CN100516951C - Coupling method between waveguide and optical fiber - Google Patents

Coupling method between waveguide and optical fiber Download PDF

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Publication number
CN100516951C
CN100516951C CNB2005101103307A CN200510110330A CN100516951C CN 100516951 C CN100516951 C CN 100516951C CN B2005101103307 A CNB2005101103307 A CN B2005101103307A CN 200510110330 A CN200510110330 A CN 200510110330A CN 100516951 C CN100516951 C CN 100516951C
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waveguide
optical fiber
fiber
optical
coupled
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CN1760706A (en
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吴亚明
李四华
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
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Abstract

Characters of the method are that using adjustable bracket to adjust optical fiber and waveguide in unidirection; using monitoring method of detector to determine relative position between optical fiber and waveguide; using discharging electric arc released from a pair of discharging electrodes to melt optical fiber and waveguide in order to couple optical fiber and waveguide in low loss. The invention prevents bi-directional precision adjustment so as to lower adjusting difficulty. Comparing coupling method of viscose fixation, the invention reaches low loss so as to increase reliability and bonding strength of optical parts. The method is also suitable to melting couple between optical fiber and waveguide.

Description

The coupling process of a kind of waveguide and optical fiber
Technical field:
The present invention relates to the method for a kind of waveguide and optical fiber coupling, specially refer to a kind of utilize arc discharge fused optic fiber and waveguide, to reach the method for light signal low-loss coupling.
Background technology:
Along with the development of society, people also increase day by day for the demand of quantity of information.Networks of Fiber Communications has advantages such as high capacity, high reliability and high transfer rate because it can reach tens and even up to a hundred wavelength optical signals by close wavelength-division multiplex technology transmits and non-interference simultaneously, has obtained huge development.And along with the further demand of society, Fibre Optical Communication Technology also develops towards aspects such as integrated, miniaturization, high reliability.Integrated optical device employing optical waveguide technique is produced on the optical device of various specific functions on the substrate, obtains integrated optics chip.The input of light signal and output are optical waveguides, but in the transmission system of light signal, with optical fiber as transmission medium, certainly exist the coupled problem of optical fiber and waveguide input and output like this, the coupling of optical fiber and waveguide is the gordian technique that integrated optical device is made, be the main cause that influences device reliability, in the cost of manufacture of device, occupy bigger ratio.
Common optical fiber and waveguide-coupled method is now: utilize the V-shaped groove positioning optical waveguides earlier, constitute fiber array, by the waveguide aligning equipment fiber array is aimed at waveguide array, after index to be tested reaches designing requirement, the position utilizes the gluing way fixed fiber and the relative position of waveguide near the distance Waveguide end face, and the air-gap of filling optical fiber and waveguide, reach the purpose that reduces optical loss and reduce the light signal echo, thereby reach the coupling input and output of light signal in optical fiber and the waveguide.As China's number of applying for a patent: 99805394.5, a kind of device with the waveguide-coupled on optical fiber and the optical integrated chip is provided, the V-shaped groove positioning optical waveguides position that it utilizes in the chip makes optical fiber aim at coupling with the waveguide location.Usually can utilize gluing way that both are fixed after using this kind method to aim at coupling; therefore caused leaving easily in the light path viscose; make light signal coupling loss become big, if in the middle of light path, add the optical index matching fluid, because the characteristic of glue; will produce after after a while aging; make optical loss also become increasing, make device stability not high, simultaneously because there is stress in glue in process of setting; influence the performance of device, its whole solidification process is also longer.All there is the integrity problem of certain optical coupling loss and device in the coupling process of above-mentioned waveguide of mentioning and optical fiber.Tracing it to its cause is because optical fiber and waveguide are the couplings of separate type, has caused light signal to need zone through a variations in refractive index in propagating the way, has inevitably caused the loss of light signal.
Summary of the invention:
The object of the present invention is to provide the coupling process of a kind of waveguide and optical fiber, it is unidirectional adjustment optical fiber of a kind of employing adjusting bracket and waveguide, utilize the unidirectional method for supervising of detector to determine optical fiber and waveguide relative position, come fused optic fiber and waveguide by the electrical discharge arc that produces between the pair of discharge electrodes, thereby reach the coupling of optical fiber and waveguide.The method that is provided is owing to make optical fiber and waveguide become one, thereby do not need region of variation in the optical signal transmission process through an optical index, therefore have high strength, high reliability, especially can be so that reach low-loss advantage in the optical signal transmission process.
Usually need to make fiber core and waveguide to aim in advance before the coupling of optical fiber and waveguide, in the alignment methods of fiber core and waveguide, need to utilize the input light source in the light signal input optical fibre, and then utilize optical fiber to aim at waveguide as output, promptly utilize optical fiber that the light signal in the waveguide is outputed on the light detection device, observe the light signal strength in the photo-detector, determine whether optical fiber is aimed at waveguide, wherein need to utilize microscope and accurate adjusting bracket system that fiber core and waveguide are carried out position adjustments, determine the relative position of fiber core and waveguide at last by the size of regulating relative position and observation luminous power, when optical loss is minimum, be fiber core and waveguide is aimed at, use the relative position of glue mucus fixing this moment of optical fiber and waveguide then.The coupling process of above-mentioned optical fiber and waveguide is relative loaded down with trivial details, after using accurate large-scale conditioning equipment and a lot of utility appliance to reach the aligning of fiber core and waveguide, uses the relative position of viscose fixed fiber and waveguide at last, reaches the purpose of signal coupling.In the coupling process of this optical fiber and waveguide, optical fiber and waveguide are the separate type couplings at a distance of certain distance, so the light signal loss is unavoidably arranged in the junction; And owing to utilize the relative position of viscose fixed fiber and waveguide, be easy to make that producing glue in the light path causes the light signal loss further to increase.
Unidirectional adjustment optical fiber of a kind of employing adjusting bracket and waveguide that the present invention proposes, utilize the detector monitors method to determine optical fiber and waveguide relative position, the electrical discharge arc that uses pair of discharge electrodes to discharge, fused optic fiber and waveguide reach the method for low-loss optical fiber and waveguide-coupled.It mainly is to utilize adjusting bracket that optical fiber and waveguide are carried out unidirectional adjusting, adopts the direct monitor optical device of detector pio chip, has avoided the two-way minute adjustment that adopts conditioning equipment to carry out optical fiber and waveguide, has reduced the adjusting difficulty; And the means of utilizing fused optic fiber and waveguide make light signal reach low-loss coupling, and viscose fixed coupling method has relatively improved the reliability and the strength of joint of optical device.The optical fiber that the present invention proposes and its principal character of method of waveguide-coupled are:
(1) adopt unidirectional adjustment optical fiber of adjusting bracket and waveguide, utilize detector monitors to determine optical fiber and waveguide relative position, electrical discharge arc fused optic fiber fibre core and the waveguide of using pair of discharge electrodes to discharge obtain low-loss optical fiber and waveguide-coupled method.
(2) as unidirectional adjusting optical fiber of (1) described employing adjusting bracket and waveguide, utilize detector monitors to determine optical fiber and waveguide relative position, its main alignment procedures is: the optical fiber that needs fusion to connect is placed in the V-shaped groove of an end face support, another waveguide that needs fusion to connect is placed on the flat board; Make the exposed parts of the exposed parts of optical fiber and waveguide adjacent to each other; Give the fused fiber splice input optical signal, and utilize detector to survey light signal, utilize adjusting bracket to move V-shaped groove and observe the detector luminous power, when luminous power is maximal value, be fiber core and waveguide aligned position this moment in the output waveguide of waveguide chip; Light source be positioned at optical fiber and Waveguide interface place below, viewing microscope places the top at optical fiber and Waveguide interface place, microscope is subjected to optical fiber and waveguide the image that obtains after the light source irradiation, promptly as light source (Y direction) resulting image Image Y1 and Image Y2 below interface, offer a display plotter by microscope, roughly to determine the relative position of optical fiber and waveguide; Optical fiber is by light source (Y direction) when irradiation below interface, its resulting image will be shown in ImageY1 among Fig. 5, and the optical fiber both sides have dark space A, a clear zone B who is clipped in the middle of the A of dark space, and the straight line in the B of clear zone than dark space C image, wherein be the fibre core of optical fiber than dark space C.This image is produced by the lens effect that the cylindrical structural of optical fiber causes.(Y direction) irradiation is during waveguide below interface when light source, and the image of its gained will be shown in Image Y2 among Fig. 5, and waveguide has one than clear zone D, and this is optical waveguide than clear zone D.Sweep trace 1 in Fig. 5 and sweep trace 2 for microscope scanning receive image caused.
(3) coupling process of described optical fiber and waveguide its further be characterized as: the coupling of optical fiber and waveguide also can be the fusion coupling of array fibre and Waveguide array.
(4) coupling process of described optical fiber and waveguide its further be characterized as: the V-type groove of fixed fiber adopts vacuum suction method fixed fiber, and optical fiber freely takes out when being beneficial to the array fusion.
(5) coupling process of described optical fiber and waveguide its further be characterized as: behind the aligned position of determining optical fiber and waveguide, utilize pair of electrodes, make to produce electrical discharge arc between the electrode that electrical discharge arc carries out fusion to optical fiber and waveguide and is connected, and obtains being of coupled connections of optical fiber and waveguide at last.
(6) fusion of described optical fiber and waveguide is coupled, and it further is characterized as: apply an electric current and give sparking electrode, make to produce electrical discharge arc between the pair of discharge electrodes that the intensity of electrical discharge arc can reach the level of fused optic fiber and waveguide at short notice.
(7) fusion of described optical fiber and waveguide is coupled, and it further is characterized as: optical fiber and waveguide are placed on sparking electrode middle part, make electrical discharge arc fused optic fiber and waveguide as soon as possible.
(8) described fiber fuse connects waveguide it further is characterized as: selected waveguide material with close with optical fibre refractivity be principle, first-selected SiO 2 waveguide.
(9) described fiber fuse connects waveguide it further is characterized as: first-selected silicon materials substrate at the bottom of the waveguide-based that is adopted also can be other base materials.
(10) it further is characterized as the coupling process of (1) described optical fiber and waveguide: optical fiber is with after waveguide utilizes the electrical discharge arc fusion to be connected; need to use glue mucus that the junction of optical fiber and waveguide is protected, improve the reliability and the strength of joint of optical fiber and waveguide-coupled.Because fiber core and waveguide fusion are one, the problem that does not exist the light path viscose glue to cause optical loss to increase.
Concrete implementation step of the present invention:
1. utilize the optical fiber of needs coupling a V-shaped groove to fix, need the waveguide of coupling and substrate to be placed on the flat board fixing.
2. the image that utilizes microscope to transmit optical fiber and waveguide is given a display plotter, with rough alignment optical fiber and waveguide, give the fused fiber splice input optical signal, and utilize detector to survey light signal in the output waveguide of waveguide chip, utilize adjusting bracket to move V-shaped groove and observe the detector luminous power, when luminous power is maximal value, be fiber core and waveguide aligned position this moment.
3. give discharge power of sparking electrode, electrical discharge arc fused optic fiber and waveguide that electrode produces.
4. use glue mucus to solidify protection at optical fiber and waveguide fusion junction
Description of drawings:
Following legend will be used for better illustrating the optical fiber and the waveguide-coupled method of specific embodiment.
Fig. 1 is that the coupling device synoptic diagram is aimed in existing fiber and waveguide
Fig. 2 is that the coupling device synoptic diagram is aimed in optical fiber provided by the invention and waveguide
Fig. 3 is the fusion coupling device synoptic diagram of single channel optical fiber provided by the invention and waveguide
Fig. 4 is the fusion coupling device synoptic diagram of array fibre provided by the invention and Waveguide array
The Image striograph that Fig. 5 receives for microscope
Embodiment:
Below by substantive distinguishing features and the obvious improvement of the explanation of accompanying drawing further being set forth coupling process provided by the invention.
Fig. 1 is the aligning coupling device synoptic diagram of existing fiber and waveguide; Its coupling process is, input optical signal 11, signal input optical fibre 16, wherein 17 is the fibre core of input optical fibre, input optical fibre 16 and label are that 13 adjusting bracket 1 is fixing, 20 is the substrate of input waveguide, 22 is input waveguide, and wherein 23 is the input waveguide sandwich layer, and light signal is through middle waveguide device 26, by output waveguide 24 output light signals, wherein 25 is the output waveguide sandwich layer, and light signal arrives output photo-detector 12 through output optical fibre 18 output light signals again, and wherein 19 is the fibre core of output optical fibre, output optical fibre 18 and label are that 14 adjusting bracket 2 is fixed together, and adjusting bracket 1 and adjusting bracket 2 have the precision adjustment of 6 dimensions altogether usually.And the precision of being regulated frame control system 15 is controlled.Aim in the coupling process at this kind, need relative position, increased the difficulty of regulating by adjusting bracket bidirectional modulation optical fiber and waveguide; And reach the relative position that utilizes glue mucus fixed fiber and waveguide in minimum at output loss, make easily to have glue in the light path, and because the characteristic of glue causes bigger optical loss.
Fig. 2 is that the coupling device synoptic diagram is aimed in optical fiber of the present invention and waveguide, the present invention adopts the relative position of adjusting bracket 13 unidirectional adjusting fiber cores 17 and waveguide core layer 23, and utilize output photo-detector 12 to survey the luminous power of output waveguide, when output loss reaches minimum, utilize electrical discharge arc fused optic fiber and waveguide, reach high reliability, high strength, low-loss optical fiber and be connected with waveguide-coupled.
Fig. 3 is the fusion coupling device synoptic diagram of single channel optical fiber of the present invention and waveguide, and 41 for treating fusion optical fiber among the figure, and 42 is the V-shaped groove device of fixed fiber, 44 is left electrode, and 45 is right electrode, and 46 is Y direction radiation source, 47 is optical waveguide substrates, and 48 for treating the fusion waveguide, and 50 is viewing microscope.Single channel fused optic fiber of the present invention and waveguide-coupled method are: treat that fusion optical fiber 41 is fixed in the removable V-shaped groove 42, treat that the fusion waveguide chip is fixed on opposite side, treat the optical fiber and the waveguide region of fusion in the radiation source irradiation of Y direction, obtain image Image Y1 and Image Y2 image, this image sends a display plotter to roughly to determine the position of optical fiber and waveguide through viewing microscope 50; Give and treat fusion optical fiber input optical signal; adopt the output waveguide detection of optical power of photo-detector at waveguide chip; utilize adjusting bracket to regulate fiber position; the optical power loss that detects when detector is for hour; be fiber core and waveguide core layer and aim at, apply a power for then two sparking electrodes, make electrode produce electrical discharge arc fused optic fiber and waveguide; use the fixing protection of glue mucus fusion junction at last, finish the coupling of optical fiber and waveguide.
Fig. 4 is the fusion coupling device synoptic diagram of array fibre provided by the invention and Waveguide array.The array coupling device adopts similar in appearance to the method for single channel coupling and makes array fibre and Waveguide array carry out the fusion coupling.The fusion coupling step of array fibre of the present invention and Waveguide array is: treat that fusion optical fiber 51 utilizes vacuum absorption device to be fixed in the removable V-shaped groove 42, treat that the fusion waveguide chip is fixed on opposite side, treat the optical fiber and the waveguide region of fusion in the radiation source irradiation of Y direction, obtain image Image Y1 and Image Y2 image, this image sends a display plotter to roughly to determine the position of passage optical fiber 51 and corresponding fusion waveguide core layer 52 through viewing microscope 50; Give and treat fusion optical fiber 51 input optical signals; adopt the output waveguide detection of optical power of photo-detector 12 at waveguide chip; utilize adjusting bracket to regulate removable V-shaped groove 42 positions; the optical power loss that detects when detector is for hour; being fiber core and waveguide core layer aims at; apply a power for then left electrode 44 and right electrode 45; make electrode produce electrical discharge arc melt channel optical fiber 51 and corresponding waveguide core layer 52; controlling vacuum absorption device then discharges passage optical fiber 51; optical fiber 51 can be moved freely; use identical method melt channel optical fiber 53 and corresponding waveguide core layer 54 subsequently; passage optical fiber 55 to the last and corresponding waveguide core layer 56; in the end use the fusion junction of each passage of the fixing protection of glue mucus, finish the coupling of array fibre and Waveguide array.
The Image image synoptic diagram that Fig. 5 receives for microscope.Among the figure optical fiber by Y direction light source irradiation after its image in microscope be Image Y1, the irradiated image of waveguide is Image Y2, A is the dark space in the optical fiber, B is the clear zone in the optical fiber, C is a fiber core, D is waveguide, and 31 is that fractographic separatrix 1,32 is fractographic separatrix 2.

Claims (9)

1, the coupling process of a kind of waveguide and optical fiber, it is characterized in that described method is the unidirectional adjustment optical fiber of a kind of employing adjusting bracket, utilize the unidirectional method for supervising of detector to determine optical fiber and waveguide relative position, come fused optic fiber and waveguide by the electrical discharge arc that produces between the pair of discharge electrodes, thereby reach the coupling of optical fiber and waveguide; Described unidirectional only being meant treating that the coupled fiber place is provided with an adjusting bracket of adjusting optical fiber, is provided with photo-detector at the output waveguide place of waveguide chip.
2, press the coupling process of described a kind of waveguide of claim 1 and optical fiber, it is characterized in that utilizing detector monitors to determine optical fiber and waveguide relative position, its main alignment procedures is: the optical fiber that needs fusion to connect is placed in the V-shaped groove, and another waveguide that needs fusion to connect is placed on the flat board; Make the exposed parts of the exposed parts of optical fiber and waveguide adjacent to each other; Give the optical fiber input optical signal, and on the output waveguide of waveguide chip, utilize detector to survey light signal, utilize adjusting bracket to move V-shaped groove and observe the detector luminous power, when luminous power is maximal value, be fiber core and waveguide aligned position this moment.
3, press the coupling process of described a kind of waveguide of claim 1 and optical fiber, it is characterized in that light source of concrete alignment procedures is positioned at below optical fiber and the Waveguide interface place, viewing microscope places the top at optical fiber and Waveguide interface place, microscope is subjected to optical fiber and waveguide the image that obtains after the light source irradiation, promptly as resulting two image Y1 of the Y direction of light source below interface and Y2, offer a display plotter by microscope, with the preliminary relative position of determining optical fiber and waveguide; When optical fiber was shone by the Y direction of light source below interface, the optical fiber both sides had dark space A and a clear zone that is clipped in the centre, dark space, and the image than the dark space of the straight line in the clear zone, wherein were the fibre core of optical fiber than the dark space; This image is that the lens effect that the cylindrical structural by optical fiber causes produces; When the Y direction of light source below interface shone waveguide, another image of its gained will have one and be optical waveguide than the clear zone.
4,, it is characterized in that the V-shaped groove of fixed fiber adopts vacuum suction optical fiber by the method for described a kind of optical fiber of claim 2 and waveguide-coupled.
5, by the method for described a kind of optical fiber of claim 1 and waveguide-coupled, it is characterized in that described optical fiber and waveguide are placed on the middle part of sparking electrode.
6, by the method for the described a kind of optical fiber of claim 1 and waveguide-coupled, it is characterized in that the waveguide material that adopts close with optical fibre refractivity, described waveguide material is a silicon dioxide.
7, by the method for claim 1 and 6 described a kind of optical fiber and waveguide-coupled, it is characterized in that at the bottom of the described waveguide-based be the silicon materials substrate.
8, by the method for the described a kind of optical fiber of claim 1 and waveguide-coupled, it is characterized in that described optical fiber and waveguide fusion are of coupled connections after, stick with glue to connect the junction protected.
9,, it is characterized in that the fusion coupling that is coupled as array fibre and Waveguide array of described optical fiber and waveguide by the method for described a kind of optical fiber of claim 1 and waveguide-coupled.
CNB2005101103307A 2005-11-11 2005-11-11 Coupling method between waveguide and optical fiber Expired - Fee Related CN100516951C (en)

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Publication number Priority date Publication date Assignee Title
CN103091779A (en) * 2011-11-08 2013-05-08 福州高意通讯有限公司 High-power optical fiber coupler and manufacture method thereof
CN102798945A (en) * 2012-08-03 2012-11-28 无锡爱沃富光电科技有限公司 Angle matching and distance control debugging device of PLC (Programmable Logic Controller) optical branching device assemblies
CN105116493B (en) * 2015-08-24 2016-11-16 深圳市创鑫激光股份有限公司 A kind of optical fiber splicing method and device
CN109633603B (en) * 2018-12-04 2020-08-25 国科光芯(海宁)科技股份有限公司 Coupling device and method for phase-control optical waveguide chip and input optical fiber
CN109683082B (en) * 2018-12-26 2021-06-29 上海先方半导体有限公司 Test system and test method for optical chip

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1274427A (en) * 1998-05-27 2000-11-22 康宁股份有限公司 Method and appts. for aligning optical waveguide arrays
US6681496B2 (en) * 2002-05-24 2004-01-27 Agilent Technologies, Inc. Method of active fiber alignment with movable V-groove precision control microstructures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1274427A (en) * 1998-05-27 2000-11-22 康宁股份有限公司 Method and appts. for aligning optical waveguide arrays
US6681496B2 (en) * 2002-05-24 2004-01-27 Agilent Technologies, Inc. Method of active fiber alignment with movable V-groove precision control microstructures

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