CN108883634B - 液滴沉积头 - Google Patents

液滴沉积头 Download PDF

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Publication number
CN108883634B
CN108883634B CN201680080523.9A CN201680080523A CN108883634B CN 108883634 B CN108883634 B CN 108883634B CN 201680080523 A CN201680080523 A CN 201680080523A CN 108883634 B CN108883634 B CN 108883634B
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CN
China
Prior art keywords
insulating layer
layer
inorganic insulating
depositing
deposition head
Prior art date
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Application number
CN201680080523.9A
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English (en)
Chinese (zh)
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CN108883634A (zh
Inventor
高松远
彼得·马迪洛维奇
约翰·菲利普·塔特姆
亚历山德鲁·卡扎库
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Xaar Technology Ltd
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Xaar Technology Ltd
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Publication of CN108883634A publication Critical patent/CN108883634A/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04505—Control methods or devices therefor, e.g. driver circuits, control circuits aiming at correcting alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04573—Timing; Delays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14225—Finger type piezoelectric element on only one side of the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/10—Finger type piezoelectric elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201680080523.9A 2016-01-28 2016-12-22 液滴沉积头 Active CN108883634B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662288287P 2016-01-28 2016-01-28
US62/288,287 2016-01-28
PCT/GB2016/054036 WO2017129933A1 (en) 2016-01-28 2016-12-22 Droplet deposition head

Publications (2)

Publication Number Publication Date
CN108883634A CN108883634A (zh) 2018-11-23
CN108883634B true CN108883634B (zh) 2020-08-25

Family

ID=56369694

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680080523.9A Active CN108883634B (zh) 2016-01-28 2016-12-22 液滴沉积头

Country Status (5)

Country Link
US (1) US10583651B2 (enExample)
JP (1) JP6921091B2 (enExample)
CN (1) CN108883634B (enExample)
GB (1) GB2546832B (enExample)
WO (1) WO2017129933A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020537188A (ja) * 2017-10-11 2020-12-17 アールト ユニバーシティ ファンデーション エスアール 物体の被膜
EP3567619B1 (en) * 2018-05-08 2020-11-25 Abiomed Europe GmbH Corrosion-resistant permanent magnet and intravascular blood pump comprising the magnet
EA202192852A1 (ru) * 2019-06-07 2022-03-23 ДжейТи ИНТЕРНЕШНЛ СА Влагомер
CN114835207B (zh) * 2022-05-12 2023-06-06 中国科学院生态环境研究中心 一种用于缓解电絮凝中极板钝化的极板修饰方法及应用

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2502747A (en) * 1946-07-26 1950-04-04 Pierce Renewable Fuses Inc Electric fuse
GB8824014D0 (en) 1988-10-13 1988-11-23 Am Int High density multi-channel array electrically pulsed droplet deposition apparatus
JPH06238897A (ja) * 1993-02-19 1994-08-30 Citizen Watch Co Ltd インクジェットプリンターヘッド
GB9318985D0 (en) 1993-09-14 1993-10-27 Xaar Ltd Passivation of ceramic piezoelectric ink jet print heads
JP3120638B2 (ja) * 1993-10-01 2000-12-25 ブラザー工業株式会社 インク噴射装置
US6254819B1 (en) * 1999-07-16 2001-07-03 Eastman Kodak Company Forming channel members for ink jet printheads
JP4395931B2 (ja) * 1999-08-25 2010-01-13 ブラザー工業株式会社 インク噴射装置のノズルプレートの製造方法
US20010052752A1 (en) 2000-04-25 2001-12-20 Ghosh Amalkumar P. Thin film encapsulation of organic light emitting diode devices
JP2002160364A (ja) * 2000-11-27 2002-06-04 Seiko Instruments Inc インクジェットヘッド
US6926572B2 (en) 2002-01-25 2005-08-09 Electronics And Telecommunications Research Institute Flat panel display device and method of forming passivation film in the flat panel display device
JP4223247B2 (ja) * 2002-08-12 2009-02-12 シャープ株式会社 有機絶縁膜の製造方法及びインクジェットヘッド
JP2004122684A (ja) * 2002-10-04 2004-04-22 Sharp Corp インクジェットヘッド及びその製造方法
GB0510991D0 (en) 2005-05-28 2005-07-06 Xaar Technology Ltd Method of printhead passivation
GB0602956D0 (en) * 2006-02-14 2006-03-29 Delphi Tech Inc Barrier coatings
WO2007093921A2 (en) * 2006-02-14 2007-08-23 Delphi Technologies, Inc. Barrier coatings for a piezoelectric device
JP4946499B2 (ja) * 2007-02-21 2012-06-06 コニカミノルタホールディングス株式会社 インクジェットヘッド
US8647722B2 (en) 2008-11-14 2014-02-11 Asm Japan K.K. Method of forming insulation film using plasma treatment cycles
JP4848028B2 (ja) * 2009-01-21 2011-12-28 東芝テック株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法
JP2010214895A (ja) * 2009-03-18 2010-09-30 Toshiba Tec Corp インクジェットヘッドおよびインクジェットヘッドの製造方法
JP2012192629A (ja) * 2011-03-16 2012-10-11 Toshiba Tec Corp インクジェットヘッドおよびインクジェットヘッドの製造方法
JP5708098B2 (ja) * 2011-03-18 2015-04-30 株式会社リコー 液体吐出ヘッド、液体吐出装置および画像形成装置
JP2013193447A (ja) * 2012-03-22 2013-09-30 Toshiba Tec Corp インクジェットヘッド
JP5988936B2 (ja) * 2013-09-04 2016-09-07 富士フイルム株式会社 撥水膜、成膜方法、ノズルプレート、インクジェットヘッド、及びインクジェット記録装置
KR102161692B1 (ko) 2013-12-06 2020-10-07 삼성디스플레이 주식회사 잉크젯 프린트 헤드 및 이의 제조 방법

Also Published As

Publication number Publication date
US20190030885A1 (en) 2019-01-31
US10583651B2 (en) 2020-03-10
GB201608902D0 (en) 2016-07-06
JP2019508285A (ja) 2019-03-28
JP6921091B2 (ja) 2021-08-18
WO2017129933A1 (en) 2017-08-03
GB2546832A (en) 2017-08-02
CN108883634A (zh) 2018-11-23
GB2546832B (en) 2018-04-18

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Address after: Cambridge County, England

Patentee after: XAAR TECHNOLOGY Ltd.

Address before: Britain Camb

Patentee before: XAAR TECHNOLOGY Ltd.