CN201852445U - Diffusion furnace capable of improving sheet resistance uniformity - Google Patents
Diffusion furnace capable of improving sheet resistance uniformity Download PDFInfo
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- CN201852445U CN201852445U CN2010205477438U CN201020547743U CN201852445U CN 201852445 U CN201852445 U CN 201852445U CN 2010205477438 U CN2010205477438 U CN 2010205477438U CN 201020547743 U CN201020547743 U CN 201020547743U CN 201852445 U CN201852445 U CN 201852445U
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- diffusion
- furnace
- gas
- tube
- flow
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Abstract
The utility model relates to the technical field of diffusion furnaces, in particular to a diffusion furnace capable of improving sheet resistance uniformity. The diffusion furnace comprises a furnace tube, a gas inlet and a tail gas tube, the gas inlet and the tail gas tube are arranged on the furnace tube, and a gas flow uniform diffuser is disposed at the gas inlet. During diffusion of existing diffusion equipment, process gas directly enters the furnace tube from the gas inlet at the tail of the furnace tube and is not diffused, so that gas flow in the furnace tube is not uniform, and finally sheet resistance uniformity after diffusion is poorer. A flow homogenizer is added onto the gas inlet at the tail of the furnace, so that gas flow uniformly can be improved effectively, and finally the effect of improving sheet resistant uniformity is achieved.
Description
Technical field
The utility model relates to the diffusion furnace technical field, the inhomogeneity diffusion furnace of particularly a kind of improvement diffusion side resistance.
Background technology
Existing diffusion furnace equipment, its process gas directly enters from stove tail air inlet, and the process gas dispersion effect is poor, and finally resistance uniformity in the side's of causing is relatively poor.
The utility model content
Technical problem to be solved in the utility model is: existing diffusion furnace equipment diffusion uniformity is poor.
The technical scheme that its technical problem that solves the utility model adopts is: the inhomogeneity diffusion furnace of a kind of improvement diffusion side resistance, comprise boiler tube, and air inlet on the boiler tube and offgas duct are provided with the even disperser of air-flow at air inlet.
Particularly, the even disperser of air-flow is the flat board of quartzy material, has equally distributed passage on flat board.
The beneficial effects of the utility model are: owing to have diffusion facilities now in diffusion process, process gas directly enters boiler tube from boiler tube tail air inlet, does not disperse, and causes the interior air-flow of boiler tube inhomogeneous, and it is relatively poor finally to cause the diffusion rear to hinder uniformity.By adding flow homogenizer, can improve airflow homogeneity effectively, finally the effect of the side's of reaching resistance uniformity improvement at stove tail air inlet.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail;
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the structural representation of the even disperser of air-flow of the present utility model.
Wherein: 1. boiler tube, 2. air inlet, 3. offgas duct, the 4. even disperser of air-flow, 5. passage.
The specific embodiment
1 and 2 pair of the utility model is described in further detail in conjunction with the accompanying drawings now.These accompanying drawings are the schematic diagram of simplification, basic structure of the present utility model only is described in a schematic way, so it only show the formation relevant with the utility model.
As shown in Figure 1, resistance inhomogeneity diffusion furnace in a kind of improvement diffusion side comprises boiler tube 1, and air inlet 2 on the boiler tube 1 and offgas duct 3 are provided with the even disperser 4 of air-flow at air inlet 2.As shown in Figure 2, the even disperser 4 of air-flow is the flat board of quartzy material, has equally distributed passage 5 on flat board.The little nitrogen stream that carries the phosphorus source evenly disperses by the even disperser 4 of air-flow, finally reaches the inhomogeneity effect of improvement side's resistance.
Claims (2)
1. one kind is improved the inhomogeneity diffusion furnace of diffusion side's resistance, comprises boiler tube (1), and air inlet (2) on the boiler tube (1) and offgas duct (3) is characterized in that: at described air inlet (2) the even disperser of air-flow (4) is set.
2. the inhomogeneity diffusion furnace of improvement according to claim 1 diffusion side resistance, it is characterized in that: the even disperser of described air-flow (4) is the flat board of quartzy material, has equally distributed passage (5) on flat board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205477438U CN201852445U (en) | 2010-09-29 | 2010-09-29 | Diffusion furnace capable of improving sheet resistance uniformity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205477438U CN201852445U (en) | 2010-09-29 | 2010-09-29 | Diffusion furnace capable of improving sheet resistance uniformity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201852445U true CN201852445U (en) | 2011-06-01 |
Family
ID=44094836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205477438U Expired - Fee Related CN201852445U (en) | 2010-09-29 | 2010-09-29 | Diffusion furnace capable of improving sheet resistance uniformity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201852445U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105839190A (en) * | 2016-05-12 | 2016-08-10 | 温州海旭科技有限公司 | High-temperature diffusion device |
| CN108560059A (en) * | 2018-07-13 | 2018-09-21 | 常州亿晶光电科技有限公司 | Modified form solar battery sheet diffusion furnace |
-
2010
- 2010-09-29 CN CN2010205477438U patent/CN201852445U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105839190A (en) * | 2016-05-12 | 2016-08-10 | 温州海旭科技有限公司 | High-temperature diffusion device |
| CN105839190B (en) * | 2016-05-12 | 2018-07-06 | 温州海旭科技有限公司 | A kind of High temperature diffusion device |
| CN108560059A (en) * | 2018-07-13 | 2018-09-21 | 常州亿晶光电科技有限公司 | Modified form solar battery sheet diffusion furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110601 Termination date: 20130929 |