CN113621935B - Winding coating method based on winding coating equipment - Google Patents
Winding coating method based on winding coating equipment Download PDFInfo
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- CN113621935B CN113621935B CN202110938710.9A CN202110938710A CN113621935B CN 113621935 B CN113621935 B CN 113621935B CN 202110938710 A CN202110938710 A CN 202110938710A CN 113621935 B CN113621935 B CN 113621935B
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- 238000000576 coating method Methods 0.000 title claims abstract description 127
- 239000011248 coating agent Substances 0.000 title claims abstract description 113
- 238000004804 winding Methods 0.000 title claims abstract description 45
- 238000004140 cleaning Methods 0.000 claims abstract description 176
- 238000001704 evaporation Methods 0.000 claims abstract description 148
- 230000008020 evaporation Effects 0.000 claims abstract description 148
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 15
- 230000007246 mechanism Effects 0.000 claims description 46
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 34
- 235000011089 carbon dioxide Nutrition 0.000 claims description 34
- 239000002245 particle Substances 0.000 claims description 31
- 238000007664 blowing Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 22
- 238000009413 insulation Methods 0.000 claims description 19
- 239000011229 interlayer Substances 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 11
- 239000007921 spray Substances 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 8
- 238000010926 purge Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 238000005422 blasting Methods 0.000 claims description 4
- 238000012423 maintenance Methods 0.000 claims description 4
- 230000001960 triggered effect Effects 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 230000000295 complement effect Effects 0.000 claims description 3
- 239000000110 cooling liquid Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000007888 film coating Substances 0.000 description 4
- 238000009501 film coating Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000004880 explosion Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
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- 238000002309 gasification Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
The invention discloses a winding coating method based on winding coating equipment, which mainly comprises the following steps: (1) Vacuumizing the vacuum chamber, and starting the evaporation source to perform vacuum coating when the vacuum degree reaches a set value, wherein the movable baffle is positioned at a coating shielding phase to shield and isolate an evaporation coating area from other areas; (2) When the vacuum coating is finished, firstly controlling one movable baffle to move from a coating shielding phase to an evaporation source shielding phase to cover an evaporation source with residual heat, and then controlling the other movable baffle to move from the coating shielding phase to a cleaning phase to clean; after the evaporation source is cooled, the movable baffle plate positioned in the evaporation source shielding phase is moved to a cleaning phase for cleaning; (3) After the movable baffle finishes cleaning, the movable baffle moves back to the coating shielding phase; the control system controls the starting of the evaporation source to carry out vacuum coating, or controls the evaporation source to be pulled out of the vacuum chamber to carry out filling of evaporation materials and then pushed back to the vacuum chamber, and then the evaporation source is started to carry out vacuum coating.
Description
Technical Field
The invention belongs to the technical field of winding vacuum coating, and particularly relates to a winding coating method based on winding coating equipment.
Background
In the winding evaporation coating production process, in order to prevent the high temperature generated in the evaporation process and the damage of the evaporation material to the flexible film outside the cooling protection range of the coating main roller, a baffle plate is usually arranged in the winding coating equipment to separate the evaporation coating area from other areas. However, in the vacuum coating process, when the evaporation source is started to perform evaporation coating on the flexible base film, evaporation materials with a certain thickness are adhered to the baffle plate, and when the adhered evaporation materials on the baffle plate reach a certain degree, the evaporation materials fall off due to internal stress or cold and hot impact, so that the coating environment is polluted, and the quality of a film product is further affected.
To avoid the above problems, it is generally necessary to periodically clean the baffle plate in the winding film plating equipment, or to provide a liner plate for the baffle plate to clean the liner plate. At present, in the single-chamber winding film plating machine with more applications, a fixed baffle plate is usually adopted or a lining plate is arranged for the fixed baffle plate, when the baffle plate or the lining plate is cleaned, the baffle plate or the lining plate is usually required to be detached from equipment, and the cleaning is carried out outside the winding film plating by adopting modes such as sand blasting, manual polishing or high-pressure gas blowing. Particularly in high-end multi-chamber winding vacuum coating equipment for producing an electrode layer of an automobile power battery, the traditional cleaning method can increase the possibility that a coating vacuum area and a coating core component are exposed to the atmosphere and polluted by the atmosphere, influence the quality stability of a film product, and is not beneficial to the implementation of high-end intelligent winding coating equipment for high-automatic production.
Disclosure of Invention
In order to solve the problems, the invention provides a winding coating method based on winding coating equipment, in the method, a movable baffle system of the winding coating equipment realizes the switching of different functions such as coating shielding, evaporation source shielding, online cleaning and the like under the control of a control system by moving the movable baffle between different phases, so that the winding coating equipment has a more compact structure, and on the other hand, the intelligent and automatic daily maintenance of the winding coating equipment can be realized, and the high automation of the equipment work can be realized. The method can carry out on-line cleaning of the movable baffle under the vacuum environment, has good cleaning effect, short cleaning period, no secondary pollution and low cleaning cost, and more importantly, can avoid the exposure of the vacuum coating area and the core coating component in the winding coating equipment to the atmosphere and the pollution of the atmosphere, thereby ensuring the quality stability of the film product.
The invention provides a winding coating method based on winding coating equipment, which mainly comprises a vacuum chamber, an evaporation source, a coating main roller, a movable baffle system, a control system and a vacuum system, wherein the movable baffle system comprises a movable baffle, a vertical moving mechanism, a transverse moving mechanism and a cleaning module; the two movable baffles are respectively positioned at two sides of the film plating main roller; a coating shielding phase, an evaporation source shielding phase and a cleaning phase are arranged in the vacuum chamber for the movable baffle plate.
The winding coating method mainly comprises the following steps:
(1) Vacuumizing the vacuum chamber through a vacuum system; when the vacuum degree in the vacuum chamber reaches a set value, starting the evaporation source to perform vacuum coating on the flexible film which passes through the coating main roller; when vacuum coating is performed, the movable baffle is positioned at the coating shielding phase which is positioned at the two sides of the coating main roller and is close to the coating main roller, and plays a role in shielding and isolating the evaporation coating area from other areas in the vacuum chamber;
(2) When the vacuum coating is finished, the evaporation source stops working, a control system firstly controls one movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source with residual heat, and then the control system controls the other movable baffle to move from the coating shielding phase to a cleaning phase for cleaning; after the evaporation source is cooled, the control system controls the movable baffle plate positioned in the shielding phase of the evaporation source to move to the cleaning phase for cleaning; the evaporation source shielding phase is positioned right above the evaporation source; the cleaning phase is positioned close to the cleaning module;
(3) After the movable baffle finishes cleaning, the movable baffle moves back to the coating shielding phase under the control of the control system; the control system controls the starting of the evaporation source to carry out vacuum coating according to the condition of the evaporation materials in the evaporation source, or controls the pulling of the evaporation source out of the vacuum chamber to carry out maintenance and the filling of the evaporation materials, then the evaporation source is pushed back to the vacuum chamber, and then the starting of the evaporation source is carried out.
The vertical moving mechanism comprises a guide rod and a vertical driving motor, the movable baffle is installed and fixed on a vertical sliding block which can slide along the guide rod, and the vertical driving motor can drive the movable baffle to move in the vertical direction; the transverse moving mechanism comprises a sliding rail and a transverse driving motor, the guide rod is arranged and fixed on a transverse sliding block which can slide along the sliding rail, and the transverse driving motor can drive the movable baffle to transversely move through driving the guide rod; the movable baffle can be respectively moved to a coating shielding phase, an evaporation source shielding phase or a cleaning phase under the control of the control system and the actions of the vertical moving mechanism and the horizontal moving mechanism. The movement of the movable baffle in the vertical direction and the transverse movement are both performed under the control of a control system of the winding coating equipment.
The lower surface of the movable baffle is an outwards convex arc-shaped curved surface; the cleaning action surface of the cleaning module is a concave arc-shaped curved surface which is complementary with the lower surface of the movable baffle; a nozzle array formed by a plurality of rows of nozzles is arranged on the cleaning action surface, and the orientation of the nozzles is the normal direction of the cleaning action surface; a row of purge nozzles are arranged at one end of the cleaning action surface, which is perpendicular to the arc-shaped curved surface bus, and a collecting tank is arranged at one end of the cleaning action surface, which is opposite to the row of purge nozzles; the four sides of the cleaning action surface are also provided with coamings, so that a relatively independent space is formed when the cleaning module cleans the movable baffle; and a dry ice supply source is arranged outside the vacuum chamber and connected with the cleaning module.
The cleaning module is positioned below the movable baffle; when the movable baffle is in a cleaning phase, a control system controls a cleaning module to clean attachments formed in the vacuum coating on the movable baffle on line in a vacuum environment; in the cleaning process, dry ice particles are sprayed to the lower surface of the movable baffle plate through a nozzle array on the cleaning action surface for cleaning, and cleaning products falling on the cleaning action surface are blown out through high-pressure gas blown out by a blowing nozzle to be collected in a collecting tank; the nozzle array sprays dry ice particles for cleaning and the blowing nozzle blows high-pressure gas for blowing and alternately carries out blowing; the dry ice particle blasting speed is not lower than 9m/s.
In the process of impacting the dry ice particles with the attachments on the surface of the movable baffle, the dry ice particles impact the attachments at a high speed, and the attachments are subjected to the kinetic energy impact and the low-temperature impact of the dry ice particles to cause surface embrittlement to generate cracks, so that the mechanical properties of the attachments are affected; the dry ice particles carry strong kinetic energy to impact cracks on the surface of the attachment, gasify at the moment of impact, expand by nearly thousand times in a few thousandths of a second to form micro-explosion, and strip the attachment from the surface of the movable baffle in a solid state form, so that the purpose of removing the attachment is achieved. The arc-shaped curved surface design of the lower surface of the movable baffle is a special design made in order to match with the cleaning process, the structure can enable the attachment layer to generate larger internal stress in the forming process of the lower surface of the movable baffle, and cracks are generated on the attachment when the movable baffle is cleaned by dry ice particles, so that the attachment layer is easy to peel off from the surface of the movable baffle. The cleaning action surface of the cleaning module is designed into an inward concave arc-shaped curved surface, so that the cleaning action surface is matched with the lower surface of the movable baffle to be cleaned, and the collection of solid attachments peeled off from the surface of the movable baffle is facilitated, the solid attachments are prevented from splashing everywhere when falling down, and the high-pressure gas blown by the blowing nozzle is facilitated to blow the solid attachments falling onto the cleaning action surface to the collecting tank along a blowing channel formed by the arc-shaped curved surface for collection.
The vertical moving mechanism comprises a cleaning limit switch; triggering a cleaning limit switch when the movable baffle moves downwards to a cleaning phase to enable the movable baffle to be positioned on the cleaning phase, and then cleaning the movable baffle by a cleaning module; when the movable baffle is in the cleaning phase, the distance between the lower surface of the movable baffle and the cleaning action surface is controlled within 35mm, and more preferably, the distance between the lower surface of the movable baffle and the cleaning action surface is controlled within 25 mm. According to the invention, through simulation and test verification researches, in the process of impacting the dry ice particles with attachments on the surface of the movable baffle, the dry ice particles carry kinetic energy to impact the surfaces of the attachments, so that cracks are generated in surface embrittlement, and micro-explosion is generated by instant gasification when the dry ice particles carry strong kinetic energy to impact the cracks on the surfaces of the attachments; the larger the kinetic energy carried by the dry ice particles during impact, the more the generation of cracks and severe micro-explosion can be increased, and the better the stripping effect of the attachments is. According to the invention, through simulation and test verification researches, when the dry ice particles are ejected from the ejection port to fly to a distance within 35mm, the dry ice particles can still maintain more than 80% of kinetic energy, and when the dry ice particles fly to a distance within 25mm, the dry ice particles can maintain more than 90% of kinetic energy. In the two flight distance ranges, the cleaning effect of the dry ice particles on the movable baffle plate is obviously improved. The flying distance of the dry ice particles exceeds 35mm, the kinetic energy carried by the dry ice particles for impact is greatly attenuated, and the cleaning effect on the movable baffle is also obviously reduced.
The vertical moving mechanism comprises a shielding limit switch; triggering a shielding limit switch when the movable baffle moves upwards to a coating shielding phase, so that the movable baffle is positioned on the coating shielding phase, and the movable baffle positioned on the coating shielding phase plays a role in shielding and isolating an evaporation coating area from other areas in the vacuum chamber; when the movable baffle is in a coating shielding phase, the gap between the edge of the movable baffle and the coating main roller is controlled within 2mm, and the gap forms a dynamic seal, so that shielding and heat insulation effects between an evaporation coating region and other regions in a vacuum chamber can be effectively realized, high temperature generated in the evaporation process and damage of an evaporation material to a flexible film outside the cooling protection range of the coating main roller are prevented, and pollution to a non-coating space in the evaporation process is prevented.
The vertical moving mechanism comprises a shielding limit switch; the transverse moving mechanism comprises a transverse moving limit switch I and a transverse moving limit switch II; when the movable baffle plate moves from the coating shielding phase to the evaporation source shielding phase, the trigger shielding limit switch is downwards moved firstly to stop the movement of the movable baffle plate in the vertical direction, then the transverse moving mechanism drives the movable baffle plate to transversely move, and when the movable baffle plate transversely moves to the evaporation source shielding phase, the trigger transverse moving limit switch II is triggered to position the movable baffle plate on the evaporation source shielding phase to shield and cover the evaporation source; when the movable baffle is in the evaporation source shielding phase, the distance between the lower surface of the movable baffle and the evaporation source is controlled within the range of 5-25 mm; when the movable baffle is shifted to the cleaning phase from the evaporation source shielding phase, the movable baffle is firstly transversely moved to trigger the first transverse movement limit switch to stop moving the movable baffle transversely, and then the vertical moving mechanism drives the movable baffle to move downwards to the cleaning phase.
The spray nozzle array sprays dry ice particles to clean and the blowing nozzle blows high-pressure gas to blow and alternately conduct once to form a cleaning working period, and the cleaning process comprises more than two cleaning working periods.
When the next vacuum coating is finished, the evaporation source stops working, the control system firstly controls the second movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source, and then controls the first movable baffle to move from the coating shielding phase to a cleaning phase for cleaning; after the evaporation source is cooled, the control system controls the second movable baffle plate positioned in the shielding phase of the evaporation source to move to the cleaning phase for cleaning.
In the winding film plating equipment, the evaporation source is arranged below the film plating main roller, cooling liquid is filled in the film plating main roller, and evaporation film plating is carried out when the flexible base film passes through the film plating main roller; the movable baffle system is positioned in the vacuum chamber; the evaporation source is in a drawer type structure, and the control system can control the evaporation source to be pulled out or pushed back to the vacuum chamber.
The movable baffle is internally provided with a heat insulation interlayer, the heat insulation interlayer can be selected from the structural forms of a vacuum heat insulation cavity, a gas heat insulation cavity, a metal alumina interlayer and the like, and the heat insulation interlayer can effectively help the movable baffle to realize shielding and heat insulation effects between an evaporation coating area and other areas in the vacuum chamber, so that the damage to the flexible film outside the cooling protection range of the coating main roller caused by high temperature and evaporation materials generated in the evaporation process is prevented. On the other hand, when the movable baffle is positioned in the evaporation source shielding phase to shield and cover the evaporation source with residual heat, the heat insulation interlayer is also beneficial to helping the movable baffle to play a role of heat insulation.
Drawings
FIG. 1 is a schematic view of a winding coating apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view showing another embodiment of the winding coating apparatus of the present invention;
fig. 3 is a schematic top view of a cleaning surface of the cleaning module according to the present invention.
Detailed Description
Embodiments of the present invention are further described below with reference to the accompanying drawings. It should be understood that the detailed description is intended to illustrate and explain the invention, and not to limit the invention.
FIG. 1 is a schematic view showing a structure of a winding coating apparatus according to an embodiment of the present invention, and as shown in the drawing, the present invention provides a winding coating apparatus, which mainly includes a vacuum chamber 10, an evaporation source 22, a coating main roller 3, a movable shutter system, a control system, and a vacuum system 27; the evaporation source 22 is arranged below the film coating main roller 3, cooling liquid is filled in the film coating main roller, and evaporation film coating is carried out when the flexible base film passes through the film coating main roller; the mobile baffle system is located within the vacuum chamber 10; the movable baffle system comprises a movable baffle, a vertical moving mechanism, a horizontal moving mechanism and a cleaning module; the number of the movable baffles is two, namely a movable baffle 1 and a movable baffle 2, which are respectively positioned at two sides of the film plating main roller 3; the number of vertical movement mechanisms, lateral movement mechanisms and cleaning modules is also 2, namely a vertical movement mechanism 4 and a vertical movement mechanism 5, a lateral movement mechanism 6 and a lateral movement mechanism 7, and a cleaning module 8 and a cleaning module 9. A coating shielding phase, an evaporation source shielding phase and a cleaning phase are arranged in the vacuum chamber 10 for the movable baffle plate; the movable baffle can respectively move in the vertical direction and in the transverse direction under the control of the control system under the action of the vertical moving mechanism and the transverse moving mechanism, and moves to a coating shielding phase, an evaporation source shielding phase or a cleaning phase; the cleaning module is positioned below the movable baffle, and when the movable baffle is in a cleaning phase, the cleaning module performs on-line cleaning on attachments formed in the vacuum coating on the movable baffle in a vacuum environment. The evaporation source 22 is of a drawer type structure, and the control system can control the evaporation source 22 to be pulled out of or pushed back into the vacuum chamber 10.
Taking the vertical moving mechanism 4 and the transverse moving mechanism 6 as examples, the vertical moving mechanism 4 comprises a guide rod 11 and a vertical driving motor 12, the movable baffle 1 is fixedly arranged on a vertical sliding block 13 which can slide along the guide rod 11, and the vertical driving motor 12 can drive the movable baffle 1 to move in the vertical direction; the transverse moving mechanism 6 comprises a slide rail 14 and a transverse driving motor 15, the guide rod 11 is arranged and fixed on a transverse sliding block which can slide along the slide rail 14, and the transverse driving motor 15 can drive the movable baffle 1 to transversely move through driving the guide rod 11. The movement of the movable baffle in the vertical direction and the transverse movement are both performed under the control of a control system of the winding coating equipment.
When the evaporation source stops working, the control system firstly controls one movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source with residual heat, and then controls the other movable baffle to move from the coating shielding phase to a cleaning phase to clean; after the evaporation source is cooled, the control system controls the movable baffle plate at the shielding phase of the evaporation source to move to the cleaning phase for cleaning. In the implementation state shown in fig. 2, the movable baffle 2 firstly moves from the coating shielding phase to the evaporation source shielding phase to shield and cover the evaporation source 22 with residual heat, and then the control system controls the movable baffle 1 to move from the coating shielding phase to the cleaning phase, and the cleaning module 8 cleans the movable baffle 1. After the evaporation source 22 is cooled, the control system controls the movable baffle plate 2 in the evaporation source shielding phase to move to the cleaning phase for cleaning.
The lower surface of the movable baffle is an outwards convex arc-shaped curved surface; the cleaning action surface of the cleaning module is a concave arc-shaped curved surface which is complementary with the lower surface of the movable baffle. Fig. 3 is a schematic top view of a cleaning surface of a cleaning module according to the present invention, in which a nozzle array composed of a plurality of rows of nozzles 17 is disposed on the cleaning surface 16 of the cleaning module, and the orientation of the nozzles is a normal direction of the cleaning surface 16; a row of purge nozzles 18 are provided on the cleaning action surface at the end perpendicular to the curved surface generatrix of the arc, and a collecting tank 19 is provided on the cleaning action surface at the end opposite to the row of purge nozzles.
The four sides of the cleaning action surface are also provided with coamings, so that a relatively independent space is formed when the cleaning module cleans the movable baffle; the outside of the vacuum chamber is also provided with a dry ice supply 28, which is connected to the cleaning module.
The cleaning phase is positioned close to the cleaning module; when the cleaning module cleans the movable baffle plate in a cleaning phase, dry ice particles are sprayed to the lower surface of the movable baffle plate through the nozzle array to clean the movable baffle plate, and cleaning products falling on a cleaning action surface are blown out through high-pressure gas blown out by the blowing nozzle to a collecting tank to be collected; the nozzle array sprays dry ice particles for cleaning and the blowing nozzle blows high-pressure gas for blowing and alternately carries out blowing; the dry ice particle blasting speed is not lower than 9m/s.
Taking the vertical moving mechanism 4 and the lateral moving mechanism 6 as examples, the vertical moving mechanism 4 includes a cleaning limit switch 20; triggering a cleaning limit switch 20 when the movable baffle 1 moves downwards to a cleaning phase to enable the movable baffle 1 to be positioned on the cleaning phase, and then cleaning the movable baffle 1 by a cleaning module 8; when the movable baffle is in the cleaning phase, the distance between the lower surface of the movable baffle and the cleaning action surface is controlled within 35mm, and more preferably, the distance between the lower surface of the movable baffle and the cleaning action surface is controlled within 25 mm. The coating shielding phases are positioned at the positions, close to the coating main roller, of the two sides of the coating main roller; the vertical movement mechanism 4 comprises a shielding limit switch 21; triggering a shielding limit switch 21 when the movable baffle 1 moves upwards to a coating shielding phase, so that the movable baffle 1 is positioned on the coating shielding phase, and the movable baffle positioned on the coating shielding phase plays a role in shielding and isolating an evaporation coating area from other areas in the vacuum chamber; when the movable baffle is in a coating shielding phase, the gap between the edge of the movable baffle and the main coating roller is controlled within 2 mm. In the implementation state of the winding coating equipment shown in fig. 1, the movable baffle 1 and the movable baffle 2 are both positioned on a coating shielding phase, and play a shielding and isolating role between an evaporation coating area and other areas in a vacuum chamber. The evaporation source shielding phase is located right above the evaporation source 22; the vertical movement mechanism 4 comprises a shielding limit switch 23; the transverse moving mechanism 6 comprises a transverse moving limit switch I24 and a transverse moving limit switch II 25; when the movable baffle 1 moves from a coating shielding phase to an evaporation source shielding phase, firstly, the trigger shielding limit switch 23 is moved downwards to stop the movement of the movable baffle 1 in the vertical direction, then the transverse moving mechanism 6 drives the movable baffle 1 to transversely move, and when the movable baffle 1 transversely moves to the evaporation source shielding phase, the trigger transverse moving limit switch II 25 is triggered to position the movable baffle 1 on the evaporation source shielding phase to shield and cover the evaporation source 22; when the movable baffle is in the evaporation source shielding phase, the distance between the lower surface of the movable baffle and the evaporation source is controlled within the range of 5-25 mm; when the movable baffle 1 is shifted to the cleaning phase from the evaporation source shielding phase, the movable baffle 1 is firstly transversely moved to trigger the transverse movement limit switch I24 to stop moving the movable baffle 1 transversely, and then the vertical moving mechanism 4 drives the movable baffle 1 to move downwards to the cleaning phase.
The movable baffle is internally provided with a heat insulation interlayer 26 which can be selected from a vacuum heat insulation cavity, a gas heat insulation cavity, a metal alumina interlayer and other structural forms.
The implementation process of the winding coating method mainly comprises the following steps:
(1) Vacuumizing the vacuum chamber through a vacuum system; when the vacuum degree in the vacuum chamber reaches a set value, starting the evaporation source to perform vacuum coating on the flexible film which passes through the coating main roller; when vacuum coating is performed, the movable baffle is positioned at the coating shielding phase which is positioned at the two sides of the coating main roller and is close to the coating main roller, and plays a role in shielding and isolating the evaporation coating area from other areas in the vacuum chamber;
(2) When the vacuum coating is finished, the evaporation source stops working, a control system firstly controls one movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source with residual heat, and then the control system controls the other movable baffle to move from the coating shielding phase to a cleaning phase for cleaning; after the evaporation source is cooled, the control system controls the movable baffle plate positioned in the shielding phase of the evaporation source to move to the cleaning phase for cleaning;
(3) After the movable baffle finishes cleaning, the movable baffle moves back to the coating shielding phase under the control of the control system; the control system controls the starting of the evaporation source to carry out vacuum coating according to the condition of the evaporation materials in the evaporation source, or controls the pulling of the evaporation source out of the vacuum chamber to carry out maintenance and the filling of the evaporation materials, then the evaporation source is pushed back to the vacuum chamber, and then the starting of the evaporation source is carried out.
The cleaning module is positioned below the movable baffle; when the movable baffle is in a cleaning phase, the control system controls the cleaning module to clean attachments on the movable baffle on line in a vacuum environment; in the cleaning process, dry ice particles are sprayed to the lower surface of the movable baffle plate through a nozzle array on the cleaning action surface for cleaning, and cleaning products falling on the cleaning action surface are blown out through high-pressure gas blown out by a blowing nozzle to be collected in a collecting tank; the nozzle array sprays dry ice particles for cleaning and the blowing nozzle blows high-pressure gas for blowing and alternately carries out blowing; the dry ice particle blasting speed is not lower than 9m/s. The spray nozzle array sprays dry ice particles to clean and the blowing nozzle blows high-pressure gas to blow and alternately conduct once to form a cleaning working period, and the cleaning process comprises more than two cleaning working periods.
When the next vacuum coating is finished, the evaporation source stops working, the control system firstly controls the second movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source, and then controls the first movable baffle to move from the coating shielding phase to a cleaning phase for cleaning; after the evaporation source is cooled, the control system controls the second movable baffle plate positioned in the shielding phase of the evaporation source to move to the cleaning phase for cleaning.
Claims (5)
1. The winding coating method based on the winding coating equipment mainly comprises a vacuum chamber, an evaporation source, a coating main roller, a movable baffle system, a control system and a vacuum system, wherein the movable baffle system comprises two movable baffles, a vertical moving mechanism, a horizontal moving mechanism and a cleaning module; a cooling liquid is filled in the film plating main roller; the evaporation source is of a drawer type structure; the winding coating method mainly comprises the following steps:
(1) Vacuumizing the vacuum chamber through a vacuum system; when the vacuum degree in the vacuum chamber reaches a set value, starting the evaporation source to perform vacuum coating on the flexible film which passes through the coating main roller; when vacuum coating is performed, the movable baffle is positioned at the coating shielding phase which is positioned at the two sides of the coating main roller and is close to the coating main roller, and plays a role in shielding and isolating the evaporation coating area from other areas in the vacuum chamber;
(2) When the vacuum coating is finished, the evaporation source stops working, a control system firstly controls one movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source with residual heat, and then the control system controls the other movable baffle to move from the coating shielding phase to a cleaning phase for cleaning; after the evaporation source is cooled, the control system controls the movable baffle plate positioned in the shielding phase of the evaporation source to move to the cleaning phase for cleaning; the evaporation source shielding phase is positioned right above the evaporation source; the cleaning phase is positioned close to the cleaning module;
(3) After the movable baffle finishes cleaning, the movable baffle moves back to the coating shielding phase under the control of the control system; the control system controls the starting of the evaporation source to carry out vacuum coating according to the condition of the evaporation materials in the evaporation source, or controls the pulling of the evaporation source out of the vacuum chamber to carry out maintenance and the filling of the evaporation materials, then the evaporation source is pushed back to the vacuum chamber, and then the starting of the evaporation source is carried out for vacuum coating;
the vertical moving mechanism comprises a guide rod and a vertical driving motor, the movable baffle is installed and fixed on a vertical sliding block which can slide along the guide rod, and the vertical driving motor can drive the movable baffle to move in the vertical direction; the transverse moving mechanism comprises a sliding rail and a transverse driving motor, the guide rod is arranged and fixed on a transverse sliding block which can slide along the sliding rail, and the transverse driving motor can drive the movable baffle to transversely move through driving the guide rod; the movable baffle can respectively move to a coating shielding phase, an evaporation source shielding phase or a cleaning phase under the action of the vertical moving mechanism and the horizontal moving mechanism;
the lower surface of the movable baffle is an outwards convex arc-shaped curved surface; the cleaning action surface of the cleaning module is a concave arc-shaped curved surface which is complementary with the lower surface of the movable baffle; a nozzle array formed by a plurality of rows of nozzles is arranged on the cleaning action surface, and the orientation of the nozzles is the normal direction of the cleaning action surface; a row of purge nozzles are arranged at one end of the cleaning action surface, which is perpendicular to the arc-shaped curved surface bus, and a collecting tank is arranged at one end of the cleaning action surface, which is opposite to the row of purge nozzles; the outside of the vacuum chamber is also provided with a dry ice supply source which is connected with the cleaning module; the cleaning module is positioned below the movable baffle; when the movable baffle is in a cleaning phase, the control system controls the cleaning module to clean attachments on the movable baffle on line in a vacuum environment; in the cleaning process, dry ice particles are sprayed to the lower surface of the movable baffle through a nozzle array on the cleaning action surface for cleaning; when the movable baffle is positioned on the cleaning phase, the distance between the lower surface of the movable baffle and the cleaning action surface is controlled within 25 mm;
the vertical moving mechanism comprises a shielding limit switch; triggering a shielding limit switch when the movable baffle moves upwards to a coating shielding phase, so that the movable baffle is positioned on the coating shielding phase; when the movable baffle is in a coating shielding phase, the gap between the edge of the movable baffle and the coating main roller is controlled within 2mm, and the gap forms a dynamic seal, so that shielding and heat insulation effects between an evaporation coating region and other regions in a vacuum chamber can be effectively realized, and the damage of high temperature and evaporation materials generated in the evaporation process to a flexible film outside the cooling protection range of the coating main roller is prevented;
when the next vacuum coating is finished, the evaporation source stops working, the control system firstly controls the second movable baffle to move from a coating shielding phase to an evaporation source shielding phase to shield and cover the evaporation source, and then controls the first movable baffle to move from the coating shielding phase to a cleaning phase for cleaning; after the evaporation source is cooled, the control system controls the second movable baffle plate positioned in the shielding phase of the evaporation source to move to the cleaning phase for cleaning;
the movable baffle is internally provided with a heat insulation interlayer, the heat insulation interlayer is one of a vacuum heat insulation cavity, a gas heat insulation cavity and a metal alumina interlayer structure, the heat insulation interlayer helps the movable baffle to realize shielding and heat insulation effects between an evaporation coating area and other areas in the vacuum chamber, and high temperature generated in the evaporation process and damage of evaporation materials to a flexible film outside the cooling protection range of a coating main roller are prevented.
2. The winding coating method based on the winding coating device according to claim 1, wherein: in the cleaning process, the high-pressure gas blown out by the blowing nozzle blows the cleaning product falling on the cleaning action surface to a collecting tank for collection; the nozzle array sprays dry ice particles for cleaning and the blowing nozzle blows high-pressure gas for blowing and alternately carries out blowing; the dry ice particle blasting speed is not lower than 9m/s.
3. The winding coating method based on the winding coating device according to claim 1, wherein: the vertical moving mechanism comprises a cleaning limit switch; when the movable baffle moves downwards to the cleaning phase, the cleaning limit switch is triggered, so that the movable baffle is positioned on the cleaning phase, and then the cleaning module cleans the movable baffle.
4. The winding coating method based on the winding coating device according to claim 1, wherein: the vertical moving mechanism comprises a shielding limit switch; the transverse moving mechanism comprises a transverse moving limit switch I and a transverse moving limit switch II; when the movable baffle plate moves from the coating shielding phase to the evaporation source shielding phase, the trigger shielding limit switch is downwards moved firstly to stop the movement of the movable baffle plate in the vertical direction, then the transverse moving mechanism drives the movable baffle plate to transversely move, and when the movable baffle plate transversely moves to the evaporation source shielding phase, the trigger transverse moving limit switch II is triggered to position the movable baffle plate on the evaporation source shielding phase to shield and cover the evaporation source; when the movable baffle is in the evaporation source shielding phase, the distance between the lower surface of the movable baffle and the evaporation source is controlled within the range of 5-25 mm; when the movable baffle is shifted to the cleaning phase from the evaporation source shielding phase, the movable baffle is firstly transversely moved to trigger the first transverse movement limit switch to stop moving the movable baffle transversely, and then the vertical moving mechanism drives the movable baffle to move downwards to the cleaning phase.
5. The winding coating method based on the winding coating device according to claim 2, wherein: the spray nozzle array sprays dry ice particles to clean and the blowing nozzle blows high-pressure gas to blow and alternately conduct once to form a cleaning working period, and the cleaning process comprises more than two cleaning working periods.
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| JP4703392B2 (en) * | 2005-12-20 | 2011-06-15 | トッキ株式会社 | Vapor deposition equipment |
| CN1970176A (en) * | 2006-12-08 | 2007-05-30 | 上海松下等离子显示器有限公司 | Dry ice cleaning method for apparatus of coating by vaporization |
| WO2017194098A1 (en) * | 2016-05-10 | 2017-11-16 | Applied Materials, Inc. | Methods of operating a deposition apparatus, and deposition apparatus |
| CN206089791U (en) * | 2016-10-10 | 2017-04-12 | 布勒莱宝光学设备（北京）有限公司 | Coating machine and evaporation source and auxiliary source that can change baffle automatically shelter from device thereof |
| KR20180051205A (en) * | 2016-11-08 | 2018-05-16 | 주식회사 선익시스템 | Shutter Combination nozzle cleaning device of deposition equipment |
| CN206599604U (en) * | 2017-02-17 | 2017-10-31 | 郑州华翔电子信息技术有限公司 | A kind of coating machine of automatic actual displacement |
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| WO2021052595A1 (en) * | 2019-09-19 | 2021-03-25 | Applied Materials, Inc. | Method of operating an evaporation source, evaporation system, and shield handling apparatus |
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