CN204204891U - A kind of improved pyrolysis disperser - Google Patents
A kind of improved pyrolysis disperser Download PDFInfo
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- CN204204891U CN204204891U CN201420694785.2U CN201420694785U CN204204891U CN 204204891 U CN204204891 U CN 204204891U CN 201420694785 U CN201420694785 U CN 201420694785U CN 204204891 U CN204204891 U CN 204204891U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The utility model discloses a kind of improved pyrolysis disperser, aim to provide a kind of can the improved pyrolysis disperser of diffusion uniformity between diffusion and sheet in improved sheet.It comprises air inlet pipe, diffusion furnace tube, silicon chip and waste pipe, described air inlet pipe and waste pipe are mounted in diffusion furnace tube, described air inlet pipe and waste pipe are parallel to each other, described silicon chip is placed between air inlet pipe and waste pipe, described air inlet pipe is provided with some air admission holes, and described waste pipe is provided with some steam vents.The beneficial effects of the utility model are: solve crystal silicon solar energy battery diffusion for the uniformity and the mobility that spread furnace gas during PN junction, metaphosphoric acid also can be drained rapidly, accelerate the discharge of technology waste gas, reduce corrosion, in improved sheet, the uniformity that spreads between sheet, thus improve the sheet resistance uniformity of solar battery sheet, improve silicon solar cell conversion efficiency.
Description
Technical field
The utility model relates to high-efficiency battery Technical Development Area, refers in particular to a kind of improved pyrolysis disperser that can improve sheet resistance uniformity.
Background technology
Diffusion makes the core that P-N junction is crystal-silicon solar cell, is also one of key of solar cell quality.For diffusing procedure, greatest problem is the uniformity how ensureing diffusion.Spread uniform battery, its follow-up technological parameter controllability is high, can ensure the stability of silicon solar cell unit for electrical property parameters.
At present, the diffusion furnace that in crystalline silicon suitability for industrialized production, diffusion making P-N junction adopts mainly contains tubular type and board-like two kinds.Tubular diffusion furnace, because its closure is good, capacity large, is widely used.Tubular diffusion furnace greatly can reduce technique pickup risk, for the application of high performance solar batteries industry provides hardware guarantee.
For the feature of tubular diffusion furnace, the uniformity optimizing diffusion mainly takes warm area compensation technique.In large-scale production, compensation method realizes mainly through adjusting process reaction time, gas flow and reaction temperature three.In process gas total flow, toxic emission flow and stove, the balance of pressure is arranged, the gas uniform diversion design of homogenizing plate, toxic emission position and variations in flow also most important to factors such as the jamproof balance of temperature stabilization are arranged, because the interrelated impact of these factors, the diffusion technology in producing is made to optimize relative difficulty.
During in order to overcome toxic emission and variations in flow, gas is in the impact of silicon chip surface skewness on diffused sheet resistance uniformity, traditional single port formula delivery pipe, the interior regional of pipe is reacted the gas produced and can only be discharged by the exhaust outlet near fire door, therefore in stove by produce one by stove Caudad fire door flow air-flow, the air-flow of this lateral flow is unfavorable for being uniformly distributed of silicon chip surface process gas; In addition, the waste gas that reaction produces can not get timely discharge also can directly etching silicon chip.
Utility model content
The utility model there is above-mentioned deficiency to overcome in prior art, provide a kind of can the improved pyrolysis disperser of diffusion uniformity between diffusion and sheet in improved sheet.
To achieve these goals, the utility model is by the following technical solutions:
A kind of improved pyrolysis disperser, comprise air inlet pipe, diffusion furnace tube, silicon chip and waste pipe, described air inlet pipe and waste pipe are mounted in diffusion furnace tube, described air inlet pipe and waste pipe are parallel to each other, described silicon chip is placed between air inlet pipe and waste pipe, described air inlet pipe is provided with some air admission holes, and described waste pipe is provided with some steam vents.
The invention is by transforming the waste pipe of technology waste gas, through transformation, gas can by the steam vent quick drain on waste pipe, improve uniformity and the mobility of gaseous matter in reacting furnace, metaphosphoric acid also can be drained rapidly, accelerates the discharge of technology waste gas, reduces corrosion, thus the uniformity spread in improved sheet, between sheet, improve silicon solar cell conversion efficiency.
As preferably, the row of described steam vent is 1-3 row, and described spacing of often arranging adjacent two steam vents on steam vent is 15-20mm.Crystal silicon solar energy battery diffusion is solved for the uniformity and the mobility that spread furnace gas during P-N junction by the best pitch of holes of optimization waste pipe and waste pipe aperture optimum arrangementing mode, thus improve the sheet resistance uniformity of solar battery sheet, and then obtain the cell piece of stability and high efficiency rate.
As preferably, the pore size of described steam vent is 0.6-1.0mm.Solve crystal silicon solar energy battery diffusion for the uniformity and the mobility that spread furnace gas during P-N junction by optimizing waste pipe optimum aperture size, thus improve the sheet resistance uniformity of solar battery sheet, and then obtain the cell piece of stability and high efficiency rate.
As preferably, the region at described steam vent place is divided into three parts, be respectively in the middle part of fire door portion, stove and stove afterbody, described fire door portion is away from the gas outlet place of waste pipe, described stove afterbody is near the gas outlet place of waste pipe, be placed in the centre of fire door portion and stove afterbody in the middle part of described stove, the steam vent aperture in described fire door portion is greater than the steam vent aperture in the middle part of stove, and the steam vent aperture in the middle part of described stove is greater than the steam vent aperture of stove afterbody.Solve crystal silicon solar energy battery diffusion for the uniformity and the mobility that spread furnace gas during P-N junction by optimizing waste pipe aperture optimum arrangementing mode, thus improve the sheet resistance uniformity of solar battery sheet, and then obtain the cell piece of stability and high efficiency rate.
As preferably, the ratio between the steam vent columns in the middle part of the steam vent columns in described fire door portion, stove, the steam vent columns of stove afterbody is 1: 2: 1.Solve crystal silicon solar energy battery diffusion for the uniformity and the mobility that spread furnace gas during P-N junction by optimizing waste pipe aperture optimum arrangementing mode, thus improve the sheet resistance uniformity of solar battery sheet, and then obtain the cell piece of stability and high efficiency rate.
The beneficial effects of the utility model are: by transforming the waste pipe of technology waste gas, make gas can by the steam vent quick drain on waste pipe, and by optimizing steam vent optimum aperture size, best pitch of holes and waste pipe upper air-vent aperture optimum arrangementing mode solve crystal silicon solar energy battery diffusion for the uniformity and the mobility that spread furnace gas during P-N junction, metaphosphoric acid also can be drained rapidly, accelerate the discharge of technology waste gas, reduce corrosion, in improved sheet, the uniformity spread between sheet, thus improve the sheet resistance uniformity of solar battery sheet, improve silicon solar cell conversion efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure: 1. air inlet pipe, 2. diffusion furnace tube, 3. silicon chip, 4. waste pipe, 5. air admission hole, 6. steam vent.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is further described.
In embodiment as described in Figure 1, a kind of improved pyrolysis disperser, comprise air inlet pipe 1, diffusion furnace tube 2, silicon chip 3 and waste pipe 4, air inlet pipe 1 and waste pipe 4 are mounted in diffusion furnace tube 2, air inlet pipe 1 and waste pipe 4 are parallel to each other, silicon chip 3 is placed between air inlet pipe 1 and waste pipe 4, air inlet pipe 1 is provided with some air admission holes 5, waste pipe 4 is provided with some steam vents 6, the row of steam vent 6 is 1-3 row, the spacing of often arranging adjacent two steam vents 6 on steam vent 6 is 15-20mm, and the pore size of steam vent 6 is 0.6-1.0mm.Wherein: the region at steam vent 6 place is divided into three parts, be respectively in the middle part of fire door portion, stove and stove afterbody, fire door portion is away from the gas outlet place of waste pipe 4, stove afterbody is near the gas outlet place of waste pipe 4, the centre of fire door portion and stove afterbody is placed in the middle part of stove, steam vent 6 aperture in fire door portion is greater than steam vent 6 aperture in the middle part of stove, steam vent 6 aperture in the middle part of stove is greater than steam vent 6 aperture of stove afterbody, and the ratio between steam vent 6 columns in the middle part of steam vent 6 columns in fire door portion, stove, steam vent 6 columns of stove afterbody is 1: 2: 1.And the region at air admission hole 5 place is also divided into three parts, be respectively in the middle part of fire door portion, stove and stove afterbody, air admission hole 5 aperture in fire door portion is greater than air admission hole 5 aperture in the middle part of stove, and air admission hole 5 aperture in the middle part of stove is greater than air admission hole 5 aperture of stove afterbody.
Below by concrete embodiment, and in conjunction with subordinate list 1-3, the technical scheme in above-described embodiment is described in further detail.
Embodiment 1:
Designing and arranging pore is 3 regions, and fire door portion and stove afterbody place establish 18 row's of itemizing steam vents, and establish 36 row's of itemizing steam vents in the middle part of stove, pitch of holes is 15mm, and steam vent aperture is respectively: fire door portion 0.8mm, 0.7mm in the middle part of stove, stove afterbody 0.6mm.Monocrystalline silicon piece, through normal wash, enters boat at 810 DEG C, after being warming up to 820 DEG C, passing into carry POCl according to the technique set
3nitrogen and oxygen, keep 5-30 minute, then temperature is risen to 860 DEG C, insulation 5-40 minute; Treat that diffusion reaction is complete, will the silicon chip extracting test silicon wafer sheet resistance of diverse location in diffusion furnace tube be positioned over.
Embodiment 2:
Designing and arranging pore is 3 regions, and fire door portion and stove afterbody place establish 18 row two to arrange steam vent, and establish 36 row two to arrange steam vent in the middle part of stove, pitch of holes is 15mm, and steam vent aperture is respectively: fire door portion 0.8mm, 0.7mm in the middle part of stove, stove afterbody 0.6mm.Monocrystalline silicon piece, through normal wash, enters boat at 810 DEG C, after being warming up to 820 DEG C, passes into the nitrogen and oxygen that carry POCl3 according to the technique set, and keeps 5-30 minute, then temperature is risen to 860 DEG C, insulation 5-40 minute; Treat that diffusion reaction is complete, will the silicon chip extracting test silicon wafer sheet resistance of diverse location in diffusion furnace tube be positioned over.
Embodiment 3:
Designing and arranging pore is 3 regions, and fire door portion and stove afterbody place establish 18 row three to arrange steam vent, and establish 36 row three to arrange steam vent in the middle part of stove, pitch of holes is 15mm, and steam vent aperture is respectively: fire door portion 0.8mm, 0.7mm in the middle part of stove, stove afterbody 0.6mm.Monocrystalline silicon piece, through normal wash, enters boat at 810 DEG C, after being warming up to 820 DEG C, passes into the nitrogen and oxygen that carry POCl3 according to the technique set, and keeps 5-30 minute, then temperature is risen to 860 DEG C, insulation 5-40 minute; Treat that diffusion reaction is complete, will the silicon chip extracting test silicon wafer sheet resistance of diverse location in diffusion furnace tube be positioned over.
Embodiment 4:
Designing and arranging pore is 3 regions, and fire door portion and stove afterbody place establish 18 row two to arrange steam vent, and establish 36 row two to arrange steam vent in the middle part of stove, pitch of holes is 20mm, and steam vent aperture is respectively: fire door portion 0.8mm, 0.7mm in the middle part of stove, stove afterbody 0.6mm.Monocrystalline silicon piece, through normal wash, enters boat at 810 DEG C, after being warming up to 820 DEG C, passes into the nitrogen and oxygen that carry POCl3 according to the technique set, and keeps 5-30 minute, then temperature is risen to 860 DEG C, insulation 5-40 minute; Treat that diffusion reaction is complete, will the silicon chip extracting test silicon wafer sheet resistance of diverse location in diffusion furnace tube be positioned over.
Embodiment 5:
Designing and arranging pore is 3 regions, and fire door portion and stove afterbody place establish 18 row two to arrange steam vent, and establish 36 row two to arrange steam vent in the middle part of stove, pitch of holes is 20mm, and steam vent aperture is respectively: fire door portion 0.9mm, 0.8mm in the middle part of stove, stove afterbody 0.7mm.Monocrystalline silicon piece, through normal wash, enters boat at 810 DEG C, after being warming up to 820 DEG C, passes into the nitrogen and oxygen that carry POCl3 according to the technique set, and keeps 5-30 minute, then temperature is risen to 860 DEG C, insulation 5-40 minute; Treat that diffusion reaction is complete, will the silicon chip extracting test silicon wafer sheet resistance of diverse location in diffusion furnace tube be positioned over.
Embodiment 6:
Designing and arranging pore is 3 regions, and fire door portion and stove afterbody place establish 18 row two to arrange steam vent, and establish 36 row two to arrange steam vent in the middle part of stove, pitch of holes is 20mm, and steam vent aperture is respectively: fire door portion 1.0mm, 0.9mm in the middle part of stove, stove afterbody 0.8mm.Monocrystalline silicon piece, through normal wash, enters boat at 810 DEG C, after being warming up to 820 DEG C, passes into the nitrogen and oxygen that carry POCl3 according to the technique set, and keeps 5-30 minute, then temperature is risen to 860 DEG C, insulation 5-40 minute; Treat that diffusion reaction is complete, will the silicon chip extracting test silicon wafer sheet resistance of diverse location in diffusion furnace tube be positioned over.
Comparative example 1:
Use original single port formula blast pipe, preparation technology is identical with embodiment 1 with method of testing.
Table 1 steam vent row is on diffused sheet resistance uniformity impact (standard deviation contrast)
Table 2 steam vent spacing is on diffused sheet resistance uniformity impact (standard deviation contrast)
Table 3 steam vent aperture is on diffused sheet resistance uniformity impact (standard deviation contrast)
By fire door portion and stove portion uniformly left and right two parts, as can be seen from Table 1, when in waste pipe, steam vent row is 2 ~ 3 row, the diffused sheet resistance uniformity of solar battery sheet is better; As can be seen from Table 2, when steam vent spacing is 20mm, the diffused sheet resistance uniformity of solar battery sheet is better; And steam vent aperture is not the bigger the better, as can be seen from Table 3, in embodiment 5 in the middle part of fire door portion, stove and when stove afterbody aperture is respectively 0.7mm, 0.8mm and 0.9mm, the diffused sheet resistance uniformity of solar battery sheet is best.
Claims (5)
1. an improved pyrolysis disperser, it is characterized in that, comprise air inlet pipe (1), diffusion furnace tube (2), silicon chip (3) and waste pipe (4), described air inlet pipe (1) and waste pipe (4) are mounted in diffusion furnace tube (2), described air inlet pipe (1) and waste pipe (4) are parallel to each other, described silicon chip (3) is placed between air inlet pipe (1) and waste pipe (4), described air inlet pipe (1) is provided with some air admission holes (5), and described waste pipe (4) is provided with some steam vents (6).
2. a kind of improved pyrolysis disperser according to claim 1, it is characterized in that, the row of described steam vent (6) is 1-3 row, and described spacing of often arranging upper adjacent two steam vents (6) of steam vent (6) is 15-20mm.
3. a kind of improved pyrolysis disperser according to claim 1, is characterized in that, the pore size of described steam vent (6) is 0.6-1.0mm.
4. a kind of improved pyrolysis disperser according to claim 1 or 2 or 3, it is characterized in that, the region at described steam vent (6) place is divided into three parts, be respectively fire door portion, with stove afterbody in the middle part of stove, described fire door portion is away from the gas outlet place of waste pipe (4), described stove afterbody is near the gas outlet place of waste pipe (4), the centre of fire door portion and stove afterbody is placed in the middle part of described stove, steam vent (6) aperture in described fire door portion is greater than steam vent (6) aperture in the middle part of stove, steam vent (6) aperture in the middle part of described stove is greater than steam vent (6) aperture of stove afterbody.
5. a kind of improved pyrolysis disperser according to claim 4, it is characterized in that, the ratio between steam vent (6) columns in the middle part of steam vent (6) columns in described fire door portion, stove, steam vent (6) columns of stove afterbody is 1: 2: 1.
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| CN201420694785.2U CN204204891U (en) | 2014-11-19 | 2014-11-19 | A kind of improved pyrolysis disperser |
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| CN201420694785.2U CN204204891U (en) | 2014-11-19 | 2014-11-19 | A kind of improved pyrolysis disperser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107437573A (en) * | 2017-07-28 | 2017-12-05 | 浙江晶科能源有限公司 | Method of diffusion, tubular diffusion furnace, the solar cell of silicon chip of solar cell |
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2014
- 2014-11-19 CN CN201420694785.2U patent/CN204204891U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107437573A (en) * | 2017-07-28 | 2017-12-05 | 浙江晶科能源有限公司 | Method of diffusion, tubular diffusion furnace, the solar cell of silicon chip of solar cell |
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