CN109536915A - Disposable round-trip two-sided evaporating coating equipment reel system structure - Google Patents
Disposable round-trip two-sided evaporating coating equipment reel system structure Download PDFInfo
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- CN109536915A CN109536915A CN201910026574.9A CN201910026574A CN109536915A CN 109536915 A CN109536915 A CN 109536915A CN 201910026574 A CN201910026574 A CN 201910026574A CN 109536915 A CN109536915 A CN 109536915A
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- sided
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- home roll
- band
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- 238000001704 evaporation Methods 0.000 title claims abstract description 76
- 238000000576 coating method Methods 0.000 title claims abstract description 38
- 239000011248 coating agent Substances 0.000 title claims abstract description 37
- 230000008020 evaporation Effects 0.000 claims abstract description 57
- 238000005096 rolling process Methods 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims abstract description 15
- 238000004804 winding Methods 0.000 claims abstract description 15
- 238000007747 plating Methods 0.000 claims abstract description 12
- 239000012528 membrane Substances 0.000 claims abstract description 9
- 230000009471 action Effects 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 18
- 238000000429 assembly Methods 0.000 claims description 15
- 230000000712 assembly Effects 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 4
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 description 9
- 238000007740 vapor deposition Methods 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000002045 lasting effect Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of disposable round-trip two-sided evaporating coating equipment reel system structures, including vacuum chamber and it is set to the plating membrane element of vacuum chamber, the plating membrane element includes band transmission system and evaporation source, and the band transmission system includes two around rolling wheel, two home rolls and two evaporation sources；This equipment work when, two in rolling wheel, one of them is as winding wheel, another is as unreeling wheel；On band transmission path, two home rolls are located at two between rolling wheel, and in two home rolls, and the wherein side of one of home roll and band acts on, and the other side of another home roll and band acts on；Two evaporation sources are used to vaporize material to be plated, and an evaporation source and a home roll form a plated film station；On any plated film station, resulting gas phase action is heated in the strip sections being bonded with home roll by evaporation source.This equipment can realize material two-side plated film, while readily available thicker coating film thickness.
Description
Technical field
The present invention relates to filming equipment fields, in particular to disposable round-trip two-sided evaporating coating equipment reel system knot
Structure.
Background technique
Vacuum coating refers to heats metal or nonmetallic materials under conditions of high vacuum, evaporates it and is condensed in plating piece
(metal, semiconductor or insulator) surface and a kind of method for forming film.For example, vacuum aluminum-coated, vacuum copper facing etc..
Vacuum coating technology is generally divided into two major classes, i.e. physical vapour deposition (PVD) (PVD) technology and chemical vapor deposition (CVD)
Technology.
Physical gas phase deposition technology refers under vacuum conditions, using various physical methods, plating material is gasificated into atom, is divided
Son makes its ionization ion, the method being deposited directly on matrix surface.It is mostly heavy with physical vapor to prepare hard reaction film
Product method is made, it utilizes certain physical process, and such as the thermal evaporation of substance, or when by ion bombardment, material surface atom is splashed
Phenomena such as penetrating realizes controllable transfer process of the material atom from source substance to film.Physical gas phase deposition technology has film/base junction
Good with joint efforts, film even compact, film thickness controllability be good, the target of application extensively, sputtering range is wide, can deposit thick film, can
Produce stable components alloy film and it is reproducible the advantages that.Meanwhile physical gas phase deposition technology is due to its process temperature
500 DEG C are can be controlled in hereinafter, the film cutter that therefore can be used as final treatment process for high-speed steel and hard alloy class.
Due to that can increase substantially the cutting ability of cutter using physical gas-phase deposition, people are competitively developing high-performance, Gao Ke
While by property equipment, it is also applied to the extension in field, especially answering in high-speed steel, hard alloy and ceramic-like cutter
With having carried out more in-depth study.
Chemical vapour deposition technique is the elementary gas containing composition film element or compound supply matrix, by gas
Chemical reaction in phase separation or matrix surface, the method that metal or compound film are produced on matrix mainly include normal pressure
Chemical vapor deposition, low-pressure chemical vapor deposition and the plasma chemical vapor deposition for having both CVD and PVD feature concurrently etc..
Existing filming equipment can only once plate the film of one side, plated film in plated film due to only including one group of plated film station
Efficiency is lower.
Summary of the invention
It is an object of the invention to: disposable round-trip two-sided evaporating coating equipment reel system structure is provided, is solved
Existing filming equipment can only once plate the film of one side in plated film due to only including one group of plated film station, and plating membrane efficiency is lower
The problem of.
The technical solution adopted by the invention is as follows:
Disposable round-trip two-sided evaporating coating equipment reel system structure, including vacuum chamber and it is set to the indoor plating of vacuum
Membrane element, the plating membrane element include two transmitting assemblies and with the matched two sets of evaporation sources of transmitting assembly, each transmitting assembly
Including one around rolling wheel and a home roll；
In the work of this equipment, two transmitting assemblies in rolling wheel, one of them is used as winding wheel, another conduct is put
Rolling wheel；
On band transmission path, the home roll of two transmitting assemblies is located at two between rolling wheel, and in two home rolls,
In the wherein one side of a home roll and band act on, the another side of another home roll and band acts on；
Two sets of evaporation sources are used to vaporize material to be plated, and a set of evaporation source and a home roll form a plated film station；
On any plated film station, resulting gas phase action is heated in the strip sections being bonded with home roll by evaporation source.
Used evaporated device in existing roll and vacuum plated film industry is all that single side is deposited on film, cannot achieve
Disposable two-sided vapor deposition, two-sided disposable evaporation metal material are a blank.
Vacuum environment film surface copper is coated with, and the solution in industry is magnetic control sputtering vacuum coating equipment at present,
But the disadvantage of magnetron sputtering is that the deposition rate of film surface copper is too low, and the speed that film is continuously coated with is very low, production effect
Rate is low, and existing filming equipment can only once plate the film of one side in plated film, yield is not due to only including one group of plated film station
Height, vapor deposition is difficult, and common vapor deposition boron nitride crucible or graphite crucible can not be effectively completed normally.
Further, described two transmitting assemblies are arranged up and down, i.e., described two transmitting assemblies have difference in height.Due to this
Scheme relies on two transmitting assemblies and completes, and space-saving angle considers from actual production life, in order to avoid equipment body
Product is excessive, general using one of vertical arrangement or horizontal arrangement.
Further, one of transmitting assembly is located at the top of another transmitting assembly.
Since the transmitting assembly is arranged up and down, described two home rolls are arranged up and down, and one of home roll is located at another
Below one home roll, two around rolling wheel also arrangement up and down, and when two home roll work, rotation direction is opposite.Due to this programme, need
Will two sides to band carry out plated film simultaneously, therefore, it is necessary to the rollers by vertical direction to carry out changing face, if two home roll water
The roller of flat raft cloth and not vertical direction, then the one side of band face evaporation source is constant always, it is difficult to realize simultaneously to two sides
Plated film is carried out, if using the roller of vertical direction, two home rolls are arranged up and down more saves space, and this equipment needs
Use under vacuum conditions, space it is smaller it is easier vacuumize, therefore two home rolls are arranged up and down.
At work, two are corresponding to being rotated by for driving mechanism around rolling wheel to this programme, in this way, one of coiling
Wheel is used as unreeling wheel, and for installing strip coil to be coated, another coiling wheel completes plated film as winding wheel, for coiling
Band.Two home rolls are arranged on the transmission path of band, and when corresponding strip sections cross home roll, home roll side is to strip sections
It opens and sets so that forming smooth Vacuum Deposition film surface on band.Each evaporation source is by heating material to be plated and to vaporize, in this way, institute
The vapor deposition obtained can carry out vacuum coating to corresponding strip sections unilateral side on coated surface.
In the present solution, be set as including two home rolls, two home rolls side contacts different from band at work, in this way, needle
To any home roll, the opposite side of the strip sections side contacted with the home roll is coating film area of band when by home roll, in this way,
The scheme of above two home roll, two sets of evaporation sources, aloowing this equipment is that band carries out disposable two-sided metallization.
Meanwhile it in the present solution, being set as including two around rolling wheel, after completing the single plated film to strip coil, two coiling
When wheel rotates backward under the action of the driving mechanism, the plated film next time of band can be carried out, in this way, wanting according to coating film thickness
Summation, in the case where single coating film thickness is relatively thin, can be made for specific material to be plated by repeatedly switching the steering around rolling wheel
It obtains and switches between winding wheel and unreeling wheel around rolling wheel, multiple plated film can be carried out to band to meet coating film thickness requirement.I.e.
Using this programme, facilitates and obtain thicker coating film thickness.
Further, on any plated film station, evaporation source is located at the underface of home roll.As specific one-to-one
Evaporation source and home roll set-up mode, on any plated film station, evaporation source is located at the underface of home roll.
It further, further include the vacuum system being connected with vacuum chamber, the vacuum system is for taking out vacuum chamber
It is vacuum-treated, the vacuum system includes pipeline and multiple vacuum acquirement devices for being connected on pipeline, the vacuum acquirement dress
It sets including mechanical pump, lobe pump and diffusion pump, fore pump of the mechanical pump as diffusion pump, the lobe pump is set to machinery
Between pump and diffusion pump.
It further, further include based on the vacuum measurement for measuring vacuum degree in vacuum chamber.It is true when to obtain the work of this equipment
Empty indoor vacuum degree, enables vacuum system preferably to adjust the vacuum degree of vacuum chamber, further includes true for measuring vacuum chamber
The vacuum measurement meter of reciprocal of duty cycle.
Further, described to further include to provide lasting material supply to be plated for evaporation source in this equipment
Wire feeder, the Song Ji mechanism is for providing material to be plated to be vaporized to evaporation source.
Further, for enable band two between rolling wheel transmit when band transmitting as smooth as possible, the band
Material transmission system further includes nip rolls, and along band transmission path, the nip rolls is set to two between rolling wheel.In this programme
The nip rolls is used to carry out opening to the band in transmittance process and set, i.e., by providing constraint to band in transmittance process, reaches
So that the purpose of the smooth transmitting of band.
Further, pressure cooling is carried out to this equipment to realize, further includes the cooling for cooling down to this equipment
System.
Further, evaporation strong as a kind of high temperature tolerance ability itself, can realizing low-voltage and high-current heat production simultaneously
Source implementation, the evaporation source use evaporation boat, and the material of the evaporation boat is molybdenum or tungsten-molybdenum alloy.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
1. two-sided evaporating coating equipment reel system structure of the invention disposable round-trip, this programme at work, two around
Rolling wheel is rotated by corresponding driving mechanism, in this way, one of coiling wheel is as unreeling wheel, it is to be coated for installing
Strip coil, another coiling wheel complete the band of plated film for coiling as winding wheel.The transmitting of band is arranged in two home rolls
On path, when corresponding strip sections cross home roll, home roll side sets so that forming smooth vacuum on band opening for strip sections
Coated surface.Each evaporation boat is by heating material to be plated and to vaporize, in this way, resulting vapor deposition is on coated surface
Vacuum coating is carried out to corresponding strip sections unilateral side.
In the present solution, be set as including two home rolls, two home rolls side contacts different from band at work, in this way, needle
To any home roll, the opposite side of the strip sections side contacted with the home roll is coating film area of band when by home roll, in this way,
The scheme of above two home roll, two sets of evaporation sources, aloowing this equipment is that band carries out disposable two-sided metallization.
2. two-sided evaporating coating equipment reel system structure of the invention disposable round-trip, it is set as including two around rolling wheel,
After completing to the single plated film of strip coil, two when rotating backward under the action of the driving mechanism around rolling wheel, can carry out band
Plated film next time, in this way, according to the requirement of coating film thickness and the feelings relatively thin in single coating film thickness for specific material to be plated
, can be by repeatedly switching the steering around rolling wheel, so that switch between winding wheel and unreeling wheel around rolling wheel under condition, it can be to band
Multiple plated film is carried out to meet coating film thickness requirement.This programme is used, facilitates and obtains thicker coating film thickness.
Detailed description of the invention
Examples of the present invention will be described by way of reference to the accompanying drawings, in which:
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is structural schematic diagram of the invention；
Fig. 3 is structural schematic diagram of the invention；
Fig. 4 is structural schematic diagram of the invention.
In figure, 1- is around rolling wheel, 2- home roll, 3- evaporation source, 4- nip rolls, 5- vacuum chamber, 6- transmitting assembly.
Specific embodiment
All features disclosed in this specification or disclosed all methods or in the process the step of, in addition to mutually exclusive
Feature and/or step other than, can combine in any way.
It elaborates below with reference to Fig. 1 to Fig. 4 to the present invention.
Embodiment 1
As shown in Figure 1, disposable round-trip two-sided evaporating coating equipment reel system structure, including vacuum chamber 5 and it is set to
Plating membrane element in vacuum chamber 5, the plating membrane element include two transmitting assemblies 6 and evaporate with 6 matched two sets of transmitting assembly
Source 3, each transmitting assembly 6 include one around rolling wheel 1 and a home roll 2；
In the work of this equipment, two transmitting assemblies 6 in rolling wheel 1, one of them is as winding wheel, another conduct
Unreeling wheel；
On band transmission path, the home roll 2 of two transmitting assemblies 6 is located at two between rolling wheel 1, and two home rolls 2
In, the wherein one side of one of home roll 2 and band acts on, and the another side of another home roll 2 and band acts on；
Two sets of evaporation sources 3 are used to vaporize material to be plated, and a set of evaporation source 3 and a home roll 2 form a plated film work
Position；
On any plated film station, resulting gas phase action is heated in the strip sections being bonded with home roll 2 by evaporation source 3
On.
Used evaporated device in existing roll and vacuum plated film industry is all that single side is deposited on film, cannot achieve
Disposable two-sided vapor deposition, two-sided disposable evaporation metal material are a blank.
Vacuum environment film surface copper is coated with, and the solution in industry is magnetic control sputtering vacuum coating equipment at present,
But the disadvantage of magnetron sputtering is that the deposition rate of film surface copper is too low, and the speed that film is continuously coated with is very low, production effect
Rate is low, and yield is not high, and vapor deposition is difficult, and common vapor deposition boron nitride crucible or graphite crucible can not be effectively completed normally.
This programme at work, two around rolling wheel 1 being rotated by corresponding driving mechanism, in this way, one of them around
Rolling wheel 1 is used as unreeling wheel, and for installing strip coil to be coated, another is used as winding wheel around rolling wheel 1, completes plating for coiling
The band of film.Two home rolls 2 are arranged on the transmission path of band, when corresponding strip sections cross home roll 2,2 side pair of home roll
Opening for strip sections is set so that forming smooth Vacuum Deposition film surface on band.Each evaporation source 3 is by heating material to be plated and making vapour
Change, in this way, resulting vapor deposition can carry out vacuum coating to corresponding strip sections unilateral side on coated surface.
In the present solution, be set as including two home rolls 2, two home rolls 2 side contacts different from band at work, in this way,
For any home roll 2, the opposite side of the strip sections side contacted with the home roll 2 is coating film area of band when by home roll 2,
In this way, the scheme of above two home rolls, 2, two sets of evaporation sources 3, aloowing this equipment is that band carries out disposable two-sided metallization.
Meanwhile it in the present solution, being set as including two around rolling wheel 1, after completing the single plated film to strip coil, two coiling
When wheel 1 rotates backward under the action of the driving mechanism, the plated film next time of band can be carried out, in this way, according to coating film thickness
It is required that and for specific material to be plated in the case where single coating film thickness is relatively thin, can by repeatedly switching the steering around rolling wheel 1,
So that switching between winding wheel and unreeling wheel around rolling wheel 1, multiple plated film can be carried out to band to meet coating film thickness requirement.
This programme is used, facilitates and obtains thicker coating film thickness.
Embodiment 2
As shown in Figure 1, the present embodiment is further qualified on the basis of embodiment 1: as specific one-to-one
Evaporation source 3 and 2 set-up mode of home roll, on any plated film station, evaporation source 3 is located at the underface of home roll 2.
As the implementation for making vacuum degree in vacuum chamber 5 reach specific requirement, further include be connected with vacuum chamber 5 it is true
Empty set system, the vacuum system are used to carry out vacuum chamber 5 vacuumize process, and the vacuum system includes pipeline and is connected to pipe
Multiple vacuum generating devices of road, the vacuum generating device include mechanical pump, lobe pump and diffusion pump, and the mechanical pump is made
For the fore pump of diffusion pump, the lobe pump is set between mechanical pump and diffusion pump.
It further include wire feeder be that evaporation source 3 provides lasting material supply to be plated in this equipment, it is described
Song Ji mechanism is for providing material to be plated to be vaporized to evaporation source 3.
Pressure cooling is carried out to this equipment to realize, further includes the water-cooling system for cooling down to this equipment.
Vacuum degree when to obtain the work of this equipment in vacuum chamber 5, further includes the vacuum for measuring 5 vacuum degree of vacuum chamber
Meter.
To enable band band transmitting as smooth as possible when two transmit between rolling wheel 1, band transmitting system
System further includes nip rolls 4, and along band transmission path, the nip rolls 4 is set to two between rolling wheel 1.Described in this programme
Nip rolls 4 is used to set to the band in transmittance process, i.e., by providing constraint to band in transmittance process, reach so that
The purpose of the smooth transmitting of band.
3 side of realization of evaporation source strong as a kind of high temperature tolerance ability itself, can realizing low-voltage and high-current heat production simultaneously
Case, the evaporation source 3 use evaporation boat, and the material of the evaporation boat is molybdenum or tungsten-molybdenum alloy.
Embodiment 3
As shown in Figure 1, the present embodiment the difference from example 2 is that, further, described two about 2 home rolls are arranged,
One of home roll 2 is located at another 2 lower section of home roll, and rotation direction is opposite when two work of home rolls 2.Due to this programme, need
Will two sides to band carry out plated film simultaneously, therefore, it is necessary to the rollers by vertical direction to carry out changing face, if two home rolls 2
The nip rolls 4 of horizontal arrangement and not vertical direction, then the one side of band face evaporation source 3 is constant always, it is difficult to realize simultaneously
Plated film is carried out to two sides, if using the nip rolls 4 of vertical direction, space is more saved in two about 2 home roll arrangements, and
This equipment needs to use under vacuum conditions, space it is smaller it is easier vacuumize, therefore two about 2 home rolls are arranged.Described two
It is a around rolling wheel 1 also up and down arrangement be located at two home rolls 2 the same side and 2 face of home roll, it is described match around rolling wheel 1 and home roll
Further include 3 nip rolls 4 between 2, includes 5 nip rolls 4 between the home roll 2.
Embodiment 4
As shown in Fig. 2, the present embodiment the difference from example 2 is that, further, described two 2 horizontal arrangements of home roll.
Embodiment 5
As shown in figure 3, the present embodiment the difference from example 2 is that, further, described two about 2 home rolls are arranged
But incomplete face.
Embodiment 6
As shown in figure 4, the present embodiment the difference from example 2 is that, further, described two transmitting assemblies 6 include
The different nip rolls 4 of quantity.
Embodiment 7
The present embodiment provides a kind of concrete implementation mode on the basis of embodiment 2: in vacuum chamber, passing through mechanical pump
+ lobe pump+diffusion pump combination vacuum pump set begins to warm up evaporation boat after being evacuated to working vacuum degree in vacuum chamber, works as evaporation
After the temperature of boat reaches the temperature of fusing metal material, by wire feeder, will continuously it be sent around discoid wire
Onto evaporation boat, wire is melted and is vaporized on evaporation boat, the band that vaporized metallic molecule is deposited on as plastic strap
On, start reel system at this time, the rotation of coiling wheel, realize band two sides simultaneously, continuous coating.
Meanwhile in all technical features provided by embodiment 2, these technical characteristics can be mainly summarized as in this equipment
Including vacuum system, reel system, vapo(u)rization system, water-cooling system, pneumatic system and electric control system.Vacuum system includes:
Mechanical pump, lobe pump, diffusion pump, vacuum chamber, Pneumatic vacuum valve, pipeline and vacuum measurement meter etc., it is needed for being evaporated
The important system of vacuum environment.Reel system includes: jack, home roll, nip rolls, excessively roller, rocker etc., wherein two coiling
Roller is included in jack, and crossing roller is the band reversing roller or/and idler roller that transmit between winding up roller two, home roll, nip rolls,
Roller, rocker are crossed for constraining two bands between winding up roller, roller quantity excessively is multiple, along the transmission path cloth of band
It sets, the rocker is two, respectively on winding up roller equipped with a rocker, roller is installed on rocker, rocker is used for according to wind-up roll
The position of roller itself go up in the variation adjustment of band coil coil-diameter, so that the point of release of strip coil and the distance of winding are always not
Become, to realize the smooth release and smooth winding of band, rocker crosses roller position according to the variation of coil diameter adjustment thereon to be led to
Cross motor and shaft to realize: rocker can rotate around the axis, and the power motor of rocker rotation, and the main function of this system is to allow band
Material continuous rotation, is realized needed for the continuous coating of band.Vapo(u)rization system mainly by evaporation electrode, evaporation shroud, evaporation shield, give
Silk mechanism, the part such as transformer form, and main function is heating evaporation boat under vacuum conditions, make wire in wire feeder
It is continuously vaporized under transmission, guarantees the plated film power of band.Electric control system is to control the normal operation of whole equipment,
Guarantee coating process trouble-free operation, it is mainly made of PLC, touch screen, electronic component, electronic circuit and control cabinet.Water cooling
Cooling cycle water needed for system is to provide whole equipment, specifically includes that the portions such as water pipe, valve, cooling tower, water pump and reservoir
Point.Pneumatic system is to provide high pressure gas used in the open and close of each vacuum valve cylinder, specifically includes that air compressor, gas storage
Tank, pneumatic triple piece, solenoid directional control valve and pipeline composition.
The above, only the preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, it is any
Those skilled in the art within the technical scope disclosed by the invention, can without the variation that creative work is expected or
Replacement, should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be limited with claims
Subject to fixed protection scope.
Claims (10)
1. disposable round-trip two-sided evaporating coating equipment reel system structure, including vacuum chamber (5) and it is set in vacuum chamber (5)
Plating membrane element, which is characterized in that the plating membrane element include two transmitting assemblies (6) and with transmitting assembly (6) matched two
It covers evaporation source (3), each transmitting assembly (6) includes one around rolling wheel (1) and a home roll (2)；
In the work of this equipment, two transmitting assemblies (6) in rolling wheel (1), one of them is as winding wheel, another conduct
Unreeling wheel；
On band transmission path, the home roll (2) of two transmitting assemblies (6) is located at two between rolling wheel (1), and two home rolls
(2) in, the wherein one side of one of home roll (2) and band is acted on, and the another side of another home roll (2) and band acts on；
Two sets of evaporation sources (3) are used to vaporize material to be plated, and a set of evaporation source (3) forms a plated film with a home roll (2)
Station；
On any plated film station, resulting gas phase action is heated in the strip sections being bonded with home roll (2) by evaporation source (3)
On.
2. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that: institute
It states two transmitting assemblies (6) to arrange up and down, i.e., described two transmitting assemblies (6) have difference in height.
3. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that: institute
State the top that one of transmitting assembly (6) is located at another transmitting assembly (6).
4. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that:
On any plated film station, evaporation source (3) is located at the underface of home roll (2).
5. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that: also
Including the vacuum system being connected with vacuum chamber (5), the vacuum system is used to carry out vacuumize process to vacuum chamber (5), described
Vacuum system includes pipeline and multiple vacuum acquirement devices for being connected on pipeline, the vacuum acquirement device include mechanical pump,
Lobe pump and diffusion pump, fore pump of the mechanical pump as diffusion pump, the lobe pump be set to mechanical pump and diffusion pump it
Between.
6. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 5, it is characterised in that: also
Based on the vacuum measurement by measuring vacuum chamber (5) vacuum degree.
7. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that: institute
Stating further includes wire feeder, and the Song Ji mechanism is used to provide material to be plated to be vaporized to evaporation source (3).
8. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that: institute
Stating band transmission system further includes nip rolls (4), and along band transmission path, the nip rolls (4) is set to two around rolling wheel (1)
Between.
9. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that: also
Including the cooling system for cooling down to this equipment.
10. disposable round-trip two-sided evaporating coating equipment reel system structure according to claim 1, it is characterised in that:
The evaporation source (3) uses evaporation boat, and the material of the evaporation boat is molybdenum or tungsten-molybdenum alloy.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821623191 | 2018-09-30 | ||
| CN2018216231917 | 2018-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109536915A true CN109536915A (en) | 2019-03-29 |
Family
ID=65834896
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910026574.9A Pending CN109536915A (en) | 2018-09-30 | 2019-01-11 | Disposable round-trip two-sided evaporating coating equipment reel system structure |
| CN201910026865.8A Pending CN109536896A (en) | 2018-09-30 | 2019-01-11 | A kind of coating machine nip rolls layout structure and the coating machine using the structure |
| CN201920051079.9U Active CN209602626U (en) | 2018-09-30 | 2019-01-11 | Disposable round-trip two-sided evaporating coating equipment reel system structure |
| CN201920051682.7U Active CN209602627U (en) | 2018-09-30 | 2019-01-11 | A kind of coating machine nip rolls layout structure and the coating machine using the structure |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910026865.8A Pending CN109536896A (en) | 2018-09-30 | 2019-01-11 | A kind of coating machine nip rolls layout structure and the coating machine using the structure |
| CN201920051079.9U Active CN209602626U (en) | 2018-09-30 | 2019-01-11 | Disposable round-trip two-sided evaporating coating equipment reel system structure |
| CN201920051682.7U Active CN209602627U (en) | 2018-09-30 | 2019-01-11 | A kind of coating machine nip rolls layout structure and the coating machine using the structure |
Country Status (1)
| Country | Link |
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| CN (4) | CN109536915A (en) |
Cited By (5)
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| CN110600264A (en) * | 2019-09-02 | 2019-12-20 | 海宁钟江智能科技有限公司 | Capacitor film and double-sided metal stacking process thereof |
| CN113621934A (en) * | 2021-08-16 | 2021-11-09 | 辽宁分子流科技有限公司 | Coiling coating equipment |
| CN113621935A (en) * | 2021-08-16 | 2021-11-09 | 辽宁分子流科技有限公司 | Winding coating method based on winding coating equipment |
| CN113621933A (en) * | 2021-08-16 | 2021-11-09 | 辽宁分子流科技有限公司 | Movable baffle system for winding coating equipment |
| CN114481034A (en) * | 2022-01-04 | 2022-05-13 | 重庆金美新材料科技有限公司 | Preparation method, equipment and system of composite metal foil |
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| CN109536915A (en) * | 2018-09-30 | 2019-03-29 | 四川海格锐特科技有限公司 | Disposable round-trip two-sided evaporating coating equipment reel system structure |
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| CN112853275B (en) * | 2021-03-31 | 2023-07-25 | 辽宁分子流科技有限公司 | Continuous winding vacuum coating method for ultrathin base film |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN209602626U (en) | 2019-11-08 |
| CN209602627U (en) | 2019-11-08 |
| CN109536896A (en) | 2019-03-29 |
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