CN109781028B - Large-area large-curvature optical free surface measuring device and method based on cascade deformable mirror - Google Patents
Large-area large-curvature optical free surface measuring device and method based on cascade deformable mirror Download PDFInfo
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- CN109781028B CN109781028B CN201910150626.3A CN201910150626A CN109781028B CN 109781028 B CN109781028 B CN 109781028B CN 201910150626 A CN201910150626 A CN 201910150626A CN 109781028 B CN109781028 B CN 109781028B
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Abstract
The invention discloses a large-area large-curvature optical free surface measuring device and a measuring method based on a cascade deformable mirror. The wavefront sensor is used for detecting the reflected wavefront of the free surface to be detected with large area and large curvature, the whole system has no interference element, the system stability is high, and the anti-interference capability is strong.
Description
Technical Field
The invention belongs to the field of optical detection, and particularly relates to a large-area large-curvature optical free surface measuring device and method based on a cascade deformable mirror.
Background
Due to the special properties of the optical free-form surface, free-surface optical elements with large size and large curvature have been gradually applied to the fields of military, national defense and aerospace. In addition, with the development of computer-aided optical design technology, people design a single or single-group free-form surface optical element with smaller volume and more excellent imaging capability to replace a large-volume complex traditional optical imaging system, so that the free-form surface optical element gradually moves to the field of civil and industrial production. With the benefit of the development of modern machining and manufacturing technology, the ultra-precision machining of the large-size large-curvature optical free-form surface is realized, however, the detection of the machining quality is a worldwide problem.
At present, a plurality of free-form surface measurement methods are developed, which are mainly classified into a contact type and a non-contact type, wherein a contact type detection method such as a contourgraph method, a coordinate measuring machine method and the like adopts a point-by-point scanning mode, so that the measurement efficiency is low, the surface is easy to scratch, unpredictable damage is caused to the measured surface, off-line detection is required, and a plurality of limitations are imposed on the field of ultra-precise measurement. In the non-contact measuring method, a zero compensation mirror method based on optical interference measurement and a non-interference Hartmann wave-front sensor detecting method are widely used, the zero compensation mirror method can realize the measurement of a large-size large-curvature free surface through a designed compensation mirror system, but the design cost is high, the universality and the adaptability are not strong, different free surface optical elements need different compensation mirror systems, in addition, the interference measuring method has high requirement on the anti-interference capability of the system, and the Hartmann wave-front sensor can directly detect the reflected wave front of a detected free curved surface, but the detectable wave-front curvature is limited, so that the measurement of the large-curvature free curved surface is difficult to meet.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a large-area large-curvature optical free surface measuring device and a measuring method based on a cascade deformable mirror.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
the invention discloses a large-area large-curvature optical free surface measuring device based on a cascade deformable mirror, which comprises:
the cascaded deformable mirror units are used for modulating the incident wavefront of the large-area large-curvature measured free surface;
the non-interference measuring unit is used for measuring the reflection wavefront of the free surface to be measured with large area and large curvature;
the control terminal is used for quantitatively acquiring deformation data of the deformable mirror and controlling surface deformation generated by the deformable mirror;
the standard plane wave parallel light beams can generate wave fronts matched with the large-area large-curvature measured free surface through the cascaded deformable mirror units;
the non-interference measurement unit comprises an imaging lens, a beam splitter prism and a relay lens, wherein the reflected wavefront passes through the imaging lens, the beam splitter prism and the relay lens and then is subjected to non-interference measurement by a first wavefront sensor;
the cascaded deformable mirror unit comprises a first plane reflector, a second plane reflector and an N-level deformable mirror, wherein N is more than or equal to 2; a detection device for detecting the surface deformation amount of the deformable mirror is arranged above the surface of each stage of deformable mirror, and the detection device can feed back the detected data to the control terminal in real time;
the standard plane wave parallel light beam sequentially passes through the first plane reflector, the first-stage deformable mirror, the second-stage deformable mirror, … …, the N-stage deformable mirror and the second plane reflector, and then is incident on the free surface to be measured with large area and large curvature after being amplified by the wave front of the beam splitting prism and the imaging lens.
Preferably, the quantitative wavefront generated by the standard plane wave after being modulated by the N-stage cascaded deformable mirrors and amplified by the imaging lens is similar to or consistent with the ideal wavefront of the large-area large-curvature measured free surface.
Preferably, the detection device comprises a light source, a collimation and beam expansion lens and a wavefront sensor which are arranged above the deformable lens, light emitted by the light source passes through the collimation and beam expansion lens to form standard plane light, and then the standard plane light is reflected to the wavefront sensor through the deformable lens, and the wavefront sensor feeds back the detected deformation amount of the surface of the deformable lens to the control terminal.
Preferably, the standard plane wave parallel light beam is formed by collimating and expanding light emitted by the light source by the collimating and expanding lens, or is directly generated by the collimator.
The invention also discloses a method for detecting three-dimensional surface type information of the large-area large-curvature measured free surface based on the large-area large-curvature optical free surface measuring device based on the cascade deformable mirror, which comprises the following steps:
1) after passing through a cascaded deformable mirror unit and a non-interference measurement unit, the standard plane wave parallel light beam is modulated into a quantitative known incident wavefront which is consistent with or similar to an ideal wavefront of a large-area large-curvature measured free surface;
2) the reflected wavefront of the large-area large-curvature measured free surface is measured by a non-interference measuring unit;
3) and (2) demodulating three-dimensional surface type information of the large-area large-curvature measured free surface by using the quantitative known incident wavefront data modulated in the step 1) and the reflected wavefront data measured in the step 2).
Preferably, in step 1), light emitted by the light source is collimated and expanded by the collimating and expanding lens to form a standard plane wave parallel light beam, then the standard plane wave parallel light beam is reflected by the cascaded deformable mirror unit, and then the standard plane wave parallel light beam is amplified by the beam splitter prism and the imaging lens of the non-interference measurement unit and then is incident on the free surface to be measured with large area and large curvature.
Preferably, in step 2), the reflected light of the large-area large-curvature measured free surface enters the first wavefront sensor for non-interferometric measurement after transmitting through the imaging lens, the beam splitting prism and the relay lens for wavefront lateral size transformation.
Compared with the prior art, the invention has the following beneficial effects:
the invention discloses a large-area large-curvature optical free surface measuring device based on a cascade deformable mirror, which can generate large-curvature wave fronts similar to or consistent with large-area large-curvature measured free surfaces in a self-adaptive manner by utilizing the cascade deformable mirror, can detect the measured free surfaces with different areas and curvatures by using the same device, and has the advantages of large measuring range, strong universality and low system cost. The wavefront sensor is used for detecting the reflected wavefront of the free surface to be detected with large area and large curvature, the whole system has no interference element, the system stability is high, and the anti-interference capability is strong.
The detection method disclosed by the invention utilizes the control terminal to control the cascaded deformable mirror units to generate deformation, and simultaneously, the wavefront sensor carries out real-time detection on the deformation of the deformable mirror and feeds the deformation back to the control terminal to form a closed-loop control system. The standard plane wave parallel light beam is modulated into quantitative known wave front which is consistent with or similar to the ideal wave front of the large-area large-curvature measured free surface through the wave front of the closed-loop control system, the wave front is incident to the large-area large-curvature measured free surface, the reflected wave front is directly measured in a non-interference mode through the wave front sensor, and the three-dimensional surface type information of the large-area large-curvature measured free surface is obtained by comprehensively utilizing the known incident wave front and the measured reflected wave front.
Drawings
FIG. 1 is a schematic structural diagram of a large-area large-curvature optical free surface measuring device based on a cascaded deformable mirror.
Wherein: 1-light source I; 2-light source II; 3-light source III; 4-collimating beam expander I; 5-collimating beam expander II; 6-collimation beam expander III; 7-a first planar mirror; 8-a second planar mirror; 9-a primary deformable mirror; 10-a two-stage deformable mirror; 11-a second wavefront sensor; 12-a third wavefront sensor; 13-a first wavefront sensor; 14-a beam splitting prism; 15-an imaging lens; 16-large area large curvature measured free surface; 17-a relay lens; and 18-control terminal.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, the device disclosed in this embodiment is a two-stage cascaded deformable mirror, and as seen in the figure, components of the measuring device specifically include three collimating beam expanders, two plane mirrors, two deformable mirrors, three wavefront sensors, a beam splitter prism 14, an imaging lens 15, a free surface 16 to be measured with large curvature, a relay lens 17, and a control terminal 18.
Light emitted by a light source I1 is expanded and collimated by a first collimation and expansion lens 4 to become standard plane waves, and parallel light beams of the emergent standard plane waves are amplified by the wavefront of a first plane reflector 7, a first-stage deformable mirror 9, a second-stage deformable mirror 10, a second plane reflector 8, a beam splitter prism 14 and an imaging lens 15 in sequence and then are incident on a large-area large-curvature measured free surface 16. The primary deformable mirror 9 and the secondary deformable mirror 10 can continuously modulate incident light, large-area large-curvature wave fronts can be generated after passing through the imaging lens 15, the incident light wave fronts finally incident on the large-area large-curvature measured free surface 16 are enabled to be consistent with or similar to ideal wave fronts of the large-area large-curvature measured free surface 16, and the wave fronts reflected by the large-area large-curvature measured free surface 16 are detected by the first wave front sensor 13 after passing through the imaging lens 15, the beam splitting prism 14 and the relay mirror 17.
The modulation of the incident light by the primary deformable mirror 9 and the secondary deformable mirror 10 is controlled by the control terminal 18 to generate deformation, and the quantitative deformation generated by the primary deformable mirror 9 and the secondary deformable mirror 10 is measured by the second wavefront sensor 11 and the third wavefront sensor 12 respectively. The specific implementation mode is as follows: light emitted by the light source II 2 is collimated and expanded by the second collimating and expanding lens 5 to form standard plane waves, parallel light beams of the standard plane waves are reflected to the second wavefront sensor 11 through the first-stage deformable lens 9, and the second wavefront sensor 11 detects surface deformation of the second wavefront sensor and feeds the surface deformation back to the control terminal 18; light emitted by the light source III 3 is collimated and expanded by the third collimating and expanding lens 6 to become standard plane waves, parallel light beams are reflected to the third wavefront sensor 12 by the second-stage deformable lens 10, and the third wavefront sensor 12 detects surface deformation and feeds back the surface deformation to the control terminal 18.
According to the feedback data of the second wavefront sensor 11 and the third wavefront sensor 12, the control terminal 18 quantitatively acquires and controls the surface deformation generated by the first deformable mirror 9 and the second deformable mirror 10, the surface deformation can continuously and quantitatively modulate the incident plane wave, the wavefront passing through the imaging lens 15 is amplified to generate a known wavefront which is consistent with or similar to the ideal wavefront of the large-area large-curvature measured free surface 16, the modulated wavefront is incident to the large-area large-curvature measured free surface 16 as illumination light, the reflected wavefront is directly subjected to non-interference measurement by the first wavefront sensor 13 after passing through the imaging lens 15, the beam splitting prism 14 and the relay lens 17, and the surface type measurement of the large-area large-curvature measured free surface 16 is completed through the known incident wavefront and the measured reflected wavefront data.
Three-dimensional surface type information of the large-area large-curvature measured free surface 16 is demodulated by measuring known data of the incident wavefront of the large-area large-curvature measured free surface 16 and measured data of the reflected wavefront.
It should be noted that the present invention is not limited to the cascade of two stages of deformable mirrors shown in fig. 1, and may also be extended to a cascade of three stages of deformable mirrors, or even a cascade of more stages of deformable mirrors, so as to implement a larger measurable curvature change range.
The light source and the collimation and beam expansion device in the invention can also adopt a collimator, and the standard plane wave generated by the light source II 2 and the collimation and beam expansion lens 5 and the standard plane wave generated by the light source III 3 and the collimation and beam expansion lens 6 can also be obtained by splitting the standard plane wave generated by the light source I1 and the collimation and beam expansion lens 4.
In summary, the innovation of the invention is represented by: the incident plane wave can generate large-area large-curvature wave front through the cascade deformable mirror and the wave front amplifying unit, the deformable mirror can be detected in real time by combining the wave front sensor, the wave front is controllable and known, when in measurement, the wave front which is consistent with or similar to the ideal wave front of the large-area large-curvature free surface to be detected can be generated and used as illumination light to be incident on the large-area large-curvature free surface to be detected, and the wave front sensor can realize the self-adaptive measurement of the large-area large-curvature free surface through the non-interference detection of the wave front to the reflected wave front.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (7)
1. Large-area large-curvature optical free surface measuring device based on cascade deformable mirror is characterized by comprising:
the cascaded deformable mirror units are used for modulating the incident wave front of the large-area large-curvature measured free surface (16);
a non-interferometric measuring unit for measuring the reflected wavefront of a large area, large curvature measured free surface (16);
a control terminal (18) for quantitatively acquiring deformation data of the deformable mirror and controlling surface deformation generated by the deformable mirror;
the standard plane wave parallel light beams can generate wave fronts matched with the large-area large-curvature measured free surface through the cascaded deformable mirror units;
the non-interference measurement unit comprises an imaging lens (15), a beam splitting prism (14) and a relay lens (17), and reflected wave front passes through the imaging lens (15), the beam splitting prism (14) and the relay lens (17) and then is subjected to non-interference measurement by a first wave front sensor (13);
the cascaded deformable mirror unit comprises a first plane reflector (7), a second plane reflector (8) and N-stage deformable mirrors, wherein N is more than or equal to 2; a detection device for detecting the deformation quantity of the surface of the deformable mirror is arranged above the surface of each stage of deformable mirror, and the detection device can feed back the detected data to a control terminal (18) in real time;
the standard plane wave parallel light beams sequentially pass through a first plane reflector (7), a first-stage deformable mirror (9), a second-stage deformable mirror (10), … …, an N-stage deformable mirror and a second plane reflector (8), and then are incident on a large-area large-curvature measured free surface (16) after being amplified by the wave fronts of a beam splitting prism (14) and an imaging lens (15).
2. The cascaded deformable mirror-based large-area large-curvature optical free surface measuring device as claimed in claim 1, wherein a quantitative wavefront generated by a standard plane wave after being modulated by N stages of cascaded deformable mirrors and amplified by an imaging lens (15) is similar to or consistent with an ideal wavefront of a large-area large-curvature measured free surface (16).
3. The cascaded deformable mirror-based large-area large-curvature optical free surface measurement device as claimed in claim 1, wherein the detection device comprises a light source, a collimation beam expander and a wavefront sensor, the light source, the collimation beam expander and the wavefront sensor are arranged above the deformable mirror, light emitted by the light source passes through the collimation beam expander to form standard plane light, the standard plane light is reflected to the wavefront sensor through the deformable mirror, and the wavefront sensor feeds back the detected deformable mirror surface deformation to the control terminal.
4. The cascaded deformable mirror-based large-area large-curvature optical free surface measuring device as claimed in claim 1, wherein a standard plane wave parallel light beam is formed by light emitted by a light source after being collimated and expanded by a collimating and expanding lens, or is directly generated by a collimator tube.
5. The method for detecting the three-dimensional surface type information of the large-area large-curvature measured free surface based on the large-area large-curvature optical free surface measuring device based on the cascade deformable mirror as claimed in any one of claims 1 to 4 is characterized by comprising the following steps:
1) after passing through a cascaded deformable mirror unit and a non-interference measurement unit, the standard plane wave parallel light beam is modulated into a quantitative known incident wavefront which is consistent with or similar to an ideal wavefront of a large-area large-curvature measured free surface (16);
2) the reflection wave front of the free surface (16) with large area and large curvature is measured by a non-interference measuring unit;
3) and (2) demodulating three-dimensional surface type information of the large-area large-curvature measured free surface (16) by utilizing the quantitative known incident wavefront data modulated in the step 1) and the reflected wavefront data measured in the step 2).
6. The method for detecting the three-dimensional surface type information of the free surface of the large-area large-curvature measured according to claim 5, wherein in the step 1), light emitted by the light source is collimated and expanded by the collimating and expanding lens to form a standard plane wave parallel light beam, then the standard plane wave parallel light beam is reflected by the cascaded deformable mirror unit, and then the standard plane wave parallel light beam is amplified by the beam splitter prism (14) and the imaging lens (15) of the non-interference measurement unit and then is incident on the free surface (16) of the large-area large-curvature measured.
7. The method for detecting the three-dimensional surface type information of the large-area large-curvature measured free surface according to claim 5, wherein in the step 2), the reflected light of the large-area large-curvature measured free surface (16) enters the first wavefront sensor (13) for non-interference measurement after the wavefront transverse dimension of the imaging lens (15), the beam splitting prism (14) and the relay lens (17) is transformed.
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| GB709431A (en) * | 1951-04-23 | 1954-05-26 | Cecil Reginald Burch | Improvements relating to the testing of gear teeth |
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| CN104635343A (en) * | 2015-02-14 | 2015-05-20 | 哈尔滨工业大学 | Refracting-reflecting type variable zoom laser expanding and collimating system |
| CN113180589A (en) * | 2015-05-28 | 2021-07-30 | 赛莱特私人有限公司 | Relative phase sensitive optical coherence tomography apparatus, methods, and articles |
| CN105352451B (en) * | 2015-11-20 | 2018-04-13 | 北京理工大学 | A kind of accurate omnipotent compensating glass and design method based on deformable mirror |
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