CN109132547A - 单面制绒分片装置及其使用方法 - Google Patents
单面制绒分片装置及其使用方法 Download PDFInfo
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- CN109132547A CN109132547A CN201811027555.XA CN201811027555A CN109132547A CN 109132547 A CN109132547 A CN 109132547A CN 201811027555 A CN201811027555 A CN 201811027555A CN 109132547 A CN109132547 A CN 109132547A
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- vacuum
- conveyer belt
- silicon wafer
- vacuum suction
- adsorption mechanism
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- 238000005530 etching Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 68
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 68
- 239000010703 silicon Substances 0.000 claims abstract description 68
- 238000001179 sorption measurement Methods 0.000 claims abstract description 46
- 239000012634 fragment Substances 0.000 claims abstract description 23
- 238000010521 absorption reaction Methods 0.000 claims description 14
- 238000003032 molecular docking Methods 0.000 claims description 12
- 235000008216 herbs Nutrition 0.000 claims description 10
- 210000002268 wool Anatomy 0.000 claims description 10
- 230000003993 interaction Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
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CN201811027555.XA CN109132547B (zh) | 2018-09-04 | 2018-09-04 | 单面制绒分片装置及其使用方法 |
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CN201811027555.XA CN109132547B (zh) | 2018-09-04 | 2018-09-04 | 单面制绒分片装置及其使用方法 |
Publications (2)
Publication Number | Publication Date |
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CN109132547A true CN109132547A (zh) | 2019-01-04 |
CN109132547B CN109132547B (zh) | 2023-12-15 |
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CN201811027555.XA Active CN109132547B (zh) | 2018-09-04 | 2018-09-04 | 单面制绒分片装置及其使用方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109860083A (zh) * | 2019-02-21 | 2019-06-07 | 中国科学院物理研究所 | 用于晶硅制绒的链式设备及单面倒金字塔制绒的制备方法 |
CN109979857A (zh) * | 2019-04-09 | 2019-07-05 | 张家港市德昶自动化科技有限公司 | 半导体晶圆硅片分片装置 |
CN110539918A (zh) * | 2019-08-15 | 2019-12-06 | 河南中烟工业有限责任公司 | 一种烟包分层调头装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57169257A (en) * | 1981-04-13 | 1982-10-18 | Nec Corp | Exfoliating device for semiconductor element |
CN201820777U (zh) * | 2010-09-02 | 2011-05-04 | 董维来 | 太阳能硅片湿法自动分片装置 |
CN202434555U (zh) * | 2012-01-06 | 2012-09-12 | 成都旭双太阳能科技有限公司 | 一种薄膜太阳能电池组件剥离装置 |
CN203013690U (zh) * | 2012-12-13 | 2013-06-19 | 上海釜川超声波科技有限公司 | 硅片整形吸附装置 |
KR101447940B1 (ko) * | 2013-05-16 | 2014-10-14 | 주식회사 포틱스 | 진공 흡착 및 분리 기능을 갖는 솔라 셀 웨이퍼 낱장 분리장치 |
CN104609109A (zh) * | 2015-01-09 | 2015-05-13 | 电子科技大学 | 一种真空吸附传送带装置 |
CN105428287A (zh) * | 2015-11-03 | 2016-03-23 | 中国电子科技集团公司第四十八研究所 | 一种硅片上料装置 |
CN106711077A (zh) * | 2016-12-29 | 2017-05-24 | 秦皇岛可视自动化设备有限公司 | 一种真空吸附传输装置及太阳能电池片缺陷检测仪 |
CN107342241A (zh) * | 2016-04-29 | 2017-11-10 | 上海微电子装备(集团)股份有限公司 | 一种解键合装置和方法 |
-
2018
- 2018-09-04 CN CN201811027555.XA patent/CN109132547B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57169257A (en) * | 1981-04-13 | 1982-10-18 | Nec Corp | Exfoliating device for semiconductor element |
CN201820777U (zh) * | 2010-09-02 | 2011-05-04 | 董维来 | 太阳能硅片湿法自动分片装置 |
CN202434555U (zh) * | 2012-01-06 | 2012-09-12 | 成都旭双太阳能科技有限公司 | 一种薄膜太阳能电池组件剥离装置 |
CN203013690U (zh) * | 2012-12-13 | 2013-06-19 | 上海釜川超声波科技有限公司 | 硅片整形吸附装置 |
KR101447940B1 (ko) * | 2013-05-16 | 2014-10-14 | 주식회사 포틱스 | 진공 흡착 및 분리 기능을 갖는 솔라 셀 웨이퍼 낱장 분리장치 |
CN104609109A (zh) * | 2015-01-09 | 2015-05-13 | 电子科技大学 | 一种真空吸附传送带装置 |
CN105428287A (zh) * | 2015-11-03 | 2016-03-23 | 中国电子科技集团公司第四十八研究所 | 一种硅片上料装置 |
CN107342241A (zh) * | 2016-04-29 | 2017-11-10 | 上海微电子装备(集团)股份有限公司 | 一种解键合装置和方法 |
CN106711077A (zh) * | 2016-12-29 | 2017-05-24 | 秦皇岛可视自动化设备有限公司 | 一种真空吸附传输装置及太阳能电池片缺陷检测仪 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109860083A (zh) * | 2019-02-21 | 2019-06-07 | 中国科学院物理研究所 | 用于晶硅制绒的链式设备及单面倒金字塔制绒的制备方法 |
CN109860083B (zh) * | 2019-02-21 | 2021-08-24 | 中国科学院物理研究所 | 用于晶硅制绒的链式设备及单面倒金字塔制绒的制备方法 |
CN109979857A (zh) * | 2019-04-09 | 2019-07-05 | 张家港市德昶自动化科技有限公司 | 半导体晶圆硅片分片装置 |
CN110539918A (zh) * | 2019-08-15 | 2019-12-06 | 河南中烟工业有限责任公司 | 一种烟包分层调头装置 |
CN110539918B (zh) * | 2019-08-15 | 2024-05-10 | 河南中烟工业有限责任公司 | 一种烟包分层调头装置 |
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CN109132547B (zh) | 2023-12-15 |
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