JP7160564B2 - 光学系の結像品質を検出する方法 - Google Patents

光学系の結像品質を検出する方法 Download PDF

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JP7160564B2
JP7160564B2 JP2018105752A JP2018105752A JP7160564B2 JP 7160564 B2 JP7160564 B2 JP 7160564B2 JP 2018105752 A JP2018105752 A JP 2018105752A JP 2018105752 A JP2018105752 A JP 2018105752A JP 7160564 B2 JP7160564 B2 JP 7160564B2
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optical system
centering
optical
centered
mtf
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JP2019049524A (ja
JP2019049524A5 (enExample
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ドゥミトレスク オイゲン
ランゲハンネンバーグ パトリック
エーリッヒセン イリス
バイ アレクサンダー
ツィリアン ジーモン
ループレヒト アイコ
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Trioptics GmbH
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Trioptics GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00951—Measuring, controlling or regulating
    • B29D11/0098—Inspecting lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ophthalmology & Optometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP2018105752A 2017-06-02 2018-06-01 光学系の結像品質を検出する方法 Active JP7160564B2 (ja)

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JP2022164598A JP7274032B2 (ja) 2017-06-02 2022-10-13 光学系の結像品質を検出する装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17174143.2 2017-06-02
EP17174143.2A EP3410091B1 (de) 2017-06-02 2017-06-02 Verfahren zum erfassen einer modulations-transferfunktion und einer zentrierung eines optischen systems

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JP2019049524A JP2019049524A (ja) 2019-03-28
JP2019049524A5 JP2019049524A5 (enExample) 2021-07-26
JP7160564B2 true JP7160564B2 (ja) 2022-10-25

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US (1) US10942087B2 (enExample)
EP (1) EP3410091B1 (enExample)
JP (2) JP7160564B2 (enExample)
CN (2) CN108982070B (enExample)
PL (1) PL3410091T3 (enExample)

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KR20210145439A (ko) * 2020-05-25 2021-12-02 삼성전기주식회사 장착 구조물 및 이를 구비하는 검사 장치
CN113970423A (zh) * 2020-07-23 2022-01-25 欧菲影像技术（广州）有限公司 用于光学镜头的mtf检测装置及检测方法
KR20220030515A (ko) * 2020-09-02 2022-03-11 삼성디스플레이 주식회사 해상력 측정 장치 및 그것을 이용한 해상력 측정 방법
CN112304574B (zh) * 2020-09-22 2022-11-01 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） 一种含有光学消旋组件的光学系统的像质测试装置及方法
DE102020125064A1 (de) * 2020-09-25 2022-03-31 Trioptics Gmbh MTF-Prüfgerät und dessen Verwendung
WO2022081370A1 (en) * 2020-10-15 2022-04-21 Applied Materials, Inc. In-line metrology systems, apparatus, and methods for optical devices
CN112285940B (zh) * 2020-10-29 2022-10-25 中国航空工业集团公司洛阳电光设备研究所 一种双视场镜头的光轴一致性装校方法
CN112507593B (zh) * 2020-12-16 2022-06-21 福州大学 一种振动对多孔径光学系统mtf影响的评价方法
DE102021102246A1 (de) * 2021-02-01 2022-08-04 Trioptics Gmbh Vorrichtung und Verfahren zum Messen einer optischen Eigenschaft eines optischen Systems
DE102021102354A1 (de) * 2021-02-02 2022-08-04 Trioptics Gmbh Messvorrichtung und Verfahren zum Vermessen einer Modulationstransferfunktion eines afokalen optischen Systems
DE102021105027A1 (de) * 2021-03-02 2022-09-08 Trioptics Gmbh Vorrichtung und Verfahren zum Messen von Abbildungseigenschaften eines optischen Systems
DE202021103431U1 (de) * 2021-06-28 2021-07-12 Trioptics Gmbh Vorrichtung zur Abbildung durch ein zu prüfendes optisches System und System zum Prüfen eines optischen Systems
JP7721379B2 (ja) * 2021-09-21 2025-08-12 キヤノン株式会社 光学装置、評価装置、評価方法、および光学系の製造方法
CN113702008B (zh) * 2021-09-22 2024-01-30 谷东科技有限公司 光学成像系统的像质检测方法及装置
CN116466461B (zh) * 2022-01-11 2025-07-29 东莞市宇瞳光学科技股份有限公司 镜片调整方法、装置、设备和存储介质
CN114813051A (zh) * 2022-04-21 2022-07-29 江西联益光学有限公司 基于逆投影mtf检测的镜头组装方法、装置及系统
CN118687819B (zh) * 2024-08-22 2024-11-15 江苏北方湖光光电有限公司 红外光学设备的多参数测量系统

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JP2004028613A (ja) 2002-06-21 2004-01-29 Canon Inc レンズ系の偏心測定装置
JP2007093339A (ja) 2005-09-28 2007-04-12 Nikon Corp 検査装置
JP2012078330A (ja) 2010-10-06 2012-04-19 Fujifilm Corp レンズ検査機のカメラユニット移動調整方法及びフォーカスチェック治具
DE102014001151A1 (de) 2014-01-31 2015-08-06 Trioptics GmbH optische Instrumente Messung der Positionen von Krümmungsmittelpunkten optischer Flächen eines mehrlinsigen optischen Systems
US20160187222A1 (en) 2014-12-24 2016-06-30 Trioptics Gmbh Measurement of the positions of centres of curvature of optical surfaces of a single- or multi-lens optical system

Also Published As

Publication number Publication date
JP2022191392A (ja) 2022-12-27
CN114518220A (zh) 2022-05-20
JP2019049524A (ja) 2019-03-28
PL3410091T3 (pl) 2022-01-17
CN114518220B (zh) 2023-06-27
EP3410091A1 (de) 2018-12-05
US10942087B2 (en) 2021-03-09
CN108982070B (zh) 2022-03-15
CN108982070A (zh) 2018-12-11
JP7274032B2 (ja) 2023-05-15
EP3410091B1 (de) 2021-08-11
US20180348084A1 (en) 2018-12-06

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