CN202830231U - Flowing gas stabilizing device of crystalline silicon solar cell diffusion furnace - Google Patents
Flowing gas stabilizing device of crystalline silicon solar cell diffusion furnace Download PDFInfo
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- CN202830231U CN202830231U CN 201220460322 CN201220460322U CN202830231U CN 202830231 U CN202830231 U CN 202830231U CN 201220460322 CN201220460322 CN 201220460322 CN 201220460322 U CN201220460322 U CN 201220460322U CN 202830231 U CN202830231 U CN 202830231U
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- inlet pipe
- furnace
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Abstract
The utility model relates to a flowing gas stabilizing device of a crystalline silicon solar cell diffusion furnace. The flowing gas stabilizing device of the crystalline silicon solar cell diffusion furnace comprises a furnace pipe (1), an air intake pipe (2) and an air exhaust pipe (3) and is characterized in that the air intake pipe (2) and the air exhaust pipe (3) stretch into the furnace pipe (1) through a tail portion of the furnace pipe (1). The air intake pipe (2) and the air exhaust pipe (3) are respectively arranged on the upper portion and the lower portion of the furnace pipe (1). Multiple air inlets (4) are arranged in the lower surface of the air intake pipe (2) and multiple air outlets (5) are arranged in the upper surface of the air exhaust pipe (3). As the multiple air inlets (4) are arranged in the lower surface of the air intake pipe (2) and the multiple air outlets (5) are arranged in the upper surface of the air exhaust pipe (3), reaction gas which flows in and out can perform multiple-point flow-in and flow-out through the air intake pipe and the air exhaust pipe. The gas currents flow in and out through all vents and parallelly flow by the surface of silicon slices so that the gas is evenly distributed in the furnace pipe and uniformity of sheet resistance inside and among the silicon slices of phosphorus diffusion of an entire tube is improved.
Description
Technical field
The utility model relates to a kind of crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice, belongs to crystal silicon solar energy battery diffusion furnace field.
Background technology
Diffusion technique is mainly phosphorus oxychloride (POCl in crystal silicon solar energy battery
3) the liquid source diffusion, carry phosphorus oxychloride (POCl
3) gas enter boiler tube from the stove tail, gas is through discharging from fire door behind the whole boiler tube, gas is skewness in boiler tube, causes between homogeneous tube phosphorous diffusion sheet, the sheet resistance homogeneity is relatively poor in the sheet.
The utility model content
The purpose of this utility model is to overcome above-mentioned deficiency, and a kind of crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice is provided, so that gas is evenly distributed sheet resistance homogeneity between the sheet of raising homogeneous tube phosphorous diffusion, in the sheet in boiler tube.
The purpose of this utility model is achieved in that
A kind of crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice, it comprises boiler tube, inlet pipe and vapor pipe, it is characterized in that described inlet pipe and vapor pipe stretch in the boiler tube from the afterbody of boiler tube, described inlet pipe and vapor pipe lay respectively at top and the bottom of boiler tube, the lower surface of described inlet pipe is provided with a plurality of air inlet ports along the length direction of inlet pipe, and the upper surface of described vapor pipe is provided with a plurality of venting holes along the length direction of vapor pipe.
As a kind of preferred, be provided with three air inlet ports on the same cross section of described inlet pipe, described three air inlet ports are evenly arranged along second circumference in inlet pipe cross section.
As a kind of preferred, described inlet pipe and vapor pipe are made by quartz material.
Compared with prior art, the beneficial effects of the utility model are:
The utility model is because the lower surface of inlet pipe is provided with a plurality of air inlet ports, the upper surface of vapor pipe is provided with a plurality of venting holes, the reactant gases that passes into can pass through the air inlet of inlet pipe multiple spot and the exhaust of vapor pipe multiple spot, air-flow is from each pore turnover, parallel-flow is crossed silicon chip surface, so that gas is evenly distributed sheet resistance homogeneity between the sheet of raising homogeneous tube phosphorous diffusion, in the sheet in boiler tube.
Description of drawings
Fig. 1 is the front view of the utility model crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice.
Fig. 2 is the right view of Fig. 1.
Fig. 3 is the inlet pipe upward view of the utility model crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice.
Fig. 4 is the right view of Fig. 3.
Fig. 5 is the vertical view of the vapor pipe of the utility model crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice.
Fig. 6 is the right view of Fig. 5.
Wherein:
Air inlet port 4
Venting hole 5.
Embodiment
Referring to Fig. 1 ~ Fig. 6, a kind of crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice that the utility model relates to, it comprises boiler tube 1, inlet pipe 2 and vapor pipe 3, described inlet pipe 2 and vapor pipe 3 stretch in the boiler tube 1 from the afterbody of boiler tube 1, described inlet pipe 2 and vapor pipe 3 lay respectively at top and the bottom of boiler tube 1, the lower surface of described inlet pipe 2 is provided with a plurality of air inlet ports 4 along the length direction of inlet pipe 2, the upper surface of described vapor pipe 3 is provided with a plurality of venting holes 5 along the length direction of vapor pipe 3, and described inlet pipe 2 and vapor pipe 3 are made by quartz material.
Be provided with three air inlet ports 4 on the same cross section of described inlet pipe 2, described three air inlet ports 4 are evenly arranged along second circumference in inlet pipe 2 cross sections.
Claims (3)
1. crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice, it comprises boiler tube (1), inlet pipe (2) and vapor pipe (3), it is characterized in that described inlet pipe (2) and vapor pipe (3) stretch in the boiler tube (1) from the afterbody of boiler tube (1), described inlet pipe (2) and vapor pipe (3) lay respectively at top and the bottom of boiler tube (1), the lower surface of described inlet pipe (2) is provided with a plurality of air inlet ports (4) along the length direction of inlet pipe (2), and the upper surface of described vapor pipe (3) is provided with a plurality of venting holes (5) along the length direction of vapor pipe (3).
2. a kind of crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice according to claim 1, it is characterized in that being provided with three air inlet ports (4) on the same cross section of described inlet pipe (2), described three air inlet ports (4) are evenly arranged along second circumference in inlet pipe (2) cross section.
3. a kind of crystal silicon solar energy battery diffusion furnace input and output gas stabilizing deyice according to claim 1 is characterized in that described inlet pipe (2) and vapor pipe (3) make by quartz material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220460322 CN202830231U (en) | 2012-09-11 | 2012-09-11 | Flowing gas stabilizing device of crystalline silicon solar cell diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220460322 CN202830231U (en) | 2012-09-11 | 2012-09-11 | Flowing gas stabilizing device of crystalline silicon solar cell diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202830231U true CN202830231U (en) | 2013-03-27 |
Family
ID=47941984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220460322 Expired - Fee Related CN202830231U (en) | 2012-09-11 | 2012-09-11 | Flowing gas stabilizing device of crystalline silicon solar cell diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202830231U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103225111A (en) * | 2013-05-06 | 2013-07-31 | 上海煦康电子科技有限公司 | Continuous diffusion furnace and its ventilation method |
| CN104409392A (en) * | 2014-11-06 | 2015-03-11 | 北京七星华创电子股份有限公司 | Air intake silica gun for horizontal diffusion furnace |
| CN105839190A (en) * | 2016-05-12 | 2016-08-10 | 温州海旭科技有限公司 | High-temperature diffusion device |
| CN109060663A (en) * | 2018-07-03 | 2018-12-21 | 青岛海纳光电环保有限公司 | A kind of gas absorption cell and optical gas analyzer |
-
2012
- 2012-09-11 CN CN 201220460322 patent/CN202830231U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103225111A (en) * | 2013-05-06 | 2013-07-31 | 上海煦康电子科技有限公司 | Continuous diffusion furnace and its ventilation method |
| CN104409392A (en) * | 2014-11-06 | 2015-03-11 | 北京七星华创电子股份有限公司 | Air intake silica gun for horizontal diffusion furnace |
| CN104409392B (en) * | 2014-11-06 | 2017-08-22 | 北京七星华创电子股份有限公司 | A kind of horizontal diffusion furnace containing air inlet flux gun |
| CN105839190A (en) * | 2016-05-12 | 2016-08-10 | 温州海旭科技有限公司 | High-temperature diffusion device |
| CN105839190B (en) * | 2016-05-12 | 2018-07-06 | 温州海旭科技有限公司 | A kind of High temperature diffusion device |
| CN109060663A (en) * | 2018-07-03 | 2018-12-21 | 青岛海纳光电环保有限公司 | A kind of gas absorption cell and optical gas analyzer |
| CN109060663B (en) * | 2018-07-03 | 2024-05-28 | 青岛崂应海纳光电环保集团有限公司 | Gas absorption tank and optical gas analyzer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130327 Termination date: 20200911 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |