CN214937971U

CN214937971U - Novel furnace inlet boat frame of diffusion furnace

Info

Publication number: CN214937971U
Application number: CN202120810086.XU
Authority: CN
Inventors: 张婷婷; 范晓波; 何杉
Original assignee: Xi'an Peri Power Semiconductor Converting Technology Co ltd
Current assignee: Xi'an Peri Power Semiconductor Converting Technology Co ltd
Priority date: 2021-04-20
Filing date: 2021-04-20
Publication date: 2021-11-30
Anticipated expiration: 2031-04-20

Abstract

The utility model relates to a novel diffusion furnace advance stove boat frame, including baffle, stabilizer blade, boat groove an, boat groove b, both ends respectively are equipped with a recess about the stabilizer blade middle part, the downward arch in stabilizer blade both ends is higher than the middle part, connect through two boat grooves in the middle of two stabilizer blade parallel arrangement, two stabilizer blade tops respectively are equipped with a baffle. The utility model can independently place the boat frame for the diffusion furnace to be fed into the furnace chamber of the diffusion furnace, and the two ends of the boat frame are provided with higher baffles; like this, the silicon chip is when the high temperature doping diffusion, and the thing of placing in the furnace has become less, has reduced the existence of other impurity sources, and the cleanliness factor of diffusion furnace has improved, and the life-span of silicon chip has also improved, and in addition, the silicon chip is when the diffusion, and the boat frame below has reduced blocking of boat shovel, and impurity air current can be more when the high temperature diffusion from the below entering to the silicon chip and spread, is similar to diffuse diffusion, has improved the homogeneity of device, has improved the device performance.

Description

Novel furnace inlet boat frame of diffusion furnace

Technical Field

The utility model relates to a semiconductor device production apparatus field, concretely relates to novel diffusion furnace advance boat frame of stove.

Background

Diffusion doping is a method of high temperature diffusion doping a single crystal with some desired impurity to form a desired device structure during device fabrication. In the process, the silicon wafer is required to be placed on a silicon boat, the silicon boat is erected on a boat shovel, and the silicon wafers on the silicon boat are conveyed into a diffusion furnace together through the boat shovel to be subjected to high-temperature doping diffusion. In the process of high-temperature doping and diffusion, the boat shovel and the silicon wafer enter the diffusion furnace together, more other impurities are brought in, and the impurity airflow in the diffusion furnace is prevented from uniformly doping the silicon wafer from the lower part, so that the service life and the uniformity of a device are influenced. Therefore, the silicon boat entering the diffusion furnace needs to be improved to improve the service life and uniformity of the device.

SUMMERY OF THE UTILITY MODEL

In order to improve the service life and the uniformity of the device in the production process, the prior silicon boat is improved, the utility model provides a novel furnace inlet boat frame of a diffusion furnace.

The technical solution of the utility model is that: the utility model provides a novel diffusion furnace advance stove boat frame, includes stabilizer blade, baffle, boat groove an, boat groove b, both ends respectively are equipped with a recess about the stabilizer blade middle part, the downward arch in stabilizer blade both ends is higher than the middle part, two stabilizer blade parallel arrangement, the centre is connected with boat groove b through boat groove an, boat groove an and boat groove b are in the coplanar and for the mirror symmetry relation, two stabilizer blade tops respectively are equipped with a baffle.

Two chamfers are respectively arranged at two ends of the inner side and the outer side of the tops of the boat grooves a and b, and zigzag grooves are formed in the chamfers at the inner sides of the boat grooves a and b.

Compared with the prior art, the utility model have following advantage: the utility model is suitable for a device of high homogeneity high life mixes. In the device doping process, the fewer the objects entering the diffusion furnace, the better, and the boat groove a and the boat groove b which can be used for placing the silicon wafer are arranged on the utility model, and can be independently placed in the diffusion furnace hearth without the support of a boat shovel; however, when the conventional silicon boat needs to be placed on a boat shovel to be conveyed into a diffusion furnace and the diffusion furnace carries out process doping on the silicon wafer, the silicon boat for placing the silicon wafer needs to be always placed on the boat shovel to carry out process doping, and the silicon boat cannot be independently placed in a hearth of the diffusion furnace. Just the utility model discloses a diffusion furnace advances two ends of stove boat frame and has a higher baffle, has replaced separation blade in the past, can prevent that the powerful air current in both sides from to the influence of silicon chip doping homogeneity, has reduced the influence of other impurity sources on high temperature doping in-process boat shovel and the separation blade to the silicon chip life-span. Secondly, when the process is carried out, the boat frame for loading the silicon wafer is not erected on the boat shovel any more, the impurity airflow can approximately uniformly dope and diffuse the silicon wafer from all directions, diffuse diffusion is similar, the uniformity of the device is improved, and the performance of the device is improved.

Drawings

Fig. 1 is a schematic side view of the present invention during operation.

Fig. 2 is a plan view of the present invention.

Fig. 3 is a perspective view of fig. 1.

Fig. 4 is an enlarged schematic view of fig. 3A.

Detailed Description

In order to clearly understand the technical features, objects, and effects of the present invention, the detailed description of the embodiments of the present invention will be given with reference to the accompanying drawings.

As shown in fig. 1-4, a novel diffusion furnace advances stove boat frame, including stabilizer blade 4, baffle 1, boat groove a2, boat groove b3, boat shovel 5, both ends respectively are equipped with a recess about the stabilizer blade 4 middle part, downward arch in stabilizer blade 4 both ends is higher than the middle part, two stabilizer blade 4 parallel arrangement, the centre is connected with boat groove b3 through boat groove a2, boat groove a2 and boat groove b3 are in the coplanar and for the mirror symmetry relation, boat groove a2 and the inboard outside both ends in boat groove b3 top respectively are equipped with a chamfer, be equipped with the cockscomb structure groove on boat groove a2 and the inboard of boat groove b3, two stabilizer blade 4 tops respectively are equipped with a baffle 1, shovel 5 shape and stabilizer blade 4 phase-match, both ends about shovel 5 are equipped with in the recess that the protruding ability embedding stabilizer blade 4.

The boat shovel 5 and the supporting feet 4 are designed in a separated mode.

The silicon chip is when carrying out diffusion technology, the utility model provides a diffusion furnace advances stove boat frame can directly be put on diffusion furnace boat shovel 5, can directly insert the silicon chip that the doping was diffused to the needs and carry out impurity doping on boat groove a2 and the boat groove b3 of boat frame, starts the operation of advancing the stove, and the silicon chip of boat frame and above can slowly enter into diffusion furnace along with boat shovel 5. Two support legs 4 are arranged under the boat grooves a2 and b3 of the boat frame, so the boat grooves a2 and b3 are higher than the diffusion furnace by a certain height. The boat shovel 5 is slowly moved downwards, and the two support legs 4 of the boat frame stably fall into the hearth. The boat shovel 5 continuously moves downwards, one end of the boat shovel 5 in the hearth can be suspended in the hearth without contacting the boat frame, the boat shovel is slowly moved out of the diffusion furnace, the furnace door is closed, and the operation is finished.

The utility model provides a novel diffusion furnace advances stove boat frame can independently place in diffusion furnace, need not the support of boat shovel 5.

The novel furnace inlet boat frame of the diffusion furnace provided by the utility model enables the impurity sources of the high-temperature doped and diffused silicon wafers in the hearth to be fewer, and the doping service life of the silicon wafers is longer; when the process doping diffusion is carried out, the blocking of the boat shovel 5 is not arranged below the silicon wafer, so that the number of the blocking objects is reduced, the uniform diffusion of impurity airflow is facilitated, and the doping uniformity of the silicon wafer is improved.

The utility model discloses an introduce the operation process of stove boat frame and explained its difference with silicon boat in the past to and the advantage of boat frame to device production. As will be clear to a person skilled in the art. Under the condition of not departing from the scope of the utility model, it is right that the utility model discloses can carry out similar substitution and change. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. The utility model provides a novel diffusion furnace advances stove boat frame, includes stabilizer blade (4), baffle (1), boat groove a (2), boat groove b (3), its characterized in that: both ends respectively are equipped with a recess about stabilizer blade (4) middle part, downward arch in stabilizer blade (4) both ends is higher than the middle part, two stabilizer blade (4) parallel arrangement, the centre is connected with boat groove b (3) through boat groove a (2), boat groove a (2) and boat groove b (3) are in the coplanar and for mirror symmetry relation, two stabilizer blade (4) tops respectively are equipped with a baffle (1).

2. The novel furnace inlet boat frame of the diffusion furnace as claimed in claim 1, wherein: two chamfers are respectively arranged at two ends of the inner side and outer side of the tops of the boat grooves a (2) and b (3), and sawtooth-shaped grooves are formed in the chamfers at the inner sides of the boat grooves a (2) and b (3).