CN109791811A - 用于2d扫描光束成像的x射线源 - Google Patents
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Abstract
一种二维X射线扫描仪,包括:用于转向电子束以照射在目标上的光束转向器;以及准直器,其进一步包括适于在孔径行进路径中行进的孔径,所述孔径行进路径用于沿着聚焦轨迹旋转被电子束跨越的X射线束平面以用于发射扫描X射线束。
Description
相关申请的交叉引用
本说明书优先权依赖于2016年9月30日提交的题为“用于2D扫描光束成像的X射线源”的美国专利临时申请号62/402,102。上述申请通过引用整体并入本文。
技术领域
本说明书涉及用于扫描穿透辐射的光束的装置和方法,并且更具体地,涉及用于在区域上扫描笔形光束以获得静止对象的宽视场X射线图像而无需源旋转的装置和方法。
背景技术
所有实用的反向散射X射线成像系统都是光栅扫描仪,它在待检查对象上移动良好准直的X射线束(也称为笔形光束)的同时,逐像素采集图像。通常,扫描X射线束通过机械地移动静止X射线源前面的线中的孔径而形成。该线通常为直线或几乎为直线,使得出射光束在一段时间内在平面内扫过。该平面被称为“光束平面”。当孔径沿其典型线性的路径移动时,所得到的X射线束扫过系统的光束平面(穿过成像对象),从而可以采集图像线。通过使成像对象移动通过光束平面或通过使光束平面在成像对象上移动来获得正交图像尺寸。
基于常用输送机的检查系统使用第一种方法(使成像对象移动通过光束平面)。后者(使光束平面移动到对象上)适用于静止对象。通常通过以下两种方法之一来实现光束平面的运动:成像系统沿着成像对象线性移动,或者成像系统转动,从而在这样做时在成像对象上扫过光束平面。
在Cason和Rothschild的美国专利申请No.20070172031中描述了在光束平面内扫描和相对于对象移动光束平面的一般做法的一个值得注意的例外,该专利申请通过引用并入本文。该申请公开了“一种光束扫描装置,包括:a.第一扫描元件,其仅限于相对于第一单轴运动,并具有至少一个孔,用于扫描从第一扫描元件内部到第一扫描元件外部的辐射;以及b.第二扫描元件,其仅限于相对于第二单轴运动,并且具有至少一个孔,用于扫描已经通过第一扫描元件穿过被检查对象的区域的辐射”。
用于从旋转中获得一个运动轴的静止对象的成像系统在概念上是简单的,但是旋转该系统或其大部分不仅慢(典型的图像采集时间将是许多秒)而且对于更大的更高功率的系统而言也变得机械上具有挑战性。
信噪比和空间分辨率考虑因素要求为了在一秒或更短时间内采集二维反向散射图像,成像系统通常必须具有高线速率和强大的X射线源。转让给Rapiscan系统公司的美国专利No.8,576,989公开了“一种光束斩波装置,更具体地,用于基于辐射的扫描系统中的电子束系统的螺旋快门,并且更具体地,一种光束斩波装置,通过修改光束斩波装置的物理特性或几何形状可以改变速度和束斑(beam spot)大小。”
通过沿线性目标扫描电子束并使发射的X射线与静止孔径准直来实现最高线速率。不仅可以控制电子束在几分之一毫秒内扫描X射线生成目标的整个长度,快速移动光束穿过目标还可以分散由撞击电子束生成的热量,从而实现可能比传统X射线管显著更高的功率密度的焦斑(focal spot)。
转让给美国科学&工程公司的美国专利No.6,282,260公开了“一种用于对表面远端的体积进行三维检查的手持式检查装置。该检查装置具有可手持的单元,该单元包括用于提供特定横截面的光束的穿透辐射源,和用于检测由对象在检测器装置的方向上散射的光束的穿透辐射并用于生成散射辐射信号的检测器装置”,该专利通过引用并入本文。
尽管存在用于采集二维图像的传统方法,但是这些方法不适于快速扫描或不适于具有长准直长度的扫描。此外,具有足够大的二维透射目标的电子束管在技术上具有挑战性并且尚未商业化。对于高功率源,反射目标仍然是可以使电子束线扫描源实用的唯一可行选择。
使用快速线扫描仪可以对快速移动的对象进行成像。然而,为了采集静止对象的图像帧,光束平面必须以期望的帧速率移动。对于亚秒级图像帧采集时间,旋转整个X射线源和光束形成组件是不实际或没有效果的。
因此,需要一种新颖的用于在不旋转光源的情况下采集静止对象的宽视场反向散射X射线图像的方法和装置。
发明内容
结合系统、工具和方法来描述和说明以下实施例及其方面,这些系统、工具和方法旨在是示例性和说明性的,而不是限制范围。
在一些实施例中,本说明书可以公开一种二维X射线扫描仪,包括:光束聚焦器和光束转向器,其用于根据时间在沿着X射线生成目标的路径上扫描电子束;以及孔径,其适于相对于由X射线生成目标发射的X射线在孔径行进路径中行进。
可选地,孔径为固定狭缝和移动狭缝的交叉点。
可选地,移动狭缝适于在斩波轮内旋转。
可选地,移动狭缝相对于斩波轮绕轴线的旋转径向对齐。
可选地,X射线生成目标被包围在鼻部内。
可选地,X射线生成目标为平面目标块。
可选地,X射线生成目标为凸面的。
可选地,二维X射线扫描仪被配置为具有预定的起飞角,并且其中,在操作期间,电子束被转向以保持与行进孔径的预定起飞角。
在一些实施例中,本说明书可以公开一种使用二维X射线扫描仪在二维检查对象上扫描X射线束的方法,该方法包括:改变电子束相对于电子束撞击的目标的方向;经由根据时间沿规定路径移动的孔径来耦合在目标处生成的X射线。
可选地,耦合在目标处生成的X射线可以包括经由固定狭缝和移动狭缝的交叉点耦合X射线。
可选地,移动狭缝适于在斩波轮内旋转。
可选地,移动狭缝相对于斩波轮绕轴线的旋转径向对齐。
可选地,目标被包围在鼻部内。
可选地,目标为平面目标块。
可选地,目标为凸面的。可选地,电子束被转向以与行进孔径保持预定的起飞角。
可选地,二维X射线扫描仪被配置为具有预定的起飞角,并且其中,在操作期间,电子束被转向以保持与行进孔径的预定起飞角。
在一些实施例中,本说明书可以公开一种二维X射线扫描仪,包括:用于转向电子束以照射在目标上的光束转向器;准直器,包括适于在孔径行进路径中行进的孔径,该孔径行进路径用于旋转照射在目标上的电子束以发射X射线束。
可选地,孔径为固定狭缝和适于在斩波轮内旋转的移动狭缝的交叉点。
可选地,移动狭缝相对于斩波轮绕轴线的旋转径向对齐。
可选地,目标被包围在鼻部内。
可选地,目标为平面目标块。
可选地,目标为凸面的。
可选地,电子束被转向以与行进孔径保持预定的起飞角。
可选地,二维X射线扫描仪被配置为具有预定的起飞角,并且其中,在操作期间,电子束被转向以保持与行进孔径的预定起飞角。
在下面提供的附图和详细描述中将更深入地描述本说明书的前述和其他实施例。
附图说明
将进一步理解本说明书的这些和其他特征和优点,因为当结合附图考虑时,通过参考详细描述,它们将变得更好理解:
图1A为电子束扫描仪的示意图;
图1B描绘了另一种电子束扫描仪;
图1C示意性地描绘了根据本说明书的实施例的具有准直器的X射线束的混合电磁/机械扫描,其中准直器处于具有有限视场的第一位置;
图1D示意性地描绘了根据本说明书的另一个实施例的具有准直器的X射线束的混合电磁/机械扫描,其中准直器处于第二位置,具有增大的表观焦斑的尺寸;
图2A描绘了根据本说明书的广角实施例的混合电气/机械扫描仪的平面横截面;
图2B示出了根据图2A的广角实施例的混合电气/机械扫描仪的平面横截面,其中电子束在不同位置撞击目标;
图2C示出了根据图2A的广角实施例的混合电气/机械扫描仪的平面横截面,其中电子束在不同位置撞击目标;
图3A为根据本说明书的实施例的被截取以示出凸面目标的二维扫描X射线源的透视图;以及
图3B为根据本说明书的实施例的被截取以示出X射线束窗口的具有斩波轮的图3A的X射线源的透视图。
具体实施方式
在各种实施例中,本说明书提供了一种用于采集静止对象的宽视场反向散射X射线图像而无需在X射线成像系统中旋转源的方法和装置。
提供以下定义以在一些实施例中进一步描述本说明书的各个方面:
术语“光束角”是指相对于角度光束跨度的中心线测量的来自扫描装置的光束的瞬时出射角。(因此,当光束被扫描时,光束角度会随时变化。)术语“鼻部(snout)”被定义为对所讨论的辐射是不透明的外壳,并且包括一个或多个限定的开口,允许辐射通过该开口出射。
术语“鼻部长度”被定义为生成X射线的目标与所生成的X射线从鼻部出射的鼻部内的孔径之间的正常距离。鼻部长度确定了系统的“准直长度”(见下文)。
术语“准直长度”被定义为X射线生成目标上的焦斑与用于准直出射的X射线束的孔径之间的最短距离。
术语“起飞角”被定义为通过孔径提取的X射线束的方向与在焦斑处与目标表面相切的平面之间的角度。
术语“扫描头”包括任何包含用于二维扫描的X射线源的结构,无论是通过移动扫描头还是根据本说明书的教导。
在元件被描述为“在...上”、“连接到”或“耦合到”另一元件的情况下,它可以直接在另一元件上,连接或耦合到另一元件,或者,另选地,可以存在一个或多个中间元件,除非另有规定。
本文使用的术语用于描述特定实施例的目的,并不旨在限制。单数形式“一”、“一个”和“该”也旨在包括复数形式。
本说明书涉及多个实施例。提供以下公开内容是为了使本领域普通技术人员能够实施本说明书。本说明书中使用的语言不应被解释为对任何一个特定实施例的一般否定,或者用于将权利要求限制在其中使用的术语的含义之外。在不脱离本说明书的精神和范围的情况下,本文定义的一般原理可以应用于其他实施例和应用。此外,所使用的术语和措辞是出于描述示例性实施例的目的,而不应被认为是限制性的。因此,本说明书将被赋予最广泛的范围,包括与所公开的原理和特征一致的许多替换、修改和等同物。为了清楚起见,没有详细描述与涉及本说明书的技术领域中已知的技术材料有关的细节,以免不必要地模糊本说明书。
在本申请的说明书和权利要求书中,词语“包含”、“包括”和“具有”中的每者及其形式不必限于与该词语相关联的列表中的成员。
本文应指出,除非另有明确说明,否则与特定实施例相关联描述的任何特征或部件可以与任何其他实施例一起使用和实现。
现在参考图1A描述电磁扫描仪。扫描电子束X射线源(通常用标号100表示)包括电子枪101、光束聚焦器102(本文也称为“聚焦透镜”102)、光束转向器103(本文也称为“偏转模块”103)和光束控制器104,其沿着X射线生成目标110上的聚焦路径115扫描聚焦电子束105。光束聚焦器102和光束转向器103单独或一起在本文中可称为“聚焦和偏转模块”,其通常用标号106表示。相对于X射线生成目标110静止的准直器120包含孔径125,产生在光束平面135上的扫描X射线束130。X射线束130在本文中可称为X射线笔形光束130,而不考虑光束的精确横截面。
从枪101射出的电子105由聚焦透镜102和偏转模块103转向,由光束控制器104控制,使得电子束105沿着X射线生成目标110(本文也称为“目标”110)在聚焦路径115上扫描。在电子束105的扫描期间通过孔径125发射的X射线位于被定义为包含聚焦路径115和孔径125的唯一平面的光束平面内。如果聚焦路径115不是直线和/或孔径125不是简单的孔径而是由准直器形成(如美国专利No.9,117,564和美国专利No.9,257,208中所教导的,两个专利均转让给美国科学和工程公司并且通过引用并入本文),则之后在电子束105的扫描期间通过孔径125发射的X射线位于非平面表面上。为简单起见,我们仍然将表面称为光束“平面”。
检查对象140被放置在光束平面135的路径中。当扫描X射线束130横穿光束平面135时,来自扫描线142的散射和/或透射的X射线由X射线检测器(未示出)记录。检查对象140可以通过沿着横向于光束平面135的轴线144连续移动来成像,同时收集扫描线。在转让给Watanabe的美国专利No.4,045,672中进一步描述了该方法和装置,该专利通过引用并入本文。
参考图1B描述另一电磁扫描仪(EMS)50。电子束501中的电子被光束控制器505聚焦和转向,以便在目标508上扫描,可选地,目标508可以为水冷的。光束控制器505施加电场和/或磁场以用于限制和转向电子束501,并且特别地,光束控制器505包括光束转向线圈519。电子源通常为电子枪101(在图1A中所示),电子束501中的电子从该电子枪发射。电子束501撞击到目标508上产生进入鼻部515的X射线511,鼻部515在其顶点处具有单出口孔径517。(真空密封或口(未示出)可以在任何地方,并且通常接近目标508以使真空体积最小化。)当电子束501扫过目标508时,出射的X射线束520以角度扫描。
如参考图1A所述,电磁扫描仪的准直器120(诸如图1A中所示的准直器)在检查对象的过程中保持静止。图1C和1D示出了电磁扫描仪实施例160,其中准直器120在检查过程中移动。参考图1C和1D,准直器120的移动产生扫描光束平面137并且允许相对于扫描电子束X射线源100(图1A中所示)保持检查对象140静止。根据该方法,光束平面的扫掠角(sweepangle)的范围并因此视场的范围可能受到一端处的跟部效应(heel effect)的限制,如图1C所示,由于X射线生成目标110本身内的衰减,光束130的强度朝向其运动的一个极值而降低。在另一个极值处,由于表观焦斑(apparent focal spot)的大小增加,可能会丢失空间分辨率,如图1D中所发生的。光束平面扫掠角的实际范围为30°至40°。
图2A描绘了根据本说明书的广角实施例的混合电气/机械扫描仪的平面横截面。在实施例中,术语“广角”用于表示超过上述30°至40°范围两到三倍范围的角度。在一个实施例中,该角度可以为120°,如图2A、2B和2C所示。聚焦的转向电子束205撞击在X射线生成目标210上。如图2A所示,通过沿着孔径行进路径或范围270(在本文中也称为“横向行进”270)移动具有孔径225(其中光束平面随孔径225移动)的准直器220,由此扫描X射线束230从孔径225出射来产生连续线,其中,孔径行进路径或范围270从光束平面的第一端或外部边界236延伸到第二端或外部边界237。应当理解,光束平面垂直于图2A,并因此其在图2A上的投影为X射线束230。由于光束从孔径中射出,它也必须随孔径移动。
通过移动孔径225逐渐地转动或旋转光束平面。孔径行进范围由范围从光束平面的第一端236到第二端237的极值(或外边界)指定,而标称鼻部长度通过标号280表示。虽然在图1C和1D中,光束平面的旋转轴线为X射线生成目标110上的聚焦路径115(图1A、1B中所示),但是图2A中描绘的广角实施例不具有用于光束平面的简单旋转轴线。相反,光束平面与凸面X射线生成目标210大致相切。孔径225行进其路径270所需的时间构成图像帧采集时间。因此,对于反向散射运动成像而言,足够快的帧速率变得有利。
参考图1C和1D,当使用扁平(平面)的X射线生成目标110时,在图1C和1D中描述的光束平面之间的角度范围(其在本文中与术语“角度跨度”具有相同的含义,并且对应于光束平面旋转的范围,即光束平面的运动的角度范围)取决于所谓的“跟部效应”,如在具有薄膜或平板检测器的锥形束成像中。由于跟部效应,因目标110本身内的衰减,光束130的强度朝向其运动的极值而降低。通常,使用30°至40°的角度范围,其中起飞角从约1°开始。另一个限制是由于表观焦斑的增大和相关的空间分辨率的损失。
参考图1C和1D,假设具有12英寸(300mm)的鼻部长度,500mm长的聚焦轨迹将在光束平面137中产生约80°的角度光束跨度。假设起飞角并因此光束平面的角度范围为40°的平面目标,这个EMS将在距准直器5英尺(1.5米)处覆盖4英尺4英寸(1.31米)宽和8英尺4英寸(2.5米)高的图像。鼻部长度为12英寸(300mm)的情况下(如上所述),孔径的横向行进路径154(即,目标上的电子束焦斑的垂直路径)需要为8.6英寸(218mm)。因此,对于某些鼻部长度而言,可以通过具有150mm至600mm、优选地200mm至500mm的轨迹长度来实现40至80度的角度光束跨度范围。
在本说明书的一个实施例中,使孔径225以弧形行进,其中X射线生成目标210位于其中心,以保持角度对准。在一个实施例中,弧的半径约为12”。在一个实施例中,X射线透明浮子用于弧形水银填充管中,以使孔径能够以液压方式在弧上行进,其中,水银阻挡X射线并且浮子形成孔径。
由于电子束105/205在目标110/210上的位置可以使用XY偏转模块(类似于图1A中所示的偏转模块103)容易地控制,从传统的扁平生产目标110(图1C和图1D中所示)转换为具有凸表面的目标210允许延伸角度范围。尽管最简单的凸面为圆柱形的,但是在本说明书的范围内可以采用其他凸形。众所周知,限制跟部角度是参考聚焦轨迹处的切向平面,并且凸面形状根据聚焦轨迹的定位提供一系列切向平面。
图2A、2B和2C示出了根据本说明书的其他广角实施例的混合电气/机械扫描仪的平面横截面。参考图2A、2B和2C,通过使用来自四分之一圆形目标210的保守30°起飞范围250,产生如图2B和2C所示的120°角度范围260,其中图2B示出了转向电子光束205在第一外部边界206处撞击目标210,以及图2C示出了转向电子束205在第二外部边界或极值207处撞击目标210。对于图2B中所示的电子束偏转,孔径225将接近极值236,而对于图2C中所示的电子束偏转,孔径225将接近极值237。电子束被转向,以便保持所需的起飞角。因此,聚焦轨迹随孔径移动以保持所需的起飞角。
因此,在各种实施例中,通过移动相对较小的准直器而不是整个X射线源,X射线成像系统的视场可以比传统的跟部效果受限的X射线源的视场增加3倍或更多倍。然而,这将需要相当大的X射线出射窗口,并且移动孔径225将必须线性地行进鼻部长度280的倍。对于150mm的鼻部长度,孔径225必须线性地行进约520mm的距离以实现120°的角度范围。-如果仅需要90°的角度范围,则孔径225必须行进鼻部长度280的两倍。因此,弯曲的行进路径可能是优选的。
在图3A中以透视图示出了二维扫描仪(通常用标号300表示)的实施例。通过在X射线束窗口310上旋转斩波盘304的狭缝302来实现扫描孔径(诸如图2A中的孔径225),X射线束窗口310在移除了斩波器304的图3B中示出。狭缝302为移动狭缝的示例。来自源301的电子扫描目标块303(如图所示,其可以为平面的或凸面的),由鼻部305限制的轫致辐射X射线仅在旋转狭缝302与X射线束窗口310相交处产生的孔径处出射。X射线束窗口310为固定狭缝的示例。在图3A所示的实施例中,作为一个示例,旋转狭缝302相对于斩波盘304的旋转轴(未示出)径向(radially)对齐。
图3B为图3A的X射线源的另一描绘,是示出凸面目标303和X射线束窗口310的剖视图。当电子束沿着目标扫描时,X射线窗口310的宽度限定了X射线束的枢轴点线(line ofpivot points),从而产生快速扫描线。X射线窗口310的宽度取决于期望的视场,并且在一个实施例中,该宽度近似等于横向行进路径270。在另一个实施例中,X射线窗口的宽度尺寸在横向行进路径尺寸的百分之十(10%)内。通过移动孔径引起的光束平面的角度变化率要慢得多。
用斩波盘304扫描以在X射线束窗口310上旋转孔径/狭缝302是实现移动孔径225(图2A中所示)的一种方式,并且当系统不需要大的光束角时是合适的。实现移动孔径的其他方式在本说明书的范围内,并且提供以下示例(没有限制):旋转被扭曲(twisted)的狭缝准直器,其变型在转让给飞利浦公司的美国专利No.4,745,631、4,995,066和5,038,370和转让给联邦材料研究与测试研究所(BAM)的欧洲专利No.1,772,874中有所描述,所有这些专利都通过引用并入本文;利用致动器线性电动机平移如在转让给美国科学和工程公司的美国专利No.9,117,564和US9,257,208中描述的被扭曲的狭缝这样的孔径,其均通过引用并入本文;以及具有相对于共同旋转轴线旋转的平行狭缝的环(hoop)。
根据前述教导,二维扫描仪的实施例可以有利地提供快速二维图像采集,其中首次使得以每秒多帧的速率成像是可能的。在此启用的系统提供的视场大小可以为固定管系统的视场的多倍。因此,相对于30°-40°的当前限制,现在可以实现120°方位角。
在需要横向紧凑的扫描仪的情况下、或者在接近目标操作(而没有意外接触目标的风险)是很重要的情况下,或者在扫描头的移动对于安装扫描头的平台可能是有问题的情况下,根据前述教导的固定式二维扫描仪可能特别有用。在不限制意图的情况下提供的示例包括:在经过认证的机械师可以检查飞机以确认没有造成损坏之前,任何意外碰撞使飞机在法律上不适航,在上述情况下,检查飞机;在任何意外接触可能引爆IED的情况下,检查可疑的简易爆炸装置(IED);使用安装了机器人的成像系统检查IED或任何其他应用。机器人车辆上的空间通常非常有限,并且移位或甚至旋转的扫描仪可能改变整个组件的平衡中心,这可能是一个问题,特别是在不平坦的地形上;医疗X射线应用,其中扫描仪必须接近患者操作而不接触患者或干扰在患者身上操作的医务人员。
在需要高精度光束布置的情况下,消除移动该扫描仪的需要也是有帮助的。在不限制意图的情况下提供的示例包括:在一定距离处成像,其中小的移动可能转换为大的光束位置误差;非破坏性测试(NDT)应用,其往往需要非常高的分辨率;NDT和爆炸物处理(EOD)应用,其可能使用图像数据进行目标的精确测量。除了简单地检测IED的存在之外,EOD系统可以使用测量结果来帮助瞄准破坏者或查找罪犯工作(forensic work);对来自多个重复“帧”的数据进行求和,以在一段时间内建立图像统计数据的应用(也可能用于NDT或EOD应用)。
应当指出,X射线笔形光束的形成和扫描可以用于任何成像方式,诸如透射、侧面散射或反向散射成像,例如,在本说明书的范围内。
以上示例仅说明本说明书的系统和方法的许多应用。尽管本文仅描述了本说明书的几个实施例,但是应当理解,在不脱离本说明书的精神或范围的情况下,本说明书可以以许多其他具体形式实施。因此,本示例和实施例被认为是说明性的而非限制性的,并且可以在所附权利要求的范围内修改说明书。
Claims (14)
1.一种二维X射线扫描仪,包括:
光束聚焦器和光束转向器,用于根据时间在沿着X射线生成目标的路径上扫描电子束;以及
孔径,被适配为相对于由所述X射线生成目标发射的X射线在孔径行进路径中行进。
2.根据权利要求1所述的二维X射线扫描仪,其中,所述孔径为固定狭缝和移动狭缝的交叉点。
3.根据权利要求1所述的二维X射线扫描仪,其中,所述X射线生成目标为平面目标块。
4.根据权利要求1所述的二维X射线扫描仪,其中,所述X射线生成目标为凸面的。
5.根据权利要求1所述的二维X射线扫描仪,其中,所述二维X射线扫描仪被配置为具有预定的起飞角,并且其中,在操作期间,所述电子束被转向以保持与行进孔径的预定起飞角。
6.一种使用二维X射线扫描仪在二维中扫描检查对象上的X射线束的方法,所述方法包括:
相对于电子束撞击的目标改变所述电子束的方向;以及
经由根据时间沿着规定路径移动的孔径来耦合在所述目标处生成的X射线。
7.根据权利要求6所述的方法,其中,耦合在所述目标处生成的X射线可以包括经由固定狭缝和移动狭缝的交叉点耦合所述X射线。
8.根据权利要求6所述的方法,其中,所述目标为平面目标块。
9.根据权利要求6所述的方法,其中,所述目标为凸面的。
10.根据权利要求6所述的方法,其中,所述二维X射线扫描仪被配置为具有预定的起飞角,并且其中,在操作期间,所述电子束被转向以保持与行进孔径的预定起飞角。
11.一种二维X射线扫描仪,包括:光束转向器,用于转向电子束以照射在目标上;以及准直器,包括被适配为在孔径行进路径中行进的孔径,所述孔径行进路径用于旋转照射在所述目标上的所述电子束以发射X射线束。
12.根据权利要求11所述的二维X射线扫描仪,其中,所述目标为平面目标块。
13.根据权利要求11所述的二维X射线扫描仪,其中,所述目标为凸面的。
14.根据权利要求11所述的二维X射线扫描仪,其中,所述二维X射线扫描仪被配置为具有预定的起飞角,并且其中,在操作期间,所述电子束被转向以保持与行进孔径的预定起飞角。
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GB201905850D0 (en) | 2019-06-12 |
EP3520120A4 (en) | 2020-07-08 |
WO2018064434A1 (en) | 2018-04-05 |
US20180286624A1 (en) | 2018-10-04 |
EP3520120A1 (en) | 2019-08-07 |
GB2572700A (en) | 2019-10-09 |
US10720300B2 (en) | 2020-07-21 |
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