CN205303486U - Quartz boat is used in diffusion of solar energy silicon chip - Google Patents
Quartz boat is used in diffusion of solar energy silicon chip Download PDFInfo
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- CN205303486U CN205303486U CN201521039636.3U CN201521039636U CN205303486U CN 205303486 U CN205303486 U CN 205303486U CN 201521039636 U CN201521039636 U CN 201521039636U CN 205303486 U CN205303486 U CN 205303486U
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- quartz
- quartz ampoule
- air dispelling
- dispelling hole
- diffusion
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Abstract
The utility model discloses an enough effective diffusion homogeneities that improves improve the quartz boat is used in diffusion of solar energy silicon chip of single furnace output simultaneously, and it includes two backup pads and a plurality of cavity quartz capsule, and a plurality of quartz capsules form the support district of holding silicon chip between two backup pads, and division have the through -hole that link up with each quartz capsule in at least one backup pad, the equipartition is opened on the quartz capsule has a plurality of cuttings, and the silicon chip is placed in the same vertical planar cutting of quartz capsule, it has at least one scattered gas pocket to be located between the adjacent cutting or to open between the silicon chip, and its and cavity quartz capsule link up. Adopt the utility model discloses a cavity quartz capsule quartz boat, diffuse source are got into the diffusion furnace by the air inlet of stove tail after, on the quartz boat to scattered gas pocket from the quartz capsule spouts to the clearance between the silicon chip uniformly, is showing when improving the diffusion homogeneity, also can follow the stove tail with diffuse source fast and transmit the fire door to, still further increases transmission distance, thereby improves output, the reduction in production cost of the diffusion of single stove.
Description
Technical field
This utility model relates to solar-photovoltaic technology field, especially a kind of quartz boat in solaode manufacture process for silicon chip is diffused.
Background technology
In crystal silicon solar energy battery manufacture process, silicon chip diffusion technique is to put in high temperature dispersing furnace by silicon chip, passes to the gases such as nitrogen, oxygen and POCl3, forms PN junction at silicon chip surface after chemical reaction at high temperature occurring and spreading. Specifically, first silicon chip is inserted on quartz boat, then quartz boat is put in high temperature dispersing furnace (being exactly generally diffusion quartz tube), pass into the gas containing diffusion source, diffusion source reacts with silicon chip under the high temperature conditions, it is achieved diffusion process is thus forming PN junction. Owing to PN junction is the core of solaode, and single furnace output of industrialized production is more and more higher, it is desirable to the silicon chip quantity of One Diffusion Process reaches 400-500 sheet, and therefore, diffusion uniformity becomes the most important thing of diffusion technique. Currently mainly adopt and be blown into the nitrogen of big flow from stove tail and make diffusion source distribution technology in quartz ampoule, but on the one hand owing to single furnace output is more and more higher, in the silicon chip scope that to be distributed in quartz ampoule longer, therefore the nitrogen being directly blown into from stove tail is difficult to be evenly dispersed in quartz ampoule by diffusion source, and easily produce fluctuation, frequently can lead to diffusion uniformity poor, it is difficult to meet intended technology requirement; On the other hand, it is also desirable to consume a large amount of diffusion source and nitrogen, considerably increase production cost.
CN104103563A, discloses a kind of quartz boat for silicon chip diffusion, it is characterised in that, including boat frame, baffle plate and crossbeam, described boat frame is rectangle, and its one end is provided with hanging nose, described baffle plate is fixed on hanging nose and boat frame intersection, and baffle plate is provided with some through holes; The adjacent described crossbeam of each two is one group of silicon chip seat, and the cross rail inner at each group of silicon chip seat is relatively set with arc-shaped slot. The structure of this quartz boat makes silicon chip be placed across on boat frame, although can guarantee that the smooth and easy circulation of gas, improve silicon chip diffuser efficiency and yield, but what still adopt is be blown into a large amount of nitrogen from stove tail to make diffusion source distribution in stove, along with yield increases, when single stove silicon chip quantity reaches four or five hundred, gas pulsation is relatively big, and diffusion uniformity is not good.
Utility model content
The purpose of this utility model is a kind of solar silicon wafers quartz boat used for diffusion of design, and it can be effectively improved diffusion uniformity, improves single furnace output simultaneously.
For achieving the above object, this utility model adopts the following technical scheme that
Technical scheme 1: a kind of solar silicon wafers quartz boat used for diffusion, it includes two gripper shoes and the multiple hollow quartz tube being fixed between two gripper shoes, multiple quartz ampoules form the rack area of accommodating silicon chip between two gripper shoes, and have the through hole through with each quartz ampoule at least one gripper shoe; Uniform on quartz ampoule having multiple cutting, silicon chip is placed in the cutting of the same perpendicular of quartz ampoule; On quartz ampoule, between adjacent cutting or between silicon chip, have at least one air dispelling hole, and air dispelling hole and hollow quartz tube through.
Preferably, hollow quartz tube is four, and former and later two sides of quartz boat respectively arrange one, and the bottom of quartz boat arranges two.
Preferably, the air dispelling hole between adjacent cutting is 2-5, and this 2-5 air dispelling hole along quartz ampoule circumferential arrangement in close silicon chip side.
Technical scheme 2: the solar silicon wafers quartz boat used for diffusion described in a kind of technical scheme 1, the air dispelling hole between its adjacent cutting is one group, and this group is 1-5 air dispelling hole and is arranged on same quartz ampoule; This group air dispelling hole is alternately distributed on four quartz ampoules.
Technical scheme 3: the solar silicon wafers quartz boat used for diffusion described in a kind of technical scheme 1, the air dispelling hole between its adjacent cutting is located on the quartz ampoule of two, side, or on the quartz ampoule of two, bottom; Air dispelling hole on the quartz ampoule of side, and the air dispelling hole on the quartz ampoule of bottom along the longitudinal direction of quartz ampoule in being alternately distributed.
Technical scheme 4: the solar silicon wafers quartz boat used for diffusion described in a kind of technical scheme 1, the air dispelling hole between its adjacent cutting is located on one of them quartz ampoule of side and one of them quartz ampoule of bottom and is formed one group; Another adjacent group air dispelling hole is located on another quartz ampoule of side and another quartz ampoule of bottom and is formed one group.
Technical scheme 5: the solar silicon wafers quartz boat used for diffusion described in a kind of technical scheme 1, the air dispelling hole between its adjacent cutting is located on two, side quartz ampoule and one of them quartz ampoule of bottom and is formed one group.
Technical scheme 6: the solar silicon wafers quartz boat used for diffusion described in a kind of technical scheme 1, the air dispelling hole between its adjacent cutting is located on one of them quartz ampoule of side and two, bottom quartz ampoule and is formed one group.
Compared with prior art the beneficial effects of the utility model are: by the hollow quartz tube arranged in quartz boat side and bottom and the air dispelling hole being opened on quartz ampoule, diffusion is derived from after stove tail is blown into, enter in hollow quartz tube from the through hole of gripper shoe, and spray to the gap between silicon chip from the air dispelling hole quartz ampoule, make diffusion source fully and the area of space being evenly distributed between silicon chip, the diffusion uniformity of whole boat can be effectively improved, also improve the utilization rate in diffusion source, thus reducing production cost simultaneously; Adopting this quartz boat with air dispelling hole quartz ampoule structure, rapidly diffusion source can not only be transferred to fire door from stove tail, it is also possible to increase transmission range further, thus improving the yield of single stove diffusion, reducing production cost; This quartz boat can pass through the direction of the position distribution control air-flow of perforate, makes diffusion source air-flow more be evenly distributed in the scope at silicon chip place, arranges flexibly according to Production requirement, practical; This quartz boat can be mutually compatible with existing equipment and technology, it is easy to realizes commercial application on existing equipment.
Accompanying drawing explanation
Fig. 1 is the perspective view of this utility model quartz boat;
Fig. 2 is the partial structurtes schematic diagram of quartz ampoule in this utility model quartz boat.
Detailed description of the invention
In order to make the technical solution of the utility model become apparent from, below in conjunction with attached Fig. 1 and 2, this utility model is described in detail. It should be appreciated that the detailed description of the invention described in this specification is only used to explain this utility model, it is not intended to limit protection domain of the present utility model.
Embodiment 1: with reference to accompanying drawing 1,2. a kind of solar silicon wafers quartz boat used for diffusion, it includes two gripper shoes 1 and the multiple hollow quartz tube 2 being fixed between two gripper shoes 1, hollow quartz tube 2 can be four, four quartz ampoules 2 are located between two gripper shoes 1, and between two gripper shoes 1, form the rack area 3 of accommodating silicon chip (not shown), specifically, two gripper shoes 1 and four hollow quartz tube 2 form the quartz boat of a rectangular shape, the front and back sides of quartz boat is respectively provided with a hollow quartz tube 21 and 22, and the two of side, front and back quartz ampoules 21 and 22 are symmetrical arranged, the bottom of quartz boat is provided with two spaced hollow quartz tube 31 and 32, and two, bottom quartz ampoule 31 and 32 is also symmetrical arranged, quartz ampoule 2 is along the genesis analysis of boat, namely vertical with the plane at silicon chip place, having the through hole 6 through with each quartz ampoule 2 in one of them gripper shoe 1, this through hole 6 is near the air inlet of diffusion furnace, and this through hole 6 is gradually reduced for conical hopper shape and by near air inlet direction to silicon chip direction, uniform on quartz ampoule 2 having multiple cutting 4, four quartz ampoules 2 are in the inner slotting silicon chip of cutting 4 of same perpendicular, namely silicon chip is placed in the cutting 4 of the same perpendicular of quartz ampoule 2, on quartz ampoule 2, between adjacent cutting 4, (or between silicon chip) has at least one air dispelling hole 5, air dispelling hole 5 is through with hollow quartz tube 2, and the aperture of air dispelling hole 5 is 0.1-5mm.
After quartz boat of the present utility model puts into diffusion furnace (i.e. diffusion quartz tube), diffusion source enters from air inlet, and it is blown in each quartz ampoule 2 by the through hole 6 in gripper shoe 1, blown out by the air dispelling hole 5 on quartz ampoule 2, the direction controlling air-flow can be distributed by the position of opening of air dispelling hole 5, make air flow method in the scope at silicon chip place, such as, on diffusion source in the past rear side quartz ampoule 21 and 22, the airflow direction of air dispelling hole 5 blowout is distributed in and points in the horizontal direction angle of the silicon chip scope less than or equal to �� 85 ��, from bottom quartz ampoule 31 and 32, the airflow direction of air dispelling hole 5 blowout is distributed in vertical direction with horizontal direction angle less than or equal within the scope of �� 85 ��, in this air dispelling hole 5 distributing position and airflow direction distribution situation by way of example only, do not limit the air dispelling hole 5 distributing position between two cuttings 4, the air dispelling hole 5 position on quartz ampoule 2 excircle is not limited yet, by hollow quartz tube 2 and the air dispelling hole 5 being opened on quartz ampoule 2, diffusion is derived from after stove tail is blown into, diffusion source fully and is evenly distributed in the area of space between silicon chip, also diffusion source is sprayed to the gap between silicon chip equably simultaneously, while improving the utilization rate in diffusion source, also substantially increase the uniformity of diffusion, adopt this quartz boat with air dispelling hole quartz ampoule structure, rapidly diffusion source can not only be transferred to fire door from stove tail, it is also possible to increase transmission range further, thus improving the yield of single stove diffusion, reducing production cost.
Can also all having the through hole 6 through with each quartz ampoule 2, the i.e. equal opening in the two ends of quartz ampoule 2 in above-mentioned two gripper shoe 1, wherein one end is near the air inlet of stove tail.
Air dispelling hole 5 between above-mentioned adjacent cutting 4 can also be set to 2-5, and this 2-5 air dispelling hole 5 along quartz ampoule circumferential arrangement near silicon chip side, namely the air dispelling hole between adjacent cutting is 2-5 is one group, and often group air dispelling hole 5 is around quartz ampoule 2 circumferential arrangement, and is positioned close to silicon chip side; Air dispelling hole 5 between adjacent cutting also can be arranged along quartz ampoule 2 direction, or the air dispelling hole 5 between adjacent cutting is two groups, often group has two air dispelling holes 5, two groups of air dispelling holes 5 are intervally arranged along quartz ampoule 2 direction and two groups of air dispelling holes 5 are in dislocation arrangement, set up air dispelling hole 5 and also are able to be effectively improved diffusion uniformity.
Embodiment 2: on the basis of embodiment 1, a kind of solar silicon wafers quartz boat used for diffusion, the air dispelling hole 5 between its adjacent cutting is one group, and this group air dispelling hole is 1-5 and is arranged on same quartz ampoule, this group air dispelling hole 5 is alternately distributed on four quartz ampoules 21,22,31,32, specifically, air dispelling hole 5 between adjacent two panels silicon chip is arranged on a wherein quartz ampoule of front and back sides or bottom such as 21 or 31, and adjacent another set air dispelling hole 5 is arranged on an other quartz ampoule 22 or 32 of front and back sides or bottom, on quartz boat, air dispelling hole 5 is periodically alternately distributed along quartz ampoule 2 is longitudinally upper in uniform, namely only one of which or one group of air dispelling hole 5 between two panels silicon chip, air dispelling hole 5 on quartz boat alternately occurs on four quartz ampoules 2, such as it is located at 21 along the arrangement of air inlet direction air dispelling hole 5 for spaced apart successively, 31, 22, 32, 21, 31, 22, 32, 21 ..., so not only can ensure that the distributing homogeneity of air-flow but can reduce perforate quantity strengthen quartz ampoule mechanical strength.
Embodiment 3: on the basis of embodiment 1, a kind of solar silicon wafers quartz boat used for diffusion, the air dispelling hole 5 between its adjacent cutting is located on former and later two quartz ampoules 21 and 22, or on two, bottom quartz ampoule 31 and 32; Air dispelling hole 5 on the quartz ampoule 21 and 22 of front and back, and the air dispelling hole 5 on bottom quartz ampoule 31 and 32 is in being alternately distributed; Specifically, air dispelling hole 5 between adjacent two panels silicon chip is arranged on the quartz ampoule 21 and 22 of both sides, front and back, and adjacent another set air dispelling hole 5 is arranged on the quartz ampoule 31 and 32 of bottom, on quartz boat, the air dispelling hole between silicon chip is in being periodically alternately distributed, for instance be located at 21 and 22,31 and 32,21 and 22,31 and 32,21 and 22 along the arrangement of air inlet direction air dispelling hole 5 for spaced apart successively ...; So not only can ensure that the distributing homogeneity of air-flow but also the quantity of perforate can be reduced, strengthen the mechanical strength of quartz ampoule.
Embodiment 4: on the basis of embodiment 1, a kind of solar silicon wafers quartz boat used for diffusion, the air dispelling hole 5 between its adjacent cutting is located at one of them quartz ampoule 21 or 22 of front and back, and forms one group on one of them quartz ampoule 31 or 32 of bottom; Another group air dispelling hole 5 adjacent be located at before and after another quartz ampoule 22 or 21 and another quartz ampoule 32 or 31 of bottom on form one group. Specifically, air dispelling hole 5 between adjacent two panels silicon chip is arranged on a side quartz ampoule 21 and a bottom quartz ampoule 31 adjacent with this side quartz ampoule 21, and adjacent another set air dispelling hole 5 is arranged on an other side quartz ampoule 22 and a bottom quartz ampoule 32 adjacent with this side quartz ampoule 22, on quartz boat, the air dispelling hole 5 between silicon chip is in being periodically alternately distributed, and namely arranges as the spaced apart quartz ampoule 21 and 31,22 and 32,21 and 31,22 and 32,21 and 31 that is located at successively along air inlet direction air dispelling hole 5 ...;Or, air dispelling hole 5 between adjacent two panels silicon chip is arranged on a side quartz ampoule 21 and a bottom quartz ampoule 32 apart from each other with it, and adjacent another set air dispelling hole 5 is arranged on an other side quartz ampoule 22 and an other root bottom part quartz ampoule 31, on quartz boat, the air dispelling hole 5 between silicon chip is in being periodically alternately distributed, and namely arranges as the spaced apart quartz ampoule 21 and 32,22 and 31,21 and 32,22 and 31,21 and 32 that is located at successively along air inlet direction air dispelling hole 5 ...; So not only can ensure that the distributing homogeneity of air-flow but can reduce perforate quantity strengthen quartz ampoule mechanical strength.
Embodiment 5: on the basis of embodiment 1, a kind of solar silicon wafers quartz boat used for diffusion, the air dispelling hole 5 between its adjacent cutting is located at two, side, front and back quartz ampoule 21,22, and forms one group on one of them quartz ampoule 31 or 32 of bottom; Air dispelling hole on two quartz ampoules 31,32 in bottom can also appear alternatively in and form two groups of air dispelling holes between adjacent cutting, and namely the air dispelling hole 5 on the quartz ampoule 31 and 32 of bottom is in being alternately distributed. Specifically, the triformed distribution of air dispelling hole 5: is, the often group air dispelling hole 5 between adjacent cutting is three, is opened in two, side, front and back quartz ampoule 21,22 respectively, and on bottom quartz ampoule 31; Two are, the often group air dispelling hole 5 between adjacent cutting is three, are opened in two, side, front and back quartz ampoule 21,22 respectively, and on bottom quartz ampoule 32; Three are, one group of air dispelling hole 5 between adjacent cutting is arranged on two, side, front and back quartz ampoule 21,22, and on bottom quartz ampoule 31, another group air dispelling hole 5 between adjacent cutting is arranged on two, side, front and back quartz ampoule 21,22, and on bottom quartz ampoule 32, and two groups of air dispelling holes 5 are alternately distributed along the longitudinal direction of quartz ampoule in periodicity on quartz boat, for instance arrange as spaced apart successively (21,22,31), (21,22,32), (21,22,31), (21,22,32) of being located at along air inlet direction air dispelling hole 5 ...; So not only can ensure that the distributing homogeneity of air-flow but also the quantity of perforate can be reduced, strengthen the mechanical strength of quartz ampoule.
Embodiment 6: on the basis of embodiment 1, a kind of solar silicon wafers quartz boat used for diffusion, the air dispelling hole 5 between its adjacent cutting is located at two quartz ampoules 31,32 in bottom, and forms one group on one of them quartz ampoule 21 or 22 of side, front and back; Air dispelling hole on two, side, front and back quartz ampoule 21,22 can also appear alternatively in and form two groups of air dispelling holes between adjacent cutting, and before and after namely, the air dispelling hole 5 on two, side quartz ampoule 21,22 is in being alternately distributed. Specifically, the triformed distribution of air dispelling hole 5: is, the often group air dispelling hole 5 between adjacent cutting is three, is opened in two quartz ampoules 31,32 in bottom respectively, and on side quartz ampoule 21; Two are, the often group air dispelling hole 5 between adjacent cutting is three, are opened in two quartz ampoules 31,32 in bottom respectively, and on side quartz ampoule 22; Three are, one group of air dispelling hole 5 between adjacent cutting is arranged on two quartz ampoules 31,32 in bottom, and on side quartz ampoule 21, another group air dispelling hole 5 between adjacent cutting is arranged on two quartz ampoules 31,32 in bottom, and on side quartz ampoule 22, and two groups of air dispelling holes 5 are alternately distributed along the longitudinal direction of quartz ampoule in periodicity on quartz boat, for instance arrange as spaced apart successively (31,32,21), (31,32,22), (31,32,21), (31,32,22) of being located at along air inlet direction air dispelling hole 5 ...;So not only can ensure that the distributing homogeneity of air-flow but also the quantity of perforate can be reduced, strengthen the mechanical strength of quartz ampoule.
Claims (8)
1. a solar silicon wafers quartz boat used for diffusion, it is characterized in that: include two gripper shoes (1) and the multiple hollow quartz tube (2) being fixed between two gripper shoes (1), multiple quartz ampoules (2) form the rack area (3) of accommodating silicon chip between two gripper shoes (1), and have the through hole (6) through with each quartz ampoule (2) at least one gripper shoe (1); Quartz ampoule (2) is above uniform has multiple cutting (4), and silicon chip is placed in the cutting (4) of quartz ampoule (2) same perpendicular; On quartz ampoule (2), it is positioned between adjacent cutting (4) or between silicon chip, has at least one air dispelling hole (5), and air dispelling hole (5) is through with hollow quartz tube (2).
2. solar silicon wafers quartz boat used for diffusion according to claim 1, it is characterised in that: hollow quartz tube (2) is four, and former and later two sides of quartz boat respectively arrange one, and the bottom of quartz boat arranges two.
3. solar silicon wafers quartz boat used for diffusion according to claim 1, it is characterized in that: the air dispelling hole (5) between adjacent cutting (4) is 2-5, and this 2-5 air dispelling hole (5) is along quartz ampoule (2) circumferential arrangement.
4. solar silicon wafers quartz boat used for diffusion according to claim 2, it is characterized in that: the air dispelling hole (5) between adjacent cutting is one group, this group is 1-5 air dispelling hole (5) and is arranged on same quartz ampoule (2); This group air dispelling hole (5) is alternately distributed on four quartz ampoules (2).
5. solar silicon wafers quartz boat used for diffusion according to claim 2, it is characterized in that: the air dispelling hole (5) between adjacent cutting is located on two, side quartz ampoule (21 and 22), or on two, bottom quartz ampoule (31 and 32); Air dispelling hole (5) on side quartz ampoule (21 and 22), the air dispelling hole (5) on bottom quartz ampoule (31 and 32) are be alternately distributed along the longitudinal direction of quartz ampoule.
6. solar silicon wafers quartz boat used for diffusion according to claim 2, it is characterised in that: the air dispelling hole (5) between adjacent cutting is located at one of them quartz ampoule of side (21 or 22) and the upper formation of one of them quartz ampoule of bottom (31 or 32) one group; Another adjacent group air dispelling hole (5) is located at another quartz ampoule of side (22 or 21) and the upper formation of another quartz ampoule of bottom (32 or 31) one group.
7. solar silicon wafers quartz boat used for diffusion according to claim 2, it is characterised in that: the air dispelling hole (5) between adjacent cutting is located at two, side quartz ampoule (21 and 22) and the upper formation of one of them quartz ampoule of bottom (31 or 32) one group.
8. solar silicon wafers quartz boat used for diffusion according to claim 2, it is characterised in that: the air dispelling hole (5) between adjacent cutting is located at the upper formation of one of them quartz ampoule of side (21 or 22) and two, bottom quartz ampoule (31 and 32) one group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521039636.3U CN205303486U (en) | 2015-12-10 | 2015-12-10 | Quartz boat is used in diffusion of solar energy silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521039636.3U CN205303486U (en) | 2015-12-10 | 2015-12-10 | Quartz boat is used in diffusion of solar energy silicon chip |
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| CN205303486U true CN205303486U (en) | 2016-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201521039636.3U Expired - Fee Related CN205303486U (en) | 2015-12-10 | 2015-12-10 | Quartz boat is used in diffusion of solar energy silicon chip |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887873A (en) * | 2019-02-14 | 2019-06-14 | 扬州美和光电科技有限公司 | A kind of production and processing method of high-quality quartz boat |
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2015
- 2015-12-10 CN CN201521039636.3U patent/CN205303486U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887873A (en) * | 2019-02-14 | 2019-06-14 | 扬州美和光电科技有限公司 | A kind of production and processing method of high-quality quartz boat |
| CN109887873B (en) * | 2019-02-14 | 2021-02-23 | 扬州美和光电科技有限公司 | Production and processing method of high-quality quartz boat |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160608 Termination date: 20161210 |