CN112133658A - Processing production method of quartz boat - Google Patents
Processing production method of quartz boat Download PDFInfo
- Publication number
- CN112133658A CN112133658A CN202011047595.8A CN202011047595A CN112133658A CN 112133658 A CN112133658 A CN 112133658A CN 202011047595 A CN202011047595 A CN 202011047595A CN 112133658 A CN112133658 A CN 112133658A
- Authority
- CN
- China
- Prior art keywords
- quartz boat
- top plate
- side plates
- minutes
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000012545 processing Methods 0.000 title claims description 7
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 238000000137 annealing Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 14
- 238000002844 melting Methods 0.000 claims abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910002804 graphite Inorganic materials 0.000 claims description 13
- 239000010439 graphite Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 8
- 229910021641 deionized water Inorganic materials 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims 1
- 238000003672 processing method Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000003466 welding Methods 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 239000002253 acid Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013072 incoming material Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012384 transportation and delivery Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of semiconductor quartz material production methods, and discloses a quartz boat processing and production method, which comprises the following steps: the method comprises the steps of preparing processes, assembling, bonding, annealing, cleaning and inspecting, wherein the method improves the prior art, the two ends of a groove rod are heated simultaneously through a blowtorch to be in a semi-melting state, then a top plate and a receiving table are pressed at the two ends of the groove rod through a connecting and detaching device to complete bonding, welding is not needed, no weld crater is formed, manual grinding of the weld crater is not needed, bonding of main steps is completed by machinery, personnel do not need to have working experience all the year round, production can be achieved only through simple training, and convenience is brought to use of people.
Description
Technical Field
The invention relates to the technical field of quartz boat production, in particular to a processing and production method of a quartz boat.
Background
The quartz boat is a semiconductor silicon wafer bearing tool, and has two most extensive applications at present: 1. the manufacturing process of the solar cell slice has a key step called diffusion, wherein a quartz boat is used as a bearing clamp to fix a semi-finished product of the silicon solar cell slice in a diffusion furnace; 2. the manufacturing process of the semiconductor silicon wafer comprises a plurality of process steps, a quartz boat is required to bear semi-finished silicon wafers when the semiconductor silicon wafer is transported from one process to the next process, for example, in the production process of an LED epitaxial wafer, the appearance and the product performance of the silicon wafer are required to be tested for many times, and products before and after the test are required to be borne by the quartz boat. As shown in the attached figure 1 of the specification, a common quartz boat comprises two side plates, and two quartz boat upper groove rods and two quartz boat lower groove rods which are fixed between the two side plates.
The Chinese patent application CN109887873A discloses a production and processing method of a high-quality quartz boat, which comprises the procedures of incoming material inspection, cutting, processing of a processing center, acid cleaning, pure water cleaning, fire processing, support annealing, acid cleaning, pure water cleaning, packaging and delivery and the like.
The method can finish the preparation of the quartz boat, but in the preparation process, the relative positions of the groove rod, the top plate and the receiving platform need to be fixed in a welding mode, and the production method has the disadvantages of rough welding opening, manual grinding, long consumed time, high rework rate and inconvenient use.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a processing and production method of a quartz boat, and solves the problems that the existing production method has welded junctions, the welded junctions need to be ground manually and subsequently, and the production efficiency is low.
In order to achieve the purpose, the invention is realized by the following technical scheme: a processing production method of a quartz boat comprises the following steps:
s1: a preparation process: cleaning the three groove rods, the top plate and the receiving platform which are subjected to cold machining treatment with deionized water for 1-5 minutes, and drying with nitrogen;
s2: assembling: fixing the three groove rods cleaned in the step S1 on a graphite jig, and respectively placing the top plate and the receiving platform on two sides of the groove rods;
s3: bonding: simultaneously heating two ends of the three groove rods by using a blast burner to enable the two ends to reach a semi-molten state, and then pressing the top plate and the receiving table inwards oppositely;
s4: annealing: taking the quartz boat bonded in the step S3 down from the graphite jig, and putting the quartz boat into an annealing furnace for annealing;
s5: cleaning: washing the quartz boat annealed in the step S4 for 1-5 minutes by using deionized water;
s6: and (4) checking: and (5) inspecting the produced quartz boat to finish preparation.
Preferably, the graphite jig comprises a bottom plate and a pair of side plates on two sides, the bottom plate and the pair of side plates are integrally formed, the pair of side plates are of a convex structure, three pairs of caulking grooves are oppositely formed in the upper walls of the pair of side plates, and the three bars and the groove rods are respectively embedded in the three pairs of caulking grooves.
Preferably, the outer edge of the top plate is provided with three connecting lugs corresponding to the groove rods.
Preferably, in step S3, the top board and the receiving table are pressed inward by a mechanical device.
Preferably, the washing time in step S1 is 3 minutes.
Preferably, the washing time in step S5 is 3 minutes.
Preferably, the temperature at which the ends of the channel bar achieve slush is 2000 ℃.
Advantageous effects
The invention provides a processing and production method of a quartz boat, which has the following beneficial effects that the method improves the prior art, the two ends of a groove rod are simultaneously heated by a blowtorch to be in a semi-melting state, and a top plate and a receiving platform are tightly pressed at the two ends of the groove rod by a connecting and detaching device to finish bonding.
Drawings
FIG. 1 is an axial view of the quartz boat after bonding.
FIG. 2 is a schematic axial view of a quartz boat before bonding.
In the figure 1, a ceiling; 2. receiving a platform; 3. a channel bar; 4. graphite tool.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: a processing production method of a quartz boat comprises the following steps: s1: a preparation process: cleaning the three cold-processed groove rods 3, the top plate 1 and the receiving platform 2 with deionized water for 1-5 minutes, and drying with nitrogen; s2: assembling: fixing the three groove rods 3 cleaned in the step S1 on a graphite jig 4, and respectively placing the top plate 1 and the receiving platform 2 on two sides of the groove rods 3; s3: bonding: simultaneously heating two ends of the three groove rods 3 by using a blast burner to enable the two ends to reach a semi-molten state, and then oppositely pressing the top plate 1 and the receiving platform 2 inwards; s4: annealing: taking the quartz boat bonded in the step S3 down from the graphite jig 4, and putting the quartz boat into an annealing furnace for annealing; s5: cleaning: washing the quartz boat annealed in the step S4 for 1-5 minutes by using deionized water; s6: and (4) checking: inspecting the produced quartz boat to finish preparation; the graphite jig 4 comprises a bottom plate and a pair of side plates on two sides, the bottom plate and the pair of side plates are integrally formed, the pair of side plates are of a convex structure, the upper walls of the pair of side plates are oppositely provided with three pairs of caulking grooves, and the three bars and the groove rods 3 are respectively embedded in the three pairs of caulking grooves; the outer edge of the top plate 1 is provided with three connecting lugs corresponding to the groove rods 3; in step S3, the top board 1 and the receiving base 2 are pressed inward by a mechanical device; the cleaning time in step S1 was 3 minutes; the cleaning time in step S5 was 3 minutes; the temperature at which the two ends of the channel bar 3 reach the semi-melting temperature is 2000 ℃.
Example (b): the invention takes a novel production method of a vertical quartz boat as an example, a groove rod 3, a top plate 1 and a receiving platform 2 which are machined are cleaned by deionized water for 1-5 minutes, a graphite jig 4, the groove rod 3, the top plate 1 and the receiving platform 2 are placed according to drawings, namely, the groove rod 3 is placed in an embedding groove of the graphite jig 4, the top plate 1 and the receiving platform 2 are placed at two sides of the groove rod 3, heating is started after the placement is finished, two ends of the groove rod 3 are burned by a blowtorch to enable the groove rod to reach a semi-molten state, namely 2000 ℃, the top plate 1 and the receiving platform 2 are pressed inwards by a mechanical structure, namely, the arrow in the drawing 2 indicates the direction, the bonded quartz boat is taken down from the graphite jig 4 and is placed in an annealing furnace for annealing, the quartz boat is cleaned by the deionized water after the annealing is finished, and the size of the quartz boat is inspected for 1-5. The production process of the quartz boat is completed.
Compared with the conventional method, the novel production method of the quartz boat has the advantages of short consumed time, low personnel cost and better appearance, and can realize semi-mechanical production.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (7)
1. A processing production method of a quartz boat is characterized by comprising the following steps:
s1: a preparation process: cleaning the three groove rods, the top plate and the receiving platform which are subjected to cold machining treatment with deionized water for 1-5 minutes, and drying with nitrogen;
s2: assembling: fixing the three groove rods cleaned in the step S1 on a graphite jig, and respectively placing the top plate and the receiving platform on two sides of the groove rods;
s3: bonding: simultaneously heating two ends of the three groove rods by using a blast burner to enable the two ends to reach a semi-molten state, and then pressing the top plate and the receiving table inwards oppositely;
s4: annealing: taking the quartz boat bonded in the step S3 down from the graphite jig, and putting the quartz boat into an annealing furnace for annealing;
s5: cleaning: washing the quartz boat annealed in the step S4 for 1-5 minutes by using deionized water;
s6: and (4) checking: and (5) inspecting the produced quartz boat to finish preparation.
2. The method for manufacturing a quartz boat of claim 1, wherein the graphite jig comprises a bottom plate and a pair of side plates at two sides, the bottom plate is integrally formed with the pair of side plates, the pair of side plates are of a convex structure, the upper walls of the pair of side plates are provided with three pairs of caulking grooves, and the three bars and the groove bars are respectively embedded in the three pairs of caulking grooves.
3. The quartz boat manufacturing method of claim 2, wherein the outer edge of the top plate is provided with three connecting lugs corresponding to the slot bars.
4. The method of claim 1, wherein the top plate and the receiving platform are pressed inwardly by a mechanical device in step S3.
5. The method of claim 1, wherein the cleaning time in step S1 is 3 minutes.
6. The method of claim 1, wherein the cleaning time in step S5 is 3 minutes.
7. The method of claim 1, wherein the temperature at which the ends of the grooved bars reach a partial melting temperature of 2000 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011047595.8A CN112133658A (en) | 2020-09-29 | 2020-09-29 | Processing production method of quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011047595.8A CN112133658A (en) | 2020-09-29 | 2020-09-29 | Processing production method of quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112133658A true CN112133658A (en) | 2020-12-25 |
Family
ID=73844596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011047595.8A Pending CN112133658A (en) | 2020-09-29 | 2020-09-29 | Processing production method of quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112133658A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116021240A (en) * | 2023-02-20 | 2023-04-28 | 杭州泓芯微半导体有限公司 | Quartz boat processing technology |
| CN117798577A (en) * | 2023-12-29 | 2024-04-02 | 浙江富同石英新材料有限公司 | Automatic welding machine for quartz boat and use method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6576863B1 (en) * | 2001-05-04 | 2003-06-10 | Regents Of The University Of California | Laser welding of fused quartz |
| TW200535108A (en) * | 2004-03-31 | 2005-11-01 | Fukui Shin Etsu Quartz Products Co Ltd | Method and apparatus for welding quartz glass member |
| CN102515480A (en) * | 2011-12-02 | 2012-06-27 | 湖州奥博石英科技有限公司 | Manufacturing method of quartz boat |
| CN102659303A (en) * | 2012-03-30 | 2012-09-12 | 湖州奥博石英科技有限公司 | Quartz spliced product and manufacturing method thereof |
| CN102881620A (en) * | 2012-08-31 | 2013-01-16 | 宁波尤利卡太阳能科技发展有限公司 | Method for cleaning and saturating quartz boat |
| CN109887873A (en) * | 2019-02-14 | 2019-06-14 | 扬州美和光电科技有限公司 | A kind of production and processing method of high-quality quartz boat |
| CN209872760U (en) * | 2019-03-29 | 2019-12-31 | 久智光电子材料科技有限公司 | Mould is used in quartz boat production |
-
2020
- 2020-09-29 CN CN202011047595.8A patent/CN112133658A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6576863B1 (en) * | 2001-05-04 | 2003-06-10 | Regents Of The University Of California | Laser welding of fused quartz |
| TW200535108A (en) * | 2004-03-31 | 2005-11-01 | Fukui Shin Etsu Quartz Products Co Ltd | Method and apparatus for welding quartz glass member |
| CN102515480A (en) * | 2011-12-02 | 2012-06-27 | 湖州奥博石英科技有限公司 | Manufacturing method of quartz boat |
| CN102659303A (en) * | 2012-03-30 | 2012-09-12 | 湖州奥博石英科技有限公司 | Quartz spliced product and manufacturing method thereof |
| CN102881620A (en) * | 2012-08-31 | 2013-01-16 | 宁波尤利卡太阳能科技发展有限公司 | Method for cleaning and saturating quartz boat |
| CN109887873A (en) * | 2019-02-14 | 2019-06-14 | 扬州美和光电科技有限公司 | A kind of production and processing method of high-quality quartz boat |
| CN209872760U (en) * | 2019-03-29 | 2019-12-31 | 久智光电子材料科技有限公司 | Mould is used in quartz boat production |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116021240A (en) * | 2023-02-20 | 2023-04-28 | 杭州泓芯微半导体有限公司 | Quartz boat processing technology |
| CN116021240B (en) * | 2023-02-20 | 2023-09-29 | 杭州泓芯微半导体有限公司 | Quartz boat processing technology |
| CN117798577A (en) * | 2023-12-29 | 2024-04-02 | 浙江富同石英新材料有限公司 | Automatic welding machine for quartz boat and use method thereof |
| CN117798577B (en) * | 2023-12-29 | 2024-06-14 | 浙江富同石英新材料有限公司 | Automatic welding machine for quartz boat and use method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112133658A (en) | Processing production method of quartz boat | |
| CN109887873B (en) | Production and processing method of high-quality quartz boat | |
| JP4467028B2 (en) | Vertical wafer support jig | |
| CN110299420B (en) | Deposition method of antireflection film of crystalline silicon solar cell | |
| CN109175660A (en) | Aluminum alloy diffusion welding device and aluminum alloy diffusion welding method | |
| CN102153089B (en) | Method for gettering phosphorus in N-type polysilicon slice by metallurgical method | |
| CN108500274B (en) | Integrally formed serially connected miniature annular part and 3D printing method | |
| CN102335790A (en) | Method for maintaining AQFN (Advanced Quad Flat No-Lead Package) mobile phone motherboard and maintenance table | |
| CN101780574A (en) | Welding method of ribs of plate layer of freeze dryer | |
| CN214588767U (en) | Quartz boat for annealing IC-grade silicon wafer | |
| CN1028191C (en) | Silicon chip directive bonding method | |
| US3432282A (en) | Method for adjusting contacts in reed switches | |
| CN215327718U (en) | Laminated quartz heat insulation plate manufacturing device | |
| CN111106049A (en) | Multi-level vertical quartz boat and processing technology thereof | |
| CN102142387B (en) | Vertical crystal boat for semiconductor equipment for heat treatment | |
| CN105057907B (en) | The assembled welding procedure of super-large diameter diamond circular saw film base body | |
| CN109585602B (en) | SMT (surface mount technology) mounting structure of double-sided electrode solar cell and production process thereof | |
| JPH04214080A (en) | Method for bonding metal sheet on aluminum nitride base sheet and bonded product | |
| CN109148317B (en) | Machine table for preparing SOI (silicon on insulator) silicon wafer by laser splitting technology | |
| CN214937971U (en) | Novel furnace inlet boat frame of diffusion furnace | |
| CN106736295B (en) | A kind of precision machining method of nuclear power main body busbar | |
| CN115116910A (en) | Universal horizontal quartz boat and oxidation heat treatment method for silicon wafers of different specifications simultaneously | |
| CN117700125A (en) | Welding method of quartz plate | |
| CN209816331U (en) | Solar cell diffusion quartz boat | |
| CN109434313A (en) | Tower boiler wall pipe construction method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20231124 Address after: No. 89 Shendong Fourth Road, Shenfu Demonstration Zone, Fushun City, Liaoning Province, 113122 Applicant after: Liaoning Tuobang Hongji Semiconductor Materials Co.,Ltd. Address before: Group 4, BeiLiGuan village, Yuhong Township, Yuhong District, Shenyang City, Liaoning Province Applicant before: Wu Jingli |