CN103513350A - Alignment and coupling method and device of array waveguide component based on particle swarm optimization - Google Patents

Alignment and coupling method and device of array waveguide component based on particle swarm optimization Download PDF

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CN103513350A
CN103513350A CN201310467810.3A CN201310467810A CN103513350A CN 103513350 A CN103513350 A CN 103513350A CN 201310467810 A CN201310467810 A CN 201310467810A CN 103513350 A CN103513350 A CN 103513350A
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郑煜
段吉安
王丽军
吕文
李继攀
卢胜强
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HUANGSHAN BOLANTE SEMICONDUCTOR TECHNOLOGY CO.,LTD.
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Central South University
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Abstract

The invention discloses an alignment and coupling method and device of an array waveguide component based on the particle swarm optimization. The method comprises the steps that initial light searching is carried out on the array waveguide component, the peak positions based on the particle swarm optimization-mathematical optimization are searched, self-adaptation change inertia weight is added, and simulated analysis is carried out; limited measurement light power values are adopted and optimization iteration is carried out; and actual peak positions are found out through optimization iteration. The device comprises a CCD system device, a laser light source, a first locating module, a second locating module, a waveguide chip, first array optical fibers, second array optical fibers, a light power detection module, a control system and an alignment coupling algorithm module. According to the method and device, peak points can be found out through few iteration times based on the particle swarm optimization, searching efficiency is improved, man-made permission setting is not involved in the optimizing process, the defects of current automatic alignment and coupling are overcome, and the convergence rate, partial searching capacity and searching accuracy are improved.

Description

A kind of array waveguide device based on particle cluster algorithm is aimed at coupling process and device
Technical field
The invention belongs to array waveguide device field, relate in particular to a kind of array waveguide device based on particle cluster algorithm and aim at coupling process and device.
Background technology
Array waveguide device is the critical component in optical network communication system, is mainly used in conversion and the transmission of light signal.Along with the demand of the high speed development ,Gai field pair array waveguide device of optical communication system is increasing, also more and more higher to the quality requirements of device.But the cost that array waveguide device is higher becomes one of factor of restriction optical network communication development, the manufacturing cost of array waveguide device mainly concentrates in encapsulation process, the gordian technique of encapsulation process be photonic device coupling with aim at, so the proposition of efficient coupling alignment algorithm improves significant to the cost of integrated photonic device and quality.
At present, in array waveguide device encapsulation manufacturing industry, domestic extensive employing be the aligning coupling that manual process is carried out array waveguide device.Traditional array waveguide device is aimed at coupling process and is existed alignment precision low, needs more coupling number of times, and search efficiency is low, the low problem of automaticity of the low-loss rapid alignment coupling of waveguide chip and array fibre.And the speed that robotization is aimed at is fast, coupling result is good, and labor cost is lower, is the developing direction that array waveguide device is aimed at coupling technique.But full automatic array waveguide device encapsulation is monopolized by several overseas enterprises again, so the research of pair array waveguide device robotization aligning coupling device and algorithm can effectively be broken external monopolization, the cost of reduction array waveguide device.
Summary of the invention
The object of the present invention is to provide a kind of array waveguide device based on particle cluster algorithm to aim at coupling process and device, being intended to solve traditional array waveguide device aligning coupling process exists alignment precision low, need more coupling number of times, search plain efficiency low, the low problem of automaticity of the low-loss rapid alignment coupling of waveguide chip and array fibre.
The present invention is achieved in that a kind of array waveguide device aligning coupling process based on particle cluster algorithm, should comprise by the array waveguide device aligning coupling process based on particle cluster algorithm:
Step 1: pair array wave guide is initially sought light;
Step 2: find peak based on particle cluster algorithm-mathematical optimization, add adaptive change inertia weight and carry out simulation analysis;
Step 3: adopt definite measured optical power value and carry out Optimized Iterative;
Step 4: find actual peak location by Optimized Iterative.
Further, should the method based on particle cluster algorithm searching peak value be initialization particle colony, after completing, initialization comes more position and the speed of new particle by calculating the fitness of each particle, and after search target meets threshold values requirement, search stops.
Further, can replace particle cluster algorithm with improving particle cluster algorithm, improvement particle cluster algorithm is the particle cluster algorithm that the hybridization PSO model of employing introducing crossover mechanism combines with adaptive change inertia weight, hybridization PSO model enters selector making in basic particle group algorithm, the new particle that iteration produces is each time selected according to fitness, and the part particle high with fitness replaces the low part particle of fitness.
Further, crossover mechanism is similar to the crisscross inheritance in genetic algorithm, with crossover probability, selects particle to be intersected, and after combination of two interlace operation, produces new particle, and position and the velocity of new particle are shown below:
child 1 ( x → ) = p * parent 1 ( x → ) + ( 1.0 - p → ) * parent 2 ( x → )
child 1 ( x → ) = p * parent 1 ( x → ) + ( 1.0 - p → ) * parent 2 ( x → )
child 1 ( v → ) = parent 1 ( v → ) + parent 2 ( v → ) | parent 1 ( v → ) + parent 2 ( v → ) | | parent 1 ( v → ) |
child 2 ( v → ) = parent 1 ( v → ) + parent 2 ( v → ) | parent 1 ( v → ) + parent 2 ( v → ) | | parent 2 ( v → ) |
Wherein
Figure BDA0000393064880000035
the position vector of D dimension;
Figure BDA0000393064880000036
k=1,2, be used for respectively showing the position of newborn particle and particle to be intersected;
Figure BDA0000393064880000037
be that D ties up equally distributed random number vector, component span is [1,1].
Further, the inheritance capability of the size particle up to standard of this array waveguide device aligning coupling process adaptive change inertia weight inertia weight ω value based on particle cluster algorithm to present speed, change the search capability that inertia weight value can control algolithm, the formula of adaptive change inertia weight inertia weight ω value
ω ( k ) = ω start - ( ω start - ω end ) ( k T max ) 2
Wherein, ω startit is initial inertia weight; ω endthe inertia weight of iteration during to maximum times; K is current iteration number of times; T maxgreatest iteration algebraically.
Another object of the present invention is to provide a kind of array waveguide device based on particle cluster algorithm to aim at coupling device, should comprise by the array waveguide device aligning coupling device based on particle cluster algorithm: CCD system module, LASER Light Source, the first locating module, the second locating module, waveguide chip, the first array fibre, the second array fibre, luminous power detection module, control system and aligning coupling algorithm module;
Be connected with control system and aligning coupling algorithm module, for pair array waveguide device, aim at the CCD system module that coupling device is realized initial alignment;
LASER Light Source is arranged on the left side of the first locating module;
For the first locating module and second locating module of input optical fibre, output optical fibre are installed, are arranged on respectively control system and aim at the left and right sides of coupling algorithm module;
Waveguide chip is arranged on control system and aims at the centre position of coupling algorithm module;
The first array fibre connects LASER Light Source, be arranged on the first locating module above;
For pair array waveguide device packaging system, realize the luminous power detection module of fine registration, be arranged on the right side of the second array fibre; The second array fibre connects luminous power detection module, be arranged on the second locating module above; For control system and the aligning coupling algorithm module of controlling aiming at coupling device.
Further, should also comprise by the array waveguide device aligning coupling device based on particle cluster algorithm:
For six axle superfinishing locating modules of input optical fibre, waveguide chip and output optical fibre are installed;
For the fixing precision optics fixture module of six axle high precision adjusting modules.
The array waveguide device aligning coupling device alignment procedures of further, being somebody's turn to do based on particle cluster algorithm is as follows:
Utilize precise clamp that waveguide chip is fixed, mobile input array optical fiber under the monitoring of CCD system module;
LASER Light Source and input end the first array fibre coupling, infrared camera detects the light of waveguide chip output, adds ordinal shift input end first array fibre of accurate alignment algorithm according to coarse alignment algorithm, until infrared camera detects the circular light spot of N rule;
Under the guiding of CCD system module; mobile output terminal the second array fibre is to waveguide chip; according to coarse alignment algorithm, move output terminal the second array fibre; until optical power value detected; then according to accurate alignment algorithm, move output terminal the second array fibre, until 1 or N passage optical power value reach maximum;
According to hyperchannel alignment scheme rotation output terminal the second array fibre, until 1 and N passage optical power value reach optimal equalization state.
What further, this array waveguide device based on particle cluster algorithm was aimed at coupling device employing is robotization alignment algorithm.
Array waveguide device based on particle cluster algorithm provided by the invention is aimed at coupling process and device, solving traditional array waveguide device aligning coupling process exists alignment precision low, need more coupling number of times, search plain efficiency low, the low problem of automaticity of the low-loss rapid alignment coupling of waveguide chip and array fibre, based on particle cluster algorithm, only need peak point can be found by less iterations, search efficiency can be significantly improved.The present invention does not relate to artificial authority setting in searching process, solved the weak point of existing auto-alignment coupling, there is speed of convergence faster, more powerful local search ability and higher search precision, effectively improved automaticity and the work efficiency of the low-loss rapid alignment coupling that realizes waveguide chip and array fibre.
Accompanying drawing explanation
Fig. 1 is the structural representation of the array waveguide device alignment device based on particle cluster algorithm that provides of the embodiment of the present invention;
In figure: 1, CCD system module; 2, LASER Light Source; 3, the first locating module; 4, the second locating module; 5, waveguide chip; 6, the first array fibre; 7, the second array fibre; 8, luminous power detection module; , control system and aim at coupling algorithm module;
Fig. 2 is the process flow diagram of the basic particle group algorithm search principle that provides of the embodiment of the present invention;
The array waveguide device based on particle cluster algorithm that Fig. 3 embodiment of the present invention provides is aimed at coupling process process flow diagram;
Fig. 4 is the effect figure of the array waveguide device alignment device based on particle cluster algorithm that provides of the embodiment of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with embodiment, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Below in conjunction with drawings and the specific embodiments, application principle of the present invention is further described.
Fig. 1 and Fig. 4 show the structure that the array waveguide device based on particle cluster algorithm provided by the invention is aimed at coupling device.For convenience of explanation, only show part related to the present invention.
The array waveguide device based on particle cluster algorithm of the embodiment of the present invention is aimed at coupling device, and the structure of this device is mainly by CCD system module 1, LASER Light Source 2, the first locating module 3, the second locating module 4, waveguide chip 5, the first array fibre 6, the second array fibre 7, luminous power detection module 8, control system and aim at coupling algorithm module 9 and form;
Be connected with control system and aligning coupling algorithm module 9, for pair array waveguide device, aim at the CCD system module 1 that coupling device is realized initial alignment;
LASER Light Source 2 is arranged on the left side of the first locating module 3;
For the first locating module 3 and second locating module 4 of input optical fibre, output optical fibre are installed, are arranged on respectively control system and aim at the left and right sides of coupling algorithm module 9;
Waveguide chip 5 is arranged on control system and aims at the centre position of coupling algorithm module 9;
The first array fibre 6 connects LASER Light Source 2, be arranged on the first locating module 3 above;
For pair array waveguide device packaging system, realize the luminous power detection module 8 of fine registration, be arranged on the right side of the second array fibre 7; The second array fibre 7 connects luminous power detection modules 8, be arranged on the second locating module 4 above;
For control system and the aligning coupling algorithm module 9 of controlling aiming at coupling device;
Should also comprise by the array waveguide device aligning coupling device based on particle cluster algorithm:
For six axle superfinishing locating modules of input optical fibre, waveguide chip and output optical fibre are installed;
For the fixing precision optics fixture module of six axle high precision adjusting modules.
The array waveguide device based on particle cluster algorithm of the embodiment of the present invention is aimed at coupling device, and alignment procedures is as follows:
1), utilize precise clamp that waveguide chip 5 is fixing, under 1 monitoring of CCD system module, mobile input array optical fiber is to correct position;
2), LASER Light Source 2 and input end the first array fibre 6 couplings; infrared camera detects the light of waveguide chip 5 outputs; ordinal shift input end the first array fibre 6 that adds accurate alignment algorithm according to coarse alignment algorithm, until infrared camera detects the circular light spot of N rule;
3), under the guiding of CCD system module 1; mobile output terminal the second array fibre 7 is near waveguide chip 5; according to coarse alignment algorithm, move output terminal the second array fibre 7; until the optical power value of certain numerical value detected; then according to accurate alignment algorithm, move output terminal the second array fibre 7, until 1 or N passage optical power value reach maximum;
4), according to hyperchannel alignment scheme rotation output terminal the second array fibre 7, until 1 and N passage optical power value reach optimal equalization state.
Luminous power detection module in this device is used for realizing fine registration, employing be robotization alignment algorithm.Robotization alignment algorithm is the gordian technique that array waveguide device robotization is aimed at, and a kind of alignment algorithm of fast and reliable can effectively reduce the aligning time, guarantees alignment precision;
What the present invention adopted is basic particle group algorithm, and has proposed a kind of improved Particle Swarm Algorithm with reference to the characteristic of genetic algorithm.
2,3 the present invention will be described by reference to the accompanying drawings, and the present invention is achieved in that a kind of array waveguide device based on particle cluster algorithm aims at coupling process, and the method comprises:
S301: pair array wave guide is initially sought light;
S302: find peak based on particle cluster algorithm-mathematical optimization, add adaptive change inertia weight and carry out simulation analysis;
S303: adopt definite measured optical power value and carry out Optimized Iterative;
S304: find actual peak location by Optimized Iterative.
The method of finding peak value based on particle cluster algorithm is initialization particle colony, after initialization completes, by calculating the fitness of each particle, comes more position and the speed of new particle, and after search target meets threshold values requirement, search stops;
Can use and improve particle cluster algorithm replacement particle cluster algorithm, improvement particle cluster algorithm is the particle cluster algorithm that the hybridization PSO model (HybridPSO, HPSO) of employing introducing crossover mechanism combines with adaptive change inertia weight.Hybridization PSO model enters selector making in basic particle group algorithm, and the new particle that iteration produces is each time selected according to fitness, and the part particle higher with fitness replaces the lower part particle of fitness.This crossover mechanism is similar to the crisscross inheritance in genetic algorithm, with certain crossover probability, selects particle to be intersected, and produces new particle after combination of two interlace operation.Position and the velocity of new particle are shown below:
child 1 ( x → ) = p * parent 1 ( x → ) + ( 1.0 - p → ) * parent 2 ( x → )
child 1 ( x → ) = p * parent 1 ( x → ) + ( 1.0 - p → ) * parent 2 ( x → )
child 1 ( v → ) = parent 1 ( v → ) + parent 2 ( v → ) | parent 1 ( v → ) + parent 2 ( v → ) | | parent 1 ( v → ) |
child 2 ( v → ) = parent 1 ( v → ) + parent 2 ( v → ) | parent 1 ( v → ) + parent 2 ( v → ) | | parent 2 ( v → ) |
Wherein the position vector of D dimension; k=1,2, be used for respectively showing the position of newborn particle and particle to be intersected;
Figure BDA0000393064880000097
be that D ties up equally distributed random number vector, its component span is [1,1].Crossover mechanism be introduced in the speed of convergence that can improve in theory basic particle group algorithm, strengthen the local search ability of algorithm.
The inheritance capability of the size particle up to standard of adaptive change inertia weight inertia weight ω value to present speed, changes the search capability that inertia weight value can control algolithm, the formula of adaptive change inertia weight inertia weight ω value
ω ( k ) = ω start - ( ω start - ω end ) ( k T max ) 2
Wherein, ω startit is initial inertia weight; ω endthe inertia weight of iteration during to maximum times; K is current iteration number of times; T maxgreatest iteration algebraically.
Utilize above formula can make inertia weight ω self-adaptation nonlinear reduce, ω value keeps larger value in iterative process in early days, and to guarantee that particle has compared with large search scope, ω value changes less in the iteration later stage, the further hunting zone of reduction particle, balanced the algorithm overall situation and local search ability.
By simulation analysis and experiment, can see that intersecting PSO algorithm (HPSO) has introduced this concept of crossover mechanism, the heredity being equivalent in genetic algorithm intersects, the searching process that can add fast particle, adaptive change inertia weight with intersect the combination of PSO algorithm and be equal to the advantage that has simultaneously had particle cluster algorithm and genetic algorithm, simulation result also proves that this improved Particle Swarm Algorithm can converge on optimum solution faster.
Array waveguide device based on particle cluster algorithm provided by the invention is aimed at coupling process, the method being coupled for array waveguide device auto-alignment is based on particle cluster algorithm---and mathematical optimization is found peak, adopt definite measured optical power value and carry out Optimized Iterative, and then finding actual peak location.The present invention is based on particle cluster algorithm and only need can find peak point by less iterations, can significantly improve search efficiency.The present invention does not relate to artificial authority setting in searching process, solved the weak point of existing auto-alignment coupling, there is speed of convergence faster, more powerful local search ability and higher search precision, effectively improved automaticity and the work efficiency of the low-loss rapid alignment coupling that realizes waveguide chip and array fibre.
Certainly; the present invention also can have other embodiments; in the situation that not deviating from spirit of the present invention and essence thereof; person of ordinary skill in the field is when making according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection domain of claim of the present invention.

Claims (9)

1. the array waveguide device based on particle cluster algorithm is aimed at a coupling process, it is characterized in that, should comprise by the array waveguide device aligning coupling process based on particle cluster algorithm:
Step 1: pair array wave guide is initially sought light;
Step 2: find peak based on particle cluster algorithm-mathematical optimization, add adaptive change inertia weight and carry out simulation analysis;
Step 3: adopt definite measured optical power value and carry out Optimized Iterative;
Step 4: find actual peak location by Optimized Iterative.
2. the array waveguide device based on particle cluster algorithm as claimed in claim 1 is aimed at coupling process, it is characterized in that, should the method based on particle cluster algorithm searching peak value be initialization particle colony, after completing, initialization comes more position and the speed of new particle by calculating the fitness of each particle, after search target meets threshold values requirement, search stops.
3. the array waveguide device based on particle cluster algorithm as claimed in claim 1 is aimed at coupling process, it is characterized in that, can replace particle cluster algorithm with improving particle cluster algorithm, improvement particle cluster algorithm is the particle cluster algorithm that the hybridization PSO model of employing introducing crossover mechanism combines with adaptive change inertia weight, hybridization PSO model enters selector making in basic particle group algorithm, the new particle that iteration produces is each time selected according to fitness, and the part particle high with fitness replaces the low part particle of fitness.
4. the array waveguide device based on particle cluster algorithm as claimed in claim 3 is aimed at coupling process, it is characterized in that, crossover mechanism is similar to the crisscross inheritance in genetic algorithm, with crossover probability, select particle to be intersected, after combination of two interlace operation, produce new particle, position and the velocity of new particle are shown below:
child 1 ( x → ) = p * parent 1 ( x → ) + ( 1.0 - p → ) * parent 2 ( x → )
child 1 ( x → ) = p * parent 1 ( x → ) + ( 1.0 - p → ) * parent 2 ( x → )
child 1 ( v → ) = parent 1 ( v → ) + parent 2 ( v → ) | parent 1 ( v → ) + parent 2 ( v → ) | | parent 1 ( v → ) |
child 2 ( v → ) = parent 1 ( v → ) + parent 2 ( v → ) | parent 1 ( v → ) + parent 2 ( v → ) | | parent 2 ( v → ) |
Wherein
Figure FDA0000393064870000025
the position vector of D dimension;
Figure FDA0000393064870000026
k=1,2, be used for respectively showing the position of newborn particle and particle to be intersected;
Figure FDA0000393064870000027
be that D ties up equally distributed random number vector, component span is [1,1].
5. the array waveguide device based on particle cluster algorithm as claimed in claim 1 is aimed at coupling process, it is characterized in that, the inheritance capability of the size particle up to standard of this array waveguide device aligning coupling process adaptive change inertia weight inertia weight ω value based on particle cluster algorithm to present speed, change the search capability that inertia weight value can control algolithm, the formula of adaptive change inertia weight inertia weight ω value
ω ( k ) = ω start - ( ω start - ω end ) ( k T max ) 2
Wherein, ω startit is initial inertia weight; ω endthe inertia weight of iteration during to maximum times; K is current iteration number of times; T maxgreatest iteration algebraically.
6. the array waveguide device based on particle cluster algorithm is aimed at coupling device, it is characterized in that, should comprise by the array waveguide device aligning coupling device based on particle cluster algorithm: CCD system module, LASER Light Source, the first locating module, the second locating module, waveguide chip, the first array fibre, the second array fibre, luminous power detection module, control system and aligning coupling algorithm module;
Be connected with control system and aligning coupling algorithm module, for pair array waveguide device, aim at the CCD system module that coupling device is realized initial alignment;
LASER Light Source is arranged on the left side of the first locating module;
For the first locating module and second locating module of input optical fibre, output optical fibre are installed, are arranged on respectively control system and aim at the left and right sides of coupling algorithm module;
Waveguide chip is arranged on control system and aims at the centre position of coupling algorithm module;
The first array fibre connects LASER Light Source, be arranged on the first locating module above;
For pair array waveguide device packaging system, realize the luminous power detection module of fine registration, be arranged on the right side of the second array fibre; The second array fibre connects luminous power detection module, be arranged on the second locating module above; For control system and the aligning coupling algorithm module of controlling aiming at coupling device.
7. the array waveguide device based on particle cluster algorithm as claimed in claim 6 is aimed at coupling device, it is characterized in that, should also comprise by the array waveguide device aligning coupling device based on particle cluster algorithm:
For six axle superfinishing locating modules of input optical fibre, waveguide chip and output optical fibre are installed;
For the fixing precision optics fixture module of six axle high precision adjusting modules.
8. the array waveguide device based on particle cluster algorithm as described in claim 6 and 7 is aimed at coupling device, it is characterized in that, the array waveguide device aligning coupling device alignment procedures of being somebody's turn to do based on particle cluster algorithm is as follows:
Utilize precise clamp that waveguide chip is fixed, mobile input array optical fiber under the monitoring of CCD system module;
LASER Light Source and input end the first array fibre coupling, infrared camera detects the light of waveguide chip output, adds ordinal shift input end first array fibre of accurate alignment algorithm according to coarse alignment algorithm, until infrared camera detects the circular light spot of N rule;
Under the guiding of CCD system module; mobile output terminal the second array fibre is to waveguide chip; according to coarse alignment algorithm, move output terminal the second array fibre; until optical power value detected; then according to accurate alignment algorithm, move output terminal the second array fibre, until 1 or N passage optical power value reach maximum;
According to hyperchannel alignment scheme rotation output terminal the second array fibre, until 1 and N passage optical power value reach optimal equalization state.
9. the array waveguide device based on particle cluster algorithm as claimed in claim 6 is aimed at coupling device, it is characterized in that, what this array waveguide device based on particle cluster algorithm was aimed at coupling device employing is robotization alignment algorithm.
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CN104122633A (en) * 2014-07-10 2014-10-29 中南大学 Optical waveguide chip and optical fiber angle automatic aligning device and method
CN104614718A (en) * 2015-01-08 2015-05-13 南京大学 Method for decomposing laser radar waveform data based on particle swarm optimization
CN105093441A (en) * 2015-09-10 2015-11-25 江苏亨通光网科技有限公司 USB interface active optical cable, and manufacturing device, manufacturing method and test method for USB interface active optical cable
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CN109633603A (en) * 2018-12-04 2019-04-16 中科天芯科技(北京)有限公司 A kind of coupling device and method of phased chip of light waveguide and input optical fibre
CN113820802A (en) * 2021-11-22 2021-12-21 西安奇芯光电科技有限公司 CWDM coupling device

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104122633A (en) * 2014-07-10 2014-10-29 中南大学 Optical waveguide chip and optical fiber angle automatic aligning device and method
CN104122633B (en) * 2014-07-10 2015-09-23 中南大学 A kind of chip of light waveguide and fiber angle automatic alignment apparatus and method
CN104614718A (en) * 2015-01-08 2015-05-13 南京大学 Method for decomposing laser radar waveform data based on particle swarm optimization
CN104614718B (en) * 2015-01-08 2017-02-22 南京大学 Method for decomposing laser radar waveform data based on particle swarm optimization
CN105093441A (en) * 2015-09-10 2015-11-25 江苏亨通光网科技有限公司 USB interface active optical cable, and manufacturing device, manufacturing method and test method for USB interface active optical cable
CN108398781A (en) * 2018-03-12 2018-08-14 北京理工大学 A kind of method of analog optical fiber laser free space optics coherence tomography Energy distribution
CN109633603A (en) * 2018-12-04 2019-04-16 中科天芯科技(北京)有限公司 A kind of coupling device and method of phased chip of light waveguide and input optical fibre
CN113820802A (en) * 2021-11-22 2021-12-21 西安奇芯光电科技有限公司 CWDM coupling device
CN113820802B (en) * 2021-11-22 2022-03-29 西安奇芯光电科技有限公司 CWDM coupling device

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