CN109781028A - Large area deep camber optics Free Surface measuring device and measuring method based on cascade distorting lens - Google Patents
Large area deep camber optics Free Surface measuring device and measuring method based on cascade distorting lens Download PDFInfo
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- CN109781028A CN109781028A CN201910150626.3A CN201910150626A CN109781028A CN 109781028 A CN109781028 A CN 109781028A CN 201910150626 A CN201910150626 A CN 201910150626A CN 109781028 A CN109781028 A CN 109781028A
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- large area
- free surface
- deep camber
- area deep
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Abstract
The invention discloses a kind of large area deep camber optics Free Surface measuring device and measuring method based on cascade distorting lens, using cascade deformable mirror can be adaptive the tested Free Surface of generation and large area deep camber is similar or consistent deep camber wavefront, same device can detecte the tested Free Surface of different area and curvature, and measurement range is big, versatile, system cost is low.It is tested free-surface reflection wavefront using Wavefront sensor detection large area deep camber, whole system is without interference element, and system stability is high, strong antijamming capability.
Description
Technical field
The invention belongs to field of optical detection, and in particular to it is a kind of based on cascade distorting lens large area deep camber optics from
By surface sensing device and measurement method.
Background technique
Because of the property of freeform optics surface, the Free Surface optical element with large scale deep camber gradually by
Applied to military and national defense, aerospace field.In addition, with the development of area of computer aided optical design techniques, people are designed
Volume is smaller, the superior single or single group freeform optics element of imaging capability is to replacing the complicated traditional light of large volume
Imaging system is learned, freeform optics element is made also gradually to move towards the people's livelihood and field of industrial production.Benefit from modern mechanical processing
The freeform optics surface Ultra-precision Turning of the development of manufacturing technology, large scale deep camber is achieved, however, to its processing quality
Detection be a global problem.
Currently, numerous free curved face measurement methods has been developed, it is broadly divided into contact and contactless, wherein connecing
Touch detection method such as contourgraph method, coordinate measuring machine method etc., using point by point scanning mode, measurement efficiency is low, is easy to scratch table
Face causes uncertain damage to tested surface, and needs offline inspection, has many limitations in ultra precise measurement field.Non-
In contact measurement method, zero compensation mirror method and non-interfering Hartmann wave front sensor detection method based on optical interferometry
It being widely used, the measurement of large scale deep camber Free Surface may be implemented by the compensating glass system designed in the former, but its
Design cost is high, and versatility and adaptivity be not strong, and different Free Surface optical elements needs different compensating glass systems, this
Outside, this interferometric method is high to system rejection to disturbance Capability Requirement, and can be directly to inspection based on Hartmann wave front sensor
It is detected before surveying free form surface back wave, but its detectable wave-front curvature is limited, it is difficult to meet deep camber free form surface
Measurement.
Summary of the invention
In order to overcome the disadvantages of the above prior art, the purpose of the present invention is to provide a kind of based on the big of cascade distorting lens
Area deep camber optics Free Surface measuring device and measuring method, the apparatus structure is simple and compact, versatile, adaptivity
The adaptive measuring of non-interfering large area deep camber Free Surface may be implemented in height.
In order to achieve the above object, the present invention is achieved by the following scheme:
Large area deep camber optics Free Surface measuring device disclosed by the invention based on cascade distorting lens, comprising:
Cascade deformable mirror unit, the incident wavefront for being tested Free Surface for modulating large area deep camber；
Non-interfering measuring unit, for measure large area deep camber be tested Free Surface back wave before；
Controlling terminal, the surface that deformation data and control deformable mirror for quantitatively obtaining deformable mirror generate become
Shape；
Standard flat wave collimated light beam can generate tested certainly with large area deep camber by cascade deformable mirror unit
The wavefront to be matched by surface；
Wherein, the non-interfering measuring unit, including imaging lens, beam splitter prism and relay lens are passed through before back wave
Non-interfering measurement is carried out by the first Wavefront sensor after imaging lens, beam splitter prism and relay lens；
The cascade deformable mirror unit, including the first plane mirror, second plane mirror and N grades deformable
Mirror, N >=2；A detection for detecting deformable mirror surface deformation amount is designed in the surface of every grade of deformable mirror to fill
It sets, and the data Real-time Feedback that can will test of the detection device is to controlling terminal；
It is deformable that standard flat wave collimated light beam successively passes through the first plane mirror, level-one deformable mirror, second level
After N grades of deformable mirrors of mirror ... and second plane mirror, then the incidence after the amplification of the wavefront of beam splitter prism and imaging lens
It is tested on Free Surface to large area deep camber.
Preferably, standard flat wave is generated by N grades of cascade deformable mirror modulation and after imaging lens amplify
Quantitative wavefront and large area deep camber to be tested the ideal wavefront of Free Surface be similar or consistent.
Preferably, the detection device includes light source, collimator and extender mirror and the wavefront sensing being arranged in above deformable mirror
Device, the light that light source issues forms standard flat light by collimator and extender mirror, then reflexes to Wavefront sensor, wavefront through deformable mirror
The deformable mirror surface deformation amount that sensor will test feeds back to controlling terminal.
Preferably, it is formed after the collimated beam expanding lens collimator and extender of the light that standard flat wave collimated light beam is issued by light source, or
Person is directly generated by parallel light tube.
The invention also discloses based on the above-mentioned large area deep camber optics Free Surface measurement based on cascade distorting lens
Device detects the method that large area deep camber is tested Free Surface tri-dimensional facial type information, comprising the following steps:
1) standard flat wave collimated light beam is modulated after cascade deformable mirror unit and non-interfering measuring unit
At being tested the ideal wavefront of Free Surface with large area deep camber always or similar quantitative known incident wavefront；
2) large area deep camber is obtained before being tested the back wave of Free Surface by non-interfering measuring unit measurement；
3) number before the back wave that the quantitative known incident wavefront data and step 2) measurement modulated using step 1) are obtained
According to, demodulate large area deep camber be tested Free Surface tri-dimensional facial type information.
Preferably, in step 1), the light that light source issues forms standard flat popin after collimator and extender mirror collimator and extender
Then row light beam is reflected through cascade deformable mirror unit, then the beam splitter prism through non-interfering measuring unit and imaging lens are put
Large area deep camber is incident on after big to be tested on Free Surface.
Preferably, in step 2), the reflected light that large area deep camber is tested Free Surface penetrates imaging lens, beam splitter prism
And enters Wavefront sensor after the wavefront lateral dimension transformation of relay lens and carry out non-interfering measurement.
Compared with prior art, the invention has the following advantages:
Large area deep camber optics Free Surface measuring device disclosed by the invention based on cascade distorting lens, utilizes cascade
Deformable mirror can be adaptive generation and large area deep camber be tested that Free Surface is similar or consistent deep camber wavefront, it is same
Device can detecte the tested Free Surface of different area and curvature, and measurement range is big, versatile, system cost is low.It utilizes
Wavefront sensor detects large area deep camber and is tested free-surface reflection wavefront, and whole system is without interference element, system stability
Height, strong antijamming capability.
Detection method disclosed by the invention controls cascade deformable mirror unit using controlling terminal and is deformed, simultaneously
Wavefront sensor is measured in real time to the deformation of changeability mirror and feeds back to controlling terminal, forms a closed-loop control system.
Standard flat wave collimated light beam becomes through the corrugated modulation of closed-loop control system is tested Free Surface ideal with large area deep camber
Wavefront is consistent or similar quantitative known wavefront, the wavefront are incident on large area deep camber and are tested Free Surface, and back wave
It is preceding directly to come to obtain big face by the non-interfering measurement of Wavefront sensor, the known incident wavefront of comprehensive utilization and the back wave measured
Product deep camber is tested the tri-dimensional facial type information of Free Surface.
Detailed description of the invention
Fig. 1 is that the structure of the large area deep camber optics Free Surface measuring device of the invention based on cascade distorting lens is shown
It is intended to.
Wherein: 1- light source I；2- light source II；3- light source III；4- collimator and extender mirror I；5- collimator and extender mirror II；6- collimation expands
Beam mirror III；The first plane mirror of 7-；8- second plane mirror；9- level-one deformable mirror；10- second level deformable mirror；11-
Second Wavefront sensor；12- third Wavefront sensor；The first Wavefront sensor of 13-；14- beam splitter prism；15- imaging lens；
16- large area deep camber is tested Free Surface；17- relay lens；18- controlling terminal.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
It should be noted that description and claims of this specification and term " first " in above-mentioned attached drawing, "
Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so as to the embodiment of the present invention described herein can in addition to illustrating herein or
Sequence other than those of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that cover
Cover it is non-exclusive include, for example, the process, method, system, product or equipment for containing a series of steps or units are not necessarily limited to
Step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, product
Or other step or units that equipment is intrinsic.
The invention will be described in further detail with reference to the accompanying drawing:
It is the large area deep camber optics Free Surface measuring device based on cascade distorting lens of the present embodiment referring to Fig. 1,
Device disclosed in the embodiment is two-stage cascade distorting lens, and from the point of view of in figure, the component of measuring device specifically includes three standards
Straight beam expanding lens, 14, two plane mirrors, two deformable mirrors, three Wavefront sensors, beam splitter prism imaging lens
First 15 and deep camber to be measured be tested Free Surface 16, relay lens 17 and controlling terminal 18.
The light that light source I 1 is issued becomes standard flat wave, the standard flat of outgoing through 4 beam-expanding collimation of the first collimator and extender mirror
Wave collimated light beam successively passes through the first plane mirror 7, level-one deformable mirror 9, second level deformable mirror 10, second plane mirror
8, large area deep camber is incident on after the amplification of the wavefront of beam splitter prism 14 and imaging lens 15 to be tested on Free Surface 16.Its
In, level-one deformable mirror 9, second level deformable mirror 10 can continuously generate modulation to incident light, can produce after imaging lens 15
Raw large area deep camber wavefront, and to be ultimately incident upon before the incident light wave that large area deep camber is tested on Free Surface 16 with
The ideal wavefront that large area deep camber is tested Free Surface 16 is consistent or similar, and it is anti-that large area deep camber is tested Free Surface 16
It is detected after imaging lens 15, beam splitter prism 14 and relay lens 17 by the first Wavefront sensor 13 before ejected wave.
Level-one deformable mirror 9, second level deformable mirror 10 control them by controlling terminal 18 to the modulation of incident light and generate change
Shape, the quantitative deformation that level-one deformable mirror 9, second level deformable mirror 10 generate is respectively by the second Wavefront sensor 11 and third wavefront
Sensor 12 measures.Specific implementation is: the light that light source II 2 is issued becomes mark by 5 collimator and extender of the second collimator and extender mirror
Quasi-plane wave, standard flat wave collimated light beam reflex to the second Wavefront sensor 11 by level-one deformable mirror 9, and the second wavefront passes
Sensor 11 detects its surface deformation amount and feeds back to controlling terminal 18；The light that light source III 3 is issued passes through third collimator and extender mirror 6
Collimator and extender becomes standard flat wave, and collimated light beam reflexes to third Wavefront sensor 12, third by second level deformable mirror 10
Wavefront sensor 12 detects its surface deformation amount and feeds back to controlling terminal 18.
According to the feedback data of the second Wavefront sensor 11 and third Wavefront sensor 12, controlling terminal 18 quantitatively obtain and
Control level-one deformable mirror 9, the surface deformation that second level deformable mirror 10 generates, their surface deformations can connect incident plane wave
Continuous quantitative modulation, amplifies by the wavefront of imaging lens 15, generates and is tested the ideal wavefront of Free Surface 16 with large area deep camber
Consistent or similar known wavefront is incident on large area deep camber as illumination light before modulating wave and is tested Free Surface 16, instead
Non-interfering measurement is directly carried out by Wavefront sensor 13 after imaging lens 15, beam splitter prism 14 and relay lens 17 before ejected wave,
By the reflection wave front data of known incident wavefront and measurement, to complete to be tested large area deep camber in the face of Free Surface 16
Type measurement.
The data of 16 incident wavefront of Free Surface and the back wave of measurement are tested using known large area deep camber is measured
Preceding data, to demodulate the tri-dimensional facial type information that large area deep camber is tested Free Surface 16.
It should be noted that three-level change can also be extended to the present invention is not limited to the cascade of two-stage distorting lens shown in FIG. 1
Shape mirror cascade, even more multistage distorting lens cascade, realizes bigger measurable Curvature varying range.
Light source and collimator and extender device in the present invention can also use parallel light tube, and light source II 2 and collimator and extender
The standard flat wave that the standard flat wave and light source III 3 and collimator and extender mirror 6 that mirror 5 generates generate can also use light source I 1
The standard flat wave generated with collimator and extender mirror 4 carrys out beam splitting and obtains.
In conclusion innovation of the invention is embodied in: incident plane wave is single by cascade deformable mirror and wavefront amplification
Member can produce large area deep camber wavefront, can be measured in real time to distorting lens in conjunction with Wavefront sensor, which is controllable
With it is known, in measurement, can produce and be tested that Free Surface ideal wavefront is consistent or similar wavefront with large area deep camber
It is incident on large area deep camber as illumination light to be tested on Free Surface, by Wavefront sensor to the non-interfering inspection before back wave
Survey the adaptive measuring that can realize large area deep camber Free Surface.
The above content is merely illustrative of the invention's technical idea, and this does not limit the scope of protection of the present invention, all to press
According to technical idea proposed by the present invention, any changes made on the basis of the technical scheme each falls within claims of the present invention
Protection scope within.
Claims (7)
1. the large area deep camber optics Free Surface measuring device based on cascade distorting lens characterized by comprising
Cascade deformable mirror unit, the incident wavefront for being tested Free Surface (16) for modulating large area deep camber；
Non-interfering measuring unit, for measure large area deep camber be tested Free Surface (16) back wave before；
Controlling terminal (18), the surface that deformation data and control deformable mirror for quantitatively obtaining deformable mirror generate become
Shape；
Standard flat wave collimated light beam can generate by cascade deformable mirror unit and be tested Free Surface with large area deep camber
The wavefront that face matches；
Wherein, the non-interfering measuring unit, including imaging lens (15), beam splitter prism (14) and relay lens (17), reflection
Wavefront is carried out after imaging lens (15), beam splitter prism (14) and relay lens (17) by the first Wavefront sensor (13) non-interfering
Measurement；
The cascade deformable mirror unit, including the first plane mirror (7), second plane mirror (8) and N grades are variable
Shape mirror, N >=2；One is designed with for detecting the detection of deformable mirror surface deformation amount in the surface of every grade of deformable mirror
Device, and the data Real-time Feedback that can will test of the detection device is to controlling terminal (18)；
Standard flat wave collimated light beam successively passes through the first plane mirror (7), level-one deformable mirror (9), second level deformable mirror
(10) ... after N grades of deformable mirrors and second plane mirror (8), then the wave through beam splitter prism (14) and imaging lens (15)
Large area deep camber is incident on after preceding amplification to be tested on Free Surface (16).
2. the large area deep camber optics Free Surface measuring device according to claim 1 based on cascade distorting lens,
It is characterized in that, what standard flat wave was generated by N grades of cascade deformable mirrors modulation and after amplifying by imaging lens (15)
The ideal wavefront that quantitative wavefront is tested Free Surface (16) to large area deep camber is similar or consistent.
3. the large area deep camber optics Free Surface measuring device according to claim 1 based on cascade distorting lens,
It is characterized in that, the detection device includes light source, collimator and extender mirror and the Wavefront sensor being arranged in above deformable mirror, light source
The light of sending forms standard flat light by collimator and extender mirror, then reflexes to Wavefront sensor, Wavefront sensor through deformable mirror
The deformable mirror surface deformation amount that will test feeds back to controlling terminal.
4. the large area deep camber optics Free Surface measuring device according to claim 1 based on cascade distorting lens,
It is characterized in that, standard flat wave collimated light beam after the collimated beam expanding lens collimator and extender of light that light source issues by forming, or directly
It is generated by parallel light tube.
5. based on the large area deep camber optics Free Surface based on cascade distorting lens described in any one of Claims 1 to 4
Gauge detects the method that large area deep camber is tested Free Surface tri-dimensional facial type information, which is characterized in that including following
Step:
1) standard flat wave collimated light beam is after cascade deformable mirror unit and non-interfering measuring unit, be modulated into
Large area deep camber is tested the ideal wavefront of Free Surface (16) always or similar quantitative known incident wavefront；
2) large area deep camber is obtained before being tested the back wave of Free Surface (16) by non-interfering measuring unit measurement；
3) obtained reflection wave front data, solution are measured using the quantitative known incident wavefront data and step 2) of step 1) modulation
Recall the tri-dimensional facial type information that large area deep camber is tested Free Surface (16).
6. the method that detection large area deep camber according to claim 5 is tested Free Surface tri-dimensional facial type information, special
Sign is, in step 1), the light that light source issues forms standard flat wave collimated light beam after collimator and extender mirror collimator and extender, so
It is reflected by cascade deformable mirror unit, then the beam splitter prism (14) through non-interfering measuring unit and imaging lens (15) amplification
After be incident on large area deep camber be tested Free Surface (16) on.
7. the method that detection large area deep camber according to claim 5 is tested the tri-dimensional facial type information of Free Surface,
It is characterized in that, in step 2), large area deep camber is tested the reflected light of Free Surface (16) through imaging lens (15), beam splitting rib
Enter Wavefront sensor (13) after the transformation of the wavefront lateral dimension of mirror (14) and relay lens (17) and carries out non-interfering measurement.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910150626.3A CN109781028B (en) | 2019-02-28 | 2019-02-28 | Large-area large-curvature optical free surface measuring device and method based on cascade deformable mirror |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910150626.3A CN109781028B (en) | 2019-02-28 | 2019-02-28 | Large-area large-curvature optical free surface measuring device and method based on cascade deformable mirror |
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| CN109781028A true CN109781028A (en) | 2019-05-21 |
| CN109781028B CN109781028B (en) | 2020-03-17 |
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2019
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| GB709431A (en) * | 1951-04-23 | 1954-05-26 | Cecil Reginald Burch | Improvements relating to the testing of gear teeth |
| CN103776547A (en) * | 2014-02-26 | 2014-05-07 | 中国科学院上海微系统与信息技术研究所 | Method and device for calibrating absolute response rate of terahertz quantum-well detector |
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