CN108816960B - Semiconductor photoetching plate cleaning device - Google Patents

Abstract

The invention relates to the field of semiconductor photoetching plate production, in particular to a cleaning device for a semiconductor photoetching plate. A semiconductor photoetching plate cleaning device comprises an outer cover frame assembly, a feeding mechanism, a rotating grabbing device, a positioning jacking conveying roller device, a first conveying roller device, a linear moving grabbing mechanism, a cleaning device and a second conveying roller device, wherein the feeding mechanism, the rotating grabbing device, the positioning jacking conveying roller device, the first conveying roller device, the linear moving grabbing mechanism, the cleaning device and the second conveying roller device are sequentially arranged in the outer cover frame assembly; the device adopts automatic feeding and washing, has improved abluent cleanliness factor degree of automation height, and batch processing ability is strong, can extensively be used for among the industrial production.

Description

A semiconductor lithography plate cleaning device

technical field

The invention relates to the field of semiconductor lithography plate production, in particular to a semiconductor lithography plate cleaning device.

Background technique

Lithography is a key process in the fabrication of semiconductor devices and integrated circuit micropatterned structures. Its process quality directly affects the device yield, reliability, device performance and service life and other parameters. The mask is an important part of the lithography process, the lithography plate must be very clean, and all the circuit elements on the silicon wafer come from the layout. If the reticle is not clean and there are contamination particles, these particles will be replicated on the photoresist on the surface of the silicon wafer, resulting in a decrease in device performance. However, contaminants such as dust and photoresist will inevitably adhere to the photoresist during use, and the existence of these contaminants directly affects the effect of photolithography. In order to ensure the cleanliness of the lithography plate, the lithography plate must be cleaned regularly, and the cleaning effect is closely related to the cleaning process and the reasonable configuration of each cleaning process on the equipment.

Chinese invention patent (publication number CN105590879A) discloses a fully automatic lithography plate cleaning machine, which consists of a loading and unloading unit, a cleaning unit, a turning unit, a lithography plate transmission unit, a positioning unit, a liquid medicine supply and circulation unit and a temperature control unit. . But how the patent automates batch processing is not disclosed.

SUMMARY OF THE INVENTION

In order to solve the above-mentioned technical problems, the purpose of the present invention is to provide a semiconductor lithography plate cleaning device, which adopts automatic feeding and cleaning, improves the cleanliness of cleaning, has a high degree of automation, and has strong batch processing capability, and can be widely used in in industrial production.

In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme:

A semiconductor lithography plate cleaning device, the device comprises an outer cover frame assembly and a feeding mechanism, a rotary grabbing device, a positioning and lifting conveying roller device, a first conveying roller device, a linear moving grabbing device arranged in sequence in the outer cover frame assembly The retrieving mechanism, the cleaning device and the second conveying roller device, the lithography plate on the feeding mechanism is placed on the positioning and jacking conveying roller device through the rotating grabbing device, and the positioning and jacking conveying roller device is connected to the first conveying roller device. A lithography plate on the conveying roller device is placed in the cleaning device by the linear moving grabbing mechanism and taken out by the linear moving grabbing mechanism and placed on the second conveying roller device;

The feeding mechanism includes a feeding seat, a roller table and a feeding trolley; the movable feeding seat is used to place the photolithography plate to be processed, the bottom of the feeding seat is flat, and the upper part is provided with a V-shaped storage tank. The discharging side of the trough is lower than the feeding side; the roller table is installed in the side plates of the roller table on both sides, the side plates of the roller table are fixedly installed on the frame, the roller table and the feeding trolley are connected to each other, and the material is discharged. The seat can move on the roller table and the feeding trolley; the end of the roller table is provided with a material seat locking device, and the outer side of the roller table is provided with a trolley locking device;

The rotary grab device includes a vacuum suction cup device and a swing arm device; the vacuum suction cup device includes a vacuum connecting plate, a vacuum suction cup adjusting frame and a vacuum suction cup, and the vacuum connecting plate is fixedly connected with several vacuum suction cup adjusting frames, each of which is A guide groove is arranged above the vacuum suction cup adjustment frame, a plurality of suction cup adjustment frames are fixedly arranged on the guide groove through adjusting nuts, a suction cup connecting rod is fixedly installed on the vacuum suction cup mounting plate, and the bottom end of the suction cup connecting rod is connected with the vacuum suction cup; the The swing arm device includes a first motor, a second motor, a rotating bearing seat, a rotating shaft and a swing arm. The first motor is located at the top of the entire device and is fixed on the frame. The first motor is connected with the rotating shaft through a belt. A rotating bearing seat is installed at each end of the rotating shaft, the rotating bearing seat is fixed on the frame, a swing arm is fixedly installed in the middle of the rotating shaft, a second motor is installed at the top of the swing arm, and a rotating lead screw is connected below the second motor , the two ends of the rotating screw are installed on the swing arm through two screw bearing seats, which are on the same line with the second motor. One side of the swing arm is fixed with a track, and there is a slider on the track. The rotating lead screw is connected, when the rotating lead screw rotates forward and reverse, it can drive the slider to move up and down; the slider is connected with a swing arm bracket, and the swing arm bracket can move with the up and down movement of the slider. The lower part is connected to the vacuum connection plate;

The positioning and jacking conveying roller device includes a frame body, a conveying roller device, a grabbing positioning device and a lifting and traversing device; the frame body is fixed on the housing frame assembly, and the conveying roller device includes a side plate, a transmission shaft and a longitudinal roller, The two side plates are fixed on the frame body, and a plurality of transmission shafts are arranged horizontally between the two side plates. Each of the transmission shafts is connected in series with a plurality of longitudinal rollers, and there are two ribs between the two longitudinal rollers. There is a certain gap between the two longitudinal rollers, the end of each drive shaft is provided with a pulley, the first pulley is connected to each other through the first belt, and the first belt is connected with a motor; the grabbing The positioning device includes a positioning plate, a moving plate and a toggle frame. Both the positioning plate and the moving plate are arranged below the transmission shaft. The positioning plate is fixedly connected with the frame body, and two shafts are arranged between the positioning plate and the moving plate, so the The positioning plate is fixedly connected with the shaft, the moving plate is connected with the shaft through the shaft sleeve, and belt clamps are respectively provided on both sides of the moving plate, each belt clamp is fixed on the second belt, the second belt It is erected on the second pulley and connected with a motor; the positioning plate and the moving plate are both provided with a toggle frame, and the toggle frame includes a vertical rod, an upper rod and a toggle rod, and the vertical rod is arranged on the positioning plate and the toggle rod. Both ends of the moving plate, the upper end of the vertical rod is located above the longitudinal roller, the upper rod is erected on two vertical rods, and a plurality of toggle rods are arranged downward on the upper rod, and the lower ends of the plurality of toggle rods are located in the longitudinal roller. inside; the lifting and traversing device includes a cylinder fixing plate, a lifting cylinder, a guide rod, a connecting plate, a roller mounting strip and a lateral roller, the cylinder fixing plate is fixed on the frame body, and the lifting cylinder is fixed on the cylinder fixed The connecting plate is connected with the piston rod of the lifting cylinder, the guide rod is arranged on the cylinder fixing plate through the shaft sleeve, the upper end of the guide rod is fixedly connected with the connecting plate, and a plurality of roller mounting strips are arranged side by side on the connecting plate. On the board, a plurality of roller brackets are arranged on the roller mounting strip, and the horizontal rollers are arranged on the roller brackets. When the jacking cylinder extends, the horizontal rollers protrude above the vertical rollers;

The linear moving grasping mechanism includes a vacuum suction cup device, a linear moving transmission shaft, a lifting device, a longitudinal moving device and a sliding rail bottom plate; the vacuum suction cup device of the linear moving grasping mechanism has the same structure as that of the rotary grasping device; There are slide rails on the upper and lower sides of the slide rail base plate, and a slider is installed on each of the upper and lower rails. Two transmission shafts are installed, bearing connection seats are installed on both transmission shafts, one end of the first transmission shaft is connected with a motor, the bearing connection seat is connected to the first transmission shaft through a bushing, and the bearing connection seat is connected to the lifting device control the linear movement of the lifting device, the slide rail base plate corresponding to the first transmission shaft has a through groove to facilitate the movement of the bearing connection seat, the second transmission shaft is connected to another lifting device, the first transmission shaft and the second transmission shaft The position of the motor on the shaft is placed opposite, the connection and movement of the second drive shaft are the same as the first drive shaft; the motor is fixed under the top side plate of the base of the lifting device, the base is equipped with a rotating lead screw, and the drive shaft part of the motor and the rotating lead screw through a through hole of the top side plate, a synchronous pulley is installed on the drive shaft of the motor and on the rotating lead screw, the two synchronous pulleys are connected by a belt, and a guide rail is connected under the top side plate The guide rail connecting plate is connected to the rotating screw through the bearing sleeve, the guide rails are installed under the two sides of the guide rail connecting plate, and each guide rail is equipped with two sliders; the longitudinal moving part of the lifting device is connected to the bottom of the two guide rails. Fixed connection together, the upper part of the connecting plate is equipped with a motor, the motor is connected to the rotating shaft on the bottom surface of the connecting plate, there are guide rails on both sides of the rotating shaft, each guide rail is equipped with a slider, the rotating shaft is equipped with a bushing, the slider and the The shaft sleeve is connected to the vacuum connection plate.

As a further improvement, the material seat locking device includes a rotating cylinder and a locking plate. The rotating cylinder is arranged at one end of the roller table close to the inside of the equipment, and one end of the locking plate is installed on the rotating cylinder. When not rotating, the locking plate One side is level with the roller table, a proximity sensor is also installed beside the rotary cylinder, there is also a proximity sensor on both sides of the roller table side plate, and two limit blocks are installed on both sides of the rotary cylinder.

As a further improvement, the trolley locking device includes two air cylinders, a guide rod and a locking plate. There is a baffle fixed on the frame under the side of the roller table close to the outside, and two baffles are installed inside the baffle. There are two guide rods next to the cylinder. The cylinder and the guide rods are installed together on the cylinder mounting plate. The cylinder mounting plate is fixed on the rack through two rods, and a trolley roller is installed on the top of the two rods; On the other side, there are two windows at the positions corresponding to the trolley rollers, and the trolley rollers are exposed through the windows; the locking plate is connected with the piston rod of the cylinder, the locking plate is provided with a horizontal frame, and the horizontal frame is provided with The slot for placing the beam; one end of the feeding trolley is placed in the slot of the horizontal frame, and a plug-in plate is arranged on the horizontal frame. When the cylinder rises, the plug-in plate can be locked with the beam on the feeding trolley.

Since the present invention adopts the above technical scheme, the device adopts automatic feeding and cleaning, which improves the cleanliness of cleaning, has a high degree of automation, and has strong batch processing capability, and can be widely used in industrial production.

Description of drawings

FIG. 1 is a schematic structural diagram of a specific embodiment of the present invention.

FIG. 2 is a schematic diagram of an explosion structure of a specific embodiment of the present invention.

Figure 3 is a schematic diagram of the explosion structure of the feeding mechanism.

FIG. 4 is a schematic structural diagram of the swing arm device.

FIG. 5 is a schematic structural diagram of a vacuum suction cup device.

FIG. 6 is a schematic structural diagram of the first positioning and jacking conveying roller device.

FIG. 7 is a schematic structural diagram of the grasping and positioning device.

8 and 9 are schematic diagrams of the structure of the lifting and traversing device.

FIG. 10 is a schematic diagram of an exploded structure of the first linearly moving grabbing device.

11 and 12 are schematic diagrams of the structure of the lifting device.

FIG. 13 is a schematic diagram of the exploded structure of the turning mechanism.

FIG. 14 is a schematic diagram of the explosion structure of the first dust sticking mechanism.

FIG. 15 is a schematic structural diagram of the upper pressing structure.

Figure 16 is a schematic structural diagram of the upper dust removal drawer.

Figure 17 is a schematic diagram of the structure of the middle dust removal roller conveying drawer.

Detailed ways

The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

As shown in FIG. 1 and FIG. 2, a semiconductor lithography cleaning production system includes a cover frame assembly 1, a feeding mechanism 3 and a first rotary grab device 4 sequentially arranged in the cover frame assembly 1. , the first positioning and lifting conveying roller device 7, the first conveying roller device 15, the first linear movement grabbing mechanism 8, the first cleaning device 2, the second conveying roller device 11, the first dust sticking mechanism 9, the turning mechanism 10. The third conveying roller device 17, the second cleaning device 12, the second linear movement grabbing mechanism 18, the fourth conveying roller device 23, the second dust sticking mechanism 19, the second positioning and lifting conveying roller device 24, the second Rotate the grabbing device 14 and the unloading mechanism 13 . The lithography plate on the feeding mechanism 3 is placed on the first positioning jacking and conveying roller device 7 through the first rotating grabbing device 4, and the first positioning jacking and conveying roller device 7 is connected to the first conveying roller device 15. The lithography plate on the conveying roller device 15 is placed in the first cleaning device 2 by the first linear moving grabbing mechanism 8 and taken out by the first linear moving grabbing mechanism 8 and placed on the second conveying roller device 11. The second conveying roller The device 11 is connected to the first dust sticking mechanism 9, the first dust sticking mechanism 9 is connected to the inversion mechanism 10, the inversion mechanism 10 is connected to the third conveying roller device 17, and the lithography plate on the third conveying roller device 17 is moved through the second straight line. 8 is placed in the second cleaning device 2 and taken out by the second linear moving grabbing mechanism 8 and placed in the fourth conveying roller device 23, the fourth conveying roller device 23 is connected to the second dust sticking mechanism 19, and the second dust sticking mechanism 19 is connected to the first The second positioning jacking and conveying roller device 24 is positioned, and the lithography plate on the second positioning jacking and conveying roller device 24 is placed on the unloading mechanism 13 by the first rotating grabbing device 4 .

As shown in FIG. 2 , the housing frame assembly 1 includes a housing 20 , a warning light 21 , and an inner frame 22 . The outer cover 20 wraps the equipment inside to protect and block dust; warning lights 21 are arranged at both ends of the equipment for alarming in emergency situations; the inner frame 22 is used for fixing and installing other devices. There are several glass windows on the outer cover, which can observe the internal operation from the outside, which is very convenient.

As shown in FIG. 2 and FIG. 3 , the loading mechanism 3 and the unloading mechanism 13 both include a discharge seat 130, a roller table 131 and a loading trolley 138. The loading mechanism 3 and the unloading mechanism 13 have the same structure, but Movement is in the opposite direction. As shown in FIG. 3 , the movable discharge seat 130 is used to place the lithography plate to be processed. The bottom surface of the discharge seat 130 is flat, and the upper part is provided with a V-shaped storage tank. The discharging side of the V-shaped storage tank is lower than the material. one side; the roller table 131 is installed in the roller table side plates on both sides, the roller table side plates are fixedly installed on the frame, the roller table 131 and the feeding trolley 138 are connected to each other, and the discharge seat 130 can be placed on the roller table 131. The end of the roller table 131 is provided with a material seat locking device, and the outer side of the roller table 131 is provided with a trolley locking device 137.

As shown in FIG. 3 , the material seat locking device includes a rotary cylinder 134 and a locking plate. The rotary cylinder 134 is arranged at one end of the roller table 131 close to the inside of the equipment, and one end of the locking plate is installed on the rotating cylinder 134. When rotating, one side of the locking plate is level with the roller table, a proximity sensor 132 is installed beside the rotating cylinder, a proximity sensor 132 is also installed on both sides of the roller table side plate, and two limit stops are also installed on both sides of the rotating cylinder 134 133. When the worker places the material feeding trolley 130 on the feeding trolley 138, the limit stop 133 restricts the feeding pedestal 130 from moving on the feeding trolley 138, and the cylinder 1301 drives the feeding trolley 138 to rise. When the feeding trolley is level with the roller table 131, the limit block 133 is opened, and the discharge seat 130 enters the roller table 131. When the proximity sensor 132 detects that the discharge seat 130 has reached the predetermined position, the limit block is pressed against the discharge seat. 130, the rotary cylinder 134 rotates, and the discharge seat is fixed with a cam.

As shown in FIG. 3, the trolley locking device 137 includes two cylinders 1301, a guide rod 137 and a locking plate 1304. There is a baffle plate fixedly installed on the frame under the side of the roller table 131 close to the outside. Two cylinders 1301 are installed on the inner side of the baffle plate, and there are two guide rods 137 beside the cylinder 1301. The cylinder 1301 and the guide rods 137 are installed together on the cylinder mounting plate 1302, and the cylinder mounting plate 1302 is fixed on the installation frame by two rods. A trolley roller 136 is installed on each of the two rods; on the other side of the baffle, there are two windows at the positions corresponding to the trolley rollers, and the trolley rollers are exposed through the windows; the locking plate 1304 and the piston rod of the cylinder 1301 Connected, the locking plate 1304 is provided with a transverse frame 139, and the transverse frame 139 is provided with a slot for placing the transverse beam; 1303. When the cylinder 1301 rises, the insert plate 1303 can be locked with the beam on the feeding trolley 138. After the loading trolley 138 is docked with the roller table 131 , the loading trolley 138 and the roller table 131 can be locked by the trolley locking device 137 .

As shown in FIG. 2 , the first rotary grabbing device 4 and the second rotary grabbing device have the same structure, and both include a vacuum suction cup device 14 and a swing arm device.

As shown in FIG. 5 , the vacuum suction cup device 14 includes a vacuum connecting plate 140 , a vacuum suction cup adjusting frame 141 and a vacuum suction cup 142 . The vacuum connecting plate 140 is fixedly connected with several vacuum suction cup adjusting frames 141 , each of which is a vacuum suction cup adjusting frame. A guide groove is provided above the 141 , and a plurality of suction cup adjustment frames 141 are fixedly arranged on the guide groove by adjusting nuts.

As shown in FIG. 4 , the swing arm device includes a first motor, a second motor 42, a rotating bearing seat 43, a rotating shaft 44 and a swing arm 48. The first motor is located at the top of the entire device and is installed and fixed on the machine. On the frame, the first motor is connected with the rotating shaft 44 through a belt, a rotating bearing seat 43 is installed at each end of the rotating shaft 44, the rotating bearing seat 43 is fixed on the frame, and a swing arm 48 is fixedly installed in the middle of the rotating shaft 44, The top of the swing arm 48 is equipped with a second motor 42 , and a rotating screw 402 is connected below the second motor 42 . On the same straight line, a track is fixed on one side of the swing arm 48, and there is a slider 49 on the track. The slider 49 is connected with the rotating lead screw 402 through the driving connecting block 46. When the rotating lead screw 402 rotates forwardly or reversely, it can The slider 49 is driven to move up and down; the slider 49 is connected with a swing arm bracket 401 , the swing arm bracket 401 can move with the up and down movement of the slider 49 , and the lower part of the swing arm bracket 401 is connected to the vacuum connection plate 140 .

As shown in Figures 2 and 6, the first positioning and jacking conveying roller device 7 and the second positioning and jacking conveying roller device have the same structure, and both include a frame body 70, a conveying roller device 71, a grasping and positioning device 72 and Raise the traverse device 73 .

As shown in FIG. 6 , the frame body 70 is fixed on the housing frame assembly 1. The conveying roller device 71 includes a side plate 711, a transmission shaft 712 and a longitudinal roller 713. The two side plates 711 are fixed on the frame body 70. The shafts 712 are laterally arranged between the two side plates 711, a plurality of longitudinal rollers 713 are connected in series on each transmission shaft 712, and there are two sidewall wheels 714 between the two longitudinal rollers 713, so that the two longitudinal rollers There is a certain gap between the 713, the end of each transmission shaft 712 is provided with a first pulley, the first pulleys are connected to each other through a first belt, and the first belt is connected to a motor. The structures of the first conveying roller device 15 , the second conveying roller device 11 , the third conveying roller device 17 , and the fourth conveying roller device 23 are the same as those of the conveying roller device 71 .

As shown in FIG. 7 , the grabbing and positioning device 72 includes a positioning plate 721, a moving plate 722 and a toggle frame 723. Both the positioning plate 721 and the moving plate 722 are arranged below the transmission shaft 712, and the positioning plate 721 is connected to the frame body. 70 is fixedly connected, and two shafts 724 are arranged between the positioning plate 721 and the moving plate 722, the positioning plate 721 is fixedly connected with the shaft 724, and the moving plate 722 and the shaft 724 are connected through the shaft sleeve, and the moving plate Belt clamps 725 are respectively provided on both sides of 722, each belt clamp 725 is fixed on a second belt 726, and the second belt 726 is mounted on the second pulley and is provided with a motor 727 in driving connection; Both the positioning plate 721 and the moving plate 722 are provided with a toggle frame 723. The toggle frame 723 includes a vertical rod 728, an upper rod 729 and a toggle rod 730. The vertical rod 728 is arranged on both ends of the positioning plate 721 and the moving plate 722. The upper end of the vertical rod 728 is located above the longitudinal roller 713 , the upper rod 729 is erected on two vertical rods 728 , a plurality of toggle rods 730 are arranged downward on the upper rod 729 , and the lower ends of the plurality of toggle rods 730 are located on the longitudinal roller 713 . in the transverse groove.

As shown in Figures 8 and 9, the lifting and traversing device includes a cylinder fixing plate 731, a jacking cylinder 732, a guide rod 733, a connecting plate 734, a roller mounting strip 735 and a lateral roller 736. The cylinder fixing plate 731 is fixed on the frame body 70, the lifting cylinder 732 is fixed on the cylinder fixing plate 731, the connecting plate 734 is connected with the piston rod of the lifting cylinder 732, and the guide rod 733 is arranged on the cylinder fixing plate 731 through the shaft sleeve , the upper end of the guide rod 733 is fixedly connected with the connecting plate 734, a plurality of roller mounting bars 735 are laterally arranged on the connecting plate 734, a plurality of roller brackets 737 are arranged on the roller mounting bar 735, and the lateral rollers 736 are arranged on the roller bracket 737, When the jacking cylinder 732 is extended, the lateral rollers 736 protrude above the longitudinal rollers 713 .

The lithography plate is grabbed onto the first positioning and lifting conveying roller device 7 by the first rotary grasping device 4, and the lifting and traversing device is lifted. Move the appropriate position to facilitate the grasping of the first linear moving grasping mechanism 8, and the second positioning jacking and conveying roller device can adjust the position of the lithography plate so that the second rotating grasping device can grasp the unloading mechanism 13. .

As shown in FIG. 2 and FIG. 10 , the first linear moving grabbing mechanism 8 and the second linear moving grabbing mechanism have the same structure, and the first linear moving grabbing mechanism 8 includes a vacuum suction cup device 14, Linearly move the transmission shaft, the lifting device 80 and the longitudinal moving device and the sliding rail base plate 81 .

As shown in FIG. 10 , there are slide rails 82 on the upper and lower sides of the slide rail bottom plate 81 respectively, and four sliders 83 are installed on the upper and lower slide rails 82 respectively. There is a lifting device 80. Two transmission shafts are installed up and down the middle part of the bottom plate 81 of the slide rail. Both transmission shafts are equipped with bearing connecting seats. One end of the first transmission shaft 85 is connected with a motor 84. The bearing connecting seat 86 passes through the shaft The sleeve is connected to the first transmission shaft 85, the bearing connection seat 86 is connected to the lifting device 80, and the linear movement of the lifting device 80 is controlled. The second transmission shaft 88 is connected to another lifting device, the motor 87 and the motor 84 are positioned opposite to each other, and the connection and movement of the second transmission shaft 88 are the same as the first transmission shaft 85 . As shown in FIGS. 11 and 12 , a motor 801 is fixed under the top side plate of the base 89 of the lifting device 80 , a rotating lead screw 805 is installed inside the base 89 , and the transmission shaft part of the motor 801 and the rotating lead screw 805 pass through the top side plate There is a through hole in the motor 801, and a synchronous pulley is installed on the drive shaft of the motor 801 and on the rotating screw 805. The two synchronous pulleys are connected by a belt. There is a guide rail connecting plate under the top side plate, and the guide rail connecting plate passes through the bearing. The sleeve is connected to the rotating lead screw 805, the guide rails 803 are installed under the two sides of the guide rail connecting plate, and two sliders 804 are installed on each guide rail 803; the longitudinal moving part 806 of the lifting device 80 is fixed with the bottom of the two guide rails Connected together, the upper part of the connecting plate 806 is equipped with a motor 807, and the motor 807 is connected to the rotating shaft 809 on the bottom surface of the connecting plate 806. There are guide rails 810 on both sides of the rotating shaft 809. A shaft sleeve 808 is installed on the shaft 809 , and the sliding block 811 and the shaft sleeve 808 are connected to the vacuum connecting plate 140 .

The first cleaning device 2 and the second cleaning device 12 are conventional cleaning devices, and the lithography plate is captured and placed into the first cleaning device 2 and the second cleaning device by the first linear moving grasping mechanism 8 and the second linear moving grasping mechanism. The cleaning device 12 cleans, and after the cleaning is completed, the lithography plate is taken out by the first linear movement grabbing mechanism 8 and the second linear movement grabbing mechanism and enters the subsequent process.

As shown in Figures 2 and 14, the first dust sticking mechanism 9 and the second dust sticking mechanism have the same structure, including an outer casing, an upper mounting plate 91, an upper top tightening structure 92, an upper dust removal drawer 93, a middle dust removal The roller conveying drawer 94, the lower dust removal drawer 95 and the lower top-tightening mechanism 96, the upper mounting plate 91 is arranged on the upper part of the outer casing, and the outer casing is provided with a drawer opening, the upper dust removal drawer 93, the middle dust removal roller The conveying drawer 94 and the lower dust removing drawer 95 are respectively arranged in the drawer opening, and the upper dust removing drawer 93, the middle dust removing roller conveying drawer 94 and the lower dust removing drawer 95 are connected with the outer casing by slide rails and slide grooves 97 respectively; The top-tightening structure 92 has the same structure as the lower top-tightening mechanism 96, and the upper dust-removing drawer 93 and the lower dust-removing drawer 95 have the same structure. The lower part of the 95.

As shown in FIG. 15 , the upper and lower clamping mechanisms 92 and 96 respectively comprise a clamping cylinder 921, a cylinder mounting rod 922 and a clamping strip 923. The two cylinder mounting rods 922 are fixedly arranged on the outer casing. The two pressing cylinders 921 are respectively fixed in the middle of the cylinder mounting rod 922, the pressing bars 923 are respectively connected with the piston rods of the two pressing cylinders 921, and two ends of the pressing bars 923 are respectively provided with guides. The guide rod is inserted into the shaft sleeve provided on the cylinder mounting rod 922 , and the top rod 924 is respectively provided on the other side of the two ends of the top tightening strip 923 .

As shown in FIG. 16, the upper dust removal drawer 93 and the lower dust removal drawer 95 have the same structure. The upper dust removal drawer 93 includes an upper drawer frame 931, a dust sticking roller 932 and an adjustable bearing seat 933. The upper drawer frame The two ends of the 931 are respectively provided with two fixed seats 934, the fixed seats 934 are respectively provided with two guide rods 935, the adjustable bearing seat 933 is provided with two shaft holes, and the adjustable bearing seat 933 passes through the two The shaft holes are arranged on two guide rods 935, and a compression spring 936 is arranged at the bottom of the guide rods 935. One end of the compression spring 936 is in contact with the fixed seat 934, and the other end is in contact with the adjustable bearing seat 933. The adjustable bearing The seat 933 is in contact with the top rod 924, the dust sticking roller 932 has two, and the dust sticking roller 932 is arranged on two adjustable bearing seats 933 arranged oppositely;

As shown in FIG. 17 , the middle dust removal roller conveying drawer 94 includes a middle drawer frame body 941 , a driving motor 942 and a transfer roller 943 , and roller shafts 944 are respectively provided on both sides and the middle of the middle drawer frame body 941 . There are a plurality of rollers 945 on it, and two pairs of transfer rollers 943 are arranged in the space between the roller shafts 944. The two pairs of transfer rollers 943 are composed of upper and lower roller bodies, and there is a light supply between the upper and lower roller bodies. The upper and lower roller bodies are respectively in contact with the upper dust removal drawer 93 and the lower dust removal drawer 95 through the gap through which the plate passes. The roller shaft 944 and the ends of the two pairs of transfer rollers 943 are respectively provided with belt pulleys. The drive motor 942 is connected in phase drive.

As shown in Fig. 13, the inversion mechanism 10 includes a clamping cylinder 103, a transmission shaft 101, an inversion rotating shaft 105 and an inversion side plate 106; the inversion side plates 106 on both sides are installed with upper and lower transmission shafts 101, each layer There is an equal distance between the transmission shafts 101 of the upper layer, two clamping cylinder mounting plates 102 are installed above the transmission shaft 101 on the upper layer, and several clamping cylinders 103 are installed under each clamping cylinder mounting plate 102. The distance between each clamping cylinder 103 is the same, the clamping cylinder on the upper layer faces downwards and is located in the middle gap between the two transmission shafts 101; upward; one side of the flip side plate 106 is equipped with a motor 104, the motor 104 is connected to the flip rotation shaft 105, and the other end of the flip rotation shaft 105 is fixed on the flip side plate 106; the inner side of the flip side plate 106 is equipped with a motor 107, The motor 107 drives the rotation of each transmission shaft 101 through the belt.

The working steps of the present invention are: placing the lithography plate on the discharge seat 130, the discharge seat 130 is transported by the feeding trolley 138, the feeding trolley 138 is docked with the roller table 131 when the material is loaded, and the discharging seat 130 is pushed into the roller table 131 Positioning, the lithographic plate is placed on the first positioning jacking conveying roller device 7 by the first rotary grabbing device 4 for positioning, and after the positioning is completed, the photolithographic plate is conveyed to the first conveying roller device 15, and the first linear movement grabbing mechanism 8. Grab the lithography plate on the first conveying roller device 15 and place it in the first cleaning device 2 for cleaning. After cleaning, it is taken out by the first linear moving grabbing mechanism 8 and placed on the second conveying roller device 11. The dust mechanism 9 performs dust removal and cleaning, the first dust sticking mechanism 9 is connected to the turning mechanism 10, the turning mechanism 10 is turned over, and then conveyed to the third conveying roller device 17, and the photolithography plate on the third conveying roller device 17 moves through the second straight line. The grabbing mechanism 8 is placed in the second cleaning device 2 for cleaning. After cleaning, the grabbing mechanism 8 is taken out by the second linear moving grabbing mechanism 8 and placed in the fourth conveying roller device 23 . The fourth conveying roller device 23 conveys it into the second dust sticking mechanism 19 Dust removal and cleaning are carried out, and then transported to the second positioning lifting and conveying roller device 24 for positioning.

Claims (3)

1. A semiconductor lithography plate cleaning device, the device comprises an outer cover frame assembly and a feeding mechanism, a rotary grab device, a positioning and lifting conveying roller device, a first conveying roller device, a linear Move the grabbing mechanism, the cleaning device and the second conveying roller device. The photolithography plate on the feeding mechanism is placed on the positioning and jacking conveying roller device through the rotating grabbing device, and the positioning and jacking conveying roller device is connected to the first conveying roller device. , the lithography plate on the first conveying roller device is placed in the cleaning device by the linear moving grabbing mechanism, and is taken out and placed on the second conveying roller device by the linear moving grabbing mechanism; it is characterized in that, The feeding mechanism includes a feeding seat, a roller table and a feeding trolley; the movable feeding seat is used to place the photolithography plate to be processed. The discharging side is lower than the feeding side; the roller table is installed in the side plates of the roller table on both sides, the side plates of the roller table are fixedly installed on the frame, the roller table and the feeding trolley are connected to each other, and the discharging seat can be The roller table and the feeding trolley move on; the end of the roller table is provided with a material seat locking device, and the outer side of the roller table is provided with a trolley locking device; The rotary grab device includes a vacuum suction cup device and a swing arm device; the vacuum suction cup device includes a vacuum connecting plate, a vacuum suction cup adjusting frame, a vacuum suction cup and a vacuum suction cup mounting plate, and the vacuum connecting plate is fixedly connected with several vacuum suction cup adjusting frames, A guide groove is arranged above each vacuum suction cup adjustment frame, and a plurality of vacuum suction cup adjustment frames are fixed on the guide groove by adjusting nuts. The vacuum suction cup mounting plate is fixedly installed with a suction cup connecting rod, and the bottom end of the suction cup connecting rod is connected with the vacuum suction cup; The swing arm device includes a first motor, a second motor, a rotating bearing seat, a rotating shaft and a swing arm. The first motor is located at the top of the entire device and is installed and fixed on the frame. The first motor rotates through a belt. The shaft is connected, a rotating bearing seat is installed at each end of the rotating shaft, the rotating bearing seat is fixed on the frame, a swing arm is fixedly installed in the middle of the rotating shaft, a second motor is installed at the top of the swing arm, and a second motor is connected below the second motor. Rotating lead screw, both ends of the rotating lead screw are installed on the swing arm through two lead screw bearing seats, the rotating lead screw and the second motor are on the same line, a track is fixed on one side of the swing arm, and there are sliders on the track to slide the screw. The block is connected with the rotating lead screw through the driving connecting block. When the rotating lead screw rotates forward and reverse, it can drive the slider to move up and down; the slider is connected with a swing arm bracket, and the swing arm bracket can move up and down with the slider. Move, the lower part of the swing arm bracket is connected to the vacuum connecting plate; The positioning and jacking conveying roller device includes a frame body, a conveying roller device, a grabbing positioning device and a lifting and traversing device; the frame body is fixed on the outer cover frame assembly, and the conveying roller device includes a side plate, a transmission shaft and a longitudinal roller. The plate is fixed on the frame body, a plurality of drive shafts are arranged horizontally between two side plates, and a plurality of longitudinal rollers are connected in series on each of the drive shafts, and there are two sidewall wheels between the two longitudinal rollers, so that the There is a certain gap between the two longitudinal rollers, the end of each drive shaft is provided with a first pulley, the first pulley is connected to each other through a first belt, and the first belt is connected with a motor; the grabbing positioning The device includes a positioning plate, a moving plate and a toggle frame. Both the positioning plate and the moving plate are arranged below the transmission shaft. The positioning plate is fixedly connected with the frame body, and two shafts are arranged between the positioning plate and the moving plate. The positioning plate is fixedly connected with the shaft, the moving plate is connected with the shaft through the shaft sleeve, and belt clamps are respectively provided on both sides of the moving plate, each belt clamp is fixed on the second belt, the second belt is erected A motor is arranged on the second pulley and is connected in a driving manner; a toggle frame is provided on both the positioning plate and the moving plate. At both ends of the plate, the upper end of the vertical rod is located above the longitudinal roller, the upper rod is erected on two vertical rods, and a plurality of toggle rods are arranged downward on the upper rod, and the lower ends of the plurality of toggle rods are located in the longitudinal roller. The lifting and traversing device includes a cylinder fixing plate, a jacking cylinder, a guide rod, a connecting plate, a roller mounting strip and a transverse roller, the cylinder fixing plate is fixed on the frame body, and the jacking cylinder is fixed on the cylinder fixing plate On the top, the connecting plate is connected with the piston rod of the jacking cylinder, the guide rod is arranged on the cylinder fixing plate through the shaft sleeve, the upper end of the guide rod is fixedly connected with the connecting plate, and a plurality of roller mounting strips are arranged side by side on the connecting plate. On the roller mounting strip, a plurality of roller brackets are arranged, and the horizontal rollers are arranged on the roller brackets. When the jacking cylinder is extended, the horizontal rollers protrude above the vertical rollers; the linear movement grabbing mechanism includes a vacuum Suction cup device, linear moving drive shaft, lifting device, longitudinal moving device and sliding rail bottom plate; the vacuum suction cup device of the linear moving grasping mechanism has the same structure as the vacuum suction cup device of the rotary grasping device; the upper and lower sides of the sliding rail bottom plate have sliding The upper and lower slide rails are equipped with 4 sliders, the upper two sliders are opposite to the lower two sliders and each is equipped with a lifting device, and the middle part of the bottom plate of the sliding rail is equipped with two transmission shafts, two The transmission shaft is equipped with a bearing connection seat, one end of the first transmission shaft is connected with a motor, the bearing connection seat is connected to the first transmission shaft through a bushing, and the bearing connection seat is connected to the lifting device to control the linear movement of the lifting device. There are through grooves on the bottom plate of the slide rail corresponding to the first drive shaft, which is convenient for the movement of the bearing connecting seat. Another lifting device is connected to the second drive shaft. The positions of the motors on the first drive shaft and the second drive shaft are placed opposite to each other. The connection and movement of the second transmission shaft are the same as those of the first transmission shaft; a motor is fixed under the top side plate of the base of the lifting device, and a rotary screw is installed inside the base. The rotating lead screw, the drive shaft part of the motor and the rotating lead screw pass through a through hole in the top side plate, a synchronous pulley is installed on the drive shaft of the motor and on the rotating lead screw, and the two synchronous pulleys are connected by a belt , there is a guide rail connecting plate under the top side plate, the guide rail connecting plate is connected to the rotating lead screw through the bearing sleeve, the guide rails are installed under both sides of the guide rail connecting plate, and each guide rail is equipped with two sliders; the lifting device The longitudinal moving part of the connecting plate is fixedly connected with the bottom of the two guide rails, the upper part of the connecting plate is equipped with a motor, and the motor is connected to the rotating shaft on the bottom surface of the connecting plate. There are guide rails on both sides of the rotating shaft. A shaft sleeve is installed on the shaft, and the slider and the shaft sleeve are connected to the vacuum connecting plate. 2. A semiconductor lithography plate cleaning device according to claim 1, characterized in that the material seat locking device comprises a rotary cylinder and a locking plate, the rotary cylinder is arranged at one end of the roller table close to the inside of the equipment, and the locking plate One end is installed on the rotating cylinder. When not rotating, one side of the locking plate is level with the roller table. A proximity sensor is also installed beside the rotating cylinder. There is also a proximity sensor on each side of the roller table. limit block. 3. A semiconductor lithography cleaning device according to claim 1, characterized in that the trolley locking device comprises two cylinders, a guide rod and a locking plate, and there is a fixedly installed under the side of the roller table close to the outside. The baffle on the frame, there are two cylinders installed on the inner side of the baffle, and there are two guide rods beside the cylinder. The cylinder and guide rods are installed on the cylinder mounting plate together, and the cylinder mounting plate is fixed on the frame through two rods , a trolley roller is installed on each of the two rods; on the other side of the baffle, there are two windows at the position corresponding to the trolley roller, and the trolley roller is exposed through the window; the locking plate is connected with the piston rod of the cylinder , The locking plate is provided with a horizontal frame, and the horizontal frame is provided with a slot for placing the beam; one end of the feeding trolley is placed in the slot of the horizontal frame, and a plug-in plate is set on the horizontal frame. When the cylinder rises, the plug-in plate can be connected with The beams on the loading trolley are locked to each other.

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