CN109536961B - 蚀刻液及蚀刻液的制备方法 - Google Patents
蚀刻液及蚀刻液的制备方法 Download PDFInfo
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- CN109536961B CN109536961B CN201811337370.9A CN201811337370A CN109536961B CN 109536961 B CN109536961 B CN 109536961B CN 201811337370 A CN201811337370 A CN 201811337370A CN 109536961 B CN109536961 B CN 109536961B
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- etching solution
- etching
- copper
- milling
- ammonium persulfate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- ing And Chemical Polishing (AREA)
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CN201811337370.9A CN109536961B (zh) | 2018-11-12 | 2018-11-12 | 蚀刻液及蚀刻液的制备方法 |
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CN201811337370.9A CN109536961B (zh) | 2018-11-12 | 2018-11-12 | 蚀刻液及蚀刻液的制备方法 |
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CN109536961A CN109536961A (zh) | 2019-03-29 |
CN109536961B true CN109536961B (zh) | 2021-03-30 |
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CN201811337370.9A Active CN109536961B (zh) | 2018-11-12 | 2018-11-12 | 蚀刻液及蚀刻液的制备方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115261860B (zh) * | 2022-06-10 | 2024-04-16 | 航天科工防御技术研究试验中心 | 一种铝合金表面腐蚀清除剂及其制备方法和应用 |
CN116120936B (zh) * | 2022-10-27 | 2024-06-25 | 上海天承化学有限公司 | 一种蚀刻药水及其制备方法和应用 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090081937A (ko) * | 2008-01-25 | 2009-07-29 | 동우 화인켐 주식회사 | 인듐계 산화막의 식각액 조성물 및 이를 이용한 금속패턴의 형성방법 |
KR20090081545A (ko) * | 2008-01-24 | 2009-07-29 | 동우 화인켐 주식회사 | 식각액 조성물 및 이를 이용한 금속 패턴의 형성방법 |
CN101684408A (zh) * | 2008-09-12 | 2010-03-31 | 株式会社东进世美肯 | 用于有机发光二极管显示装置的蚀刻剂组合物 |
CN101935838A (zh) * | 2010-08-01 | 2011-01-05 | 梅州博敏电子有限公司 | 一种印制线路板沉铜前的微蚀处理方法 |
CN102925894A (zh) * | 2012-10-09 | 2013-02-13 | 江阴润玛电子材料股份有限公司 | 一种酸性铜蚀刻液及其制备工艺 |
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2018
- 2018-11-12 CN CN201811337370.9A patent/CN109536961B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090081545A (ko) * | 2008-01-24 | 2009-07-29 | 동우 화인켐 주식회사 | 식각액 조성물 및 이를 이용한 금속 패턴의 형성방법 |
KR20090081937A (ko) * | 2008-01-25 | 2009-07-29 | 동우 화인켐 주식회사 | 인듐계 산화막의 식각액 조성물 및 이를 이용한 금속패턴의 형성방법 |
CN101684408A (zh) * | 2008-09-12 | 2010-03-31 | 株式会社东进世美肯 | 用于有机发光二极管显示装置的蚀刻剂组合物 |
CN101935838A (zh) * | 2010-08-01 | 2011-01-05 | 梅州博敏电子有限公司 | 一种印制线路板沉铜前的微蚀处理方法 |
CN102925894A (zh) * | 2012-10-09 | 2013-02-13 | 江阴润玛电子材料股份有限公司 | 一种酸性铜蚀刻液及其制备工艺 |
Non-Patent Citations (2)
Title |
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以(NH4)2S2O8为主蚀刻剂的印制板蚀刻液浅谈;叶丙睿;《印制电路信息》;20091231(第4期);第35-37页,表1、表6 * |
叶丙睿.以(NH4)2S2O8为主蚀刻剂的印制板蚀刻液浅谈.《印制电路信息》.2009,(第4期),第34-37页. * |
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Address after: 518101 411-423, building A7, Fuhai information port, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN ZHONGKE DONGMING SURFACE TREATMENT NEW MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Guangdong Dongming New Material Technology Co.,Ltd. Patentee after: BOLUO DONGMING NEW MATERIALS Research Institute Address before: 518101 411-423, building A7, Fuhai information port, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN ZHONGKE DONGMING SURFACE TREATMENT NEW MATERIAL TECHNOLOGY Co.,Ltd. Patentee before: BO LUO XIAN DOMIN CHEMICAL CO.,LTD. Patentee before: BOLUO DONGMING NEW MATERIALS Research Institute |
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Effective date of registration: 20220630 Address after: 516100 south of Guangshan highway, niutianling village group, Xinjie village committee, Luoyang Town, BOLUO County, Huizhou City, Guangdong Province Patentee after: Guangdong Dongming New Material Technology Co.,Ltd. Address before: 518101 411-423, building A7, Fuhai information port, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN ZHONGKE DONGMING SURFACE TREATMENT NEW MATERIAL TECHNOLOGY Co.,Ltd. Patentee before: Guangdong Dongming New Material Technology Co.,Ltd. Patentee before: BOLUO DONGMING NEW MATERIALS Research Institute |