CN110270755A - 一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法 - Google Patents
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Abstract
一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,首先将多壁碳纳米管粉末在十二烷基硫酸钠水溶液中超声得到均匀分散的多壁碳纳米管水溶液,然后利用迈耶棒涂布的方法将多壁碳纳米管水溶液涂布到氧气等离子体处理过的二氧化硅基底表面自然风干成膜,最后利用飞秒激光对薄膜进行处理;本发明方法简单,无需精准定位,多壁碳纳米管薄膜的电学性能在合适的飞秒激光能量下得到改善。
Description
技术领域
本发明涉及激光微纳制造技术领域,具体涉及一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法。
背景技术
随着电子设备和集成微/纳米机电系统(MEMS/NEMS)的规模的减小,纳米器件的电学性已经引起广泛的关注,其中纳米材料的电学性能在控制纳米/微器件的性能和稳定性方面起着至关重要的作用。在未来的MEMS/NEMS应用中,碳纳米管凭借着强度大、重量轻、电子结构特殊、稳定性高等特点,引起了研究的热潮。碳纳米管薄膜是碳纳米管应用的一种重要的形式,已经被广泛的应用到了场效应晶体管、电池电极、光电传感器等,这些应用的基础是碳纳米管薄膜的制备与其高的电学性能。目前,碳纳米管薄膜基本上都是随机分布的机械式搭连的薄膜,其相对较大的接触电阻阻碍其电学上的应用。因此迫切需要一种降低碳纳米管薄膜之间的接触电阻,改善其电学性能的方法。
发明内容
为了克服上述现有技术的缺点,本发明的目的在于提供一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,在不破坏多壁碳纳米管的本征结构前提下,用飞秒激光的能量去降低其接触电阻,改善多壁碳纳米管薄膜的电学性能,方法简单,方便大规模应用。
为了实现上述目的,本发明采用的技术方案为:
一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,包括以下步骤:
1)多壁碳纳米管水溶液的制备;
2)多壁碳纳米管薄膜的制备;
3)飞秒激光处理多壁碳纳米管薄膜。
所述的步骤1)多壁碳纳米管水溶液的制备是将20mg多壁碳纳米管粉末在十二烷基硫酸钠水溶液中超声得到0.02mg/mL多壁碳纳米管水溶液。
所述的多壁碳纳米管粉末,其标称纯度大于70%,直径在30-50nm之间,长度在10-20μm之间。
所述的步骤2)多壁碳纳米管薄膜的制备是采用迈耶棒涂布的方法将多壁碳纳米管水溶液涂布成厚度为1.5μm的多壁碳纳米管薄膜。
所述的迈耶棒采用挤压式工艺生产,挤压式设备型号为OSP-1.5/400,其涂布出的薄膜厚度为1.5μm,有效涂布宽度为300mm。
所述的步骤3)飞秒激光处理多壁碳纳米管薄膜中的飞秒激光类型为SPFIRE ACE-100F1K型飞秒脉冲激光器,其脉冲宽度为1000fs、波长为800nm。
本发明的有益效果为:
利用飞秒激光的无接触加工、多光子非线性吸收等特点降低机械式搭连的多壁碳纳米管薄膜之间的接触电阻,本发明较为简单,可以改善多壁碳纳米管薄膜的电学性能。
附图说明
图1为本发明实施例利用迈耶棒涂布的方法涂布的多壁碳纳米管薄膜的SEM图。
图2为本发明实施例飞秒激光提高多壁碳纳米管薄膜电学性能的实验光路图。
图3为本发明实施例所得的多壁碳纳米管薄膜电阻随激光能量变化的趋势图。
图4为本发明实施例所得的多壁碳纳米管薄膜的方阻随激光能量变化的趋势图。
图5为本发明实施例为飞秒激光能量为100mW处理过的多壁碳纳米管薄膜的SEM图。
具体实施工艺
下面结合附图和实施例对本发明作进一步详细说明。
一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,包括以下步骤:
1)多壁碳纳米管水溶液的制备:用去离子水配置质量浓度为1%的十二烷基硫酸钠溶液100mL,水浴超声将20mg多壁碳纳米管粉末混合到十二烷基硫酸钠水溶液中;然后使用角式超声机进行进一步超声分散,超声的具体参数:功率60W,超声时间1秒,间隔时间1秒,超声时间6小时,得到均匀分散的多壁碳纳米管水溶液;
2)多壁碳纳米管薄膜的制备:利用夹子固定好氧气等离子体处理过的二氧化硅基底;然后利用移液器将多壁碳纳米管水溶液滴到二氧化硅基底的前端,再迅速将迈耶棒自上而下的转动,使得多壁碳纳米管水溶液均匀铺展开,在然后将其放置超净室自然风干成膜,如图1所示;
3)飞秒激光处理多壁碳纳米管薄膜:利用如图2所示的飞秒激光提高多壁碳纳米管薄膜电学性能的实验光路中的计算机对飞秒激光器输出的激光能量和载物台的运动速度进行控制,使得激光光束垂直透过焦距为50mm的柱面镜后,对迈耶棒涂布成的多壁碳纳米管薄膜进行处理。
参照图3,本实施例得到多壁碳纳米管薄膜电阻随飞秒激光激光能量变化的趋势是先减小后增大,在激光能量为80mW时电阻达到最小;参照图4,本实施例得到多壁碳纳米管薄膜方阻随飞秒激光激光能量变化的趋势也是先减小后增大,在激光能量为80mW时方阻达到最小;参照图5,本实施例在激光能量为100mW时,多壁碳纳米管薄膜由于飞秒激光的能量太大,击穿了薄膜,从而影响了其电学性能。综合飞秒激光的非线性吸收的特点,它能在不破坏多壁碳纳米管薄膜的本征结构的前提下,飞秒激光能量在80mW时,能够降低了其接触电阻,改善多壁碳纳米管薄膜的电学性能。
Claims (7)
1.一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于,包括以下步骤:
1)多壁碳纳米管水溶液的制备;
2)多壁碳纳米管薄膜的制备;
3)飞秒激光处理多壁碳纳米管薄膜。
2.根据权利要求1所述的一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于:所述的步骤1)多壁碳纳米管水溶液的制备是将20mg多壁碳纳米管粉末在十二烷基硫酸钠水溶液中超声得到0.2mg/mL的多壁碳纳米管水溶液。
3.根据权利要求2所述的一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于:所述的多壁碳纳米管粉末,其标称纯度大于70%,直径在30-50nm之间,长度在10-20μm之间。
4.根据权利要求1所述的一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于:所述的步骤2)多壁碳纳米管薄膜的制备是采用迈耶棒涂布的方法将多壁碳纳米管水溶液涂布成厚度为1.5μm的多壁碳纳米管薄膜。
5.根据权利要求4所述的一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于:所述的迈耶棒采用挤压式工艺生产,挤压式设备型号为OSP-1.5/400,其涂布出的薄膜厚度为1.5μm,有效涂布宽度为300mm。
6.根据权利要求1所述的一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于:所述的步骤3)飞秒激光处理多壁碳纳米管薄膜中的飞秒激光类型为SPFIREACE-100F1K型飞秒脉冲激光器,其脉冲宽度为1000fs、波长为800nm。
7.根据权利要求1所述的一种利用飞秒激光改善多壁碳纳米管薄膜电学性能的方法,其特征在于,包括以下步骤:
1)多壁碳纳米管水溶液的制备:用去离子水配置质量浓度为1%的十二烷基硫酸钠溶液100mL,水浴超声将20mg多壁碳纳米管粉末混合到十二烷基硫酸钠水溶液中;然后使用角式超声机进行进一步超声分散,超声的具体参数:功率60W,超声时间1秒,间隔时间1秒,超声时间6小时,得到均匀分散的多壁碳纳米管水溶液;
2)多壁碳纳米管薄膜的制备:利用夹子固定好氧气等离子体处理过的二氧化硅基底;然后利用移液器将多壁碳纳米管水溶液滴到二氧化硅基底的前端,再迅速将迈耶棒自上而下的转动,使得多壁碳纳米管水溶液均匀铺展开,在然后将其放置超净室自然风干成膜;
3)飞秒激光处理多壁碳纳米管薄膜:利用飞秒激光提高多壁碳纳米管薄膜电学性能的实验光路中的计算机对飞秒激光器输出的激光能量和载物台的运动速度进行控制,使得激光光束垂直透过焦距为50mm的柱面镜后,对迈耶棒涂布成的多壁碳纳米管薄膜进行处理。
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