CN210529032U

CN210529032U - Evaporation plating device

Info

Publication number: CN210529032U
Application number: CN201822117968.9U
Authority: CN
Inventors: 不公告发明人
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2018-12-17
Filing date: 2018-12-17
Publication date: 2020-05-15
Anticipated expiration: 2028-12-17

Abstract

The utility model relates to an evaporation coating technique field provides an evaporation coating device, the evaporation coating device, include: a heating crucible for heating and evaporating the evaporation material; the magnetic plate is positioned above the heating crucible, has magnetism and is used for fixing a target substrate to be evaporated; more than two magnetic objects are arranged in the magnetic plate, and the magnetism of the magnetic plate is gradually reduced from the middle to the edge. According to the technical scheme, the magnetism of the magnetic plate is gradually reduced from the middle to the edge, so that the suction force to the middle of the target substrate is larger than the edge, the slippage of the target substrate and the wrinkles of the metal mask plate are reduced, the attaching degree of the metal mask plate and the substrate can be improved, the organic film patterns in the evaporation process are avoided from being abnormal, the risk of breaking the target substrate is reduced, the service life of the metal mask plate is prolonged, the production efficiency is effectively improved, and the quality and the production progress of products are guaranteed.

Description

Evaporation plating device

Technical Field

The utility model relates to an evaporation coating technology field especially relates to an evaporation coating device who is applied to OLED display organic light emitting layer evaporation coating.

Background

Organic Light-Emitting diodes (OLEDs) have excellent properties such as self-luminescence, ultra-thinness, fast response speed, wide viewing angle, low power consumption, etc., so that OLED display panels have become the focus and focus of current research. The organic light emitting layer in the OLED display is usually prepared by a vacuum evaporation technique, i.e. in a vacuum chamber, an evaporation material in a crucible is heated to evaporate and deposit the evaporation material on a target substrate. The existing evaporation plating machine mainly comprises an evaporation plating source, a metal mask plate, a contact plate and a magnetic plate. In the evaporation film forming process, an evaporation material in a crucible is heated and passes through a metal mask plate provided with an opening pattern, and a patterned organic light-emitting layer is deposited on a target substrate. The contact plate is positioned between the magnetic plate and the target substrate and is in contact with the target substrate, so that heat dissipation is facilitated and the contact flatness of the target substrate is ensured; the metal mask plate is positioned on the other side, back to the contact plate, of the target substrate, is fixedly adsorbed on the target substrate through the magnetic plate and is attached to the target substrate in an alignment mode.

In the prior art, during the carrying and alignment process of the substrate with the metal mask plate, the substrate slides to cause fragments to affect the normal production. In addition, with the increase of the size and the increase of the light and thin demand of the OLED display panel, the area and the thickness of the metal mask plate and the substrate used in the evaporation film forming process are respectively increased and decreased, and due to the influence of the light and thin demand and the gravity, the middle positions of the metal mask plate and the substrate have larger sagging amount compared with the edge positions, so that the metal mask plate and the substrate are different in curved surface structures. However, the magnetic plate is generally a planar structure, so that in the process of aligning the metal mask plate and the substrate, a gap exists between the metal mask plate and the substrate to a greater or lesser extent, and during the film formation process, the evaporation material may seep out from the gap to form an expanded region larger than the original opening pattern, i.e. a Shadow effect (Shadow effect) occurs. And the flagging of metal mask plate still can arouse the fold problem of mask plate, not only can reduce metal mask plate's life, and the organic membrane pattern of coating by vaporization can appear unusually moreover.

SUMMERY OF THE UTILITY MODEL

Therefore, an evaporation device is needed to be provided for solving the problems that in the prior art, the middle of a target substrate and a metal mask plate sags, the shadow effect and the metal mask plate wrinkles occur, the service life of the metal mask plate is influenced, and the evaporation pattern is abnormal.

To achieve the above object, the present inventors provide an evaporation apparatus comprising:

a heating crucible for heating and evaporating the evaporation material;

the magnetic plate is positioned above the heating crucible, has magnetism and is used for fixing a target substrate to be evaporated;

more than two magnetic objects are arranged in the magnetic plate, and the magnetism of the magnetic plate is gradually reduced from the middle to the edge.

Furthermore, the magnetic object is an electromagnet, and the electromagnet comprises an iron core and a conductive coil wound on the surface of the iron core.

Further, the iron core is soft iron or silicon steel.

Furthermore, from the middle part to the edge of the magnetic plate, the conducting current of the electromagnet or the number of turns of the conductive coil wound in unit length is reduced progressively, so that the magnetism of the magnetic plate is reduced progressively from the middle part to the edge.

Furthermore, the electromagnets are arranged in a matrix type in a row and a column in the magnetic plate.

Further, the device also comprises a contact plate which is arranged on the lower surface of the magnetic plate and is used for contacting with the target substrate.

Furthermore, the device also comprises a metal mask plate, wherein the metal mask plate is arranged below the target substrate, and evaporation patterns are hollowed on the metal mask plate.

Be different from prior art, the magnetism of magnetic sheet is steadilyd decrease to the edge by the middle part in above-mentioned technical scheme's the coating by vaporization device to suction to target substrate middle part is greater than the edge, reduces target substrate's the fold with metal mask plate that slides, can improve the laminating degree of metal mask plate and base plate, not only avoids the coating by vaporization organic membrane pattern unusual, is favorable to reducing target substrate fragmentation risk moreover, improves the metal mask plate life-span, thereby effectively improve production efficiency, the quality and the production progress of product have been guaranteed.

Drawings

Fig. 1 is a schematic diagram illustrating a positional relationship between a magnetic plate, a contact plate, a target substrate, and a metal mask plate in the evaporation apparatus according to the embodiment;

FIG. 2 is a schematic view of an embodiment of the magnetic plate;

FIG. 3 is a schematic diagram of an embodiment of an electromagnet;

description of reference numerals:

10. a magnetic plate;

11. a magnetic substance;

111. an iron core;

112. a conductive coil;

20. a contact plate;

30. a target substrate;

40. a metal mask plate;

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1 to 3, the present embodiment provides an evaporation apparatus, which can be used for evaporation of different objects, particularly for evaporation of thin sheet-like objects such as OLED panels.

The evaporation device is the same as the existing evaporation machine, a cavity for evaporation is arranged in the evaporation machine, and a heating crucible and a magnetic plate for fixing a target substrate (namely an object to be evaporated) are arranged in the cavity. The heating crucible is used for containing an evaporation material and heating the evaporation material to evaporate the evaporation material; the magnetic plate is arranged above the heating crucible and used for fixing a target substrate, so that vapor generated by heating the evaporation material can be deposited on the target substrate. (since this part of the structure is the same as the prior art, which is not shown in FIGS. 1 to 3),

in the present embodiment, the magnetic plate is improved over the conventional vapor deposition apparatus, and as shown in fig. 1 and 2, two or more magnetic materials 11 are provided in the magnetic plate 10, and the magnetic properties of the magnetic plate 10 decrease from the center to the edge. When evaporation is performed, the target substrate 30 and the metal mask plate 40 are fixed below the magnetic plate 10 through the magnetism of the magnetic plate 10, and evaporation patterns are hollowed out on the metal mask plate 40, so that steam generated by heating can be deposited on the target substrate according to the evaporation patterns.

Because the magnetism in the middle part of the magnetic plate 10 is higher than the magnetism at the edge, so that the middle parts of the target substrate 30 and the metal mask plate 40 can provide larger adsorption force, the middle parts of the target substrate and the metal mask plate 40 can be prevented from drooping, the attaching degree of the target substrate 30 and the metal mask plate 40 is improved, evaporation materials are effectively prevented from expanding outwards, the risk of target substrate fragments is reduced, the service life of the metal mask plate is prolonged, the production efficiency is effectively improved, and the quality and the production progress of products are guaranteed.

Preferably, the magnetic substance 11 in the magnetic plate 10 may be an electromagnet, as shown in fig. 3, the electromagnet includes an iron core 111 and a conductive coil 112 wound around the outer periphery of the iron core 111, and the conductive coil generates a magnetic force by the magnetic force. In order to decrease the magnetism of the magnetic plate from the middle to the edge, the conduction current of the electromagnet or the number of turns of the conductive coil wound in unit length can be decreased from the middle to the edge of the magnetic plate. The iron core can be made of soft iron or silicon steel materials so as to enable the magnetic plate to have magnetism when being electrified and to be demagnetized immediately when being powered off. As shown in fig. 2, the electromagnets are arranged in a matrix array in the magnetic plate. Of course, in other embodiments, the electromagnets may be distributed in concentric circles of different diameters. In other embodiments, the magnetic object may be an object having magnetism other than an electromagnet.

In this embodiment, the electromagnet is selected in consideration of making the magnetism of the magnetic plate controllable, and the electromagnet may be connected with a switch for control, that is, on-off regulation of the magnetism of the magnetic plate. When using this coating by vaporization device to carry out the coating by vaporization to the OLED panel, can make target substrate 30 (OLED panel promptly) and metal mask plate 40 carry out the counterpoint with magnetic sheet 10 after, can make magnetic sheet 10 produce magnetism earlier all around to fixed target substrate 30's position, nevertheless more make magnetic sheet 10 middle part production magnetism, reduce because of counterpoint the skew that arouses after the pressfitting, thereby reduce the broken piece risk of target substrate.

As shown in fig. 1, the evaporation apparatus may further include a contact plate 20 disposed on a lower surface of the magnetic plate 10, i.e., between the target substrate 30 and the magnetic plate 10, for contacting the target substrate. The contact plate can improve heat dissipation of the target substrate 30 during the evaporation process and can ensure contact flatness of the target substrate 30.

In another embodiment, an OLED panel evaporation method is provided. This vapor deposition method uses the vapor deposition device described in the above embodiment to perform vapor deposition on an OLED panel (i.e., a target substrate). The OLED panel evaporation method comprises the following steps:

aligning the OLED panel to be evaporated with the magnetic plate of the evaporation device;

the magnetic materials in the magnetic plate sequentially generate magnetism from the edge to the middle part according to time so as to fix the OLED panel on the main magnetic plate;

and heating the evaporation material by a heating crucible to generate steam, evaporating the OLED panel, and evaporating and depositing the evaporation material on the target substrate.

When the OLED panel is aligned with the magnetic plate of the evaporation device, the OLED panel can be placed on the metal mask plate and aligned with the metal mask plate;

and then, enabling the OLED panel and the metal mask plate to approach the lower surface of the magnetic plate, and enabling the OLED panel and the metal mask plate to be aligned with the magnetic plate.

Because among the coating by vaporization device the magnetism in the middle part of magnetic sheet 10 is higher than the magnetism at edge, consequently can be for target substrate 30 and metal mask plate 40 middle part provide bigger adsorption affinity to can prevent that its middle part from flagging, improve target substrate 30 and metal mask plate 40's laminating degree, effectively prevent that coating by vaporization material from expanding outward, be favorable to reducing target substrate fragmentation risk moreover, improve the metal mask plate life-span, thereby effectively improve production efficiency, guaranteed the quality and the production progress of product.

The magnetic material in the magnetic plate 10 may be an electromagnet, and the electromagnet is selected in consideration of making the magnetism of the magnetic plate controllable. When the OLED panel is fixed to the main magnetic plate, after the target substrate 30 (i.e., the OLED panel) and the metal mask plate 40 are aligned with the magnetic plate 10, the periphery of the magnetic plate 10 can be magnetized first to fix the position of the target substrate 30, but the middle of the magnetic plate 10 is magnetized, so that the offset caused by alignment and pressing is reduced, and the risk of breaking the target substrate is reduced.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concepts of the present invention, the technical solutions of the present invention can be directly or indirectly applied to other related technical fields by making changes and modifications to the embodiments described herein, or by using equivalent structures or equivalent processes performed in the content of the present specification and the attached drawings, which are included in the scope of the present invention.

Claims

1. An evaporation apparatus, comprising:

a heating crucible for heating and evaporating the evaporation material;

more than two magnetic objects are arranged in the magnetic plate, and the magnetism of the magnetic plate is gradually reduced from the middle part to the edge;

the magnetic object is an electromagnet which comprises an iron core and a conductive coil wound on the surface of the iron core;

from the middle part to the edge of the magnetic plate, the conducting current of the electromagnet or the number of turns of the conductive coil wound in unit length is decreased progressively, so that the magnetism of the magnetic plate is decreased progressively from the middle part to the edge;

the electromagnet is connected with a switch, and the switch is used for controlling the periphery of the magnetic plate to generate magnetism firstly, and then the middle part of the magnetic plate generates magnetism.

2. The evaporation device according to claim 1, wherein the iron core is soft iron or silicon steel.

3. The vapor deposition apparatus according to claim 1, wherein the electromagnets are arranged in a matrix array in the magnetic plate.

4. The vapor deposition apparatus according to claim 1, further comprising a contact plate disposed on a lower surface of the magnetic plate for contacting the target substrate.

5. The evaporation device according to claim 1, further comprising a metal mask, wherein the metal mask is disposed below the target substrate, and evaporation patterns are hollowed on the metal mask.