CN108982070B - 用于检测调制传递函数以及使光学系统对中的设备 - Google Patents

用于检测调制传递函数以及使光学系统对中的设备 Download PDF

Info

Publication number
CN108982070B
CN108982070B CN201810554073.3A CN201810554073A CN108982070B CN 108982070 B CN108982070 B CN 108982070B CN 201810554073 A CN201810554073 A CN 201810554073A CN 108982070 B CN108982070 B CN 108982070B
Authority
CN
China
Prior art keywords
optical system
centering
optical
measuring device
mtf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810554073.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN108982070A (zh
Inventor
尤金·杜米特雷斯库
帕特里克·兰格哈宁伯格
爱丽丝·埃里克森
亚历山大·巴伊
西蒙·齐利安
艾可·鲁普雷希特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trioptics GmbH
Original Assignee
Trioptics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trioptics GmbH filed Critical Trioptics GmbH
Priority to CN202210258826.2A priority Critical patent/CN114518220B/zh
Publication of CN108982070A publication Critical patent/CN108982070A/zh
Application granted granted Critical
Publication of CN108982070B publication Critical patent/CN108982070B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00951—Measuring, controlling or regulating
    • B29D11/0098—Inspecting lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ophthalmology & Optometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
CN201810554073.3A 2017-06-02 2018-06-01 用于检测调制传递函数以及使光学系统对中的设备 Active CN108982070B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210258826.2A CN114518220B (zh) 2017-06-02 2018-06-01 用于检测调制传递函数以及使光学系统对中的设备

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17174143.2 2017-06-02
EP17174143.2A EP3410091B1 (de) 2017-06-02 2017-06-02 Verfahren zum erfassen einer modulations-transferfunktion und einer zentrierung eines optischen systems

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202210258826.2A Division CN114518220B (zh) 2017-06-02 2018-06-01 用于检测调制传递函数以及使光学系统对中的设备

Publications (2)

Publication Number Publication Date
CN108982070A CN108982070A (zh) 2018-12-11
CN108982070B true CN108982070B (zh) 2022-03-15

Family

ID=59053920

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201810554073.3A Active CN108982070B (zh) 2017-06-02 2018-06-01 用于检测调制传递函数以及使光学系统对中的设备
CN202210258826.2A Active CN114518220B (zh) 2017-06-02 2018-06-01 用于检测调制传递函数以及使光学系统对中的设备

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202210258826.2A Active CN114518220B (zh) 2017-06-02 2018-06-01 用于检测调制传递函数以及使光学系统对中的设备

Country Status (5)

Country Link
US (1) US10942087B2 (enExample)
EP (1) EP3410091B1 (enExample)
JP (2) JP7160564B2 (enExample)
CN (2) CN108982070B (enExample)
PL (1) PL3410091T3 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210145439A (ko) * 2020-05-25 2021-12-02 삼성전기주식회사 장착 구조물 및 이를 구비하는 검사 장치
CN113970423A (zh) * 2020-07-23 2022-01-25 欧菲影像技术（广州）有限公司 用于光学镜头的mtf检测装置及检测方法
KR20220030515A (ko) * 2020-09-02 2022-03-11 삼성디스플레이 주식회사 해상력 측정 장치 및 그것을 이용한 해상력 측정 방법
CN112304574B (zh) * 2020-09-22 2022-11-01 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） 一种含有光学消旋组件的光学系统的像质测试装置及方法
DE102020125064A1 (de) * 2020-09-25 2022-03-31 Trioptics Gmbh MTF-Prüfgerät und dessen Verwendung
WO2022081370A1 (en) * 2020-10-15 2022-04-21 Applied Materials, Inc. In-line metrology systems, apparatus, and methods for optical devices
CN112285940B (zh) * 2020-10-29 2022-10-25 中国航空工业集团公司洛阳电光设备研究所 一种双视场镜头的光轴一致性装校方法
CN112507593B (zh) * 2020-12-16 2022-06-21 福州大学 一种振动对多孔径光学系统mtf影响的评价方法
DE102021102246A1 (de) * 2021-02-01 2022-08-04 Trioptics Gmbh Vorrichtung und Verfahren zum Messen einer optischen Eigenschaft eines optischen Systems
DE102021102354A1 (de) * 2021-02-02 2022-08-04 Trioptics Gmbh Messvorrichtung und Verfahren zum Vermessen einer Modulationstransferfunktion eines afokalen optischen Systems
DE102021105027A1 (de) * 2021-03-02 2022-09-08 Trioptics Gmbh Vorrichtung und Verfahren zum Messen von Abbildungseigenschaften eines optischen Systems
DE202021103431U1 (de) * 2021-06-28 2021-07-12 Trioptics Gmbh Vorrichtung zur Abbildung durch ein zu prüfendes optisches System und System zum Prüfen eines optischen Systems
JP7721379B2 (ja) * 2021-09-21 2025-08-12 キヤノン株式会社 光学装置、評価装置、評価方法、および光学系の製造方法
CN113702008B (zh) * 2021-09-22 2024-01-30 谷东科技有限公司 光学成像系统的像质检测方法及装置
CN116466461B (zh) * 2022-01-11 2025-07-29 东莞市宇瞳光学科技股份有限公司 镜片调整方法、装置、设备和存储介质
CN114813051A (zh) * 2022-04-21 2022-07-29 江西联益光学有限公司 基于逆投影mtf检测的镜头组装方法、装置及系统
CN118687819B (zh) * 2024-08-22 2024-11-15 江苏北方湖光光电有限公司 红外光学设备的多参数测量系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029735A1 (de) * 2004-06-21 2006-01-12 Trioptics Gmbh Verfahren zur Messung optischer Oberflächen innerhalb einer mehrlinsigen Anordnung
CN1877282A (zh) * 2005-06-07 2006-12-13 富士能株式会社 偏芯量测量方法
CN101650167A (zh) * 2008-08-13 2010-02-17 鸿富锦精密工业（深圳）有限公司 偏心检测装置
CN102483511A (zh) * 2009-08-11 2012-05-30 乙太精密有限公司 用于将透镜与光学系统对准的方法和设备
CN104204952A (zh) * 2012-03-23 2014-12-10 卡尔蔡司Smt有限责任公司 测量euv镜头的成像质量的测量系统
CN105675266A (zh) * 2016-02-03 2016-06-15 上海仪万光电科技有限公司 无限共轭光路测量光学镜头的调制传递函数的装置及方法
CN106768899A (zh) * 2017-03-28 2017-05-31 南京波长光电科技股份有限公司 一种用于镜片生产的mtf检测装置及检测镜片的方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06258181A (ja) * 1993-03-05 1994-09-16 Olympus Optical Co Ltd 偏心測定装置
ATE276510T1 (de) * 1998-03-27 2004-10-15 Leica Camera Ag Linsen-prüfgerät
JPH11304651A (ja) * 1998-04-17 1999-11-05 Asahi Optical Co Ltd レンズ検査方法
JP3730831B2 (ja) 2000-03-31 2006-01-05 パイオニア株式会社 収差測定装置及び調整装置
JP2003114166A (ja) 2001-10-04 2003-04-18 Olympus Optical Co Ltd 複合レンズの芯ずれ検知方法及び芯ずれ検知装置
JP2004028613A (ja) 2002-06-21 2004-01-29 Canon Inc レンズ系の偏心測定装置
JP3903948B2 (ja) * 2002-09-25 2007-04-11 ソニー株式会社 レンズ調芯機構、レンズ装置及び撮像装置
CN1306454C (zh) * 2003-11-06 2007-03-21 Ge医疗系统环球技术有限公司 调制传递函数测量方法和系统
JP2007093339A (ja) 2005-09-28 2007-04-12 Nikon Corp 検査装置
US7879089B2 (en) * 2006-05-17 2011-02-01 Alcon, Inc. Correction of higher order aberrations in intraocular lenses
JP2010281626A (ja) 2009-06-03 2010-12-16 Opto Device Corporation Co Ltd 光学特性検査装置
JP2011022355A (ja) * 2009-07-15 2011-02-03 Canon Inc 振れ補正装置、撮像装置、及び振れ補正装置の制御方法
US8395783B2 (en) * 2010-07-16 2013-03-12 Rudolph Technologies, Inc. System metrology core
US8760624B2 (en) * 2010-07-16 2014-06-24 Rudolph Technologies, Inc. System and method for estimating field curvature
JP2012078330A (ja) 2010-10-06 2012-04-19 Fujifilm Corp レンズ検査機のカメラユニット移動調整方法及びフォーカスチェック治具
US20140002674A1 (en) * 2012-06-30 2014-01-02 Pelican Imaging Corporation Systems and Methods for Manufacturing Camera Modules Using Active Alignment of Lens Stack Arrays and Sensors
US9420155B2 (en) * 2012-09-13 2016-08-16 Apple Inc. Compact optic design for digital image capture devices
DE102014001151A1 (de) 2014-01-31 2015-08-06 Trioptics GmbH optische Instrumente Messung der Positionen von Krümmungsmittelpunkten optischer Flächen eines mehrlinsigen optischen Systems
US10432927B2 (en) * 2014-09-30 2019-10-01 Ningbo Sunny Opotech Co., Ltd. 3D test chart, adjusting arrangement, forming method and adjusting method thereof
JP6484003B2 (ja) * 2014-11-05 2019-03-13 キヤノン株式会社 撮像装置およびその制御方法、および撮影光学系
EP3037800B1 (de) * 2014-12-24 2018-04-04 Trioptics GmbH Messung der Positionen von Krümmungsmittelpunkten optischer Flächen eines ein-oder mehrlinsigen optischen Systems
CN111796396B (zh) * 2015-12-24 2022-03-04 宁波舜宇车载光学技术有限公司 光学成像镜头及其透镜组
JP6561327B2 (ja) * 2016-03-10 2019-08-21 パナソニックＩｐマネジメント株式会社 光学検査装置、鏡筒の製造方法、および光学検査方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029735A1 (de) * 2004-06-21 2006-01-12 Trioptics Gmbh Verfahren zur Messung optischer Oberflächen innerhalb einer mehrlinsigen Anordnung
CN1877282A (zh) * 2005-06-07 2006-12-13 富士能株式会社 偏芯量测量方法
CN101650167A (zh) * 2008-08-13 2010-02-17 鸿富锦精密工业（深圳）有限公司 偏心检测装置
CN102483511A (zh) * 2009-08-11 2012-05-30 乙太精密有限公司 用于将透镜与光学系统对准的方法和设备
CN104204952A (zh) * 2012-03-23 2014-12-10 卡尔蔡司Smt有限责任公司 测量euv镜头的成像质量的测量系统
CN105675266A (zh) * 2016-02-03 2016-06-15 上海仪万光电科技有限公司 无限共轭光路测量光学镜头的调制传递函数的装置及方法
CN106768899A (zh) * 2017-03-28 2017-05-31 南京波长光电科技股份有限公司 一种用于镜片生产的mtf检测装置及检测镜片的方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Image Quality Testing Improves as Cameras Advance;Daniel Winters;《Photonics Spectra》;20140131;第48卷(第1期);第66页 *

Also Published As

Publication number Publication date
JP2022191392A (ja) 2022-12-27
CN114518220A (zh) 2022-05-20
JP2019049524A (ja) 2019-03-28
PL3410091T3 (pl) 2022-01-17
CN114518220B (zh) 2023-06-27
EP3410091A1 (de) 2018-12-05
JP7160564B2 (ja) 2022-10-25
US10942087B2 (en) 2021-03-09
CN108982070A (zh) 2018-12-11
JP7274032B2 (ja) 2023-05-15
EP3410091B1 (de) 2021-08-11
US20180348084A1 (en) 2018-12-06

Similar Documents

Publication Publication Date Title
CN108982070B (zh) 用于检测调制传递函数以及使光学系统对中的设备
JP2019049524A5 (enExample)
US11340136B2 (en) Apparatus for detecting a modulation transfer function and centering of an optical system
CN104040427A (zh) 用于测量摄像机的设备和方法
CN113702000A (zh) 一种光学成像镜头的像差检测系统及像差检测方法
JP5084327B2 (ja) 偏心検査装置及び偏心調整装置
CN113614617A (zh) 准直器
CN115839826B (zh) 用于光导纤维透过率及数值孔径的检测装置及检测方法
CN110888240A (zh) 一种Offner型光谱成像光学系统的快速装调方法
KR20050085408A (ko) 고체 촬상소자의 시험장치
TW202232074A (zh) 用於測定遠焦光學系統的調制轉換函數的量測設備與方法
JP2015222252A (ja) 光学素子の表面の偏心及び傾きを測定するための方法及び装置
CN110514407B (zh) 一种光学检测仪器及其检测方法和偏心调校方法
US20110134417A1 (en) Instrument and method for characterising an optical system
JP2001281101A (ja) 空間分解能により屈折力を決定するための装置および方法
CN114545645B (zh) 一种潜望式集成光路的装调方法
JP2024104297A (ja) 固有パラメータ較正システム
JP2024100010A (ja) 計測装置、計測方法、および光学系の製造方法
CN221484772U (zh) 可变物距光学检测系统
JP2007240168A (ja) 検査装置
WO2004057297A1 (en) Method and apparatus for automatic optical inspection
CN119246023B (zh) 非球面反射镜的光轴检测装置及方法
CN115102024B (zh) 可见光波段半导体激光器微透镜装调装置
CN114726995B (zh) 检测方法和检测系统
JP2020060480A (ja) 偏心量測定方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant