201242781 . 六、發明說明： ' 【發明所屬之技術領域】 - 纟發明係關於1藉由靜電力去除附著在被潔淨材料 表面的異物（塵料）的潔淨裝置。制適用於被潔淨材料 的表面的平滑性比較高的材料，例如玻璃基板，印刷電路 板（PCB，PCBA等）' 薄膜、薄片、塑料板等。 【先前技術】 已知有-種潔淨系統（潔淨化裝置），係使潔淨滾輪與 被潔淨材料的表面接觸的同時—邊旋轉一邊相對移動，利 用在與前述被潔淨材料的表面之間產生的電位差，藉由靜 電力去除附著在前述被潔淨材料表面上的前述異物（例如 參照專利文獻1、2)。 在該潔淨雜巾’由於前述異物會逐漸輯積在表面， 所以有必要定期地進行從其表面去除異物的維護作業。因 此’申請人為了不用定期地實施前述維護作業，就能夠長 期穩定地持續進行潔淨滾輪之吸附去除異物的動作，已經 就设置有與潔淨滾輪接觸的轉印滾輪和帶電控制滾輪的潔 淨系統先提出了申請（參照日本特願2〇〇9 〇69972號日本 特願 2009-138107 號，日本特願 2〇〇9_1381〇8 號）。 第15圖是顯示構成習知的潔淨系統a的各構成要素的 配置的說明圖。潔淨滾輪U1係可在表面帶有利用靜電力 來吸附附著在被潔淨材料S之表面S1上之異物的電荷者。 在潔淨滾輪111之與被潔淨材料s的相反側，設有一邊與 潔淨滾輪111的表面接觸-邊旋轉的帶電控制滾輪121以 323934 3 201242781 及轉印滚輪131。 帶電控制滾輪121係可使潔淨滚輪111的外周面帶有 利用靜電力來吸附附著在被潔淨材料S之表面S1上之異物 的電荷者。帶電控制滚輪121係與外部電源141連接，藉 由外部電源141將電壓施加給帶電控制滚輪121。另外， 轉印滾輪131係可在其外周面上帶有利用靜電力來吸附附 著在潔淨滚輪111表面之異物的電荷者。 以與轉印滚輪131接觸且可旋轉之方式設置有刷滚 輪，該刷滚輪係朝與轉印滚輪131的連動旋轉方向相反的 方向旋轉，用來刮掉附著在轉印滾輪131表面之異物。為 了朝該刷滾輪151的連動旋轉方向旋轉，以與前述刷滚輪 151接觸的方式設置有金屬滚輪152。為了在與轉印滾輪 131之間產生電位差，在金屬滚輪152連接有外部電源153， 且施加電壓。 在金屬滾輪152的附近，設置有用來到除異物的潔淨 刀片146。另外，在金屬滚輪52的表面附近，設置有可以 吸引異物的氣體真空手段的吸入口 145。 在上述潔淨系統A中，為了去除吸附在轉印滾輪131 的異物，長期地保持轉印滚輪131的功能，除了設置佔用 配置空間的帶電控制滾輪121以外，還配置有刷滾輪151、 金屬滚輪152等。因此，希望有一種具有將刷滾輪151、 金屬滚輪152等的配置盡可能地整理成小型化，而且沒有 佔用空間的配件之構造的潔淨裝置。 另外，這些潔淨滾輪111、帶電控制滾輪121、轉印滚 323934 4 201242781 - 輪131、刷滚輪151、金屬滚輪152是作為一個單元一體地 構成，轉印滚輪131的旋轉軸131 a係可旋轉地安裝在裝置 ^ 框（未圖示），形成單元整體以轉印滚輪131的旋轉軸131-a 為中心相對於裝置框進行旋轉運動的構造。 因此，當於表面具有凹凸的被潔淨材料及具有彎曲的 被潔淨材料與潔淨滚輪111接觸時，由於潔淨滚輪111以 轉印滾輪131的旋轉軸131a為中心圓弧狀地搖擺運動，所 以作用在潔淨滚輪111的垂直方向的壓力不容易穩定，為 了在垂直方向將潔淨滚輪111牢固地壓住，而要求做進一 步的改良。 [專利文獻1]日本特開平8-203851號公報 [專利文獻2]日本特開2010-99565號公報 【發明内容】 (解決課題之手段及發明之功效） 本發明係鑑於上述課題而研創者，其目的在於提供一 種能夠從上方卑固地壓住潔淨滚輪，並且能夠實現在謀求 小型化之方面有利的配置的潔淨裝置。 為了達到上述目的，本發明之潔淨裝置（1)係具有：一 邊與被潔淨材料之表面接觸一邊旋轉，同時進行相對移動 的潔淨滚輪（cleaningroller); —邊與此潔淨滚輪的表面 接觸一邊旋轉的轉印滾輪；去除該轉印滚輪上之異物的刷 滚輪（bush roller);及從該刷滚輪去除前述異物的金屬滚 輪；且藉由前述潔淨滚輪利用靜電力來去除附著在前述被 潔淨材料之表面上的塵埃等異物；該潔淨裝置之特徵在 323934 5 201242781 於：具有以可旋轉之方式安裝有前述潔淨滾輪的主框架 (main frame)、以及透過軸承以可旋轉之方式一體地安裝 有前述轉印滾輪、前述刷滚輪及前述金屬滾輪的副框架 (sub frame);在前述轉印滚輪位於前述潔淨滾輪之上方的 狀態下，前述副框架係可旋轉地安裝在前述主框架。 根據上述潔淨裝置（1)，在前述主框架安裝有前述潔淨 滚輪，在可旋轉地安裝於前述主框架的前述副框架上，一 體地安裝有前述轉印滚輪、前述刷滚輪及前述金屬滚輪的 狀態下，前述轉印滾輪係位於前述潔淨滚輪的上方。因此， 因前述轉印滾輪、前述刷滾輪以及前述金屬滾輪的整體的 重量，能夠藉由安裝在前述副框架的前述轉寫轉輪，從上 方將前述潔淨滚輪牢固地壓住。另外，因為前述副框架是 可旋轉地安裝在前述主框架，所以即使於表面具有凹凸的 被潔淨材料及具有彎曲的被潔淨材料與前述潔淨滚輪接 觸，且前述潔淨滾輪朝垂直方向的上方彈起，前述轉印滾 輪也能夠配合上述動作向上倒退，因此可藉由前述轉印滾 輪在垂直方向恆常地將前述潔淨滾輪牢固地壓住。 另外，由於係為藉由上述旋轉將前述副框架（轉印滚 輪、刷滾輪、以及金屬滾輪）提起的構造，所以可以容易地 進行裝置内部的目視、清掃等維護作業。亦即，將前述副 框架大幅度地向上方旋轉時，前述轉印滚輪就會從前述潔 淨滾輪分離，兩者之間開口很大，因此能夠提高對各個滚 輪的維護性。 此外，本發明之潔淨裝置（2)係在前述潔淨裝置（1) 323934 6 201242781 • 中，設置有可裝卸於前述主框架的軸承構件，在該軸承構 ^ 件以可旋轉之方式安裝有前述金屬滚輪的旋轉軸。 根據上述潔淨裝置（2)，由於使用可裝卸在前述主框架 的前述軸承構件，所以從前述主框架拆下前述軸承構件， 並且藉由從前述軸承構件拆下前述金屬滾輪的旋轉軸，就 可以簡單地一次將一體地設置有前述轉印滾輪、前述刷滾 輪、及前述金屬滾輪的前述副框架從前述主框架拆下，而 且多數滾輪的安裝也能夠輕易地一次進行。 此外，本發明之潔淨裝置（3)係在前述潔淨裝置（1) 中，前述轉印滚輪、前述刷滾輪及前述金屬滚輪的軸承係 透過絕緣體設置在前述副框架，且形成透過前述轉印滚輪 及前述刷滾輪的軸承的外圈施加電荷的構成。 根據上述潔淨裝置（3)，由於是透過前述軸承的外圈施 加電荷，所以前述軸承附近的構造簡單，在抑制成本增加 之方面是有利的。另外，由於使賦予電荷的電極部分與前 述軸承的外圈接觸，因此沒有滑動部，且電極磨損的缺失 也不存在。而且，也不需要設置控制對前述潔淨滚輪等之 帶電之佔有大量空間的帶電控制滾輪，因此能夠實現裝置 的小型化。 另外，本發明之潔淨裝置（4)係在前述潔淨裝置（1) 中，前述潔淨滾輪的軸承係固定在絕緣體的外殼 (housing)，在前述主框架形成有以可朝上下方向移動之方 式卡合有該外殼的引導槽部，在前述副框架安裝在該主框 架的狀態下，以彈簧手段的彈壓力抬起前述外殼，藉此構 323934 7 201242781 成為前述潔淨滾輪與前述轉印滚輪接觸的構造。 根據上述潔淨裝置（4)，由於前述外殼是以前述彈簧手 段的彈壓力被抬起而使前述潔淨滚輪與前述轉印滾輪接 觸，所以能夠確保穩定之接觸狀態。 另外，本發明之潔淨裝置（5)係在前述潔淨裝置（1) 中，在前述主框架之下部、且為前述刷滚輪及前述金屬滾 輪的下方，以可裝卸之方式安裝有用來收集由前述潔淨滾 輪所回收之異物的異物回收箱。 根據前述潔淨裝置（5)，可容易地確保異物（塵埃）的集 聚部（回收部），也可容易地拆下。特別是，因為廢棄積存 的異物時，只要拆下前述異物回收箱即可，所以異物的廢 棄亦容易。 另外，本發明之潔淨裝置（6)係在前述潔淨裝置（5) 中，在前述主框架以可拆卸之方式設置有用來刮掉附著在 前述金屬滚輪的表面上之異物的潔淨刀片（cleaning blade)，前述潔淨刀片的安裝部份係由前述異物回收箱的 一部份所覆蓋。 根據前述潔淨裝置（6)，前述潔淨刀片的安裝/卸下很 容易，更換也很簡單。由於前述潔淨刀片的安裝部份係由 前述異物回收箱的一部份所覆蓋，所以亦可謀求美觀之提 升，也能夠防止被前述潔淨刀片刮掉的異物（塵埃）往周圍 之飛散。 另外，本發明之潔淨裝置（7)係在前述潔淨裝置（1) 中，前述金屬滾輪的旋轉軸係透過由絕緣體所構成的聯軸 323934 8 201242781 . 節（⑶叩1 ing)與驅動手段連結。 根據則述潔淨裝置⑺，藉由聯軸節可簡單地進行前述 -金屬滾輪與馬料轉手段的絕緣。 另本發明之潔淨装置（8)係在前述潔淨裝置（1)中， 用來固定則述轉印滾輪、前述刷滾輪及前述金屬滚輪之軸 承的外殼係為具有絕緣性之相同形狀者。 根據前述潔淨裝置U)，為了使前述軸承及外殼能夠共 通化，而課求成本之降低。 【實施方式] 乂下根據圖式說明本發明之潔淨裝置的實施形態。 第1圖表示構成實施形態之潔淨裝置1的各構成要素 、 的配置圖，潔淨震置1係使潔淨滾輪2的表面與被潔淨材 料S的表面S1上接觸—邊進行旋轉，同時相對於被潔淨材 料=進行相對移動’藉由潔淨滾輪2並利用靜電力’去除 附者在被潔淨材料s的表面S1上之塵埃等異物（例如 或電介體）的裝置。 潔淨滾輪2可在表面帶有利用靜電力來吸附附著在被 潔淨材料S表面S1上之異物的電荷。在潔淨滚輪2的上方， 設置有一邊與潔淨滾輪2之表面接觸一邊進行旋轉的轉印 滚輪3。轉印滾輪3係可對潔淨滚輪2變更利用靜電力來 吸附附著在被潔淨材料s之表面S1上之異物的電荷。轉印 滚輪3是使用可在表面帶有利用靜電力來吸附附著在潔淨 滚輪2之表面之異物之電荷的材料而形成者。轉印滾輪3 係藉由-邊與潔淨滾輪2的表面接觸一邊進行旋轉，在與 323934 9 201242781 潔淨滾輪2之間，依前述潔淨滾輪2與轉印滾輪3的表面 特性的不同而產生電位差。 在轉印滾輪3的斜上方設置有朝與前述轉印滾輪3的 連動旋轉方向相反的方向旋轉且用來去除轉印滾輪3上之 異物的刷滾輪4。為了在前述刷滾輪4與轉印滾輪3之間 產生電位差，前述刷滾輪4亦具有在潔淨時將與轉印滾輪 3之表面所帶有之電荷相同符號之電位施加於金屬滾輪5 的構成。 因此，設置有朝刷滾輪4的連動旋轉方向旋轉的金屬 滾輪5。為了在前述金屬滾輪5與轉印滾輪3之間產生電 位差，前述金屬滾輪5也具有在潔淨時與轉印滾輪3之表 面所帶有之電荷相同符號之電位施加於金屬滾輪5的構 成。則述金屬滾輪5係從刷滾輪4去除前述異物者。 在金屬滾輪5的附近，配置有以前端到除部來到除附 著在金屬滾輪5之表面上之異物的潔淨刀片6，藉由潔淨 刀片6來刮除附著在金屬滾輪5之表面上之異物刮除的 異物係被回收到異物回收箱7。 接著，說明潔淨裝置1的更加詳細的構造。 如第2圖、第3圖及第4圖所示，潔淨裝置i且有主 框架U、及以可裝卸之方式安裝在前述主框架u的副框 架12,在主框架11設置有潔淨滾輪2、潔淨刀片6及異物 另-方面，在副框架12，'透過由絕緣體所構成 36以可旋轉之方式設置有轉印滾輪3、刷滾輪4及 金屬滾輪5_承14(第9圖），作為—體構造 。 323934 10 201242781 : 如第5圖及第6圖所示，副框架12係以金屬滾輪5的 旋轉軸5a為旋轉中心，以可旋轉之方式安裝在主框架“ 上。在這種安裝狀態下，進行轉印滾輪3、刷滾輪4、金屬 滾輪5及潔淨刀片6相對於潔淨滾輪2的定位，轉印滾輪 3的中心軸線係位於潔淨滾輪2的中心軸線的大致正上方\ 另外，由於為了使轉印滾輪3位於潔淨滾輪2的上方，在 主框架11安裝副框架12，所以因副框架12、刷滾輪4、 金屬滾輪5等的整體的重力，藉由安裝在副框架12的轉印 滾輪3，能夠從上方將潔淨滾輪2牢固地壓住。此處，使 轉印滾輪3的中心軸線位於潔淨滾輪2的中心軸線的大致 正上方，是因為較佳為藉由轉印滾輪3使牢固壓住潔淨滾 輪2的力產生之故。 另外，因為副框架12是以金屬滾輪5的轉軸5a為旋 轉中心，可旋轉地安裝在主框架U，所以轉印滾輪3等之 相對於潔淨滾輪2的追隨性較佳。 此外，將副框架12抬起至如第6圖所示的程度，即能 夠容易地進行潔淨滾輪2、轉印滾輪3、刷滾輪4及金屬滾 輪5的維護（例如，滾輪表面的檢查、滾輪的清掃）。 將從副框架12的兩侧板部12A，12A突出的金屬滾輪 5的旋轉軸5a插通至主框架11的側板部ha、ha形成的 穿通孔11B、11B ’在從侧板部11A、11A的穿通孔11 β、11 β 大出的金屬滚輪5的旋轉轴5a ’嵌入組襄有軸承.14的外 殼13，並將其固定。藉此，副框架12係以金屬滾輪5的 旋轉軸5a為中心’可旋轉地安裝在主框架u。另外，在 323934 11 201242781 潔淨滾輪2、轉印滾輪3、刷滚輪4、金屬滾輪5及潔淨刀 片6之彼此定位的狀態下，副框架12係固定在主框架11。 而且，藉由將外殼13(包含軸承14)從主框架11拆下，就 能夠從主框架11將副框架12拆下。 由於將潔淨滚輪2和轉印滾輪3分別安裝在各自之主 框架11和副框架12，且在上下方向配置，所以該等構件 的接觸部的阻力係作為水平方向的荷重而發揮作用，而將 轉印滾輪3提起，或不會轉換為將潔淨滚輪2提起的荷重。 另外，由刷滾輪4與金屬滚輪5之間的接觸阻力所產生的 旋轉力是將轉印滚輪3向下推壓下之方向的力，與將潔淨 滾輪2提起之方向的力為相反方向，所以不會產生問題。 特別是由於副框架12被安裝成可進行以金屬滚輪5的 轉轴5a為中心之旋轉，所以即使悝常地使刷滾輪4與轉印 滾輪3接觸且旋轉，也不會減少對潔淨滾輪2的推壓力。 另外，如第7圖及第8圖所示，副框架12的兩侧板部 12A，12A係由三根連結軸17所連接，且在樹脂製外殼36 固定有嵌入有軸承14者，相對於各軸承14，組裝有轉印 滾輪3、刷滾輪4及金屬滾輪5，且作為一體構造而單元化。 刷滾輪4和金屬滾輪5係透過由絕緣體所構成的齒輪傳送 動力的構成（未圖示），如第13圖所示，藉由以驅動馬達使 金屬滚輪5的旋轉軸5a旋轉，刷滾輪4也隨之旋轉。 如第9圖所示，在中心穿通孔嵌入有轉印滾輪3與金 屬滾輪5之軸承14的聚醛樹脂製之大致三角板形狀的軸承 外殼13、36中，於前述中心穿通孔的内周面形成有剖面為 323934 12 201242781 J 矩形的卡合槽部l3a，在卡合槽部13a配置有電極i5。由 此，電極部15與軸承14的外圈ua電性接觸，因此可對 轉印滾輪3與金屬滾輪5施加電荷。分別在電極部1 $之與 卡合槽部13a之底面接觸的一側形成凸部15a，在卡合槽 部13a的底面形成與凸部i5a卡合的凹部13aa，因凸部15a 與凹部13aa之間的卡合關係，使得電極部15不會從卡合 槽部13a脫落。另外，用以固定軸承外殼13、36的螺栓 16為3個。 潔淨滾輪2的軸承14係如第1〇圖詳細所示，固定在 由絕緣體所構成的外殼21。外殼21具有矩形的本體部21a 及位於其上侧之比本體部21a更寬的凸緣部21b，且形成 大致τ字形狀。另一方面，在主框架u的側板部iia、iia 的内侧面，設置有具有以能朝上下方向移動之方式卡合有 外设21引導槽部22a的引導槽構件22。在引導槽構件22 的引導槽部22a的兩侧，設置有收納線圈彈簧23的柱狀彈 簧收納部22b。再者，潔淨滾輪2的外殼21係在與引導槽 構件22卡合的狀態下，將潔淨滾輪2安裝在主框架u 在副框架12安裝在主框架n的狀態下，線圈彈簧23 與凸線部21b接觸，將潔淨滚輪2的外殼21朝上方彈壓， 外殼21藉由線圈彈簧23(彈簧手段）的彈壓力而被抬起，’ 因此使潔淨滾輪2與轉印滾輪3彈性接觸。 如第11圖及第12圖所示，潔淨刀片6的下部係固定 在刀片安裝板31上，透過前述刀片安裝板31利 固定用螺…可在水平方向及垂直方向裝卸:= 323934 13 201242781 裝在主框架11的下部。 收集由潔淨刀片6所剝離的異物，亦收集包含由潔淨 滾輪2去除之異物的異物回收箱7，係利用固定用螺絲料 p卸地安裝在主框架n的下部、且為潔淨刀片6的下側 前述異物回收箱7係在安裝的狀態時，位於刷滚輪4、金 屬滾輪5和潔淨刀片6的下方。 在主框架11所設置的潔淨刀片6的兩側，分別設置有 固定用螺絲34,與這些固定用螺絲34相對應，在異物回 收箱7的侧板部7a上，設置有可供固定用螺絲料的轴部 插通的鍮匙孔形狀的切槽7b。前述切槽7b的下端部分係 相對於上侧部分’向侧邊延伸且能夠卡止固定用螺絲^之 軸部的卡止部7bb。 因此在各固疋用螺絲34的軸部，使異物回收箱7之 切槽7b的卡止部7bb卡止的狀態下，異物回收箱7係被暫 時固定在固;^用螺絲34的軸部，且藉由鎖緊固定螺絲34， 就可以將異物回收箱7固定在主框架Η。在這種狀態下， 屬於箱7的-部份的侧板部7a係覆蓋潔淨刀片6的安 份。 & 如果將異物回收箱7從主框架1丨拆下，潔淨刀片6(刀 片安裝板31)的安裝部份會露出，因此可以藉由鬆動固定 用螺栓32，簡單地拆下潔淨刀片6。 另外’在副框架12中之轉印滾輪3與金屬滾輪5之間 設置有將異物引導至異物回收箱7的引導板35(第2圖、 第5圖），因此能夠回收由潔淨滚輪2所去除且在移動至金 323934 14 201242781 - 屬滾輪5之過程中落下的異物。 ‘ 如第13圖所示，為了不發生漏電，金屬滚輪5的旋轉 - 軸5a係透過由絕緣體所構成的聯轴節41，與驅動馬達42 (驅動手段）連結。另外，也可以不透過聯軸節，而是透過 由絕緣體所構成的齒輪與驅動馬達連結。 用來固定轉印滚輪3、刷滾輪4、以及金屬滚輪5之軸 承14的外殼36皆具有絕緣性，且形成為相同形狀而共通 化。由此可謀求成本之降低，能夠容易地安裝拆下軸承14， 也能夠簡單地更換轉印滚輪3、刷滚輪4、金屬滾輪5。 本發明除了前述實施形態以外，亦可如下方式變更實 施。 (i) 在前述實施形態中，雖然用來固定轉印滾輪3、刷 滾輪4、以及金屬滾輪5之軸承14的外殼3 6、13，皆係具 有絕緣性，且形成相同形狀，但是在其他的實施形態中， 也可以是形狀不同的外殼。 (ii) 在前述實施形態中，潔淨裝置1雖是單獨使用的， 但也可以將2台機器並排使用。另外，也可以將其他的潔 淨裝置配置在被潔淨材料S的下侧，形成同時潔淨被潔淨 材料之上下面的構造。此外，為了方便拆下，潔淨刀片6 係以能夠相對於主框架12朝水平方向拆下的方式安裝，但 是在其他的實施形態中，也可以是可朝垂直方向或其他方 向拆下的方式。 (iii) 在前述實施形態中，副框架12係以金屬滾輪5 的旋轉軸5a為旋轉中心，可旋轉地安裝在主框架11，但 323934 15 201242781 本發明並不限定於此。如第14圖所示，在其他的實施形態 申，也可以在構成第2圖等所示之潔淨裝置i的主框架^ 的下侧，配置潔淨滾輪2A、轉印滚輪3A、刷滾輪4A及金 屬滾輪5A可旋轉地設置成一體化的副框架112，在相對向 ^置的主框架11的潔淨滾輪2與副框架112的潔淨滾輪 潔=間，透過被潔淨材料（未圖示），形成同時潔淨前述= 滾輪材科之表面背面的構造。在副框架112中，形成轉印 — 3A、刷滾輪4A以及金屬滾輪5A相對於潔淨滾輪2A 破疋位的構造。 生、（1V)在前述實施形態中，為了確保由轉印滾輪3所產 的必要的推壓，雖係使轉印滾輪3的中心軸線位於潔 此 的中心軸線的大致正上方，但是本發明並不限定於 為了使轉印滾輪3位於潔淨滾輪2的上方，且不會產 =潔淨滾輪之浮起，只要利用轉印滾輪3能夠壓住潔淨滾 也可以採用轉印滾輪3的中心軸線不位於潔淨滾輪2 的令心軸線之大致正上方的構造。 【圖式簡單說明】 、第1圖係表示構成本發明實施形態之潔淨裝置之各構 成要素之配置的說明圖。 第2圖係表示實施形態之潔淨裝置的側面圖。 第3圖係從正面上方觀看前述潔淨裝置的分解斜視 圖。 第4圖係從背面下方觀看前述潔淨裝置的分解斜視 圖0 323934 16 201242781 第5圖係表示將副框架安裝在主框架之狀態的側面 第6圖係表示在維護時副框架與主框架之關係的側面 第7圖係從上方觀看各滾輪被安裝在副框架之狀態的 斜視圖。 第8圖係從下方觀看各滚輪被安裝在副框架之狀態的 斜視圖。 第9圖係表示軸承的外圈與電極之關係的斜視圖。 第10圖係表示潔淨滾輪之軸承構造的部份斜視圖。 第11圖係表示異物回收箱與潔淨裝置之關係的分解 斜視圖。 第12圖係表示異物回收箱、潔淨刀片與潔淨裝置之關 係的分解斜視圖。 第13圖絲示金屬滚輪的旋轉軸與_馬達之連結 狀態的斜視圖。201242781 . VI. Description of the invention: 'Technical field to which the invention pertains>> The invention relates to a cleaning device for removing foreign matter (dust) adhering to the surface of a material to be cleaned by electrostatic force. A material suitable for smoothness of a surface of a material to be cleaned, such as a glass substrate, a printed circuit board (PCB, PCBA, etc.), a film, a sheet, a plastic plate, or the like. [Prior Art] A cleaning system (cleaning device) is known in which a cleaning roller is brought into contact with a surface of a material to be cleaned while being relatively moved while rotating, and is generated between the surface of the material to be cleaned and the surface of the material to be cleaned. The potential difference is caused by electrostatic force to remove the foreign matter adhering to the surface of the material to be cleaned (see, for example, Patent Documents 1 and 2). In the cleansing wipes, since the foreign matter is gradually accumulated on the surface, it is necessary to periodically perform maintenance work for removing foreign matter from the surface. Therefore, in order to carry out the aforementioned maintenance work on a regular basis, the applicant can continuously and continuously perform the action of adsorbing and removing foreign matter of the cleaning roller, and has already proposed a cleaning system in which a transfer roller and a charged control roller are in contact with the cleaning roller. Application (refer to Japan's special wish 2〇〇9 〇 69972, Japan's special wish 2009-138107, Japan's special wish 2〇〇9_1381〇8). Fig. 15 is an explanatory view showing the arrangement of the constituent elements constituting the conventional clean system a. The cleaning roller U1 has a charge on the surface that adsorbs foreign matter adhering to the surface S1 of the material S to be cleaned by an electrostatic force. On the opposite side of the cleaning roller 111 from the material to be cleaned s, a charging control roller 121 that rotates while being in contact with the surface of the cleaning roller 111 is provided with 323934 3 201242781 and a transfer roller 131. The charging control roller 121 allows the outer peripheral surface of the cleaning roller 111 to have a charge that adsorbs foreign matter adhering to the surface S1 of the material S to be cleaned by an electrostatic force. The charging control roller 121 is connected to the external power source 141, and a voltage is applied to the charging control roller 121 by the external power source 141. Further, the transfer roller 131 may have a charge on the outer peripheral surface thereof to adsorb foreign matter adhering to the surface of the cleaning roller 111 by an electrostatic force. A brush roller is provided in contact with the transfer roller 131 so as to be rotatable, and the brush roller is rotated in a direction opposite to the rotational direction of the transfer roller 131 to scrape off foreign matter adhering to the surface of the transfer roller 131. In order to rotate in the rotational direction of the brush roller 151, a metal roller 152 is provided in contact with the brush roller 151. In order to generate a potential difference with the transfer roller 131, an external power source 153 is connected to the metal roller 152, and a voltage is applied. In the vicinity of the metal roller 152, a clean blade 146 for removing foreign matter is provided. Further, in the vicinity of the surface of the metal roller 52, a suction port 145 for a gas vacuum means for attracting foreign matter is provided. In the above-described cleaning system A, in order to remove the foreign matter adsorbed on the transfer roller 131, the function of the transfer roller 131 is maintained for a long period of time, and in addition to the charging control roller 121 that occupies the arrangement space, the brush roller 151 and the metal roller 152 are disposed. Wait. Therefore, it is desirable to have a cleaning device having a structure in which the arrangement of the brush roller 151, the metal roller 152, and the like is arranged as small as possible and the space is not occupied. Further, the cleaning roller 111, the charging control roller 121, the transfer roller 323934 4 201242781 - the wheel 131, the brush roller 151, and the metal roller 152 are integrally formed as one unit, and the rotating shaft 131a of the transfer roller 131 is rotatably The device is mounted on a device frame (not shown) to form a structure in which the entire unit is rotationally moved with respect to the apparatus frame around the rotation shaft 131-a of the transfer roller 131. Therefore, when the cleaned material having the unevenness on the surface and the cleaned material having the curved contact with the cleaning roller 111, the cleaning roller 111 swings in a circular arc centering on the rotating shaft 131a of the transfer roller 131, so that The pressure in the vertical direction of the cleaning roller 111 is not easily stabilized, and further improvement is required in order to firmly press the cleaning roller 111 in the vertical direction. [Patent Document 1] JP-A-2010-99565 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2010-99565 (Description of the Invention) The present invention is made in view of the above problems. It is an object of the invention to provide a cleaning device that can hold a clean roller from above and that is advantageous in terms of miniaturization. In order to achieve the above object, the cleaning device (1) of the present invention has a cleaning roller that rotates while being in contact with the surface of the material to be cleaned, and simultaneously moves relative to each other; while rotating while contacting the surface of the cleaning roller. a transfer roller; a brush roller for removing foreign matter on the transfer roller; and a metal roller for removing the foreign matter from the brush roller; and the cleaning roller adheres to the cleaned material by electrostatic force by the cleaning roller a foreign matter such as dust on the surface; the cleaning device is characterized in that: 323934 5 201242781, a main frame having a sleekly mounted cleaning roller, and a rotatably mounted main body through the bearing a transfer roller, the brush roller, and a sub frame of the metal roller; wherein the sub-frame is rotatably attached to the main frame in a state where the transfer roller is positioned above the cleaning roller. According to the cleaning apparatus (1), the cleaning roller is attached to the main frame, and the transfer roller, the brush roller, and the metal roller are integrally attached to the sub-frame rotatably attached to the main frame. In the state, the transfer roller is located above the clean roller. Therefore, the entire transfer roller, the brush roller, and the metal roller can be firmly pressed from the upper side by the transfer wheel mounted on the sub-frame. Further, since the sub-frame is rotatably attached to the main frame, even the cleaned material having the unevenness on the surface and the cleaned material having the curved contact with the clean roller, and the cleaning roller bounces upward in the vertical direction. Further, since the transfer roller can be reversed in accordance with the above operation, the cleaning roller can be firmly pressed in the vertical direction by the transfer roller. Further, since the sub-frame (transfer roller, brush roller, and metal roller) is lifted by the above-described rotation, maintenance work such as visual inspection and cleaning inside the apparatus can be easily performed. In other words, when the sub-frame is rotated largely upward, the transfer roller is separated from the cleaning roller, and the opening between the two is large, so that the maintainability of each roller can be improved. Further, the cleaning device (2) of the present invention is provided in the above-described cleaning device (1) 323934 6 201242781, and is provided with a bearing member detachably attached to the main frame, in which the bearing member is rotatably mounted The axis of rotation of the metal roller. According to the cleaning device (2), since the bearing member detachably attached to the main frame is used, the bearing member is detached from the main frame, and by removing the rotating shaft of the metal roller from the bearing member, The sub-frame integrally provided with the transfer roller, the brush roller, and the metal roller is detached from the main frame at a time, and the mounting of a plurality of rollers can be easily performed at one time. Further, in the cleaning device (3) of the present invention, the transfer roller, the brush roller, and the bearing of the metal roller are provided in the sub-frame through the insulator, and are formed to pass through the transfer roller. And the outer ring of the bearing of the brush roller is configured to apply electric charge. According to the above-described cleaning device (3), since the electric charge is applied through the outer ring of the bearing, the structure in the vicinity of the bearing is simple, and it is advantageous in terms of suppressing an increase in cost. Further, since the electrode portion to which the electric charge is applied is brought into contact with the outer ring of the aforementioned bearing, there is no sliding portion, and the absence of electrode wear does not exist. Further, it is not necessary to provide a charging control roller that controls a large amount of space for charging the aforementioned cleaning roller or the like, so that the size of the device can be reduced. Further, in the cleaning device (4) of the present invention, the bearing of the cleaning roller is fixed to a housing of the insulator, and the main frame is formed to be movable in a vertical direction. a guide groove portion of the outer casing, wherein the outer casing is lifted by a spring force in a state in which the sub-frame is attached to the main frame, whereby the 323934 7 201242781 is in contact with the transfer roller structure. According to the above-described cleaning device (4), since the outer casing is lifted by the elastic force of the spring means, the cleaning roller is in contact with the transfer roller, so that a stable contact state can be ensured. Further, the cleaning device (5) of the present invention is provided in the cleaning device (1), and is detachably attached to the lower portion of the main frame and below the brush roller and the metal roller for collecting Foreign matter recycling bin for foreign objects recovered by the cleaning roller. According to the above-described cleaning device (5), the accumulation portion (recovering portion) of foreign matter (dust) can be easily secured, and can be easily removed. In particular, when the foreign matter accumulated is discarded, the foreign matter collection box can be removed, so that the disposal of the foreign matter is easy. Further, the cleaning device (6) of the present invention is in the above-described cleaning device (5), in which the cleaning mechanism for scraping off foreign matter adhering to the surface of the metal roller is detachably provided in the main frame. The mounting portion of the aforementioned clean blade is covered by a part of the aforementioned foreign matter recovery box. According to the aforementioned cleaning device (6), the above-described cleaning blade can be easily attached/detached, and the replacement is simple. Since the mounting portion of the clean blade is covered by a part of the foreign matter collecting box, the appearance can be improved, and the foreign matter (dust) scraped off by the clean blade can be prevented from scattering around. Further, in the cleaning device (7) of the present invention, the rotating shaft of the metal roller is transmitted through a coupling 323934 8 201242781 composed of an insulator. ((3) 叩1 ing) is connected to a driving means. . According to the cleaning device (7), the aforementioned - metal roller and horse feed means can be easily insulated by the coupling. Further, the cleaning device (8) of the present invention is used in the cleaning device (1) for fixing the outer casing of the transfer roller, the brush roller and the bearing of the metal roller to have the same shape of insulation. According to the above-described cleaning device U), in order to enable the bearing and the casing to be common, the cost is reduced. [Embodiment] An embodiment of a cleaning apparatus of the present invention will be described with reference to the drawings. Fig. 1 is a plan view showing the components of the cleaning device 1 of the embodiment, and the cleaning device 1 rotates while the surface of the cleaning roller 2 is in contact with the surface S1 of the material S to be cleaned, and is relatively rotated. Clean material = means for performing relative movement 'to remove the foreign matter (for example, a dielectric) attached to the surface S1 of the material to be cleaned by the cleaning roller 2 and using the electrostatic force. The cleaning roller 2 is provided with an electric charge on the surface by an electrostatic force to adsorb foreign matter adhering to the surface S1 of the material S to be cleaned. Above the cleaning roller 2, a transfer roller 3 that rotates while being in contact with the surface of the cleaning roller 2 is provided. The transfer roller 3 can change the electric charge of the clean roller 2 by the electrostatic force to adsorb the foreign matter adhering to the surface S1 of the material to be cleaned s. The transfer roller 3 is formed by using a material having a charge on the surface that adsorbs foreign matter adhering to the surface of the cleaning roller 2 by electrostatic force. The transfer roller 3 is rotated while being in contact with the surface of the cleaning roller 2, and a potential difference is generated between the cleaning roller 2 and the cleaning roller 2 according to the surface characteristics of the cleaning roller 2 and the cleaning roller 2. On the obliquely upper side of the transfer roller 3, a brush roller 4 that rotates in a direction opposite to the rotational direction of the transfer roller 3 and that removes foreign matter on the transfer roller 3 is provided. In order to generate a potential difference between the brush roller 4 and the transfer roller 3, the brush roller 4 also has a configuration in which a potential of the same sign as that of the surface of the transfer roller 3 is applied to the metal roller 5 at the time of cleaning. Therefore, the metal roller 5 that rotates in the interlocking rotation direction of the brush roller 4 is provided. In order to cause a potential difference between the metal roller 5 and the transfer roller 3, the metal roller 5 also has a potential applied to the metal roller 5 at the same potential as that of the surface of the transfer roller 3 at the time of cleaning. The metal roller 5 is a person who removes the foreign matter from the brush roller 4. In the vicinity of the metal roller 5, a clean blade 6 which comes to the foreign matter attached to the surface of the metal roller 5 from the front end to the cutout portion is disposed, and the foreign blade attached to the surface of the metal roller 5 is scraped off by the cleaning blade 6. The scraped foreign matter is recovered to the foreign matter recovery tank 7. Next, a more detailed structure of the cleaning device 1 will be described. As shown in FIGS. 2, 3, and 4, the cleaning device i includes a main frame U and a sub-frame 12 detachably attached to the main frame u, and a cleaning roller 2 is disposed in the main frame 11. In the sub-frame 12, the transfer frame 3 is rotatably provided with the transfer roller 3, the brush roller 4, and the metal roller 5_bearing 14 (Fig. 9). As a body structure. 323934 10 201242781 : As shown in FIGS. 5 and 6 , the sub-frame 12 is rotatably mounted on the main frame “with the rotation axis 5 a of the metal roller 5 as a center of rotation. In this mounted state, Positioning the transfer roller 3, the brush roller 4, the metal roller 5, and the cleaning blade 6 with respect to the cleaning roller 2, the central axis of the transfer roller 3 is located substantially directly above the central axis of the cleaning roller 2, in addition, in order to The transfer roller 3 is positioned above the cleaning roller 2, and the sub-frame 12 is attached to the main frame 11. Therefore, the transfer roller mounted on the sub-frame 12 is supported by the weight of the sub-frame 12, the brush roller 4, the metal roller 5, and the like. 3. The cleaning roller 2 can be firmly pressed from above. Here, the central axis of the transfer roller 3 is located substantially directly above the central axis of the cleaning roller 2 because it is preferably secured by the transfer roller 3. The force of pressing the cleaning roller 2 is generated. Further, since the sub-frame 12 is rotatably mounted on the main frame U with the rotation shaft 5a of the metal roller 5 as a center of rotation, the transfer roller 3 and the like are opposed to the cleaning roller 2 Follow Further, the sub-frame 12 is lifted up to the extent shown in Fig. 6, that is, the maintenance of the cleaning roller 2, the transfer roller 3, the brush roller 4, and the metal roller 5 can be easily performed (for example, the surface of the roller Inspection and cleaning of the rollers. The through-holes 11B, 11B' formed by the rotation shafts 5a of the metal rollers 5 projecting from the side plate portions 12A, 12A of the sub-frame 12 are inserted into the side plate portions ha and ha of the main frame 11. The rotating shaft 5a' of the metal roller 5 which is enlarged from the through holes 11β, 11β of the side plate portions 11A, 11A is fitted into the outer casing 13 of the group of bearings 14. and is fixed thereto. The rotating shaft 5a of the metal roller 5 is rotatably mounted on the main frame u. In addition, in 323934 11 201242781, the cleaning roller 2, the transfer roller 3, the brush roller 4, the metal roller 5, and the cleaning blade 6 are positioned to each other. Next, the sub-frame 12 is fixed to the main frame 11. Further, by detaching the outer casing 13 (including the bearing 14) from the main frame 11, the sub-frame 12 can be detached from the main frame 11. Since the cleaning roller 2 and The transfer rollers 3 are mounted on the respective main frame 11 and sub-frame 12, respectively. Since it is disposed in the vertical direction, the resistance of the contact portion of the members acts as a load in the horizontal direction, and the transfer roller 3 is lifted or not converted into a load for lifting the cleaning roller 2. Further, the brush roller The rotational force generated by the contact resistance between the metal roller 5 and the metal roller 5 is a force that pushes the transfer roller 3 downward, and the force in the direction in which the cleaning roller 2 is lifted is opposite, so that no problem occurs. In particular, since the sub-frame 12 is mounted so as to be rotatable about the rotation shaft 5a of the metal roller 5, even if the brush roller 4 is constantly brought into contact with the transfer roller 3 and rotated, the cleaning roller is not reduced. 2 push pressure. Further, as shown in FIGS. 7 and 8, the side plate portions 12A and 12A of the sub-frame 12 are connected by three connecting shafts 17, and the resin case 36 is fixed with the bearing 14 embedded therein. The bearing 14 is assembled with a transfer roller 3, a brush roller 4, and a metal roller 5, and is unitized as an integral structure. The brush roller 4 and the metal roller 5 are configured to transmit power through a gear constituted by an insulator (not shown). As shown in FIG. 13, the roller 4 is rotated by a driving motor to rotate the rotating shaft 5a of the metal roller 5. It also rotates with it. As shown in Fig. 9, in the substantially triangular plate-shaped bearing housings 13, 36 made of polyacetal resin in which the transfer roller 3 and the bearing 14 of the metal roller 5 are fitted in the center through hole, the inner peripheral surface of the center through hole is formed. An engagement groove portion l3a having a rectangular cross section of 323934 12 201242781 J is formed, and an electrode i5 is disposed in the engagement groove portion 13a. Thereby, the electrode portion 15 is in electrical contact with the outer ring ua of the bearing 14, so that electric charge can be applied to the transfer roller 3 and the metal roller 5. A convex portion 15a is formed on a side of the electrode portion 1 $ that is in contact with the bottom surface of the engagement groove portion 13a, and a concave portion 13aa that engages with the convex portion i5a is formed on the bottom surface of the engagement groove portion 13a, and the convex portion 15a and the concave portion 13aa are formed. The engagement relationship between the electrodes 15 does not fall off from the engagement groove portion 13a. Further, three bolts 16 for fixing the bearing housings 13, 36 are provided. The bearing 14 of the cleaning roller 2 is fixed to a casing 21 made of an insulator as shown in detail in Fig. 1 . The outer casing 21 has a rectangular body portion 21a and a flange portion 21b on the upper side thereof which is wider than the body portion 21a, and is formed in a substantially Tau shape. On the other hand, the inner side surface of the side plate portions iia and iia of the main frame u is provided with a guide groove member 22 having a peripheral portion 21 guiding groove portion 22a so as to be movable in the vertical direction. On both sides of the guide groove portion 22a of the guide groove member 22, a columnar spring housing portion 22b that houses the coil spring 23 is provided. Further, in a state in which the outer casing 21 of the cleaning roller 2 is engaged with the guide groove member 22, the cleaning roller 2 is attached to the main frame u, and the coil spring 23 and the convex wire are attached in a state where the sub-frame 12 is attached to the main frame n. When the portion 21b comes into contact, the outer casing 21 of the cleaning roller 2 is biased upward, and the outer casing 21 is lifted by the elastic force of the coil spring 23 (spring means), so that the cleaning roller 2 is elastically brought into contact with the transfer roller 3. As shown in Figs. 11 and 12, the lower portion of the cleaning blade 6 is fixed to the blade mounting plate 31, and the screw is fixed by the blade mounting plate 31. It can be loaded and unloaded in the horizontal direction and the vertical direction: = 323934 13 201242781 In the lower part of the main frame 11. The foreign matter removed from the clean blade 6 is collected, and the foreign matter collecting box 7 containing the foreign matter removed by the cleaning roller 2 is collected, and is attached to the lower portion of the main frame n by the fixing screw p, and is under the clean blade 6. The foreign matter recovery box 7 on the side is located below the brush roller 4, the metal roller 5, and the clean blade 6 in the mounted state. Fixing screws 34 are provided on both sides of the cleaning blade 6 provided in the main frame 11, and corresponding to the fixing screws 34, fixing screws are provided on the side plate portion 7a of the foreign matter collecting box 7 The slit 7b of the keyhole shape in which the shaft portion of the material is inserted. The lower end portion of the slit 7b extends toward the side with respect to the upper portion, and is capable of locking the locking portion 7bb of the shaft portion of the fixing screw. Therefore, in a state in which the locking portion 7bb of the slit 7b of the foreign matter collecting box 7 is locked in the shaft portion of each of the fixing screws 34, the foreign matter collecting box 7 is temporarily fixed to the shaft portion of the screw 34. And the foreign matter recovery box 7 can be fixed to the main frame 藉 by locking the fixing screws 34. In this state, the side plate portion 7a belonging to the portion of the case 7 covers the security of the clean blade 6. & If the foreign matter recovery box 7 is detached from the main frame 1丨, the mounting portion of the cleaning blade 6 (the blade mounting plate 31) is exposed, so that the cleaning blade 6 can be easily removed by loosening the fixing bolts 32. Further, the guide plate 35 (second drawing, fifth drawing) for guiding the foreign matter to the foreign matter collecting box 7 is provided between the transfer roller 3 and the metal roller 5 in the sub-frame 12, so that it can be recovered by the cleaning roller 2 Remove and move to gold 323934 14 201242781 - Foreign objects falling during the process of roller 5. ‘ As shown in Fig. 13, in order to prevent leakage, the rotation of the metal roller 5, the shaft 5a, is transmitted through the coupling 41 composed of an insulator, and is coupled to the drive motor 42 (driving means). Further, the gear may be connected to the drive motor through a gear formed of an insulator without passing through the coupling. The outer casing 36 for fixing the transfer roller 3, the brush roller 4, and the bearing 14 of the metal roller 5 is insulative and formed in the same shape to be common. Thereby, the cost can be reduced, the bearing 14 can be easily attached and detached, and the transfer roller 3, the brush roller 4, and the metal roller 5 can be easily replaced. The present invention can be modified in the following manner in addition to the above embodiments. (i) In the above embodiment, the outer casings 36, 13 for fixing the transfer roller 3, the brush roller 4, and the bearing 14 of the metal roller 5 are all insulating and form the same shape, but in other In the embodiment, the outer casing may have a different shape. (ii) In the above embodiment, the cleaning device 1 is used alone, but two devices may be used in parallel. Further, other cleaning means may be disposed on the lower side of the material to be cleaned S to form a structure in which the upper surface of the cleaned material is cleaned at the same time. Further, the cleaning blade 6 is attached so as to be detachable from the main frame 12 in the horizontal direction for the sake of easy removal, but in other embodiments, it may be detachable in the vertical direction or in other directions. (iii) In the above embodiment, the sub-frame 12 is rotatably attached to the main frame 11 with the rotation shaft 5a of the metal roller 5 as a center of rotation, but 323934 15 201242781 The present invention is not limited thereto. As shown in Fig. 14, in another embodiment, the cleaning roller 2A, the transfer roller 3A, the brush roller 4A, and the lower side of the main frame constituting the cleaning device i shown in Fig. 2 and the like may be disposed. The metal roller 5A is rotatably provided as an integrated sub-frame 112, and is formed by a clean material (not shown) between the cleaning roller 2 of the main frame 11 facing the main frame 11 and the cleaning roller of the sub-frame 112. At the same time, the structure of the front surface of the roller material is cleaned. In the sub-frame 112, a structure in which the transfer - 3A, the brush roller 4A, and the metal roller 5A are broken relative to the cleaning roller 2A is formed. In the above embodiment, in order to secure the necessary pressing force produced by the transfer roller 3, the center axis of the transfer roller 3 is located substantially directly above the central axis of the cleaning, but the present invention It is not limited to the fact that the transfer roller 3 is located above the cleaning roller 2 and does not produce the floating of the cleaning roller. As long as the transfer roller 3 can press the cleaning roller, the central axis of the transfer roller 3 can be used. A structure located substantially above the center axis of the cleaning roller 2. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view showing an arrangement of constituent elements constituting a cleaning apparatus according to an embodiment of the present invention. Fig. 2 is a side view showing the cleaning apparatus of the embodiment. Fig. 3 is an exploded perspective view of the aforementioned cleaning device viewed from the front side. Fig. 4 is an exploded perspective view of the above-mentioned cleaning device viewed from the lower side of the back. 0 323934 16 201242781 The fifth drawing shows the side of the state in which the sub-frame is mounted on the main frame. FIG. 6 shows the relationship between the sub-frame and the main frame during maintenance. Fig. 7 is a perspective view showing the state in which the respective rollers are attached to the sub-frame as seen from above. Fig. 8 is a perspective view showing the state in which the respective rollers are mounted on the sub-frame as seen from below. Figure 9 is a perspective view showing the relationship between the outer ring of the bearing and the electrode. Figure 10 is a partial perspective view showing the bearing structure of the cleaning roller. Fig. 11 is an exploded perspective view showing the relationship between the foreign matter recovery tank and the cleaning device. Fig. 12 is an exploded perspective view showing the relationship between the foreign matter recovery tank, the clean blade, and the cleaning device. Fig. 13 is a perspective view showing the state in which the rotating shaft of the metal roller is connected to the motor.
【主要元件符號說明】 2、2A、ill潔淨滾輪 4、4A、151刷滾輪[Main component symbol description] 2, 2A, ill cleaning roller 4, 4A, 151 brush roller
旋轉軸 異物回收箱 323934 17 201242781 7a 側板部 7b 切槽 7bb 卡止部 11 主框架 11A 側板部 11B 穿通孔 12 、 112 副框架 12A 兩側板部 13 外殼 13a 卡合槽部 13aa 凹部 14 轴承 14a 外圈 15 電極部 15a 凸部 16 螺栓 17 連結軸 21 外殼 21a 本體部 21b 凸緣部 22 引導槽構件 22a 引導槽部 22b 彈簧收納部 23 線圈彈簧 31 刀片安裝板 32 固定用螺栓 34 固定用螺絲 35 引導板 36 外殼 41 聯軸節 42 驅動馬達 121 帶電控制滾輪 14卜 153 外部電源 S 被潔淨材料 SI 表面 323934 18Rotary shaft foreign matter recovery box 323934 17 201242781 7a Side plate portion 7b Groove 7bb Locking portion 11 Main frame 11A Side plate portion 11B Through hole 12, 112 Sub frame 12A Side plate portion 13 Housing 13a Engagement groove portion 13aa Concave portion 14 Bearing 14a Outer ring 15 electrode portion 15a convex portion 16 bolt 17 coupling shaft 21 housing 21a main body portion 21b flange portion 22 guide groove member 22a guide groove portion 22b spring housing portion 23 coil spring 31 blade mounting plate 32 fixing bolt 34 fixing screw 35 guide plate 36 Housing 41 Coupling 42 Drive motor 121 Live control roller 14 153 External power supply S Clean material SI Surface 323934 18