CN109887873B - Production and processing method of high-quality quartz boat - Google Patents
Production and processing method of high-quality quartz boat Download PDFInfo
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- CN109887873B CN109887873B CN201910113972.4A CN201910113972A CN109887873B CN 109887873 B CN109887873 B CN 109887873B CN 201910113972 A CN201910113972 A CN 201910113972A CN 109887873 B CN109887873 B CN 109887873B
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Abstract
The invention discloses a production and processing method of a high-quality quartz boat, belongs to the technical field of semiconductor silicon wafer carriers, and solves the problems that products processed by the traditional quartz boat production process are easy to deform and poor in product quality. The method mainly comprises the procedures of incoming material inspection, cutting, machining of a machining center, acid washing, pure water cleaning, fire processing, support annealing, acid washing, pure water cleaning, packaging and delivery and the like. The product produced by the processing technology of the invention has high quality, and the slot bar is supported by the high temperature resistant flat plate, thus effectively preventing the slot bar from deforming in the annealing process; the structural design of the stay rope type annealing supporting platform ensures that the invention has very strong universality; the invention has the advantages of low improvement cost, low manufacturing cost of the annealing supporting table, convenient and quick operation and use, strong practicability and wide application, and has important significance in the technical field of quartz boat processing.
Description
Technical Field
The invention belongs to the technical field of semiconductor silicon wafer carriers, and particularly relates to a production and processing method of a high-quality quartz boat, which is simple to operate, low in manufacturing cost and capable of greatly improving the product quality.
Background
The quartz boat is a semiconductor silicon wafer bearing tool, and has two most extensive applications at present: 1. the manufacturing process of the solar cell slice has a key step called diffusion, wherein a quartz boat is used as a bearing clamp to fix a semi-finished product of the silicon solar cell slice in a diffusion furnace; 2. the manufacturing process of the semiconductor silicon wafer comprises a plurality of process steps, a quartz boat is required to bear semi-finished silicon wafers when the semiconductor silicon wafer is transported from one process to the next process, for example, in the production process of an LED epitaxial wafer, the appearance and the product performance of the silicon wafer are required to be tested for many times, and products before and after the test are required to be borne by the quartz boat. As shown in the attached figure 1 of the specification, a common quartz boat comprises two side plates, and two quartz boat upper groove rods and two quartz boat lower groove rods which are fixed between the two side plates. The processing technology of the traditional quartz boat comprises the following processing flows: incoming material inspection → cutting → machining center → acid cleaning → pure water cleaning → fire processing → annealing furnace → acid cleaning → pure water cleaning → packaging and delivering. The product produced according to the traditional processing technology has poor quality because the product is directly placed on the quartz frame and pushed into the annealing furnace together with the quartz frame for annealing in the annealing process, and the quartz frame is hooked by the draw hook after the annealing is finished so as to pull out the product and place the product on the graphite plate for cooling. Because the quartz boat groove rod is designed into a strip-shaped structure, the quartz boat groove rod is easy to deform in the high-temperature annealing process, and particularly the deformation is obvious at the central position of the groove rod, namely the gravity center position of the groove rod, so that the quality of a product and the public praise of an enterprise are seriously influenced. Annealing is an indispensable process, stress is generated at the welding position of the semi-finished quartz boat after the fire processing process, and if the stress is not removed, the welding position is broken.
Disclosure of Invention
The invention aims to provide a production and processing method of a high-quality quartz boat, which is simple to operate, low in manufacturing cost and capable of greatly improving the product quality, aiming at the defects in the prior art.
The invention is realized by the following technical scheme:
a production and processing method of a high-quality quartz boat comprises the following operation steps:
a. inspecting incoming materials;
b. cutting: cutting the quartz rods qualified in the step a according to the specified size requirement;
c. processing by a processing center; processing a wafer inserting groove of the quartz rod and a side plate of the quartz boat by using a processing center;
d. acid washing: cleaning the product of step c with an acid wash solution;
e. cleaning with pure water: d, putting the product obtained in the step d into pure water for cleaning, and naturally airing the product after cleaning;
f. fire processing: e, welding the product obtained in the step e by using a quartz welding gun, fixedly connecting a quartz rod with the side plate, and forming a semi-finished quartz boat product;
g. carrying out support annealing: pushing the semi-finished quartz boat product in the step f into an annealing furnace for annealing and stress relief, wherein the semi-finished quartz boat product is supported by an annealing supporting table in the furnace and then placed on quartz wool, and the quartz wool is flatly laid on a quartz rack; after the annealing is finished, pulling out the annealed semi-finished product, standing still on a graphite plate, and slowly cooling;
h. acid washing: g, putting the product cooled in the step g into an acid washing solution for washing;
i. cleaning with pure water: putting the product obtained in the step h into pure water for cleaning, and naturally drying the product after cleaning;
j. packaging and delivering goods: and (e) carrying out factory inspection on the product in the step i, and packaging and delivering the qualified product.
Preferably, the annealing temperature is 1000-1150 ℃, and the annealing time is 35-55 min.
Preferably, the annealing supporting table comprises two high-temperature-resistant supporting frames which are oppositely arranged at the outer sides of two long side surfaces of the quartz boat;
at least two upper groove rod pull rope through holes which are distributed on the same horizontal line at intervals are formed in the two high-temperature resistant support frames; at least two lower slotted rod pull rope through holes which are distributed on the same horizontal line at intervals are also arranged on the two high-temperature resistant support frames below the upper slotted rod pull rope through holes;
one of the upper slotted rod pull rope through holes on the high-temperature resistant support frame and one of the upper slotted rod pull rope through holes on the other high-temperature resistant support frame form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the upper slotted rod high-temperature resistant pull rope, the upper slotted rod high-temperature resistant pull rope is provided with a high-temperature resistant flat plate I for supporting the upper slotted rod of the quartz boat, and two ends of the upper slotted rod high-temperature resistant pull rope are tightened to tightly attach the high-temperature resistant flat plate I to the bottom end of the upper slotted rod of the quartz;
one of them lower groove stick stay cord through-hole and another on the high temperature resistant support frame one of them lower groove stick stay cord through-hole constitutes a pair of stay cord through-hole, and this a pair of stay cord through-hole is connected the both ends of lower groove stick high temperature resistant stay cord respectively, be equipped with on the lower groove stick high temperature resistant stay cord and be used for supporting quartz boat lower groove stick's resistant high temperature flat board II, the two tightening of lower groove stick high temperature resistant stay cord will resistant high temperature flat board II hugs closely quartz boat lower groove stick bottom.
Preferably, the high-temperature-resistant support frame is made of a high-temperature-resistant ceramic fiber inorganic board; the high-temperature resistant flat plate I and the high-temperature resistant flat plate II are made of high-temperature resistant ceramic fiber inorganic plates; the upper groove rod high-temperature-resistant pull rope and the lower groove rod high-temperature-resistant pull rope are both high-temperature-resistant ceramic fiber ropes.
Preferably, the bottom of the high-temperature resistant flat plate I is provided with a groove which is convenient for the high-temperature resistant pull rope of the groove rod on the quartz boat to bear and has an arc-shaped section; and a groove which is convenient for the high-temperature resistant pull rope of the lower groove rod of the quartz boat to bear and has an arc-shaped section is formed at the bottom of the high-temperature resistant flat plate II. The design of the groove enables the high-temperature resistant flat plate I and the high-temperature resistant flat plate II to be stable and not to slide off.
Preferably, the quartz rod and the side plate in the step f are pre-positioned by adopting a welding positioning jig and then welded by utilizing a quartz welding gun. The assembling and welding process of the side plates and the groove rods is the fire processing process of the quartz boat. The traditional assembly welding method of the side plates and the groove rods comprises the following steps: firstly, marking the welding position of each groove rod on the side plate, and then, slowly welding by a worker who holds the assembly part by the left hand and the quartz welding gun by the right hand according to the marked position. The operation mode has high requirements on the working experience of operators on one hand, and has large positioning precision due to human factors and large positioning error on the other hand, and the quality of the produced quartz boat products is poor.
Preferably, the welding positioning jig comprises a graphite base, and a graphite side plate fixedly connected with the graphite base is arranged on the graphite base; the graphite base is also provided with a sliding block I and a sliding block II which slide back and forth along the upper surface body of the graphite base, and the sliding block I and the sliding block II are respectively vertical to the graphite side plate; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I and the sliding block II; the groove rod positioning support frame comprises two opposite supporting side plates and a connecting beam for connecting the two supporting side plates, wherein the supporting side plates comprise a first-order step for supporting the upper groove rod of the quartz boat and a second-order step for supporting the lower groove rod of the quartz boat. The positioning accuracy is high, and the quality of the quartz boat product is greatly improved; the structure design is simple, the manufacture is easy, the operation is convenient, and the processing efficiency of the fire processing procedure is greatly improved; the experience requirement on assembly welding operators is low, and enterprises do not need to spend effort on training the operators, so that the production cost of the enterprises is greatly reduced; the manufacturing cost is low, the practicality is very strong, uses extensively, and this tool also has important meaning in quartz boat processing technology field.
Preferably, the first step and the second step are respectively provided with a limiting protrusion for preventing the groove rod from moving radially, and the limiting protrusions and the supporting side plates are fixed into a whole.
Preferably, the graphite base is provided with two parallel sliding grooves, and the bottoms of the sliding block I and the sliding block II are provided with sliding blocks sliding along the sliding grooves.
Preferably, the tops of the two side surfaces of the supporting side plate are provided with fins extending outwards, and the distance from the bottom of each fin to the bottom of the supporting side plate is equal to the height of the graphite side plate.
Compared with the prior art, the invention has the beneficial effects that:
1. the product produced by the processing technology of the invention has high quality, and the slot bar is supported by the high temperature resistant flat plate, thus effectively preventing the slot bar from deforming in the annealing process;
2. the structural design of the pull rope type annealing supporting table ensures that the quartz boat has very strong universality, the height of the high-temperature resistant flat plate can be randomly adjusted by adjusting the tightness of the high-temperature resistant pull rope, and the quartz boat can be suitable for quartz boats of all specifications and sizes;
3. the invention has the advantages of low improvement cost, low manufacturing cost of the annealing supporting table, convenient and quick operation and use, strong practicability and wide application, and has important significance in the technical field of quartz boat processing.
Drawings
FIG. 1 is a schematic diagram of a conventional quartz boat;
FIG. 2 is a schematic view of an annealing support table according to the present invention;
FIG. 3 is a schematic view of the high temperature resistant support frame of the annealing support table of the present invention;
FIG. 4 is a schematic view of the structure of the quartz holder of the present invention;
FIG. 5 is a schematic view of a welding fixture according to the present invention;
FIG. 6 is a schematic structural view of the positioning fixture without a positioning support frame for a groove rod according to the present invention;
FIG. 7 is a schematic view of the structure of the channel bar positioning support frame of the present invention;
FIG. 8 is a side view of the channel bar positioning support of the present invention.
In the figure: 1. quartz wool; 2. a quartz holder; 3-1, a high temperature resistant support frame; 3-2, pulling rope through holes on the upper groove rods; 3-3, pulling rope through holes of the lower groove rods; 3-4, putting the groove rod into a high-temperature resistant pull rope; 3-5, a high-temperature resistant flat plate I; 3-6, pulling a high-temperature resistant rope by the lower groove rod; 3-7, a high temperature resistant flat plate II; 4-1, a graphite base; 4-2, graphite side plates; 4-3, a sliding block I; 4-4, sliding block II; 4-5, supporting the side plate; 4-6, connecting the beam; 4-7, a step; 4-8, a second step; 4-9, limiting bulges; 4-10, a chute; 4-11, flashing; 5. a groove bar is arranged on the quartz boat; 6. a quartz boat lower groove rod; 7. side plates.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
a production and processing method of a high-quality quartz boat comprises the following operation steps:
a. inspecting incoming materials;
b. cutting: cutting the quartz rods qualified in the step a according to the specified size requirement;
c. processing by a processing center; processing a wafer inserting groove of the quartz rod and a side plate 7 of the quartz boat by using a processing center;
d. acid washing: cleaning the product of step c with an acid wash solution;
e. cleaning with pure water: d, putting the product obtained in the step d into pure water for cleaning, and naturally airing the product after cleaning;
f. fire processing: welding the product obtained in the step e by using a quartz welding gun, fixedly connecting a quartz rod with the side plate 7, and forming a semi-finished quartz boat product;
g. carrying out support annealing: pushing the semi-finished quartz boat product in the step f into an annealing furnace for annealing and stress relief, wherein the semi-finished quartz boat product is supported by an annealing supporting table in the furnace and then placed on quartz wool 1, and the quartz wool 1 is flatly laid on a quartz rack 2; after the annealing is finished, pulling out the annealed semi-finished product, standing still on a graphite plate, and slowly cooling;
h. acid washing: g, putting the product cooled in the step g into an acid washing solution for washing;
i. cleaning with pure water: putting the product obtained in the step h into pure water for cleaning, and naturally drying the product after cleaning;
j. packaging and delivering goods: and (e) carrying out factory inspection on the product in the step i, and packaging and delivering the qualified product.
Preferably, the annealing temperature is 1000-1150 ℃, and the annealing time is 35-55 min.
Preferably, the annealing supporting table comprises two high-temperature-resistant supporting frames 3-1 which are oppositely arranged at the outer sides of two long side surfaces of the quartz boat;
at least two upper groove rod pull rope through holes 3-2 which are distributed on the same horizontal line at intervals are arranged on the two high-temperature resistant support frames 3-1; at least two lower slotted rod pull rope through holes 3-3 which are distributed on the same horizontal line at intervals are also arranged on the two high-temperature resistant support frames 3-1 below the upper slotted rod pull rope through holes 3-2;
one upper slotted rod pull rope through hole 3-2 on the high-temperature resistant support frame 3-1 and one upper slotted rod pull rope through hole 3-2 on the other high-temperature resistant support frame 3-1 form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of an upper slotted rod high-temperature resistant pull rope 3-4, a high-temperature resistant flat plate I3-5 for supporting the upper slotted rod 5 of the quartz boat is arranged on the upper slotted rod high-temperature resistant pull rope 3-4, and the two ends of the upper slotted rod high-temperature resistant pull rope 3-4 are tightened to tightly attach the high-temperature resistant flat plate I3-5 to the bottom end of the upper slotted rod 5 of the quartz boat;
one lower groove rod pull rope through hole 3-3 on the high temperature resistant support frame 3-1 and one lower groove rod pull rope through hole 3-3 on the other high temperature resistant support frame 3-1 form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the lower groove rod high temperature resistant pull rope 3-6, a high temperature resistant flat plate II 3-7 for supporting the lower groove rod 6 of the quartz boat is arranged on the lower groove rod high temperature resistant pull rope 3-6, and two ends of the lower groove rod high temperature resistant pull rope 3-6 are tightened to tightly attach the high temperature resistant flat plate II 3-7 to the bottom end of the lower groove rod 6 of the quartz boat.
Preferably, the high-temperature-resistant support frame 3-1 is made of a high-temperature-resistant ceramic fiber inorganic board; the high-temperature resistant flat plates I3-5 and the high-temperature resistant flat plates II 3-7 are made of high-temperature resistant ceramic fiber inorganic plates; the upper groove rod high-temperature-resistant pull rope 3-4 and the lower groove rod high-temperature-resistant pull rope 3-6 are both high-temperature-resistant ceramic fiber ropes.
Preferably, the bottom of the high-temperature resistant flat plate I3-5 is provided with a groove which is convenient for the high-temperature resistant pull rope 3-4 of the quartz boat upper groove rod 5 to bear and has an arc-shaped section; and the bottom of the high-temperature resistant flat plate II 3-7 is provided with a groove which is convenient for the high-temperature resistant pull rope 3-6 of the lower groove rod 6 of the quartz boat to bear and has an arc-shaped section.
Preferably, the quartz rod and the side plate 7 are pre-positioned by a welding positioning jig in the step f and then welded by a quartz welding gun.
Preferably, the welding positioning jig comprises a graphite base 4-1, and a graphite side plate 4-2 fixedly connected with the graphite base 4-1 is arranged on the graphite base 4-1; the graphite base 4-1 is also provided with a sliding block I4-3 and a sliding block II 4-4-4 which slide back and forth along the upper surface body of the graphite base, and the sliding block I4-3 and the sliding block II 4-4-4 are respectively vertical to the graphite side plate 4-2; a groove rod positioning support frame for supporting a quartz boat groove rod is arranged between the sliding block I4-3 and the sliding block II 4-4-4; the groove rod positioning support frame comprises two support side plates 4-5 which are oppositely arranged and connecting beams 4-6 for connecting the two support side plates 4-5, wherein the support side plates 4-5 comprise first-order steps 4-7 for supporting the groove rods 5 on the quartz boat and second-order steps 4-8 for supporting the groove rods 6 under the quartz boat.
Preferably, the first step 4-7 and the second step 4-8 are both provided with a limiting protrusion 4-9 for preventing the groove rod from moving radially, and the limiting protrusion 4-9 and the supporting side plate 4-5 are fixed into a whole.
Preferably, the graphite base 4-1 is provided with two parallel sliding grooves 4-10, and the bottom parts of the sliding block I4-3 and the sliding block II 4-4-4 are provided with sliding blocks sliding along the sliding grooves 4-10.
Preferably, the tops of two side surfaces of the supporting side plate 4-5 are provided with flanges 4-11 extending outwards, and the distance from the bottom of the flange 4-11 to the bottom of the supporting side plate 4-5 is equal to the height of the graphite side plate 4-2.
Example 1:
the embodiment comprises the following operation steps:
a. inspecting incoming materials;
b. cutting: cutting the quartz rods qualified in the step a according to the specified size requirement;
c. processing by a processing center; processing a wafer inserting groove of the quartz rod and a side plate 7 of the quartz boat by using a processing center;
d. acid washing: cleaning the product of step c with an acid wash solution;
e. cleaning with pure water: d, putting the product obtained in the step d into pure water for cleaning, and naturally airing the product after cleaning;
f. fire processing: welding the product obtained in the step e by using a quartz welding gun, fixedly connecting a quartz rod with the side plate 7, and forming a semi-finished quartz boat product;
g. carrying out support annealing: pushing the semi-finished quartz boat product in the step f into an annealing furnace for annealing and stress relief, wherein the semi-finished quartz boat product is supported by an annealing supporting table in the furnace and then placed on quartz wool 1, and the quartz wool 1 is flatly laid on a quartz rack 2; after the annealing is finished, pulling out the annealed semi-finished product, standing still on a graphite plate, and slowly cooling; as shown in the attached figure 4 of the specification, the quartz rack 2 is a net structure formed by a plurality of quartz rods, and the net structure is convenient for pulling and pulling the draw hook. The quartz wool 1 is laid on the quartz rack 2, and the quartz wool mainly plays roles of buffering and increasing resistance at the position, so that the condition that the pull hook slides relative to the quartz rack 2 in the process of pushing and pulling the quartz rack 2 to damage a product is avoided.
h. Acid washing: g, putting the product cooled in the step g into an acid washing solution for washing;
i. cleaning with pure water: putting the product obtained in the step h into pure water for cleaning, and naturally drying the product after cleaning;
j. packaging and delivering goods: and (e) carrying out factory inspection on the product in the step i, and packaging and delivering the qualified product.
The annealing supporting table of the embodiment comprises two high-temperature-resistant supporting frames 3-1 which are oppositely arranged at the outer sides of two long side surfaces of the quartz boat; the two high-temperature resistant support frames 3-1 are respectively provided with at least two upper groove rod pull rope through holes 3-2 which are arranged on the same horizontal line and are distributed at intervals; at least two lower slotted rod pull rope through holes 3-3 which are distributed on the same horizontal line at intervals are also arranged on the two high-temperature resistant support frames 3-1 below the upper slotted rod pull rope through hole 3-2; one upper groove rod pull rope through hole 3-2 on the high temperature resistant support frame 3-1 and one upper groove rod pull rope through hole 3-2 on the other high temperature resistant support frame 3-1 form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the upper groove rod high temperature resistant pull rope 3-4, a high temperature resistant flat plate I3-5 for supporting an upper groove rod 5 of the quartz boat is arranged on the upper groove rod high temperature resistant pull rope 3-4, and the two ends of the upper groove rod high temperature resistant pull rope 3-4 are tightened to tightly attach the high temperature resistant flat plate I3-5 to the bottom end of the upper groove rod 5 of the quartz boat; one lower groove rod pull rope through hole 3-3 on the high temperature resistant support frame 3-1 and one lower groove rod pull rope through hole 3-3 on the other high temperature resistant support frame 3-1 form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the lower groove rod high temperature resistant pull rope 3-6, a high temperature resistant flat plate II 3-7 for supporting the lower groove rod 6 of the quartz boat is arranged on the lower groove rod high temperature resistant pull rope 3-6, and the two ends of the lower groove rod high temperature resistant pull rope 3-6 are tightened to tightly attach the high temperature resistant flat plate II 3-7 to the bottom end of the lower groove rod 6 of the quartz boat.
The specific using method comprises the following steps: an upper grooved rod high-temperature resistant pull rope 3-4 is arranged between two upper grooved rod pull rope through holes corresponding to the positions of the two high-temperature resistant support frames 3-1, one end of the upper grooved rod high-temperature resistant pull rope 3-4 penetrates through one upper grooved rod pull rope through hole and is knotted for fixation, and the other end of the upper grooved rod high-temperature resistant pull rope penetrates through the other upper grooved rod pull rope through hole for standby; the other pair of groove rod pull rope through holes are operated in the same way. And supporting the high-temperature resistant flat plates I3-5 on the two upper grooved rod high-temperature resistant pull ropes 3-4, tightening the two upper grooved rod high-temperature resistant pull ropes 3-4 until the high-temperature resistant flat plates I3-5 are tightly attached to the upper grooved rod 5 of the quartz boat, and knotting and fixing the other ends of the upper grooved rod high-temperature resistant pull ropes 3-4 after tightening. The high temperature resistant flat plates II 3-7 are tightly attached to the lower part of the lower groove rod 6 of the quartz boat in the same way. The high-temperature resistant plates I3-5 and the high-temperature resistant plates II 3-7 are supported, so that the possibility of deformation of the quartz boat groove rod in the annealing process is effectively prevented.
The product produced by the processing technology of the embodiment has high quality, and the slot bar is supported by the high-temperature resistant flat plate, so that the slot bar is effectively prevented from being deformed in the annealing process; the structural design of the pull rope type annealing supporting table ensures that the embodiment has very strong universality, the height of the high-temperature resistant flat plate can be randomly adjusted by adjusting the tightness of the high-temperature resistant pull rope, and the pull rope type annealing supporting table can be suitable for quartz boats of all specifications and sizes; the embodiment has the advantages of low improvement cost, low manufacturing cost of the annealing supporting table, convenient and quick operation and use, strong practicability and wide application, and has important significance in the technical field of quartz boat processing.
Example 2:
the embodiment comprises the following operation steps:
a. inspecting incoming materials;
b. cutting: cutting the quartz rods qualified in the step a according to the specified size requirement;
c. processing by a processing center; processing a wafer inserting groove of the quartz rod and a side plate 7 of the quartz boat by using a processing center;
d. acid washing: cleaning the product of step c with an acid wash solution;
e. cleaning with pure water: d, putting the product obtained in the step d into pure water for cleaning, and naturally airing the product after cleaning;
f. fire processing: welding the product obtained in the step e by using a quartz welding gun, fixedly connecting a quartz rod with the side plate 7, and forming a semi-finished quartz boat product;
g. carrying out support annealing: pushing the semi-finished quartz boat product in the step f into an annealing furnace for annealing and stress relief, wherein the semi-finished quartz boat product is supported by an annealing supporting table in the furnace and then placed on quartz wool 1, and the quartz wool 1 is flatly laid on a quartz rack 2; after the annealing is finished, pulling out the annealed semi-finished product, standing still on a graphite plate, and slowly cooling; as shown in the attached figure 4 of the specification, the quartz rack 2 is a net structure formed by a plurality of quartz rods, and the net structure is convenient for pulling and pulling the draw hook. The quartz cotton 1 is laid on the quartz rack 2, and the quartz cotton mainly plays roles of buffering and increasing resistance at the position, so that the phenomenon that the pull hook slides relative to the quartz rack 2 in the process of pushing and pulling the quartz rack 2 to damage a product is avoided;
h. acid washing: g, putting the product cooled in the step g into an acid washing solution for washing;
i. cleaning with pure water: putting the product obtained in the step h into pure water for cleaning, and naturally drying the product after cleaning;
j. packaging and delivering goods: and (e) carrying out factory inspection on the product in the step i, and packaging and delivering the qualified product.
The annealing supporting table of the embodiment comprises two high-temperature-resistant supporting frames 3-1 which are oppositely arranged at the outer sides of two long side surfaces of the quartz boat; the two high-temperature resistant support frames 3-1 are respectively provided with at least two upper groove rod pull rope through holes 3-2 which are arranged on the same horizontal line and are distributed at intervals; at least two lower slotted rod pull rope through holes 3-3 which are distributed on the same horizontal line at intervals are also arranged on the two high-temperature resistant support frames 3-1 below the upper slotted rod pull rope through hole 3-2; one upper groove rod pull rope through hole 3-2 on the high temperature resistant support frame 3-1 and one upper groove rod pull rope through hole 3-2 on the other high temperature resistant support frame 3-1 form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the upper groove rod high temperature resistant pull rope 3-4, a high temperature resistant flat plate I3-5 for supporting an upper groove rod 5 of the quartz boat is arranged on the upper groove rod high temperature resistant pull rope 3-4, and the two ends of the upper groove rod high temperature resistant pull rope 3-4 are tightened to tightly attach the high temperature resistant flat plate I3-5 to the bottom end of the upper groove rod 5 of the quartz boat; one lower groove rod pull rope through hole 3-3 on the high temperature resistant support frame 3-1 and one lower groove rod pull rope through hole 3-3 on the other high temperature resistant support frame 3-1 form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the lower groove rod high temperature resistant pull rope 3-6, a high temperature resistant flat plate II 3-7 for supporting the lower groove rod 6 of the quartz boat is arranged on the lower groove rod high temperature resistant pull rope 3-6, and the two ends of the lower groove rod high temperature resistant pull rope 3-6 are tightened to tightly attach the high temperature resistant flat plate II 3-7 to the bottom end of the lower groove rod 6 of the quartz boat.
The specific using method comprises the following steps: an upper grooved rod high-temperature resistant pull rope 3-4 is arranged between two upper grooved rod pull rope through holes corresponding to the positions of the two high-temperature resistant support frames 3-1, one end of the upper grooved rod high-temperature resistant pull rope 3-4 penetrates through one upper grooved rod pull rope through hole and is knotted for fixation, and the other end of the upper grooved rod high-temperature resistant pull rope penetrates through the other upper grooved rod pull rope through hole for standby; the other pair of groove rod pull rope through holes are operated in the same way. And supporting the high-temperature resistant flat plates I3-5 on the two upper grooved rod high-temperature resistant pull ropes 3-4, tightening the two upper grooved rod high-temperature resistant pull ropes 3-4 until the high-temperature resistant flat plates I3-5 are tightly attached to the upper grooved rod 5 of the quartz boat, and knotting and fixing the other ends of the upper grooved rod high-temperature resistant pull ropes 3-4 after tightening. The high temperature resistant flat plates II 3-7 are tightly attached to the lower part of the lower groove rod 6 of the quartz boat in the same way. The high-temperature resistant plates I3-5 and the high-temperature resistant plates II 3-7 are supported, so that the possibility of deformation of the quartz boat groove rod in the annealing process is effectively prevented.
The product produced by the processing technology of the embodiment has high quality, and the slot bar is supported by the high-temperature resistant flat plate, so that the slot bar is effectively prevented from being deformed in the annealing process; the structural design of the pull rope type annealing supporting table ensures that the embodiment has very strong universality, the height of the high-temperature resistant flat plate can be randomly adjusted by adjusting the tightness of the high-temperature resistant pull rope, and the pull rope type annealing supporting table can be suitable for quartz boats of all specifications and sizes; the embodiment has the advantages of low improvement cost, low manufacturing cost of the annealing supporting table, convenient and quick operation and use, strong practicability and wide application, and has important significance in the technical field of quartz boat processing.
In the embodiment, the quartz rod and the side plate 7 are pre-positioned by adopting the welding positioning jig in the step f and then are welded by utilizing the quartz welding gun.
The welding positioning jig comprises a graphite base 4-1 and a graphite side plate 4-2 fixedly connected with the graphite base 4-1; the graphite base 4-1 is provided with a sliding block I4-3 and a sliding block II 4-4 which slide back and forth along the upper surface body of the graphite base and are arranged oppositely, and the sliding block I4-3 and the sliding block II 4-4 are respectively vertical to the graphite side plate 4-2; a groove rod positioning support frame for supporting the groove rod of the quartz boat is arranged between the sliding block I4-3 and the sliding block II 4-4; the groove rod positioning support frame comprises two support side plates 4-5 which are oppositely arranged and a connecting beam 4-6 which is used for connecting the two support side plates 4-5, wherein the support side plates 4-5 comprise first-order steps 4-7 which are used for supporting the groove rods 5 on the quartz boat and second-order steps 4-8 which are used for supporting the groove rods 6 on the lower portion of the quartz boat. The graphite side plate 4-2 is arranged on the graphite base 4-1, the top of the two side faces of the supporting side plate 4-5 is provided with the fins 4-11 extending towards the outer side, the distance from the bottom of the fins 4-11 to the bottom of the supporting side plate 4-5 is equal to the height of the graphite side plate 4-2, and the design of the fins can enable the groove rod positioning support frame to be better attached to the graphite side plate 4-2, and an operator can conveniently observe whether the positioning support frame is attached to the inner side face of the graphite side plate. The graphite side plate 4-2 is detachably and fixedly connected with the graphite base 4-1 by a G-shaped clamp. In the embodiment, the first step and the second step are respectively provided with a limiting bulge 4-9 for preventing the groove rod from moving in the radial direction, and the limiting bulges 4-9 and the supporting side plate are fixed into a whole. In the process of clamping the supporting side plate, the groove rod can be touched, the position of the groove rod can be moved, the positioning efficiency is influenced by continuous adjustment, the groove rod can be effectively prevented from shifting in the radial direction due to the design of the limiting bulges 4-9, the positioning time is saved, and the working efficiency of operators is improved. The graphite base of this embodiment is equipped with two mutually parallel spouts 4-10, and II bottoms of slider I, slider all are equipped with along the gliding slider of spout, and the design of spout not only makes this tool convenient to use, has also improved the stability of whole tool.
The specific use method of the embodiment is as follows: firstly, moving the sliding block I4-3 and the sliding block II 4-4 to the outer side respectively, leaving the position of the groove rod positioning support frame in the air, enabling the side surface of the positioning support frame to be tightly attached to the inner side surface of the graphite side plate 4-2, then sequentially placing the upper groove rod and the lower groove rod into the first-order step and the second-order step, enabling the upper groove rod to be tightly attached to the corner of the first-order step and the lower groove rod to be tightly attached to the corner of the second-order step when the positioning support. After the quartz boat is placed, a supporting side plate 4-5 is inserted between the tail end of the groove rod and the sliding block, the inner side surface of the supporting side plate 4-5 is tightly attached to the inner side surface of the graphite side plate 4-2, the sliding block I4-3 and the sliding block II 4-4 are slowly pushed towards the inner side until the supporting side plate and the groove rod are clamped tightly by the two sliding blocks, the positioning effect on the quartz boat part is achieved, and after the positioning effect is achieved, welding is conducted on a welding position by an operator.
The embodiment has high positioning accuracy, and greatly improves the quality of quartz boat products; the structure design is simple, the manufacture is easy, the operation is convenient, and the processing efficiency of the fire processing procedure is greatly improved; the experience requirement on assembly welding operators is low, and enterprises do not need to spend effort on training the operators, so that the production cost of the enterprises is greatly reduced; the manufacturing cost is low, the practicality is very strong, uses extensively, and this tool also has important meaning in quartz boat processing technology field.
In summary, the present invention is only a preferred embodiment, and not intended to limit the scope of the invention, and all equivalent changes and modifications in the shape, structure, characteristics and spirit of the present invention described in the claims should be included in the scope of the present invention.
Claims (9)
1. The production and processing method of the high-quality quartz boat is characterized by comprising the following operation steps:
a. inspecting incoming materials;
b. cutting: cutting the quartz rods qualified in the step a according to the specified size requirement;
c. processing by a processing center; processing a wafer inserting groove of the quartz rod and a side plate of the quartz boat by using a processing center;
d. acid washing: cleaning the product of step c with an acid wash solution;
e. cleaning with pure water: d, putting the product obtained in the step d into pure water for cleaning, and naturally airing the product after cleaning;
f. fire processing: e, welding the product obtained in the step e by using a quartz welding gun, fixedly connecting a quartz rod with the side plate, and forming a semi-finished quartz boat product;
g. carrying out support annealing: pushing the semi-finished quartz boat product in the step f into an annealing furnace for annealing and stress relief, wherein the semi-finished quartz boat product is supported by an annealing supporting table in the furnace and then placed on quartz wool, and the quartz wool is flatly laid on a quartz rack; after the annealing is finished, pulling out the annealed semi-finished product, standing still on a graphite plate, and slowly cooling;
the annealing supporting table comprises two high-temperature-resistant supporting frames which are oppositely arranged at the outer sides of two long side surfaces of the quartz boat;
at least two upper groove rod pull rope through holes which are distributed on the same horizontal line at intervals are formed in the two high-temperature resistant support frames; at least two lower slotted rod pull rope through holes which are distributed on the same horizontal line at intervals are also arranged on the two high-temperature resistant support frames below the upper slotted rod pull rope through holes;
one of the upper grooved rod pull rope through holes on the high-temperature resistant support frame and one of the upper grooved rod pull rope through holes on the other high-temperature resistant support frame form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the upper grooved rod high-temperature resistant pull rope, a high-temperature resistant flat plate I used for supporting the upper grooved rod is arranged on the upper grooved rod high-temperature resistant pull rope, and two ends of the upper grooved rod high-temperature resistant pull rope are tightened to tightly attach the high-temperature resistant flat plate I to the bottom end of the upper grooved rod;
one lower groove rod pull rope through hole in the high-temperature resistant support frame and one lower groove rod pull rope through hole in the other high-temperature resistant support frame form a pair of pull rope through holes, the pair of pull rope through holes are respectively connected with two ends of the lower groove rod high-temperature resistant pull rope, a high-temperature resistant flat plate II used for supporting the lower groove rod is arranged on the lower groove rod high-temperature resistant pull rope, and two ends of the lower groove rod high-temperature resistant pull rope are tightened to enable the high-temperature resistant flat plate II to be tightly attached to the bottom end of the lower groove rod;
h. acid washing: g, putting the product cooled in the step g into an acid washing solution for washing;
i. cleaning with pure water: putting the product obtained in the step h into pure water for cleaning, and naturally drying the product after cleaning;
j. packaging and delivering goods: and (e) carrying out factory inspection on the product in the step i, and packaging and delivering the qualified product.
2. The method for manufacturing a high-quality quartz boat according to claim 1, wherein: the annealing temperature is 1000-1150 ℃, and the annealing time is 35-55 min.
3. The method for manufacturing a high-quality quartz boat according to claim 1, wherein: the high-temperature-resistant support frame is made of a high-temperature-resistant ceramic fiber inorganic plate; the high-temperature resistant flat plate I and the high-temperature resistant flat plate II are made of high-temperature resistant ceramic fiber inorganic plates; the upper groove rod high-temperature-resistant pull rope and the lower groove rod high-temperature-resistant pull rope are both high-temperature-resistant ceramic fiber ropes.
4. The method for producing and processing high-quality quartz boats as claimed in claim 1 or 3, wherein: the bottom of the high-temperature resistant flat plate I is provided with a groove which is convenient for the high-temperature resistant pull rope of the groove bar on the quartz boat to bear and has an arc-shaped section; and a groove which is convenient for the high-temperature resistant pull rope of the lower groove rod of the quartz boat to bear and has an arc-shaped section is formed at the bottom of the high-temperature resistant flat plate II.
5. The method for manufacturing a high-quality quartz boat according to claim 1, wherein: and f, pre-positioning the quartz rod and the side plate by using a welding positioning jig, and then welding by using a quartz welding gun.
6. The method for manufacturing a high-quality quartz boat according to claim 5, wherein: the welding positioning jig comprises a graphite base, and a graphite side plate fixedly connected with the graphite base is arranged on the graphite base; the graphite base is also provided with a sliding block I and a sliding block II which slide back and forth along the upper surface body of the graphite base, and the sliding block I and the sliding block II are respectively vertical to the graphite side plate; a groove rod positioning support frame for supporting the quartz boat groove rod is arranged between the sliding block I and the sliding block II; the groove rod positioning support frame comprises two opposite supporting side plates and a connecting beam for connecting the two supporting side plates, wherein the supporting side plates comprise a first-order step for supporting the upper groove rod of the quartz boat and a second-order step for supporting the lower groove rod of the quartz boat.
7. The method for manufacturing a high-quality quartz boat according to claim 6, wherein: the first step and the second step are both provided with limiting bulges for preventing the groove rods from moving radially, and the limiting bulges and the supporting side plates are fixed into a whole.
8. The method for manufacturing a high-quality quartz boat according to claim 6, wherein: the graphite base is provided with two parallel sliding grooves, and the bottom of the sliding block I and the bottom of the sliding block II are provided with sliding blocks sliding along the sliding grooves.
9. The method for manufacturing a high-quality quartz boat according to claim 6, wherein: and the tops of the two side surfaces of the supporting side plate are provided with flanges extending to the outer side, and the distance from the bottom of each flange to the bottom of the supporting side plate is equal to the height of the graphite side plate.
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| CN112133658A (en) * | 2020-09-29 | 2020-12-25 | 吴静立 | Processing production method of quartz boat |
| CN114920448A (en) * | 2022-05-06 | 2022-08-19 | 浙江富乐德石英科技有限公司 | Preparation method of quartz boat |
| CN116021240B (en) * | 2023-02-20 | 2023-09-29 | 杭州泓芯微半导体有限公司 | Quartz boat processing technology |
| CN116441841B (en) * | 2023-06-19 | 2023-08-29 | 辽宁拓邦鸿基半导体材料有限公司 | Adjustable groove bar welding positioning mechanism |
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