CN110064611A - The manufacturing method of processing unit (plant) and product - Google Patents
The manufacturing method of processing unit (plant) and product Download PDFInfo
- Publication number
- CN110064611A CN110064611A CN201910047528.7A CN201910047528A CN110064611A CN 110064611 A CN110064611 A CN 110064611A CN 201910047528 A CN201910047528 A CN 201910047528A CN 110064611 A CN110064611 A CN 110064611A
- Authority
- CN
- China
- Prior art keywords
- hopper
- cleaning roller
- cleaning
- liquid supply
- supply mouth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 159
- 239000007788 liquid Substances 0.000 claims abstract description 124
- 230000007246 mechanism Effects 0.000 claims abstract description 67
- 238000000034 method Methods 0.000 claims abstract description 15
- 230000008569 process Effects 0.000 claims abstract description 14
- 238000003860 storage Methods 0.000 claims description 34
- 239000012530 fluid Substances 0.000 claims description 28
- 238000005192 partition Methods 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 47
- 239000000758 substrate Substances 0.000 description 37
- 239000000243 solution Substances 0.000 description 31
- 238000005520 cutting process Methods 0.000 description 28
- 239000011347 resin Substances 0.000 description 16
- 229920005989 resin Polymers 0.000 description 16
- 238000007789 sealing Methods 0.000 description 16
- 230000002950 deficient Effects 0.000 description 15
- 239000000203 mixture Substances 0.000 description 13
- 238000007689 inspection Methods 0.000 description 9
- 230000007723 transport mechanism Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007651 thermal printing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Dicing (AREA)
- Cleaning In General (AREA)
- Details Of Cutting Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention is that processing bit is made to be not easy to be attached to the processing unit (plant) for the cleaning roller being impregnated in cleaning solution and the manufacturing method of product, the processing unit (plant) includes: organisation of working (6A), organisation of working (6B), implements to process to machined object (W)；And wiper mechanism (8), the machined object (W) for being implemented with processing is cleaned, wiper mechanism (8) includes: hopper (81), stores cleaning solution；And cleaning roller (82), it is rotated in the state of in cleaning solution in a part is impregnated in the hopper (81), and it is contacted with the machined object (W) for being implemented with processing for the top for being located at hopper (81), and configured in a manner of across cleaning roller (82) to the liquid supply mouth (83) of the interior supply cleaning solution of hopper (81), with the liquid outlet (84) of the discharge cleaning solution out of hopper (81).
Description
Technical field
The present invention relates to the manufacturing methods of a kind of processing unit (plant) and product.
Background technique
In the past, as shown in Patent Document 1 like that, after the cutting workpiece that will be used as machined object is monolithic, make rotating brush
Etc. cleaning rollers contact the workpiece through cutting off, thus it is clear to carry out to be attached to the processing bits such as the cutting bits of the workpiece for removal
It washes.
[existing technical literature]
[patent document]
[patent document 1] Japanese Patent Laid-Open 2002-28583 bulletin
Summary of the invention
[problem to be solved by the invention]
But there is processing bit in the process of cleaning and be attached to cleaning roller, and the case where this processing bit can not be removed.It is such
In the case of, become and workpiece is cleaned using the cleaning roller for being attached with processing bit, so that there are the possibility of cleaning ability decline
Property.
Herein, the present invention is to put in order to solve described problem, and major subjects are that efficiency removes well and are attached to
The processing bit of cleaning roller.
[technical means to solve problem]
That is, processing unit (plant) of the invention includes: organisation of working, machined object is implemented to process；And wiper mechanism, to reality
The machined object for applying the processing is cleaned, and the wiper mechanism includes: hopper, stores cleaning solution；And cleaning roller,
It is rotated in the state of in the cleaning solution that a part is impregnated in the hopper, and the reality with the top for being located at the hopper
Apply the machined object contact of the processing, and to supplied in the hopper cleaning solution liquid supply mouth, with from the storage
The liquid outlet of discharge cleaning solution configures in a manner of across the cleaning roller in liquid bath.
The manufacturing method of product of the invention includes: manufacturing procedure, implements to process to machined object；And cleaning process,
The machined object for being implemented with the processing is cleaned, the cleaning process is carried out using wiper mechanism, the cleaning
Mechanism includes: hopper, stores cleaning solution；And cleaning roller, it is impregnated in the cleaning solution in the hopper in a part
It rotates under state, and is contacted with the machined object for being implemented with the processing for the top for being located at the hopper, to the reservoir
The liquid supply mouth of cleaning solution is supplied in slot and the liquid outlet of cleaning solution is discharged out of described hopper across the cleaning roller
Mode configure.
[The effect of invention]
The present invention formed according to this, can efficiency remove the processing bit for being attached to cleaning roller well.
Detailed description of the invention
Fig. 1 is the plan view for schematically showing the composition of disconnecting device of present embodiment.
Fig. 2 is the plan view for schematically showing the composition of wiper mechanism of the embodiment.
Fig. 3 is the sectional view for schematically showing the composition of wiper mechanism of the embodiment.
Fig. 4 is the sectional view for schematically showing the composition of wiper mechanism of variant embodiment.
Fig. 5 is the sectional view for the composition of wiper mechanism for schematically showing variant embodiment and an example for removing component
Partial plan layout.
[explanation of symbol]
2: tabular component feed mechanism
3: platform is used in cutting
4: mobile mechanism
5: rotating mechanism
6A, 6B: main shaft (organisation of working)
7,8: wiper mechanism
8A: liquid supply pipe
8B: liquid discharge pipe
9: transport mechanism
10: platform is used in inspection
11: camera
12: indexing platform
13: transfer mechanism
14: non-defective unit pallet
15: defective products pallet
61A, 61B: rotating knife
71: jet cleaning mechanism
72: drier
80: supporter
81: hopper
81a: bottom
81a1: rake
81b: sidewall portion
81H: opening portion
82: cleaning roller
82a: axle portion
82b: bristle
82x: central axis
83: liquid supply mouth
84: liquid outlet
85: supply pipe
86: water removal component
87: partition
88: The lid component
89: removal component
89a: protrusion
100: disconnecting device (processing unit (plant))
A: tabular component feed unit
B: tabular component cutting unit
C: inspection unit
CTL: control unit
D: accepting unit
P: product
W: hermetic sealing substrate (having sealed tabular component, machined object)
W': substrate (having been turned off tabular component) is had been turned off
S1: the first fluid storage compartment
S2: the second fluid storage compartment
X, Y, Z, θ: direction
Specific embodiment
Then, example is enumerated to be illustrated in more details the present invention.Wherein, the present invention is not limited by the following description
It is fixed.
Processing unit (plant) of the invention is as described, comprising: organisation of working is implemented to process to machined object；And cleaning
The machined object for being implemented with the processing cleans in mechanism, and the wiper mechanism includes: hopper, stores cleaning solution；With
And cleaning roller, rotated in the state of in the cleaning solution that is impregnated in the hopper of a part, and be located at the hopper
Top be implemented with the processing machined object contact, and in the hopper supply cleaning solution liquid supply mouth,
It is configured in a manner of across the cleaning roller with the liquid outlet that cleaning solution is discharged out of described hopper.
If the processing unit (plant), then cleaning roller is revolved in the state that a part is impregnated in the cleaning solution in hopper
Turn, and contact machined object to be cleaned, so the processing bit for being attached to cleaning roller is cleaned liquid removal.
Herein, exist and be trapped in hopper in hopper from the processing bit that cleaning roller removes, and be attached to cleaning roller
A possibility that.Since liquid supply mouth of the invention configures in a manner of across cleaning roller with liquid outlet, so being directed to cleaning roller
And the flowing of cleaning solution is formed from liquid supply mouth towards liquid outlet.As a result, cleaning solution collides cleaning roller from a direction,
Afterwards, the cleaning solution is discharged towards the outside from liquid outlet, so the processing bit and cleaning solution that remove in hopper from cleaning roller
It is discharged together.Thereby, it is possible to make the processing bit being present in hopper be not easy to be attached to cleaning roller.
The processing bit of weight weight is easy and is stranded in the bottom of hopper.This processing bit sunk has because of cleaning roller
It rotates and is stirred, to be moved to water surface side, and a possibility that be again attached to cleaning roller.
In order to suitably solve described problem, it is generally desirable to which the liquid outlet is formed in the bottom of the hopper.
If the composition, then can efficiency the processing bit for sinking down into the bottom of hopper is discharged well, so as to
Reduce the attachment again towards cleaning roller.
In order to reduce the setting area of wiper mechanism, it is generally desirable to which the liquid supply mouth is formed in the bottom of the hopper
Portion.In the case, the bottom of the liquid supply pipe and hopper that are connected to liquid supply mouth connects.In the composition, in order to anti-
It is sprayed on cleaning solution only from liquid supply mouth, it is generally desirable to which the wiper mechanism further includes in a manner of covering the liquid supply mouth
The The lid component of setting.
It is clear at one stroke in order to which substrate will be had been turned off for by substrate etc. is had been turned off made of machined object singualtion
It washes, it is generally desirable to the cylindrical shape of cleaning roller, and be rotated about its center axis.
In the case where the composition, it is generally desirable to which the liquid supply mouth and the liquid outlet are across the cleaning roller
The mode of central axis configure.
Keep the cleaning solution for flowing to cleaning roller more balanced to pass through, and equably carries out the processing bit for being attached to cleaning roller
Removal, it is generally desirable to which the hopper includes being set between the cleaning roller and the liquid supply mouth, is divided into the liquid and supplies
Second fluid storage compartment of the first fluid storage compartment and the cleaning roller side to mouth side, makes the cleaning solution from the first fluid storage compartment overflow
To the partition of second fluid storage compartment.By keeping the flowing of cleaning solution more balanced, the processing bit being stranded in hopper can also be made
Unbiased important place discharge.
In order to be easy to generate the flowing towards cleaning roller and liquid outlet, and it is easy to make to sink down into adding for the bottom of hopper
Work bits flow to liquid outlet, it is generally desirable to which the bottom of the hopper includes from liquid supply mouth side towards the liquid outlet
The rake of side decline.
If cleaning solution is only made to contact cleaning roller, there is a possibility that being unable to fully removal processing bit.Therefore, it is desirable that
The wiper mechanism further includes removal component, and the removal component is contacted in the top of the hopper with the cleaning roller, is come
Removal is attached to the processing bit of the cleaning roller.
In addition, the manufacturing method of product of the invention includes: manufacturing procedure, machined object is implemented to process；And cleaning
Process cleans the machined object for being implemented with the processing, and the cleaning process is carried out using wiper mechanism, described clear
Washing machine structure includes: hopper, stores cleaning solution；And cleaning roller, it is impregnated in the cleaning solution in the hopper in a part
In the state of rotate, and contacted with the machined object for being implemented with the processing of top for being located at the hopper, and to institute
State the liquid supply mouth of supply cleaning solution in hopper, with the liquid outlet of the discharge cleaning solution out of described hopper across described
The mode of cleaning roller configures.
< one embodiment of the present invention >
Hereinafter, being illustrated referring to an embodiment of the attached drawing to processing unit (plant) of the invention.Furthermore as shown below
In any figure, for easy understanding suitably omitted or turgidly schematic depiction.To same component parts, mark same
Symbol and be suitable for omitting the description.
The overall structure > of < processing unit (plant)
As shown in Figure 1, the processing unit (plant) 100 of present embodiment be to the tabular component of the sealing W as machined object into
Row is cut off and the disconnecting device of the multiple product P of monolithic chemical conversion (cutting product).Disconnecting device 100 include tabular component feed unit A,
Tabular component cutting unit B, inspection unit C and accepting unit D are respectively as component parts.Each component parts (each unit A~
Cells D) can be carried out respectively relative to other component parts handling and it is replaceable.
It herein, is by the tabular components such as printed base plate or lead frame (lead frame) about tabular component W has been sealed
The multiple regions of clathrate are virtually divided into, it, will after the element (for example, semiconductor chip) of each region chip shape
A part or entirety of tabular component are formed through resin seal.The face that tabular component W has been sealed with substrate-side and resin
The face of side.Hermetic sealing substrate is cut off by using the cutting mechanism (organisation of working) for having rotating knife etc., and is with each region
Unit singualtion person becomes product P.Furthermore described below be used as has sealed tabular component W and has cut off to hermetic sealing substrate
Example.
Tabular component feed mechanism 2 is provided in tabular component feed unit A.It is equivalent to the sealing base of cut-off object
Plate W is moved out from tabular component feed mechanism 2, and is transferred to tabular component cutting unit B by transfer mechanism (not shown).In the presence of making
The substrate-side of hermetic sealing substrate W up come the case where transfer with make resin side up come the case where transfer.For example, ball
The W of hermetic sealing substrate of grid array package (Ball Grid Array Package, BGA) mode be make substrate-side it is face-up come
Transfer.On the other hand, as light emitting diode (light emitting diode, LED) is passed through using transparent resin material like that
Hermetic sealing substrate W mostly makes transferring up for resin side made of resin seal.In Fig. 1, to the close of cutting BGA mode
The case where sealing substrate W is illustrated.Thus, hermetic sealing substrate W is to make transferring up for substrate-side.
Disconnecting device 100 shown in FIG. 1 is the disconnecting device of single Cutting platform mode.Thus, it is cut off in tabular component single
One cutting platform 3 is set in first B.Cutting can be moved in the Y-direction of Fig. 1 with platform 3 using mobile mechanism 4, and can benefit
It is rotated with rotating mechanism 5 along the direction θ.In cutting with being loaded on platform 3 and adsorb hermetic sealing substrate W.Furthermore it will be embedded with point
Not Ju You elongated column-shaped shape, multiple contiguity imaging sensors (Contact Image Sensor), multiple thermal printings
Ceramic substrate (ceramic substrate), printed base plate (the printed wiring of head (Thermal Print Head) etc.
) etc. board in the case where singualtions, rotating mechanism 5 can be omitted.
Two main shaft (spindle) 6A, main shaft 6B are set in tabular component cutting unit B as cutting mechanism (processing
Mechanism).Disconnecting device 100 is that there are two the disconnecting devices that double main shafts of main shaft 6A, main shaft 6B are constituted for setting.Two main shaft 6A,
Main shaft 6B can be moved independently in the X direction.Rotating knife 61A, rotating knife are respectively arranged on two main shaft 6A, main shaft 6B
61B.It is rotated in the face comprising Y-direction and Z-direction respectively by the rotating knife 61A, rotating knife 61B close to cut off
Seal substrate W.
On each main shaft 6A, main shaft 6B, for example, in order to inhibit high-speed rotating rotating knife 61A, rotating knife 61B to generate
Frictional heat and be provided with towards be processed point injection cutting water a cutting water supply nozzle (not shown).It is flat by using cutting
Platform 3 and main shaft 6A, main shaft 6B relatively move to cut off hermetic sealing substrate W.It is shown in FIG. 1 through fixed main shaft 6A, main shaft 6B,
Move cutting along Y-direction with platform 3, the case where to cut off hermetic sealing substrate W.
In tabular component cutting unit B, be provided with wiper mechanism 7 and wiper mechanism 8, the wiper mechanism 7 to comprising
Hermetic sealing substrate W is cut off into the aggregate through multiple products P made of singualtion, that is, has been turned off substrate (having been turned off tabular component)
One of face (being the face of substrate-side in Fig. 1) of W' is cleaned, and the wiper mechanism 8 has been turned off the another of substrate W' to described
One face (being the face of resin side in Fig. 1) is cleaned.
Jet cleaning mechanism 71 and drier 72 have been wholely set in wiper mechanism 7.Cutting utilizes movement with platform 3
Mechanism 4 is moved back and forth along the Y direction linearly in the lower section of wiper mechanism 7.By cutting with platform 3 in wiper mechanism
Being moved back and forth to 7 lower straight formula, the face for having been turned off the substrate-side of substrate W' is cleaned by jet cleaning mechanism 71, and by
Drier 72 is dry.It can integrally move, can also be consolidated with jet cleaning mechanism 71 and the wiper mechanism 7 of drier 72
It is fixed.
In wiper mechanism 8, it is provided with the cleaning roller 82 that can be rotated using Y-direction as rotary shaft.To resin side
The top configuration of the wiper mechanism 8 that is cleaned of face have been turned off substrate W'.About having been turned off substrate W', the face of substrate-side by
Transport mechanism 9 adsorbs, and is thus fixed.In other words, having been turned off substrate W' makes the face-down of resin side and is fixed on transporter
Structure 9.Transport mechanism 9 can be mobile towards X-direction and Z-direction.Declined by transport mechanism 9 and moved back and forth in the X direction, had been turned off
The face of the resin side of substrate W' is cleaned roller 82 and cleans.It will can make to have been turned off the face drying of the resin side of substrate W' after cleaning
Drying section is set in wiper mechanism 8, may also set up in outside wiper mechanism.Drying section can be air blast (air blow) etc..
Inspection platform 10 is provided in inspection unit C.It has been turned off substrate W' and is transferred load to inspection platform 10.Inspection platform
10 are configured to move in the X direction, and can be rotated by axis of Y-direction.About through multiple products made of singualtion
P, by being checked using the camera 11 of inspection the face of resin side and the face of substrate-side, and be sorted for non-defective unit with it is bad
Product.The substrate W' that has been turned off checked out is transferred load to indexing platform (index table) 12.In inspection unit C, in order to match
The multiple product P for being placed in indexing platform 12 are transferred to pallet and are provided with multiple transfer mechanisms 13.
In accepting unit D, the non-defective unit pallet 14, the defective products pallet with receiving defective products that are provided with receiving non-defective unit
15.The product P for sorting as non-defective unit and defective products is accommodated to each pallet 14, pallet 15 using transfer mechanism 13.In Fig. 1, for
Each pallet 14, pallet 15 illustrate only one, but each pallet 14, pallet 15 be provided in accepting unit D it is multiple.In addition,
In accepting unit D, the non-defective unit pallet incorporating section stored with pallet 14 to the non-defective unit for having accommodated non-defective unit may also set up, to
The defective products pallet incorporating section and supply the empty pallet before receiving that the defective products of receiving defective products is stored with pallet 15
Empty pallet (receiving front tray) supply unit.
Furthermore in the present embodiment, control unit CTL is set in tabular component feed unit A, the control unit
CTL is set and is controlled to the movement of disconnecting device 100 or cutting condition, cleaning condition etc..It's not limited to that, can also incite somebody to action
Control unit CTL is set in other unit B~cells Ds.
The specific composition > of < wiper mechanism 8
Then the specific composition of wiper mechanism 8 is illustrated.
Wiper mechanism 8 especially as shown in Figures 2 and 3, comprising: storage water as cleaning solution hopper 81 and be located at
The cleaning roller 82 of the face contact of the resin side for having been turned off substrate W' of the top of hopper 81.
Hopper 81 is in the box shape for having opening portion 81H in upper surface, is stored to be cleaned to cleaning roller 82
Water.The hopper 81 of present embodiment has the bottom 81a in flat rectangular shape and is set to the bottom
The sidewall portion 81b on each side of 81a.In the hopper 81, a part of cleaning roller 82 is set as from the opening portion of upper surface
81H is impregnated in water.
In addition, being formed with the liquid that water is discharged to the liquid supply mouth 83 for supplying water in slot 81 and out of slot in hopper 81
Outlet 84.Supply pipe 85 is connected in liquid supply mouth 83, the supply pipe 85 from external water will supply to storage
Liquid bath 81.The not shown flow rate adjusting mechanism of water supplied from the supply pipe 85 becomes big with the water level in hopper 81
Fixed mode is caused to be adjusted.In addition, being received the waste fluid container to below being set to (not from the water that liquid outlet 84 is discharged
Diagram).Furthermore discharge pipe can also be connected to liquid outlet 84.
The cylindrical shape of cleaning roller 82, and rotated around central shaft 82x.The cleaning roller 82 is with central shaft 82x along Y
The mode in direction horizontally is arranged at the top of hopper 81.The cleaning roller 82 of present embodiment is in the outside of axle portion 82a week
Face is radially provided with bristle 82b, cylindrical rotating brush.
Cleaning roller 82 is configured to be impregnated in storage a part of (being specifically a part of the bristle 82b on circumferencial direction)
It is rotated in the state of in water in liquid bath 81.Specifically, the axial ends portion supported body of the axle portion 82a of cleaning roller 82
80 support to rotate freely, and rotatably driven using the motor (not shown) for being linked to axial one end.Furthermore it supports
Body 80 is provided separately with hopper 81, but the sidewall portion 81b of hopper 81 can also be used to constitute supporter 80.
In addition, wiper mechanism 8 includes the water removal component 86 to remove water contained in cleaning roller 82.This water removal component 86
What is be arranged for the central axis 82x along cleaning roller 82 is in rodlike component, is contacted in cleaning with the cleaning roller 82 of rotation.This
Water removal component 86 is contacted with the bristle 82b that rear direction has been turned off substrate W ' is come out from water, and removes water.
Moreover, being formed in the liquid supply mouth 83 and liquid outlet 84 of hopper 81 in the wiper mechanism 8 of present embodiment
It is configured in a manner of across cleaning roller 82.Liquid supply mouth 83 and liquid outlet 84 are both formed in the bottom 81a of hopper 81.
The liquid supply mouth 83 of present embodiment is formed at 2.Two liquid supply mouths 83 are preferably disposed on away from cleaning roller 82
The position of the roughly equal distance of central axis 82x, the i.e. position along Y-direction arrangement.In addition, two liquid supply mouths 83 are preferably disposed on
The substantially symmetric position in the Y direction the bottom 81a of hopper 81.Furthermore the quantity of liquid supply mouth 83 is not limited to two, both
It can be one, can also be three or more.In the case where forming three or more liquid supply mouths 83, in order to keep the flowing of water uniform
Change, it is generally desirable to be arranged at substantially equal intervals in the Y direction.
On the other hand, liquid outlet 84 is set as in the straight slit shape extended in the Y direction.Liquid outlet 84 is preferably with it
The direction that linear slit-shaped extends and the substantially parallel mode i.e. along the Y direction of central axis 82x of cleaning roller 82 are arranged.Again
Person, liquid outlet 84 can also be identically formed with multiple with liquid supply mouth 83.
Also, hopper 81 has partition 87, and the partition 87 will be divided into the first storage of 83 side of liquid supply mouth in slot 81
Liquid chamber S1, the second fluid storage compartment S2 with 82 side of cleaning roller.
The partition 87 is between cleaning roller 82 and liquid supply mouth 83, with substantially parallel with the central axis 82x of cleaning roller 82
Mode be arranged.It is roughly the same in the longitudinal direction of the height dimension of partition 87 when looking down.In addition, the height dimension of partition 87
It is set to lower than the height of the sidewall portion 81b of hopper 81.Being configured to water as a result, will not overflow from the sidewall portion 81b of hopper 81
Stream.
In the bottom 81a of hopper 81, liquid supply mouth 83 is located at the first side fluid storage compartment S1, and liquid outlet 84 is located at the second storage
The side liquid chamber S2.Moreover, crossing partition 87 from the water overflow of liquid supply mouth 83 storage to the first fluid storage compartment S1 and flowing into the second reservoir
Room S2.Herein, by storing the water for flowing into the first fluid storage compartment S1 from liquid supply mouth 83 to the first fluid storage compartment S1, width direction
Flow velocity unevenness in (Y-direction in Fig. 2) is mitigated.In addition, because of the water for flowing into the second fluid storage compartment S2 from the first fluid storage compartment S1
Partition 87 is crossed in overflow, and the flow velocity in width direction is more evenly changed.As a result, towards 82 flowing water of cleaning roller in the second fluid storage compartment S2
Flowing more evenly change in the axial direction of cleaning roller 82.
In the present embodiment, the direction of rotation of cleaning roller 82 is made to become the opposite direction of the flow direction of water (referring to figure
3).The flow direction of the moving direction of the bristle 82b of the cleaning roller 82 in water and water becomes opposite direction as a result, so when clear
It washes the dipping position (bristle 82b) of roller 82 and when water contacts, the power from water being subject to increases, to become easy removal attachment
In the processing bit of cleaning roller 82.
Also, wiper mechanism 8 further includes the The lid component 88 being arranged in a manner of covering liquid supply mouth 83.Due to this embodiment party
The liquid supply mouth 83 of formula is formed in the bottom 81a of hopper 81, so The lid component 88 is also disposed on the bottom 81a of hopper 81.
In addition, being provided with The lid component 88 to each liquid supply mouth 83.
The The lid component 88 in hopper 81 (specifically in the first fluid storage compartment S1) with liquid supply mouth 83 be separated by and
It is disposed above, in present embodiment, makes to divide to the water of inflow towards transverse direction (Y-direction) upward from liquid supply mouth 83
It dissipates.It is configured in Fig. 2 towards both direction dispersion along the Y direction.Furthermore The lid component 88 is removed as shown in Figure 2 with covering liquid
The whole mode of supply mouth 83 can also be constituted outside constituting in a manner of a part of covering liquid supply mouth 83.In addition, lid structure
Part 88 is not limited to the shape that section is in downward U-shaped, as long as part or all of covering liquid supply mouth 83.
The lid component 88 is set in a manner of covering liquid supply mouth 83 in this way, it will be from liquid supply mouth using The lid component 88
83 water dispersions flowed into, to further mitigate the unevenness of the flow velocity in the first fluid storage compartment S1.
The effect > of < present embodiment
Disconnecting device 100 according to the present embodiment, cleaning roller 82 are impregnated in the water in hopper 81 in a part
It is rotated under state, and contacts and have been turned off substrate W' to be cleaned, so the processing bit for being attached to cleaning roller 82 is removed by water.
Especially in the present embodiment, liquid supply mouth 83 configures in a manner of across cleaning roller 82 with liquid outlet 84,
So the flowing of water is formed from liquid supply mouth 83 towards liquid outlet 84 for cleaning roller 82.As a result, water is from a direction
Cleaning roller 82 is collided, thereafter, the water is discharged towards the outside from liquid outlet 84, so removing in hopper 81 from cleaning roller 82
Processing bit be discharged together with water.Thereby, it is possible to make the processing bit being present in hopper 81 be not easy to be attached to cleaning roller 82.
In addition, in the present embodiment, liquid outlet 84 is formed in the bottom 81a of hopper 81, thus can efficiency it is good
The processing bit for sinking down into the bottom 81a of hopper 81 is discharged, well so as to reduce the attachment again towards cleaning roller 82.
Also, in the present embodiment, with the The lid component 88 of covering liquid supply mouth 83, so can prevent from supplying from liquid
To the upper spray of the water of mouth 83, and make the water dispersion flowed into from liquid supply mouth 83, so as to make the water for flowing to cleaning roller 82
Flow velocity is further balanced.
In addition to this, it will be divided into the first fluid storage compartment S1 and the second fluid storage compartment S2 in hopper 81 using partition 87, makes water
From the first fluid storage compartment S1 towards the second fluid storage compartment S2 overflow, so keeping the water for flowing to cleaning roller 82 more balanced, thus, it is possible to equably
Carry out the removal for being attached to the processing bit of cleaning roller 82.
Other variant embodiments of < >
Furthermore the present invention is not limited to the embodiments.
For example, the position of liquid supply mouth 83 and liquid outlet 84 can be the sidewall portion 81b of hopper 81.In the case,
In order to be easily drained the processing bit sunk, it is generally desirable to which liquid outlet 84 is located at as close to the position of bottom 81a.
In addition, liquid supply mouth 83 and liquid outlet 84 can not also be set to bottom or the sidewall portion 81b of hopper 81, and
It is as shown in Figure 4, liquid supply to be constituted using the liquid supply pipe 8A and liquid discharge pipe 8B that are provided separately with hopper 81
Mouth 83 and liquid outlet 84.In the case, the opening of 81 side of hopper in liquid supply pipe 8A becomes liquid supply mouth 83, liquid row
The opening of 81 side of hopper in outlet pipe 8B becomes liquid outlet 84.In the case, it is generally desirable to which liquid outlet 84 is configured at
As close to the position of the bottom 81a of hopper 81.In addition, being provided with suction pump (not shown) on liquid discharge pipe 8B, take out
Inhale the water in hopper 81.
In addition, the height dimension of partition 87 may not be it is roughly the same, also may be configured as the length of its height dimension when looking down
It is different on edge direction.For example, the clear of central portion can be accelerated by keeping the height dimension of the central portion of partition 87 low lower than both ends
The flowing of washing lotion, or in addition, accelerate the flowing of the cleaning solution at both ends by being set as constituting in contrast to this.Also, it can examine
Consider according to the positional relationship with liquid supply mouth 83 come setting height size.Such as, it is contemplated that by increasing close to liquid supply mouth 83
Part height dimension, and reduce far from liquid supply mouth 83 part height dimension, to realize the homogenization etc. of flowing.
In addition to this, be constructed as follows as shown in figure 5, can also set: the bottom 81a of hopper 81 has from liquid supply mouth 83
The rake 81a1 that side declines towards 84 side of liquid outlet.In Fig. 5, for the composition with partition 87, rake 81a1 is constituted
To decline from partition 87 towards 84 side of liquid outlet.Rake 81a1 is not limited to planar (linear), can also be in width
The bending of direction concavity, as long as forming the flowing towards the cleaning solution of liquid outlet 84.Utilize the rake
81a1, can efficiency make well processing bit from liquid outlet 84 be discharged.
Moreover, the removal component 89 is in hopper 81 as shown in figure 5, wiper mechanism 8 can further include removal component 89
Top is contacted with cleaning roller 82, to remove the processing bit for being attached to cleaning roller 82.This removal component 89 as shown in figure 5, in along
The central axis 82x of cleaning roller 82 and be arranged rodlike, contact in cleaning with the cleaning roller 82 of rotation.It is rotation in cleaning roller 82
In the case where brush, in order to be readily removable the processing bit between entering to bristle, and consider to be set as having multiple protrusion 89a in comb
Shape person.For the removal component 89 other than playing the function for the processing bit that removal is attached to cleaning roller 82, also playing will cleaning
The function that the water for including in roller 82 removes.Furthermore removal component 89 is set to cleaning roller 82 from cleaning solution out and towards
The midway of substrate W' is cut off, but may also set up in from having been turned off midway of the substrate W' towards cleaning solution.
In said embodiment, in the case where cutting off the W of hermetic sealing substrate through resin seal, hermetic sealing substrate W is
Make transferring up for resin side.At this point, wiper mechanism 7 cleans the face for having been turned off the resin side of substrate W', wiper mechanism 8 is clear
Wash the face for having been turned off the substrate-side of substrate W'.
Cleaning roller can also be winner comprising the spongy equal raw material with the property of water-bearing in addition to rotating brush.
Moreover, in said embodiment, being said to the disconnecting device of single Cutting platform mode and double main shafts composition
Bright, but it is not limited to this, also can be disconnecting device, double Cutting platform modes and the list of single Cutting platform mode and single main shaft composition
The disconnecting device etc. that the disconnecting device and double Cutting platform modes and double main shafts that main shaft is constituted are constituted.
In addition to this, processing unit (plant) of the invention can be the device of the processing other than being cut off, for example, can be to be cut
It cuts or the devices of other machinings such as grinding.
In addition, the present invention is not limited to the embodiments certainly, can carry out within the scope of its spirit each
Kind deformation.
Claims (12)
1. a kind of processing unit (plant), comprising: organisation of working is implemented to process to machined object；And wiper mechanism, it is described to being implemented with
The machined object of processing is cleaned, and
The wiper mechanism includes: hopper, stores cleaning solution；And cleaning roller, it is impregnated in the hopper in a part
The cleaning solution in the state of rotate, and added with the described of the processing that be implemented with of top for being located at the hopper
The contact of work object,
The liquid of the cleaning solution is discharged to the liquid supply mouth for supplying the cleaning solution in the hopper and out of described hopper
Outlet configures in a manner of across the cleaning roller.
2. processing unit (plant) according to claim 1, wherein the liquid outlet is formed in the bottom of the hopper.
3. processing unit (plant) according to claim 1, wherein the liquid supply mouth is formed in the bottom of the hopper,
The wiper mechanism further includes the The lid component being arranged in a manner of covering the liquid supply mouth.
4. processing unit (plant) according to claim 1, wherein the cylindrical shape of cleaning roller, and be rotated about its center axis,
The liquid supply mouth configures in a manner of across the central axis with the liquid outlet.
5. processing unit (plant) according to claim 1, wherein the hopper includes being set to the cleaning roller and the liquid
Between supply mouth, it is divided into the first fluid storage compartment of liquid supply mouth side and the second fluid storage compartment of the cleaning roller side, is made described
Cleaning solution is from the first fluid storage compartment overflow to the partition of second fluid storage compartment.
6. processing unit (plant) according to claim 1, wherein the bottom of the hopper includes from liquid supply mouth side court
The rake declined to liquid outlet side.
7. processing unit (plant) according to any one of claim 1 to 6, wherein the wiper mechanism further includes removal component,
The removal component is contacted in the top of the hopper with the cleaning roller, to remove the processing for being attached to the cleaning roller
Bits.
8. a kind of manufacturing method of product, comprising: manufacturing procedure is implemented to process to machined object；And
Cleaning process cleans the machined object for being implemented with the processing, and
The cleaning process is carried out using wiper mechanism,
The wiper mechanism includes: hopper, stores cleaning solution；And cleaning roller, it is impregnated in the hopper in a part
The cleaning solution in the state of rotate, and added with the described of the processing that be implemented with of top for being located at the hopper
The contact of work object,
The liquid of the cleaning solution is discharged to the liquid supply mouth for supplying the cleaning solution in the hopper and out of described hopper
Outlet configures in a manner of across the cleaning roller.
9. the manufacturing method of product according to claim 8, wherein the liquid supply mouth is formed in the bottom of the hopper
Portion,
The wiper mechanism further includes the The lid component being arranged in a manner of covering the liquid supply mouth.
10. the manufacturing method of product according to claim 8, wherein the hopper includes being set to the cleaning roller
Between the liquid supply mouth, it is divided into the first fluid storage compartment of liquid supply mouth side and the second reservoir of the cleaning roller side
Room makes the cleaning solution from the first fluid storage compartment overflow to the partition of second fluid storage compartment.
11. the manufacturing method of product according to claim 8, wherein the bottom of the hopper includes supplying from the liquid
The rake declined to mouth side towards liquid outlet side.
12. the manufacturing method of the product according to any one of claim 8 to 11, wherein the wiper mechanism further includes
Component is removed, the removal component is contacted in the top of the hopper with the cleaning roller, is attached to the cleaning to remove
The processing bit of roller.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-008101 | 2018-01-22 | ||
| JP2018008101A JP7018323B2 (en) | 2018-01-22 | 2018-01-22 | Processing equipment and product manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110064611A true CN110064611A (en) | 2019-07-30 |
| CN110064611B CN110064611B (en) | 2022-04-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910047528.7A Active CN110064611B (en) | 2018-01-22 | 2019-01-18 | Processing device and method for manufacturing product |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7018323B2 (en) |
| KR (1) | KR102243615B1 (en) |
| CN (1) | CN110064611B (en) |
| TW (1) | TWI740094B (en) |
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|---|---|---|---|---|
| JP7149248B2 (en) * | 2019-10-31 | 2022-10-06 | Ｔｏｗａ株式会社 | Cleaning module, cutting device and method for manufacturing cut products |
| JP2021074825A (en) * | 2019-11-11 | 2021-05-20 | 株式会社ディスコ | Holding surface cleaning device |
| CN110866360B (en) * | 2019-11-19 | 2021-08-24 | 南京航空航天大学 | Modal calculation method for rotary ceramic matrix composite blade |
| KR102325830B1 (en) * | 2020-01-10 | 2021-11-12 | 상동화주식회사 | Apparatus for cleaning photosensitive resin plate |
| CN111604981B (en) * | 2020-05-25 | 2020-12-01 | 广东嘉元科技股份有限公司 | Copper foil slitting equipment with dust removal function |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201932205A (en) | 2019-08-16 |
| KR102243615B1 (en) | 2021-04-23 |
| CN110064611B (en) | 2022-04-05 |
| TWI740094B (en) | 2021-09-21 |
| KR20190089740A (en) | 2019-07-31 |
| JP7018323B2 (en) | 2022-02-10 |
| JP2019126749A (en) | 2019-08-01 |
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