CN207009417U - A kind of high-temperature oxydation quartz boat - Google Patents
A kind of high-temperature oxydation quartz boat Download PDFInfo
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- CN207009417U CN207009417U CN201720878028.4U CN201720878028U CN207009417U CN 207009417 U CN207009417 U CN 207009417U CN 201720878028 U CN201720878028 U CN 201720878028U CN 207009417 U CN207009417 U CN 207009417U
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- boat
- boat body
- lower frame
- temperature oxydation
- quartz
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Abstract
The utility model discloses a kind of high-temperature oxydation quartz boat, its built-in boat has chip and is positioned in the flat-temperature zone of boiler tube, including the hollow out boat body wide at the top and narrow at the bottom being made up of upper side frame, lower frame, the bottom of the boat body is provided with boat bottom contact rod, boat body pitman is provided between the upper side frame and lower frame, the upper side frame and lower frame are transversely provided with boat body hold-down bars, and boat body lower frame sidepiece is provided with boat body push and pull bar.High-temperature oxydation quartz boat is that hollow out state is front and rear to be prevented from influenceing throughput without baffle plate, and the present apparatus can provide uniform oxide-film for production line, increase production efficiency, meet production requirement, improve yield.Using the present apparatus carry out heat treatment produce its effect fully meet technological requirement.
Description
Technical field
A kind of high-temperature heat treatment device is the utility model is related to, especially a kind of high-temperature oxydation quartz boat.
Background technology
The production technology of semiconductor wafer needs to be heat-treated before GPP productions, to cleaned chip need into
Luggage boat, enter stove, come out of the stove, cooling down and used for production line, because it easily goes out to aoxidize non-uniform phenomenon, the dress boat quantity of its boat body and
The uniformity of oxidation turn into production can volume production influence factor, its shortcoming is as follows：Existing quartz boat is its chip of arranged type
Between elasticity be difficult to control, influence gas and flow into wafer uniformity；Boat body both ends space-consuming is larger, influences production efficiency.This
It is the deficiencies in the prior art part.
Utility model content
In order to solve the deficiencies in the prior art, the utility model proposes a kind of high-temperature oxydation quartz boat.Its is simple in construction,
Disclosure satisfy that, which improves gas flow uniformity, ensures that oxidation is uniform, while improves internal stresses release increase dress boat quantity and improve production
Efficiency.
The utility model adopts the following technical scheme that：
A kind of high-temperature oxydation quartz boat, its built-in boat have chip and are positioned in the flat-temperature zone of boiler tube, including by upper side frame,
The hollow out boat body wide at the top and narrow at the bottom of lower frame composition, the bottom of the boat body are provided with boat bottom contact rod, the upper side frame with below
Boat body pitman is provided between frame, the upper side frame and lower frame are transversely provided with boat body hold-down bars, and boat body lower frame sidepiece is provided with
Boat body push and pull bar.
The inclined plane of the chip and boat body leaves 5mm surplus.
The height of the boat body is the 1/2 of wafer height.
Boat bottom contact rod diameter >=14mm.
The boat body pitman, boat body hold-down bars diameter >=10mm.
The length scale of the boat body subtracts 5cm for the 1/2 of boiler tube constant temperature section length.
The bottom of the boat body to boiler tube bottom height and chip after dress boat are identical to boiler tube tip height.
Use the advantageous effects that as above technical scheme obtains for：
The inclined plane of the chip and boat body leaves 5mm surplus, is easy to fill boat and feeding, improves production efficiency.
The height of the boat body is the 1/2 of wafer height, and positioning chip prevents from sliding in the boat internal degree of freedom.
Boat bottom contact rod diameter >=14mm.Directly contact body of heater meets the indeformable requirement of high temperature.
The boat body pitman, boat body hold-down bars diameter >=10mm, meet indeformable requirement at high temperature.
The length scale of the boat body subtracts 5cm for the 1/2 of boiler tube constant temperature section length.Prevent manual operation from making silicon chip beyond perseverance
Warm area, if flat-temperature zone is 90cm, the long size≤40cm of boat, per the boat of stove two.
The bottom of the boat body to boiler tube bottom height and chip after dress boat are identical to boiler tube tip height.Fill boat chip with
Boiler tube is distressed, chip is located at middle position in stove and ensures oxidation uniformity.
High-temperature oxydation quartz boat is that hollow out state is front and rear to be prevented from influenceing throughput without baffle plate, and the present apparatus can be production line
Uniform oxide-film is provided, increases production efficiency, meets production requirement, improve yield.It is heat-treated using the present apparatus
Produce its effect and fully meet technological requirement.
Brief description of the drawings
Fig. 1 is high-temperature oxydation quartz boat structure schematic diagram.
Fig. 2 is Fig. 1 side view.
Fig. 3 is Fig. 1 front view.
In figure, 1, boat bottom contact rod, 2, boat body pitman, 3, boat body hold-down bars, 4, boat body push and pull bar.
Embodiment
It is described further with reference to 1 to 3 pair of specific embodiment of the present utility model of accompanying drawing：
A kind of high-temperature oxydation quartz boat, its built-in boat have chip and are positioned in the flat-temperature zone of boiler tube, including by upper side frame,
The hollow out boat body wide at the top and narrow at the bottom of lower frame composition.The bottom of the boat body is provided with boat bottom contact rod, the upper side frame with it is following
Boat body pitman is provided between frame, the upper side frame and lower frame are transversely provided with boat body hold-down bars, and boat body lower frame sidepiece is provided with
Boat body push and pull bar.Push and pull bar diameter meets full load high temperature lower pulling force requirement in boat, reduces in stove space-consuming not
Damage boat body.Such as required pulling force size >=50N, push and pull bar diameter need >=14mm.
The inclined plane of the chip and boat body leaves 5mm surplus, is easy to fill boat and feeding raising production efficiency.
The height of the boat body is the 1/2 of wafer height, and positioning chip prevents from sliding in the boat internal degree of freedom.
Boat bottom contact rod diameter >=14mm.Directly contact body of heater meets the indeformable requirement of high temperature.
The boat body pitman, boat body hold-down bars diameter >=10mm, meet indeformable requirement at high temperature.
The length scale of the boat body subtracts 5cm for the 1/2 of boiler tube constant temperature section length.Prevent manual operation from making silicon chip beyond perseverance
Warm area, if flat-temperature zone is 90cm, the long size≤40cm of boat, per the boat of stove two.
The bottom of the boat body to boiler tube bottom height and chip after dress boat are identical to boiler tube tip height.Fill boat chip with
Boiler tube is distressed, chip is located at middle position in stove and ensures oxidation uniformity.
Described boat body is the pollution that quartz material prevents other materials.
Contain boat bottom contact rod 1, boat body pitman 2, boat body hold-down bars 3, boat body push and pull bar 4 in high-temperature oxydation quartz boat
Link together, both hands hold boat bottom contact rod 1, and chip is drained into boat body after cleaning, separated at the both ends of boat body hold-down bars 3 with
Boat body pitman 2 contacts.Pull bar is fixed boat body push and pull bar 4 and is sent into stove, and pull bar fixes boat after stove internal program terminates
Body push and pull bar 4 pulls out in stove and places cooling zone with dish catches.
High-temperature oxydation quartz boat is that hollow out state is front and rear to be prevented from influenceing throughput without baffle plate, and the present apparatus can be production line
Uniform oxide-film is provided, increases production efficiency, meets production requirement, improve yield.It is heat-treated using the present apparatus
Produce its effect and fully meet technological requirement.
Certainly, described above is only preferred embodiment of the present utility model, and the utility model is not limited to enumerate above-mentioned
Embodiment, it should be noted that for any those skilled in the art under the guidance of this specification, that is made is all etc.
With replacement, obvious variant, all fall within the essential scope of this specification, ought to be by protection of the present utility model.
Claims (7)
1. a kind of high-temperature oxydation quartz boat, its built-in boat has chip and is positioned in the flat-temperature zone of boiler tube, it is characterised in that including
The hollow out boat body wide at the top and narrow at the bottom being made up of upper side frame, lower frame, the bottom of the boat body is provided with boat bottom contact rod (1), described
Boat body pitman (2) is provided between upper side frame and lower frame, the upper side frame and lower frame are transversely provided with boat body hold-down bars (3),
Boat body lower frame sidepiece is provided with boat body push and pull bar (4).
A kind of 2. high-temperature oxydation quartz boat according to claim 1, it is characterised in that the inclined plane of the chip and boat body
Leave 5mm surplus.
3. a kind of high-temperature oxydation quartz boat according to claim 1, it is characterised in that the height of the boat body is that chip is high
The 1/2 of degree.
A kind of 4. high-temperature oxydation quartz boat according to claim 1, it is characterised in that the boat bottom contact rod (1) diameter
≥14mm。
5. a kind of high-temperature oxydation quartz boat according to claim 1, it is characterised in that the boat body pitman (2), boat body
Hold-down bars (3) diameter >=10mm.
6. a kind of high-temperature oxydation quartz boat according to claim 1, it is characterised in that the length scale of the boat body is stove
The 1/2 of pipe constant temperature section length subtracts 5cm.
A kind of 7. high-temperature oxydation quartz boat according to any one of claim 1 to 6, it is characterised in that the bottom of the boat body
Portion to boiler tube bottom height and chip after dress boat are identical to boiler tube tip height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720878028.4U CN207009417U (en) | 2017-07-19 | 2017-07-19 | A kind of high-temperature oxydation quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720878028.4U CN207009417U (en) | 2017-07-19 | 2017-07-19 | A kind of high-temperature oxydation quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207009417U true CN207009417U (en) | 2018-02-13 |
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ID=61455076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720878028.4U Active CN207009417U (en) | 2017-07-19 | 2017-07-19 | A kind of high-temperature oxydation quartz boat |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887873A (en) * | 2019-02-14 | 2019-06-14 | 扬州美和光电科技有限公司 | A kind of production and processing method of high-quality quartz boat |
| CN114137178A (en) * | 2021-11-23 | 2022-03-04 | 华能国际电力股份有限公司 | Steam oxidation resistance testing method for high-temperature alloy welded joint |
-
2017
- 2017-07-19 CN CN201720878028.4U patent/CN207009417U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887873A (en) * | 2019-02-14 | 2019-06-14 | 扬州美和光电科技有限公司 | A kind of production and processing method of high-quality quartz boat |
| CN114137178A (en) * | 2021-11-23 | 2022-03-04 | 华能国际电力股份有限公司 | Steam oxidation resistance testing method for high-temperature alloy welded joint |
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