CN1970166A - Nozzle cleaning device - Google Patents
Nozzle cleaning device Download PDFInfo
- Publication number
- CN1970166A CN1970166A CNA2006100958285A CN200610095828A CN1970166A CN 1970166 A CN1970166 A CN 1970166A CN A2006100958285 A CNA2006100958285 A CN A2006100958285A CN 200610095828 A CN200610095828 A CN 200610095828A CN 1970166 A CN1970166 A CN 1970166A
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- China
- Prior art keywords
- swing roller
- nozzle
- outer peripheral
- peripheral face
- coating fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
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- Coating Apparatus (AREA)
- Cleaning In General (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
A nozzle cleaning device has rotary rolling (11) not contacting to the nozzle, which keeps coating liquid (22) discharging from the discharge opening (21) of slot shape of the front of nozzle, a scraper (12) removing coating liquid of the keeping rotary rolling outside circumference, is set to move reciprolly along the axial direction of the rotary rolling and cleaning liquids (14) are supplied to cleaning liquid supply device of the rotary rolling outside circumference, which is set on rotation direction downstream of the rotary rolling of the scraper, during the phase removing cleaning liquid from the rotary rolling by the scraper, cleaning liquids are not supplied to the rotary rolling, but at least phase supplying cleaning liquid to the rotary rolling outside circumference, making the said scraper move reciprolly along the axial direction of the rotary rolling. Adopting the invention, without using a lot of cleaning liquids, and could remove effectively cleaning liquid existed in the front end of the nozzle by simple apparatus.
Description
Technical field
The application is the application of request according to Japanese patent application No. 2005-337940 priority.
The present invention relates to the decontaminating apparatus of nozzle, the decontaminating apparatus of this nozzle is used for cleaning the nozzle that is located on the apparatus for coating of various coating fluids being coated various bodies to be coated such as glass, resin film and metal forming.Relate in particular to a kind of like this decontaminating apparatus of nozzle: after from the slit-like outlet of being located at described spray nozzle front end portion coating fluid being supplied in body to be coated and being coated with, during carry out a next time coating, the leading section that is provided with the nozzle of outlet is cleaned.
Background technology
In the past, when making plasma display panel, organic electroluminescent display board, LCD panel etc., utilized apparatus for coating that various coating fluids are coated on the various bodies to be coated such as glass, resin film and metal forming.
As this apparatus for coating, the general apparatus for coating that coating fluid is supplied in body to be coated from the outlet of the slit-like of being located at spray nozzle front end portion that uses.
Here, in above-mentioned apparatus for coating, from said nozzle coating fluid is being supplied in the occasion that many bodies to be coated are coated with successively, the stand-by time between coating operation and coating operation, the coating fluid drying that is present in the said nozzle leading section, its concentration rises.
Under the state after the concentration of the coating fluid that so is present in spray nozzle front end portion rises, when the coating operation carried out next time, because of the crawling phenomenon of linear takes place in the coating fluid of high concentrationization on body to be coated, or the generation film this problem that ftractures.
Therefore, in the prior art, as the open 2001-310147 communique of Japan Patent following technical measures have been proposed: impregnated in the detergent remover that is housed in the ablution groove in a part that makes swing roller, before carrying out coating operation next time, make the nozzle that is provided with the slit-like outlet approach the swing roller outer peripheral face that stretches out from detergent remover, discharge coating fluid from the outlet of this nozzle, the coating fluid of the high concentrationization of spray nozzle front end portion is supplied in the outer peripheral face of swing roller, remove the coating fluid of high concentrationization from the leading section of nozzle, simultaneously, make detergent remover be ejected into the outer peripheral face of supplying with the swing roller that coating fluid is arranged, thereby remove the coating fluid that remains on this swing roller outer peripheral face from the fountain nozzle.In above-mentioned communique, also propose such technical scheme: coating fluid and detergent remover that will remove like that as mentioned above be housed in the above-mentioned ablution groove, make the liquid circulation that contains the coating fluid that is housed in this ablution groove and detergent remover and are ejected on the outer peripheral face of swing roller.
But, like that detergent remover is being ejected into the occasion of supplying with on the swing roller outer peripheral face that coating fluid is arranged, removing the coating fluid on this swing roller outer peripheral face as mentioned above from spray spout, in order fully to remove the coating fluid that is present in the swing roller outer peripheral face, need a large amount of new detergent removers that eject from spray spout, operating cost is high, and the processing of the detergent remover after cleaning also becomes problem.In addition, making the liquid circulation that contains the coating fluid that is housed in the ablution groove and detergent remover and it being ejected into occasion on the swing roller outer peripheral face, be difficult to fully remove the coating fluid that is present in the swing roller outer peripheral face.In addition,, need equipment such as purifier, exist variety of issues such as cost height, device maximization making fluid purification that contains coating fluid and detergent remover and the occasion that circulates.
In addition, a kind of like this decontaminating apparatus has also been proposed in recent years, as the open 2004-167476 communique of Japan Patent discloses, the detergent remover that is provided with on decontaminating apparatus circulation is ejected into the circulation fluid spray spout of supplying with the swing roller outer peripheral face that coating fluid is arranged, or new detergent remover is ejected into the new liquid spray spout of swing roller outer peripheral face, or contact scraper plate that accompanying coating fluid is scraped or brush roller etc. with the swing roller outer peripheral face.
But, in the decontaminating apparatus that above-mentioned communique disclosed,, needing more device in order fully to remove the coating fluid that is fed into the swing roller outer peripheral face, cost is higher, and the problem that has device to maximize.And, in the decontaminating apparatus that above-mentioned communique disclosed, in order like that new detergent remover to be ejected on the swing roller outer peripheral face from new liquid spray spout as mentioned above all the time, and need a lot of detergent removers, operating cost is very high, and the problem that is treated as of clean afterwash liquid.
Summary of the invention
The objective of the invention is to, a kind of decontaminating apparatus of nozzle is provided, coating fluid is constantly supplied in the apparatus for coating that body to be coated is coated with at the outlet of the slit-like of the leading section of nozzle, before the coating operation of carrying out next time, coating fluid is supplied to the outer peripheral face of swing roller from the outlet of described spray nozzle front end portion, when the coating fluid of the high concentration that will be present in spray nozzle front end portion is removed, do not use a lot of detergent removers and can efficiently the coating fluid that supplies to the swing roller outer peripheral face be removed with simple equipment, and the outer peripheral face of swing roller can not produce the uneven phenomenon of linear, can suitably remove the coating fluid that is present in spray nozzle front end portion all the time.
For achieving the above object, in the decontaminating apparatus of the nozzle that the spray nozzle front end portion of the outlet that is provided with the slit-like that coating fluid is supplied to body to be coated is cleaned of the present invention, the swing roller that the coating fluid of will discharge from described nozzle outlet remains on outer peripheral face is not set with separating predetermined distance contiguously with described nozzle, to be arranged in the scraper plate that the coating fluid that remains in this swing roller outer peripheral face is removed with swing roller outer peripheral face state of contact under will axially moving back and forth to swing roller, and the detergent remover feedway that detergent remover supplies to described swing roller outer peripheral face is located at the direction of rotation downstream of the swing roller of described scraper plate, to discharge and remain in the stage that the coating fluid of swing roller outer peripheral face is removed from the outlet of described nozzle by scraper plate, detergent remover does not supply to swing roller from described detergent remover feedway, at least detergent remover being supplied to stage of swing roller, make scraper plate axially the moving back and forth that contacts with the swing roller outer peripheral face at swing roller from the detergent remover feedway.
In addition, in the decontaminating apparatus of nozzle of the present invention, preferably, even be maintained at the stage of swing roller outer peripheral face from the coating fluid of described nozzle outlet discharge, under described scraper plate and swing roller outer peripheral face state of contact, also make described scraper plate axially moving back and forth at swing roller.
In the decontaminating apparatus of nozzle of the present invention, when the outlet of described nozzle is discharged to coating fluid on the outer peripheral face of swing roller, owing to swing roller is not set with separating predetermined distance contiguously with nozzle, so when the outlet of nozzle is discharged to coating fluid on the outer peripheral face of swing roller, even the powder at the surplus coating fluid that has dry of the outer peripheral face of swing roller also can prevent on the leading section of powder attached to nozzle of this coating fluid.In addition, coating fluid is discharged on the outer peripheral face of swing roller by outlet from nozzle, just can suitably remove the coating fluid of the concentration increase that is present in spray nozzle front end portion, and suitably be remained on the leading section of nozzle from the new coating fluid of discharging of outlet of nozzle.
In addition, in the decontaminating apparatus of nozzle of the present invention, as mentioned above, to discharge and remain on the stage that the coating fluid of swing roller outer peripheral face is removed from the outlet of nozzle by scraper plate, because not being set as movably from the direction of rotation downstream at the swing roller of this scraper plate, the detergent remover feedway supplies to swing roller with detergent remover, so can reduce the amount of the detergent remover of supplying with swing roller, the coating fluid that can suppress simultaneously to remain in the swing roller outer peripheral face is sneaked into the situation of detergent remover, the detergent remover of being supplied with by the detergent remover feedway can be maintained in clean state.Its result has reduced the consumption of detergent remover, reduces operating cost, and, the equipment such as purifier that detergent remover is purified needn't be set as conventional art, reduce equipment cost, and do not have the problem that device maximizes.
In addition, in the decontaminating apparatus of nozzle of the present invention, as mentioned above, because after the coating fluid that utilizes scraper plate will discharge and be held in the swing roller outer peripheral face from nozzle outlet is removed, from the detergent remover feedway detergent remover is supplied to swing roller, so clean detergent remover can be supplied to the outer peripheral face of swing roller.
In addition, as mentioned above, in the stage that detergent remover is supplied to swing roller from the detergent remover feedway, owing to make its axially moving back and forth making under described scraper plate and the swing roller outer peripheral face state of contact at swing roller, so promptly be by described scraper plate coating fluid fully to be removed and to remain on the outer peripheral face of swing roller, also can easily remove coating fluid by described detergent remover from the outer peripheral face of swing roller.In addition, under the outer peripheral face state of contact of described scraper plate and swing roller, by with its axially moving back and forth at swing roller, so, even remaining in the coating fluid of swing roller outer peripheral face is dried and becomes the high bulk of viscosity, become block coating fluid and also peel off from the outer peripheral face of swing roller easily, this coating fluid that becomes bulk is removed by the outer peripheral face from swing roller suitably with detergent remover.Crawling phenomenon along circumferential linear can not take place at the outer peripheral face of swing roller in its result, in the occasion of the leading section of nozzle being cleaned next time, can suitably clean the leading section of nozzle yet.
In addition, in the decontaminating apparatus of nozzle of the present invention, even in the stage that coating fluid is discharged to the outer peripheral face of swing roller from the outlet of nozzle, also make described scraper plate with the outer peripheral face state of contact of swing roller under axially moving back and forth at swing roller, then the coating fluid that keeps on the outer peripheral face of swing roller is evenly removed by this scraper plate, can prevent further that generation is along the crawling phenomenon of circumferential linear on the outer peripheral face of swing roller.
Other purpose of the present invention, advantage and effect will clearly be understood from the following description, wherein, and in conjunction with the cited object lesson of the present invention and accompanying drawing and obtain.
Description of drawings
Fig. 1 is illustrated in the decontaminating apparatus of nozzle of one embodiment of the invention to be coated with the general description figure of post-job nozzle guide to swing roller top state.
Fig. 2 is illustrated in the decontaminating apparatus of nozzle of this embodiment to contact and to make its general description figure at the state that axially moves back and forth of swing roller with the swing roller outer peripheral face to the scraper plate that the coating fluid that remains in the swing roller outer peripheral face is removed.
Fig. 3 is the general description figure that utilizes the state that the coating fluid that contacts and will be discharged to from the outlet of nozzle at the scraper plate that axially moves back and forth of swing roller the swing roller outer peripheral face with the outer peripheral face of swing roller removes from swing roller in the decontaminating apparatus of nozzle of this embodiment of expression.
Fig. 4 be in the decontaminating apparatus of nozzle of this embodiment of expression nozzle is risen and away from the swing roller outer peripheral face, utilize lowering or hoisting gear that ablution groove is risen on the other hand and the swing roller bottom be immersed in the general description figure of state in the detergent remover that is contained in the ablution groove.
Fig. 5 is the general description figure that in the decontaminating apparatus of nozzle of this embodiment of expression detergent remover is supplied in the detergent remover feedway modification of swing roller outer peripheral face.
The specific embodiment
Specify the decontaminating apparatus of the nozzle of the embodiment of the invention below with reference to the accompanying drawings.The decontaminating apparatus of nozzle of the present invention is not limited to following embodiment, in the scope that does not change aim of the present invention, can suitably change and implement.
As Fig. 1～shown in Figure 4, in the decontaminating apparatus of the nozzle of present embodiment, be provided with scraper plate 12, its leading section contacts with the outer peripheral face of the swing roller 11 that is driven by whirligig (not shown) rotation.And, under the outer peripheral face state of contact that makes this scraper plate 12 and swing roller 11, as shown in Figure 2, can utilize drive units 13 such as working cylinder or motor to make this scraper plate 12 axially moving back and forth at swing roller 11.
In addition,, be provided with ablution groove 15 that detergent remover 14 is accommodated, can utilize lowering or hoisting gears 16 such as working cylinder to make this ablution groove 15 carry out lifting as the detergent remover feedway in the direction of rotation downstream of the swing roller 11 of described scraper plate 12.And under the state that utilizes after this lowering or hoisting gear 16 makes ablution groove 15 risings, as shown in Figure 4, the bottom of swing roller 11 just is submerged in the detergent remover 14 that is contained in the ablution groove 15.
Below, the occasion of the decontaminating apparatus of the nozzle that uses present embodiment being cleaned nozzle 20 leading sections describes.
At first, coating fluid 22 is supplied to after body to be coated (not shown) is coated with, as shown in Figure 1, this nozzle 20 is directed to the top of swing roller 11 at outlet 21 from the slit-like of being located at nozzle 20 leading sections.Herein, coating fluid 2 is in the state that remains in described nozzle 20 leading sections, under the state that these coating fluid 22 dryings, concentration rise, when carrying out coating operation next time, because of the crawling of linear takes place on body to be coated the coating fluid 22 of high concentrationization, or the film cracking takes place.
And, in the decontaminating apparatus of the nozzle of present embodiment, as shown in Figure 3, described nozzle 20 is descended, make the outer peripheral face of these nozzle 20 leading sections near described swing roller 11, the leading section of nozzle 20 and the required interval of swing roller 11 outer peripheral faces be the interval of 30 μ m～500 mu m ranges normally.When utilizing whirligig to make 11 rotations of described swing roller, as shown in Figure 2, utilize drive unit 13 to make its axially moving back and forth making under described scraper plate 12 and the swing roller 11 outer peripheral face state of contact at swing roller 11.And under this state, the described ablution groove 15 that contains detergent remover 14 being maintained in the state that is made its decline by described lowering or hoisting gear, the bottom of swing roller 11 just is immersed in the detergent remover 14 that is contained in ablution groove 15.
Then, under above-mentioned state, from the outlet 21 of the slit-like of being located at nozzle 20 leading sections coating fluid 22 is discharged in advance, the coating fluid 22 that remains in these nozzle 20 leading sections is supplied on the outer peripheral face of swing roller 11.And, the coating fluid 22 that utilizes swing roller 11 will remain in these swing roller 11 outer peripheral faces is directed to the position of described scraper plate 12, by with swing roller 11 outer peripheral face state of contact under the scraper plate 12 that axially moves back and forth at swing roller 11, and remove described coating fluid 22 and make it be recovered to accumulator tank 17 from the outer peripheral face of swing roller 11.At this moment, the part of coating fluid 22 that remains in described swing roller 11 outer peripheral faces is dry and become the high bulk of viscosity, even its position at scraper plate 12 remains on the outer peripheral face of swing roller 11, scraper plate 12 is suitably peeled off from the outer peripheral face of swing roller 11 so become block coating fluid 22 also axially the moving back and forth of swing roller 11.And, becoming block coating fluid 22 and be recovered groove 17 recovery from the disengaging of swing roller 11 outer peripheral faces with common coating fluid 22, the outer peripheral face of swing roller 11 can not take place along the crawling of circumferential linear.
Then, removing from the outer peripheral face of swing roller 11 in advance from the coating fluid 22 of nozzle 20 discharges and after by accumulator tank 17 recovery, as shown in Figure 4, the described nozzle 20 that is near swing roller 11 outer peripheral face states is risen, this nozzle 20 is directed to body to be coated carries out next one coating operation, and, utilize lowering or hoisting gear 16 that described ablution groove 15 is risen, the bottom of swing roller 11 is immersed in the detergent remover 14 that is contained in the ablution groove 15.
Here, when being immersed in the bottom of swing roller 11 in the detergent remover 14 that is contained in ablution groove 15 like this, be contained in detergent removers 14 in this ablution groove 15 and just supply to the outer peripheral face of swing roller 11, the coating fluid 22 that remains in swing roller 11 outer peripheral faces is a little removed by described detergent remover 14 from swing roller 11 outer peripheral faces easily.
And, when the detergent remover 14 that so is supplied in swing roller 11 outer peripheral faces is directed into the position of described scraper plate 12 by swing roller 11 rotations, as mentioned above, by with swing roller 11 outer peripheral face state of contact under at the scraper plate that axially moves back and forth 12 of swing roller 11, make this detergent remover 14 remove and reclaim from swing roller 11 outer peripheral faces by accumulator tank 17 with the coating fluid 22 that remains in swing roller 11 outer peripheral faces a little.
In this occasion, a part that remains in the coating fluid 22 of described swing roller 11 outer peripheral faces is dried and becomes bulk, even its position at scraper plate 12 remains on the outer peripheral face of swing roller 11, because scraper plate 12 is axially moving back and forth at swing roller 11 also, suitably peeled off so become block coating fluid 22, become block coating fluid 22 and reclaim from the outer peripheral face disengaging of swing roller 11 and by accumulator tank 17 with detergent remover 14 from swing roller 11 outer peripheral faces.Its result, crawling phenomenon along circumferential linear can not take place on the outer peripheral face of swing roller 11, the outer peripheral face of swing roller 11 becomes uniform state, even in the occasion of nozzle 20 leading sections being cleaned next time, the outer peripheral face of described swing roller 11 also is held in uniform state, can suitably clean the leading section of nozzle 20.
In the decontaminating apparatus of the nozzle of present embodiment, as the detergent remover feedway that detergent remover 14 is supplied in swing roller 11 outer peripheral faces, used the ablution groove 15 that contains detergent remover 14, but as shown in Figure 5, also can in ablution groove 15, be provided with the detergent remover injection nozzle 18 that detergent remover 14 is supplied in swing roller 11 outer peripheral faces, as mentioned above, after the coating fluid 22 that utilizes scraper plate 12 to discharge from nozzle 20 is in advance removed from the outer peripheral face of swing roller 11, from this detergent remover injection nozzle 18 detergent remover 14 is sprayed the outer peripheral face that supplies to swing roller 11, the detergent remover 14 that is not held in swing roller 11 outer peripheral faces is reclaimed by ablution groove 15.
Although the present invention has done abundant description by embodiment, obviously can expertly they be changed and change technically.
Therefore, as long as other variation and change do not break away from the scope of the invention, they should be interpreted as being comprised in wherein.
Claims (3)
1. the decontaminating apparatus of a nozzle is used for the leading section of the nozzle that is provided with the slit-like outlet is cleaned, and described slit-like outlet is used for coating fluid is supplied to body to be coated, it is characterized in that,
And separate predetermined distance between the described nozzle swing roller is set, described predetermined distance can avoid described swing roller to contact with described nozzle, on the outer peripheral face of described swing roller, keep from the coating fluid of described nozzle outlet discharge,
Being used for the scraper plate that the coating fluid that remains on this swing roller outer peripheral face is removed is arranged under scraper plate and the swing roller outer peripheral face state of contact can be along axially the moving back and forth of swing roller,
The detergent remover feedway that detergent remover is supplied to described swing roller outer peripheral face is located at the swing roller direction of rotation downstream of described scraper plate,
Discharging and remain in the stage that the coating fluid of swing roller outer peripheral face is removed from the outlet of described nozzle with scraper plate, do not supply with detergent remover to swing roller from described detergent remover feedway,
At least supplying with stage of detergent remover, scraper plate axially the moving back and forth that contacts with the swing roller outer peripheral face from the detergent remover feedway to swing roller along swing roller.
2. the decontaminating apparatus of nozzle as claimed in claim 1 is characterized in that, is utilizing scraper plate to remove the stage of discharging and being maintained at the coating fluid on the swing roller outer peripheral face from described nozzle outlet, and described scraper plate axially moves back and forth along swing roller.
3. the decontaminating apparatus of nozzle as claimed in claim 1 or 2 is characterized in that, the ablution groove that contains detergent remover of described detergent remover feedway is set as removable.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-337940 | 2005-11-24 | ||
| JP2005337940 | 2005-11-24 | ||
| JP2005337940 | 2005-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1970166A true CN1970166A (en) | 2007-05-30 |
| CN100431714C CN100431714C (en) | 2008-11-12 |
Family
ID=38111297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100958285A Active CN100431714C (en) | 2005-11-24 | 2006-06-20 | Nozzle cleaning device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4381407B2 (en) |
| KR (1) | KR100756811B1 (en) |
| CN (1) | CN100431714C (en) |
| TW (1) | TWI296943B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108856113A (en) * | 2018-05-29 | 2018-11-23 | 武汉华星光电技术有限公司 | Coating nozzles cleaning device |
| CN109047075A (en) * | 2018-08-30 | 2018-12-21 | 浙江工业大学 | A kind of seam flange auto-cleaner |
| CN110064611A (en) * | 2018-01-22 | 2019-07-30 | 东和株式会社 | The manufacturing method of processing unit (plant) and product |
| CN113613802A (en) * | 2019-02-11 | 2021-11-05 | 布里奇有限及两合公司 | Method for preventing microbial infestation of a cleaning device of a metering device and cleaning device |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100840528B1 (en) * | 2007-04-13 | 2008-06-23 | 주식회사 케이씨텍 | Pre discharging apparatus for slit coater |
| KR101450031B1 (en) * | 2007-11-30 | 2014-10-14 | 주식회사 케이씨텍 | Pre-discharging apparatus for slit coater |
| KR100933640B1 (en) * | 2007-12-27 | 2009-12-23 | 주식회사 성우하이텍 | Adhesive Press Unit for Adhesive Applicator |
| JP5121778B2 (en) * | 2009-06-26 | 2013-01-16 | 東京エレクトロン株式会社 | Priming processing method and priming processing apparatus |
| JP5562315B2 (en) * | 2011-10-27 | 2014-07-30 | 東京エレクトロン株式会社 | Priming processing method and priming processing apparatus |
| CN107486424A (en) * | 2017-08-25 | 2017-12-19 | 安徽信息工程学院 | Ultra-white photovoltaic glass calender scrubs roller arrangement |
| CN109046849B (en) * | 2018-10-27 | 2020-10-13 | 临泉县荣兴木业有限公司 | Self-cleaning rubber roll for rubber coating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3245812B2 (en) * | 1996-08-30 | 2002-01-15 | 東京エレクトロン株式会社 | Liquid treatment method and apparatus |
| JP2000005683A (en) * | 1998-06-22 | 2000-01-11 | Toppan Printing Co Ltd | Apparatus and method for cleaning slot type coating head |
| JP3033021B2 (en) * | 1998-07-07 | 2000-04-17 | 井上金属工業株式会社 | Cleaning equipment for coating equipment |
| JP2001310147A (en) * | 2000-05-02 | 2001-11-06 | Tokyo Ohka Kogyo Co Ltd | Pre-delivering apparatus and pre-delivering method for slit coater |
| FI20002826A (en) * | 2000-12-22 | 2002-06-23 | Coefa Company Ltd Oy | Method and apparatus for washing a roller |
| DE10157054A1 (en) * | 2001-11-21 | 2003-06-05 | Hauni Maschinenbau Ag | Cleaning device for a glue application element |
| JP2004121980A (en) * | 2002-10-02 | 2004-04-22 | Toppan Printing Co Ltd | Method and apparatus for preliminary discharge |
| JP2004141744A (en) * | 2002-10-23 | 2004-05-20 | Toppan Printing Co Ltd | Apparatus and method for supplying coating liquid |
| JP3877719B2 (en) * | 2002-11-07 | 2007-02-07 | 東京応化工業株式会社 | Pre-discharge device for slit coater |
| JP4455102B2 (en) * | 2004-03-10 | 2010-04-21 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP4526288B2 (en) * | 2004-03-25 | 2010-08-18 | 東京応化工業株式会社 | Adjusting device and adjusting method for slit nozzle tip |
| KR200441012Y1 (en) * | 2007-05-09 | 2008-07-17 | 양철수 | Support float of tank for high pressure and polluted water |
-
2006
- 2006-04-06 KR KR1020060031279A patent/KR100756811B1/en active IP Right Grant
- 2006-04-21 TW TW095114287A patent/TWI296943B/en active
- 2006-06-20 CN CNB2006100958285A patent/CN100431714C/en active Active
- 2006-11-15 JP JP2006308621A patent/JP4381407B2/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110064611A (en) * | 2018-01-22 | 2019-07-30 | 东和株式会社 | The manufacturing method of processing unit (plant) and product |
| CN108856113A (en) * | 2018-05-29 | 2018-11-23 | 武汉华星光电技术有限公司 | Coating nozzles cleaning device |
| CN109047075A (en) * | 2018-08-30 | 2018-12-21 | 浙江工业大学 | A kind of seam flange auto-cleaner |
| CN113613802A (en) * | 2019-02-11 | 2021-11-05 | 布里奇有限及两合公司 | Method for preventing microbial infestation of a cleaning device of a metering device and cleaning device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4381407B2 (en) | 2009-12-09 |
| TWI296943B (en) | 2008-05-21 |
| TW200719978A (en) | 2007-06-01 |
| KR20070055308A (en) | 2007-05-30 |
| KR100756811B1 (en) | 2007-09-10 |
| CN100431714C (en) | 2008-11-12 |
| JP2007167837A (en) | 2007-07-05 |
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