CN108816960B - Semiconductor photoetching plate cleaning device - Google Patents
Semiconductor photoetching plate cleaning device Download PDFInfo
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- CN108816960B CN108816960B CN201810611804.3A CN201810611804A CN108816960B CN 108816960 B CN108816960 B CN 108816960B CN 201810611804 A CN201810611804 A CN 201810611804A CN 108816960 B CN108816960 B CN 108816960B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
The invention relates to the field of semiconductor photoetching plate production, in particular to a cleaning device for a semiconductor photoetching plate. A semiconductor photoetching plate cleaning device comprises an outer cover frame assembly, a feeding mechanism, a rotating grabbing device, a positioning jacking conveying roller device, a first conveying roller device, a linear moving grabbing mechanism, a cleaning device and a second conveying roller device, wherein the feeding mechanism, the rotating grabbing device, the positioning jacking conveying roller device, the first conveying roller device, the linear moving grabbing mechanism, the cleaning device and the second conveying roller device are sequentially arranged in the outer cover frame assembly; the device adopts automatic feeding and washing, has improved abluent cleanliness factor degree of automation height, and batch processing ability is strong, can extensively be used for among the industrial production.
Description
Technical Field
The invention relates to the field of semiconductor photoetching plate production, in particular to a cleaning device for a semiconductor photoetching plate.
Background
Photolithography is a key process for fabricating semiconductor devices and integrated circuit micropattern structures. The process quality directly influences the parameter indexes of the device such as yield, reliability, device performance, service life and the like. The photomask is an important link in the photoetching process, the photoetching plate must be very clean, and all circuit elements on the silicon wafer come from the layout. If the reticle is dirty and contaminant particles are present, these particles can be transferred to the photoresist on the wafer surface, resulting in a degradation of device performance. However, the photolithography plate inevitably sticks to dust, photoresist and other contaminants during use, and the presence of these contaminants directly affects the photolithography effect. In order to ensure the cleanness of the photolithography mask, the photolithography mask must be cleaned periodically, and the cleaning effect is closely related to the cleaning process and the reasonable arrangement of the cleaning processes on the equipment.
The Chinese invention patent (publication No. CN 105590879A) discloses a full-automatic photoetching plate cleaning machine, which consists of a feeding and discharging unit, a cleaning unit, a turning unit, a photoetching plate transmission unit, a positioning unit, a liquid medicine supply and circulation unit and a temperature control unit. However, there is no disclosure of how this patent can achieve automated batch processing.
Disclosure of Invention
In order to solve the above technical problems, an object of the present invention is to provide a cleaning apparatus for a semiconductor reticle, which employs automatic feeding and cleaning, improves cleaning cleanliness, has high automation degree and high batch processing capability, and can be widely used in industrial production.
In order to achieve the purpose, the invention adopts the following technical scheme:
a semiconductor photoetching plate cleaning device comprises an outer cover frame assembly, a feeding mechanism, a rotating grabbing device, a positioning jacking conveying roller device, a first conveying roller device, a linear moving grabbing mechanism, a cleaning device and a second conveying roller device, wherein the feeding mechanism, the rotating grabbing device, the positioning jacking conveying roller device, the first conveying roller device, the linear moving grabbing mechanism, the cleaning device and the second conveying roller device are sequentially arranged in the outer cover frame assembly;
the feeding mechanism comprises a discharging seat, a roller way and a feeding trolley; the movable material placing seat is used for placing a photoetching plate to be processed, the bottom surface of the material placing seat is flat, a V-shaped material storage groove is arranged at the upper part of the material placing seat, and the discharging side of the V-shaped material storage groove is lower than the material leaning side; the roller way is arranged in roller way side plates at two sides, the roller way side plates are fixedly arranged on the frame, the roller way is mutually connected with the feeding trolley, and the discharging seat can move on the roller way and the feeding trolley; the tail end of the roller way is provided with a material seat locking device, and the outer side of the roller way is provided with a trolley locking device;
the rotary gripping device comprises a vacuum chuck device and a swing arm device; the vacuum sucker device comprises a vacuum connecting plate, vacuum sucker adjusting frames and vacuum suckers, wherein the vacuum connecting plate is fixedly connected with a plurality of vacuum sucker adjusting frames, a guide groove is formed above each vacuum sucker adjusting frame, the plurality of sucker adjusting frames are fixedly arranged on the guide grooves through adjusting nuts, a sucker connecting rod is fixedly arranged on a vacuum sucker mounting plate, and the bottom end of the sucker connecting rod is connected with the vacuum suckers; the swing arm device comprises a first motor, a second motor, rotary bearing seats, a rotary shaft and a swing arm, wherein the first motor is positioned at the uppermost part of the whole device and is fixedly installed on a rack; the sliding block is connected with a swing arm bracket, the swing arm bracket can move along with the up-and-down movement of the sliding block, and the lower part of the swing arm bracket is connected with a vacuum connecting plate;
the positioning, jacking and conveying roller device comprises a frame body, a conveying roller device, a grabbing and positioning device and a lifting and traversing device; the conveying roller device comprises side plates, transmission shafts and longitudinal rollers, wherein the two side plates are fixed on the frame body, a plurality of transmission shafts are transversely arranged between the two side plates side by side, each transmission shaft is connected with the longitudinal rollers in series, two edge blocking wheels are arranged between every two longitudinal rollers, a certain gap is formed between the two longitudinal rollers, a belt pulley is arranged at the end part of each transmission shaft, the first belt pulleys are in transmission connection with each other through a first belt, and a motor is arranged in transmission connection with the first belt; the grabbing and positioning device comprises a positioning plate, a movable plate and a poking frame, wherein the positioning plate and the movable plate are arranged below the transmission shaft, the positioning plate is fixedly connected with the frame body, two shafts are arranged between the positioning plate and the movable plate, the positioning plate is fixedly connected with the shafts, the movable plate is connected with the shafts through shaft sleeves, belt clamps are respectively arranged on two sides of the movable plate, each belt clamp is fixed on a second belt, and the second belt is erected on the second belt pulley and is provided with a motor in a transmission connection mode; the positioning plate and the moving plate are both provided with poking frames, each poking frame comprises a vertical rod, an upper rod and poking rods, the vertical rods are arranged at two ends of the positioning plate and the moving plate, the upper ends of the vertical rods are positioned above the longitudinal idler wheels, the upper rods are erected on the two vertical rods, a plurality of poking rods are arranged on the upper rods downwards, and the lower ends of the poking rods are positioned in transverse grooves of the longitudinal idler wheels; the lifting and transverse moving device comprises a cylinder fixing plate, a jacking cylinder, a guide rod, a connecting plate, a roller mounting strip and a transverse roller, wherein the cylinder fixing plate is fixedly arranged on the frame body, the jacking cylinder is fixed on the cylinder fixing plate, the connecting plate is connected with a piston rod of the jacking cylinder, the guide rod is arranged on the cylinder fixing plate through a shaft sleeve, the upper end of the guide rod is fixedly connected with the connecting plate, a plurality of roller mounting strips are transversely arranged on the connecting plate side by side, a plurality of roller supports are arranged on the roller mounting strip, the transverse roller is arranged on the roller supports, and when the jacking cylinder extends out, the transverse roller is convexly arranged above the longitudinal roller;
the linear moving grabbing mechanism comprises a vacuum chuck device, a linear moving transmission shaft, a lifting device, a longitudinal moving device and a sliding rail bottom plate; the vacuum sucker device of the linear moving grabbing mechanism and the vacuum sucker device of the rotating grabbing mechanism have the same structure; the upper side and the lower side of a sliding rail bottom plate are respectively provided with a sliding rail, the upper sliding rail and the lower sliding rail are respectively provided with a sliding block, the two sliding blocks on the upper side are opposite to the two sliding blocks on the lower side and are respectively provided with a lifting device, the middle part of the sliding rail bottom plate is provided with two transmission shafts on the upper side and the lower side, the two transmission shafts are respectively provided with a bearing connecting seat, one end of the first transmission shaft is connected with a motor, the bearing connecting seats are connected onto the first transmission shaft through shaft sleeves, the bearing connecting seats are connected onto the lifting devices to control the linear movement of the lifting devices, a through groove is formed in the sliding rail bottom plate corresponding to the first transmission shaft to facilitate the movement of the bearing connecting seats, the second transmission shaft is connected with another lifting; a motor is fixed below a side plate at the top of a base of the lifting device, a rotary lead screw is arranged in the base, the transmission shaft part of the motor and the rotary lead screw penetrate through a through hole of the side plate at the top, a synchronous belt wheel is respectively arranged on the transmission shaft of the motor and the rotary lead screw, the two synchronous belt wheels are connected through a belt, a guide rail connecting plate is arranged below the side plate at the top, the guide rail connecting plate is connected on the rotary lead screw through a bearing sleeve, guide rails are respectively arranged below two sides of the guide rail connecting plate, and two sliding blocks are arranged on each guide rail; the longitudinal moving part of the lifting device is fixedly connected with the bottoms of the two guide rails, the upper part of the connecting plate is provided with a motor, the motor is connected with a rotating shaft on the bottom surface of the connecting plate, the two sides of the rotating shaft are respectively provided with the guide rails, each guide rail is provided with a sliding block, the rotating shaft is provided with a shaft sleeve, and the sliding block and the shaft sleeve are connected on the vacuum connecting plate.
As a further improvement, material seat locking device include revolving cylinder and locking plate, revolving cylinder sets up the one end that is close to the equipment the inside at the roll table, and the one end of locking plate is installed on revolving cylinder, and during the irrotational, locking plate one side and roll table level still install proximity sensor by the revolving cylinder, and roll table curb plate both sides also respectively have a proximity sensor, and two stoppers are still equipped with by the revolving cylinder both sides.
As a further improvement, the trolley locking device comprises two cylinders, guide rods and a locking plate, a baffle fixedly arranged on the rack is arranged below one side of the roller way close to the outside, the two cylinders are arranged on the inner side of the baffle, the two guide rods are arranged beside the cylinders, the cylinders and the guide rods are jointly arranged on a cylinder mounting plate, the cylinder mounting plate is fixedly arranged on the rack through the two rods, and a trolley roller is arranged on each of the two rods; two windows are arranged at the other side of the baffle plate and correspond to the trolley rollers, and the trolley rollers are exposed through the windows; the locking plate is connected with a piston rod of the cylinder, a cross frame is arranged on the locking plate, and a groove for placing a cross beam is formed in the cross frame; one end of the feeding trolley is placed in a groove of the cross frame, an inserting plate is arranged on the cross frame, and the inserting plate can be locked with a cross beam on the feeding trolley when the air cylinder ascends.
Due to the adoption of the technical scheme, the device adopts automatic feeding and cleaning, improves the cleaning cleanliness, has high automation degree and strong batch processing capacity, and can be widely applied to industrial production.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a schematic diagram of an explosive structure according to an embodiment of the present invention.
Fig. 3 is an exploded view of the loading mechanism.
Fig. 4 is a schematic structural view of the swing arm device.
Fig. 5 is a schematic structural view of a vacuum chuck device.
Fig. 6 is a schematic structural view of the first positioning jacking conveying roller device.
Fig. 7 is a schematic structural view of the grasping and positioning device.
FIGS. 8 and 9 are schematic views of the construction of the lifting and traversing device.
Fig. 10 is an exploded view of the first linear motion capture device.
Fig. 11 and 12 are schematic structural views of the lifting device.
Fig. 13 is a schematic view of the exploded structure of the turnover mechanism.
Fig. 14 is an exploded view of the first dust-binding mechanism.
Fig. 15 is a schematic structural view of the upper tightening structure.
FIG. 16 is a schematic view of the upper dust extraction drawer.
Fig. 17 is a schematic structural view of a middle dust removal roller conveying drawer.
Detailed Description
The following describes a detailed embodiment of the present invention with reference to the accompanying drawings.
As shown in fig. 1 and 2, the production system for cleaning a semiconductor photolithography plate includes an outer cover frame assembly 1, and a feeding mechanism 3, a first rotary grabbing device 4, a first positioning jacking and conveying roller device 7, a first conveying roller device 15, a first linear moving grabbing mechanism 8, a first cleaning device 2, a second conveying roller device 11, a first dust-binding mechanism 9, a turnover mechanism 10, a third conveying roller device 17, a second cleaning device 12, a second linear moving grabbing mechanism 18, a fourth conveying roller device 23, a second dust-binding mechanism 19, a second positioning jacking and conveying roller device 24, a second rotary grabbing device 14 and a discharging mechanism 13 which are sequentially disposed in the outer cover frame assembly 1. The photoetching plate on the feeding mechanism 3 is placed to a first positioning jacking conveying roller device 7 through a first rotary grabbing device 4, the first positioning jacking conveying roller device 7 is connected with a first conveying roller device 15, the photoetching plate on the first conveying roller device 15 is placed to a first cleaning device 2 through a first linear moving grabbing mechanism 8 and is taken out and placed to a second conveying roller device 11 through the first linear moving grabbing mechanism 8, the second conveying roller device 11 is connected with a first dust sticking mechanism 9, the first dust sticking mechanism 9 is connected with a turnover mechanism 10, the turnover mechanism 10 is connected with a third conveying roller device 17, the photoetching plate on the third conveying roller device 17 is placed to a second cleaning device 2 through a second linear moving grabbing mechanism 8 and is taken out and placed to a fourth conveying roller device 23 through the second linear moving grabbing mechanism 8, the fourth conveying roller device 23 is connected with a second dust sticking mechanism 19, the second dust sticking mechanism 19 is connected with a second positioning jacking conveying roller device 24, and a photoetching plate on the second positioning jacking conveying roller device 24 is placed to the discharging mechanism 13 through the first rotary grabbing device 4.
As shown in fig. 2, the housing frame assembly 1 includes a housing 20, a warning light 21, and an internal frame 22. The outer cover 20 wraps the equipment to play a role in protecting and blocking dust; warning lamps 21 are provided at both ends of the apparatus for alarming in an emergency; the internal housing 22 is used to fixedly mount other devices. The outer cover is provided with a plurality of glass windows, so that the operation condition inside the outer cover can be observed from the outside, and the glass window is very convenient.
As shown in fig. 2 and 3, the feeding mechanism 3 and the discharging mechanism 13 both include a discharging seat 130, a roller table 131 and a feeding trolley 138, and the feeding mechanism 3 and the discharging mechanism 13 have the same structure but opposite moving directions. As shown in fig. 3, the movable material placing base 130 is used for placing a photolithography plate to be processed, the bottom surface of the material placing base 130 is flat, a V-shaped material storage tank is arranged at the upper part, and the discharging side of the V-shaped material storage tank is lower than the material leaning side; the roller way 131 is arranged in roller way side plates at two sides, the roller way side plates are fixedly arranged on the machine frame, the roller way 131 is mutually connected with the feeding trolley 138, and the discharging seat 130 can move on the roller way 131 and the feeding trolley 138; the tail end of the roller way 131 is provided with a material seat locking device, and the outer side of the roller way 131 is provided with a trolley locking device 137.
As shown in fig. 3, the material seat locking device includes a rotary cylinder 134 and a locking plate, the rotary cylinder 134 is disposed at one end of the roller way 131 close to the inside of the device, one end of the locking plate is mounted on the rotary cylinder 134, when the locking plate is not rotated, one side of the locking plate is horizontal to the roller way, a proximity sensor 132 is further mounted beside the rotary cylinder, two sides of the side plate of the roller way are respectively provided with a proximity sensor 132, and two limit stops 133 are further mounted beside the rotary cylinder 134. When a worker places the material placing seat 130 on the feeding trolley 138, the limit stop 133 limits the material placing seat 130 to move on the feeding trolley 138, the air cylinder 1301 drives the feeding trolley 138 to ascend, when the feeding trolley ascends to be horizontal to the roller way 131, the limit stop 133 is opened, the material placing seat 130 enters the roller way 131, when the proximity sensor 132 detects that the material placing seat 130 reaches a preset position, the limit block abuts against the material placing seat 130, the rotating air cylinder 134 rotates, and the material placing seat is fixed through the cam.
As shown in fig. 3, the trolley locking device 137 comprises two cylinders 1301, guide rods 137 and a locking plate 1304, a baffle fixedly mounted on the frame is arranged below one side of the roller way 131 close to the outside, the two cylinders 1301 are mounted on the inner side of the baffle, the two guide rods 137 are further arranged beside the cylinders 1301, the cylinders 1301 and the guide rods 137 are mounted on the cylinder mounting plate 1302 together, the cylinder mounting plate 1302 is fixedly mounted on the frame through the two rods, and one trolley roller 136 is mounted on each of the two rods; two windows are arranged at the other side of the baffle plate and correspond to the trolley rollers, and the trolley rollers are exposed through the windows; the locking plate 1304 is connected with a piston rod of the cylinder 1301, a cross frame 139 is arranged on the locking plate 1304, and a groove for placing a cross beam is arranged on the cross frame 139; one end of the feeding trolley 138 is placed in a groove of the cross frame 139, an inserting plate 1303 is arranged on the cross frame 139, and the inserting plate 1303 can be locked with a cross beam on the feeding trolley 138 when the air cylinder 1301 is lifted. After the feeding trolley 138 is butted with the roller way 131, the feeding trolley 138 can be locked with the roller way 131 through the trolley locking device 137.
As shown in fig. 2, the first rotary gripper device 4 and the second rotary gripper device are identical in structure and each include a vacuum chuck device 14 and a swing arm device.
As shown in fig. 5, the vacuum chuck device 14 includes a vacuum connecting plate 140, vacuum chuck adjusting frames 141 and vacuum chucks 142, the vacuum connecting plate 140 is fixedly connected to a plurality of vacuum chuck adjusting frames 141, a guide groove is disposed above each vacuum chuck adjusting frame 141, the plurality of chuck adjusting frames 141 are fixedly disposed on the guide groove through adjusting nuts, a chuck connecting rod 144 is fixedly mounted on the vacuum chuck mounting plate 143, and the bottom end of the chuck connecting rod 144 is connected to the vacuum chucks 142.
As shown in fig. 4, the swing arm device includes a first motor, a second motor 42, a rotary bearing seat 43, a rotary shaft 44 and a swing arm 48, the first motor is located at the uppermost part of the whole device and is fixedly installed on the frame, the first motor is connected with the rotary shaft 44 through a belt, two rotary bearing seats 43 are respectively installed at two ends of the rotary shaft 44, the rotary bearing seats 43 are fixed on the frame, the swing arm 48 is fixedly installed at the middle part of the rotary shaft 44, the second motor 42 is installed at the top end of the swing arm 48, a rotary lead screw 402 is connected below the second motor 42, two ends of the rotary lead screw 402 are installed on the swing arm 48 through two lead screw bearing seats 45, a track is fixed on one side of the swing arm 48 on the same straight line with the second motor 42, a sliding block 49 is arranged on the track, the sliding block 49 is connected with the rotary lead screw 402 through a driving connecting block 46, and when the rotary lead screw 402 rotates forwards or backwards, the sliding block 49 can be driven to move upwards and downwards; the sliding block 49 is connected with a swing arm bracket 401, the swing arm bracket 401 can move along with the up-and-down movement of the sliding block 49, and the lower part of the swing arm bracket 401 is connected with the vacuum connecting plate 140.
As shown in fig. 2 and 6, the first positioning jacking conveying roller device 7 and the second positioning jacking conveying roller device have the same structure, and both comprise a frame body 70, a conveying roller device 71, a grabbing positioning device 72 and a lifting traversing device 73.
As shown in fig. 6, the frame body 70 is fixed on the housing frame assembly 1, the conveying roller device 71 includes side plates 711, transmission shafts 712 and longitudinal rollers 713, the two side plates 711 are fixed on the frame body 70, the transmission shafts 712 are transversely arranged between the two side plates 711 side by side, each transmission shaft 712 is connected with a plurality of longitudinal rollers 713 in series, two edge blocking wheels 714 are arranged between every two longitudinal rollers 713, so that a certain gap is formed between the two longitudinal rollers 713, a first belt pulley is arranged at an end of each transmission shaft 712, the first belt pulleys are mutually connected in a transmission manner through a first belt, and a motor is arranged in the transmission connection of the first belt. The first conveying roller device 15, the second conveying roller device 11, the third conveying roller device 17 and the fourth conveying roller device 23 have the same structure as the conveying roller device 71.
As shown in fig. 7, the grabbing positioning device 72 includes a positioning plate 721, a moving plate 722 and a shifting frame 723, the positioning plate 721 and the moving plate 722 are both disposed below the transmission shaft 712, the positioning plate 721 is fixedly connected to the frame 70, two shafts 724 are disposed between the positioning plate 721 and the moving plate 722, the positioning plate 721 is fixedly connected to the shafts 724, the moving plate 722 is connected to the shafts 724 through bushings, belt clamps 725 are disposed on two sides of the moving plate 722, each belt clamp 725 is fixed to a second belt 726, and the second belt 726 is mounted on the second belt pulley and is provided with a motor 727 in a transmission connection; the positioning plate 721 and the moving plate 722 are both provided with a poking frame 723, the poking frame 723 comprises upright posts 728, upper rods 729 and poking rods 730, the upright posts 728 are arranged at two ends of the positioning plate 721 and the moving plate 722, the upper ends of the upright posts 728 are positioned above the longitudinal rollers 713, the upper rods 729 are erected on the two upright posts 728, the upper rods 729 are downwards provided with a plurality of poking rods 730, and the lower ends of the poking rods 730 are positioned in the transverse grooves of the longitudinal rollers 713.
As shown in fig. 8 and 9, the lifting and traversing device includes a cylinder fixing plate 731, a jacking cylinder 732, a guide rod 733, a connecting plate 734, a roller mounting bar 735, and a transverse roller 736, the cylinder fixing plate 731 is fixedly disposed on the frame body 70, the jacking cylinder 732 is fixed on the cylinder fixing plate 731, the connecting plate 734 is connected to a piston rod of the jacking cylinder 732, the guide rod 733 is disposed on the cylinder fixing plate 731 through a shaft sleeve, an upper end of the guide rod 733 is fixedly connected to the connecting plate 734, the roller mounting bars 735 are disposed on the connecting plate 734 in a transverse side-by-side manner, a plurality of roller brackets 737 are disposed on the roller mounting bar 735, the transverse roller 736 is disposed on the roller bracket 737, and when the jacking cylinder 732 extends, the transverse roller 736 is protruded above the longitudinal roller 713.
The photoetching plate is grabbed onto the first positioning jacking conveying roller device 7 through the first rotary grabbing device 4, the lifting traversing device is lifted, the photoetching plate can transversely move on the transverse roller 736, then the photoetching plate is moved to a proper position by the grabbing positioning device 72, so that the grabbing of the grabbing mechanism 8 is conveniently carried out by the first linear movement, and the position of the photoetching plate can be adjusted by the second positioning jacking conveying roller device, so that the unloading mechanism 13 is grabbed by the second rotary grabbing device.
As shown in fig. 2 and 10, the first linear moving gripper mechanism 8 and the second linear moving gripper mechanism have the same structure, and the first linear moving gripper mechanism 8 includes a vacuum chuck device 14, a linear moving transmission shaft, a lifting device 80, a longitudinal moving device, and a slide rail bottom plate 81.
As shown in fig. 10, the upper and lower sides of the sliding rail bottom plate 81 are respectively provided with a sliding rail 82, the upper and lower sliding rails 82 are respectively provided with 4 sliding blocks 83, the two sliding blocks on the upper side are respectively provided with a lifting device 80 facing the two sliding blocks on the lower side, the middle part of the sliding rail bottom plate 81 is provided with two transmission shafts up and down, the two transmission shafts are respectively provided with a bearing connecting seat, one end of the first transmission shaft 85 is connected with a motor 84, the bearing connecting seat 86 is connected with the first transmission shaft 85 through a shaft sleeve, the bearing connecting seat 86 is connected with the lifting device 80 to control the linear movement of the lifting device 80, the sliding rail bottom plate 81 corresponding to the first transmission shaft 85 is provided with a through groove to facilitate the movement of the bearing connecting seat 86, the second transmission shaft 88 is connected with another lifting device, the motor 87 and the motor 84. As shown in fig. 11 and 12, a motor 801 is fixed below a top side plate of a base 89 of the lifting device 80, a rotary lead screw 805 is installed inside the base 89, a transmission shaft portion of the motor 801 and the rotary lead screw 805 penetrate through a through hole of the top side plate, a transmission shaft of the motor 801 and the rotary lead screw 805 are respectively provided with a synchronous pulley, the two synchronous pulleys are connected through a belt, a guide rail connecting plate is arranged below the top side plate, the guide rail connecting plate is connected to the rotary lead screw 805 through a bearing sleeve, guide rails 803 are respectively installed below two sides of the guide rail connecting plate, and two sliders 804 are installed on each guide rail 803; the longitudinal moving part 806 of the lifting device 80 is fixedly connected with the bottoms of the two guide rails, the upper part of the connecting plate 806 is provided with a motor 807, the motor 807 is connected with a rotating shaft 809 at the bottom surface of the connecting plate 806, two sides of the rotating shaft 809 are respectively provided with the guide rails 810, each sliding rail 810 is provided with a sliding block 811, the rotating shaft 809 is provided with a shaft sleeve 808, and the sliding block 811 and the shaft sleeve 808 are connected on the vacuum connecting plate 140.
The first cleaning device 2 and the second cleaning device 12 adopt conventional cleaning devices, the photoetching plate is grabbed by the first linear moving grabbing mechanism 8 and the second linear moving grabbing mechanism and placed into the first cleaning device 2 and the second cleaning device 12 for cleaning, and after cleaning is completed, the photoetching plate is grabbed by the first linear moving grabbing mechanism 8 and the second linear moving grabbing mechanism and enters a subsequent process.
As shown in fig. 2 and 14, the first dust-binding mechanism 9 and the second dust-binding mechanism have the same structure, and each of the first dust-binding mechanism and the second dust-binding mechanism includes an outer housing, an upper mounting plate 91, an upper tightening structure 92, an upper dust-removing drawer 93, a middle dust-removing roller conveying drawer 94, a lower dust-removing drawer 95 and a lower tightening mechanism 96, the upper mounting plate 91 is disposed at the upper part of the outer housing, a drawer opening is disposed on the outer housing, the upper dust-removing drawer 93, the middle dust-removing roller conveying drawer 94 and the lower dust-removing drawer 95 are respectively disposed in the drawer opening, and the upper dust-removing drawer 93, the middle dust-removing roller conveying drawer 94 and the lower dust-removing drawer 95 are respectively connected with the; the upper tightening structure 92 and the lower tightening mechanism 96 have the same structure, the upper dust removal drawer 93 and the lower dust removal drawer 95 have the same structure, the upper tightening structure 92 is arranged at the upper part of the upper dust removal drawer 93, and the lower tightening mechanism 96 is arranged at the lower part of the lower dust removal drawer 95.
As shown in fig. 15, last tight structure 92 in top and tight mechanism 96 in lower top include tight cylinder 921 in top, cylinder installation pole 922 and the tight strip 923 in top respectively, two cylinder installation poles 922 are fixed to be set up on the shell, two tight cylinders 921 in top are fixed respectively to be set up in the middle part of cylinder installation pole 922, the tight strip 923 in top is connected with the piston rod of two tight cylinders 921 in top respectively, and be provided with the guide bar respectively in both ends one side of the tight strip 923 in top, the guide bar is worn to establish and is set up in the axle sleeve of cylinder installation pole 922, the both ends opposite side of the tight strip 923 in top is provided with ejector pin 924 respectively.
As shown in fig. 16, the upper dust removal drawer 93 and the lower dust removal drawer 95 have the same structure, the upper dust removal drawer 93 includes an upper drawer frame 931, a dust adhering roller 932 and an adjustable bearing seat 933, two fixing seats 934 are respectively arranged at two ends of the upper drawer frame 931, two guide rods 935 are respectively arranged on the fixing seats 934, two shaft holes are arranged on the adjustable bearing seat 933, the adjustable bearing seat 933 is arranged on the two guide rods 935 through the two shaft holes, a compression spring 936 is arranged at the bottom of the guide rods 935, one end of the compression spring 936 abuts against the fixing seat 934, the other end of the compression spring 936 abuts against the adjustable bearing seat 933, the adjustable bearing seat 933 abuts against the top rod 924, the dust adhering roller 932 has two dust adhering rollers 932, and the dust adhering rollers 932 are arranged on the two adjustable bearing seats 933 which are oppositely arranged;
as shown in fig. 17, the middle dust-removing roller conveying drawer 94 includes a middle drawer frame 941, a driving motor 942 and two transferring rollers 943, roller shafts 944 are respectively disposed at two sides and a middle portion of the middle drawer frame 941, a plurality of rollers 945 are disposed on the roller shafts 944, two pairs of transferring rollers 943 are disposed at intervals of the roller shafts 944, each pair of transferring rollers 943 includes an upper roller body and a lower roller body, a gap for passing a photolithography mask is disposed between the upper roller body and the lower roller body, the upper roller body and the lower roller body are respectively attached to and contacted with the upper dust-removing drawer 93 and the lower dust-removing drawer 95, and belt pulleys are respectively disposed at ends of the roller shafts 944 and the two pairs of transferring rollers 943 and are in transmission connection with the driving motor 942.
As shown in fig. 13, the turnover mechanism 10 includes a clamping cylinder 103, a transmission shaft 101, a turnover rotation shaft 105 and a turnover side plate 106; the upper layer and the lower layer of transmission shafts 101 are arranged in the overturning side plates 106 at the two sides, equal space exists between every two transmission shafts 101 at each layer, two clamping cylinder mounting plates 102 are arranged above the transmission shaft 101 at the upper layer, a plurality of clamping cylinders 103 are arranged below each clamping cylinder mounting plate 102, the space between each clamping cylinder 103 is the same, and the clamping cylinder at the upper layer faces downwards and is positioned in the middle gap between the two transmission shafts 101; the clamping cylinder of the lower layer is positioned right below the clamping cylinder of the upper layer, and the direction of the clamping cylinder is upward; a motor 104 is arranged on one side of the turning side plate 106, the motor 104 is connected with a turning rotating shaft 105, and the other end of the turning rotating shaft 105 is fixed on the turning side plate 106; the motor 107 is mounted on the inner side of the turning side plate 106, and the motor 107 drives the rotation of each transmission shaft 101 through a belt.
The working steps of the invention are as follows: placing the photoetching plate on a discharging seat 130, wherein the discharging seat 130 is transported by a feeding trolley 138, the feeding trolley 138 is butted with a roller way 131 during feeding, the discharging seat 130 is pushed into the roller way 131 for positioning, the photoetching plate is placed to a first positioning jacking conveying roller device 7 for positioning by a first rotary grabbing device 4, the photoetching plate is conveyed to a first conveying roller device 15 after the positioning is finished, a first linear moving grabbing mechanism 8 grabs the photoetching plate on the first conveying roller device 15 and places the photoetching plate on a first cleaning device 2 for cleaning, the photoetching plate is taken out by the first linear moving grabbing mechanism 8 and places the photoetching plate on a second conveying roller device 11 and conveys the photoetching plate into a first dust sticking mechanism 9 for dust removal and cleaning after the cleaning is finished, the first dust sticking mechanism 9 is connected with a turnover mechanism 10, the turnover mechanism 10 carries out turnover and then conveys the photoetching plate to a third conveying roller device 17, the photoetching plate on the third conveying roller device 17 is placed to a second cleaning device 2 for cleaning by the second linear moving grabbing mechanism 8, after cleaning, the second linear moving grabbing mechanism 8 is taken out and placed to the fourth conveying roller device 23, the fourth conveying roller device 23 is conveyed to enter the second dust sticking mechanism 19 for dust removal and cleaning, then the second dust sticking mechanism is conveyed to the second positioning jacking conveying roller device 24 for positioning, after positioning is completed, the second rotary grabbing device 14 is placed to the discharging mechanism 13, and discharging is performed through the feeding trolley 138.
Claims (3)
1. A semiconductor photoetching plate cleaning device comprises an outer cover frame assembly, a feeding mechanism, a rotating grabbing device, a positioning jacking conveying roller device, a first conveying roller device, a linear moving grabbing mechanism, a cleaning device and a second conveying roller device, wherein the feeding mechanism, the rotating grabbing device, the positioning jacking conveying roller device, the first conveying roller device, the linear moving grabbing mechanism, the cleaning device and the second conveying roller device are sequentially arranged in the outer cover frame assembly; it is characterized in that the preparation method is characterized in that,
the feeding mechanism comprises a discharging seat, a roller way and a feeding trolley; the movable material placing seat is used for placing a photoetching plate to be processed, the bottom surface of the material placing seat is flat, a V-shaped material storage groove is arranged at the upper part of the material placing seat, and the discharging side of the V-shaped material storage groove is lower than the material leaning side; the roller way is arranged in roller way side plates at two sides, the roller way side plates are fixedly arranged on the frame, the roller way is mutually connected with the feeding trolley, and the discharging seat can move on the roller way and the feeding trolley; the tail end of the roller way is provided with a material seat locking device, and the outer side of the roller way is provided with a trolley locking device;
the rotary gripping device comprises a vacuum chuck device and a swing arm device; the vacuum sucker device comprises a vacuum connecting plate, vacuum sucker adjusting frames, vacuum suckers and vacuum sucker mounting plates, wherein the vacuum connecting plate is fixedly connected with a plurality of vacuum sucker adjusting frames, a guide groove is formed above each vacuum sucker adjusting frame, the plurality of vacuum sucker adjusting frames are fixedly arranged on the guide grooves through adjusting nuts, a sucker connecting rod is fixedly arranged on each vacuum sucker mounting plate, and the bottom end of each sucker connecting rod is connected with the vacuum sucker; the swing arm device comprises a first motor, a second motor, rotary bearing seats, a rotary shaft and a swing arm, wherein the first motor is positioned at the uppermost part of the whole device and is fixedly installed on a rack; the sliding block is connected with a swing arm bracket, the swing arm bracket can move along with the up-and-down movement of the sliding block, and the lower part of the swing arm bracket is connected with a vacuum connecting plate;
the positioning, jacking and conveying roller device comprises a frame body, a conveying roller device, a grabbing and positioning device and a lifting and traversing device; the frame body is fixed on the outer cover frame assembly, the conveying roller device comprises side plates, transmission shafts and longitudinal rollers, the two side plates are fixed on the frame body, a plurality of transmission shafts are transversely arranged between the two side plates side by side, each transmission shaft is connected with the longitudinal rollers in series, two edge blocking wheels are arranged between every two longitudinal rollers, a certain gap is formed between the two longitudinal rollers, a first belt pulley is arranged at the end part of each transmission shaft and is in transmission connection with each other through a first belt, and a motor is arranged in transmission connection with the first belt; the grabbing and positioning device comprises a positioning plate, a movable plate and a poking frame, wherein the positioning plate and the movable plate are arranged below the transmission shaft, the positioning plate is fixedly connected with the frame body, two shafts are arranged between the positioning plate and the movable plate, the positioning plate is fixedly connected with the shafts, the movable plate is connected with the shafts through shaft sleeves, belt clamps are respectively arranged on two sides of the movable plate, each belt clamp is fixed on a second belt, and the second belt is erected on the second belt pulley and is provided with a motor in a transmission connection mode; the positioning plate and the moving plate are both provided with poking frames, each poking frame comprises a vertical rod, an upper rod and poking rods, the vertical rods are arranged at two ends of the positioning plate and the moving plate, the upper ends of the vertical rods are positioned above the longitudinal idler wheels, the upper rods are erected on the two vertical rods, a plurality of poking rods are arranged on the upper rods downwards, and the lower ends of the poking rods are positioned in transverse grooves of the longitudinal idler wheels; the lifting and transverse moving device comprises a cylinder fixing plate, a jacking cylinder, a guide rod, a connecting plate, a roller mounting strip and a transverse roller, wherein the cylinder fixing plate is fixedly arranged on the frame body, the jacking cylinder is fixed on the cylinder fixing plate, the connecting plate is connected with a piston rod of the jacking cylinder, the guide rod is arranged on the cylinder fixing plate through a shaft sleeve, the upper end of the guide rod is fixedly connected with the connecting plate, a plurality of roller mounting strips are transversely arranged on the connecting plate side by side, a plurality of roller supports are arranged on the roller mounting strip, the transverse roller is arranged on the roller supports, and when the jacking cylinder extends out, the transverse roller is convexly arranged above the longitudinal roller; the linear moving grabbing mechanism comprises a vacuum chuck device, a linear moving transmission shaft, a lifting device, a longitudinal moving device and a sliding rail bottom plate; the vacuum sucker device of the linear moving grabbing mechanism and the vacuum sucker device of the rotating grabbing mechanism have the same structure; the upper side and the lower side of a sliding rail bottom plate are respectively provided with a sliding rail, the upper sliding rail and the lower sliding rail are respectively provided with 4 sliding blocks, the two sliding blocks on the upper side are opposite to the two sliding blocks on the lower side and are respectively provided with a lifting device, the middle part of the sliding rail bottom plate is provided with two transmission shafts on the upper side and the lower side, the two transmission shafts are respectively provided with a bearing connecting seat, one end of the first transmission shaft is connected with a motor, the bearing connecting seats are connected onto the first transmission shaft through shaft sleeves, the bearing connecting seats are connected onto the lifting devices to control the linear movement of the lifting devices, the sliding rail bottom plate corresponding to the first transmission shaft is provided with a through groove to facilitate the movement of the bearing connecting seats, the second transmission shaft is connected with another lifting device; a motor is fixed below a side plate at the top of a base of the lifting device, a rotary lead screw is arranged in the base, the transmission shaft part of the motor and the rotary lead screw penetrate through a through hole of the side plate at the top, a synchronous belt wheel is respectively arranged on the transmission shaft of the motor and the rotary lead screw, the two synchronous belt wheels are connected through a belt, a guide rail connecting plate is arranged below the side plate at the top, the guide rail connecting plate is connected on the rotary lead screw through a bearing sleeve, guide rails are respectively arranged below two sides of the guide rail connecting plate, and two sliding blocks are arranged on each guide rail; the longitudinal moving part of the lifting device is fixedly connected with the bottoms of the two guide rails, the upper part of the connecting plate is provided with a motor, the motor is connected with a rotating shaft on the bottom surface of the connecting plate, the two sides of the rotating shaft are respectively provided with the guide rails, each guide rail is provided with a sliding block, the rotating shaft is provided with a shaft sleeve, and the sliding block and the shaft sleeve are connected on the vacuum connecting plate.
2. The semiconductor photolithography plate cleaning device according to claim 1, wherein the material seat locking device comprises a rotary cylinder and a locking plate, the rotary cylinder is disposed at one end of the roller way close to the inside of the device, one end of the locking plate is mounted on the rotary cylinder, when the roller way is not rotated, one side of the locking plate is horizontal to the roller way, proximity sensors are further mounted beside the rotary cylinder, two proximity sensors are respectively disposed on two sides of a side plate of the roller way, and two limiting blocks are further mounted beside the rotary cylinder.
3. The semiconductor photolithography plate cleaning device according to claim 1, wherein the carriage locking device comprises two cylinders, a guide rod and a locking plate, a baffle plate fixedly mounted on the frame is provided below one side of the roller table near the outside, the two cylinders are mounted inside the baffle plate, the two guide rods are further provided beside the cylinders, the cylinders and the guide rods are jointly mounted on a cylinder mounting plate, the cylinder mounting plate is fixedly mounted on the frame through the two rods, and a carriage roller is mounted on each of the two rods; two windows are arranged at the other side of the baffle plate and correspond to the trolley rollers, and the trolley rollers are exposed through the windows; the locking plate is connected with a piston rod of the cylinder, a cross frame is arranged on the locking plate, and a groove for placing a cross beam is formed in the cross frame; one end of the feeding trolley is placed in a groove of the cross frame, an inserting plate is arranged on the cross frame, and the inserting plate can be locked with a cross beam on the feeding trolley when the air cylinder ascends.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810611804.3A CN108816960B (en) | 2018-06-14 | 2018-06-14 | Semiconductor photoetching plate cleaning device |
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| CN201810611804.3A CN108816960B (en) | 2018-06-14 | 2018-06-14 | Semiconductor photoetching plate cleaning device |
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| CN108816960B true CN108816960B (en) | 2020-06-26 |
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| CN110509363A (en) * | 2019-08-26 | 2019-11-29 | 吴善旺 | The feeding positioning mechanism of carving and milling machine |
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Effective date of registration: 20200529 Address after: 201100 workshop 8 and 9, No.155, Yuanke Road, Minhang District, Shanghai Applicant after: ACTFIVE (SHANGHAI) WASHING MACHINE Co.,Ltd. Address before: 310052 No. 88 Jiangling Road, Binjiang District, Hangzhou City, Zhejiang Province Applicant before: Wang Jiahai |
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