CN109633603A - A kind of coupling device and method of phased chip of light waveguide and input optical fibre - Google Patents
A kind of coupling device and method of phased chip of light waveguide and input optical fibre Download PDFInfo
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- CN109633603A CN109633603A CN201811476516.8A CN201811476516A CN109633603A CN 109633603 A CN109633603 A CN 109633603A CN 201811476516 A CN201811476516 A CN 201811476516A CN 109633603 A CN109633603 A CN 109633603A
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- light
- optical fibre
- input optical
- light waveguide
- chip
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
Abstract
The invention discloses the coupling devices and method of a kind of phased chip of light waveguide and input optical fibre, phased chip of light waveguide surface has monitoring waveguiding structure, monitoring the bottom end face of waveguiding structure, with input optical fibre to be input to the transmission optical path of phased chip of light waveguide concordant, coupling device includes: vertical coupled optical fiber, it is vertical coupled by monitoring waveguiding structure and transmission optical path, one end of vertical coupled optical fiber is coupled in one end of monitoring waveguiding structure, for receiving transmission optical path loss light；Light power meter is connect with the other end of vertical coupled optical fiber, for monitoring the optical power loss value of the loss light in the vertical coupled optical fiber of input；Adjustment frame is connect with input optical fibre, and the optical power loss value adjustment input optical fibre and phased chip of light waveguide coupling position shown according to light power meter.The coupling device monitors whether the method for being coupled to optimum position using vertical coupled optical fiber, eliminates the reference of electrical signal, easy to operate, improves production efficiency, increases the reliability of product.
Description
Technical field
The present invention relates to chip testing the field of test technology, and in particular to a kind of phased chip of light waveguide and input optical fibre
Coupling device and method.
Background technique
With the fast development of laser radar technique, which is gradually applied to machine vision, automobile assistant driving, electronics
The fields such as game, medical treatment & health.In laser radar technique, phased chip of light waveguide plays indispensable role, the core
The principle of piece is to adjust light wave transmitter phase by the method for optical antenna array, reaches the control light wave direction of the launch or tune
Save the purpose of hot spot emission mode.But the connection and test of phased chip of light waveguide and transmission fiber, which become device encapsulation, to examine
The key technology of worry.In the prior art, usually by phased chip of light waveguide in end face grinding and polishing at 8 degree of angles, with grinding and polishing at 8 degree of angles
Capillary fiber level dock test, keep phased chip of light waveguide input terminal and the capillary fiber fibre core at 8 degree of angles completely right
Then standard is packaged together with ultraviolet glue by phased chip of light waveguide is Nian Jie with capillary fiber.
Since the principle of phased chip of light waveguide itself is to control the deflection of light output by the change of electric signal,
It needs to observe output facula, really by input multi-channel electric signal when phased chip of light waveguide and capillary fiber are tested
The best test position of its fixed input needs very accurate equipment, and flower when carrying out test observation output facula using this method
Take a large amount of time and manpower, degree-of-difficulty factor is big, and test loss is big, product quality and poor reliability.
Summary of the invention
In view of this, the embodiment of the invention provides coupling device and the sides of a kind of phased chip of light waveguide and input optical fibre
Method, to solve in the prior art by phased chip of light waveguide and capillary fiber coupling difference technical problem.
Technical solution proposed by the present invention is as follows:
The embodiment of the present invention provides the coupling device of a kind of phased chip of light waveguide and input optical fibre, the phased optical waveguide
Chip surface has monitoring waveguiding structure, and the bottom end face of the monitoring waveguiding structure is input to the phase with the input optical fibre
The transmission optical path for controlling chip of light waveguide is concordant, and the coupling device includes: vertical coupled optical fiber, passes through the monitoring waveguiding structure
Vertical coupled with the transmission optical path, one end of the vertical coupled optical fiber is coupled in one end of the monitoring waveguiding structure, uses
In the reception transmission optical path loss light；Light power meter is connect with the other end of the vertical coupled optical fiber, for monitoring input
The optical power loss value of loss light in the vertical coupled optical fiber；Adjustment frame is connect with the input optical fibre, and according to described
The optical power loss value that light power meter is shown adjusts the input optical fibre and the phased chip of light waveguide coupling position.
Further, the vertical coupled optical fiber includes single mode optical fiber.
Further, the diameter of the single mode optical fiber is more than or equal to 4 microns and is less than or equal to 10 microns.
Further, the angle of the vertical coupled optical fiber and the phased chip of light waveguide is between 40 ° -60 °.
Further, the input optical fibre includes any one in capillary fiber, plane optical fiber or fiber array.
Further, the coupling surface of input optical fibre output end coupling surface corresponding with the phased chip of light waveguide
Angle matches.
Further, the angle of the coupling surface of the input optical fibre output end is 0 ° -8 °.
Further, monitoring waveguiding structure includes "Ji" type grating or V-type grating.
Further, the coupling device of the phased chip of light waveguide and input optical fibre further include: polarizer is arranged in institute
It states between input optical fibre and light source.
Further, the coupling device of the phased chip of light waveguide and input optical fibre further include: the first fixture and second
Fixture, first fixture and the second fixture are fixed on the adjustment frame, and the input optical fibre is fixed on first fixture
On, the vertical coupled optical fiber is fixed on second fixture.
Further, the coupling device of the phased chip of light waveguide and input optical fibre further include: microscopic system, the phase
Control chip of light waveguide, input optical fibre and vertical coupled optical fiber are placed in below the object lens of the microscopic system.
The embodiment of the present invention also provides the coupling process of a kind of phased chip of light waveguide and input optical fibre, the phased light wave
Leading chip surface has monitoring waveguiding structure, and the bottom end face and the input optical fibre of the monitoring waveguiding structure are input to described
The transmission optical path of phased chip of light waveguide is concordant, and the coupling process includes the following steps: light source, input optical fibre, phase successively
Control chip of light waveguide, vertical coupled optical fiber and light power meter coupling, one end of the vertical coupled optical fiber and phased optical waveguide
One end coupling of monitoring waveguiding structure in chip；Light source is opened, the input light is adjusted according to the reading of the light power meter
The fine coupling position between phased chip of light waveguide, until the reading numerical value of the light power meter is less than preset value.
Further, described successively by light source, input optical fibre, phased chip of light waveguide, vertical coupled optical fiber and light function
The coupling of rate meter includes: to be passed through adjustment light beam in the other end of the vertical coupled optical fiber, passes through the observation monitoring waveguiding structure
Other end output the adjustment light beam, adjust the vertical coupled optical fiber and the monitoring waveguiding structure coupling position.
Further, the opening light source adjusts the input optical fibre and phased light wave according to the reading of the optical power
The coupling position between chip is led, until after the reading numerical value of the light power meter is less than preset value further include: in the input
Two sides apply ultraviolet glue, ultraviolet glue described in ultraviolet light irradiation, by the ultraviolet adhesive curing to the output end of optical fiber up and down.
Technical solution of the present invention has the advantages that
The coupling device and method of phased chip of light waveguide and input optical fibre provided in an embodiment of the present invention, by phased
Chip of light waveguide surface setting monitoring waveguiding structure, vertical coupled optical fiber and the monitoring waveguiding structure of setting are coupled, used
Light power meter detection inputs the optical power loss value of the loss light in vertical coupled optical fiber, the optical power loss that light power meter is shown
Value changes with the variation of adjustment rack position, when the optical power loss value minimum that light power meter is shown, according to adjustment frame institute
Position input optical fibre is coupled with phased chip of light waveguide, can be obtained what input optical fibre was coupled with phased chip of light waveguide
Optimum position, the coupling device eliminate drawing for electrical signal in the prior art using vertical coupled optical fiber as monitoring optical fiber
Entering, the variation of the optical power loss value shown according to light power meter determines Best Coupling position, it is easy to operate, improve coupling essence
Degree, increases the reliability of coupling.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 shows the structural frames of the coupling device of phased chip of light waveguide and input optical fibre according to embodiments of the present invention
Figure；
Fig. 2 shows the structures of the coupling device of the phased chip of light waveguide of another embodiment and input optical fibre according to the present invention
Block diagram；
Fig. 3 shows the knot process of the coupling process of phased chip of light waveguide and input optical fibre according to embodiments of the present invention
Figure；
Fig. 4 shows the process of the coupling process of the phased chip of light waveguide of another embodiment and input optical fibre according to the present invention
Figure.
The phased chip of light waveguide of 1-；11- monitors waveguiding structure；2- input optical fibre；The vertical coupled optical fiber of 3-；4- light
Power meter；5- adjustment frame；6- light source；7- polarizer.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the art are not having
Every other embodiment obtained under the premise of creative work is made, shall fall within the protection scope of the present invention.
The embodiment of the invention provides the coupling devices of a kind of phased chip of light waveguide and input optical fibre, as shown in Figure 1, phase
Controlling 1 surface of chip of light waveguide has monitoring waveguiding structure 11, and the bottom end face of monitoring waveguiding structure 11 is input to input optical fibre 2
The transmission optical path of phased chip of light waveguide 1 is concordant, which includes: vertical coupled optical fiber 3, by monitoring waveguiding structure 11
Vertical coupled with transmission optical path, one end of vertical coupled optical fiber 3 is coupled in one end of monitoring waveguiding structure 11, for receiving transmission
Optical path loss light；Light power meter 4 is connect with the other end of vertical coupled optical fiber 3, is inputted in vertical coupled optical fiber 3 for monitoring
Loss light optical power loss value；Adjustment frame 5 is connect with input optical fibre 2, and is damaged according to the optical power that light power meter 4 is shown
Consumption value adjusts input optical fibre 2 and phased 1 coupling position of chip of light waveguide.
The coupling device of phased chip of light waveguide 1 and input optical fibre 2 provided in an embodiment of the present invention, by phased light wave
1 surface of chip setting monitoring waveguiding structure 11 is led, the monitoring waveguiding structure 11 of vertical coupled optical fiber 3 and setting is coupled, is adopted
The optical power loss value of the loss light in vertical coupled optical fiber 3, the light function that light power meter 4 is shown are inputted with the detection of light power meter 4
Rate loss value changes with the variation of 5 position of adjustment frame, when the optical power loss value minimum that light power meter 4 is shown, according to
Position where adjustment frame 5 couples input optical fibre 2 with phased chip of light waveguide 1, and input optical fibre 1 and phased light wave can be obtained
The optimum position of the coupling of chip 2 is led, which eliminates the prior art using vertical coupled optical fiber 3 as monitoring optical fiber
The introducing of middle electrical signal, the variation of the optical power loss value shown according to light power meter 4 determine Best Coupling position, operation letter
Just, coupling accuracy is improved, the reliability of coupling is increased.
Specifically, when phased chip of light waveguide 1 and input optical fibre 2 is coupled using the coupling device, can be used one
Light source provides optical signal, and light source can be connect by optical patchcord with input optical fibre, and the optical signal of light source output enters input light
Fibre 2, the optical signal that input optical fibre 2 exports enters in the transmission optical path of phased chip of light waveguide 1, if input optical fibre 2 and phased light
Waveguide chip 1 is not aligned with, and the part light that input optical fibre 2 exports can enter the monitoring waveguiding structure 11 of phased chip of light waveguide 1,
Part light into monitoring waveguiding structure 11 is that light is lost, and loss light is entered in light power meter 4 by vertical coupled optical fiber 3, light
Power meter 4 can show that phased optical waveguide can be obtained when the optical power loss value minimum in the optical power loss value of loss light
The optimally aligned or Best Coupling position of chip 1 and input optical fibre 2.
The coupling device of phased chip of light waveguide and input optical fibre provided in an embodiment of the present invention further include the first fixture and
Second fixture, the first fixture and the second fixture are fixed on adjustment frame 5, and input optical fibre 2 is fixed on the first fixture, vertical coupled
Optical fiber 3 is fixed on the second fixture.Specifically, the first fixture and the second fixture can be optical fiber fixture, and adjustment frame can be six
Adjustment frame is tieed up, a chip platform is fixed on to the middle position of the first fixture and the second fixture, by clean connector and end
The input optical fibre 2 in face is fixed on the first fixture, phased chip of light waveguide 1 is fixed on chip platform, by clean connection
Head and the vertical coupled optical fiber of end face are fixed on the second fixture.
Vertical coupled optical fiber 3 is logical in the coupling device of phased chip of light waveguide and input optical fibre provided in an embodiment of the present invention
It crosses monitoring waveguiding structure 11 and transmission optical path is vertical coupled, one end of vertical coupled optical fiber 3 is coupled in monitoring waveguiding structure 11
One end specifically when vertical coupled optical fiber 3 and monitoring waveguiding structure 11 couple, first connects the other end of vertical coupled optical fiber 3
Feux rouges pen makes the end thereof contacts of vertical coupled optical fiber 3 to the monitoring of phased chip of light waveguide 1 by adjusting the Y-axis of adjustment frame 5
One end of waveguiding structure 11, and there are certain angles with monitoring waveguiding structure 11, adjust X, the Z axis of adjustment frame 5, make to monitor waveguide
The other end output of structure 11 has most bright feux rouges spot output when feux rouges pen is opened, at this point, vertical coupled optical fiber 3 and monitoring wave
One end of guide structure 11, which couples, completes.
As optional embodiment, vertical coupled optical fiber 3 can be single mode optical fiber.The mode field diameter of single mode optical fiber be greater than etc.
It is less than or equal to 10 microns in 4 microns.Specifically, when the mode field diameter of vertical coupled optical fiber 3 is 4 microns, light is vertical coupled
Loss when transmitting in optical fiber 3 is minimum, and the coupling effect of phased chip of light waveguide 1 and input optical fibre 2 is best.
As optional embodiment, adjustable angle between vertical coupled optical fiber 3 and phased chip of light waveguide 1, according to phase
Depending on the grating for controlling 1 surface monitoring waveguiding structure of chip of light waveguide, 11 position, which can be between 40-60 degree.It hangs down
The connecting pin of straight coupling optical fiber 3 and light power meter 4 can be band FC/APC connector, be connected by APC connector and light power meter 4
It connects.
As optional embodiment, input optical fibre 2 includes any one in capillary fiber, plane optical fiber or fiber array
Kind.The angle of the coupling surface of 2 output end of input optical fibre coupling surface corresponding with phased chip of light waveguide 1 matches.Input optical fibre 2
The angle of the coupling surface of output end is 0 ° -8 °.Specifically, in practical applications, the capillary fiber that input optical fibre 2 is 8 degree,
The corresponding coupling surface grinding and polishing of phased chip of light waveguide 1 is 8 degree of angles.
As optional embodiment, monitoring waveguiding structure 11 includes "Ji" type grating or V-structure.Monitor waveguiding structure
11, it is also possible to other waveguiding structures that the monitoring function may be implemented, invention is not limited thereto.Specifically, "Ji" type
The top of grating is concordant with the transmission optical path that input optical fibre 2 is input to phased chip of light waveguide 1, the bottom of V-structure and input
The transmission optical path that optical fiber 2 is input to phased chip of light waveguide 1 is concordant.
As optional embodiment, as shown in Fig. 2, the coupling device of the phased chip of light waveguide 1 and input optical fibre 2 also wraps
Polarizer 7 is included, polarization 7 is arranged between input optical fibre 2 and light source 1.Specifically, the light that light source 1 issues first passes through polarizer 7,
The light of other direction of vibration is filtered out, the light entered in vertical coupled optical fiber 3 can be made to reduce, reduces power loss, in phase
When controlling chip of light waveguide 1 and the coupling of input optical fibre 2, adjustment frame 5 can be first adjusted, so that the optical power damage that light power meter 4 is shown
Consumption value reduces, then adjusts polarizer 7, so that the optical power loss value that light power meter 4 is shown further decreases, until optical power is damaged
When consumption value minimum, the optimally aligned or Best Coupling position of phased chip of light waveguide 1 and input optical fibre 2 can be obtained.
As optional embodiment, the coupling device of the phased chip of light waveguide 1 and input optical fibre 2 further includes micro- system
System, phased chip of light waveguide 1, input optical fibre 2 and vertical coupled optical fiber 3 are placed in below the object lens of microscopic system.It specifically, can be with
By observing the microscopic system, vertical coupled 3 position of optical fiber is found, using the coupling device by phased chip of light waveguide 1
When coupling with input optical fibre 2, the Z axis and beat axis for adjusting adjustment frame 5 make the coupling surface and phased light wave of 2 output end of input optical fibre
Lead that the corresponding coupling surface of chip 1 is parallel, and the phased chip of light waveguide 1 of fibre core position alignment of input optical fibre 2 transmits optical path, then adjusts
The Y-axis and rotary shaft for saving six-dimensional adjusting support make the upper surface of the fibre core position of input optical fibre 2 and phased chip of light waveguide 1 same
On one horizontal plane.Both ends coupling surface separates several millimeters of distance at this time, then finely tunes X-axis, and input optical fibre 2 is made slowly to level off to phase
Control the corresponding coupling surface of chip of light waveguide 1.The display reading of light power meter 4 is observed, is beated, is adjusted when light power meter 4 is shown
Polarizer 7 reduces optical power loss value slightly, and levels off to stabilization, the X-axis and Z of the vertical coupled optical fiber 3 of fine adjustment of vertical
Axis is gradually reduced power loss, promotes horizontal input optical fibre 2 at the same time, is allowed between phased chip of light waveguide 1
Distance levels off to zero, and power loss is to minimum.
The coupling device of phased chip of light waveguide and input optical fibre provided in an embodiment of the present invention, not only may be implemented to input
Being coupled and aligned between optical fiber and phased chip of light waveguide, the phased chip of light waveguide mould group coupling after can be also used for encapsulation are surveyed
Examination, has wide range of applications.
The embodiment of the present invention also provides the coupling process of a kind of phased chip of light waveguide and input optical fibre, phased waveguide core
Piece surface has monitoring waveguiding structure, and the bottom end face and input optical fibre for monitoring waveguiding structure are input to phased chip of light waveguide
It is concordant to transmit optical path, as shown in figure 3, the coupling process includes the following steps:
S1: successively coupling light source, input optical fibre, phased chip of light waveguide, vertical coupled optical fiber and light power meter, hangs down
One end of straight coupling optical fiber is coupled with one end of the monitoring waveguiding structure in phased chip of light waveguide.Specifically, by light source and defeated
Enter optical fiber to connect by optical patchcord, one of the one end for monitoring waveguiding structure and vertical coupled optical fiber in phased chip of light waveguide
End is coupled, and vertical coupled optical fiber is connect by optical patchcord with light power meter, can also realize coupling by other means, this
Invention is not limited.
S2: opening light source, according to the coupling between the reading adjustment input optical fibre of light power meter and phased chip of light waveguide
Position, until the reading numerical value of light power meter is minimum.Specifically, the reading of light power meter is optical power loss value, works as optical power
The coupling position of input optical fibre and phased chip of light waveguide is best when loss value is less than preset value.
The coupling process of phased chip of light waveguide and input optical fibre provided in an embodiment of the present invention, by phased optical waveguide
Chip surface setting monitoring waveguiding structure, vertical coupled optical fiber and the monitoring waveguiding structure of setting is coupled, using optical power
Meter detection inputs the optical power loss value of the loss light in vertical coupled optical fiber, the optical power loss value that light power meter is shown with
It adjusts the variation of rack position and changes, when the optical power loss value minimum that light power meter is shown, according to the position where adjustment frame
It sets and couples input optical fibre with phased chip of light waveguide, the optimum bit that input optical fibre is coupled with phased chip of light waveguide can be obtained
It sets, which eliminates the introducing of electrical signal in the prior art using vertical coupled optical fiber as monitoring optical fiber, according to
The variation for the optical power loss value that light power meter is shown determines Best Coupling position, easy to operate, improves coupling accuracy, increases
The reliability of coupling.
As optional embodiment, step S1 is successively by light source, input optical fibre, phased chip of light waveguide, vertical coupling optical
Fine and light power meter couples
It is passed through adjustment light beam in the other end of vertical coupled optical fiber, is exported by the other end of observation monitoring waveguiding structure
Light beam is adjusted, vertical coupled optical fiber and monitoring waveguiding structure coupling position are adjusted.It specifically, can be using in vertical coupled optical fiber
The other end connect feux rouges pen, open feux rouges pen, be passed through feux rouges, when the other end of monitoring waveguiding structure exports most bright feux rouges spot
When, that is, it can determine vertical coupling optical fibre and monitor the coupling position of waveguiding structure.
As optional embodiment, as shown in figure 4, step S2 opens light source, input light is adjusted according to the reading of optical power
The fine coupling position between phased chip of light waveguide further includes as follows after the reading numerical value of light power meter is less than preset value
Step:
S3: two sides apply ultraviolet glue, ultraviolet light irradiation ultraviolet glue, by ultraviolet adhesive curing above and below the output end of input optical fibre.
Specifically, when the reading numerical value of light power meter is less than preset value, i.e. input optical fibre and phased chip of light waveguide is in Best Coupling
When position, the two sides painting ultraviolet glue above and below the output end of input optical fibre, ultraviolet light irradiation ultraviolet glue, by ultraviolet adhesive curing, so that
Input optical fibre and phased chip of light waveguide complete coupling.
As optional embodiment, can also connect between light source and input optical fibre before light source and input optical fibre coupling
Polarizer is connect, the light that light source issues first passes through polarizer, filters out the light of other direction of vibration, can to enter vertical coupled
Light in optical fiber is reduced, and reduces power loss, when phased chip of light waveguide and input optical fibre couple, can first adjust adjustment
Frame so that the optical power loss value that light power meter is shown reduces, then adjusts polarizer, so that the optical power damage that light power meter is shown
Consumption value further decreases, and when optical power loss value minimum, the best of phased chip of light waveguide and input optical fibre can be obtained
Alignment or Best Coupling position.
The coupling process of phased chip of light waveguide and input optical fibre provided in an embodiment of the present invention, using vertical coupled optical fiber
Whether monitoring input optical fibre and phased chip of light waveguide are coupled to the method for optimum position, eliminate the reference of electrical signal, grasp
Make simple, improve production efficiency, while improving coupling accuracy, increase the reliability of product, which can be with
By connecting polarizer between light source and input optical fibre, the light in other vibration directions is filtered out, the inclined of some direction is only retained
Shake light, reduces power loss.
Although being described in conjunction with the accompanying the embodiment of the present invention, those skilled in the art can not depart from the present invention
Spirit and scope in the case where make various modifications and variations, such modifications and variations are each fallen within by appended claims institute
Within the scope of restriction.
Claims (14)
1. a kind of coupling device of phased chip of light waveguide and input optical fibre, which is characterized in that the phased chip of light waveguide table
Face has monitoring waveguiding structure, and the bottom end face and the input optical fibre of the monitoring waveguiding structure are input to the phased light wave
The transmission optical path for leading chip is concordant, and the coupling device includes:
Vertical coupled optical fiber, the vertical coupled optical fiber vertical coupled by the monitoring waveguiding structure and the transmission optical path
One end be coupled in it is described monitoring waveguiding structure one end, for receiving the transmission optical path loss light；
Light power meter is connect with the other end of the vertical coupled optical fiber, is inputted in the vertical coupled optical fiber for monitoring
The optical power loss value of light is lost；
Adjustment frame is connect with the input optical fibre, and described defeated according to the optical power loss value adjustment that the light power meter is shown
Enter optical fiber and the phased chip of light waveguide coupling position.
2. the coupling device of phased chip of light waveguide and input optical fibre according to claim 1, which is characterized in that
The vertical coupled optical fiber includes single mode optical fiber.
3. the coupling device of phased chip of light waveguide and input optical fibre according to claim 2, which is characterized in that
The diameter of the single mode optical fiber is more than or equal to 4 microns and is less than or equal to 10 microns.
4. the coupling device of phased chip of light waveguide and input optical fibre according to claim 1, which is characterized in that
The angle of the vertical coupled optical fiber and the phased chip of light waveguide is between 40 ° -60 °.
5. the coupling device of phased chip of light waveguide and input optical fibre according to claim 1, which is characterized in that
The input optical fibre includes any one in capillary fiber, plane optical fiber or fiber array.
6. the coupling device of phased chip of light waveguide and input optical fibre according to claim 1, which is characterized in that
The angle of the coupling surface of input optical fibre output end coupling surface corresponding with the phased chip of light waveguide matches.
7. the coupling device of phased chip of light waveguide and input optical fibre as claimed in claim 6, which is characterized in that
The angle of the coupling surface of the input optical fibre output end is 0 ° -8 °.
8. the coupling device of phased chip of light waveguide and input optical fibre according to claim 1, which is characterized in that
Monitoring waveguiding structure includes "Ji" type grating or V-type grating.
9. the coupling device of phased chip of light waveguide and input optical fibre according to any one of claims 1 to 8, feature
It is, further includes: polarizer is arranged between the input optical fibre and light source.
10. the coupling device of phased chip of light waveguide and input optical fibre according to any one of claims 1 to 8, special
Sign is, further includes: the first fixture and the second fixture, first fixture and the second fixture are fixed on the adjustment frame, institute
It states input optical fibre to be fixed on first fixture, the vertical coupled optical fiber is fixed on second fixture.
11. the coupling device of phased chip of light waveguide and input optical fibre according to any one of claims 1 to 8, special
Sign is, further includes: microscopic system, the phased chip of light waveguide, input optical fibre and vertical coupled optical fiber are placed in described micro-
Below the object lens of system.
12. a kind of coupling process of phased chip of light waveguide and input optical fibre, which is characterized in that the phased chip of light waveguide table
Face has monitoring waveguiding structure, and the bottom end face and the input optical fibre of the monitoring waveguiding structure are input to the phased light wave
The transmission optical path for leading chip is concordant, and the coupling process includes the following steps:
Successively light source, input optical fibre, phased chip of light waveguide, vertical coupled optical fiber and light power meter are coupled, it is described vertical
One end of coupling optical fiber is coupled with one end of the monitoring waveguiding structure in phased chip of light waveguide；
Light source is opened, the coupling between the input optical fibre and phased chip of light waveguide is adjusted according to the reading of the light power meter
Position, until the reading numerical value of the light power meter is less than preset value.
13. the coupling process of phased chip of light waveguide and input optical fibre according to claim 12, which is characterized in that described
Successively include: by the coupling of light source, input optical fibre, phased chip of light waveguide, vertical coupled optical fiber and light power meter
It is passed through adjustment light beam in the other end of the vertical coupled optical fiber, it is defeated by the other end for observing the monitoring waveguiding structure
The adjustment light beam out adjusts the vertical coupled optical fiber and the monitoring waveguiding structure coupling position.
14. the coupling process of phased chip of light waveguide and input optical fibre according to claim 12, which is characterized in that described
Light source is opened, the coupling position between the input optical fibre and phased chip of light waveguide is adjusted according to the reading of the optical power,
Until after the reading numerical value of the light power meter is less than preset value further include:
Two sides apply ultraviolet glue, ultraviolet glue described in ultraviolet light irradiation, by the ultraviolet glue above and below the output end of the input optical fibre
Solidification.
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| CN201811476516.8A CN109633603B (en) | 2018-12-04 | 2018-12-04 | Coupling device and method for phase-control optical waveguide chip and input optical fiber |
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| CN201811476516.8A CN109633603B (en) | 2018-12-04 | 2018-12-04 | Coupling device and method for phase-control optical waveguide chip and input optical fiber |
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| CN109633603B CN109633603B (en) | 2020-08-25 |
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| CN111307415A (en) * | 2020-02-24 | 2020-06-19 | 中国科学院微电子研究所 | Optical waveguide transmission system and method for measuring optical waveguide transmission loss |
| CN111367019A (en) * | 2020-02-20 | 2020-07-03 | 华东师范大学 | Optical waveguide coupling method based on optical fiber cone |
| CN112104421A (en) * | 2020-08-21 | 2020-12-18 | 武汉光迅科技股份有限公司 | Coupling parameter determination method and device, storage medium and electronic equipment |
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|---|---|---|---|---|
| CN111025487A (en) * | 2019-12-26 | 2020-04-17 | 北京航空航天大学 | Direct coupling method and device for hollow photonic band gap optical fiber ring and integrated optical chip with environment wide adaptability |
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| CN111307415A (en) * | 2020-02-24 | 2020-06-19 | 中国科学院微电子研究所 | Optical waveguide transmission system and method for measuring optical waveguide transmission loss |
| CN111307415B (en) * | 2020-02-24 | 2021-12-07 | 中国科学院微电子研究所 | Optical waveguide transmission system and method for measuring optical waveguide transmission loss |
| CN112104421A (en) * | 2020-08-21 | 2020-12-18 | 武汉光迅科技股份有限公司 | Coupling parameter determination method and device, storage medium and electronic equipment |
| CN112104421B (en) * | 2020-08-21 | 2021-11-16 | 武汉光迅科技股份有限公司 | Coupling parameter determination method and device, storage medium and electronic equipment |
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