40) is arranged between the 1 st water cylinder (11) of the 1 st bowl body (10) and the 2 nd water cylinder (21) of the 2 nd bowl body (20) and is communicated with each other through a communication water pipe (30);
the mirrors (7D) of the 1 st, 2 nd, 3 rd interferometer systems (70, 80, 90) are placed above the 1 st, 2 nd, 3 rd micro-displacement stages (51, 52, 53), respectively;
the controller (60) is respectively connected with piezoelectric ceramics (5B) of the 1 st, 2 nd and 3 rd micro-displacement platforms (51, 52 and 53), and a calibration rod (42) of the calibrator (40) is connected with the 1 st, 2 nd and 3 rd interferometer systems (70, 80 and 90);
the 1 st interferometer system (70), the 2 nd interferometer system (80) and the 3 rd interferometer system (90) have the same structure;
the 1 st interferometer system (70) comprises an interferometer bracket (7A), an interferometer (7B), an interferometer mirror (7C), a reflecting mirror (7D) and an interferometer mirror bracket (7E);
the positions and the connection relations are as follows:
the interferometer support (7A) is fixed on the ground, the interferometer (7B) is placed on the interferometer support (7A), the interferometer support (7E) is fixedly installed on the ground at the left side of the 1 st micro-displacement platform (51), the interferometer (7C) is placed on the interferometer support (7E), the interferometer (7B) and the interferometer (7C) are the same in height, the reflector (7D) is fixed on the 1 st micro-displacement platform (51), and the interferometer (7C) and the reflector (7D) are aligned vertically;
the micro-displacement system (50) comprises a 1 st micro-displacement platform (51), a 2 nd micro-displacement platform (52) and a 3 rd micro-displacement platform (53) which are identical in structure;
a 1 st bowl (10) and a mirror (7D) of a 1 st interferometer system (70) are placed on a 1 st micro displacement platform (51);
a reflector (7D) of the calibrator (40) and the 2 nd interferometer system (80) is placed on the 2 nd micro-displacement platform (52);
a mirror (7D) of the 2 nd bowl (20) and the 3 rd interferometer system (90) is placed on the 3 rd micro displacement platform (53);
each micro-displacement platform comprises a linear guide rail (5A), piezoelectric ceramics (5B) and a supporting platform (5C); 3 linear guide rails (5A) are uniformly distributed and connected between the outer edges of the upper and lower circular indium steel plates of the supporting platform (5C), and piezoelectric ceramics (5B) are connected to the centers of the upper and lower circular indium steel plates of the supporting platform (5C).
2. The detection method of the complete machine detection system of the water pipe inclinometer based on claim 1 is characterized by comprising the following steps:
(1) selecting any measuring point in the working range of the instrument, after the instrument is stable, sequentially unidirectionally adjusting the micro displacement of the micro displacement platform driven by the piezoelectric ceramic for 3 times to change the water level of the bowl body, wherein the increment of each change is 1/2 multiplied by 0.0002', recording the output reading of the instrument, and calculating the resolution;
(2) the method comprises the steps of utilizing a water pipe instrument self-calibration device to send an instruction to piezoelectric ceramics of a micro displacement system (50), controlling a calibration rod of a calibration device to move upwards or downwards, recording output values of a data acquisition recording water pipe instrument calibration process of the water level change of a pot body, and calculating single-end sensitivity of the water pipe instrument by taking a platform height change delta H recorded by an interferometer as a standard value;
(3) in the direct range, the piezoelectric ceramic (5B) of the micro-displacement system (50) or the calibration rod (42) of the calibrator (40) generates displacement, the variation is carried out at intervals of 10% of the full-scale value, the output voltage is read, and the inclination variation y is calculated i Calculating the linearity error of the water pipe instrument;
(4) the whole instrument is arranged on a micro-displacement system (50), a vertical micro-motion signal is added to the micro-displacement system (50) through piezoelectric ceramics (5B), a laser interferometer (7B) records the displacement of the micro-displacement system (50) and converts the inclination amount, a high-speed data acquisition device records the response curve of the inclinometer under the action of a step signal, and the equivalent transfer function of the instrument is calculated by fitting; the high end cut-off frequency, i.e. the instrument bandwidth, is obtained from the transfer function.
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