CN209754391U - Quartz boat welding position tool - Google Patents

Quartz boat welding position tool Download PDF

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Publication number
CN209754391U
CN209754391U CN201920196670.3U CN201920196670U CN209754391U CN 209754391 U CN209754391 U CN 209754391U CN 201920196670 U CN201920196670 U CN 201920196670U CN 209754391 U CN209754391 U CN 209754391U
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CN
China
Prior art keywords
quartz boat
sliding block
graphite
side plate
supporting
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Active
Application number
CN201920196670.3U
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Chinese (zh)
Inventor
张伟
郭辉
徐亮荣
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Yangzhou Meihe Photoelectric Technology Co Ltd
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Yangzhou Meihe Photoelectric Technology Co Ltd
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Priority to CN201920196670.3U priority Critical patent/CN209754391U/en
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Abstract

The utility model discloses a quartz boat welding position tool belongs to semiconductor silicon chip carrier technical field, has solved that traditional quartz boat fire manufacturing procedure positioning accuracy is poor, to the high problem of operation personnel experience requirement. Mainly comprises a graphite base and a graphite side plate; the sliding block I and the sliding block II are arranged on the graphite base; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I and the sliding block II. The utility model has high positioning accuracy, and greatly improves the quality of quartz boat products; the structure design is simple, the manufacture is easy, the operation is convenient, and the processing efficiency of the fire processing procedure is greatly improved; the experience requirement on assembly welding operators is low, and enterprises do not need to spend effort on training the operators, so that the production cost of the enterprises is greatly reduced; the quartz boat has the advantages of low manufacturing cost, strong practicability and wide application, and has important significance in the technical field of quartz boat processing.

Description

quartz boat welding position tool
Technical Field
The utility model belongs to the technical field of the semiconductor silicon chip carrier, specifically speaking especially relates to a quartz boat welding position tool that convenient operation, positioning accuracy are high, can effectively improve quartz boat product quality.
background
The quartz boat is a semiconductor silicon wafer bearing tool, and has two most extensive applications at present: 1. the manufacturing process of the solar cell slice has a key step called diffusion, wherein a quartz boat is used as a bearing clamp to fix a semi-finished product of the silicon solar cell slice in a diffusion furnace; 2. the manufacturing process of the semiconductor silicon wafer comprises a plurality of process steps, a quartz boat is required to bear semi-finished silicon wafers when the semiconductor silicon wafer is transported from one process to the next process, for example, in the production process of an LED epitaxial wafer, the appearance and the product performance of the silicon wafer are required to be tested for many times, and products before and after the test are required to be borne by the quartz boat. As shown in the attached figure 1 of the specification, a common quartz boat comprises two side plates, and two upper groove rods and two lower groove rods which are fixed between the two side plates. The assembling and welding process of the side plates and the groove rods is the fire processing process of the quartz boat. The traditional assembly welding method of the side plates and the groove rods comprises the following steps: firstly, marking the welding position of each groove rod on the side plate, and then, slowly welding by a worker who holds the assembly part by the left hand and the quartz welding gun by the right hand according to the marked position. The operation mode has high requirements on the working experience of operators on one hand, and has large positioning precision due to human factors and large positioning error on the other hand, and the quality of the produced quartz boat products is poor.
Disclosure of Invention
The utility model aims at providing a quartz boat welding position tool that structural design is simple, convenient operation, positioning accuracy are high, can effectively improve quartz boat product quality not enough to prior art exists.
The utility model discloses a realize through following technical scheme:
A quartz boat welding positioning jig comprises a graphite base and a graphite side plate fixedly connected with the graphite base; the graphite base is provided with a sliding block I and a sliding block II which slide back and forth along the upper surface body of the graphite base and are oppositely arranged, and the sliding block I and the sliding block II are respectively vertical to the graphite side plate; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I and the sliding block II; the groove stick positioning support frame includes two opposite support curb plates that set up to and connect two the tie-beam of support curb plate, the support curb plate is including the second order step that is used for supporting the first order step of groove stick and is used for supporting the groove stick down.
Preferably, the first step and the second step are respectively provided with a limiting protrusion for preventing the groove rod from moving radially, and the limiting protrusions and the supporting side plates are fixed into a whole.
preferably, the graphite base is provided with two parallel sliding grooves, and the bottoms of the sliding block I and the sliding block II are provided with sliding blocks sliding along the sliding grooves.
Preferably, the graphite side plate is disposed on the graphite base.
Preferably, the tops of the two side surfaces of the supporting side plate are provided with fins extending outwards, and the distance from the bottom of each fin to the bottom of the supporting side plate is equal to the height of the graphite side plate.
Preferably, the graphite side plate is fixedly connected with the graphite base by a G-shaped clamp.
Compared with the prior art, the beneficial effects of the utility model are that:
1. The utility model has high positioning accuracy, and greatly improves the quality of quartz boat products;
2. The utility model has simple structure design, easy manufacture and convenient operation, and greatly improves the processing efficiency of the fire processing procedure;
3. The utility model has low experience requirements on assembly welding operators, enterprises do not need to spend effort on training the operators, and the production cost of the enterprises is greatly reduced;
4. The utility model discloses low in manufacturing cost, the practicality is very strong, uses extensively, has important meaning in quartz boat processing technology field.
Drawings
FIG. 1 is a schematic diagram of a conventional quartz boat;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic view of the structure of the positioning support frame for the channel bar of the present invention;
Fig. 4 is a side view of the positioning support frame for the channel bar of the present invention.
in the figure: 1. a graphite base; 2. a graphite side plate; 3. a sliding block I; 4. a sliding block II; 5. a support side plate; 6. a connecting beam; 7. a step; 8. a second step; 9. a chute; 10. flashing; 11. a limiting bulge; 12. an upper channel bar; 13. and a lower channel bar.
Detailed Description
the present invention will be further explained with reference to the accompanying drawings:
a quartz boat welding positioning jig comprises a graphite base 1 and a graphite side plate 2 fixedly connected with the graphite base 1; the graphite base 1 is provided with a sliding block I3 and a sliding block II 4 which slide back and forth along the upper surface body of the graphite base and are oppositely arranged, and the sliding block I3 and the sliding block II 4 are respectively vertical to the graphite side plate 2; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I3 and the sliding block II 4; the groove rod positioning support frame comprises two opposite supporting side plates 5 and a connecting beam 6 for connecting the two supporting side plates 5, wherein each supporting side plate 5 comprises a first-order step 7 for supporting an upper groove rod 12 and a second-order step 8 for supporting a lower groove rod 13.
Preferably, the first step 7 and the second step 8 are both provided with a limiting protrusion 11 for preventing the groove rod from moving radially, and the limiting protrusion 11 and the supporting side plate 5 are fixed into a whole.
Preferably, the graphite base 1 is provided with two parallel sliding grooves 9, and the bottoms of the sliding blocks I3 and II 4 are provided with sliding blocks which slide along the sliding grooves 9.
Preferably, the graphite side plate 2 is disposed on the graphite base 1.
Preferably, the tops of the two side surfaces of the supporting side plate 5 are provided with fins 10 extending outwards, and the distance from the bottom of the fins 10 to the bottom of the supporting side plate 5 is equal to the height of the graphite side plate 2.
Preferably, the graphite side plate 2 is fastened and connected with the graphite base 1 by a G-shaped clamp.
example 1:
The embodiment comprises a graphite base 1 and a graphite side plate 2 fixedly connected with the graphite base 1; the graphite base 1 is provided with a sliding block I3 and a sliding block II 4 which slide back and forth along the upper surface body of the graphite base and are oppositely arranged, and the sliding block I3 and the sliding block II 4 are respectively vertical to the graphite side plate 2; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I3 and the sliding block II 4; the grooved rod positioning support frame comprises two opposite supporting side plates 5 and a connecting beam 6 for connecting the two supporting side plates 5, wherein the supporting side plates 5 comprise first-order steps 7 for supporting an upper grooved rod 12 and second-order steps 8 for supporting a lower grooved rod 13. Graphite curb plate 2 of this embodiment sets up on graphite base 1, and 5 both sides face top of supporting curb plate is equipped with overlap 10 toward the outside extension, and the distance of overlap 10 bottom to 5 bottoms of supporting curb plate equals the height of graphite curb plate 2, and the design of overlap can make groove stick positioning support frame and graphite curb plate 2 laminate better, and the operating personnel of also being convenient for observes positioning support frame whether having laminated with graphite curb plate medial surface. The graphite side plate 2 is detachably and fixedly connected with the graphite base 1 by a G-shaped clamp.
The specific use method of the embodiment is as follows: move slider I3, slider II 4 toward the outside respectively earlier, empty position of reserving groove stick positioning support frame, hug closely 2 medial surfaces of graphite curb plate with positioning support frame's side, put into first order step and second order step with last groove stick, lower groove stick subsequently in proper order to go up the groove stick and hug closely the corner of first order step when placing, the corner of second order step is hugged closely to lower groove stick. After the quartz boat is placed, a supporting side plate 5 is inserted between the tail end of the groove rod and the sliding block, the inner side surface of the supporting side plate 5 is tightly attached to the inner side surface of the graphite side plate 2, the sliding block I3 and the sliding block II 4 are slowly pushed towards the inner side direction until the supporting side plate and the groove rod are clamped tightly by the two sliding blocks, the positioning effect on the quartz boat part is achieved, and after the quartz boat part is positioned, the welding part is welded by an operator.
Example 2:
The embodiment comprises a graphite base 1 and a graphite side plate 2 fixedly connected with the graphite base 1; the graphite base 1 is provided with a sliding block I3 and a sliding block II 4 which slide back and forth along the upper surface body of the graphite base and are oppositely arranged, and the sliding block I3 and the sliding block II 4 are respectively vertical to the graphite side plate 2; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I3 and the sliding block II 4; the grooved rod positioning support frame comprises two opposite supporting side plates 5 and a connecting beam 6 for connecting the two supporting side plates 5, wherein the supporting side plates 5 comprise first-order steps 7 for supporting an upper grooved rod 12 and second-order steps 8 for supporting a lower grooved rod 13. Graphite curb plate 2 of this embodiment sets up on graphite base 1, and 5 both sides face top of supporting curb plate is equipped with overlap 10 toward the outside extension, and the distance of overlap 10 bottom to 5 bottoms of supporting curb plate equals the height of graphite curb plate 2, and the design of overlap can make groove stick positioning support frame and graphite curb plate 2 laminate better, and the operating personnel of also being convenient for observes positioning support frame whether having laminated with graphite curb plate medial surface. The graphite side plate 2 is detachably and fixedly connected with the graphite base 1 by a G-shaped clamp. In this embodiment, the first step and the second step are both provided with a limiting protrusion 11 for preventing the groove rod from moving radially, and the limiting protrusion 11 and the supporting side plate are fixed into a whole. The groove rod can be touched in the process of clamping the supporting side plate, the position of the groove rod can be moved, the positioning efficiency is influenced by continuous adjustment, the groove rod can be effectively prevented from shifting in the radial direction by the aid of the design of the limiting protrusions 11, positioning time is saved, and the working efficiency of operators is improved. Be equipped with two spouts that are parallel to each other on the graphite base of this embodiment, slider I, II bottoms of slider all are equipped with along the gliding slider of spout, and the design of spout not only makes this tool convenient to use, has also improved the stability of whole tool.
The specific use method of the embodiment is as follows: move slider I3, slider II 4 toward the outside respectively earlier, empty position of reserving groove stick positioning support frame, hug closely 2 medial surfaces of graphite curb plate with positioning support frame's side, put into first order step and second order step with last groove stick, lower groove stick subsequently in proper order to go up the groove stick and hug closely the corner of first order step when placing, the corner of second order step is hugged closely to lower groove stick. After the quartz boat is placed, a supporting side plate 5 is inserted between the tail end of the groove rod and the sliding block, the inner side surface of the supporting side plate 5 is tightly attached to the inner side surface of the graphite side plate 2, the sliding block I3 and the sliding block II 4 are slowly pushed towards the inner side direction until the supporting side plate and the groove rod are clamped tightly by the two sliding blocks, the positioning effect on the quartz boat part is achieved, and after the quartz boat part is positioned, the welding part is welded by an operator.
In summary, the present invention is only a preferred embodiment, and is not intended to limit the scope of the present invention, and all equivalent changes and modifications of the shapes, structures, features and spirit described in the claims of the present invention should be included in the scope of the present invention.

Claims (6)

1. The utility model provides a quartz boat welding position tool which characterized in that: the graphite device comprises a graphite base and a graphite side plate fixedly connected with the graphite base; the graphite base is provided with a sliding block I and a sliding block II which slide back and forth along the upper surface body of the graphite base and are oppositely arranged, and the sliding block I and the sliding block II are respectively vertical to the graphite side plate; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I and the sliding block II; the groove stick positioning support frame includes two opposite support curb plates that set up to and connect two the tie-beam of support curb plate, the support curb plate is including the second order step that is used for supporting the first order step of groove stick and is used for supporting the groove stick down.
2. The quartz boat welding positioning jig of claim 1, characterized in that: and the first step and the second step are respectively provided with a limiting bulge for preventing the groove rod from moving radially, and the limiting bulge and the supporting side plate are fixed into a whole.
3. The quartz boat welding positioning jig of claim 1, characterized in that: the graphite base is provided with two parallel sliding grooves, and the bottom of the sliding block I and the bottom of the sliding block II are provided with sliding blocks sliding along the sliding grooves.
4. The quartz boat welding positioning jig of claim 1, characterized in that: the graphite side plate is arranged on the graphite base.
5. The quartz boat welding positioning jig of claim 4, wherein: and the tops of the two side surfaces of the supporting side plate are provided with flanges extending to the outer side, and the distance from the bottom of each flange to the bottom of the supporting side plate is equal to the height of the graphite side plate.
6. The quartz boat welding positioning jig of claim 4, wherein: the graphite side plate is fixedly connected with the graphite base through a G-shaped clamp.
CN201920196670.3U 2019-02-14 2019-02-14 Quartz boat welding position tool Active CN209754391U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920196670.3U CN209754391U (en) 2019-02-14 2019-02-14 Quartz boat welding position tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920196670.3U CN209754391U (en) 2019-02-14 2019-02-14 Quartz boat welding position tool

Publications (1)

Publication Number Publication Date
CN209754391U true CN209754391U (en) 2019-12-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920196670.3U Active CN209754391U (en) 2019-02-14 2019-02-14 Quartz boat welding position tool

Country Status (1)

Country Link
CN (1) CN209754391U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114853320A (en) * 2022-05-03 2022-08-05 浙江奥博石英科技股份有限公司 Groove stick inserted sheet quartz boat processing equipment
CN116021240A (en) * 2023-02-20 2023-04-28 杭州泓芯微半导体有限公司 Quartz boat processing technology

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114853320A (en) * 2022-05-03 2022-08-05 浙江奥博石英科技股份有限公司 Groove stick inserted sheet quartz boat processing equipment
CN114853320B (en) * 2022-05-03 2024-02-06 浙江奥博石英科技股份有限公司 Groove rod insert quartz boat processing equipment
CN116021240A (en) * 2023-02-20 2023-04-28 杭州泓芯微半导体有限公司 Quartz boat processing technology
CN116021240B (en) * 2023-02-20 2023-09-29 杭州泓芯微半导体有限公司 Quartz boat processing technology

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