CN109545889A - 干式90度转向分片装置及其实施方法 - Google Patents
干式90度转向分片装置及其实施方法 Download PDFInfo
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- CN109545889A CN109545889A CN201811340734.9A CN201811340734A CN109545889A CN 109545889 A CN109545889 A CN 109545889A CN 201811340734 A CN201811340734 A CN 201811340734A CN 109545889 A CN109545889 A CN 109545889A
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 75
- 239000010703 silicon Substances 0.000 claims abstract description 75
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 74
- 230000007246 mechanism Effects 0.000 claims abstract description 70
- 230000007723 transport mechanism Effects 0.000 claims abstract description 28
- 239000012634 fragment Substances 0.000 claims abstract description 19
- 239000002516 radical scavenger Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 7
- 241000252254 Catostomidae Species 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 235000008216 herbs Nutrition 0.000 abstract description 3
- 210000002268 wool Anatomy 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 52
- 238000012797 qualification Methods 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811340734.9A CN109545889A (zh) | 2018-11-12 | 2018-11-12 | 干式90度转向分片装置及其实施方法 |
Applications Claiming Priority (1)
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CN201811340734.9A CN109545889A (zh) | 2018-11-12 | 2018-11-12 | 干式90度转向分片装置及其实施方法 |
Publications (1)
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CN109545889A true CN109545889A (zh) | 2019-03-29 |
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Family Applications (1)
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CN201811340734.9A Pending CN109545889A (zh) | 2018-11-12 | 2018-11-12 | 干式90度转向分片装置及其实施方法 |
Country Status (1)
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CN (1) | CN109545889A (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111029288A (zh) * | 2019-12-18 | 2020-04-17 | 常州时创能源股份有限公司 | 硅片的转角输送方法 |
CN112735971A (zh) * | 2019-10-14 | 2021-04-30 | 天津环博科技有限责任公司 | 一种水中硅片立式分片机构 |
CN114373698A (zh) * | 2021-12-16 | 2022-04-19 | 上海磐云科技有限公司 | 一种硅片自动化分片装置 |
CN115069589A (zh) * | 2022-08-22 | 2022-09-20 | 无锡京运通科技有限公司 | 一种单晶硅片分选机及其使用方法 |
CN116978842A (zh) * | 2023-07-31 | 2023-10-31 | 江苏龙恒新能源有限公司 | 智能防堵片硅片输送设备 |
Citations (6)
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---|---|---|---|---|
DE102006011870A1 (de) * | 2006-03-15 | 2007-09-20 | Insotech Ohg | Vereinzelungsvorrichtung und Verfahren zur stückweisen Bereitstellung plattenförmiger Gegenstände |
CN102427095A (zh) * | 2011-08-11 | 2012-04-25 | 浙江大学台州研究院 | 基于循环配气装置的太阳能硅片自动分片机及其分片方法 |
CN203013690U (zh) * | 2012-12-13 | 2013-06-19 | 上海釜川超声波科技有限公司 | 硅片整形吸附装置 |
CN205303425U (zh) * | 2015-12-31 | 2016-06-08 | 苏州博阳能源设备有限公司 | 硅片分片机构 |
CN106783721A (zh) * | 2017-03-24 | 2017-05-31 | 张家港市德昶自动化科技有限公司 | 硅片吸片装置和自动插片装置 |
CN207977303U (zh) * | 2018-04-19 | 2018-10-16 | 无锡喆创科技有限公司 | 硅片分片及吸片送片装置 |
-
2018
- 2018-11-12 CN CN201811340734.9A patent/CN109545889A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006011870A1 (de) * | 2006-03-15 | 2007-09-20 | Insotech Ohg | Vereinzelungsvorrichtung und Verfahren zur stückweisen Bereitstellung plattenförmiger Gegenstände |
CN102427095A (zh) * | 2011-08-11 | 2012-04-25 | 浙江大学台州研究院 | 基于循环配气装置的太阳能硅片自动分片机及其分片方法 |
CN203013690U (zh) * | 2012-12-13 | 2013-06-19 | 上海釜川超声波科技有限公司 | 硅片整形吸附装置 |
CN205303425U (zh) * | 2015-12-31 | 2016-06-08 | 苏州博阳能源设备有限公司 | 硅片分片机构 |
CN106783721A (zh) * | 2017-03-24 | 2017-05-31 | 张家港市德昶自动化科技有限公司 | 硅片吸片装置和自动插片装置 |
CN207977303U (zh) * | 2018-04-19 | 2018-10-16 | 无锡喆创科技有限公司 | 硅片分片及吸片送片装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112735971A (zh) * | 2019-10-14 | 2021-04-30 | 天津环博科技有限责任公司 | 一种水中硅片立式分片机构 |
CN111029288A (zh) * | 2019-12-18 | 2020-04-17 | 常州时创能源股份有限公司 | 硅片的转角输送方法 |
CN111029288B (zh) * | 2019-12-18 | 2022-05-31 | 常州时创能源股份有限公司 | 硅片的转角输送方法 |
CN114373698A (zh) * | 2021-12-16 | 2022-04-19 | 上海磐云科技有限公司 | 一种硅片自动化分片装置 |
CN114373698B (zh) * | 2021-12-16 | 2023-08-08 | 上海磐云科技有限公司 | 一种硅片自动化分片装置 |
CN115069589A (zh) * | 2022-08-22 | 2022-09-20 | 无锡京运通科技有限公司 | 一种单晶硅片分选机及其使用方法 |
CN115069589B (zh) * | 2022-08-22 | 2022-10-28 | 无锡京运通科技有限公司 | 一种单晶硅片分选机及其使用方法 |
CN116978842A (zh) * | 2023-07-31 | 2023-10-31 | 江苏龙恒新能源有限公司 | 智能防堵片硅片输送设备 |
CN116978842B (zh) * | 2023-07-31 | 2024-03-05 | 江苏龙恒新能源有限公司 | 智能防堵片硅片输送设备 |
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Address after: No. 209, Zhangjing East Section, Xigang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214194 Applicant after: Wuxi Fuchuan Technology Co.,Ltd. Address before: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant before: Shanghai Fuchuan Intelligent Technology Co.,Ltd. Address after: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant after: Shanghai Fuchuan Intelligent Technology Co.,Ltd. Address before: Room J1078, 2F, Building 39, No. 52, Chengliu Road, Jiading District, Shanghai, 200000 Applicant before: SHANGHAI FUCHUAN AUTOMATION EQUIPMENT Co.,Ltd. |
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