CN108778536B - Cleaning device - Google Patents
Cleaning device Download PDFInfo
- Publication number
- CN108778536B CN108778536B CN201780016866.3A CN201780016866A CN108778536B CN 108778536 B CN108778536 B CN 108778536B CN 201780016866 A CN201780016866 A CN 201780016866A CN 108778536 B CN108778536 B CN 108778536B
- Authority
- CN
- China
- Prior art keywords
- roller
- cleaning
- brush
- foreign matter
- brush roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 306
- 229910052751 metal Inorganic materials 0.000 claims abstract description 63
- 239000002184 metal Substances 0.000 claims abstract description 63
- 230000002441 reversible effect Effects 0.000 claims description 23
- 230000032258 transport Effects 0.000 abstract 4
- 238000011084 recovery Methods 0.000 description 122
- 230000007246 mechanism Effects 0.000 description 84
- 229920005989 resin Polymers 0.000 description 67
- 239000011347 resin Substances 0.000 description 67
- 239000010410 layer Substances 0.000 description 54
- 230000002093 peripheral effect Effects 0.000 description 38
- 239000000463 material Substances 0.000 description 37
- 239000000126 substance Substances 0.000 description 22
- 238000011144 upstream manufacturing Methods 0.000 description 22
- 239000002245 particle Substances 0.000 description 18
- 229920002635 polyurethane Polymers 0.000 description 18
- 239000004814 polyurethane Substances 0.000 description 18
- 239000000919 ceramic Substances 0.000 description 16
- 230000005684 electric field Effects 0.000 description 12
- 238000003825 pressing Methods 0.000 description 12
- 229920000728 polyester Polymers 0.000 description 11
- 239000011737 fluorine Substances 0.000 description 10
- 229910052731 fluorine Inorganic materials 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 9
- 239000000835 fiber Substances 0.000 description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- 239000000428 dust Substances 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 8
- 239000004020 conductor Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 6
- 239000002893 slag Substances 0.000 description 6
- 239000012798 spherical particle Substances 0.000 description 6
- 229920003002 synthetic resin Polymers 0.000 description 6
- 239000000057 synthetic resin Substances 0.000 description 6
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 5
- 239000004433 Thermoplastic polyurethane Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000004519 grease Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 230000003252 repetitive effect Effects 0.000 description 4
- 238000007790 scraping Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 230000001141 propulsive effect Effects 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- 244000043261 Hevea brasiliensis Species 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- 239000004640 Melamine resin Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- -1 and among these Polymers 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229920003052 natural elastomer Polymers 0.000 description 2
- 229920001194 natural rubber Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 210000002374 sebum Anatomy 0.000 description 2
- 229920003051 synthetic elastomer Polymers 0.000 description 2
- 239000005061 synthetic rubber Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229920006243 acrylic copolymer Polymers 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229920001870 copolymer plastic Polymers 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- IWVKTOUOPHGZRX-UHFFFAOYSA-N methyl 2-methylprop-2-enoate;2-methylprop-2-enoic acid Chemical compound CC(=C)C(O)=O.COC(=O)C(C)=C IWVKTOUOPHGZRX-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
Landscapes
- Cleaning In General (AREA)
Abstract
The invention aims to provide a cleaning device capable of efficiently removing both relatively large foreign matters and fine foreign matters from the surface of an object. The cleaning device of the invention, one side transports the foreign matter of the surface of one side removal of platelike or membranous target thing, wherein, include the brush roll, in the direction of reversing relative to the transport direction, rotate and drive by the rotating shaft roughly perpendicular to transport direction and roughly parallel to transport surface; a cleaning roller rotationally driven by a rotation shaft substantially perpendicular to the conveying direction and substantially parallel to the conveying surface in a direction normal to the conveying direction; a 1 st opposed roller arranged to be opposed to and substantially parallel to the brush roller by the object; and a 2 nd counter roller disposed to face the cleaning roller with the object and substantially parallel thereto. Preferably, the surface hardness of the 1 st counter roll is higher than the surface hardness of the 2 nd counter roll. Preferably, the 1 st counter roll is a metal roll.
Description
Technical Field
The present invention relates to a cleaning device.
Background
In recent years, cleaning devices have been developed for removing foreign substances such as dust adhering to the surface of a glass substrate or a resin substrate for a Flat Panel Display (FPD), a printed circuit board on which electronic components are mounted, a ceramic green sheet (ceramic green sheet) for forming a multilayer ceramic capacitor or the like, a resin sheet, or an object such as a film.
As such a cleaning device, for example, the following cleaning devices are proposed: foreign matter on the surface of an object is removed by a charged brush, and the removed foreign matter is transported and recovered by a cleaning roller by electric field force (see japanese patent laid-open publication No. 2011-92846).
However, in the above-described cleaning device, although relatively large millimeter-sized foreign matter can be removed by the charging brush, since a portion where the charging brush does not contact the surface of the object is generated, there is a possibility that the foreign matter (particularly fine foreign matter) present on the non-contact portion cannot be sufficiently removed. In the above-described cleaning device, not only the efficiency of removing the foreign matter from the surface of the object by the charging brush is hardly sufficient, but also the efficiency of conveying and collecting the foreign matter by the cleaning roller is hardly sufficient. Therefore, the cleaning device has room for improvement in terms of efficiency of removing foreign matter and the like.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2011-92846
Disclosure of Invention
Problems to be solved by the invention
The present invention has been made in view of the above circumstances, and an object thereof is to provide a cleaning device capable of efficiently removing both relatively large foreign matter and fine foreign matter from the surface of an object.
Means for solving the problems
The invention which has been made in order to solve the above-mentioned problem is a cleaning device which removes foreign matter on the surface while conveying a plate-like or film-like object, comprising a brush roller which is rotationally driven by a rotation shaft which is substantially perpendicular to the conveying direction and substantially parallel to the conveying surface in a direction reversed with respect to the conveying direction; a cleaning roller rotationally driven by a rotation shaft substantially perpendicular to the conveying direction and substantially parallel to the conveying surface in a direction normal to the conveying direction; a 1 st opposed roller arranged to be opposed to and substantially parallel to the brush roller by the object; and a 2 nd counter roller disposed to face the cleaning roller with the object and substantially parallel thereto.
According to the cleaning device, relatively large foreign substances can be removed from the object by the brush roller, and fine foreign substances can be efficiently removed from the object by the cleaning roller. Further, the cleaning device includes the 1 st opposed roller opposed to the brush roller and the 2 nd opposed roller opposed to the cleaning roller, and thereby relatively large foreign matter can be removed by the brush roller and fine foreign matter can be removed by the cleaning roller more efficiently.
Preferably, the surface hardness of the 1 st counter roll is higher than the surface hardness of the 2 nd counter roll. In this way, by making the surface hardness of the 1 st counter roller higher than that of the 2 nd counter roller, the brush roller and the cleaning roller can be appropriately brought into contact with the object by the 1 st counter roller and the 2 nd counter roller, respectively, and therefore, the foreign matter removal efficiency can be further improved.
Preferably, the 1 st counter roll is a metal roll. In this way, by using the 1 st opposed roller as a metal roller as a relatively hard roller, the brush roller can be appropriately brought into contact with the object, and therefore relatively large foreign matter can be more effectively removed.
The 2 nd opposite roller is an elastic roller. In this way, by using the second counter roller as the elastic roller, an appropriate nip width can be secured between the second counter roller and the cleaning roller. As a result, the adhesion between the cleaning roller and the object can be improved, and the fine foreign matter on the surface of the object can be more effectively removed.
The elastic roller preferably includes: a conductive core rod; an inner layer portion that covers an outer surface of the conductive mandrel and has conductivity; and an outer layer portion covering an outer surface of the inner layer portion. In this way, since the elastic roller has the inner layer portion and the outer layer portion, the elasticity can be secured by the inner layer portion while the stain-proofing property and the wear resistance can be secured by the outer layer portion. As a result, the adhesion between the elastic roller and the cleaning roller can be maintained appropriately, and therefore, the removal of fine foreign matter by the cleaning roller can be performed appropriately for a long period of time. Further, since the mandrel bar and the inner layer portion have conductivity, a desired electric field can be more reliably formed between the elastic roller and the cleaning roller, and foreign matter can be effectively removed by the cleaning roller.
Preferably, the outer layer portion has a hardness higher than that of the inner layer portion. In this way, since the hardness of the outer layer portion is higher than that of the inner layer portion, the effect of improving the adhesion between the cleaning roller and the object by providing the inner layer portion, and the effect of improving the stain resistance, wear resistance, and the like by providing the outer layer portion can be more remarkably obtained.
The hardness of the inner layer is preferably 15 ° or more and 70 ° or less in accordance with Japanese Industrial Standard (JIS) -A, and the hardness of the outer layer is preferably 50 ° or more in accordance with JIS-A. By setting the JIS-A hardness of the inner layer portion and the outer layer portion to the above ranges, the adhesion between the cleaning roller and the object by the provision of the inner layer portion and the improvement in the stain resistance, wear resistance, and the like by the provision of the outer layer portion can be more remarkably obtained.
Preferably, the brush roller and the cleaning roller are charged, and potentials of the 1 st counter roller and the 2 nd counter roller are set to a fixed potential. In this way, by charging the brush roller and the cleaning roller and setting the potentials of the 1 st counter roller and the 2 nd counter roller to a fixed potential, electric fields can be effectively formed between the brush roller and the 1 st counter roller and between the cleaning roller and the 2 nd counter roller, respectively, and therefore both relatively large foreign matter and fine foreign matter can be more efficiently removed from the object.
In the description of the rotation direction of each roller in the present specification, a case where the roller rotates in a direction that rotates in conjunction with the movement direction of the object or another roller is referred to as "rotating in the normal rotation direction", and conversely, the roller rotates in the reverse rotation direction ". The term "substantially perpendicular" means that the angle of intersection with the vertical line is within ± 10 °, and may be perpendicular. Further, "substantially parallel" means that an acute angle of an angle formed by two straight lines exceeds 0 ° and is within 10 °, or is parallel. In the present specification, "front side" and "back side" of an object are merely for convenience of distinction, and do not necessarily correspond to the front side and the back side when the object is used.
ADVANTAGEOUS EFFECTS OF INVENTION
The cleaning device of the present invention can remove not only relatively large foreign matters of millimeter size but also fine foreign matters, and therefore can be suitably used for removing foreign matters such as dust adhering to the surface of a plate-like or film-like object.
Drawings
Fig. 1 is a perspective view showing a cleaning device according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view of the cleaning device shown in fig. 1.
Fig. 3 is a schematic cross-sectional view of a brush roller of the cleaning apparatus shown in fig. 1.
Fig. 4 is a schematic sectional view of a recovery roller of the cleaning device shown in fig. 1.
Fig. 5 is a schematic front view of the conveying roller of the cleaning device shown in fig. 1.
Fig. 6 is a schematic cross-sectional view taken along line X-X of fig. 5.
Fig. 7 is a schematic cross-sectional view showing an example of a height adjusting mechanism of a cleaning apparatus applicable to an embodiment of the present invention.
Fig. 8 is a schematic cross-sectional view showing a step of height adjustment using the height adjustment mechanism of fig. 7.
Fig. 9 is a schematic perspective view showing the height adjusting mechanism of fig. 8.
Fig. 10 is a schematic sectional view of a cleaning roller of the cleaning device shown in fig. 1.
Fig. 11 is a schematic perspective view showing a unit-side terminal of a cleaning device applicable to an embodiment of the present invention.
Fig. 12 is a schematic perspective view showing a holder-side terminal of a cleaning device applicable to an embodiment of the present invention.
Fig. 13 is a schematic sectional view showing a voltage applying mechanism applicable to a cleaning apparatus according to an embodiment of the present invention.
Fig. 14 is a schematic sectional view of a cleaning device different from fig. 1.
Fig. 15 is a diagram showing a charging sequence of the object, the brush, and the foreign matter.
Fig. 16(a) and 16(B) are schematic diagrams for explaining an experimental method for optimizing the applied voltage of the brush roller in the brush roller unit.
Fig. 17 is a graph showing the measurement result of the foreign matter adsorption width with respect to the applied voltage of the brush roller.
Fig. 18(a) and 18(B) are imaging results of the surface of the object showing the results of checking the cleaning performance.
Fig. 19(C) and 19(D) are imaging results of the surface of the object showing the results of checking the cleaning performance.
Fig. 20(E) and 20(F) are imaging results of the surface of the object showing the results of checking the cleaning performance.
Description of the symbols
1: a holder;
2A: an upstream-side external conveyance mechanism;
2B: a downstream side external conveyance mechanism;
3: a cleaning mechanism;
3A: a front side cleaning mechanism;
3B: a backside cleaning mechanism;
4: a surface side brush roller unit;
5: a surface-side cleaning roller unit;
6: a back-side opposing roller unit;
7: a back side brush roller unit;
8: a backside cleaning roller unit;
9: a front-side opposing roller unit;
10: a plate-like member;
11: a rod;
12: a shaft;
13. 44, 55: a foreign matter recovery unit;
20A, 20B: a belt conveying section;
21A, 21B, 130: a roller;
22A, 22B: an endless belt;
40. 50, 90: a frame body;
40A, 44A, 50A, 55A, 90A: a grip portion;
40B, 50B, 90B: an opening part;
41. 52, 71, 81, 141: a brush roll;
41A, 51A, 52A, 71A, 81A: a core rod;
41B, 52B, 71B, 81B: a bonding layer;
41C, 52C, 71C, 81C: brushing;
42. 53, 72, 82: a recovery roller;
42A: a roller body;
42B: a corrosion resistant layer;
43. 54, 73, 83: a blade;
43a, 54a, 73a, 83 a: a blade support portion;
45. 85: a conveying roller;
45A: a mandrel;
45B: a resin part;
51. 80, 151: a cleaning roller;
51B: an inner layer portion;
51C: an outer layer part;
60. 91: opposing metal rollers;
61. 92: opposite resin rollers;
62: an auxiliary roller;
101: a fixing member;
102: a sliding member;
103: a top plate;
104. 112, 112: a cover;
110: a unit side terminal;
111: a unit-side metal plate;
120: a holder-side terminal;
121: a base part;
122: a holder-side metal plate;
123: a surrounding portion;
130 a: recessing;
131: a frame-side electrode;
132: a plate spring;
d: a conveying direction;
l1, L2: a distance;
s, Sa, Sb, Sc, Sd, Se, Sf: an object;
s1: a surface-side surface;
s2: a backside surface;
xa, Xb, Xc, Xd, Xe, Xf: a foreign matter;
z: a shaft.
Detailed Description
Hereinafter, an example of the cleaning device of the present invention will be described in detail with reference to the accompanying drawings. It is needless to say that the specific configuration and details of the present invention may be appropriately changed within a range where the essence of the present invention is utilized.
< cleaning device >
The cleaning apparatus shown in fig. 1 and 2 removes foreign matter on the surface (front surface S1 and back surface S2) of a flat plate-like object S while conveying the object S in the conveying direction D. The cleaning device mainly includes a holder 1, external conveyance means (upstream external conveyance means 2A and downstream external conveyance means 2B), and cleaning means 3.
[ object ]
The object S is a flat plate-like member in fig. 2, but is not particularly limited as long as it is a plate-like or film-like member. Specifically, the surface of the object may be flat as shown in fig. 2, but there may also be a recess. Further, a hole or the like may be present in the object.
Examples of the plate-like object include: a glass substrate, a resin substrate, a printed circuit board for mounting electronic components, a ceramic green sheet for forming a multilayer ceramic capacitor, or a resin sheet of an FPD. Examples of the film-like object include a resin film.
The average thickness of the object is not particularly limited, but the lower limit thereof is preferably 30 μm, and more preferably 50 μm. If the average thickness of the object is less than the lower limit, the object may be difficult to convey. On the other hand, the upper limit of the average thickness of the object is, for example, 5 mm.
[ fixer ]
The holder 1 holds the cleaning mechanism 3. The anchor 1 is formed by connecting a pair of plate-like members 10 facing each other by a plurality of rods 11 and shafts 12.
[ external conveyance mechanism ]
The external conveyance mechanism is a mechanism for applying a propulsive force to the object S for conveyance, and is provided outside the cleaning mechanism 3. The external conveyance mechanism includes an upstream external conveyance mechanism 2A disposed upstream in the conveyance direction from the cleaning mechanism 3, and a downstream external conveyance mechanism 2B disposed downstream in the conveyance direction from the cleaning mechanism 3. The conveying speed of the object S by the external conveying means is not particularly limited as long as the foreign matter can be removed from the object S by the cleaning means 3. The lower limit of the conveyance speed of the object S is preferably 5m/min, and more preferably 10 m/min. On the other hand, the upper limit of the conveying speed of the object S is preferably 30m/min, and more preferably 20 m/min. If the conveyance speed of the object S is less than the lower limit, the time required for removing the foreign matter may be long, and the foreign matter removal efficiency may be reduced. On the other hand, if the conveyance speed of the object S exceeds the upper limit, the foreign matter on the surface of the object S may not be sufficiently removed by the cleaning mechanism 3.
< upstream external conveyance mechanism >
The upstream-side external conveyance mechanism 2A is for carrying the object S into the cleaning mechanism 3, and includes a plurality of belt conveyors 20A. The belt conveying unit 20A is formed by winding an endless belt 22A between a pair of rollers 21A spaced apart in the conveying direction D. One of the pair of rollers 21A is a driving roller to which a rotational force is applied, and the other is a driven roller that rotates together with the endless belt 22A by the rotation of the driving roller. The plurality of belt conveying members 20A are arranged at regular intervals in a horizontal direction (hereinafter, also referred to as a "conveying width direction") perpendicular to the conveying direction D.
< downstream external conveyance mechanism >
The downstream-side external conveyance mechanism 2B is for carrying out the object S from the cleaning mechanism 3, and includes a plurality of belt conveyors 20B. The belt conveying section 20B has the same configuration as the plurality of belt conveying sections 20A of the upstream-side external conveying mechanism 2A. That is, the plurality of belt conveying units 20B are configured by winding the endless belt 22B between a pair of rollers 21B including a driving roller and a driven roller, which are spaced apart in the conveying direction D. The plurality of belt conveying members 20B are also arranged at regular intervals in the conveying width direction.
[ cleaning mechanism ]
The cleaning mechanism 3 is a mechanism capable of cleaning both the front surface S1 and the back surface S2 of the object S, and includes a front cleaning mechanism 3A and a back cleaning mechanism 3B.
< front side cleaning mechanism >
The front side cleaning mechanism 3A is a unit that removes foreign matter on the front side surface S1 of the conveyed object S. The front-side cleaning mechanism 3A includes a front-side brush roller unit 4, a front-side cleaning roller unit 5, and a back-side counter roller unit 6. The cleaning device is configured such that a front side brush roller unit 4 and a front side cleaning roller unit 5 are detachably attached to a holder 1 provided on a base on the floor of a factory or the like. The anchor 1 may be fixed to the base by a fixing tool such as a screw, but is preferably placed in a movable state without using a fixing tool. The front brush roller unit 4 and the front cleaning roller unit 5 are disposed above the object S to be conveyed (above the conveying path), and are detachably held by the holder 1.
[ meter side brush roll unit ]
The front side brush roller unit 4 is a unit for removing foreign matter on the front side surface S1 of the object S by the brush roller 41 housed in the frame 40, and is suitable for removing relatively large foreign matter of millimeter size. The frame 40 of the front brush roller unit 4 accommodates a recovery roller 42, a blade 43, a foreign matter recovery unit 44, and a conveyance roller 45 in addition to the brush roller 41, and is unitized as a whole. In this way, the front side brush roller unit 4 is detachably unitized to the holder 1, and the front side brush roller unit 4 can be easily detached from the holder 1. As a result, when the brush roller 41 needs to be replaced in accordance with the type of the object S or the foreign matter, the brush roller can be replaced together with the unit, and therefore the foreign matter can be removed efficiently and easily. Further, by detaching the front side brush roller unit 4 from the holder 1, the opposed metal roller 60 opposed to the brush roller 41, which will be described later, can be exposed and easily replaced or cleaned, and therefore, the maintenance property is excellent. Further, the brush roller 41 and the like housed in the housing 40 are easier to maintain than those assembled and fixed to the holder 1.
(frame body)
The frame 40 is a unit that houses the brush roller 41 and the like and is detachable from the holder 1. The frame body 40 includes: an upstream plate and a downstream plate which are arranged to face each other so as to be substantially perpendicular to the conveying surface; a pair of side plates connecting side end portions of the upstream plate and the downstream plate to each other; a top plate connected to the upstream plate, the downstream plate, and the upper ends of the pair of side plates; and a bottom plate connected to the lower ends of the upstream plate, the downstream plate, and the pair of side plates. A pair of grips 40A spaced apart in the width direction are provided in the top plate. The pair of grips 40A is used when the front brush roller unit 4 is attached and detached. An opening 40B is provided in the bottom plate, and the brush 41C of the brush roller 41 described later has its tip end protruding from the opening 40B. The material constituting the frame 40 is not particularly limited, and examples thereof include stainless steel.
(Brush roll)
The brush roller 41 is a front side brush roller that comes into contact with the object S to be conveyed and removes foreign matter on the front side surface S1, particularly relatively large foreign matter (for example, millimeter-sized foreign matter). The brush roller 41 is driven to rotate by a power from an external drive source in a direction (clockwise direction in fig. 2) reverse to the conveyance direction D in a charged state by a rotation shaft substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface. The brush roller 41 is preferably rotationally driven in a direction reverse to the conveyance direction D in a charged state, but may be rotationally driven in a non-charged state.
As shown in fig. 3, such a brush roller 41 has a columnar core rod 41A and a plurality of brush bristles 41C implanted into the outer peripheral surface of the core rod 41A via an adhesive layer 41B.
The plug 41A is formed of a material having electrical conductivity, such as a metal, a carbon material, or a synthetic resin composite material. The upper limit of the volume resistivity of the material having conductivity is, for example, 10 5 Omega cm. A voltage is applied to the mandrel 41A by a voltage applying mechanism such as an external power supply described later.The voltage applied to the mandrel bar 41A is set so as to have the same polarity and have a larger absolute value than the cleaning roller 51 of the front side cleaning roller unit 5, which will be described later.
The lower limit of the voltage applied to the starting rod 41A is preferably-800V, and more preferably-600V. On the other hand, the upper limit of the voltage is preferably-200V, more preferably-300V.
The bristles 41C are preferably those to which foreign matter is easily physically attached, and examples thereof include those made of synthetic resin fibers. The brush bristles 41C are preferably those capable of carrying an electric charge for adsorbing foreign matter adhering to the front surface S1 of the object S, and for example, those made of synthetic resin fibers containing a conductive material such as carbon black, carbon fibers, metal powder, or metal whiskers are preferably used.
The cross-sectional shape of the brush 41C is not particularly limited, and examples thereof include: circular, elliptical, star-shaped, etc. The outer shape of the brush 41C is not particularly limited, and examples thereof include: a straight line, a wavy line, a combination of a curved line and a straight line, and the like. Further, the larger the surface area of the brush bristles 41C, the more easily foreign substances are adsorbed. Therefore, the bristles 41C can have a cross-sectional shape that is singular, such as a star shape, with a large surface area.
The brush roller 41 is rotationally driven in a direction reversed with respect to the conveyance direction D of the object S, and thereby the foreign matter adhering to the brush bristles 41C can be scraped off the front surface S1 of the object S. Further, by applying a voltage to the brush roller 41 to charge it, the attraction force by the electric field force acts, and the foreign matter on the front surface S1 of the object S is effectively attracted to the brush bristles 41C. In particular, by charging the brush roller 41, even when there are holes or recesses on the surface of the object S, foreign matter present in the holes or recesses can be efficiently removed. Further, by applying the voltage of the above range to the cored bar 41A, relatively large foreign matters can be more effectively adsorbed from the front surface S1 of the object S to the brush roller 41.
Further, the brush roller 41 of the front side brush roller unit 4 has the brush bristles 41C, rotates in the direction reverse to the conveyance direction D, and is applied with a voltage having the same polarity and a larger absolute value than the cleaning roller 51, so that relatively large foreign substances of a millimeter level can be removed from the front side surface S1 of the object S.
The lower limit of the average amount of the brush roller 41 pressed against the object S is preferably 0.3mm, and more preferably 0.5 mm. On the other hand, the upper limit of the average pressure bonding amount is preferably 1.5mm, and more preferably 1 mm. If the average pressure-bonding amount is less than the lower limit, foreign matter on the front surface S1 of the object S may not be sufficiently scraped. Conversely, if the average pressing amount exceeds the upper limit, the resistance between the brush staples 41C and the front surface S1 of the object S increases, and therefore the conveyance speed of the object S may decrease and the front surface S1 of the object S may be damaged. The "pressing amount" is an amount of penetration of the brush 41 into the object S, and is a value obtained by subtracting a minimum distance between the surface of the mandrel 41A and the front surface S1 of the object S from an average length of the brush 41C.
The lower limit of the peripheral speed of the brush roller 41 is preferably 1m/min, and more preferably 2 m/min. On the other hand, the upper limit of the peripheral speed of the brush roller 41 is preferably 30m/min, and more preferably 15 m/min. If the circumferential speed of the brush roller 41 is less than the lower limit, foreign matter on the front surface S1 of the object S may not be sufficiently scraped off. On the other hand, if the peripheral speed of the brush roller 41 exceeds the upper limit, the resistance between the brush bristles 41C and the front surface S1 of the object S increases, and therefore the conveyance speed of the object S may decrease and the front surface S1 of the object S may be damaged. The upper limit of the ratio (B/W) of the circumferential speed B of the brush roller 41 to the conveyance speed W of the object S is preferably 25%. If the circumferential speed B of the brush roller 41 is too high with respect to the conveyance speed W of the object S, it may be difficult to scrape relatively large foreign matter with the brush roller 41.
(recovery roll)
The recovery roller 42 is a 1 st recovery roller that is substantially parallel to the brush roller 41, abuts against the brush bristles 41C, and recovers foreign matter attached to the brush bristles 41C. The recovery roller 42 has a smaller diameter than the brush roller 41, and is disposed above the brush roller 41 on the upstream side in the conveying direction than the brush roller 41. With this arrangement, adverse effects such as foreign matter scraped by the blade 43 described later adhering to members such as the recovery roller 42 again can be reduced.
As shown in fig. 4, the recovery roller 42 includes: a roller body 42A formed of a conductive material, and a corrosion resistant layer 42B laminated on the outer peripheral surface thereof. The material of the roller main body 42A is not particularly limited as long as it is a conductive material, and examples thereof include a metal material such as stainless steel, copper, and aluminum, a conductive resin material prepared by blending a conductive material such as a conductive filler into a synthetic resin, and the like. The corrosion resistant layer 42B may be a metal plating layer formed by plating such as nickel plating or gold plating. However, the recovery roller 42 may be formed entirely of a conductive material that is difficult to oxidize, such as stainless steel, and does not have the corrosion resistant layer 42B.
The recovery roller 42 is rotationally driven by power from an external drive source in a direction (clockwise direction in fig. 2) reversed with respect to the brush roller 41 in a state of being charged by an external power source. By setting the rotation direction of the recovery roller 42 to the reverse direction with respect to the brush roller 41 in this manner, the recovery efficiency of the foreign matter can be improved. The lower limit of the magnification of the rotation speed of the recovery roller 42 with respect to the rotation speed of the brush roller 41 is preferably 1.0 time. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 41 to the recovery roller 42. However, the rotation direction of the recovery roller 42 may be a direction normal to the brush roller 41.
The voltage applied to the recovery roller 42 is made to have the same polarity and higher absolute value than the voltage applied to the brush roller 41. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 42 and the voltage applied to the brush roller 41 is preferably 200V, and more preferably 300V. On the other hand, the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V. The lower limit of the voltage applied to the recovery roller 42 is preferably-1,500V, and more preferably-1,200V. On the other hand, the upper limit of the applied voltage is preferably-400V, more preferably-600V. By passingSince the voltage applied to the brush roller 41 is the same polarity and has a higher absolute value than the voltage applied to the brush roller 41, and the potential of the outer peripheral surface of the recovery roller 42 is the same polarity and has a higher absolute value than the potential of the brush bristles 41C of the brush roller 41, foreign matter adhering to the brush roller 41 can be adsorbed to the outer peripheral surface of the recovery roller 42. In particular, by setting the difference between the applied voltages of the recovery roller 42 and the brush roller 41 to the above range and further setting the applied voltage to the recovery roller 42 to the above range, foreign matter adhering to the brush roller 41 can be effectively adsorbed on the outer peripheral surface of the recovery roller 42. The upper limit of the electric resistance of the recovery roller 42 is preferably 10 8 Omega. By setting the resistance of the recovery roller 42 to 10 8 Ω or less, even when the recovery roller 42 is surface-treated or a coating film is formed, it can be effectively charged by applying a voltage.
(blade)
The blade 43 is the 1 st blade for scraping and removing foreign matter from the recovery roller 42. The blade 43 is, for example, a rectangular plate-like member having elasticity.
The blade 43 has a free end at its tip end and a base end fixed to the blade support portion 43 a. A tip portion of the blade 43 as a free end abuts on an outer peripheral surface of the recovery roller 42 in an axial direction of the recovery roller 42. The blade 43 preferably contacts the outer peripheral surface of the recovery roller 42 in an inclined state. The lower limit of the inclination angle of the blade 43 with respect to the virtual tangent line of the outer periphery of the recovery roller 42 at the contact point between the blade 43 and the recovery roller 42 is preferably 5 °, and more preferably 15 °. On the other hand, the upper limit of the inclination angle is preferably 30 °, and more preferably 25 °. When the angle is less than the lower limit, there is a possibility that: the foreign matter is not sufficiently scraped off by the blade 43 due to the insufficient pressure contact force, and a re-transfer phenomenon occurs in which the foreign matter scraped off by the blade 43 is re-attached to the object S. On the other hand, when the inclination angle exceeds the upper limit, the blade 43 may be wound and contracted while being wound into the rotation of the recovery roller 42. Therefore, the blade 43 is brought into contact with the recovery roller 42 so that the inclination angle falls within the range, whereby foreign matter can be efficiently scraped off from the recovery roller 42. The blade 43 is disposed upstream of the recovery roller 42 in the conveying direction, i.e., above the conveying roller 45. This makes it possible to effectively utilize the space above the conveying roller 45 and to reduce the size of the front brush roller unit 4. Further, the foreign matter collecting unit 44 described later can be extracted toward the upstream side in the conveying direction, and convenience can be improved.
The material of the blade 43 is not particularly limited, but is preferably elastic, and more preferably synthetic resin. Specifically, in order to impart appropriate elasticity, it is preferable that the elastic member is formed of a synthetic resin such as thermosetting polyurethane. In order to reduce friction with the recovery roller 42 in contact therewith, at least the tip portion of the blade 43 may be coated with fluorine using a fluorine-containing compound such as a fluorine resin. The lower limit of the average thickness of the fluorine coating is preferably 5 μm. On the other hand, the upper limit of the average thickness is preferably 15 μm. If the average thickness is less than the lower limit, the friction reducing effect may not be sufficiently exhibited, and the blade 43 may be easily involved in the rotation of the recovery roller 42. On the other hand, when the average thickness exceeds the upper limit, the fluorine coating may be damaged. The shape of the blade 43 is not limited to the rectangular plate shape of fig. 2, and may be a shape that is bent or curved from the base end portion to the tip end portion.
(foreign matter collecting part)
The foreign matter collecting unit 44 is a 1 st foreign matter collecting unit that collects and accommodates the foreign matter scraped off from the collecting roller 42 by the blade 43. The foreign matter collecting unit 44 is disposed below the front end of the blade 43 and is located upstream of the brush roller 41 in the conveying direction. The foreign matter collecting portion 44 is fitted into the opening of the upstream plate of the frame 40 and is extractable from the opening toward the upstream side in the conveying direction. A grip portion 44A is provided on the upstream side of the foreign matter collecting portion 44, and the foreign matter collecting portion 44 is easily moved in and out by the grip portion 44A. Further, since the foreign matter collecting section 44 can be drawn out toward the upstream side in the conveying direction, the foreign matter can be collected by being drawn out while maintaining the state in which the front side brush roller unit 4 is fixed to the holder 1, and the convenience is excellent.
(conveying roller)
The conveying roller 45 is a moving person who guides the object S conveyed into the cleaning mechanism 3 together with an auxiliary roller 62 of the back-side opposite roller unit 6, which will be described later. The conveying roller 45 and the auxiliary roller 62 also have a function of applying a propelling force to the object S in order to cause the object S to enter below the brush roller 41, which is inverted with respect to the conveying direction D, with an appropriate force. The conveying roller 45 is disposed to face an auxiliary roller 62 of the back-side facing roller unit 6 described later. The conveying roller 45 rotates in a direction normal to the conveying direction D (counterclockwise direction in fig. 2). Here, if the force of sandwiching the object S between the auxiliary roller 62 and the conveying roller 45 is too strong, foreign matter may be pressed against the object S and may be difficult to remove, or the object S may be damaged. In consideration of these circumstances, the conveying roller 45 is disposed so as to press the auxiliary roller 62 with a force of about 0.49N. However, the pressing force may be appropriately adjusted in consideration of the material, thickness, and the like of the object S. In addition, when the hardness of the object S is relatively high and the object S can be moved into the lower portion of the brush roller 41 only by the auxiliary roller 62, the conveying roller 45 may be omitted from the cleaning device.
As shown in fig. 5 and 6, the conveying roller 45 includes a mandrel 45A and a plurality of resin portions 45B, and the resin portions 45B are annular members laminated on the outer periphery of the mandrel 45A and are spaced apart from each other in the axial direction of the mandrel 45A. As shown in fig. 5 and 6, the resin portion 45B has irregularities on the outer peripheral surface. In this way, by disposing the plurality of resin portions 45B having the irregularities on the outer peripheral surface at intervals, the contact area between the conveying roller 45 and the front surface S1 of the object S can be reduced. As a result, when the object S is carried into the cleaning mechanism 3, the object S is prevented from being jammed between the carrying roller 45 and the auxiliary roller 62.
The mandrel 45A is made of metal such as stainless steel, copper, or aluminum. Resin portion 45B is formed of, for example, polyurethane or the like. Examples of the polyurethane include: acrylic mixed urethane, fluorine mixed urethane, and the like. Here, "acrylic hybrid urethane" is a resin containing polyester polyurethane or polyether polyurethane as a main component, and means (1) a mixture of thermoplastic polyurethane and a silicon-acrylic copolymer resin, (2) a mixture containing an acrylic resin (for example, a graft compound obtained by grafting an aminoethyl group onto a main chain of a methacrylic acid-methyl methacrylate copolymer) and thermoplastic polyurethane, or (3) a mixture containing an acrylic resin, polyurethane and a fluorine-based surface coating agent. The "fluorine mixed urethane" is a resin containing polyurethane as a main component, and is a mixture of thermoplastic polyurethane and urethane/fluorine copolymer. The "main component" refers to a component having the largest content, and is, for example, a component containing 50 mass% or more.
(height adjusting mechanism)
The meter-side brush roller unit 4 is preferably configured in such a manner that the height can be adjusted by a height adjustment mechanism. In this way, the height of the front side brush roller unit 4 can be adjusted by the height adjustment mechanism, whereby the amount of pressure contact of the brush roller 41 with the object S can be adjusted, and relatively large foreign matter can be more efficiently removed by the brush roller 41.
Fig. 7 to 9 show an example of a state in which the front side brush roller unit 4 is disposed on the plate-like member 10 of the holder 1 via the height adjustment mechanism of the front side brush roller unit 4 (the holder 1, the height adjustment mechanism, and members other than the top plate 103 of the frame 40 of the front side brush roller unit 4 are not shown). The height adjustment mechanism of fig. 7 to 9 mainly includes: a substantially plate-shaped fixing member 101 fixed to the plate-shaped member 10 of the anchor 1; a slide member 102 which is placed on the upper surface of the fixed member 101 and can move horizontally and vertically in the conveyance direction D; and a cover 104 covering the fixing member 101. The top plate 103 of the front side brush roller unit 4 supports the end portion in the longitudinal direction by the sliding member 102, and moves up and down along with the sliding member 102. In the height adjusting mechanism of fig. 7 to 9, a gauge fixed to the plate-like member 10 and capable of measuring the vertical position of the slide member 102 or the like, or an adjusting tool for fixing the horizontal position of the slide member 102 may be further provided. Fig. 7 shows a state in which the height of the meter-side brush roller unit 4 is adjusted so as to be minimum. Fig. 8 and 9 show a state in which the height of the front side brush roller unit 4 is adjusted to be maximum.
A slope having a height gradually increasing from approximately the center in the conveyance direction D to the downstream side (the right side in fig. 7 and 8) is formed on a part of the upper surface of the fixing member 101. On the other hand, the upper surface of the slide member 102 is substantially horizontal, but a slope whose height gradually increases from the vicinity of the substantial center in the conveyance direction D to the downstream side is formed in a part of the lower surface. The slope of the upper surface of the fixed member 101 and the slope of the lower surface of the sliding member 102 have the same gradient and abut. Therefore, by horizontally moving the slide member 102 in the conveyance direction D, the height can be raised and lowered while maintaining the upper surface of the slide member 102 in a substantially horizontal state. Thus, the height of the top plate 103 supported by the slide member 102 (the distance L1 and the distance L2 between the upper surface of the top plate 103 and the upper end of the plate-like member 10) can be changed, and the front side brush roller unit 4 can be adjusted to a desired height by changing the height of the top plate 103.
In the height adjusting mechanism of fig. 7 to 9, since the relatively large horizontal movement of the slide member 102 can be steplessly (steplessly) converted into the relatively fine vertical movement of the top plate 103, the height of the brush roller unit 4 can be finely adjusted steplessly in accordance with the kind or thickness of the object S. Since the height adjusting mechanism of fig. 7 to 9 can be disposed in the vicinity of the upper end of the anchor 1, the space of the anchor 1 can be effectively used, and the workability in height adjustment is excellent.
However, the manner, structure, and the like of the height adjustment mechanism of the brush roller unit 4 are not limited to fig. 7 to 9. Other methods for adjusting the height include, for example: a method of arranging a spacer having a predetermined height on a fixing portion of the brush roller unit 4 in the holder 1, a method of arranging a protrusion portion in the brush roller unit 4 on the front side and arranging a rail-shaped member fitted to the protrusion portion on the holder 1 in the vertical direction, and thereby the mounting height of the brush roller unit 4 on the front side can be adjusted steplessly, and the like.
[ meter side cleaning roller unit ]
The front-side cleaning roller unit 5 is a unit for removing foreign matter on the front surface S1 of the object S by the cleaning roller 51 housed in the housing 50. In the housing 50 of the front-side cleaning roller unit 5, the brush roller 52, the recovery roller 53, the blade 54, and the foreign matter recovery unit 55 are mainly housed in addition to the cleaning roller 51, and the whole is unitized. The front-side cleaning roller unit 5 is suitable for removing fine foreign matters smaller than millimeter sizes, and is detachably disposed on the holder 1 at a position on the downstream side in the conveying direction from the front-side brush roller unit 4. Here, the cleaning roller 51 is set to apply pressure from both surfaces of the object S together with the opposing resin roller 61 described later in order to effectively move fine foreign matter on the surface thereof. Therefore, if the front cleaning roller unit 5 is disposed upstream of the front brush roller unit 4, a relatively large foreign object may be pressed and pressed against the object S by the cleaning roller 51, and the foreign object may not be removed by the brush roller 41. Therefore, the front-side cleaning roller unit 5 is preferably disposed on the downstream side of the front-side brush roller unit 4.
In this way, the front-side cleaning roller unit 5 can be easily detached from the holder 1 by detachably unitizing the front-side cleaning roller unit 5 to the holder 1. As a result, when the cleaning roller 51 needs to be changed according to the type of the object S or the foreign matter, the unit can be replaced together with the cleaning roller, and therefore, the foreign matter can be removed efficiently and easily. Further, by detaching the front-side cleaning roller unit 5 from the holder 1, the opposing resin roller 61 and the like, which will be described later, opposing the cleaning roller 51 can be exposed and easily replaced or cleaned, and therefore, the maintenance property is excellent. Further, the cleaning roller 51 and the like housed in the housing 50 are unitized by being housed in the housing 50, and maintenance is also facilitated as compared with a case where the cleaning roller is assembled and fixed to the apparatus.
(frame body)
The frame 50 is a unit that houses the cleaning roller 51 and the like and is detachable from the holder 1. The frame 50 has an upstream plate, a downstream plate, a pair of side plates, a top plate, and a bottom plate, as in the case of the front side brush roller unit 4. The top plate is provided with a pair of grips 50A spaced apart in the conveyance width direction. The pair of grips 50A is used when the front-side cleaning roller unit 5 is attached and detached. An opening 50B is provided in the bottom plate, and a part of the cleaning roller 51 protrudes from the opening 50B. The downstream plate is bent from the upper side to the lower side. The material constituting the frame 50 is not particularly limited, and a metal such as stainless steel can be suitably used.
(cleaning roller)
The cleaning roller 51 is a member for removing foreign matter, particularly relatively fine foreign matter (e.g., foreign matter smaller than a millimeter size) on the front surface S1 of the object S, and is rotationally driven by a rotation shaft substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance plane in a direction normal to the conveyance direction D (counterclockwise direction in fig. 2) in a state where the outer peripheral surface is electrically charged. As shown in fig. 10, the cleaning roller 51 is an elastic roller having a mandrel bar 51A, an inner layer 51B formed on the outer peripheral surface of the mandrel bar 51A, and an outer layer 51C covering the outer peripheral surface of the inner layer 51B.
The plug 51A is formed in a cylindrical shape by a conductive material. Examples of the conductive material used for the mandrel bar 51A include a metal material, and specifically, like the roller main body 42A of the recovery roller 42 of the front side brush roller unit 4, stainless steel, copper, aluminum, and the like.
The inner portion 51B secures a constant pressing force or a nip width against the object S by the cleaning roller 51 and the opposing resin roller 61 described later. That is, the inner layer 51B ensures a desired contact force or contact width with respect to the object S, and contributes to efficiently removing relatively fine foreign matter from the front surface S1. The material forming the inner portion 51B is preferably a resin material having elasticity and conductivity, and more preferably a resin material containing a resin component and carbon, such as polyurethane, silicone resin, natural rubber, or synthetic rubber. As the polyurethane, the same polyurethane as that of the resin portion 45B of the conveying roller 45 can be suitably used. More preferably, the material forming the inner layer portion 51B is a conductive elastomer containing polyester polyurethane and carbon black. With these materials, the elasticity of the cleaning roller 51 can be sufficiently ensured, excessive pressing of foreign matter against the object S by the cleaning roller 51 is avoided, and a decrease in the foreign matter removal efficiency is suppressed. The lower limit of the JIS-A hardness of the inner layer 51B is preferably 15 °. The upper limit of the JIS-A hardness is preferably 70 °. Further, the electricity is supplied to the inner portion 51BResistor, preferably 10 8 Omega is less than or equal to. When the JIS-A hardness of the inner layer portion 51B is within the above range, the elasticity of the cleaning roller 51 can be sufficiently ensured, and A nip width in which foreign matter on the object S can be effectively removed between the cleaning roller and the opposing resin roller 61 of the back-side opposing roller unit 6, which will be described later, can be ensured.
The outer layer portion 51C acts as follows: while ensuring the adhesion to the object S or preventing the application of an appropriate surface potential, the cleaning roller 51 is prevented from being adversely affected by moisture or the like while ensuring the antifouling property and wear resistance. The material of the outer layer portion 51C may be any material as long as it can be charged so as to adsorb foreign matter adhering to the front surface S1 of the object S by an electric field force, and examples thereof include polyurethane such as acrylic hybrid polyurethane and fluorine hybrid polyurethane, silicone resin, natural rubber, synthetic rubber, and the like, and among these, polyurethane is preferable. As described above, by forming the outer layer portion 51C from polyurethane, the wear resistance is improved as compared with the case of forming it from silicone resin, butyl rubber, or the like, and contamination of the cleaning roller 51 due to the addition of a plasticizer or a low molecular weight compound can be reduced. The outer layer portion 51C preferably has a hardness higher than that of the inner layer portion 51B, and more specifically, preferably has a hardness of 50 ° or more in Japanese Industrial Standards (JIS) -a. The abrasion resistance of the cleaning roller 51 can be sufficiently ensured by the JIS-A hardness of the outer layer portion 51C being 50 ° or more.
By using acrylic hybrid polyurethane as the material of the outer layer portion 51C, it is easy to remove the negatively charged foreign matter from the front surface S1 of the object S. On the other hand, by using the fluorine-blended polyurethane as the material of the outer layer portion 51C, the cleaning roller 51 is easily negatively charged, and the positively charged foreign matter is easily removed from the object S.
If the adhesive force of the outer layer portion 51C is too strong, the cleaning roller 51 may be caught in the object S if the object S is thin. Therefore, in order to prevent the object S from being entangled, it is preferable that a minute projection be formed on the surface (outer layer portion 51C) of the cleaning roller 51. As a specific method for forming the fine protrusions, a method of blending particles serving as a raw material of the fine protrusions into a resin material such as thermoplastic polyurethane used for forming the outer layer portion 51C is preferable. The particles may be either fixed particles or irregular particles, but from the viewpoint of uniformizing the projecting shape of the fine protrusions, fixed spherical particles are preferred. The lower limit of the average particle diameter of the spherical particles is preferably 2 μm, and more preferably 2.5 μm. On the other hand, the upper limit of the average particle size is preferably 5 μm, and more preferably 4.5 μm. In the spherical particles, the lower limit of the coefficient of variation (cv (coefficient of variation) value) obtained by dividing the standard deviation (σ) of the average particle diameter by the average particle diameter is preferably 3.0%, and more preferably 3.5%. On the other hand, the upper limit of the variation coefficient is preferably 5.0%, and more preferably 4.5%. Here, the "average particle diameter" refers to a volume average particle diameter (Mv) determined by a laser diffraction/scattering method.
The spherical particles are preferably harder than the thermoplastic polyurethane. However, the spherical particles are preferably made of resin because the object S may be damaged if they are excessively hard, such as glass beads or ceramic beads. Examples of the hard resin forming the spherical particles include melamine resin and acrylic resin, and among these, melamine resin is preferable.
The lower limit of the average thickness of the outer layer portion 51C is preferably 2 μm, and more preferably 5 μm. On the other hand, the upper limit of the average thickness of the outer layer portion 51C is preferably 500 μm, and more preferably 300 μm. If the average thickness of the outer layer portion 51C is less than the lower limit, the surface of the cleaning roller 51 may not be sufficiently charged, and the foreign substance adsorption effect may not be sufficiently obtained. Conversely, if the average thickness of the outer layer portion 51C exceeds the upper limit, good charging characteristics for adsorbing foreign matter may not be obtained.
The cleaning roller 51 is charged by application of a voltage from an external power supply, and is given a surface potential (surface charge). That is, the cleaning roller 51 comes into contact with the front surface S1 of the object S in a state where the surface is charged, and adsorbs and removes relatively fine foreign substances adhering to the front surface S1 of the object S by the force of an electric field. In this way, by charging the cleaning roller 51, even when the object S has holes or depressions on the surface, foreign matter present in the holes or depressions can be efficiently removed.
The voltage applied to the cleaning roller 51 is made to have the same polarity and lower absolute value with respect to the voltage applied to the brush roller 41 of the brush roller unit 4 on the front side. The lower limit of the voltage applied to the cleaning roller 51 is, for example, -400V, preferably-200V. On the other hand, the applied voltage is, for example, less than 0V, preferably-50V or less. In this way, by changing the voltage applied to the cleaning roller 51 to the same polarity and lower in absolute value with respect to the voltage applied to the brush roller 41 of the brush roller unit 4 to the front side, relatively fine foreign matters can be removed from the front side surface S1 of the object S. In particular, by setting the voltage applied to the cleaning roller 51 within the above range, relatively fine foreign substances can be efficiently removed from the front surface S1 of the object S. The upper limit of the resistance of the cleaning roller 51 is preferably 10 8 Omega. Resistance through the cleaning roller 51 is 10 8 Omega or less, which can be effectively charged when a voltage is applied.
In order to improve the efficiency of collecting fine foreign matter, the cleaning roller 51 is preferably set to a height at which an appropriate pressure is applied to the object S between the cleaning roller and the opposing resin roller 61. The pressure applied to the object S by the cleaning roller 51 and the opposing resin roller 61 may be, for example, a linear pressure: 2.4kg/250 mm. Here, 250mm is the axial length of the outer layer portion 51C of the cleaning roller 51 in the present embodiment. The cleaning roller 51 also has a function of applying an appropriate propulsive force to the object S together with the opposing resin roller 61. This makes it easy to bring the object S below the brush roller 71 of the backside brush roller unit 7, which rotates in the reverse direction to the conveyance direction D.
(Brush roll)
The brush roller 52 collects foreign matter removed from the object S by the cleaning roller 51, and is disposed directly above the cleaning roller 51 so as to be substantially parallel to and in contact with the cleaning roller 51. The brush roller 52 is rotationally driven by power from an external drive source in a reverse direction (counterclockwise rotation direction in fig. 2) with respect to the cleaning roller 51 in a charged state. Such a brush roller 52 includes a columnar core bar 52A and a plurality of brush bristles 52C (see fig. 3) implanted on the outer peripheral surface of the core bar 52A via an adhesive layer 52B, and the details thereof are the same as those of the core bar 41A and the brush bristles 41C of the brush roller 41 of the front side brush roller unit 4, and therefore, redundant description thereof is omitted. In addition, the applied voltage to the brush roller 52 (the voltage applied to the cored bar 52A) is made to have the same polarity and to have a higher absolute value than the applied voltage to the cleaning roller 51. As a specific lower limit of the voltage applied to the brush roller 52, it is preferably-800V, more preferably-600V, as in the brush roller 41 of the front side brush roller unit 4. On the other hand, the upper limit of the applied voltage is preferably-200V, more preferably-300V.
(recovery roll)
The recovery roller 53 is a 2 nd recovery roller for recovering the foreign matter recovered from the brush roller 51 by the brush roller 52, and is disposed above the brush roller 52 so as to be substantially parallel to the brush roller 52 and to abut against the brush bristles 52C. The recovery roller 53 is rotationally driven by power from an external drive source in a reverse direction (counterclockwise rotation direction in fig. 2) with respect to the brush roller 52 in a charged state. The details of the recovery roller 53 may be the same as those of the recovery roller 42 of the front side brush roller unit 4, and therefore, a repetitive description thereof will be omitted.
The voltage applied to the recovery roller 53 is made to have the same polarity and higher absolute value than the voltage applied to the brush roller 52. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 53 and the voltage applied to the brush roller 52 is preferably 200V, and more preferably 300V. On the other hand, the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V. The lower limit of the voltage applied to the recovery roller 53 is preferably-1,500V, and more preferably-1,200V. On the other hand, the upper limit of the applied voltage is preferably-400V, more preferably-600V. Since the applied voltage to the recovery roller 53 is changed to the same polarity and the absolute value is increased with respect to the applied voltage to the brush roller 52, the potential of the outer peripheral surface of the recovery roller 53 is changed to the same polarity and the absolute value is increased with respect to the potential of the brush bristles 52C of the brush roller 52, and therefore, foreign matter adhering to the brush roller 52 can be adsorbed to the outer peripheral surface of the recovery roller 53. In particular, by setting the difference between the applied voltages of the recovery roller 53 and the brush roller 52 to the above range and further setting the applied voltage to the recovery roller 53 to the above range, foreign matter adhering to the brush roller 52 can be effectively adsorbed on the outer peripheral surface of the recovery roller 53.
The recovery roller 53 is disposed on the downstream side in the conveying direction from the brush roller 52. Thus, even if the diameter of the recovery roller 53 is smaller than the brush roller 52, foreign matter can be scraped off to the downstream side in the conveying direction by the blade 54 described later, and re-adsorption of foreign matter to the brush roller 52 can be suppressed.
The rotation direction of the recovery roller 53 may be either a normal rotation direction or a reverse rotation direction with respect to the brush roller 52, and is preferably a rotation direction in which foreign matter is easily recovered from the outer peripheral surface by a blade 54 described later. In the present embodiment, as shown in fig. 2, the recovery efficiency of the foreign matter by the blade 54 can be improved by setting the rotation direction of the recovery roller 53 to the reverse direction (counterclockwise rotation direction in fig. 2) with respect to the brush roller 52. The lower limit of the magnification of the rotation speed of the recovery roller 53 with respect to the rotation speed of the brush roller 52 is preferably 1.0 time. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. This allows foreign matter to be effectively moved from the brush roller 52 to the recovery roller 53.
(blade)
The blade 54 is a 2 nd blade for scraping foreign matters from the recovery roller 53. The blade 54 and the blade supporting portion 54a supporting the blade are the same in detail as the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4.
(foreign matter collecting part)
The foreign matter collecting section 55 collects and accommodates the foreign matter scraped off from the collecting roller 53 by the blade 54. The foreign matter collecting unit 55 is disposed below the front end of the blade 54 and is located downstream of the brush roller 52 in the conveying direction. The foreign matter collecting portion 55 is fitted into an opening portion of a downstream plate of the housing 50 and is extractable toward the downstream side in the conveying direction through the opening portion. A grip portion 55A is provided downstream of the foreign matter collecting portion 55, and the foreign matter collecting portion 55 is easily moved in and out by the grip portion 55A. Further, since the foreign matter collecting unit 55 can be drawn out toward the downstream side in the conveying direction, it is excellent in convenience in that the foreign matter can be collected by being drawn out while maintaining the state in which the cleaning roller unit 5 is fixed to the holder 1.
(height adjusting mechanism)
The front-side cleaning roller unit 5 is preferably configured to be adjustable in height by a height adjustment mechanism. In this way, the pressing force (nip width) of the cleaning roller 51 against the object S can be adjusted by adjusting the height of the front-side cleaning roller unit 5 by the height adjustment mechanism, and as a result, fine foreign matter can be efficiently removed.
As a specific example of the height adjusting mechanism of the front side cleaning roller unit 5, for example, the same mechanism as exemplified as the height adjusting mechanism of the front side brush roller unit 4 can be used.
As described above, since the front side brush roller unit 4 and the front side cleaning roller unit 5 are both detachable, the height adjusting mechanism can be independently provided in each unit. Therefore, even when the optimum pressure contact condition of the brush roller 41 of the front side brush roller unit 4 with respect to the object S is different from the optimum pressure contact condition of the cleaning roller 51 of the front side cleaning roller unit 5 with respect to the object S, the cleaning device can optimize the respective pressure contact states.
[ backside opposing roller unit ]
The back-side counter roller unit 6 defines a conveyance path of the object S together with the brush roller 41 of the front brush roller unit 4 and the cleaning roller 51 of the front cleaning roller unit 5, and is disposed on the back side of the object S (below the conveyance path). The back-side counter roller unit 6 mainly includes: a pair of opposing rollers including a opposing metal roller 60 as a 1 st back-side opposing roller and an opposing resin roller 61 as a 2 nd back-side opposing roller, and an auxiliary roller 62. From the viewpoint of maintenance, the back-side opposite roller unit 6 is preferably detachably attached to the holder 1.
Here, in order to accurately control the amount of pressing the brush bristles 41C of the brush roller 41 against the object S, it is advantageous that the hardness of the 1 st opposing roller holding the object S on the lower surface of the object S is high. Therefore, since the opposed metal roller 60 is a relatively hard metal roller, the brush bristles 41C of the brush roller 41 of the front side brush roller unit 4 can be appropriately brought into contact with the object S, and relatively large foreign substances can be effectively removed from the front side surface S1. On the other hand, in order to efficiently adsorb fine foreign matters on the surface of the cleaning roller 51, it is necessary to apply an appropriate pressure to the object S between the cleaning roller and the 2 nd counter roller, but if an excessive pressure is applied, the foreign matters are pressed against the object S, and thus, the foreign matters are difficult to collect. Therefore, the 2 nd opposed roller is not suitable as a roller having high hardness such as a metal, and is preferably a resin roller having hardness substantially equal to that of the cleaning roller 51. Therefore, since the opposing resin roller 61 is a resin roller (elastic roller) having elasticity, it is possible to apply an appropriate pressure to the object S between the opposing resin roller 61 and the cleaning roller 51 of the front-side cleaning roller unit 5 to improve the close contact and to secure an appropriate nip width, and therefore, it is possible to efficiently remove fine foreign matter from the front surface S1 of the object S by the cleaning roller 51.
(opposite metal roller)
The counter metal roller 60 is a 1 st backside counter roller that faces the brush roller 41 of the front side brush roller unit 4 via the object S and is disposed directly below the brush roller 41 so as to abut against the object S. The counter metal roller 60 is rotationally driven in a direction (clockwise direction in fig. 2) normal to the conveyance direction D of the object S. That is, the opposing metal roller 60 is rotationally driven in a reverse direction with respect to the brush roller 41 of the front side brush roller unit 4. The details of the opposing metal roller 60 are the same as those of the recovery roller 42 of the front side brush roller unit 4. However, the opposite metal roller 60 is not connected to an external power source but electrically connected to the ground, and thus, an electric field suitable for removing foreign substances may be generated when the brush roller 41 is charged.
In order to prevent the backside surface S2 of the object S from being damaged, a urethane resin or the like may be applied to the surface facing the metal roller 60. When the opposed metal roller 60 is surface-treated or a coating film is formed, the electrical resistance of the opposed metal roller 60 is preferably 10 8 Omega is less than or equal to. Resistance through the facing metal rolls 60 was 10 8 Omega or less, the opposite metal roller 60 is easily electrically connected to the ground.
As described above, the brush roller 41 must accurately control the amount of sinking of the brush into the object S. Therefore, the 1 st backside facing roller facing the brush roller 41 needs to stably support the object S. Therefore, the 1 st backside facing roller is preferably high in hardness, and more specifically, as in the present embodiment, is preferably a facing metal roller 60. However, the 1 st backside opposing roller does not necessarily need to be a metal roller, and a conductive resin roller or the like may be used.
(resin roll in opposite directions)
The opposing resin roller 61 is opposed to the cleaning roller 51 of the front side cleaning roller unit 5 via the object S, and is disposed directly below the cleaning roller 51 so as to abut on the object S. The opposing resin roller 61 is rotationally driven in a direction (clockwise direction in fig. 2) normal to the conveyance direction D of the object S. That is, the opposing resin roller 61 is rotationally driven in a direction of normal rotation with respect to the cleaning roller 51. The details of the opposing resin roller 61 are substantially the same as those of the cleaning roller 51 of the front-side cleaning roller unit 5. However, when forming the outer layer portion of the opposing resin roller 61, it is preferable to blend titanium oxide, barium titanate, or the like as particles of the material to be the fine protrusions for forming the fine protrusions. By using titanium oxide, barium titanate, or the like as the particles, the density of the fine protrusions increases, and the object S can be appropriately conveyed. The resin roller 61 is electrically connected to the ground without being connected to an external power source, and an electric field suitable for removing foreign matters can be generated between the charged cleaning roller 51 and the resin roller.
As described above, in order to improve the efficiency of collecting fine foreign matter, the cleaning roller 51 is set so as to apply an appropriate pressure to the object S between the cleaning roller and the opposing resin roller 61. If the pressure is too low, a sufficient propelling force for causing the object S to protrude into the brush roller 71 of the back side brush roller unit 7 cannot be applied by the cleaning roller 51 and the opposing resin roller 61, and if the pressure is too high, foreign matter may be pressed and fixed to the object S and cannot be collected. Therefore, in order to adjust the pressure, an elastic body or the like may be used to press the opposing resin roller 61 in the direction of the cleaning roller 51.
(auxiliary roll)
The auxiliary roller 62 is a person who guides the object S, which is carried into the cleaning mechanism 3 by the upstream external conveyance mechanism 2A, together with the conveyance roller 45 of the front side brush roller unit 4. The auxiliary roller 62 may have the same layer structure as the opposing resin roller 61.
< backside cleaning mechanism >
The back-side cleaning mechanism 3B removes foreign matter on the back-side surface S2 of the object S. The back-side cleaning mechanism 3B is configured to turn the front-side cleaning mechanism 3A up and down, and includes a back-side brush roller unit 7, a back-side cleaning roller unit 8, and a front-side counter roller unit 9.
[ backside brush roller unit ]
The back side brush roller unit 7 is a device for removing foreign matter on the back side surface S2 of the object S by the brush roller 71, and is disposed on the back side of the object S (below the conveyance path) on the downstream side in the conveyance direction from the back side counter roller unit 6 of the front side cleaning mechanism 3A. The back side brush roller unit 7 mainly includes a brush roller 71, a recovery roller 72, and a blade 73, and basically has the same configuration as the front side brush roller unit 4 of the front side cleaning mechanism 3A. However, the back-side brush roller unit 7 differs from the front-side brush roller unit 4 in that members corresponding to the conveying roller 45 and the foreign matter collecting unit 44 are not provided. The reason why no member corresponding to the conveying roller 45 is provided in the back-side brush roller unit 7 is that: although the brush roller 71 is rotationally driven in a direction reverse to the conveyance direction D, the cleaning roller 51 and the opposing resin roller 61 disposed upstream in the conveyance direction from the brush roller 71 provide an appropriate propulsive force to the object S in order to enter below the brush roller 71. In addition, although the member corresponding to the foreign matter collecting portion 44 is not provided in the back side brush roller unit 7, the foreign matter can be discharged to the outside of the unit through the bottom opening thereof. Foreign matter discharged from the back side brush roller unit 7 is collected by a foreign matter collecting portion 13 provided at the lowermost portion of the holder 1 together with foreign matter discharged from a back side cleaning roller unit 8 described later. From the viewpoint of maintainability, the back-side brush roller unit 7 is preferably detachably attached to the holder 1.
(Brush roll)
The brush roller 71 is a backside brush roller, which is brought into contact with the backside surface S2 of the object S in an electrically charged state, and is rotationally driven in a direction (counterclockwise direction in fig. 2) reversed with respect to the conveyance direction D of the object S, thereby removing relatively large foreign matter of millimeter size on the backside surface S2 of the object S. Such a brush roller 71 includes a columnar core bar 71A and a plurality of brush bristles 71C (see fig. 3) implanted on the outer peripheral surface of the core bar 71A via an adhesive layer 71B, and the details thereof are the same as those of the core bar 41A and the brush bristles 41C of the brush roller 41 of the front side brush roller unit 4, and therefore, redundant description thereof is omitted. Further, the voltage applied to the brush roller 71 (the voltage applied to the mandrel bar 71A) is set to have the same polarity and an absolute value higher than the voltage applied to the cleaning roller 80 of the back-side cleaning roller unit 8 described later. As a specific lower limit of the applied voltage to the brush roller 71, it is preferably-800V, more preferably-600V, as in the brush roller 41 of the front side brush roller unit 4. On the other hand, the upper limit of the applied voltage is preferably-200V, more preferably-300V.
The brush roller 71 is preferably rotationally driven in a direction reverse to the cleaning roller 80 in a charged state, but may be rotationally driven without being charged.
(recovery roll)
The recovery roller 72 is a 3 rd recovery roller that recovers foreign matter removed from the back surface S2 of the object S by the brush roller 71, and is disposed below the brush roller 71, substantially parallel to the brush roller 71, and in contact with the brush bristles 71C. The recovery roller 72 is rotationally driven by power from an external drive source in a reverse direction (counterclockwise rotation direction in fig. 2) with respect to the brush roller 71 in a charged state. The details of the recovery roller 72 may be the same as those of the recovery roller 42 of the front side brush roller unit 4, and therefore, a repetitive description thereof will be omitted.
The voltage applied to the recovery roller 72 is made to have the same polarity and higher absolute value than the voltage applied to the brush roller 71. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 72 and the voltage applied to the brush roller 71 is preferably 200V, and more preferably 300V. On the other hand, the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V. The lower limit of the voltage applied to the recovery roller 72 is preferably-1,500V, and more preferably-1,200V. On the other hand, the upper limit of the applied voltage is preferably-400V, more preferably-600V. Since the applied voltage to the recovery roller 72 is changed to the same polarity and higher in absolute value with respect to the applied voltage to the brush roller 71, and the potential of the outer peripheral surface of the recovery roller 72 is changed to the same polarity and higher in absolute value with respect to the potential of the brush bristles 71C of the brush roller 71, foreign matter adhering to the brush roller 71 can be adsorbed to the outer peripheral surface of the recovery roller 72. In particular, by setting the difference between the applied voltages of the recovery roller 72 and the brush roller 71 to the above range and further setting the applied voltage to the recovery roller 72 to the above range, the foreign matter adhering to the brush roller 71 can be effectively adsorbed on the outer peripheral surface of the recovery roller 72.
The rotation direction of the recovery roller 72 may be either a normal rotation direction or a reverse rotation direction with respect to the brush roller 71, and is preferably driven in a rotation direction in which foreign matter on the outer peripheral surface is easily recovered by a blade 73 described later. In the present embodiment, as shown in fig. 2, the recovery efficiency of the foreign matter by the blade 73 can be improved by setting the rotation direction of the recovery roller 72 to the reverse direction (counterclockwise rotation direction in fig. 2) with respect to the brush roller 71. The lower limit of the magnification of the rotation speed of the recovery roller 72 with respect to the rotation speed of the brush roller 71 is preferably 1.0 time. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 71 to the recovery roller 72.
(blade)
The blade 73 is a 3 rd blade for scraping foreign matters from the recovery roller 72. The blade 73 and the blade support portion 73A supporting the same are the same in detail as the blade 43 and the blade support portion 43A of the front side brush roller unit 4 of the front side cleaning mechanism 3A.
[ Back-side cleaning roller unit ]
The back-side cleaning roller unit 8 is a unit for removing fine foreign matter on the back surface S2 of the object S by the cleaning roller 80, and is disposed on the back side of the object S (below the conveyance path) on the downstream side in the conveyance direction from the back-side brush roller unit 7. The back-side cleaning roller unit 8 mainly includes a cleaning roller 80, a brush roller 81, a recovery roller 82, a blade 83, and a conveyance roller 85, and has the same basic configuration as the front-side cleaning roller unit 5 of the front-side cleaning mechanism 3A. However, the back-side cleaning roller unit 8 differs from the front-side cleaning roller unit 5 in that it includes the conveying roller 85 and in that no member corresponding to the foreign matter collecting unit 55 is provided. The back-side cleaning roller unit 8 is not provided with a member corresponding to the foreign matter collecting unit 55, but is opened at the bottom thereof so that the foreign matter can be discharged to the outside of the unit. The foreign matter discharged from the back-side cleaning roller unit 8 is collected by the foreign matter collecting portion 13 provided at the lowermost portion of the holder 1 together with the foreign matter discharged from the back-side brush roller unit 7. From the viewpoint of maintenance, the back-side cleaning roller unit 8 is preferably detachably attached to the holder 1.
(cleaning roller)
The cleaning roller 80 is a back-side cleaning roller for removing fine foreign matter on the back-side surface S2 of the object S, and is disposed on the back side of the object S (below the conveyance path). The cleaning roller 80 is rotationally driven by a rotation shaft substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface in a direction (clockwise rotation direction in fig. 2) normal to the conveyance direction D in a state where the outer peripheral surface is charged. The details of the cleaning roller 80 may be the same as those of the cleaning roller 51 of the front-side cleaning roller unit 5, and therefore, a repetitive description thereof will be omitted.
The voltage applied to the cleaning roller 80 is made to be the same polarity and lower in absolute value with respect to the voltage applied to the brush roller 71 of the back-side brush roller unit 7. The lower limit of the voltage applied to the cleaning roller 80 is, for example, -400V, preferably-200V. On the other hand, the applied voltage is, for example, less than 0V, preferably-50V or less. In this way, by changing the voltage applied to the cleaning roller 80 to the same polarity and lower in absolute value with respect to the voltage applied to the brush roller 71 of the back side brush roller unit 7, relatively fine foreign substances can be removed from the back side surface S2 of the object S. In particular, by setting the voltage applied to the cleaning roller 80 within the above range, relatively fine foreign substances can be efficiently removed from the back surface S2 of the object S.
(Brush roll)
The brush roller 81 collects fine foreign matter removed from the back surface S2 of the object S by the cleaning roller 80, and is disposed below the cleaning roller 80 while being in contact with the cleaning roller 80. The brush roller 81 is driven to rotate in a reverse direction (clockwise direction in fig. 2) to the cleaning roller 80 in a charged state by a rotation shaft substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface. The brush roller 81 is formed by implanting a plurality of brush bristles 81C into a core rod 81A via an adhesive layer 81B, as in the brush roller 41 of the front side brush roller unit 4, and the details thereof are the same as those of the brush roller 41 of the front side brush roller unit 4.
The applied voltage to the brush roller 81 (the voltage applied to the cored bar 81A) is made to be the same polarity and to be higher in absolute value with respect to the applied voltage to the cleaning roller 80. As a specific lower limit of the applied voltage to the brush roller 81, it is preferably-800V, more preferably-600V, as in the brush roller 41 of the front side brush roller unit 4. On the other hand, the upper limit of the applied voltage is preferably-200V, more preferably-300V.
(recovery roll)
The recovery roller 82 is a 4 th recovery roller for recovering the fine foreign matters recovered by the brush roller 81 from the cleaning roller 80, and is disposed below the brush roller 81 substantially in parallel with the brush roller 81 and in contact with the brush bristles 81C. The recovery roller 82 is rotationally driven by power from an external drive source in a reverse direction (clockwise direction in fig. 2) with respect to the brush roller 81 in a charged state. The details of the recovery roller 82 may be the same as those of the recovery roller 42 of the front side brush roller unit 4, and therefore, a repetitive description thereof will be omitted.
The voltage applied to the recovery roller 82 is made to have the same polarity and higher absolute value than the voltage applied to the brush roller 81. The lower limit of the absolute value of the difference between the voltage applied to the recovery roller 82 and the voltage applied to the brush roller 81 is preferably 200V, and more preferably 300V. On the other hand, the upper limit of the absolute value of the difference is preferably 600V, and more preferably 500V. The lower limit of the voltage applied to the recovery roller 82 is preferably-1,500V, and more preferably-1,200V. On the other hand, the upper limit of the applied voltage is preferably-400V, more preferably-600V. Since the applied voltage to the recovery roller 82 is changed to the same polarity and the absolute value thereof is increased with respect to the applied voltage to the brush roller 81, the potential of the outer peripheral surface of the recovery roller 82 is changed to the same polarity and the absolute value thereof is increased with respect to the potential of the brush bristles 81C of the brush roller 81, and therefore, foreign matter adhering to the brush roller 81 can be adsorbed to the outer peripheral surface of the recovery roller 82. In particular, by setting the difference between the applied voltages to the recovery roller 82 and the brush roller 81 to the above range and further setting the applied voltage to the recovery roller 82 to the above range, foreign matter adhering to the brush roller 81 can be effectively adsorbed on the outer peripheral surface of the recovery roller 82.
The rotation direction of the recovery roller 82 may be either a normal rotation direction or a reverse rotation direction with respect to the brush roller 81, and is preferably driven in a rotation direction in which foreign matter is easily recovered from the outer peripheral surface by a blade 83 described later. In the present embodiment, as shown in fig. 2, the recovery efficiency of the foreign matter by the blade 83 can be improved by setting the rotation direction of the recovery roller 82 to the reverse direction (clockwise rotation direction in fig. 2) with respect to the brush roller 81. The lower limit of the magnification of the rotation speed of the recovery roller 82 with respect to the rotation speed of the brush roller 81 is preferably 1.0 time. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be effectively moved from the brush roller 81 to the recovery roller 82.
(blade)
The blade 83 is the 4 th blade for scraping foreign matters from the recovery roller 81. The blade 83 and the blade support portion 83A supporting the blade 83 are the same in detail as the blade 43 and the blade support portion 43A of the front side brush roller unit 4 of the front side cleaning mechanism 3A.
(conveying roller)
The conveying roller 85 is a carrier that guides the object S, and is disposed downstream of the cleaning roller 80 in the conveying direction. As the conveying roller 85, the same one as the opposing resin roller 61 can be suitably used.
[ meter side opposed roller unit ]
The front-side opposite roller unit 9 defines a conveyance path of the object S together with the brush roller 71 of the back-side brush roller unit 7 and the cleaning roller 80 of the back-side cleaning roller unit 8, and is disposed on the front side (above the conveyance path) of the object S. The front-side opposing roller unit 9 mainly includes a frame 90, an opposing metal roller 91 as a 1 st front-side opposing roller, and an opposing resin roller 92 as a 2 nd front-side opposing roller, and is detachably disposed on the holder 1. The cleaning device is provided with a front-side counter roller unit 9 detachably mounted on a device body fixed to a base on the floor of a factory or the like. By disposing the front-side opposite roller unit 9 detachably on the holder 1 in this manner, the front-side opposite roller unit 9 can be easily detached from the holder 1, and the brush roller 71 of the back-side brush roller unit 7 and the cleaning roller 80 of the back-side cleaning roller unit 8 are exposed. Therefore, the brush roller 71 or the cleaning roller 80 can be easily replaced or cleaned, and thus the maintenance property is excellent. Further, the opposing metal roller 91 and the opposing resin roller 92 housed in the housing 90 are also easier to maintain than those assembled and fixed to the holder 1.
(frame body)
The frame 90 is a unit formed by housing the opposing metal roller 91 and the opposing resin roller 92, and is detachable from the holder 1. A pair of grips 90A are provided on the top plate of the frame 90 so as to be spaced apart in the horizontal direction perpendicular to the conveyance direction D. The pair of grips 90A is used when the front-side opposed roller unit 9 is attached and detached. The frame 90 has an opening 90B in the bottom plate, and a part of the opposing metal roller 91 or the opposing resin roller 92 protrudes from the opening 90B. The material constituting the frame 90 is not particularly limited, and a metal such as stainless steel can be suitably used.
(opposite metal roller)
The opposing metal roller 91 faces the brush roller 71 of the backside brush roller unit 7 via the object S, and is disposed directly above the brush roller 71 so as to abut on the object S. The opposing metal roller 91 is a rotation driver, and rotates in a direction (counterclockwise rotation direction in fig. 2) reversed with respect to the brush roller 71 of the backside brush roller unit 7. The details of the opposing metal roller 91 are the same as those of the recovery roller 42 of the front side brush roller unit 4. However, the opposing metal roller 91 is not connected to an external power source but electrically connected to the ground, and an electric field suitable for removing foreign matter can be generated between the opposing metal roller and the brush roller 71.
Since the brush bristles 71C of the brush roller 71 of the back side brush roller unit 7 can be appropriately brought into contact with the object S by using the relatively hard metal roller as the opposed metal roller 91, relatively large foreign substances can be effectively removed from the back side surface S2 of the object S by the brush roller 71.
(resin roll in opposite directions)
The opposing resin roller 92 is opposed to the cleaning roller 80 of the back-side cleaning roller unit 8 via the object S, and is disposed directly above the cleaning roller 80 so as to abut against the object S. The resin roller 92 is rotationally driven and rotates in a normal direction (counterclockwise direction in fig. 2) with respect to the cleaning roller 80. The details of the opposing resin roller 92 are the same as those of the opposing resin roller 61 of the front-side opposing roller unit 6. However, the opposing resin roller 92 is electrically connected to the floor surface without being connected to an external power source, and an electric field suitable for removing foreign matter can be generated between the opposing resin roller and the cleaning roller 80.
Since the opposing resin roller 92 is a resin roller having elasticity, an appropriate nip width can be secured between the cleaning roller 80 of the back-side cleaning roller unit 8 and the cleaning roller 80, and therefore, the adhesion between the cleaning roller 80 and the object S can be improved, and fine foreign matter can be effectively removed from the back-side surface S2 of the object S by the cleaning roller 80. The back-side brush roller unit 7 and the back-side cleaning roller unit 8 of the back-side cleaning mechanism 3B are provided with height adjusting mechanisms for adjusting the heights thereof, which are also the same as the front-side cleaning mechanism 3A.
< live Circuit >
As described above, it is preferable that the outer peripheral surfaces of the recovery roller 42, the recovery roller 53, the recovery roller 72, the recovery roller 82, the cleaning roller 51, the cleaning roller 80, the brush roller 52, and the brush roller 81 are charged, and the brush roller 41 and the brush roller 71 are also charged. It is preferable that the auxiliary roller 62, the opposing metal roller 60, the opposing metal roller 91, the opposing resin roller 61, and the opposing resin roller 92 be electrically connected to the ground. The charging circuit for charging the rollers or electrically connecting them to the ground (including fixing to 0V) may be a known circuit. As a safety measure when the 2 rollers having different potential differences are short-circuited via a long conductive foreign matter or the like, the charging circuit may be provided with a mechanism (e.g., a fuse or the like) for interrupting the circuit when a current equal to or higher than a threshold value is applied, for example, with a current of 500 μ a as a threshold value.
[ terminals of unit and holder ]
Hereinafter, an example of a unit for electrically connecting each unit to an external power source, a ground, or the like, and a terminal of the holder 1 will be described. Fig. 11 shows a representation of the unit-side terminals 110 disposed at one end or both ends in the conveyance width direction of each unit. Fig. 12 shows the anchor side terminal 120 disposed on the inner surface of the anchor 1. Further, it is preferable that all the units are electrically connected to an external power source or the like by the connection structure, but some or all of the units may be electrically connected to an external power source or the like by a conventionally known connection structure.
The unit-side terminal 110 of fig. 11 mainly includes: 2 unit-side metal plates 111 arranged in parallel along an axis Z parallel to the conveyance direction D, and 2 covers 112 arranged so as to surround each unit-side metal plate 111 in a plan view. The cell-side metal plate 111 is electrically connected to the rollers of the respective cells via unillustrated wirings. The number of the unit-side metal plates 111 provided on the unit-side terminal 110 in fig. 11 is 2, but the number of the unit-side metal plates 111 may be appropriately changed depending on the number of rollers of each unit. The shape of the cover 112 may be appropriately changed depending on the number of the unit-side metal plates 111.
The holder-side terminals 120 of fig. 12 each have: a base portion 121 formed of an insulating member; 2 anchor-side metal plates 122 which are arranged on the upper surface of the base portion 121 and bent so that the unit-side metal plates 111 can be inserted from above and the inserted unit-side metal plates 111 can be gripped from both sides; and a surrounding portion 123 formed of an insulating member and disposed so as to surround each of the anchor-side metal plates 122. The holder-side metal plate 122 is electrically connected to an external power supply or the like via a wiring or the like, not shown. The 2 surrounding portions 123 are shaped so that the outer surfaces thereof can abut against the inner surfaces of the covers 112 of the unit-side terminals 110. The number of the anchor-side metal plates 122 included in the anchor-side terminal 120 in fig. 12 and the shape of the surrounding portion 123 may be appropriately changed according to the number of the unit-side metal plates 111 in the unit-side terminal 110, the shape of the cover 112, and the like.
By mounting each unit on the holder 1, the unit-side terminal 110 of fig. 11 and the holder-side terminal 120 of fig. 12 are electrically connected. Specifically, the respective unit-side metal plates 111 of the unit-side terminals 110 are inserted into the holder-side metal plates 122 of the holder-side terminals 120, so that the two metal plates are electrically connected to each other, and the cover 112 of the unit-side terminals 110 is fitted to the surrounding portions 123 so that the cover 112 and the surrounding portions 123 are covered. In this way, since the cover 112 and the surrounding portion 123 serve as guides for connecting the unit-side terminal 110 and the anchor-side terminal 120, both terminals can be easily connected and the connected both terminals can be firmly fixed. Therefore, by using the unit-side terminal 110 and the holder-side terminal 120 for the cleaning device, the units can be easily electrically connected while being mounted, so that convenience can be improved, and a strong connection structure can be formed, so that the voltage applied to each roller can be easily maintained to be constant even if vibration or the like occurs during operation.
[ Voltage applying mechanism for roller ]
In each unit, a voltage applying mechanism (including a mechanism electrically connected to the ground) is usually provided near one end of each roller, and the unit-side terminal 110 and the voltage applying mechanism are electrically connected by a wire. The voltage supplied from an external power supply or the like to each unit is supplied to each roller via the unit-side terminal 110, the wiring, and the voltage applying mechanism. In this case, it is preferable that a driving mechanism such as a gear for driving each roller is provided near the other end of each roller after using a member made of an insulating material. Fig. 13 shows a voltage applying mechanism as an example of the voltage applying mechanism, the voltage applying mechanism including: a conical recess 130a provided on one end surface of the roller 130; a frame-side electrode 131 having a hemispherical tip portion which abuts against the inner circumferential surface of the conical recess 130a of the roller 130; and a metal plate spring 132 connected to the frame-side electrode 131 and pressing the frame-side electrode 131 toward the roller 130. The center axis of the roller 130 and the apex of the conical depression substantially coincide with the center of the hemisphere at the distal end of the frame-side electrode 131 when viewed in the conveyance width direction. Further, the space between the roller 130 and the frame-side electrode 131 may be lubricated with grease of conductive grease.
In the voltage application mechanism, the unit-side terminals 110 and the plate springs 132 are electrically connected by unillustrated wiring, and a voltage is applied to the roller 130 via the wiring, the plate springs 132, the frame-side electrodes 131, and the recesses 130 a. The voltage applying mechanism brings the frame-side electrode 131 into contact with the vicinity of the central axis of the roller 130, that is, a portion of the roller 130 where the circumferential speed is relatively small, thereby suppressing wear of the roller 130 and the frame-side electrode 131. Further, the hemispherical tip of the frame-side electrode 131 is brought into contact with the conical recess provided in the roller 130, and the frame-side electrode 131 is pressed toward the roller 130 by the plate spring 132, whereby the electrical contact is easily maintained even when the roller 130 vibrates. Further, by bringing the frame-side electrode 131 into contact with the end surface of the roller 130 and pressing the frame-side electrode 131 in the conveyance width direction by the plate spring 132, even if the roller 130 vibrates vertically, the bending of the plate spring 132 is suppressed, and thus the stable pressing is facilitated. Further, since the inner peripheral surface of the conical recess 130a and the hemispherical distal end portion of the frame-side electrode 131 are brought into contact with each other, a space surrounded by the recess 130a and the distal end portion of the frame-side electrode 131 is formed, and therefore, grease can be sealed in the space to suppress scattering thereof. However, in order to further suppress scattering of the grease, a cover or the like may be provided around the voltage application mechanism as necessary.
However, the voltage applying mechanism in each cell is not limited to the one shown in fig. 13, and examples thereof include: a method of providing a conductive sliding member such as a conductive brush or a conductive bearing in the housing, and applying a voltage by bringing the conductive sliding member into contact with each roller.
[ cleaning method ]
A cleaning method for removing foreign matter from an object S using the cleaning apparatus of fig. 1 and 2 will be described. In the cleaning method, a voltage having the same polarity as that of the cleaning roller 51 of the front side cleaning roller unit 5 and a high absolute value is applied to the brush roller 41 of the front side brush roller unit 4. In addition, a voltage having the same polarity as that of the cleaning roller 80 of the back-side cleaning roller unit 8 and a high absolute value is applied to the brush roller 71 of the back-side brush roller unit 7 in the same manner. In this way, by applying a voltage having the same polarity and a higher absolute value than those of the cleaning rollers 51 and 80 to the brush rollers 41 and 71, relatively large foreign substances at a millimeter level can be removed by the brush rollers 41 and 71, and fine foreign substances can be removed by the cleaning rollers 51 and 80. Various conditions such as voltage application to each roller, rotation, and the like in the cleaning method may be the same as those in the cleaning device, and therefore, redundant description is omitted.
[ other embodiments ]
The present invention is not limited to the above embodiments, and can be implemented in various forms other than the above forms, with various modifications and improvements. In particular, fig. 1 and 2 are merely examples of the cleaning device, and for example, the layer structure of each roller may be different from that of fig. 2.
The cleaning rollers of the front-side cleaning roller unit and the back-side cleaning roller unit may not be charged. In this case, as the cleaning roller, for example, there can be used: a pressure-sensitive adhesive roll, a resin roll having an adhesive property, or the like. Among the rollers of the cleaning device, the rollers other than the front side brush roller, the front side cleaning roller, and the pair of back side facing rollers may be driven rollers. In this way, even if a part of the rollers of the cleaning device is a driven roller, the driven roller comes into contact with another roller that is rotationally driven or the conveyed object, and thus the roller can be driven to function. The rotation direction of the front side brush roller is preferably a direction reverse to the conveyance direction of the object, but may be a direction normal to the conveyance direction. Further, the rotation direction of the front-side cleaning roller is preferably a normal rotation direction with respect to the conveyance direction of the object, but may be a reverse rotation direction.
The cleaning device may have any other configuration as long as it includes at least one brush roller, one cleaning roller, one 1 st counter roller disposed to face the brush roller, and one 2 nd counter roller disposed to face the cleaning roller. Further, the 2 nd counter roller is preferably an elastic roller, but may be a hard roller in a range where foreign matter is not excessively pressed against the object S.
In the embodiment of fig. 1 and 2, the cleaning device having the configuration in which the brush roller is disposed on the upstream side in the conveying direction from the cleaning roller has been described, but the cleaning roller 151 may be disposed on the upstream side in the conveying direction from the brush roller 141 as in the cleaning device of fig. 14. The cleaning device of fig. 14 is different from the cleaning device of the embodiment of fig. 1 and 2 in the arrangement of the cleaning roller and the brush roller in the conveyance direction D. In fig. 14, the parts other than the cleaning roller 151 and the brush roller 141 are not shown. In the cleaning device, foreign substances attached to the surface of the object S are first adsorbed by the cleaning roller 151, and then the foreign substances remaining on the surface of the object S are adsorbed and removed by the brush roller 141. Here, the cleaning roller 151 mainly adsorbs fine foreign matters, and the brush roller 141 scrapes relatively large foreign matters on the surface of the object S and mainly adsorbs the scraped foreign matters. In this case, it is also preferable that the surface hardness of the 1 st facing roller facing the brush roller 141 is higher than the surface hardness of the 2 nd facing roller facing the cleaning roller 151.
In the embodiment shown in fig. 1 and 2, the foreign matter adhered to the cleaning roller and the brush roller is collected by 2 collection rollers, but the embodiment may be provided with 1 collection roller which abuts on both the outer peripheral surface of the brush roller and the outer peripheral surface of the cleaning roller and collects the foreign matter adhered to each roller. By providing such a configuration with the recovery roller, the number of parts can be reduced, and cost and space can be reduced.
In the above embodiment, instead of providing the openings in the bottom portions of the back-side cleaning roller unit and the back-side brush roller unit, the foreign matter collecting portions may be provided in the back-side cleaning roller unit and the back-side brush roller unit, respectively.
Further, in the example of the present embodiment, both of the pair of opposing rollers are electrically connected to the ground, but other configurations may be adopted. For example, the pair of opposing rollers may be fixed to 0V, or may be fixed to a predetermined positive potential depending on the charging state of the foreign matter. The condition to be satisfied is that a fixed potential serving as a reference is applied to the pair of opposing rollers with respect to the charged brush roller 41 and the charged cleaning roller 51. Therefore, different fixed potentials may be applied to each of the pair of opposed rollers as necessary. If the voltage difference between the fixed potential and the charged cleaning roller 51 is too small, a sufficient electric field for removing foreign matter cannot be generated, and therefore, the lower limit of the potential difference is preferably 50V.
It is needless to say that it is within the scope of the present invention to set the brush roller 41, the brush roller 71, the cleaning roller 51, and the cleaning roller 80 to positive potentials when the foreign matter is extremely negatively charged. In this case, the pair of opposing rollers may be electrically connected to the ground or may be applied with a fixed potential serving as a reference. The fixed potential may be 0V, or may be a predetermined negative potential or positive potential depending on the charging condition of the foreign matter.
Examples
The present invention will be described below with reference to examples, but the present invention is not limited to the following examples.
< optimization of Brush roll (Brush)
The charging sequence was determined by evaluating the charging properties of the workpiece (object) and bristles with the aim of selecting a material of bristles suitable for removing foreign matter from the viewpoint of triboelectric charging properties.
The bristles used were made of materials having the characteristics shown in table 1 below. In table 1 below, "-" indicates that no satisfactory properties were measured.
[ Table 1]
As the object and the foreign matter, an object of a target market and a foreign matter which is a problem in the market are used. Specifically, acrylic plates, glass plates, green sheets, and Polyethylene terephthalate (PET) films were used as objects, and acrylic cutting waste, copper powder, ceramic waste (ceramics residues), glass cutting waste, polyester particles, and fibers were used as foreign substances.
The triboelectric charging properties were evaluated by measuring the polarity of the objects and bristles when they were triboelectrically charged, the objects and bristles, or the bristles, respectively, by a surface potentiometer. The relationship between the foreign matter and the object is evaluated by charging the object with the foreign matter and triboelectrically charging the object, then attracting the foreign matter and measuring the amount of charge by a digital electrometer. The evaluation results of these are shown in fig. 15 as a charging sequence.
In general, in the charging sequence, the more the brush of the material positioned as far as possible away from the object and the foreign object is used, the higher the foreign object adsorption force becomes. Therefore, from the results of fig. 15, it is estimated that the materials 1 and 4 as the conductive polyester are suitable for removing foreign matters.
Then, the conductive polyester estimated to be most suitable for removing foreign matter was evaluated for the foreign matter removal performance using material 1 and material 4. In the above evaluation, the cleaning device shown in fig. 1 and 2 was used to remove foreign matter from the object S, and the foreign matter recovery rate to the foreign matter recovery unit 44 was calculated when the material of the brush bristles 41C included in the brush roller 41 of the front side brush roller unit 4 was material 1 or material 4. As the object S, a green sheet to which ceramic slag adheres is used. As a result, the recovery rate of foreign matter was 86.6% in the case of using material 1, while it was 26.7% in the case of using material 4. Therefore, it is judged that the material 1 is preferably a fiber having a relatively large fineness, that is, a relatively thick fiber. The reason why the recovery rate when the material 4 is used is lower than that when the material 1 having the same frictional electrification property is used is estimated as follows. Namely, the reason is considered to be that: since the material 4 is a fiber having a relatively small fineness, that is, a relatively thin fiber, the rigidity of the brush bristles 41C is insufficient, and the relatively large ceramic slag adhering to the object S cannot be moved.
< optimization of applied voltage to brush roller >
Optimization of voltage applied to the brush roller as shown in fig. 16(a), the brush roller to which a predetermined voltage is applied is brought into contact with an object to which dust adheres, and the brush roller to which the predetermined voltage is applied is held for 10 seconds. Then, as shown in fig. 16B, the brush roller was pulled away from the object, and the width of the band-shaped area formed by removing the dust was evaluated as the dust adsorption width (electric field application width).
As the brush bristles of the brush roller, conductive polyester of material 1, which had obtained suitable results in conventional evaluations, was used. As the object, a PET film having a thickness of 50 μm was used. Polyester particles having a particle diameter of 50 to 150 μm are used as the foreign matter. The prescribed voltage applied to the brush roller is set to 0V, -100V, -400V, -800V or-1,600V. Fig. 17 shows the evaluation results of the dust adsorption width.
As can be seen from fig. 17, it was confirmed that the dust adsorption width was the largest, i.e., the adsorption performance was the highest, when the applied voltage to the brush roller was-400V. In addition, according to the result shown in FIG. 17, as the lower limit of the applied voltage into the brush roller, it can be said that it is preferable to be-800V, more preferably-600V. On the other hand, the upper limit of the applied voltage is preferably-200V, more preferably-300V.
< study of circumferential velocity of brush and pressure contact amount >
With the cleaning device shown in fig. 1 and 2, foreign matter of the object is removed while changing the circumferential speed of the brush roller 41 of the front side brush roller unit 4 and the amount of pressure contact with the object. Thus, the influence of the circumferential speed of the brush roller and the amount of pressure contact of the brush roller with the object on the removal of foreign matter was examined.
The influence of the peripheral speed of the brush roller was evaluated as a relationship with the removability of the ceramic residue by changing the ratio (B/W) of the peripheral speed B of the brush roller to the conveyance speed W of the object. As a result, when the B/W is 50% (for example, the transport speed of the object is 12m/min, and the peripheral speed of the brush roller is 6m/min), the ceramic slag is flicked toward the inlet side of the workpiece. On the other hand, if the circumferential speed of the brush roller is changed to 3m/min and the B/W is changed to 25%, the flicking is suppressed. In general, small foreign matter is more likely to be flicked off than large foreign matter, and therefore B/W is preferably determined to be 25% or less.
The influence of the amount of pressure contact of the brush roller against the object was evaluated by removing the ceramic residue while changing the amount of pressure contact to 0.3mm or 0.6 mm. As a result, when the pressing amount is set to 0.3mm, a part of the ceramic residue is scraped by the brush roller and remains on the object. On the other hand, when the pressing amount is set to 0.6mm, the ceramic slag can be removed. Here, the larger the pressure bonding amount is, the higher the foreign matter removal performance is, but if it is too large, scratches may occur depending on the type or state of the object. However, the upper limit of the pressure bonding amount differs for each object. Therefore, by adjusting the height of the brush roller unit using the height adjusting mechanism, the amount of pressure contact of the brush roller can be optimized even when the thickness, kind, state, and the like of the object are different.
< confirmation of cleaning Performance >
The cleaning performance of the cleaning device was evaluated. Specifically, the cleaning devices shown in fig. 1 and 2 were used for combinations of various foreign substances and objects, and the peripheral speeds and applied voltages of the rollers were set as shown in table 2, and the surfaces of the objects before and after cleaning were imaged to evaluate the combinations.
Specific combinations of the foreign matter and the object were ceramic punch residue and green sheet, sebum and polarizing plate, cotton fiber and acrylic plate, polyester fiber and green sheet, or polyester particle and PET film. The conveying speed of the object was set to 10 m/min. Fig. 18(a) to 20(F) show the imaging results of the combinations. Fig. 18(a) to 20(F) are all the imaging results before cleaning in the left image and after cleaning in the right image. In the combination of FIG. 18A, the object Sa is a green sheet, and the foreign matter Xa is ceramic punch slag: (Thickness of 120 μm). In the combination shown in FIG. 18B, the object Sb is a green chip, and the foreign matter Xb is ceramic slag (having a length of 0.1mm to 3mm and a thickness of 170 μm) in various sizes and shapes. In the combination of FIG. 19(C), the object Sc is a deflection plate, and the foreign matter Xc is sebum. In the combination of fig. 19(D), the object Sd is an acrylic plate, and the foreign material Xd is cotton fiber. In FIG. 20E, the combination shows that the object Se is a raw sheet and the foreign matter Xe is a polyester fiber (having a length of 2mm to 15 mm). In the combination of FIG. 20F, the object Sf is a PET film, and the foreign matter Xf is polyester particles (particle diameter: 50 to 150 μm).
[ Table 2]
As shown in fig. 18(a) to 20(F), it was confirmed that foreign matter was appropriately removed from the object in any combination.
Industrial applicability
The cleaning device of the present invention can remove not only relatively large foreign substances of relatively large millimeter size but also fine foreign substances, and therefore can be suitably used for removing foreign substances such as dust adhering to the surface of a plate-like or film-like object.
Claims (7)
1. A cleaning device for removing foreign matter on a surface of a plate-like or film-like object while the object is conveyed, the cleaning device comprising:
a brush roller rotationally driven by a rotation shaft substantially perpendicular to the conveying direction and substantially parallel to the conveying surface in a direction reverse to the conveying direction;
a cleaning roller rotationally driven by a rotation shaft substantially perpendicular to the conveying direction and substantially parallel to the conveying surface in a direction normal to the conveying direction;
a 1 st opposed roller arranged to be opposed to and substantially parallel to the brush roller by the object; and
a 2 nd opposed roller arranged to be opposed to and substantially parallel to the cleaning roller via the object,
the cleaning roller is located on a downstream side of the carrying direction of the brush roller,
the surface of the cleaning roller is charged by an applied voltage of less than 0V,
the brush roller and the cleaning roller have the same polarity, and
the surface hardness of the 1 st facing roll is higher than the surface hardness of the 2 nd facing roll.
2. The cleaning device of claim 1, wherein the 1 st opposing roller is a metal roller.
3. The cleaning device according to claim 1, wherein the 2 nd opposing roller is an elastic roller.
4. The cleaning device of claim 3, wherein the resilient roller comprises: a conductive core rod; an inner layer portion that covers an outer surface of the conductive mandrel and has conductivity; and an outer layer portion covering an outer surface of the inner layer portion.
5. The cleaning device of claim 4, wherein the outer layer portion has a higher hardness than the inner layer portion.
6. The cleaning device according to claim 5, wherein the hardness of the inner layer portion is 15 ° or more and 70 ° or less in accordance with Japanese Industrial Standard-A,
the hardness of the outer layer section is 50 DEG or more in accordance with Japanese Industrial Standard-A.
7. The cleaning device according to any one of claims 1 to 6, wherein potentials of the 1 st opposing roller and the 2 nd opposing roller are set to a fixed potential.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016046369 | 2016-03-09 | ||
JP2016-046369 | 2016-03-09 | ||
PCT/JP2017/009623 WO2017155074A1 (en) | 2016-03-09 | 2017-03-09 | Cleaning device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108778536A CN108778536A (en) | 2018-11-09 |
CN108778536B true CN108778536B (en) | 2022-08-02 |
Family
ID=59789573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201780016866.3A Active CN108778536B (en) | 2016-03-09 | 2017-03-09 | Cleaning device |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6329701B2 (en) |
KR (1) | KR102325908B1 (en) |
CN (1) | CN108778536B (en) |
TW (1) | TWI725170B (en) |
WO (1) | WO2017155074A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7193830B2 (en) * | 2018-02-28 | 2022-12-21 | 紀伊産業株式会社 | article cleaning equipment |
US20230278075A1 (en) * | 2020-09-04 | 2023-09-07 | Signode India Ltd. | System and process for removing debris from plastic sheets |
CN114643707B (en) * | 2022-03-29 | 2023-03-24 | 南通慕派商贸有限公司 | Tectorial membrane dust collector that digital printing equipment used |
CN117862092B (en) * | 2024-03-12 | 2024-05-31 | 泰州志辉新材料科技有限公司 | Cleaning device for butterfly-shaped optical cable production |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102361703A (en) * | 2009-03-23 | 2012-02-22 | 阪东化学株式会社 | Cleaning system |
JP5423761B2 (en) * | 2011-10-03 | 2014-02-19 | コニカミノルタ株式会社 | Cleaning device and image forming apparatus |
JP2015138086A (en) * | 2014-01-21 | 2015-07-30 | コニカミノルタ株式会社 | Cleaning device and image forming apparatus |
CN204544823U (en) * | 2015-03-24 | 2015-08-12 | 淮安惠好木业有限公司 | The anti-airborne dust dust arrester of sheet material after sanding |
JP2015178091A (en) * | 2014-02-25 | 2015-10-08 | バンドー化学株式会社 | Cleaning device, adhesion roller unit, and adhesion roller |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0539558A (en) * | 1991-08-06 | 1993-02-19 | Nippon Steel Corp | Back-up roll of rotary brush |
JP3101485U (en) * | 2003-11-07 | 2004-06-10 | ユニテク株式会社 | Printed circuit board cleaning device |
DE102009014006A1 (en) * | 2009-03-19 | 2010-09-23 | Sms Siemag Aktiengesellschaft | Method and device for cleaning a metal strip |
JP2011092846A (en) * | 2009-10-29 | 2011-05-12 | Kyocer Slc Technologies Corp | Apparatus and method for removing foreign matter present for circuit board |
JP2011183248A (en) * | 2010-03-04 | 2011-09-22 | Nk Works Kk | Dust remover |
TWI406716B (en) * | 2010-06-17 | 2013-09-01 | Bando Chemical Ind | Clean system |
JP2015202471A (en) * | 2014-04-16 | 2015-11-16 | 株式会社オサダコーポレーション | Cleaning device for thin object |
JP6113785B2 (en) * | 2015-05-22 | 2017-04-12 | バンドー化学株式会社 | Cleaning device |
-
2017
- 2017-03-09 JP JP2017521164A patent/JP6329701B2/en active Active
- 2017-03-09 WO PCT/JP2017/009623 patent/WO2017155074A1/en active Application Filing
- 2017-03-09 KR KR1020187028959A patent/KR102325908B1/en active IP Right Grant
- 2017-03-09 CN CN201780016866.3A patent/CN108778536B/en active Active
- 2017-04-21 TW TW106113338A patent/TWI725170B/en active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102361703A (en) * | 2009-03-23 | 2012-02-22 | 阪东化学株式会社 | Cleaning system |
JP5423761B2 (en) * | 2011-10-03 | 2014-02-19 | コニカミノルタ株式会社 | Cleaning device and image forming apparatus |
JP2015138086A (en) * | 2014-01-21 | 2015-07-30 | コニカミノルタ株式会社 | Cleaning device and image forming apparatus |
JP2015178091A (en) * | 2014-02-25 | 2015-10-08 | バンドー化学株式会社 | Cleaning device, adhesion roller unit, and adhesion roller |
CN204544823U (en) * | 2015-03-24 | 2015-08-12 | 淮安惠好木业有限公司 | The anti-airborne dust dust arrester of sheet material after sanding |
Also Published As
Publication number | Publication date |
---|---|
JPWO2017155074A1 (en) | 2018-03-15 |
WO2017155074A1 (en) | 2017-09-14 |
CN108778536A (en) | 2018-11-09 |
KR20180123083A (en) | 2018-11-14 |
JP6329701B2 (en) | 2018-05-23 |
TWI725170B (en) | 2021-04-21 |
TW201832836A (en) | 2018-09-16 |
KR102325908B1 (en) | 2021-11-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108698091B (en) | Cleaning device and cleaning method | |
TWI725171B (en) | Cleaning device | |
CN108778536B (en) | Cleaning device | |
CN106166553B (en) | Cleaning device | |
JP6617180B2 (en) | Cleaning device | |
EP2583761B1 (en) | Cleaning system | |
TW201540382A (en) | Cleaning device | |
JP2019051517A (en) | Cleaning device | |
JP6979448B2 (en) | Cleaning equipment | |
JP2017104868A (en) | Cleaning device | |
WO2021112148A1 (en) | Cleaning device | |
JP2004283778A (en) | Method and apparatus for sorting conductive material from plastic material | |
JP2023132071A (en) | Cleaning device | |
TW201242781A (en) | Cleaning device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |