CN110049952A - The method of operation of Ultrapure Water Purifiers and Ultrapure Water Purifiers - Google Patents
The method of operation of Ultrapure Water Purifiers and Ultrapure Water Purifiers Download PDFInfo
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- CN110049952A CN110049952A CN201780076079.8A CN201780076079A CN110049952A CN 110049952 A CN110049952 A CN 110049952A CN 201780076079 A CN201780076079 A CN 201780076079A CN 110049952 A CN110049952 A CN 110049952A
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- platinum
- subsystem
- ultrapure water
- pure water
- metal catalysts
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- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 63
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 145
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 125
- 239000011347 resin Substances 0.000 claims abstract description 87
- 229920005989 resin Polymers 0.000 claims abstract description 87
- 239000003054 catalyst Substances 0.000 claims abstract description 75
- 230000003647 oxidation Effects 0.000 claims abstract description 55
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 55
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 claims abstract description 24
- 230000001172 regenerating effect Effects 0.000 claims abstract description 9
- 229910052697 platinum Inorganic materials 0.000 claims description 27
- 238000012545 processing Methods 0.000 claims description 21
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 238000005342 ion exchange Methods 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 239000002923 metal particle Substances 0.000 claims 2
- 238000009296 electrodeionization Methods 0.000 claims 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract description 119
- 238000000108 ultra-filtration Methods 0.000 abstract description 15
- 239000002245 particle Substances 0.000 abstract description 10
- 230000007423 decrease Effects 0.000 abstract description 7
- 239000002105 nanoparticle Substances 0.000 abstract description 5
- 239000002082 metal nanoparticle Substances 0.000 description 13
- 239000003957 anion exchange resin Substances 0.000 description 12
- 238000000354 decomposition reaction Methods 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 10
- 210000003296 saliva Anatomy 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000005416 organic matter Substances 0.000 description 8
- 150000003254 radicals Chemical class 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 235000013339 cereals Nutrition 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000001914 filtration Methods 0.000 description 5
- 150000007524 organic acids Chemical class 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000004615 ingredient Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 125000002091 cationic group Chemical group 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000005345 coagulation Methods 0.000 description 3
- 230000015271 coagulation Effects 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 2
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000004520 agglutination Effects 0.000 description 2
- 125000000129 anionic group Chemical group 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000003456 ion exchange resin Substances 0.000 description 2
- 229920003303 ion-exchange polymer Polymers 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003863 metallic catalyst Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- KJFMBFZCATUALV-UHFFFAOYSA-N phenolphthalein Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C(=O)O1 KJFMBFZCATUALV-UHFFFAOYSA-N 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- JSAIENUMNDAGTD-UHFFFAOYSA-N benzene ethene styrene Chemical compound C1=CC=CC=C1.C=C.C=C.C=CC1=CC=CC=C1 JSAIENUMNDAGTD-UHFFFAOYSA-N 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000009841 combustion method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000012633 leachable Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 238000010525 oxidative degradation reaction Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 229910001948 sodium oxide Inorganic materials 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
- 239000002349 well water Substances 0.000 description 1
- 235000020681 well water Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
- B01D61/44—Ion-selective electrodialysis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
- C02F1/325—Irradiation devices or lamp constructions
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
- C02F1/4693—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
- C02F1/4695—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis electrodeionisation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/725—Treatment of water, waste water, or sewage by oxidation by catalytic oxidation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Urology & Nephrology (AREA)
- Toxicology (AREA)
- Physical Water Treatments (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Removal Of Specific Substances (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Catalysts (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
A kind of Ultrapure Water Purifiers (1) comprising: pretreatment unit (2), 1 st pure water manufacturing device (3) and subsystem (4).1 st pure water manufacturing device (3) includes: slot (5), ultra-violet oxidation device (6), platinum metal catalysts resin tower (7), regenerative ion interchange unit (8) and Filtertype Air Extractor (9).Ultra-violet oxidation device (12), platinum metal catalysts resin tower (13), Filtertype Air Extractor (14), non-renewable type mixed bed formula ion interchange unit (15) and ultrafiltration (UF) film (16) that subsystem (4) includes: pilot trench (11), is handled the 1 st pure water supplied from the pilot trench (11).Platinum metal catalysts resin is to be carried on platinum group metal obtained from vector resin, and the particle of the Nano Particle of platinum group metal is particularly preferably made to be carried on platinum metal catalysts resin obtained from vector resin.The decline of hydrogen peroxide removal ability is able to suppress by having ultra-violet oxidation device (12) and platinum metal catalysts resin tower (13) in subsystem (4) based on the Ultrapure Water Purifiers (1).
Description
Technical field
The present invention relates to a kind of Ultrapure Water Purifiers and the ultrapure water system for having 1 st pure water device and subsystem
The method of operation of device is made, more particularly to one kind has ultra-violet oxidation device and platinum metal catalysts resin in subsystem
The method of operation of the Ultrapure Water Purifiers of tower and the Ultrapure Water Purifiers.
Background technique
In the prior art, the ultrapure water for the electronic industry field of semiconductor etc. passes through using by pretreatment system, one
The Ultrapure Water Purifiers that secondary pure water device and the subsystem for handling 1 st pure water are constituted carry out the processing of raw water to manufacture
It forms.
Existing Ultrapure Water Purifiers 21 as shown in Figure 2 are generally by pretreatment unit 22,1 st pure water manufacturing device
23 and this 3 stage arrangement of second pure water manufacturing device (subsystem) 24 constitute.At the pre- place of such Ultrapure Water Purifiers 21
It manages in device 22, implements the pretreatment of filtering, coagulation sedimentation, precision filtration membranes based on raw water W etc., mainly remove suspended material.
1 st pure water manufacturing device 23 include: the slot 25 of pretreated water W1, ultraviolet light (UV) oxidation unit 26, regenerative from
Sub- switch (mixed bed formula or 45 tower etc.) 27 and Filtertype Air Extractor 28, in addition, can also include RO as needed
Membrane separation device, electric deionizer etc..Here, being carried out to most electrolyte, particle, the viable bacteria etc. in pretreated water W1
Removal, and decomposing organic matter.
Subsystem 24 is by pilot trench 31, ultra-violet oxidation device 32, platinum metal catalysts resin tower 33, Filtertype Air Extractor
34, non-renewable type mixed bed formula ion interchange unit 35 and ultrafiltration (UF) film 36 as film filter are constituted, and then basis
It needs, RO membrane separation device etc. is set sometimes, the storage of pilot trench 31 utilizes the one of the manufacture of above-mentioned 1 st pure water manufacturing device 23
Secondary pure water W2, the ultra-violet oxidation device 32 to from the pilot trench 31 through it is not shown pump the 1 st pure water W2 that is supplied into
Row processing.In the subsystem 24, using ultra-violet oxidation device 32 by organic matter micro contained in 1 st pure water W2
(TOC ingredient) is decomposed by ultra-violet oxidation, and platinum metal catalysts resin tower 33 is recycled to decompose the photograph due to the ultraviolet light
The hydrogen peroxide penetrated and generated, and the solution gas such as mixed DO (dissolved oxygen) are removed using the Filtertype Air Extractor of following stage 34
Body.Then, it is handled using non-renewable type mixed bed formula ion interchange unit 35, to remove remaining carbon by ion exchange
Acid ion, organic acid, anionic property substance and metal ion, cationic substance.Then, ultrafiltration (UF) film 36 is utilized
It removes particle and ultrapure water W3 is made, supply it to point of use 37, not used ultrapure water is back to pilot trench 31.
In existing Ultrapure Water Purifiers 21 as described above, the oxygen of the TOC ingredient in ultra-violet oxidation device 32
Change decomposition mechanism and water oxygenolysis is generated into OH free radical, oxygenolysis is carried out to TOC ingredient by the OH free radical, is led to
Often, the ultraviolet light in the ultra-violet oxidation device 32 is can irradiate the excess quantity of the fully oxidized decomposition of TOC in water.In
It is that, when the ultraviolet irradiation amount of ultra-violet oxidation device 32 is more, the OH free radical generated by the decomposition of water is superfluous, therefore mistake
Surplus OH free radical associates and becomes hydrogen peroxide.The hydrogen peroxide of generation by with rear class platinum metal catalysts resin tower 33
It contacts and is decomposed.
Summary of the invention
Problem to be solved by the invention
However, the result of study of the present inventor is it is found that the ultra-violet oxidation device 32 of subsystem 24 carries out for a long time
When hydrogen peroxide decomposes, the removal ability decline of hydrogen peroxide.As a result, if in ultrapure water W3 remaining hydrogen peroxide,
Then not only cause deteriorating water quality, it is also possible to keep ultrafiltration (UF) film 36 of non-renewable type mixed bed formula ion interchange unit 35, rear class bad
Change.Further, oxygen is generated if hydrogen peroxide decomposes, the DO in water is thus caused to increase.
The present invention is to complete in view of the above problems, it is therefore intended that, a kind of Ultrapure Water Purifiers are provided and this is super
The method of operation of Water Purifiers, the Ultrapure Water Purifiers have 1 st pure water device and subsystem, have in the subsystem
There are ultra-violet oxidation device and platinum metal catalysts resin tower, and the platinum metal catalysts in the Ultrapure Water Purifiers
The decline of the hydrogen peroxide removal ability of resin tower is inhibited.
Technical means to solve problem
First scheme of the invention provides a kind of Ultrapure Water Purifiers comprising: 1 st pure water device has ultraviolet light
Oxidation unit, regenerative mixed bed formula ion exchange tower or electric deionizer and Filtertype Air Extractor；And subsystem, it is right
The 1 st pure water obtained from the 1 st pure water device is handled, and the subsystem has ultra-violet oxidation device, platinum family gold
Metal catalyst resin tower and Filtertype Air Extractor；In the rear class setting of the ultra-violet oxidation device of the 1 st pure water device
Platinum metal catalysts resin tower (invention 1).
According to the invention (invention 1), platinum family gold is arranged by the rear class of the ultra-violet oxidation device in 1 st pure water device
Metal catalyst resin tower is able to suppress the mistake of the platinum metal catalysts resin tower of the rear class of the ultra-violet oxidation device of subsystem
The decline of hydrogen oxide removal ability.The reason is as follows that: that is, the platinum metal catalysts of the rear class of the ultra-violet oxidation device of subsystem
The decline of the hydrogen peroxide removal ability of resin tower is considered insufficient relative to the hydrogen peroxide equivalent in treated water due to hydrogen,
Platinum metal catalysts are oxidized caused.Then inventor etc. carry out for hydrogen relative to the reason of hydrogen peroxide deficiency
Research, as a result known to the reason is that in the ultra-violet oxidation device of 1 st pure water device, along with the decomposition of organic matter,
Hydrogen peroxide and hydrogen are generated, hydrogen is removed by Filtertype Air Extractor, and on the other hand, hydrogen peroxide then flows into subsystem.Therefore,
As long as platinum metal catalysts resin tower is arranged in the rear class of the ultra-violet oxidation device of 1 st pure water device, to by 1 st pure water
The hydrogen peroxide that the ultra-violet oxidation device of device generates is decomposed, then can reduce the ultra-violet oxidation device of subsystem
The hydrogen peroxide in treated water in rear class keeps hydrogen close relative to hydrogen peroxide equivalent, can prevent platinum group metal catalyzed
The deterioration of agent.
In foregoing invention (invention 1), it is preferred that the subsystem further includes non-renewable type mixed bed formula ion exchange tower
(invention 2).
According to the invention (invention 2), micro organic matter contained in treated water is decomposed by ultra-violet oxidation device, energy
Enough by ion exchange remove remaining carbonate ions, organic acid, anionic property substance, by prime flow into metal ion,
Cationic substance.
In foregoing invention (invention 1,2), it is preferred that the platinum metal catalysts resin tower of the 1 st pure water device
It is platinum, palladium or platinum/palldium alloy (invention 3) with the platinum group metal in the platinum metal catalysts resin tower of the subsystem.
According to the invention (invention 3), it can effectively decompose and remove hydrogen peroxide micro contained in processing water.
In foregoing invention (invention 1~3), it is preferred that the platinum group metal is the platinum family that average grain diameter is 1~50nm
Metallic (invention 4).
According to the invention (invention 4), it can particularly effectively decompose and remove hydrogen peroxide contained in processing water.
Alternative plan of the invention provides a kind of method of operation of Ultrapure Water Purifiers, which includes: one
Secondary pure water device has ultra-violet oxidation device, platinum metal catalysts resin tower, regenerative mixed bed formula ion exchange tower or electricity
Deionizer and Filtertype Air Extractor；And subsystem, the 1 st pure water obtained from the 1 st pure water device is carried out
Processing, the subsystem have ultra-violet oxidation device, platinum metal catalysts resin tower and Filtertype Air Extractor；It is described
The method of operation of Ultrapure Water Purifiers is by making the continuous water flowing of treated water in the 1 st pure water device and the subsystem
To manufacture ultrapure water (invention 5).
According to the invention (invention 5), platinum is arranged by the rear class of the ultra-violet oxidation device in 1 st pure water device
By the hydrogen peroxide of the ultra-violet oxidation device generation of 1 st pure water device, therefore race's metallic catalyst resin tower can decompose
Hydrogen peroxide in treated water in the rear class of the ultra-violet oxidation device of subsystem is reduced, and hydrogen is relative to hydrogen peroxide equivalent
It is close, the deterioration of platinum metal catalysts can be prevented and manufacture ultrapure water.
In foregoing invention (invention 5), it is preferred that the platinum metal catalysts resin tower of the 1 st pure water device and
Platinum group metal in the platinum metal catalysts resin tower of the subsystem is platinum, palladium or platinum/palldium alloy (invention 6).
According to the invention (invention 6), it can effectively decompose and remove hydrogen peroxide micro contained in processing water.
In foregoing invention (invention 5 or 6), it is preferred that the platinum group metal is the platinum family that average grain diameter is 1~50nm
Metallic.(invention 7).
According to the invention (invention 7), it can particularly effectively decompose and remove hydrogen peroxide contained in processing water.
In foregoing invention (invention 5~7), it is preferred that the processing water of the ultra-violet oxidation device of the subsystem
H2O2Concentration is 10~100 μ g/L, the H of the processing water of the platinum metal catalysts resin tower of the subsystem2O2Concentration be 0.1~
10 μ g/L (invention 8).
According to invention (invention 8), by controlling the place in ultra-violet oxidation device and platinum metal catalysts resin tower
Manage bar part, so that the H of the processing water of the ultra-violet oxidation device of subsystem and platinum metal catalysts resin tower2O2Concentration is upper
It states in range, so as to press down the adverse effect of the Filtertype Air Extractor to the rear class of the platinum metal catalysts resin tower etc.
It makes in minimum limit, and by the concentration of hydrogen peroxide of the ultrapure water of acquisition and Dissolved Oxygen concentration Control in extremely low level.
Invention effect
According to the present invention, the 1 st pure water after the hydrogen peroxide generated by ultra-violet oxidation device being decomposed is supplied to subsystem
System, since adjoint hydrogen peroxide is less, reduces the processing water in the rear class of the ultra-violet oxidation device of the subsystem
In concentration of hydrogen peroxide can prevent the bad of platinum metal catalysts since hydrogen is close relative to hydrogen peroxide equivalent
Change and manufactures ultrapure water.
Detailed description of the invention
Fig. 1 is the flow chart for indicating the Ultrapure Water Purifiers of an embodiment of the invention.
Fig. 2 is the flow chart for indicating existing Ultrapure Water Purifiers.
Specific embodiment
In the following, the Ultrapure Water Purifiers and the device of the embodiment that the present invention will be described in detail referring to Fig.1
Method of operation.
Fig. 1 is the flow chart for indicating the Ultrapure Water Purifiers of an embodiment of the invention, in Fig. 1, ultrapure water
Manufacturing device 1 is by this 3 grades of pretreatment unit 2,1 st pure water manufacturing device 3 and second pure water manufacturing device (subsystem) 4
What device was constituted, pretreatment unit 2 is by the filtering of the raw waters such as industrial water, well water, urban water W, coagulation sedimentation, precision filtration membranes
Deng composition.
1 st pure water manufacturing device 3 includes: the slot 5 of the pretreated water W1 as treated water, ultraviolet light (UV) oxidation dress
It is de- to set 6, platinum metal catalysts resin tower 7, regenerative ion interchange unit (mixed bed formula or 45 tower etc.) 8 and membrane type
Device of air 9.
Subsystem 4 includes: pilot trench 11, right of the storage using the 1 st pure water W2 of above-mentioned 1 st pure water manufacturing device 3 manufacture
Ultra-violet oxidation device 12, the platinum metal catalysts resin tower 13, film that the 1 st pure water supplied from the pilot trench 11 is handled
Formula degasser 14, non-renewable type mixed bed formula ion interchange unit 15 and ultrafiltration (UF) film 16 as film filter, match
Be set to passed through ultrafiltration (UF) film 16 ultrapure water W3 be supplied to point of use 17 after, not used ultrapure water W3 is back to pilot trench
1。
In Ultrapure Water Purifiers 1 as described above, it is filled in platinum metal catalysts resin tower 7 and platinum group metal is urged
The platinum metal catalysts resin of agent resin tower 13 is that platinum group metal is made to be carried on resin obtained from vector resin.
As the vector resin for loading the platinum group metal, it is able to use ion exchange resin, particularly preferably uses anion
Exchanger resin.For for the anion exchange resin in present embodiment, preferably by styrene diethylene benzene copoly mer
As the strong-base anion-exchange resin of parent, particularly preferred gel type resin.It, can since platinum group metal is negatively charged
It is steadily carried on anion exchange resin and is difficult to remove.The exchange base of anion exchange resin is preferably OH type.OH type yin
Ion exchange resin, resin surface are alkalinity, promote the decomposition of hydrogen peroxide.
In addition, and catalyst activity low to the stripping property of ultrapure water is high, therefore can for the platinum group metal of load
Water flowing is carried out with high pass water speed, leachable concentration can be inhibited generating any dissolution, from the water quality deterioration for inhibiting early stage
From the aspect of be preferred.As the platinum group metal, ruthenium, rhodium, palladium, osmium, iridium and platinum can be enumerated.It these platinums group metal can be single
Solely using one kind, it can also be used in combination of two or more, can also be used in the form of two or more alloys, alternatively, can also
Enough purifying product using the mixture naturally produced for not being separated into monomer.In these, platinum, palladium, platinum/palldium alloy it is independent or
Two or more mixtures is particularly preferred since catalyst activity is high.
It, can it is preferable to use the particles for the Nano Particle for making platinum group metal especially as platinum metal catalysts resin
It is carried on platinum metal catalysts resin obtained from above-mentioned vector resin.
There is no particular limitation for the method for the metal nanoparticle of manufacture platinum family, for example, metal salt reduction reaction can be enumerated
Method, combustion method etc..Among these, metal salt reduction reaction method is manufactured due to being easy, and the metal that can obtain stay in grade is received
Rice corpuscles, therefore it is preferable to use.Metal salt reduction reaction method is mentioned, for example, in the chloride of platinum etc., nitrate, sulfate, gold
In the aqueous solution for belonging to the 0.1~0.4mmol/L of complex compound etc., the alcohol, citric acid or its salt, formic acid, third of 4~20 equivalents times are added
The reducing agent of ketone, acetaldehyde etc., by 1~3 hour boil, so as to manufacture metal nanoparticle.In addition, for example, poly-
In vinylpyrrolidone aqueous solution, chloroplatinic acid, the potassium platinic chloride etc. of 1~2mmol/L, the reduction of addition ethyl alcohol etc. are dissolved
Agent is heated to reflux 2~3 hours under nitrogen environment, so as to manufacture platinum nano-colloid particle.
The average grain diameter of the metal nanoparticle of platinum family is preferably 1~50nm, more preferably 1.2~20nm, further excellent
It is selected as 1.4~5nm.When the average grain diameter of metal nanoparticle is greater than 50nm, the specific surface area of nanoparticle becomes smaller, and decomposes simultaneously
The catalyst activity of removal hydrogen peroxide may be decreased.On the other hand, when the average grain diameter of metal nanoparticle is less than 1nm,
It decomposes and the catalyst activity for removing hydrogen peroxide may be decreased instead.
The load capacity of the platinum group metal nanoparticle of anion exchange resin as described above is preferably 0.01~0.2 weight
Measure %, particularly preferably 0.04~0.1 weight %.When the load capacity of metal nanoparticle is less than 0.01 weight %, to decomposition
And the catalyst activity for removing hydrogen peroxide may be insufficient.When the load capacity of metal nanoparticle is 0.2 weight % or less, table
Reveal the metal for being not usually required to load greater than 0.2 weight % to decomposing and removing the sufficient catalyst activity of hydrogen peroxide to receive
Rice corpuscles, because and uneconomical.In addition, if the load capacity of metal nanoparticle increases, the possibility that metal is dissolved out into water
Property also becomes larger.
Next, being said to the method for operation of the Ultrapure Water Purifiers 1 with the present embodiment such as above-mentioned construction
It is bright.
Firstly, using pretreatment unit 2 by coagulation sedimentation, agglutination filtering, the operation of agglutination pressure flotation etc. to raw water W into
Row processing, the main muddy object removed in raw water W.Pretreated water W1 is stored temporarily in slot 5, and is supplied by pump (not shown)
It should be to 1 st pure water device 3.
In 1 st pure water device 3, the organic matter (TOC) in pretreated water W1 is made using ultraviolet light (UV) oxidation unit 6
It is oxidized into organic acid, and further becomes carbon dioxide.In addition, by utilizing 6 mistake of ultra-violet oxidation processing unit
The ultraviolet light of surplus irradiation, generates OH free radical and hydrogen by the decomposition of the moisture of pretreated water W1, remaining OH free radical is formed
It closes to become hydrogen peroxide.As a result, the H of the processing water of ultra-violet oxidation device 62O2Concentration is 10~100 μ g/L.More
Further, dehydrogenation is gone using aftermentioned Filtertype Air Extractor 9.As a result, previous concentration of hydrogen peroxide is high and reduces hydrogen
Processing water supply as 1 st pure water to subsystem 4, this leads to the function of the platinum metal catalysts resin tower 13 of subsystem side
It can decline.
Then, in the present embodiment, platinum metal catalysts tree is arranged by the rear class in the ultra-violet oxidation device 6
Rouge tower 7, so that the hydrogen peroxide to generation decomposes.Thus H2O2Concentration is 0.1~10 μ g/L or so, especially works as use
When the nanoparticle of platinum group metal, H2O2Concentration is 0.1~1 μ g/L or so, is lower than the processing water of ultra-violet oxidation device 6.It connects down
Come, removed in pretreated water W1 using regenerative ion interchange unit (mixed bed formula or 45 tower etc.) 8 most of is electrolysed
Matter (ionic ingredient), the dissolved gas of dissolved oxygen etc. is further removed using Filtertype Air Extractor 9, to obtain organic matter
It (TOC) is 2ppb or less and H2O2Concentration is the 1 st pure water W2 of 0.1~10 μ g/L.1 st pure water W2 is being stored temporarily in son
After in slot 11, subsystem 4 is supplied to by pump (not shown).
Next, in ultraviolet light (UV) oxidation unit 12, being remained in micro in 1 st pure water W2 in subsystem 4
Organic matter is oxidized into organic acid, further becomes carbon dioxide.At this point, in order to by organic matter removal to the limit, in purple
Ultraviolet light is excessively irradiated in outside line oxidation treatment device 12, therefore, the OH generated by the decomposition of the moisture of 1 st pure water W2
Free radical is superfluous, therefore superfluous OH free radical association is to generate hydrogen peroxide.Thus the H in 1 st pure water W22O2Concentration from
0.1~10 μ g/L or so becomes 10~100 μ g/L or so, is higher than 1 st pure water W2.
Then, the hydrogen peroxide of generation is decomposed by the platinum metal catalysts resin tower 13 of rear class, H2O2Concentration is 10 μ g/L
Left and right below, especially using the metal nanoparticle of platinum family, H2O2Concentration is 5 μ g/L hereinafter, especially for 1 μ
G/L is hereinafter, its processing water for being lower than ultra-violet oxidation processing unit 12.
On the other hand, oxygen is generated due to the decomposition of hydrogen peroxide, and thus increases dissolved oxygen, therefore using after being set to
The Filtertype Air Extractor 14 of grade removes dissolved oxygen.It then, can be by the carbonate ions, organic acid, anion of minimal residue
Property substance, the metal ion flowed by prime, cationic substance removed using non-renewable type mixed bed formula ion interchange unit 15,
Further particle is removed to manufacture ultrapure water W3 using ultrafiltration (UF) film 16.Ultrapure water W3 is supplied to point of use 17,
Not used ultrapure water W3 is back to pilot trench 11.
It should be noted that ultrapure water W3 has the property that for example, resistivity is 18.1M in the present embodiment
Ω cm or more；Particle is partial size 50nm or more and 1000/L or less；Viable bacteria is 1/L or less；TOC(Total Organic
It Carbon) is 1 μ g/L or less；Total silica is 0.1 μ g/L or less；Metal class is 1ng/L or less；Ionic species be 10ng/L with
Under.
In particular, in the platinum metal catalysts resin as platinum metal catalysts resin tower 13, using platinum family is golden
Belong to nanometer particle load obtained from anion exchange resin when resin, the anion for loading the platinum group metal nanoparticle is handed over
Resin is changed, since specific surface area is larger, the reaction speed that hydrogen peroxide decomposes is very fast, can be improved water flowing space speed
Degree.Since water-flowing amount is more than the amount of catalyst, can make from catalyst dissolution to the influence of the metal in processing water very
It is small.Further, the hydrogen peroxide in water is contacted with the platinum group metal nano-colloid particle for being carried on anion exchange resin
And decompose rapidly, anion exchange resin will not be acted on, therefore, is also corroded there is no anion exchange resin by hydrogen peroxide
And the possibility for dissolving out organic carbon (TOC).
More than, an embodiment of the invention is illustrated referring to attached drawing, but the present invention is not limited to above-mentioned
Embodiment, as long as platinum metal catalysts resin tower 7 to be set to ultraviolet light (UV) oxidation unit 6 of 1 st pure water device 3
Rear class, also can be carried out various changes and implement.For example, the platinum of the platinum metal catalysts resin tower 13 as subsystem 4
Race's metallic catalyst resin is, it is preferable to use load has the anion exchange resin of platinum group metal nanoparticle, in this case,
The platinum metal catalysts resin tower 7 of the rear class of ultraviolet light (UV) oxidation unit 6 as 1 st pure water device 3, similarly may be used
To use load to have the anion exchange resin of platinum group metal nanoparticle, or general platinum group metal catalyzed also can be used
Agent resin both is distinguished.It is filled alternatively, it is also possible to which RO UF membrane is arranged in 1 st pure water device 3 and subsystem 4 as needed
It sets, the desalter of electric deionizer etc., other various elements, can also be arranged in the prime of 1 st pure water device 3 pure
Water making device makes Water Purifiers become 3 grades of constructions.
Embodiment
In the following, enumerating embodiment and comparative example to illustrate the present invention, but the present invention is not limited to following embodiments.
[embodiment 1]
The platinum nano-colloid particle of average grain diameter 3.5nm is carried on strong basicity gel-type with the load capacity of 0.07 weight %
Anion exchange resin is prepared into the anion exchange of supporting platinum-group metals nanoparticle as platinum metal catalysts resin
Resin.
In the Ultrapure Water Purifiers 1 that device as shown in Figure 1 constructs, above-mentioned platinum metal catalysts resin structure is used
At platinum metal catalysts resin tower 7,13, ultrapure water W3 is manufactured, measures the platinum metal catalysts resin tower 13 of subsystem 4
Enter saliva and the out concentration of hydrogen peroxide (initial stage) of saliva.As a result shown in table 1.In addition, to continuously run this ultrapure for a long time for measurement
The concentration of hydrogen peroxide (latter stage) for going out saliva of platinum metal catalysts resin tower 13 after water making device 1.As a result equally show
In table 1.It should be noted that about concentration of hydrogen peroxide, by the copper sulphate (anhydrous) of phenolphthalein, 8mg to 4.8mg and
Sodium sulphate (anhydrous) is added in the water sodium oxide molybdena of 48mg and becomes 10g, is prepared into Trace Hydrogen Peroxide concentration quantitative reagent.?
It tests and adds the 0.5g reagent in water 10mL, and dissolve, 10 minutes are stood at room temperature, based on the absorbance at 552nm
Measured value and acquire concentration of hydrogen peroxide.
[comparative example 1]
In addition to the not set platinum metal catalysts resin tower 7 of the rear class of the ultra-violet oxidation device 6 in 1 st pure water device 3
In addition, Ultrapure Water Purifiers are constituted similarly to Example 1 to manufacture ultrapure water W3, and measures the platinum group metal of subsystem 4
Catalyst resin tower 13 enters saliva and the out concentration of hydrogen peroxide (initial stage) of saliva, and the results are shown in tables 1.In addition, measurement length
The concentration of hydrogen peroxide for going out saliva of platinum metal catalysts resin tower 13 after the time continuous running Ultrapure Water Purifiers 1
(latter stage).As a result shown in table 1 together.
Table 1
As known from Table 1, do not have platinum group metal for the rear class of the ultra-violet oxidation device 6 in 1 st pure water device 3 to urge
For the comparative example 1 of agent resin tower 7, the rising of the concentration of hydrogen peroxide of the ultrapure water W3 after long time running is obvious, relatively
In this, have almost no change in embodiment 1.
[comparative example 2,3 and reference example]
By the resin of the platinum metal catalysts resin tower 13 after the long time running in comparative example 1 be divided into surface section,
Middle part, this 3 region of lower part are simultaneously taken out, and the resin of surface section and middle part is filled in each test column, as test platinum family gold
Metal catalyst resin tower.In addition, as a reference example, new resin being similarly filled in test column, is urged as platinum group metal
Agent resin tower.
It adds the hydrogen peroxide of 300 μ g/L and 1000 μ g/L respectively in ultrapure water (hydrogen peroxide is less than 1 μ g/L), prepares
Test is with entering saliva, by the test with entering saliva with 300hr-1Water flowing speed (SV) downwards circulation after above-mentioned test column,
Determine the concentration of hydrogen peroxide of saliva.As a result it is shown in table 2.
Table 2
As known from Table 2, for filling the surface section resin of the platinum metal catalysts resin tower 13 after long time running
For the comparative example 2 of column, the concentration for handling the hydrogen peroxide of water, which is lower than, is filled in middle part resin in the comparative example 3 of column
Manage the concentration of the hydrogen peroxide of water.It follows that the hydrogen peroxide capacity of decomposition of middle part resin declines more.To with to flow down
Mode water flowing in the platinum metal catalysts resin tower 13 the case where for, concentration of hydrogen peroxide is gone downwards with from surface section
And then reduce, on the other hand, hydrogen concentration reduction is deposited due to molten, thus it is speculated that the decline of hydrogen peroxide capacity of decomposition is drawn because of hydrogen deficiency
Caused by the oxidative degradation risen.
The explanation of appended drawing reference
1: Ultrapure Water Purifiers；
3: 1 st pure water manufacturing device；
4: subsystem (second pure water manufacturing device)；
6: ultra-violet oxidation device；
7: platinum metal catalysts resin tower；
8: regenerative ion interchange unit；
9: Filtertype Air Extractor；
12: ultra-violet oxidation device；
13: platinum metal catalysts resin tower；
14: Filtertype Air Extractor；
15: non-renewable type mixed bed formula ion interchange unit；
W: raw water；
W1: pretreated water；
W2: 1 st pure water；
W3: ultrapure water (second pure water).
Claims (8)
1. a kind of Ultrapure Water Purifiers,
Comprising: which 1 st pure water device, has ultra-violet oxidation device, regenerative mixed bed formula ion exchange tower or electrodeionization dress
It sets and Filtertype Air Extractor；And
Subsystem handles the 1 st pure water obtained from the 1 st pure water device, and the subsystem has ultraviolet light oxygen
Makeup sets, platinum metal catalysts resin tower and Filtertype Air Extractor,
In the Ultrapure Water Purifiers, in the rear class setting platinum family gold of the ultra-violet oxidation device of the 1 st pure water device
Metal catalyst resin tower.
2. Ultrapure Water Purifiers as described in claim 1, wherein
The subsystem further includes non-renewable type mixed bed formula ion exchange tower.
3. Ultrapure Water Purifiers as claimed in claim 1 or 2, wherein
The platinum metal catalysts resin tower of the 1 st pure water device and the platinum metal catalysts resin tower of the subsystem
In platinum group metal be platinum, palladium or platinum/palldium alloy.
4. Ultrapure Water Purifiers according to any one of claims 1 to 3, wherein
The platinum group metal is the platinum group metal particle that average grain diameter is 1~50nm.
5. a kind of method of operation of Ultrapure Water Purifiers, wherein
The Ultrapure Water Purifiers include: 1 st pure water device, have ultra-violet oxidation device, platinum metal catalysts resin
Tower, regenerative mixed bed formula ion exchange tower or electric deionizer and Filtertype Air Extractor；And
Subsystem handles the 1 st pure water obtained from the 1 st pure water device, and the subsystem has ultraviolet light oxygen
Makeup sets, platinum metal catalysts resin tower and Filtertype Air Extractor,
The method of operation of the Ultrapure Water Purifiers is by making the continuous water flowing of treated water in the 1 st pure water device and institute
Subsystem is stated to manufacture ultrapure water.
6. the method for operation of Ultrapure Water Purifiers as claimed in claim 5, wherein
The platinum metal catalysts resin tower of the 1 st pure water device and the platinum metal catalysts resin tower of the subsystem
In platinum group metal be platinum, palladium or platinum/palldium alloy.
7. such as the method for operation of Ultrapure Water Purifiers described in claim 5 or 6, wherein
The platinum group metal is the platinum group metal particle that average grain diameter is 1~50nm.
8. the method for operation of the Ultrapure Water Purifiers as described in any one of claim 5~7, wherein
The H of the processing water of the ultra-violet oxidation device of the subsystem2O2Concentration is 10~100 μ g/L, the platinum family gold of the subsystem
The H of the processing water of metal catalyst resin tower2O2Concentration is 0.1~10 μ g/L.
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| JP2016236235A JP6439777B2 (en) | 2016-12-05 | 2016-12-05 | Ultrapure water production apparatus and operation method of ultrapure water production apparatus |
| JP2016-236235 | 2016-12-05 | ||
| PCT/JP2017/032788 WO2018105188A1 (en) | 2016-12-05 | 2017-09-12 | Ultrapure water production apparatus and operation method for ultrapure water production apparatus |
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| KR (1) | KR102497591B1 (en) |
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| CN115551809A (en) * | 2020-05-20 | 2022-12-30 | 奥加诺株式会社 | Boron removal apparatus and method, pure water production apparatus, and pure water production method |
| CN115893769A (en) * | 2023-01-09 | 2023-04-04 | 中国电子工程设计院有限公司 | System for fine processing return circuit carries pure water |
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| JP2020142178A (en) * | 2019-03-05 | 2020-09-10 | 栗田工業株式会社 | Ultrapure water production apparatus and method for operating the ultrapure water production apparatus |
| CN115697915A (en) * | 2020-06-23 | 2023-02-03 | 奥加诺株式会社 | Water treatment apparatus, ultrapure water production apparatus, and water treatment method |
| WO2024014218A1 (en) * | 2022-07-14 | 2024-01-18 | 栗田工業株式会社 | Ultrapure water production apparatus and method for operating ultrapure water production apparatus |
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| TW201821375A (en) | 2018-06-16 |
| JP6439777B2 (en) | 2018-12-19 |
| KR102497591B1 (en) | 2023-02-07 |
| KR20190089877A (en) | 2019-07-31 |
| WO2018105188A1 (en) | 2018-06-14 |
| JP2018089587A (en) | 2018-06-14 |
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