CN109887873A - A kind of production and processing method of high-quality quartz boat - Google Patents
A kind of production and processing method of high-quality quartz boat Download PDFInfo
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- CN109887873A CN109887873A CN201910113972.4A CN201910113972A CN109887873A CN 109887873 A CN109887873 A CN 109887873A CN 201910113972 A CN201910113972 A CN 201910113972A CN 109887873 A CN109887873 A CN 109887873A
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- high temperature
- temperature resistant
- slot stick
- quartz boat
- drawstring
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Abstract
The invention discloses a kind of production and processing methods of high-quality quartz boat, belong to semi-conductor silicon chip carrier technical field, solve the problems, such as that the easy deformation of product, product quality that conventional quartz boat production technology processes are poor.It mainly include the processes such as supplied materials inspection, cutting, Cutter Body Processing with Machining Center, pickling, pure water cleaning, fire processing, bearing annealing, pickling, pure water cleaning, encapsulation delivery.The product quality that processing technology of the present invention is produced is high, and slot stick is by high temperature resistant slab supporting medium, the deformation for effectivelying prevent slot stick to generate in annealing process；Supporting station structure of dragline type annealing designs so that the present invention has very strong versatility；Improving cost of the present invention is low, and annealing supporting station manufacturing cost is low, and easy for operation quick, practicability is very strong, is widely used, and is of great significance in quartz boat processing technique field.
Description
Technical field
The invention belongs to semi-conductor silicon chip carrier technical fields, specifically, more particularly to a kind of easy to operate, manufacture at
Originally the production and processing method of high-quality quartz boat that is low, increasing substantially product quality.
Background technique
Quartz boat is a kind of semi-conductor silicon chip carrying tool, is most widely used at present there are two purposes: 1. solar-electricities
The step that pond piece has a step very crucial in the production process needs quartz boat expanding as carrying fixture spreading in the step
Dissipate the fixed silicon solar cell semi-finished product of furnace；2. semi-conductor silicon chip has multiple process in the production process, from one of work
Sequence transports next procedure and needs to need multiple silicon wafer in quartz boat carrying semi-finished product silicon wafer, such as LED epitaxial wafer production process
Appearance, test of product performance, the product before inspection, after examining require quartz boat carrying.As shown in Figure of description Fig. 1, often
The quartz boat seen includes both side plate, and slot stick under slot stick and two quartz boats on two quartz boats being fixed between both side plate.It passes
The processing technology of system quartz boat includes following processing flow: supplied materials inspection → cutting → Cutter Body Processing with Machining Center → pickling → pure water cleaning
→ fire processing → anneal → pickling → pure water cleaning → encapsulation delivery.The traditionally product product that processing technology is produced
Matter is poor, the reason is that product is directly placed on quartzy frame by drag hook together in quartzy frame push-in annealing furnace in annealing process
Annealing catches on quartzy frame by drag hook again after annealing and product pull-out is placed on graphite plate and is cooled down.Due to quartz boat
Slot stick designs for strip structure, in high-temperature annealing process, is easy to happen deformation, especially in slot stick center position,
It is exactly that deformation is more obvious at the position of centre of gravity of slot stick, seriously affects the quality and enterprise's public praise of product.And anneal be must
Indispensable process is answered because quartz boat semi-finished product weld after the manufacturing procedure that over-fired can generate stress if do not removed
Power, weld can be broken.
Summary of the invention
The purpose of the present invention is in view of the deficienciess of the prior art, provide it is a kind of it is easy to operate, manufacturing cost is low, big
Amplitude improves the production and processing method of the high-quality quartz boat of product quality.
The present invention is achieved by the following technical solutions:
A kind of production and processing method of high-quality quartz boat, including following operating procedure:
A. supplied materials is examined；
B. it cuts: examining qualified quartz pushrod to require to cut according to regulation size step a；
C. Cutter Body Processing with Machining Center；Go out the inserted slot of quartz pushrod and the side plate of quartz boat using Cutter Body Processing with Machining Center；
D. pickling: the product of pickling solution clean operation c is utilized；
E. pure water cleans: the product of step d is put into pure water and is cleaned, naturally dry after cleaning；
F. fire processing: using the product of quartz welding torch welding step e, by quartz pushrod and side plate it is affixed after, quartz boat half at
Product molding；
G. bearing annealing: annealing destressing will be carried out in the quartz boat semi-finished product push-in annealing furnace of step f, the quartz boat half
By being placed on silica wool after the bearing of annealing supporting station in furnace, the silica wool is laid on quartzy frame finished product；Annealing terminates
Afterwards, the semi-finished product pull-out after annealing is statically placed on graphite plate and is slowly cooled down；
H. pickling: product after cooling in step g is put into pickling solution and is cleaned；
I. pure water cleans: the product of step h is put into pure water and is cleaned, naturally dry after cleaning；
J. encapsulation delivery: carrying out exfactory inspection for the product in step i, and qualified product will be examined to encapsulate delivery.
Preferably, the temperature of the annealing is 1000-1150 DEG C, annealing time 35-55min.
Preferably, the annealing supporting station includes the two high temperature resistants support being oppositely arranged on the outside of two long side surface of quartz boat
Frame；
Be equipped on the two high temperature resistant support frames at least two in the same horizontal line, the upper slot stick that is spaced apart draws
Rope through-hole；Below the upper slot stick drawstring through-hole, at least two are additionally provided in same level on the two high temperature resistant support frames
Lower slot stick drawstring through-hole on line, being spaced apart；
In one of them on the high temperature resistant support frame on slot stick drawstring through-hole and another described high temperature resistant support frame
One of them on slot stick drawstring through-hole constitute a pair of of drawstring through-hole, which is separately connected slot stick high temperature resistant and draws
The both ends of rope, the upper slot stick high temperature resistant drawstring is equipped with the high temperature resistant plate I for supporting slot stick on the quartz boat, described
The high temperature resistant plate I is close to slot stick bottom end on quartz boat by upper slot stick high temperature resistant drawstring both ends tightening；
On one of them lower slot stick drawstring through-hole and another described high temperature resistant support frame on the high temperature resistant support frame
One of them lower slot stick drawstring through-hole constitute a pair of of drawstring through-hole, which is separately connected lower slot stick high temperature resistant drawing
The both ends of rope, the lower slot stick high temperature resistant drawstring are equipped with the high temperature resistant plate II for supporting slot stick under the quartz boat, institute
It states lower slot stick high temperature resistant drawstring both ends tightening and the high temperature resistant plate II is close to slot stick bottom end under quartz boat.
Preferably, the material of the high temperature resistant support frame is pyroceram fibre inorganic board；The high temperature resistant plate I,
The material of the high temperature resistant plate II is pyroceram fibre inorganic board；The upper slot stick high temperature resistant drawstring and the lower resistance to height of slot stick
Warm drawstring is pyroceram fibre rope.
Preferably, I bottom of high temperature resistant plate offers carry convenient for slot stick high temperature resistant drawstring on quartz boat, section
In the groove of arc-shaped；II bottom of high temperature resistant plate offer convenient under quartz boat slot stick high temperature resistant drawstring carry, cut
Face is in the groove of arc-shaped.The design of groove is so that high temperature resistant plate I and high temperature resistant plate II are firm, do not slide.
Preferably, quartz pushrod and side plate recycle quartz after being pre-positioned using welding localization tool in the step f
Welding gun is welded.The group weldering process of side plate and slot stick is the fiery process of quartz boat.The group of traditional side plate and slot stick is welded
Method are as follows: first mark the welding position of each slot stick in side plate, subsequent operation master worker holds assembling according to the position left hand of label
Component, the right hand are held quartz welding torch, are slowly welded.On the one hand this operation mode requires very the working experience of operation master worker
Height, another aspect positioning accuracy is big by human factor, and position error is bigger, and the quartz boat product quality produced is poor.
Preferably, the welding localization tool includes graphite base, and the graphite base is equipped with connection fixed thereto
Graphite side；It is additionally provided on the graphite base along the slider I and sliding block II that table body slides back and forth thereon, and the slider I, cunning
Block II is perpendicular with the graphite side respectively；It is equipped between the slider I and the sliding block II for supporting quartz boat slot
The slot stick positioning supporting frame of stick；The slot stick positioning supporting frame includes two supporting side plates being oppositely arranged, and described in connection two
The attachment beam of supporting side plate, the supporting side plate include single order step for supporting slot stick on quartz boat and for supporting quartz
The second order step of slot stick under boat.Setting accuracy is high, and quartz boat product quality is greatly improved；Structure design is simple, manufactures
It is easy, is easy to operate, increasing substantially the processing efficiency of fiery manufacturing procedure；It is low to group skill requirement of weldering operating personnel, enterprise
Operating personnel is trained without requiring efforts, enterprise's production cost is greatly lowered；Manufacturing cost is low, and practicability is very strong, using wide
General, which is equally of great significance in quartz boat processing technique field.
Preferably, the single order step, the second order step are equipped with the retention bead for preventing slot stick radial-play, described
Retention bead is fixed as one with the supporting side plate.
Preferably, the graphite base is equipped with two sliding slots being parallel to each other, the slider I, II bottom of the sliding block
It is equipped with the sliding block along sliding slot sliding.
Preferably, the overlap extended toward outside, and the overlap bottom to institute are equipped at the top of the supporting side plate two sides
The distance for stating supporting side plate bottom is equal to the height of the graphite side.
Compared with prior art, the beneficial effects of the present invention are:
1. the product quality that processing technology of the present invention is produced is high, slot stick effectively prevent slot stick by high temperature resistant slab supporting medium
The deformation generated in annealing process；
2. dragline type is annealed, supporting station structure is designed so that the present invention has very strong versatility, by adjusting high temperature resistant
The elastic height that can arbitrarily adjust high temperature resistant plate of drawstring can be suitable for the quartz boat of all specifications；
3. improving cost of the present invention is low, annealing supporting station manufacturing cost is low, and easy for operation quick, practicability is very strong,
It is widely used, is of great significance in quartz boat processing technique field.
Detailed description of the invention
Fig. 1 is the common quartz boat structure schematic diagram in market；
Fig. 2 is present invention annealing supporting station structural schematic diagram；
Fig. 3 is present invention annealing supporting station high temperature resistant support frame structure diagram；
Fig. 4 is quartzy frame structural schematic diagram of the invention；
Fig. 5 is present invention welding positioning tool structure schematic diagram；
Fig. 6 is structural schematic diagram when present invention welding localization tool is free of slot stick positioning supporting frame；
Fig. 7 is slot stick positioning supporting frame structural schematic diagram of the present invention；
Fig. 8 is slot stick positioning supporting frame schematic side view of the present invention.
In figure: 1. silica wools；2. quartzy frame；3-1. high temperature resistant support frame；The upper slot stick drawstring through-hole of 3-2.；Slot stick under 3-3.
Drawstring through-hole；The upper slot stick high temperature resistant drawstring of 3-4.；3-5. high temperature resistant plate I；Slot stick high temperature resistant drawstring under 3-6.；3-7. high temperature resistant
Plate II；4-1. graphite base；4-2. graphite side；4-3. slider I；4-4. sliding block II；4-5. supporting side plate；4-6. connection
Beam；4-7. single order step；4-8. second order step；4-9. retention bead；4-10. sliding slot；4-11. overlap；5. slot stick on quartz boat；
6. slot stick under quartz boat；7. side plate.
Specific embodiment
The following further describes the present invention with reference to the drawings:
A kind of production and processing method of high-quality quartz boat, including following operating procedure:
A. supplied materials is examined；
B. it cuts: examining qualified quartz pushrod to require to cut according to regulation size step a；
C. Cutter Body Processing with Machining Center；Go out the inserted slot of quartz pushrod and the side plate 7 of quartz boat using Cutter Body Processing with Machining Center；
D. pickling: the product of pickling solution clean operation c is utilized；
E. pure water cleans: the product of step d is put into pure water and is cleaned, naturally dry after cleaning；
F. fire processing: using the product of quartz welding torch welding step e, by quartz pushrod and side plate 7 it is affixed after, quartz boat half at
Product molding；
G. bearing annealing: annealing destressing will be carried out in the quartz boat semi-finished product push-in annealing furnace of step f, the quartz boat half
By being placed on silica wool 1 after the bearing of annealing supporting station in furnace, the silica wool 1 is laid on quartzy frame 2 finished product；Annealing knot
Semi-finished product pull-out after annealing is statically placed on graphite plate and slowly cools down by Shu Hou；
H. pickling: product after cooling in step g is put into pickling solution and is cleaned；
I. pure water cleans: the product of step h is put into pure water and is cleaned, naturally dry after cleaning；
J. encapsulation delivery: carrying out exfactory inspection for the product in step i, and qualified product will be examined to encapsulate delivery.
Preferably, the temperature of the annealing is 1000-1150 DEG C, annealing time 35-55min.
Preferably, the annealing supporting station includes the two high temperature resistants support being oppositely arranged on the outside of two long side surface of quartz boat
Frame 3-1；
Be equipped on the two high temperature resistant support frame 3-1 at least two in the same horizontal line, the upper slot that is spaced apart
Stick drawstring through-hole 3-2；Below the upper slot stick drawstring through-hole 3-2, at least two are additionally provided on the two high temperature resistant support frame 3-1
It is a in the same horizontal line, the lower slot stick drawstring through-hole 3-3 that is spaced apart；
Slot stick drawstring through-hole 3-2 and another described high temperature resistant branch in one of them on the high temperature resistant support frame 3-1
Slot stick drawstring through-hole 3-2 constitutes a pair of of drawstring through-hole in one of them on support 3-1, which is separately connected
The both ends of slot stick high temperature resistant drawstring 3-4, the upper slot stick high temperature resistant drawstring 3-4 are equipped with for supporting slot stick on the quartz boat
I 3-5 of high temperature resistant plate is close to quartz by 5 I 3-5 of high temperature resistant plate, the upper slot stick high temperature resistant both ends the drawstring 3-4 tightening
5 bottom end of slot stick on boat；
One of them lower slot stick drawstring through-hole 3-3 and another described high temperature resistant branch on the high temperature resistant support frame 3-1
One of them lower slot stick drawstring through-hole 3-3 on support 3-1 constitutes a pair of of drawstring through-hole, which is separately connected down
The both ends of slot stick high temperature resistant drawstring 3-6, the lower slot stick high temperature resistant drawstring 3-6 are equipped with for supporting slot stick under the quartz boat
II 3-7 of high temperature resistant plate is close to stone by 6 II 3-7 of high temperature resistant plate, the lower slot stick high temperature resistant both ends the drawstring 3-6 tightening
6 bottom end of slot stick under Ying Zhou.
Preferably, the material of the high temperature resistant support frame 3-1 is pyroceram fibre inorganic board；The high temperature resistant plate
I 3-5, II 3-7 of high temperature resistant plate material be pyroceram fibre inorganic board；The upper slot stick high temperature resistant drawstring 3-4
It is pyroceram fibre rope with lower slot stick high temperature resistant drawstring 3-6.
Preferably, I bottom 3-5 of high temperature resistant plate offers carries convenient for 5 high temperature resistant drawstring 3-4 of slot stick on quartz boat
, section be in arc-shaped groove；II bottom 3-7 of high temperature resistant plate offers draws convenient for 6 high temperature resistant of slot stick under quartz boat
Rope 3-6 is carried, section is in the groove of arc-shaped.
Preferably, quartz pushrod and side plate 7 recycle quartz after being pre-positioned using welding localization tool in the step f
Welding gun is welded.
Preferably, the welding localization tool includes graphite base 4-1, and the graphite base 4-1 is equipped with fixed thereto
The graphite side 4-2 of connection；It is additionally provided on the graphite base 4-1 along the slider I 4-3 and sliding block II that table body slides back and forth thereon
4-4-4, and the slider I 4-3, II 4-4-4 of sliding block are perpendicular with the graphite side 4-2 respectively；The slider I 4-3 with
The slot stick positioning supporting frame for supporting quartz boat slot stick is equipped between II 4-4-4 of sliding block；The slot stick positioning supporting frame
Including two supporting side plate 4-5 being oppositely arranged, and the attachment beam 4-6 of the two supporting side plate 4-5 of connection, the supporting side plate
4-5 includes the single order step 4-7 for supporting slot stick 5 on the quartz boat and second order step 4- for supporting slot stick 6 under quartz boat
8。
Preferably, the single order step 4-7, the second order step 4-8 are equipped with the limit convex for preventing slot stick radial-play
4-9 is played, the retention bead 4-9 is fixed as one with the supporting side plate 4-5.
Preferably, the graphite base 4-1 is equipped with two sliding slot 4-10, the slider I 4-3 being parallel to each other, described
II bottom 4-4-4 of sliding block is equipped with the sliding block along sliding slot 4-10 sliding.
Preferably, the overlap 4-11 extended toward outside, and the overlap 4- are equipped at the top of the two sides the supporting side plate 4-5
The distance of 11 bottoms to the bottom the supporting side plate 4-5 is equal to the height of the graphite side 4-2.
Embodiment 1:
The present embodiment includes following operating procedure:
A. supplied materials is examined；
B. it cuts: examining qualified quartz pushrod to require to cut according to regulation size step a；
C. Cutter Body Processing with Machining Center；Go out the inserted slot of quartz pushrod and the side plate 7 of quartz boat using Cutter Body Processing with Machining Center；
D. pickling: the product of pickling solution clean operation c is utilized；
E. pure water cleans: the product of step d is put into pure water and is cleaned, naturally dry after cleaning；
F. fire processing: using the product of quartz welding torch welding step e, by quartz pushrod and side plate 7 it is affixed after, quartz boat half at
Product molding；
G. bearing annealing: annealing destressing will be carried out in the quartz boat semi-finished product push-in annealing furnace of step f, the quartz boat half
By being placed on silica wool 1 after the bearing of annealing supporting station in furnace, silica wool 1 is laid on quartzy frame 2 finished product；Annealing terminates
Afterwards, the semi-finished product pull-out after annealing is statically placed on graphite plate and is slowly cooled down；As shown in Figure of description Fig. 4, quartzy frame 2 be by
The reticular structure of multiple quartz bar constructions, reticular structure is convenient for drag hook push-and-pull.Silica wool 1 is laid on quartzy frame 2, and silica wool exists
It is main herein to play buffering, increase drag effect, avoid drag hook from generating cunning in the relatively quartzy frame 2 of 2 process quartz boat of the quartzy frame of push-and-pull
It moves and damages product.
H. pickling: product after cooling in step g is put into pickling solution and is cleaned；
I. pure water cleans: the product of step h is put into pure water and is cleaned, naturally dry after cleaning；
J. encapsulation delivery: carrying out exfactory inspection for the product in step i, and qualified product will be examined to encapsulate delivery.
The annealing supporting station of the present embodiment includes the two high temperature resistants support being oppositely arranged on the outside of two long side surface of quartz boat
Frame 3-1；Be equipped on two high temperature resistant support frame 3-1 at least two in the same horizontal line, the upper slot stick drawstring that is spaced apart
Through-hole 3-2；Below upper slot stick drawstring through-hole 3-2, at least two are additionally provided in same horizontal line on two high temperature resistant support frame 3-1
On, the lower slot stick drawstring through-hole 3-3 that is spaced apart；Slot stick drawstring through-hole 3-2 in one of them on high temperature resistant support frame 3-1
A pair of of drawstring through-hole is constituted with slot stick drawstring through-hole 3-2 in one of them on another high temperature resistant support frame 3-1, which draws
Rope through-hole is separately connected the both ends of slot stick high temperature resistant drawstring 3-4, and upper slot stick high temperature resistant drawstring 3-4 is equipped with for supporting quartz
I 3-5 of high temperature resistant plate is close to quartz by I 3-5 of high temperature resistant plate of slot stick 5 on boat, the tightening of the upper slot stick high temperature resistant both ends drawstring 3-4
5 bottom end of slot stick on boat；One of them lower slot stick drawstring through-hole 3-3 and another high temperature resistant on high temperature resistant support frame 3-1 are supported
One of them lower slot stick drawstring through-hole 3-3 on frame 3-1 constitutes a pair of of drawstring through-hole, which is separately connected lower slot
The both ends of stick high temperature resistant drawstring 3-6, lower slot stick high temperature resistant drawstring 3-6 are equipped with the high temperature resistant for supporting slot stick 6 under quartz boat
II 3-7 of high temperature resistant plate is close to 6 bottom end of slot stick under quartz boat by II 3-7 of plate, the lower slot stick high temperature resistant both ends drawstring 3-6 tightening.
Specifically used method are as follows: set between the corresponding two upper slot stick drawstring through-holes in two positions high temperature resistant support frame 3-1
There is upper slot stick high temperature resistant drawstring 3-4, upper slot stick high temperature resistant drawstring 3-4 mono- passes through one of slot stick drawstring through-hole and knots
Fixed, other end is across slot stick drawstring through-hole on another with spare；Similarly operate another pair of slot stick drawstring through-hole.Two
I 3-5 of high temperature resistant plate is supported on root on slot stick high temperature resistant drawstring 3-4, tighten two upper slot stick high temperature resistant drawstring 3-4 at this time until
I 3-5 of high temperature resistant plate is close to slot stick 5 on quartz boat, and the other end of upper slot stick high temperature resistant drawstring 3-4 knots after tightening and fixes.
II 3-7 of high temperature resistant plate is tightly attached to 6 lower section of slot stick under quartz boat in the same way.I 3-5 of high temperature resistant plate, high temperature resistant are flat
The bearing of II 3-7 of plate, effectively prevents quartz boat slot stick a possibility that deformation occurs for annealing process.
The product quality that the present embodiment processing technology is produced is high, and slot stick effectively prevent slot stick by high temperature resistant slab supporting medium
The deformation generated in annealing process；Supporting station structure of dragline type annealing design so that the present embodiment have it is very strong general
Property, by adjusting the elastic height that can arbitrarily adjust high temperature resistant plate of high temperature resistant drawstring, all specification rulers can be suitable for
Very little quartz boat；The present embodiment improving cost is low, and annealing supporting station manufacturing cost is low, and easy for operation quick, practicability is very
By force, it is widely used, is of great significance in quartz boat processing technique field.
Embodiment 2:
The present embodiment includes following operating procedure:
A. supplied materials is examined；
B. it cuts: examining qualified quartz pushrod to require to cut according to regulation size step a；
C. Cutter Body Processing with Machining Center；Go out the inserted slot of quartz pushrod and the side plate 7 of quartz boat using Cutter Body Processing with Machining Center；
D. pickling: the product of pickling solution clean operation c is utilized；
E. pure water cleans: the product of step d is put into pure water and is cleaned, naturally dry after cleaning；
F. fire processing: using the product of quartz welding torch welding step e, by quartz pushrod and side plate 7 it is affixed after, quartz boat half at
Product molding；
G. bearing annealing: annealing destressing will be carried out in the quartz boat semi-finished product push-in annealing furnace of step f, the quartz boat half
By being placed on silica wool 1 after the bearing of annealing supporting station in furnace, silica wool 1 is laid on quartzy frame 2 finished product；Annealing terminates
Afterwards, the semi-finished product pull-out after annealing is statically placed on graphite plate and is slowly cooled down；As shown in Figure of description Fig. 4, quartzy frame 2 be by
The reticular structure of multiple quartz bar constructions, reticular structure is convenient for drag hook push-and-pull.Silica wool 1 is laid on quartzy frame 2, and silica wool exists
It is main herein to play buffering, increase drag effect, avoid drag hook from generating cunning in the relatively quartzy frame 2 of 2 process quartz boat of the quartzy frame of push-and-pull
It moves and damages product；
H. pickling: product after cooling in step g is put into pickling solution and is cleaned；
I. pure water cleans: the product of step h is put into pure water and is cleaned, naturally dry after cleaning；
J. encapsulation delivery: carrying out exfactory inspection for the product in step i, and qualified product will be examined to encapsulate delivery.
The annealing supporting station of the present embodiment includes the two high temperature resistants support being oppositely arranged on the outside of two long side surface of quartz boat
Frame 3-1；Be equipped on two high temperature resistant support frame 3-1 at least two in the same horizontal line, the upper slot stick drawstring that is spaced apart
Through-hole 3-2；Below upper slot stick drawstring through-hole 3-2, at least two are additionally provided in same horizontal line on two high temperature resistant support frame 3-1
On, the lower slot stick drawstring through-hole 3-3 that is spaced apart；Slot stick drawstring through-hole 3-2 in one of them on high temperature resistant support frame 3-1
A pair of of drawstring through-hole is constituted with slot stick drawstring through-hole 3-2 in one of them on another high temperature resistant support frame 3-1, which draws
Rope through-hole is separately connected the both ends of slot stick high temperature resistant drawstring 3-4, and upper slot stick high temperature resistant drawstring 3-4 is equipped with for supporting quartz
I 3-5 of high temperature resistant plate is close to quartz by I 3-5 of high temperature resistant plate of slot stick 5 on boat, the tightening of the upper slot stick high temperature resistant both ends drawstring 3-4
5 bottom end of slot stick on boat；One of them lower slot stick drawstring through-hole 3-3 and another high temperature resistant on high temperature resistant support frame 3-1 are supported
One of them lower slot stick drawstring through-hole 3-3 on frame 3-1 constitutes a pair of of drawstring through-hole, which is separately connected lower slot
The both ends of stick high temperature resistant drawstring 3-6, lower slot stick high temperature resistant drawstring 3-6 are equipped with the high temperature resistant for supporting slot stick 6 under quartz boat
II 3-7 of high temperature resistant plate is close to 6 bottom end of slot stick under quartz boat by II 3-7 of plate, the lower slot stick high temperature resistant both ends drawstring 3-6 tightening.
Specifically used method are as follows: set between the corresponding two upper slot stick drawstring through-holes in two positions high temperature resistant support frame 3-1
There is upper slot stick high temperature resistant drawstring 3-4, upper slot stick high temperature resistant drawstring 3-4 mono- passes through one of slot stick drawstring through-hole and knots
Fixed, other end is across slot stick drawstring through-hole on another with spare；Similarly operate another pair of slot stick drawstring through-hole.Two
I 3-5 of high temperature resistant plate is supported on root on slot stick high temperature resistant drawstring 3-4, tighten two upper slot stick high temperature resistant drawstring 3-4 at this time until
I 3-5 of high temperature resistant plate is close to slot stick 5 on quartz boat, and the other end of upper slot stick high temperature resistant drawstring 3-4 knots after tightening and fixes.
II 3-7 of high temperature resistant plate is tightly attached to 6 lower section of slot stick under quartz boat in the same way.I 3-5 of high temperature resistant plate, high temperature resistant are flat
The bearing of II 3-7 of plate, effectively prevents quartz boat slot stick a possibility that deformation occurs for annealing process.
The product quality that the present embodiment processing technology is produced is high, and slot stick effectively prevent slot stick by high temperature resistant slab supporting medium
The deformation generated in annealing process；Supporting station structure of dragline type annealing design so that the present embodiment have it is very strong general
Property, by adjusting the elastic height that can arbitrarily adjust high temperature resistant plate of high temperature resistant drawstring, all specification rulers can be suitable for
Very little quartz boat；The present embodiment improving cost is low, and annealing supporting station manufacturing cost is low, and easy for operation quick, practicability is very
By force, it is widely used, is of great significance in quartz boat processing technique field.
The present embodiment recycles quartz after quartz pushrod and side plate 7 are pre-positioned using welding localization tool in step f
Welding gun is welded.
The welding localization tool includes graphite base 4-1, the graphite side 4-2 being fixedly connected with graphite base 4-1；Graphite
Pedestal 4-1 is equipped with slider I 4-3 and sliding block II 4-4, slider I 4-3, cunning slide back and forth along table body thereon and being oppositely arranged
II 4-4 of block is perpendicular with graphite side 4-2 respectively；It is equipped between II 4-4 of slider I 4-3 and sliding block for supporting quartz boat slot
The slot stick positioning supporting frame of stick；Slot stick positioning supporting frame includes two supporting side plate 4-5 being oppositely arranged, and two support sides of connection
The attachment beam 4-6 of plate 4-5, supporting side plate 4-5 include single order step 4-7 for supporting slot stick 5 on quartz boat and for supporting
The second order step 4-8 of slot stick 6 under quartz boat.The graphite side 4-2 of the present embodiment is arranged on graphite base 4-1, supporting side plate
It is equipped with the overlap 4-11 extended toward outside at the top of the two sides 4-5, and the bottom overlap 4-11 is to the distance etc. of the bottom supporting side plate 4-5
Slot stick positioning supporting frame can be made to be preferably bonded with graphite side 4-2 in the design of the height of graphite side 4-2, overlap,
Observe whether positioning supporting frame is bonded with graphite side medial surface convenient for operating personnel.Graphite side 4-2 is pressed from both sides using G word and graphite
Pedestal 4-1 is detachable to be fastenedly connected.The limit for preventing slot stick radial-play is equipped on the present embodiment single order step, second order step
Position protrusion 4-9, retention bead 4-9 are fixed as one with supporting side plate.During clamping supporting side plate, slot stick, slot can be touched
The position of stick can move, and need constantly to adjust, and influence location efficiency, and the design of retention bead 4-9 can effectively prevent slot
Stick channels bit in radial directions, saves positioning time, provides operating personnel's working efficiency.On the graphite base of the present embodiment
The sliding slot 4-10 being parallel to each other equipped with two, slider I, II bottom of sliding block are equipped with the sliding block slided along the chute, the design of sliding slot
Not only make this jig easy to use, also improves the stability of entire jig.
The specifically used method of the present embodiment are as follows: be first moved to the outside slider I 4-3, II 4-4 of sliding block respectively, sky reserves
Graphite side 4-2 medial surface is close in the side of positioning supporting frame by the position of slot stick positioning supporting frame, then by upper slot stick, under
Slot stick is sequentially placed into single order step and second order step, and when placing on slot stick be close to the corner of single order step, lower slot stick is tight
Paste the corner of second order step.After placing, then supporting side plate 4-5, supporting side plate 4-5 are inserted between the end and sliding block of slot stick
Medial surface is close to graphite side 4-2 medial surface, slowly pushes slider I 4-3 and II 4-4 of sliding block toward interior direction, until two sliding blocks
Supporting side plate and slot stick are clamped, the positioning action to quartz boat component is played, after having good positioning by operating personnel to weld into
Row welding.
The present embodiment setting accuracy is high, and quartz boat product quality is greatly improved；Structure design is simple, manufacture is held
Easily, easy to operate, increase substantially the processing efficiency of fiery manufacturing procedure；To group weldering operating personnel skill requirement it is low, enterprise without
It need to require efforts and train operating personnel, enterprise's production cost is greatly lowered；Manufacturing cost is low, and practicability is very strong, is widely used,
The jig is equally of great significance in quartz boat processing technique field.
In conclusion only presently preferred embodiments of the present invention, is not used to limit the scope of implementation of the present invention, it is all according to
Equivalent changes and modifications carried out by shape described in scope of the invention as claimed, construction, feature and spirit should be included in this
In the scope of the claims of invention.
Claims (10)
1. a kind of production and processing method of high-quality quartz boat, which is characterized in that including following operating procedure:
A. supplied materials is examined；
B. it cuts: examining qualified quartz pushrod to require to cut according to regulation size step a；
C. Cutter Body Processing with Machining Center；Go out the inserted slot of quartz pushrod and the side plate of quartz boat using Cutter Body Processing with Machining Center；
D. pickling: the product of pickling solution clean operation c is utilized；
E. pure water cleans: the product of step d is put into pure water and is cleaned, naturally dry after cleaning；
F. fire processing: using the product of quartz welding torch welding step e, by quartz pushrod and side plate it is affixed after, quartz boat semi-finished product at
Type；
G. bearing annealing: annealing destressing will be carried out in the quartz boat semi-finished product push-in annealing furnace of step f, the quartz boat semi-finished product
By being placed on silica wool after the bearing of annealing supporting station in furnace, the silica wool is laid on quartzy frame；It, will after annealing
Semi-finished product pull-out after annealing, which is statically placed on graphite plate, slowly to be cooled down；
H. pickling: product after cooling in step g is put into pickling solution and is cleaned；
I. pure water cleans: the product of step h is put into pure water and is cleaned, naturally dry after cleaning；
J. encapsulation delivery: carrying out exfactory inspection for the product in step i, and qualified product will be examined to encapsulate delivery.
2. a kind of production and processing method of high-quality quartz boat according to claim 1, it is characterised in that: the annealing
Temperature is 1000-1150 DEG C, annealing time 35-55min.
3. a kind of production and processing method of high-quality quartz boat according to claim 1, it is characterised in that: the annealing branch
Cushion cap includes two high temperature resistant support frames being oppositely arranged on the outside of two long side surface of quartz boat；
Be equipped on the two high temperature resistant support frames at least two in the same horizontal line, the upper slot stick drawstring that is spaced apart it is logical
Hole；Below the upper slot stick drawstring through-hole, at least two are additionally provided in the same horizontal line on the two high temperature resistant support frames
, the lower slot stick drawstring through-hole being spaced apart；
Its in one of them on the high temperature resistant support frame on slot stick drawstring through-hole and another described high temperature resistant support frame
In a upper slot stick drawstring through-hole constitute a pair of of drawstring through-hole, which is separately connected slot stick high temperature resistant drawstring
Both ends, the upper slot stick high temperature resistant drawstring are equipped with the high temperature resistant plate I for supporting slot stick on the quartz boat, the upper slot
The high temperature resistant plate I is close to slot stick bottom end on quartz boat by the tightening of stick high temperature resistant drawstring both ends；
One of them on the high temperature resistant support frame descends its on slot stick drawstring through-hole and another described high temperature resistant support frame
In a lower slot stick drawstring through-hole constitute a pair of of drawstring through-hole, which is separately connected lower slot stick high temperature resistant drawstring
Both ends, the lower slot stick high temperature resistant drawstring is equipped with the high temperature resistant plate II for supporting slot stick under the quartz boat, under described
The high temperature resistant plate II is close to slot stick bottom end under quartz boat by the tightening of slot stick high temperature resistant drawstring both ends.
4. a kind of production and processing method of high-quality quartz boat according to claim 3, it is characterised in that: the high temperature resistant
The material of support frame is pyroceram fibre inorganic board；The high temperature resistant plate I, the high temperature resistant plate II material be it is resistance to
High-temperature ceramic fibre inorganic board；The upper slot stick high temperature resistant drawstring and lower slot stick high temperature resistant drawstring are pyroceram fibre
Rope.
5. a kind of production and processing method of high-quality quartz boat according to claim 3 or 4, it is characterised in that: described resistance to
I bottom of high temperature plate offers the groove that carry convenient for slot stick high temperature resistant drawstring on quartz boat, section is in arc-shaped；It is described resistance to
II bottom of high temperature plate offers the groove that carry convenient for slot stick high temperature resistant drawstring under quartz boat, section is in arc-shaped.
6. a kind of production and processing method of high-quality quartz boat according to claim 1, it is characterised in that: the step f
Middle quartz pushrod recycles quartz welding torch to be welded after being pre-positioned with side plate using welding localization tool.
7. a kind of production and processing method of high-quality quartz boat according to claim 6, it is characterised in that: the welding is fixed
Position jig includes graphite base, and the graphite base is equipped with the graphite side of connection fixed thereto；On the graphite base also
Equipped with along the slider I and sliding block II that thereon table body slides back and forth, and the slider I, sliding block II respectively with the graphite side
It is perpendicular；The slot stick positioning supporting frame for supporting quartz boat slot stick is equipped between the slider I and the sliding block II；The slot
Stick positioning supporting frame includes two supporting side plates being oppositely arranged, and the attachment beam of two supporting side plates of connection, the bearing
Side plate includes the single order step for supporting slot stick on quartz boat and the second order step for supporting slot stick under quartz boat.
8. a kind of production and processing method of high-quality quartz boat according to claim 7, it is characterised in that: a stage
Rank, the second order step are equipped with the retention bead for preventing slot stick radial-play, and the retention bead and the supporting side plate are solid
It is set to one.
9. a kind of production and processing method of high-quality quartz boat according to claim 7, it is characterised in that: the graphite bottom
Seat is equipped with two sliding slots being parallel to each other, and the slider I, II bottom of the sliding block are equipped with the cunning along sliding slot sliding
Block.
10. a kind of production and processing method of high-quality quartz boat according to claim 7, it is characterised in that: the bearing
The overlap extended toward outside is equipped at the top of side plate two sides, and the distance of the overlap bottom to the supporting side plate bottom is equal to
The height of the graphite side.
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| CN201910113972.4A CN109887873B (en) | 2019-02-14 | 2019-02-14 | Production and processing method of high-quality quartz boat |
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| CN201910113972.4A CN109887873B (en) | 2019-02-14 | 2019-02-14 | Production and processing method of high-quality quartz boat |
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| CN109887873B CN109887873B (en) | 2021-02-23 |
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| CN112133658A (en) * | 2020-09-29 | 2020-12-25 | 吴静立 | Processing production method of quartz boat |
| CN116021240A (en) * | 2023-02-20 | 2023-04-28 | 杭州泓芯微半导体有限公司 | Quartz boat processing technology |
| CN116441841A (en) * | 2023-06-19 | 2023-07-18 | 辽宁拓邦鸿基半导体材料有限公司 | Adjustable groove bar welding positioning mechanism |
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