CN110276470B - 探索装置、探索方法以及等离子处理装置 - Google Patents

探索装置、探索方法以及等离子处理装置 Download PDF

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CN110276470B
CN110276470B CN201811578970.4A CN201811578970A CN110276470B CN 110276470 B CN110276470 B CN 110276470B CN 201811578970 A CN201811578970 A CN 201811578970A CN 110276470 B CN110276470 B CN 110276470B
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CN110276470A (zh
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奥山裕
大森健史
栗原优
中田百科
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Hitachi High Tech Corp
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    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
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    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
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    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
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CN201811578970.4A 2018-03-14 2018-12-21 探索装置、探索方法以及等离子处理装置 Active CN110276470B (zh)

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JP7137943B2 (ja) 2018-03-20 2022-09-15 株式会社日立ハイテク 探索装置、探索方法及びプラズマ処理装置
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CN113287123B (zh) * 2019-12-03 2024-12-31 株式会社日立高新技术 搜索装置、搜索程序以及等离子处理装置
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