TW201832836A - Cleaning device capable of efficiently removing relatively large foreign matters as well as relatively fine foreign matters from the surface of an object - Google Patents

Abstract

An object of the present invention is to provide a cleaning device capable of efficiently removing relatively large foreign matters as well as relatively fine foreign matters from the surface of an object. The present invention is a cleaning device that removes foreign matters on the surface of a plate-shaped or film-like object while conveying the plate-shaped or film-like object. The cleaning device is characterized by comprising a brush roller that is rotatedly driven in a reverse direction with respect to the conveyance direction by a rotating shaft substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface; a cleaning roller that is rotatedly driven in a forward direction with respect to the conveyance direction by a rotating shaft substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface; a first facing roller which is disposed to face and substantially parallel to the brush roller through the object; and a second facing roller which is disposed to face and substantially parallel to the cleaning roller through the object. Preferably, the surface hardness of the first facing roller is higher than the surface hardness of the second facing roller. Preferably, the first facing roller is a metal roller.

Description

Cleaning device

The present invention relates to a cleaning device.

In recent years, a cleaning device has been developed for removing a glass substrate or a resin substrate attached to a flat panel display (FPD), a printed circuit board on which an electronic component is mounted, or a ceramic substrate for forming a multilayer ceramic capacitor or the like. A foreign matter such as a ceramic green sheet or a surface of an object such as a resin sheet or a film.

As such a cleaning device, for example, a cleaning device is proposed in which a foreign matter on the surface of an object is removed by a charging brush, and the removed foreign matter is transported and recovered by a cleaning roller using an electric field force (refer to Japan) Patent Laid-Open No. 2011-92846).

However, in the cleaning device, a relatively large millimeter-sized foreign matter can be removed by a charging brush, but since a portion where the charging brush does not contact the surface of the object is generated, there is a possibility that the non-contact portion is not sufficiently removed. Foreign matter (especially fine foreign matter). Further, in the cleaning device, as described above, it is difficult to sufficiently remove the foreign matter from the surface of the object by the charging brush, and the transfer efficiency and the recovery efficiency of the foreign matter by the cleaning roller are also insufficient. Therefore, the cleaning device has room for improvement in terms of the removal efficiency of foreign matter and the like. [Prior Art Document] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-92846

[Problems to be Solved by the Invention] The present invention has been made in view of the above circumstances, and an object of the invention is to provide a cleaning device capable of efficiently removing both relatively large foreign matter and fine foreign matter from the surface of an object. [Means for solving the problem]

In order to solve the problem, the invention is a cleaning device that removes foreign matter on the surface while conveying a plate-shaped or film-shaped object, and includes a brush roller in a direction reversed with respect to the conveyance direction. The rotation roller is rotationally driven by a rotation axis substantially perpendicular to the conveyance direction and substantially parallel to the conveyance surface; and the cleaning roller is substantially perpendicular to the conveyance direction and is substantially parallel to the conveyance surface in the direction of normal rotation with respect to the conveyance direction. Rotating drive; the first counter roller is disposed opposite to the brush roller in a substantially parallel direction by the object; and the second counter roller is opposed to the cleaning roller by the object And arranged substantially in parallel.

According to the cleaning device, relatively large foreign matter can be removed from the object by the brush roller, and fine foreign matter can be efficiently removed from the object by the cleaning roller. In addition, the cleaning device includes the first counter roller that faces the brush roller and the second counter roller that faces the cleaning roller, so that the relatively large foreign matter removed by the brush roller can be more efficiently removed. And the removal of fine foreign matter by the cleaning roller.

It is preferable that the surface hardness of the first counter roller is higher than the surface hardness of the second counter roller. By setting the surface hardness of the first counter roller to be higher than that of the second counter roller, the brush roller and the cleaning roller can be appropriately brought into contact with the object by the first counter roller and the second counter roller, respectively. Therefore, the foreign matter removal efficiency can be further improved.

Preferably, the first counter roller is a metal roller. In this way, by setting the first counter roller as a metal roller which is a relatively hard roller, the brush roller can be appropriately brought into contact with the object, so that a relatively large foreign matter can be removed more effectively.

The second counter roller is an elastic roller. As described above, by using the second counter roller as the elastic roller, an appropriate nip width can be ensured between the second counter roller and the cleaning roller. As a result, the adhesion between the cleaning roller and the object can be improved, and the removal of fine foreign matter from the surface of the object can be performed more efficiently.

Preferably, the elastic roller comprises: a conductive core rod; an inner layer portion covering the outer surface of the conductive core rod and having electrical conductivity; and an outer layer portion covering the outer surface of the inner layer portion. As described above, since the elastic roller has the inner layer portion and the outer layer portion, the inner layer portion can ensure elasticity while the outer layer portion ensures the antifouling property or the abrasion resistance. As a result, since the adhesion between the elastic roller and the cleaning roller can be appropriately maintained, the removal of fine foreign matter by the cleaning roller can be appropriately performed for a long period of time. Further, since the core rod and the inner layer portion have electrical conductivity, a desired electric field can be more reliably formed between the elastic roller and the cleaning roller, and the foreign matter can be effectively removed by the cleaning roller.

Preferably, the hardness of the outer layer portion is higher than the hardness of the inner layer portion. In this way, by the hardness of the outer layer portion being higher than the hardness of the inner layer portion, the effect of improving the adhesion between the cleaning roller and the object by the inner layer portion can be more remarkably obtained, or the outer layer portion can be provided. Improvement effect of antifouling property, abrasion resistance, etc.

The JIS (Japanese Industrial Standard)-A hardness of the inner layer portion is preferably 15° or more and 70° or less, and the JIS-A hardness of the outer layer portion is preferably 50° or more. By setting the JIS-A hardness of the inner layer portion and the outer layer portion to the above range, the effect of improving the adhesion between the cleaning roller and the object by the inner layer portion can be more remarkably obtained, or The effect of improving the antifouling property, abrasion resistance, and the like by the outer layer portion is provided.

Preferably, the brush roller and the cleaning roller are charged, and a potential of the first counter roller and the second counter roller is set to a fixed potential. In this manner, by charging the brush roller and the cleaning roller and setting the potentials of the first counter roller and the second counter roller to a fixed potential, the brush roller and the first counter roller, and the cleaning roller can be respectively Since the electric field is effectively formed between the second counter rolls, it is possible to remove both relatively large foreign matter and fine foreign matter more efficiently from the object.

In the description of the rotation direction of each roller in the present specification, the case of rotating in the direction in which the direction of movement of the object or the other roller is rotated is referred to as "rotation in the forward rotation direction", and vice versa. "Rotate in reverse direction". In addition, the term "substantially perpendicular" means that the angle of intersection with respect to the vertical line is within ±10°, and may be vertical. Further, "substantially parallel" means that the acute angle of the angle formed by the two straight lines exceeds 0°, is within 10°, or is parallel. In the present specification, the "front side" and the "back side" of the object are only for convenience of distinction, and do not necessarily correspond to the front side and the back side when the object is used. [Effects of the Invention]

The cleaning device of the present invention can be used for removing foreign matter such as dust adhering to the surface of a plate-shaped or film-like object, not only by removing a relatively large foreign matter having a small size of a millimeter, but also by removing fine foreign matter.

Hereinafter, an example of the cleaning device of the present invention will be described in detail with reference to the drawings. The specific configuration and details of the present invention can be appropriately changed within the scope of the essence of the present invention.

<Cleaning device> The cleaning device shown in FIG. 1 and FIG. 2 is a foreign object that conveys the flat object S in the conveyance direction D and removes the surface (the front surface S1 and the back surface S2). This cleaning device mainly includes a holder 1, an external transfer mechanism (an upstream external transfer mechanism 2A and a downstream external transfer mechanism 2B), and a cleaning mechanism 3.

[Object] The object S is a flat member in Fig. 2, but is not particularly limited as long as it is a plate-shaped or film-shaped member. Specifically, the surface of the object may be flat as shown in FIG. 2, but a depression may also exist. Further, pores or the like may be present in the object.

Examples of the plate-shaped object include a glass substrate of FPD, a resin substrate, or a printed circuit board for mounting electronic components, a ceramic green sheet for forming a laminated ceramic capacitor, or a resin sheet. Examples of the film-like object include a resin film and the like.

The average thickness of the object is not particularly limited, but as the lower limit thereof, it is preferably 30 μm, more preferably 50 μm. When the average thickness of the object is less than the lower limit, it is difficult to convey the object. On the other hand, the upper limit of the average thickness of the object is, for example, 5 mm.

[Retainer] The holder 1 is one that holds the cleaning mechanism 3. The holder 1 is obtained by connecting a pair of opposed plate-like members 10 by a plurality of rods 11 and a shaft 12.

[External Transport Mechanism] The external transport mechanism is provided with a propulsive force for transporting the object S, and is provided outside the cleaning mechanism 3. The external transport mechanism includes an upstream external transport mechanism 2A that is disposed on the upstream side in the transport direction from the cleaning mechanism 3, and a downstream external transport mechanism 2B that is disposed on the downstream side of the transport mechanism 3 in the transport direction. The transport speed of the object S by the external transport mechanism is not particularly limited as long as it can remove foreign matter from the object S by the cleaning mechanism 3. The lower limit of the conveying speed of the object S is preferably 5 m/min, and more preferably 10 m/min. On the other hand, the upper limit of the conveying speed of the object S is preferably 30 m/min, and more preferably 20 m/min. When the conveyance speed of the object S is less than the lower limit, the time required for the foreign matter removal becomes long, and the removal efficiency of the foreign matter is lowered. On the other hand, when the conveyance speed of the object S exceeds the upper limit, there is a possibility that the foreign matter of the surface of the object S cannot be sufficiently removed by the cleaning mechanism 3.

<Upstream-side external transport mechanism> The upstream-side external transport mechanism 2A is a person who carries the object S into the cleaning mechanism 3 and has a plurality of belt transport units 20A. The tape transport unit 20A is formed by winding the endless belt 22A between the pair of rollers 21A arranged along the transport direction D. One of the pair of rollers 21A is a driving roller to which a rotational force is applied, and the other is a driven roller that rotates together with the endless belt 22A by the rotation of the driving roller. The plurality of belt conveyance units 20A are disposed at a constant interval in a horizontal direction (hereinafter also referred to as a “transport width direction” orthogonal to the conveyance direction D.

<Downstream External Transport Mechanism> The downstream external transport mechanism 2B is a self-cleaning mechanism 3 that carries out the object S and has a plurality of belt transport units 20B. The belt conveyance unit 20B has the same configuration as the plurality of belt conveyance units 20A of the upstream external conveyance mechanism 2A. In other words, the plurality of belt conveyance units 20B are formed by winding the endless belt 22B between the pair of rollers 21B including the drive roller and the driven roller which are disposed along the conveyance direction D. The plurality of belt conveyance units 20B are also arranged at a fixed interval in the conveyance width direction.

[Cleaning Mechanism] The cleaning mechanism 3 is a mechanism capable of cleaning both surfaces of the front side surface S1 and the back side surface S2 of the object S, and has a front side cleaning mechanism 3A and a back side cleaning mechanism 3B.

<Front Side Cleaning Mechanism> The front side cleaning mechanism 3A is a unit that removes foreign matter on the front side surface S1 of the object S to be conveyed. The front side cleaning mechanism 3A has a front side brush roller unit 4, a front side cleaning roller unit 5, and a back side opposite roller unit 6. This cleaning device detachably mounts the front side brush roller unit 4 and the front side cleaning roller unit 5 to the holder 1 provided on the base of the factory or the like. The holder 1 can be fixed to the base by a fixing tool such as a screw, but it is preferably placed in a movable state without using a fixing tool. The front side brush roller unit 4 and the front side cleaning roller unit 5 are disposed above the object S to be conveyed (above the conveyance path), and are detachably held by the holder 1.

[Surface-side brush roller unit] The front-side brush roller unit 4 is a unit that removes foreign matter on the front surface S1 of the object S by the brush roller 41 accommodated in the housing 40, and is suitable for removing relatively large foreign matter having a millimeter size. In the frame 40 of the front side brush roller unit 4, in addition to the brush roller 41, the recovery roller 42, the blade 43, the foreign matter collecting portion 44, and the conveying roller 45 are housed, and the whole is unitized. Thus, by detachably unitizing the front side brush roller unit 4 on the holder 1, the front side brush roller unit 4 can be easily detached from the holder 1. As a result, when the brush roller 41 has to be replaced in accordance with the type of the object S or the foreign matter, the unit can be replaced together with the unit, so that the foreign matter can be easily removed easily. In addition, the front side brush roller unit 4 is detached from the holder 1, and the opposite metal roller 60, which will be described later, which is opposed to the brush roller 41 is exposed, and can be easily replaced or cleaned, so that the maintainability is excellent. Further, the brush roller 41 and the like housed in the casing 40 are easier to maintain than when the brush roller 41 is assembled and fixed to the fixture 1.

(Frame) The frame 40 is a unit that accommodates the brush roller 41 and the like, and can be attached to and detached from the holder 1. The frame body 40 includes: an upstream plate and a downstream plate disposed opposite to each other in a manner substantially perpendicular to the conveying surface; a pair of side plates connecting the side ends of the upstream plate and the downstream plate to each other; and a top plate connected to the upstream plate and the downstream plate An upper end portion of the plate and the pair of side plates; and a bottom plate connected to the lower end portions of the upstream plate, the downstream plate, and the pair of side plates. A pair of grip portions 40A spaced apart in the width direction are provided in the top plate. The pair of grip portions 40A are used by the front side brush roller unit 4 during loading and unloading. An opening 40B is provided in the bottom plate, and a front end portion of the bristles 41C of the brush roller 41 to be described later protrudes from the opening 40B. In addition, the material constituting the frame 40 is not particularly limited, and examples thereof include stainless steel and the like.

(Brush Roller) The brush roll 41 is a front side brush roll that abuts on the object S to be conveyed and removes foreign matter on the front side surface S1, in particular, a relatively large foreign matter (for example, a foreign matter having a size of a millimeter). In the charged state, the brush roller 41 is substantially perpendicular to the transport direction D and transported in a direction reversed (clockwise direction in FIG. 2) with respect to the transport direction D by the power from the external drive source. The surface is rotated by a substantially parallel rotating shaft. Further, the brush roller 41 is preferably rotationally driven in a direction in which it is reversed with respect to the conveyance direction D in a charged state, but may be rotationally driven in a non-charged state.

As shown in FIG. 3, the brush roller 41 has a cylindrical core rod 41A and a plurality of bristles 41C that are implanted on the outer circumferential surface of the core rod 41A via the adhesive layer 41B.

The mandrel 41A is formed of, for example, a conductive material such as a metal, a carbon material, or a synthetic resin composite material. The upper limit of the volume resistivity of the electrically conductive material is, for example, 10 ⁵ Ωcm. A voltage is applied to the mandrel 41A by a voltage applying mechanism such as an external power source to be described later. Further, the voltage applied to the mandrel 41A is set to be the same polarity and the absolute value is increased as compared with the cleaning roller 51 of the front side cleaning roller unit 5 to be described later.

The lower limit of the voltage applied to the mandrel 41A is preferably -800 V, more preferably -600 V. On the other hand, as the upper limit of the voltage, it is preferably -200 V, more preferably -300 V.

As the bristles 41C, it is preferable that the foreign matter is easily attached physically, and for example, a synthetic resin fiber can be cited. In addition, as the bristles 41C, it is preferable to have a charge for adsorbing foreign matter adhering to the front surface S1 of the object S, and for example, conductivity including carbon black, carbon fiber, metal powder, metal whisker, or the like can be suitably used. The material is made of synthetic resin fiber.

The cross-sectional shape of the bristles 41C is not particularly limited, and examples thereof include a circular shape, an elliptical shape, and a star shape. In addition, the outer shape of the bristles 41C is not particularly limited, and examples thereof include a linear shape, a wavy line shape, and a shape in which a curved line and a straight line are combined. Further, the larger the surface area of the bristles 41C, the easier it is to adsorb foreign matter. Therefore, as the bristles 41C, those having a cross-sectional shape that can secure a large surface area can be used, for example, a star shape.

The brush roller 41 is rotationally driven so as to be reversed in the direction in which the transport direction D of the object S is reversed, whereby foreign matter adhering to the front surface S1 of the object S can be scraped and adhered to the bristles 41C. In addition, by applying a voltage to the brush roller 41 to charge it, the adsorption force generated by the electric field force acts, and the foreign matter on the front surface S1 of the object S is efficiently adsorbed on the bristles 41C. In particular, by charging the brush roller 41, even if there is a hole or a surface depression on the object S, the foreign matter in the hole or the recess can be efficiently removed. Further, by applying a voltage in the above range to the mandrel 41A, it is possible to more effectively adsorb a relatively large foreign matter from the front surface S1 of the object S to the brush roller 41.

Further, the brush roller 41 of the front side brush roller unit 4 is rotated by a bristles 41C in a direction reversed with respect to the conveyance direction D, and is applied with a voltage having the same polarity and a large absolute value as compared with the cleaning roller 51. A relatively large foreign matter of a millimeter order is removed from the front side surface S1 of the object S.

The lower limit of the average pressure contact amount of the brush roller 41 toward the object S is preferably 0.3 mm, more preferably 0.5 mm. On the other hand, as the upper limit of the average crimping amount, it is preferably 1.5 mm, more preferably 1 mm. When the average pressure-bonding amount is less than the lower limit, there is a possibility that the foreign matter of the front side surface S1 of the object S cannot be sufficiently scraped. On the other hand, when the average pressure-bonding amount exceeds the upper limit, the resistance between the bristles 41C and the front surface S1 of the object S increases, so that the conveyance speed of the object S decreases, and the object to be damaged is present. The side surface S of S is the top of the surface. In addition, the "compression amount" is the amount of the bristles 41 in the object S, and is the value obtained by subtracting the minimum length of the surface of the mandrel 41A from the front surface S1 of the object S from the average length of the bristles 41C. .

The lower limit of the peripheral speed of the brush roller 41 is preferably 1 m/min, more preferably 2 m/min. On the other hand, the upper limit of the peripheral speed of the brush roller 41 is preferably 30 m/min, more preferably 15 m/min. When the peripheral speed of the brush roller 41 is less than the lower limit, there is a possibility that the foreign matter on the front surface S1 of the object S cannot be sufficiently scraped. On the other hand, when the peripheral speed of the brush roller 41 exceeds the upper limit, the resistance between the bristles 41C and the front surface S1 of the object S increases, so that the transport speed of the object S decreases, and the object S exists. The side surface S1 of the watch is damaged. Further, the upper limit of the ratio (B/W) of the peripheral speed B of the brush roller 41 to the conveying speed W of the object S is preferably 25%. When the circumferential speed B of the brush roller 41 is excessively large with respect to the conveyance speed W of the object S, it is difficult to scrape a relatively large foreign matter by the brush roller 41.

(Recycling Roller) The collecting roller 42 is a first collecting roller that is substantially parallel to the brush roller 41 and that abuts against the bristles 41C and collects foreign matter adhering to the bristles 41C. The recovery roller 42 has a smaller diameter than the brush roller 41, and is disposed above the brush roller 41 so as to be positioned upstream of the brush roller 41 in the transport direction. By arranging in this way, it is possible to reduce adverse effects such as reattachment of foreign matter scraped by the blade 43 to be described later to a member such as the recovery roller 42.

As shown in FIG. 4, the recovery roller 42 is provided with a roller main body 42A made of a conductive material, and a corrosion-resistant layer 42B laminated on the outer peripheral surface thereof. The material of the roller body 42A is not particularly limited as long as it is a conductive material, and examples thereof include a metal material such as stainless steel, copper, or aluminum, or a conductive resin obtained by blending a conductive material such as a conductive filler into a synthetic resin. Among the materials, etc., among these, a metal material is preferable. The corrosion-resistant layer 42B can be a metal plating layer formed by a plating treatment such as nickel plating or gold plating. However, the recovery roller 42 may be formed of a conductive material that is hardly oxidized by stainless steel or the like as a whole, and does not have the corrosion-resistant layer 42B.

The recovery roller 42 is rotationally driven by the power from the external drive source in a direction in which the brush roller 41 is reversed (clockwise direction of FIG. 2) while being charged by the external power source. As described above, the recovery direction of the foreign matter can be improved by setting the rotation direction of the recovery roller 42 to the direction in which the brush roller 41 is reversed. The lower limit of the magnification of the rotation speed of the recovery roller 42 with respect to the rotation speed of the brush roller 41 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be efficiently moved from the brush roller 41 to the recovery roller 42. However, the direction of rotation of the recovery roller 42 may also be a direction of normal rotation with respect to the brush roller 41.

With respect to the applied voltage to the brush roller 41, the applied voltage in the recovery roller 42 becomes the same polarity and the absolute value becomes high. The lower limit of the absolute value of the difference between the applied voltage in the recovery roller 42 and the applied voltage in the brush roller 41 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. Further, the lower limit of the applied voltage to the recovery roller 42 is preferably -1,500 V, more preferably -1,200 V. On the other hand, as the upper limit of the applied voltage, it is preferably -400 V, more preferably -600 V. By applying a voltage to the brush roller 41, the applied voltage in the recovery roller 42 becomes the same polarity and the absolute value becomes high, and the potential of the outer peripheral surface of the roller 42 is recovered with respect to the potential of the bristles 41C of the brush roller 41. Since the absolute polarity is high, the foreign matter adhering to the brush roller 41 can be adsorbed on the outer peripheral surface of the recovery roller 42. In particular, when the difference between the applied voltage of the recovery roller 42 and the brush roller 41 is within the above range, and the applied voltage to the recovery roller 42 is set to the above range, the foreign matter adhering to the brush roller 41 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 42. The upper limit of the electric resistance of the recovery roller 42 is preferably 10 ⁸ Ω. By setting the electric resistance of the recovery roller 42 to 10 ⁸ Ω or less, even when the surface of the recovery roller 42 is subjected to surface treatment or when a film is formed, it can be effectively charged by application of a voltage.

(Blade) The blade 43 is a first blade that scrapes off and removes foreign matter from the recovery roller 42. The blade 43 is, for example, a rectangular plate-like member having elasticity.

The blade 43 has a front end portion as a free end, and the base end portion is fixed to the blade supporting portion 43a. The tip end portion of the blade 43 as the free end abuts on the outer peripheral surface of the recovery roller 42 in the axial direction of the recovery roller 42. The blade 43 preferably abuts on the outer peripheral surface of the recovery roller 42 in an inclined state. The lower limit of the inclination angle of the imaginary tangent to the outer circumference of the blade 43 and the recovery roller 42 at the contact of the blade 43 and the recovery roller 42 is preferably 5°, more preferably 15°. On the other hand, as the upper limit of the inclination angle, it is preferably 30°, more preferably 25°. When the angle is less than the lower limit, there is a possibility that the foreign matter that is wiped past the blade 43 is again scraped off to the object S due to insufficient pressure contact force. Retransfer phenomenon. On the other hand, in the case where the inclination angle exceeds the upper limit, there is a possibility that the blade 43 is caught in the rotation of the recovery roller 42 and is curled. Therefore, the blade 43 is brought into contact with the recovery roller 42 in such a manner that the inclination angle becomes the above range, whereby the foreign matter can be effectively scraped off from the recovery roller 42. Further, the blade 43 is disposed on the upstream side in the conveyance direction, that is, above the conveyance roller 45, than the recovery roller 42. Thereby, the space above the conveyance roller 45 can be utilized effectively, and the front side brush roller unit 4 can be reduced in size. In addition, it is possible to adopt a configuration in which a foreign matter collecting portion 44 to be described later is extracted toward the upstream side in the transport direction, and the convenience is improved.

The material of the blade 43 is not particularly limited, but is preferably elastic, and more preferably a synthetic resin. Specifically, in order to impart appropriate elasticity, it is preferably formed of a synthetic resin such as a thermosetting polyurethane. Further, in order to reduce the friction with the recovery roller 42 that is abutted, at least the tip end portion of the blade 43 can be fluorine-coated by a fluorine-containing compound such as a fluororesin. The lower limit of the average thickness of the fluorine coating is preferably 5 μm. On the other hand, as the upper limit of the average thickness, it is preferably 15 μm. If the average thickness is less than the lower limit, the friction reducing effect may not be sufficiently exhibited, and the blade 43 may be easily caught in the rotation of the recovery roller 42. On the other hand, in the case where the average thickness exceeds the upper limit, there is a possibility that breakage of the fluorine coating occurs. Further, the shape of the blade 43 is not limited to the rectangular plate shape of Fig. 2, and may be a shape that is bent or curved from the base end portion to the front end portion.

(Foreign Object Collection Unit) The foreign matter collection unit 44 is a first foreign matter collection unit that collects and stores foreign matter scraped off from the recovery roller 42 by the blade 43. The foreign matter collecting unit 44 is disposed below the front end portion of the blade 43 and is located on the upstream side in the transport direction from the brush roller 41. Further, the foreign matter collecting portion 44 is fitted into the opening of the upstream plate of the casing 40, and can be drawn out from the opening toward the upstream side in the conveying direction. The grip portion 44A is provided on the upstream side of the foreign matter collecting portion 44, and the foreign matter collecting portion 44 is easily taken in and out by the grip portion 44A. In addition, since the foreign matter collecting unit 44 can be taken out to the upstream side in the conveyance direction, the front side brush unit 4 can be maintained in a state of being fixed to the holder 1, and the foreign matter can be extracted and collected, which is excellent in convenience.

(Transport Roller) The transport roller 45 is a mover that guides the object S carried into the cleaning mechanism 3 together with the auxiliary roller 62 of the back-side opposite roller unit 6 to be described later. In addition, the conveyance roller 45 and the auxiliary roller 62 have a function of imparting a propulsive force to the object S in order to allow the object S to enter the lower side of the brush roller 41 that is reversed with respect to the conveyance direction D with an appropriate force. The conveyance roller 45 is disposed to face the auxiliary roller 62 of the back-side opposite roller unit 6 to be described later. The conveyance roller 45 rotates in the direction (the counterclockwise rotation direction of FIG. 2) which rotates forward with respect to the conveyance direction D. When the force of the object S is excessively applied by the auxiliary roller 62 and the transport roller 45, the foreign matter is pressed against the object S, and it is difficult to remove the flaw or the object S is damaged. In consideration of such a case, the conveying roller 45 is disposed to press the auxiliary roller 62 by a force of about 0.49 N. However, the pressing force can be appropriately adjusted in consideration of the material or thickness of the object S. Further, when the hardness of the object S is relatively high, the conveyance roller 45 may be omitted from the cleaning device when the auxiliary roller 62 is allowed to enter only below the brush roller 41.

As shown in FIGS. 5 and 6, the conveying roller 45 includes a core shaft 45A and a plurality of resin portions 45B, and the resin portion 45B is an annular member laminated on the outer circumference of the core shaft 45A, and is along the core shaft 45A. The axis direction is separated by the configuration. As shown in FIGS. 5 and 6, the resin portion 45B has irregularities on the outer peripheral surface. In this manner, by arranging the plurality of resin portions 45B having irregularities on the outer peripheral surface, the contact area between the transport roller 45 and the front surface S1 of the object S can be reduced. As a result, when the object S is carried into the cleaning mechanism 3, it is possible to suppress clogging of the object S between the conveyance roller 45 and the auxiliary roller 62.

The mandrel 45A is formed of, for example, a metal such as stainless steel, copper, or aluminum. The resin portion 45B is formed of, for example, a polyurethane or the like. Examples of the polyurethane include an acrylic acid mixed urethane and a fluorine mixed urethane. Here, "acrylic mixed urethane" is a resin containing a polyester polyurethane or a polyether polyurethane as a main component, and means (1) a thermoplastic polyurethane. And a mixture of an acrylic copolymer resin, and (2) an acrylic resin (for example, a graft compound comprising a methacrylic acid-methyl methacrylate copolymer grafted with an amino group in a main chain) and a thermoplastic polymer. A mixture of urethanes, or (3) comprising a mixture of an acrylic resin, a polyurethane, and a fluorine-based surface coating agent. The "fluorine mixed urethane" is a resin containing a polyurethane as a main component, and is a mixture of a thermoplastic polyurethane and a urethane/fluoro copolymer. The "main component" means a component having the highest content, and is, for example, a component containing 50% by mass or more.

(Height Adjustment Mechanism) The front side brush roller unit 4 is preferably constructed in such a manner that the height can be adjusted by the height adjustment mechanism. In this way, the height of the front side brush roller unit 4 can be adjusted by the height adjusting mechanism, whereby the amount of pressure contact of the brush roller 41 with the object S can be adjusted, and the relatively large foreign matter can be removed more efficiently by the brush roller 41. .

7 to 9 show an example of a state in which the front side brush roller unit 4 is disposed on the plate-like member 10 of the holder 1 via the height adjusting mechanism of the front side brush roller unit 4 (fixer 1, height adjusting mechanism, and front side brush roller) The members other than the top plate 103 of the casing 40 of the unit 4 are omitted from illustration. The height adjusting mechanism of FIGS. 7 to 9 mainly includes a substantially plate-shaped fixing member 101 fixed to the plate member 10 of the holder 1 and a sliding member 102 placed on the upper surface of the fixing member 101. The transport direction D is horizontally moved and moved up and down, and the cover 104 covers the fixing member 101. The top plate 103 of the front side brush roller unit 4 supports the end portion in the longitudinal direction by the sliding member 102, and moves up and down along with the sliding member 102. In the height adjusting mechanism of FIGS. 7 to 9, a gauge that is fixed to the plate member 10 and that can measure the vertical position of the sliding member 102 or the like, or an adjustment tool for fixing the horizontal position of the sliding member 102 can be further provided. . Fig. 7 shows a state in which the height of the front side brush roller unit 4 is minimized. 8 and 9 show a state in which the height of the front side brush roller unit 4 is maximized.

A part of the upper surface of the fixing member 101 is formed with a slope that gradually increases in height from the vicinity of the center of the conveyance direction D to the downstream side (the right side in FIGS. 7 and 8 ). On the other hand, the upper surface of the sliding member 102 is formed into a substantially horizontal surface, but a slope of the height from the vicinity of the center of the conveyance direction D to the downstream side is gradually formed in a part of the lower surface. The slope of the upper surface of the fixing member 101 has the same gradient and the slope of the slope of the lower surface of the sliding member 102. Therefore, by horizontally moving the sliding member 102 in the conveying direction D, the upper surface of the sliding member 102 can be raised to a substantially horizontal state while the height is undulated. Thereby, the height of the top plate 103 supported by the sliding member 102 (the distance L1 between the upper surface of the top plate 103 and the upper end of the plate-like member 10 and the distance L2) can be changed, and the front side brush roller can be changed by the height of the top plate 103. Unit 4 is adjusted to the desired height.

In the height adjusting mechanism of FIGS. 7 to 9, the relatively large horizontal movement of the sliding member 102 can be steplessly converted into a relatively fine vertical movement of the top plate 103, and thus can correspond to the type of the object S or The height of the brush roller unit 4 is finely adjusted in a stepless manner. Further, since the height adjusting mechanism of FIGS. 7 to 9 can be disposed near the upper end of the holder 1, the space of the holder 1 can be effectively utilized, and the workability at the time of height adjustment is excellent.

However, the mode, structure, and the like of the height adjusting mechanism of the brush roller unit 4 are not limited to those of FIGS. 7 to 9. As another method of height adjustment, for example, a method of arranging a spacer of a predetermined height on a fixing portion of the brush roller unit 4 in the holder 1 or a protrusion portion in the front side brush roller unit 4 and A method in which the rail-shaped member fitted to the protruding portion is disposed on the holder 1 in the vertical direction, and the mounting height of the front side brush roller unit 4 can be steplessly adjusted.

[Front Side Cleaning Roller Unit] The front side cleaning roller unit 5 is a unit that removes foreign matter on the front side surface S1 of the object S by the cleaning roller 51 housed in the housing 50. In the frame 50 of the front side cleaning roller unit 5, in addition to the cleaning roller 51, the brush roller 52, the recovery roller 53, the blade 54, and the foreign matter collecting portion 55 are mainly housed, and the whole is unitized. The front side cleaning roller unit 5 is suitable for the removal of fine foreign matter smaller than the millimeter size, and is detachably disposed on the holder 1 at a position closer to the downstream side in the conveyance direction than the front side brush roller unit 4. In order to effectively move the fine foreign matter on the surface thereof, the cleaning roller 51 is set to apply pressure to both surfaces of the object S together with the opposite resin roller 61 to be described later. Therefore, if the front side cleaning roller unit 5 is disposed on the upstream side of the front side brush roller unit 4, the cleaning roller 51 presses and presses the relatively large foreign matter onto the object S even by the brush roller 41. It is also impossible to remove the flaws of the foreign matter. Therefore, the front side cleaning roller unit 5 is preferably disposed on the downstream side of the front side brush roller unit 4.

Thus, by detachably unitizing the front side cleaning roller unit 5 on the holder 1, the front side cleaning roller unit 5 can be easily detached from the holder 1. As a result, when the cleaning roller 51 has to be changed in accordance with the type of the object S or the foreign matter, the unit can be replaced together with the unit, so that the foreign matter can be easily removed easily. In addition, by removing the front side cleaning roller unit 5 from the holder 1, the opposite resin roller 61 and the like which will be described later, which are opposed to the cleaning roller 51, can be easily replaced or cleaned, and therefore excellent in maintainability. In addition, the cleaning roller 51 and the like accommodated in the housing 50 are unitized by being housed in the housing 50, and maintenance is also easier than when the device is assembled and fixed to the device.

(Frame) The housing 50 is a unit that accommodates the cleaning roller 51 and the like, and can be attached or detached to the holder 1. Similarly to the front side brush roller unit 4, the frame body 50 has an upstream plate, a downstream plate, a pair of side plates, a top plate, and a bottom plate. A pair of grip portions 50A that are spaced apart in the transport width direction are provided in the top plate. The pair of grip portions 50A are used by the front side cleaning roller unit 5 during loading and unloading. An opening 50B is provided in the bottom plate, and a part of the cleaning roller 51 protrudes from the opening 50B. The downstream plate is bent from the top to the bottom. Further, the material constituting the frame 50 is not particularly limited, and for example, a metal such as stainless steel can be suitably used.

(Cleaning Roller) The cleaning roller 51 is a foreign matter that removes the front side surface S1 of the object S, in particular, a relatively fine foreign matter (for example, a foreign matter smaller than a millimeter size), and is in a state of being charged with respect to the transport direction in a state where the outer peripheral surface is charged. The direction in which D is forward (the counterclockwise direction in FIG. 2) is rotationally driven by a rotation axis substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface. As shown in Fig. 10, the cleaning roller 51 is an elastic roller having a core rod 51A, an inner layer portion 51B formed on the outer peripheral surface of the core rod 51A, and an outer layer portion 51C covering the outer peripheral surface of the inner layer portion 51B. .

The mandrel 51A is formed in a cylindrical shape by a conductive material. For example, a metal material or the like is used as the conductive material for the core rod 51A. Specifically, similarly to the roller main body 42A of the recovery roller 42 of the front side brush roller unit 4, stainless steel, copper, aluminum, or the like can be given.

The inner layer portion 51B is a pressing force or a nip width for securing the object S to be generated by the cleaning roller 51 and the opposite resin roller 61 to be described later. In other words, the inner layer portion 51B is a person who secures a desired adhesive force or contact width with respect to the object S and contributes to efficient removal of relatively fine foreign matter from the front side surface S1. The material for forming the inner layer portion 51B is preferably a resin material having elasticity and conductivity, and more preferably a resin material containing a resin component and carbon such as a polyurethane, an anthrone resin, a natural rubber or a synthetic rubber. . As the polyurethane, the same as the polyurethane of the resin portion 45B of the transfer roller 45 can be suitably used. The material for forming the inner layer portion 51B is more preferably a conductive elastomer containing a polyester-based polyurethane and carbon black. With these materials, the elasticity of the cleaning roller 51 can be sufficiently ensured, and the foreign matter is excessively pressed against the object S by the cleaning roller 51, and the deterioration of the removal efficiency of the foreign matter can be suppressed. Further, the lower limit of the JIS-A hardness of the inner layer portion 51B is preferably 15°. Further, the upper limit of the JIS-A hardness is preferably 70°. Further, the electric resistance of the inner layer portion 51B is preferably 10 ⁸ Ω or less. By having the JIS-A hardness of the inner layer portion 51B within the above range, the elasticity of the cleaning roller 51 can be sufficiently ensured, and it is ensured that it can be effectively disposed between the opposing resin roller 61 of the back side opposite roller unit 6 which will be described later. The nip width of the foreign matter removal of the object S is performed.

The outer layer portion 51C is intended to ensure the anti-fouling property or the wear resistance of the cleaning roller 51 while ensuring the adhesion to the object S or the provision of an appropriate surface potential, while avoiding moisture. The adverse effects caused by such. The material of the outer layer portion 51C may be a chargeable material for adsorbing foreign matter adhering to the front surface S1 of the object S by an electric field force, and examples thereof include an acrylic mixed polyurethane or a fluorine mixture. A polyurethane such as a polyurethane, an anthranone resin, a natural rubber, a synthetic rubber or the like, among these, a polyurethane is preferable. As described above, the outer layer portion 51C is formed of a polyurethane, whereby the abrasion resistance is improved as compared with the case of being formed of an fluorenone resin or butyl rubber, and the plasticizer or the like can be reduced. Contamination of the cleaning roller 51 caused by the addition of the molecular weight compound. Further, the outer layer portion 51C preferably has a higher hardness than the inner layer portion 51B, and specifically, preferably has a JIS-A hardness of 50 or more. When the JIS-A hardness of the outer layer portion 51C is 50° or more, the abrasion resistance of the cleaning roller 51 can be sufficiently ensured.

By using acrylic mixed urethane as the material of the outer layer portion 51C, it is easy to remove the negatively charged foreign matter from the front surface S1 of the object S. On the other hand, by using fluorine mixed polyurethane as the material of the outer layer portion 51C, the cleaning roller 51 is easily negatively charged, and it is easy to remove positively charged foreign matter from the object S.

In addition, when the adhesive force of the outer layer portion 51C is too strong, when the thickness of the object S is thin, the cleaning roller 51 is caught in the object S. Therefore, in order to prevent the object S from being caught, it is preferable to form minute projections on the surface (outer layer portion 51C) of the cleaning roller 51. As a specific method of forming the microprotrusions, a method of arranging particles which are raw materials of the microprotrusions in a resin material such as thermoplastic polyurethane for forming the outer layer portion 51C is preferable. The particles may be shaped particles or amorphous particles. However, from the viewpoint of uniformizing the protruding shape of the minute protrusions, the spherical particles are preferably shaped. The lower limit of the average particle diameter of the spherical particles is preferably 2 μm, more preferably 2.5 μm. On the other hand, the upper limit of the average particle diameter is preferably 5 μm, more preferably 4.5 μm. Further, in the spherical particles, the lower limit of the coefficient of variation (CV (Coefficient of Variation)) obtained by dividing the standard deviation (σ) related to the average particle diameter by the average particle diameter is preferably 3.0. %, more preferably 3.5%. On the other hand, the upper limit of the coefficient of variation is preferably 5.0%, more preferably 4.5%. Here, the "average particle diameter" means a volume average particle diameter (Mv) obtained by a laser diffraction/scattering method.

The spherical particles are preferably harder than the thermoplastic polyurethane. However, if the spherical particles are excessively hard like glass beads or ceramic beads, the object S may be damaged. Therefore, it is preferably a resin. Examples of the hard resin forming the spherical particles include a melamine resin or an acrylic resin. Among them, a melamine resin is preferred.

The lower limit of the average thickness of the outer layer portion 51C is preferably 2 μm, more preferably 5 μm. On the other hand, the upper limit of the average thickness of the outer layer portion 51C is preferably 500 μm, more preferably 300 μm. When the average thickness of the outer layer portion 51C is less than the lower limit, the surface of the cleaning roller 51 cannot be sufficiently charged, and the adsorption effect of the foreign matter cannot be sufficiently obtained. On the other hand, if the average thickness of the outer layer portion 51C exceeds the upper limit, there is a possibility that good charging characteristics for adsorbing foreign matter cannot be obtained.

The cleaning roller 51 is charged by application of a voltage of an external power source, and is given a surface potential (surface charge). In other words, the cleaning roller 51 abuts on the front surface S1 of the object S while the surface is charged, and adsorbs and removes relatively fine foreign matter adhering to the front surface S1 of the object S by the electric field force. As described above, by charging the cleaning roller 51, even if there is a hole or a surface depression on the object S, the foreign matter in the hole or the recess can be efficiently removed.

With respect to the applied voltage in the brush roller 41 toward the front side brush roller unit 4, the applied voltage to the cleaning roller 51 becomes the same polarity and the absolute value becomes low. The lower limit of the applied voltage to the cleaning roller 51 is, for example, -400 V, preferably -200 V. On the other hand, the applied voltage is, for example, less than 0 V, preferably -50 V or less. Thus, the applied voltage in the cleaning roller 51 becomes the same polarity and the absolute value becomes lower with respect to the applied voltage in the brush roller 41 toward the front side brush roller unit 4, and can be removed from the front side surface S1 of the object S. Compare fine foreign objects. In particular, by setting the applied voltage to the cleaning roller 51 to the above range, relatively fine foreign matter can be efficiently removed from the front surface S1 of the object S. Further, the upper limit of the electric resistance of the cleaning roller 51 is preferably 10 ⁸ Ω. Since the electric resistance of the cleaning roller 51 is 10 ⁸ Ω or less, it can be effectively charged when a voltage is applied.

In addition, in order to improve the collection efficiency of fine foreign matter, the cleaning roller 51 is preferably set to have a height that applies an appropriate pressure to the object S between the opposing resin roller 61. The pressure applied to the object S by the cleaning roller 51 and the counter resin roll 61 can be, for example, a line pressure of 2.4 kg/250 mm. Here, 250 mm is the axial length of the outer layer portion 51C of the cleaning roller 51 in the present embodiment. Further, the cleaning roller 51 also has a function of imparting an appropriate propulsive force to the object S together with the facing resin roller 61. Thereby, the object S is easily moved to the lower side of the brush roller 71 of the back side brush roller unit 7 which will be described later, which rotates in the direction reversed with respect to the conveyance direction D.

(Brush Roller) The brush roll 52 is a foreign matter that has been removed from the object S by the cleaning roller 51, and is disposed directly above the cleaning roller 51 so as to be substantially parallel to and in contact with the cleaning roller 51. The brush roller 52 is rotationally driven by the power from the external drive source in the charged state with respect to the direction in which the cleaning roller 51 is reversed (the counterclockwise direction of FIG. 2). The brush roller 52 has a cylindrical core rod 52A and a plurality of bristles 52C (see FIG. 3) implanted on the outer circumferential surface of the core rod 52A via the adhesive layer 52B, the details of which are the same as those of the front side brush roller unit 4. Since the core rod 41A and the bristles 41C of the brush roller 41 are the same, the repeated description is omitted. Further, with respect to the applied voltage to the cleaning roller 51, the applied voltage (the voltage applied to the mandrel 52A) in the brush roller 52 becomes the same polarity and the absolute value becomes high. The lower limit of the applied voltage to the specific brush roller 52 is preferably -800 V, more preferably -600 V, similarly to the brush roller 41 of the front brush roller unit 4. On the other hand, as the upper limit of the applied voltage, it is preferably -200 V, more preferably -300 V.

(Recycling Roller) The collecting roller 53 is a second collecting roller that collects the foreign matter collected from the cleaning roller 51 by the brush roller 52, and is disposed above the brush roller 52 so as to be substantially parallel to the brush roller 52 and to abut against the bristles 52C. Assume. In the charged state, the recovery roller 53 is rotationally driven by the power from the external drive source in the direction opposite to the reverse direction of the brush roller 52 (the counterclockwise direction of FIG. 2). The details of the recovery roller 53 can be the same as those of the recovery roller 42 of the front side brush roller unit 4, and thus the overlapping description will be omitted.

With respect to the applied voltage to the brush roller 52, the applied voltage in the recovery roller 53 becomes the same polarity and the absolute value becomes high. The lower limit of the absolute value of the difference between the applied voltage in the recovery roller 53 and the applied voltage in the brush roller 52 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. Further, the lower limit of the applied voltage to the recovery roller 53 is preferably -1,500 V, more preferably -1,200 V. On the other hand, as the upper limit of the applied voltage, it is preferably -400 V, more preferably -600 V. By applying a voltage to the brush roller 52, the applied voltage in the recovery roller 53 becomes the same polarity and the absolute value becomes higher, and the outer peripheral surface of the recovery roller 53 is recovered as compared with the potential of the bristles 52C of the brush roller 52. Since the potentials are of the same polarity and the absolute value becomes high, the foreign matter adhering to the brush roller 52 can be adsorbed on the outer peripheral surface of the recovery roller 53. In particular, when the difference between the applied voltage of the recovery roller 53 and the brush roller 52 is within the above range, and the applied voltage to the recovery roller 53 is set to the above range, the foreign matter adhering to the brush roller 52 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 53.

The recovery roller 53 is disposed on the downstream side in the transport direction from the brush roller 52. By this means, even if the diameter of the recovery roller 53 is smaller than the brush roller 52, the foreign matter can be scraped off to the downstream side in the conveyance direction by the blade 54 which will be described later, and the foreign matter can be prevented from being adsorbed again on the brush roller 52.

The rotation direction of the recovery roller 53 may be any direction of the forward direction and the reverse direction of the brush roller 52, and it is preferable to change the rotation direction of the foreign matter from the outer peripheral surface by the blade 54 which will be described later. In the present embodiment, as shown in FIG. 2, the rotation direction of the recovery roller 53 is set to the direction in which the brush roller 52 is reversed (the counterclockwise direction of FIG. 2), and the recovery efficiency of the foreign matter by the blade 54 can be improved. . The lower limit of the magnification of the rotation speed of the recovery roller 53 with respect to the rotational speed of the brush roller 52 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be efficiently moved from the brush roller 52 to the recovery roller 53.

(Blade) The blade 54 is a second blade that scrapes foreign matter from the recovery roller 53. The details of the blade 54 and the blade supporting portion 54a supporting the blade 54 are the same as those of the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4.

(Foreign Object Collection Unit) The foreign matter collection unit 55 is a person who collects and stores the foreign matter scraped off from the recovery roller 53 by the blade 54. The foreign matter collecting portion 55 is disposed below the front end portion of the blade 54 and located further downstream than the brush roller 52 in the transport direction. Further, the foreign matter collecting portion 55 is fitted into the opening of the downstream plate of the casing 50, and can be drawn out to the downstream side in the conveying direction via the opening. The grip portion 55A is provided on the downstream side of the foreign matter collecting portion 55, and the foreign matter collecting portion 55 is easily taken in and out by the grip portion 55A. In addition, since the foreign matter collecting unit 55 can be taken out to the downstream side in the transport direction, it is excellent in convenience in that the cleaning roller unit 5 is fixed to the holder 1 and the foreign matter is collected and recovered.

(Height Adjustment Mechanism) The front side cleaning roller unit 5 is preferably constructed in such a manner that the height can be adjusted by the height adjustment mechanism. In this way, the height of the front side cleaning roller unit 5 is adjusted by the height adjusting mechanism, whereby the pressing force (clamping width) of the cleaning roller 51 with respect to the object S can be adjusted, and as a result, the fine foreign matter can be removed efficiently. .

As a specific example of the height adjustment mechanism of the front side cleaning roller unit 5, for example, the same mechanism as that exemplified as the height adjustment mechanism of the front brush roller unit 4 can be used.

As described above, the front side brush roller unit 4 and the front side cleaning roller unit 5 can be attached and detached, so that the height adjusting mechanism can be independently provided in each unit. Therefore, even in the case where the optimum crimping condition of the brush roller 41 of the front side brush roller unit 4 for the object S is different from the optimum crimping condition of the cleaning roller 51 of the front side cleaning roller unit 5 for the object S, The cleaning device can also optimize the respective crimping states.

[Back side opposite roller unit] The back side opposite roller unit 6 is a transport path that defines the object S together with the brush roller 41 of the front side brush roller unit 4 and the cleaning roller 51 of the front side cleaning roller unit 5, and is disposed in the same manner. The back side of the object S (below the transport path). The back-side facing roller unit 6 mainly includes a pair of opposing rollers including a facing metal roller 60 as a first back-side opposing roller and a facing resin roller 61 as a second back-side opposing roller, and an auxiliary Roller 62. The back side opposite roller unit 6 is preferably detachably attached to the holder 1 from the viewpoint of maintainability.

Here, in order to accurately control the amount of pressure applied to the object S by the bristles 41C of the brush roller 41, it is advantageous that the hardness of the first counter roller that holds the object S on the lower surface of the object S is high. Therefore, the bristles 41C of the brush roller 41 of the front side brush roller unit 4 can be appropriately abutted against the object S by the relatively rigid metal roller 60, and can be effectively removed from the front side surface S1. Larger foreign objects. On the other hand, in order to efficiently adsorb fine foreign matter on the surface thereof, the cleaning roller 51 must apply an appropriate pressure to the object S between the second counter roller, but if the pressure is excessively applied, the foreign matter is pressed. It is attached to the object S, whereby there is a flaw in recycling. Therefore, as the second counter roller, for example, a metal having a high hardness is not suitable, and a resin roller having substantially the same hardness as the cleaning roller 51 is preferable. Therefore, by the resin roller (elastic roller) having the elasticity toward the resin roller 61, an appropriate pressure can be applied to the object S between the cleaning roller 51 of the front side cleaning roller unit 5 to improve the adhesion and ensure the appropriateness. The nip width is such that fine foreign matter can be efficiently removed from the front side surface S1 of the object S by the cleaning roller 51.

(opposite metal roll) The counter metal roll 60 is opposed to the brush roll 41 of the front side brush unit 4 via the object S, and is disposed directly under the brush roll 41 so as to be in contact with the object S. The first back side opposite roller. The opposing metal roller 60 is rotationally driven in a direction (clockwise direction of rotation of FIG. 2) that is rotated forward in the conveyance direction D of the object S. That is, the opposing metal roller 60 is rotationally driven in a direction in which the brush roller 41 of the front side brush roller unit 4 is reversed. The details of the opposing metal roller 60 are the same as those of the recovery roller 42 of the front side brush roller unit 4. However, the opposing metal roller 60 is electrically connected to the ground without being connected to an external power source, whereby an electric field suitable for removing foreign matter can be generated when the brush roller 41 is charged.

In order to prevent the back surface S2 of the object S from being damaged, a urethane resin or the like may be applied to the surface of the counter metal roll 60. When the counter metal roll 60 is subjected to surface treatment or a film is formed, the resistance of the counter metal roll 60 is preferably 10 ⁸ Ω or less. When the electric resistance of the opposing metal roll 42 is 10 ⁸ Ω or less, the opposing metal roll 42 is easily electrically connected to the ground.

As described above, the brush roller 41 must accurately control the amount of sinking of the brush toward the object S. Therefore, the first back side facing roller that faces the brush roller 41 must stably support the object S. Therefore, as the first back side facing roller, it is preferable that the hardness is high. Specifically, as in the embodiment, the facing metal roll 60 is preferable. However, the first back side facing roller does not necessarily need to be a metal roll, and a conductive resin roll or the like may be used.

(Phase Resin Roller) The counter resin roll 61 faces the cleaning roller 51 of the front side cleaning roller unit 5 via the object S, and is disposed directly under the cleaning roller 51 so as to be in contact with the object S. The facing resin roller 61 is rotationally driven in a direction (clockwise rotation direction of FIG. 2) that is rotated forward in the conveyance direction D of the object S. That is, the facing resin roller 61 is rotationally driven in the direction of forward rotation with respect to the cleaning roller 51. The details of the counter resin roller 61 are substantially the same as those of the cleaning roller 51 of the front side cleaning roller unit 5. However, when forming the outer layer portion of the counter resin roll 61, it is preferable to prepare titanium oxide, barium titanate or the like as the particles of the raw material for forming the micro protrusions. By using titanium oxide, barium titanate or the like as the particles, the density of the fine projections is increased, and the object S can be appropriately conveyed. Further, the facing resin roller 61 is electrically connected to the ground without being connected to an external power source, and an electric field suitable for removing foreign matter can be generated between the facing cleaning roller 51 and the charged cleaning roller 51.

As described above, in order to increase the recovery efficiency of the fine foreign matter, the cleaning roller 51 is set so as to apply an appropriate pressure to the object S between the facing resin roller 61. If the pressure is too weak, there is a possibility that the cleaning roller 51 and the counter resin roller 61 are insufficiently provided with the propulsive force for projecting the object S into the brush roller 71 of the back side brush unit 7, and if it is too strong Then, there is a foreign matter that is squeezed and fixed on the object S, and cannot be recycled. Therefore, in order to adjust the pressure, the structure of the opposite resin roller 61 can be pressed in the direction of the cleaning roller 51 by using an elastic body or the like.

(Auxiliary Roller) The auxiliary roller 62 is a mover that guides the object S together with the transport roller 45 of the front brush roller unit 4, and the object S is carried into the cleaning mechanism 3 by the upstream external transport mechanism 2A. The layer structure and the like of the auxiliary roller 62 can be set to be the same as that of the counter resin roll 61.

<Back Side Cleaning Mechanism> The back side cleaning mechanism 3B is a foreign object that removes the back side surface S2 of the object S. The back side cleaning mechanism 3B is configured to vertically reverse the front side cleaning mechanism 3A, and has a back side brush roller unit 7, a back side cleaning roller unit 8, and a front side opposite roller unit 9.

[Back Side Brush Roller Unit] The back side brush roll unit 7 is a foreign material that removes the foreign matter on the back side surface S2 of the object S by the brush roller 71, and is on the back side of the object S (below the transport path), than the front side The back side opposite roller unit 6 of the cleaning mechanism 3A is disposed adjacent to the downstream side in the conveyance direction. The back side brush roller unit 7 mainly includes a brush roller 71, a recovery roller 72, and a blade 73, and has basically the same configuration as the front side brush roller unit 4 of the front side cleaning mechanism 3A. However, the back side brush roller unit 7 is different from the front side brush roller unit 4 in that the member corresponding to the conveyance roller 45 and the foreign matter collecting portion 44 is not provided. In addition, the reason why the member corresponding to the conveyance roller 45 is not provided in the back side brush roller unit 7 is that the brush roller 71 is rotationally driven in the direction reversed with respect to the conveyance direction D, but is directed to the lower side of the brush roller 71. In the cleaning roller 51 disposed upstream of the brush roller 71 in the conveyance direction and the counter resin roller 61, an appropriate thrust is applied to the object S. Further, although the back side brush roller unit 7 is not provided with a member corresponding to the foreign matter collecting portion 44, the foreign matter can be discharged to the outside of the unit by the bottom opening. The foreign matter discharged from the back side brush roller unit 7 is collected by the foreign matter collecting portion 13 provided at the lowermost portion of the holder 1 together with the foreign matter discharged from the back side cleaning roller unit 8 to be described later. The back side brush roller unit 7 is preferably detachably attached to the holder 1 from the viewpoint of maintainability.

(Brush Roller) The brush roll 71 is a back side brush roll that abuts on the back side surface S2 of the object S in a charged state, and is reversed in the transport direction D with respect to the object S (counterclockwise in FIG. 2) The rotation direction is rotationally driven, thereby removing relatively large foreign matter of a millimeter size on the back side surface S2 of the object S. The brush roller 71 has a cylindrical mandrel 71A and a plurality of bristles 71C (see FIG. 3) implanted on the outer circumferential surface of the mandrel 71A via the adhesive layer 71B, the details of which are the same as that of the front side brush roller unit 4. Since the core rod 41A and the bristles 41C of the brush roller 41 are the same, the repeated description is omitted. In addition, with respect to the applied voltage in the cleaning roller 80 of the back side cleaning roller unit 8 which will be described later, the applied voltage (the voltage applied to the mandrel 71A) in the brush roller 71 becomes the same polarity and the absolute value becomes high. The lower limit of the applied voltage to the specific brush roller 71 is preferably -800 V, more preferably -600 V, similarly to the brush roller 41 of the front side brush roller unit 4. On the other hand, as the upper limit of the applied voltage, it is preferably -200 V, more preferably -300 V.

Further, the brush roller 71 is preferably rotationally driven in a direction in which the cleaning roller 80 is reversed in a charged state, but may be rotationally driven without being charged.

(Recycling Roller) The collecting roller 72 is a third collecting roller that collects foreign matter removed from the back surface S2 of the object S by the brush roller 71, and is located below the brush roller 71, substantially parallel to the brush roller 71 and with the bristles 71C. Come and match. The recovery roller 72 is rotationally driven by the power from the external drive source in the charged state with respect to the direction in which the brush roller 71 is reversed (the counterclockwise direction of FIG. 2). The details of the recovery roller 72 can be the same as those of the recovery roller 42 of the front side brush roller unit 4, and thus the overlapping description will be omitted.

With respect to the applied voltage to the brush roller 71, the applied voltage to the recovery roller 72 becomes the same polarity and the absolute value becomes high. The lower limit of the absolute value of the difference between the applied voltage in the recovery roller 72 and the applied voltage in the brush roller 71 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. Further, the lower limit of the applied voltage to the recovery roller 72 is preferably -1,500 V, more preferably -1,200 V. On the other hand, as the upper limit of the applied voltage, it is preferably -400 V, more preferably -600 V. By applying a voltage to the brush roller 71, the applied voltage in the recovery roller 72 becomes the same polarity and the absolute value becomes high, and the potential of the outer peripheral surface of the roller 72 is recovered with respect to the potential of the bristles 71C of the brush roller 71. Since the absolute polarity is high, the foreign matter adhering to the brush roller 71 can be adsorbed on the outer peripheral surface of the recovery roller 72. In particular, when the difference between the applied voltage of the recovery roller 72 and the brush roller 71 is within the above range, and the applied voltage to the recovery roller 72 is set to the above range, the foreign matter adhering to the brush roller 71 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 72.

The rotation direction of the recovery roller 72 may be any one of the direction in which the brush roller 71 rotates in the normal direction and the direction in which the brush roller 71 rotates. It is preferable to drive in the rotation direction in which the foreign matter on the outer peripheral surface is easily recovered by the blade 73 to be described later. . In the present embodiment, as shown in FIG. 2, the rotation direction of the recovery roller 72 is set to the direction in which the brush roller 71 is reversed (the counterclockwise direction of FIG. 2), and the recovery efficiency of the foreign matter by the blade 73 can be improved. . The lower limit of the magnification of the rotation speed of the recovery roller 72 with respect to the rotation speed of the brush roller 71 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be efficiently moved from the brush roller 71 to the recovery roller 72.

(Blade) The blade 73 is a third blade that scrapes foreign matter from the recovery roller 72. The details of the blade 73 and the blade supporting portion 73a supporting the blade 73 are the same as those of the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4 of the front side cleaning mechanism 3A.

[Back Side Cleaning Roller Unit] The back side cleaning roller unit 8 is a fine foreign matter that removes the back side surface S2 of the object S by the cleaning roller 80, and is on the back side of the object S (below the transport path). The back brush roller unit 7 is disposed adjacent to the downstream side in the transport direction. The back side cleaning roller unit 8 mainly includes a cleaning roller 80, a brush roller 81, a recovery roller 82, a blade 83, and a conveying roller 85, which basically have the same configuration as the front cleaning roller unit 5 of the front side cleaning mechanism 3A. However, the back side brush roller unit 7 has a conveyance roller 85 and a member that does not include the foreign matter collecting portion 55, as compared with the front side brush roller unit 4. The back side brush roller unit 7 is not provided with a member corresponding to the foreign matter collecting portion 55, but the bottom portion thereof is opened, and foreign matter can be discharged toward the outside of the unit. The foreign matter discharged from the back side cleaning roller unit 8 is recovered by the foreign matter collecting portion 13 provided at the lowermost portion of the holder 1 together with the foreign matter discharged from the back side brush roller unit 7. From the viewpoint of maintainability, the back side cleaning roller unit 8 is preferably detachably attached to the holder 1.

(Cleaning Roller) The cleaning roller 80 is a back side cleaning roller that removes fine foreign matter on the back surface S2 of the object S, and is disposed on the back side of the object S (below the transport path). In a state where the outer circumferential surface is charged, the cleaning roller 80 is rotated substantially in a direction perpendicular to the conveyance direction D (clockwise rotation direction in FIG. 2) substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface. To rotate the drive. The details of the cleaning roller 80 can be set to be the same as those of the cleaning roller 51 of the front side cleaning roller unit 5, and thus the overlapping description will be omitted.

With respect to the applied voltage in the brush roller 71 toward the back side brush roller unit 7, the applied voltage in the cleaning roller 80 becomes the same polarity and the absolute value becomes low. The lower limit of the applied voltage in the cleaning roller 80 is, for example, -400 V, preferably -200 V. On the other hand, as the applied voltage, for example, less than 0 V, preferably -50 V or less. Thus, by applying a voltage in the brush roller 71 toward the back side brush roller unit 7, the applied voltage in the cleaning roller 80 becomes the same polarity and the absolute value becomes low, which is possible from the back side surface S2 of the object S. Remove relatively fine foreign matter. In particular, by setting the applied voltage in the cleaning roller 80 to the above range, relatively fine foreign matter can be efficiently removed from the back side surface S2 of the object S.

(Brush Roller) The brush roller 81 is a fine foreign matter that is removed from the back surface S2 of the object S by the cleaning roller 80, and abuts against the cleaning roller 80 and is disposed below the cleaning roller 80. In the charged state, the brush roller 81 is rotationally driven by a rotation axis substantially perpendicular to the conveyance direction D and substantially parallel to the conveyance surface in a direction opposite to the direction in which the cleaning roller 80 is reversed (clockwise rotation direction in FIG. 2). . Similarly to the brush roller 41 of the front side brush roller unit 4, the brush roller 81 is formed by implanting a plurality of bristles 81C onto the mandrel 81A via the adhesive layer 81B, and the details thereof and the brush of the front side brush roller unit 4 The rollers 41 are the same.

The applied voltage (the voltage applied to the mandrel 81A) toward the brush roller 81 becomes the same polarity with respect to the applied voltage in the cleaning roller 80, and the absolute value becomes high. The lower limit of the applied voltage to the specific brush roller 81 is preferably -800 V, more preferably -600 V, similarly to the brush roller 41 of the front side brush roller unit 4. On the other hand, as the upper limit of the applied voltage, it is preferably -200 V, more preferably -300 V.

(Recycling Roller) The collecting roller 82 is a fourth collecting roller that collects fine foreign matter collected from the cleaning roller 80 by the brush roller 81, and is disposed substantially parallel to the brush roller 81 and abuts against the bristles 81C below the brush roller 81. Assume. In the charged state, the recovery roller 82 is rotationally driven by the power from the external drive source in a direction opposite to the reverse direction of the brush roller 81 (clockwise direction of FIG. 2). The details of the recovery roller 82 can be the same as those of the recovery roller 42 of the front side brush roller unit 4, and thus the overlapping description will be omitted.

With respect to the applied voltage to the brush roller 81, the applied voltage to the recovery roller 82 becomes the same polarity and the absolute value becomes high. The lower limit of the absolute value of the difference between the applied voltage in the recovery roller 82 and the applied voltage in the brush roller 81 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. Further, the lower limit of the applied voltage to the recovery roller 82 is preferably -1,500 V, more preferably -1,200 V. On the other hand, as the upper limit of the applied voltage, it is preferably -400 V, more preferably -600 V. By applying a voltage to the brush roller 81, the applied voltage in the recovery roller 82 becomes the same polarity and the absolute value becomes higher, and the outer peripheral surface of the recovery roller 82 is recovered as compared with the potential of the bristles 81C of the brush roller 81. Since the potentials are of the same polarity and the absolute value becomes high, the foreign matter adhering to the brush roller 81 can be adsorbed on the outer peripheral surface of the recovery roller 82. In particular, when the difference between the applied voltage of the recovery roller 82 and the brush roller 81 is within the above range, and the applied voltage to the recovery roller 82 is set to the above range, the foreign matter adhering to the brush roller 81 can be made effective. The ground is adsorbed on the outer peripheral surface of the recovery roller 82.

The rotation direction of the recovery roller 82 may be any one of the direction in which the brush roller 81 rotates in the normal direction and the direction in which the brush roller 81 rotates. It is preferable to perform the rotation direction in which the foreign matter is recovered from the outer peripheral surface by the blade 83 to be described later. drive. In the present embodiment, as shown in FIG. 2, the rotation direction of the recovery roller 82 is set to the direction in which the brush roller 81 is reversed (clockwise rotation direction in FIG. 2), and the recovery efficiency of the foreign matter by the blade 83 can be improved. . The lower limit of the magnification of the rotation speed of the recovery roller 82 with respect to the rotational speed of the brush roller 81 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Thereby, the foreign matter can be efficiently moved from the brush roller 81 to the recovery roller 82.

(Blade) The blade 83 is a fourth blade that scrapes foreign matter from the recovery roller 81. The details of the blade 83 and the blade supporting portion 83a supporting the blade 83 are the same as those of the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4 of the front side cleaning mechanism 3A.

(Transport Roller) The transport roller 85 is a transporter that guides the object S, and is disposed on the downstream side in the transport direction from the cleaning roller 800. As the transfer roller 85, the same as the counter resin roll 61 can be suitably used.

[Side-side counter roller unit] The front-side counter roller unit 9 is a transport path that defines the object S together with the brush roller 71 of the back-side brush roller unit 7 and the cleaning roller 80 of the back-side cleaning roller unit 8 The front side of the object S (above the transport path). The front side facing roller unit 9 mainly includes a housing 90, a facing metal roller 91 as a first front side facing roller, and a facing resin roller 92 as a second front side facing roller, and is detachably disposed and fixed. On the device 1. The cleaning device detachably mounts the front side opposite roller unit 9 to the apparatus body that is fixed to the base of the factory or the like. Thus, by arranging the front side opposite roller unit 9 detachably on the holder 1, the front side opposite roller unit 9 can be easily detached from the holder 1, and the brush roller of the back side brush unit 7 can be detached. The cleaning roller 80 of the 71 and the back side cleaning roller unit 8 is exposed. Therefore, the replacement or cleaning of the brush roller 71 or the cleaning roller 80 can be easily performed, so that the maintainability is excellent. Moreover, the opposing metal roll 91 and the counter resin roll 92 accommodated in the frame 90 are easier to maintain than the case where it is assembled and fixed to the holder 1.

(Frame) The frame 90 is a unit that accommodates the facing metal roll 91 and the counter resin roll 92 and can be attached to and detached from the holder 1. A pair of grip portions 90A are provided in the top plate of the casing 90 so as to be spaced apart in the horizontal direction perpendicular to the conveyance direction D. The pair of grip portions 90A are used by the front side opposite roller unit 9. The casing 90 is provided with an opening 90B in the bottom plate, and a part of the facing metal roller 91 or the counter resin roller 92 protrudes from the opening 90B. In addition, the material constituting the frame 90 is not particularly limited, and for example, a metal such as stainless steel can be suitably used.

(opposing metal roll) The facing metal roll 91 faces the brush roll 71 of the back side brush unit 7 via the object S, and is disposed directly above the brush roll 71 so as to be in contact with the object S. . The counter metal roller 91 is a rotation driver and rotates in a direction (counterclockwise rotation direction of FIG. 2) with respect to the brush roller 71 of the back side brush roller unit 7 reversed. The details of the opposing metal roller 91 are the same as those of the recovery roller 42 of the front side brush roller unit 4. However, the opposing metal roller 91 is electrically connected to the ground without being connected to an external power source, and an electric field suitable for removing foreign matter can be generated between the counter roller 71 and the brush roller 71.

Since the facing metal roller 91 is a relatively hard metal roller, the bristles 71C of the brush roller 71 of the back side brush roller unit 7 can be appropriately brought into contact with the object S, so that the object can be self-objected by the brush roller 71. The back side surface S2 of S effectively removes relatively large foreign matter.

(opposing resin roller) The counter resin roller 92 faces the cleaning roller 80 of the back side cleaning roller unit 8 via the object S, and is disposed directly above the cleaning roller 80 so as to be in contact with the object S. . The counter resin roller 92 is a rotation driver and rotates in a direction in which the cleaning roller 80 rotates forward (counterclockwise rotation direction of FIG. 2). The details of the counter resin roll 92 are the same as those of the counter resin roll 61 of the front side opposite roller unit 6. However, the opposing resin roller 92 is electrically connected to the ground without being connected to an external power source, and an electric field suitable for removing foreign matter can be generated between the cleaning roller 80 and the cleaning roller 80.

By the resin roller 92 having the elasticity toward the resin roller 92, a proper nip width can be ensured between the cleaning roller 80 and the cleaning roller 80 of the back side cleaning roller unit 8, so that the adhesion between the cleaning roller 80 and the object S can be improved. Fine foreign matter can be effectively removed from the back side surface S2 of the object S by the cleaning roller 80. Further, the height adjusting mechanism for adjusting the respective heights of the back side brush roller unit 7 and the back side cleaning roller unit 8 of the back side cleaning mechanism 3B is also the same as the front side cleaning mechanism 3A.

<Charging Circuit> As described above, it is preferable that the recovery roller 42, the recovery roller 53, the recovery roller 72, the recovery roller 82, the cleaning roller 51, the cleaning roller 80, and the outer circumferential surfaces of the brush roller 52 and the brush roller 81 are charged, and The brush roller 41 and the brush roller 71 are also charged. Further, it is preferable that the auxiliary roller 62, the opposite metal roller 60, the opposite metal roller 91, the opposite resin roller 61, and the opposite resin roller 92 are electrically connected to the ground. Known circuits can be used for the charging circuit for charging or electrically connecting the rollers to the ground (also including fixing to 0 V). When the two rollers having different potential differences are short-circuited by a long-term conductive foreign matter or the like, the charging circuit can set a current of 500 μA as a threshold value and a circuit that blocks the circuit when a current of a threshold value or more flows. Mechanism (such as fuses, etc.).

[Terminal of Terminal and Fixer] Hereinafter, an example of a unit for electrically connecting each unit to an external power source or the ground and a terminal of the fixture 1 will be described. Fig. 11 shows a unit-side terminal 110 disposed at one end or both end portions of the transport width direction of each unit. FIG. 12 shows the holder side terminal 120 disposed on the inner surface of the holder 1. Furthermore, it is preferable that all of the cleaning devices are electrically connected to an external power source by the connection structure, but some or all of the cells may be electrically connected to an external power source or the like by a conventionally known connection structure.

The unit-side terminal 110 of FIG. 11 mainly includes two unit-side metal plates 111 arranged in parallel along the axis Z parallel to the conveyance direction D, and is configured to surround each of the unit-side metal plates 111 in plan view. Two covers 112 are provided. The unit side metal plate 111 is electrically connected to a roller of each unit via a wiring (not shown). In addition, the number of the unit-side metal plates 111 included in the unit-side terminal 110 of FIG. 11 is two, but the number of the unit-side metal plates 111 can be appropriately changed in accordance with the number of rolls of each unit or the like. In addition, the shape of the cover 112 may be appropriately changed in accordance with the number of the unit side metal plates 111 and the like.

The holder-side terminals 120 of FIG. 12 respectively have a base portion 121 formed of an insulating member, and two holder-side metal plates 122 disposed on the upper surface of the base portion 121 and insertable into the unit from above. The side metal plate 111 is bendable so as to hold the inserted unit side metal plate 111 from both sides; and the surrounding portion 123 is formed of an insulating member and disposed to surround each of the holder side metal plates 122. The holder side metal plate 122 is electrically connected to an external power source or the like via a wiring or the like (not shown). The two surrounding portions 123 have a shape in which the outer surface thereof can abut against the inner surface of the cover 112 of the unit-side terminal 110. Furthermore, the number of the holder side metal plates 122 or the shape of the surrounding portion 123 of the holder side terminal 120 of FIG. 12 may correspond to the number of the unit side metal plates 111 in the unit side terminal 110 or the cover 112. It is suitable to change the shape and the like.

Each unit is mounted on the holder 1, whereby the unit side terminal 110 of FIG. 11 is electrically connected to the holder side terminal 120 of FIG. Specifically, each unit side metal plate 111 of the unit side terminal 110 is inserted into the holder side metal plate 122 of each of the holder side terminals 120, whereby the two metal plates are electrically connected, and the cover of the unit side terminal 110 is The cover 112 covers the surrounding portion 123 to fit the cover 112 and the surrounding portion 123. As described above, the cover 112 and the surrounding portion 123 serve as guides for connecting the unit side terminal 110 and the holder side terminal 120. Therefore, the two terminals can be easily connected, and the connected terminals can be firmly fixed. Therefore, by using the unit side terminal 110 and the holder side terminal 120 for the cleaning device, the units can be easily electrically connected while being mounted, thereby improving convenience and forming a firm connection structure. Therefore, even if vibration or the like occurs during operation, it is easy to keep the voltage applied to each roller constant.

[Voltage applying mechanism for the roller] In each unit, a voltage applying mechanism (including a mechanism electrically connected to the ground) is provided in the vicinity of one end of each roller, and the unit side terminal 110 and the voltage applying mechanism are provided. The connection is made by wiring. The voltage supplied from each of the external power sources and the like to each unit is supplied to each of the rollers via the unit-side terminal 110, the wiring, and the voltage application mechanism. In this case, it is preferable that the driving mechanism such as a gear for driving each roller is provided near the other end of each roller after using a member formed of an insulating material. FIG. 13 shows an example of the voltage application mechanism including a conical recess 130a provided on one end surface of the roller 130, and a frame side electrode 131 having a hemispherical tip end portion. And the front end portion abuts on the inner circumferential surface of the conical recess 130a of the roller 130; and the metal leaf spring 132 is coupled to the frame side electrode 131, and the frame side electrode 131 is directed toward the roller 130 side. Pressure. When viewed in the conveyance width direction, the central axis of the roller 130 and the apex of the conical recess substantially coincide with the center of the hemisphere of the front end portion of the frame side electrode 131. Further, the roller 130 and the frame side electrode 131 may be lubricated with a grease which is made of a conductive grease.

In the voltage application mechanism, the unit side terminal 110 and the leaf spring 132 are electrically connected to each other via a wiring (not shown), and the roller 130 is applied via the wiring, the leaf spring 132, the frame side electrode 131, and the recess 130a. Voltage. This voltage applying means abuts the frame side electrode 131 in the vicinity of the central axis of the roller 130, that is, the portion where the peripheral speed of the roller 130 is relatively small, whereby the abrasion of the roller 130 and the frame side electrode 131 can be suppressed. In addition, the hemispherical tip end portion of the frame-side electrode 131 is brought into contact with the conical recess provided in the roller 130, and the frame-side electrode 131 is pressed toward the roller 130 side by the leaf spring 132, thereby In the case where the roller 130 vibrates, it is easy to maintain electrical contact. Further, the frame-side electrode 131 is brought into contact with the end surface of the roller 130, and the frame-side electrode 131 is pressed in the transport width direction by the leaf spring 132, whereby the plate spring 132 is oscillated up and down. The bending is also suppressed, so that it is easy to apply pressure stably. Further, the inner circumferential surface of the conical recess 130a and the hemispherical end portion of the frame side electrode 131 are in contact with each other, thereby forming a space surrounded by the recess 130a and the front end portion of the frame side electrode 131. Grease is sealed into the space to inhibit its scattering. However, in order to further suppress the scattering of the grease, a cover or the like may be provided around the voltage application mechanism as needed.

However, the voltage application mechanism in each unit is not limited to the one shown in FIG. 13, and for example, a conductive sliding member such as a conductive brush or a conductive bearing is provided in the housing, and the conductive sliding member is slid. A method in which a member contacts each roller, thereby applying a voltage, or the like.

[Cleaning Method] A cleaning method for removing foreign matter from the object S using the cleaning device of Figs. 1 and 2 will be described. In the cleaning method, the brush roller 41 of the front side brush roller unit 4 is applied with a voltage having the same polarity and a high absolute value as the cleaning roller 51 of the front side cleaning roller unit 5. Further, similarly to the brush roller 71 of the back side brush roller unit 7, a voltage having the same polarity and a high absolute value as the cleaning roller 80 of the back side cleaning roller unit 8 is applied. By applying a voltage having the same polarity and a high absolute value to the brush roller 41 and the brush roller 71 as compared with the cleaning roller 51 and the cleaning roller 80, the brush roller 41 and the brush roller 71 can be used to remove a relatively large millimeter level. Foreign matter, and fine foreign matter can be removed by the cleaning roller 51 and the cleaning roller 80. Various conditions for applying voltage, rotation, and the like to the respective rollers in the cleaning method can be the same as those of the above-described cleaning device, and thus overlapping description will be omitted.

[Other Embodiments] The present invention is not limited to the above-described embodiments, and various modifications and improvements can be made in addition to the above-described embodiments. In particular, FIG. 1 and FIG. 2 are merely examples showing the cleaning device. For example, the layer structure of each roller may be different from that of FIG.

The cleaning roller of the front side cleaning roller unit and the back side cleaning roller unit may also be uncharged. In this case, as the cleaning roller, for example, an adhesive roller or a resin roller having adsorptivity may be used. Further, among the rolls of the cleaning device, the front side brush roll, the front side cleaning roll, and the pair of back side opposite rolls may be driven rollers. As described above, even if a part of the roller of the cleaning device is used as the driven roller, the driven roller abuts against another roller or the conveyed object that is rotationally driven, so that the slave can be driven to perform its function. Further, the rotation direction of the front side brush roller is preferably a direction in which the conveyance direction of the object is reversed, but may be a forward rotation direction. Further, the direction of rotation of the front side cleaning roller is preferably a direction of normal rotation with respect to the conveyance direction of the object, but may be a direction of reverse rotation.

The cleaning device includes at least one brush roller, one cleaning roller, one first counter roller that is disposed to face the brush roller, and one that is disposed opposite to the cleaning roller. The second counter roller may be used, and the other components are arbitrary. Further, the second counter roller is preferably an elastic roller, but may be a rigid roller in a range in which foreign matter is not excessively pressed against the object S.

In addition, in the embodiment of FIG. 1 and FIG. 2, the cleaning device in which the brush roller is disposed on the upstream side in the transport direction from the cleaning roller has been described. However, as shown in the cleaning device of FIG. The cleaning roller 151 is disposed on the upstream side in the transport direction from the brush roller 141. Compared with the cleaning device of the embodiment of FIGS. 1 and 2, the cleaning device of FIG. 14 is different in arrangement of the cleaning roller and the brush roller in the conveying direction D. In addition, in FIG. 14, illustration of each part except the cleaning roller 151 and the brush roll 141 is abbreviate|omitted. In the cleaning device, first, the foreign matter adhering to the surface of the object S is adsorbed by the cleaning roller 151, and then the foreign matter remaining on the surface of the object S is adsorbed and removed by the brush roller 141. Here, the cleaning roller 151 mainly adsorbs fine foreign matter, and the brush roller 141 scrapes up a relatively large foreign matter on the surface of the object S, and mainly adsorbs the scraped foreign matter. In this case, it is also preferable that the surface hardness of the first counter roller that faces the brush roller 141 is higher than the surface hardness of the second counter roller that faces the cleaning roller 151.

In addition, in the embodiment of FIG. 1 and FIG. 2, the foreign matter attached to the cleaning roller and the brush roller is separately collected by two recovery rolls, but the outer circumference of the brush roller may be provided. A configuration of one recovery roller that collects foreign matter adhering to each roller on both the surface and the outer peripheral surface of the cleaning roller. By adopting the configuration including such a recovery roller, the number of parts can be reduced, and the cost or space can be reduced.

Further, in the above embodiment, the foreign matter collecting portion may be provided in each of the back side cleaning roller unit and the back side brush roller unit, and an opening may be provided in the bottom of the back side cleaning roller unit and the back side brush roller unit.

Further, in an example of the present embodiment, a pair of opposed rollers are electrically connected to the ground, but other configurations may be employed. For example, a pair of opposed rollers can be fixed to 0 V, and can be fixed to a predetermined positive potential according to the charging state of the foreign matter. The condition to be satisfied is that a fixed potential serving as a reference is applied to the pair of opposed rollers with respect to the charged brush roller 41 and the charged cleaning roller 51. Therefore, it is also possible to apply different fixed potentials to the respective rolls of the pair of opposed rolls as needed. If the voltage difference between the fixed potential and the charged cleaning roller 51 is too small, a sufficient electric field for removing foreign matter cannot be generated. Therefore, the lower limit of the potential difference is preferably 50 V.

Further, in the case where the foreign matter is negatively charged, the brush roller 41, the brush roller 71, the cleaning roller 51, and the cleaning roller 80 are set to a positive potential, and it is of course within the scope of the present invention. In this case, the pair of opposed rolls may be electrically connected to the ground or may be applied with a fixed potential as a reference. The fixed potential may be 0 V, and may be a predetermined negative potential or positive potential depending on the charging state of the foreign matter. [Examples]

Hereinafter, the present invention will be described by way of examples, but the present invention is not limited by the following examples.

<Optimization of the brush roller (bristles)> For the purpose of selecting the material of the bristles for removing foreign matter from the viewpoint of frictional chargeability, the chargeability of the workpiece (object) and the bristles is evaluated to determine the charging sequence.

As the bristles, those having the characteristics shown in Table 1 below were used. In the following Table 1, "-" indicates that the characteristics that are not measured are not measured.

[Table 1]

As the object and the foreign matter, the object of the target market and the foreign matter which becomes a problem in this market are used. Specifically, an acrylic plate, a glass plate, a green sheet, and a polyethylene terephthalate (PET) film are used as the object, and acrylic cutting slag, copper powder, and ceramic slag (ceramics dregs) are used as foreign matters. ), glass cutting slag, polyester particles and fibers.

The frictional chargeability is evaluated by measuring the polarity of the object, the object, the bristles, or the bristles by frictional charging of the object and the bristles by a surface potentiometer. In addition, the charging relationship between the foreign matter and the object is evaluated by adding a foreign matter to the object and frictionally charging it, and then attracting the foreign matter and measuring the charge amount by a digital electrometer. The evaluation results of these are shown in Fig. 15 as a charging sequence.

In general, in the charging sequence, the bristles of the material which is positioned as far as possible from the object and the foreign matter in the opposite polarity are used, and the adsorption force of the foreign matter becomes higher. Therefore, from the results of FIG. 15, it is presumed that the material 1 and the material 4 as the conductive polyester are suitable for removing foreign matter.

Then, regarding the conductive polyester which is presumed to be most suitable for removing foreign matter, the evaluation of the removal performance of the foreign materials using the materials 1 and 4 was carried out. In this evaluation, the foreign matter of the object S is removed by using the cleaning device shown in FIG. 1 and FIG. 2, and the material of the bristles 41C of the brush roller 41 of the front side brush unit 4 is calculated as the material 1 or The foreign matter recovery rate in the foreign matter collecting unit 44 when the material 4 is used. As the object S, a green sheet to which ceramic slag is attached is used. As a result, the recovery rate of the foreign matter was 86.6% in the case of using the material 1, and 26.7% in the case of using the material 4. Therefore, as the bristles, it is preferable to use a material which is relatively large in fineness, that is, a material 1 which is a relatively coarse fiber. In addition, the reason why the recovery rate when the material 4 was used was lower than the material 1 when the material was the same as the triboelectric chargeability was estimated as follows. In other words, the reason is that the material 4 is a fiber having a relatively small fineness, that is, a relatively fine fiber. Therefore, the rigidity of the bristles 41C is insufficient, and the relatively large ceramic slag adhering to the object S cannot be moved.

<Optimization of the applied voltage to the brush roller> The optimum application voltage to the brush roller is as shown in Fig. 16(A), and the brush roller to which a predetermined voltage is applied is brought into contact with the dust adhered thereto. The object was subjected to a state in which the predetermined voltage was applied for 10 seconds. Then, as shown in FIG. 16(B), the brush roller was pulled out from the object, and the width of the strip-shaped region formed by the removal of the dust was evaluated as the adsorption width (electric field action width) of the dust.

As the bristles of the brush roll, the conductive polyester of the material 1 which obtained a suitable result in the previous evaluation was used. As the object, a PET film having a thickness of 50 μm was used. As the foreign matter, polyester particles having a particle diameter of 50 μm to 150 μm are used. The specified voltage applied to the brush roller is set to 0 V, -100 V, -400 V, -800 V, or -1,600 V. The evaluation result of the adsorption width of dust is shown in FIG.

As can be seen from Fig. 17, it was confirmed that when the applied voltage to the brush roller was -400 V, the dust adsorption width was the largest, that is, the adsorption performance was the highest. Further, according to the result shown in Fig. 17, as the lower limit of the applied voltage in the brush roller, it can be said that it is preferably -800 V, more preferably -600 V. On the other hand, as the upper limit of the applied voltage, it can be said that it is preferably -200 V, more preferably -300 V.

<Study on the circumferential speed and the amount of pressure contact of the brush> The circumferential speed of the brush roller 41 of the front side brush roller unit 4 and the amount of pressure contact in the object are changed by using the cleaning device shown in Figs. 1 and 2 . The foreign matter removal of the object is performed. Thereby, the influence of the peripheral speed of the brush roller and the amount of pressure contact of the brush roller in the object on foreign matter removal was examined.

The influence of the peripheral speed of the brush roller is changed by the ratio (B/W) of the peripheral speed B of the brush roller to the conveyance speed W of the object, and is evaluated as a relationship with the removal property of the ceramic slag. As a result, when B/W is 50% (for example, the conveying speed with respect to the object is 12 m/min and the peripheral speed of the brush roller is 6 m/min), the ceramic slag is ejected toward the inlet side of the workpiece. On the other hand, when the peripheral speed of the brush roller is changed to 3 m/min and B/W becomes 25%, the bombing is suppressed. Usually, a small foreign matter is more likely to be bombed than a large foreign matter, so it is judged that B/W is preferably 25% or less.

The influence of the amount of pressure contact of the brush roller toward the object was evaluated by removing the ceramic slag while changing the amount of pressure to 0.3 mm or 0.6 mm. As a result, when the pressure contact amount is set to 0.3 mm, a part of the ceramic slag is wiped over the brush roller and remains on the object. On the other hand, if the amount of crimping is set to 0.6 mm, the ceramic slag can be removed. Here, the larger the amount of pressure is, the more the removal property of foreign matter is increased. However, if it is too large, scratches occur due to the type or state of the object. However, the amount of crimping is limited to each object. Therefore, by adjusting the height of the brush roller unit by using the height adjusting mechanism, even when the thickness, type, state, and the like of the object are different, the amount of pressure contact of the brush roller can be optimized.

<Confirmation of Cleaning Performance> The cleaning performance of the cleaning device was evaluated. Specifically, for the combination of various foreign matter and the object, the peripheral speed and the applied voltage of each roller are set as shown in Table 2 using the cleaning device shown in FIGS. 1 and 2, and the surface of the object before and after cleaning is used. The imaging was performed to evaluate.

The specific combination of the foreign matter and the object is used as ceramic punch slag and green sheet, sebum and polarizing plate, cotton fiber and acrylic plate, polyester fiber and green sheet, or polyester particle and PET film. Further, the conveying speed of the object was set to 10 m/min. The imaging results of the respective combinations are shown in (A) to (F) of FIGS. 18 to 20 . 18 to 20 (A) to (F) are the left image before cleaning, and the right image is cleaning. The combination of (A) of Fig. 18 is that the object Sa is a green sheet, and the foreign matter Xa is a ceramic punch slag (φ4 mm, thickness: 120 μm). The combination of FIG. 18(B) is that the object Sb is a green sheet, and the foreign matter Xb is a ceramic slag of various sizes and shapes (length is 0.1 mm to 3 mm, thickness is 170 μm). In the combination of (C) of Fig. 19, the object Sc is a deflecting plate, and the foreign matter Xc is a sebum. The combination of (D) of Fig. 19 is that the object Sd is an acrylic plate, and the foreign matter Xd is a cotton fiber. The combination of (E) of Fig. 20 is that the object Se is a green sheet, and the foreign matter Xe is a polyester fiber (having a length of 2 mm to 15 mm). The combination of (F) of FIG. 20 is that the object Sf is a PET film, and the foreign matter Xf is a polyester particle (having a particle diameter of 50 μm to 150 μm).

[Table 2]

As shown in FIGS. 18 to 20, it was confirmed that any combination of the foreign matter was appropriately removed from the object. [Industrial availability]

The cleaning device of the present invention can be used for removing foreign matter such as dust adhering to the surface of a plate-shaped or film-shaped object, as long as it can remove foreign matter having a relatively large millimeter size and can remove fine foreign matter.

1‧‧‧fixer

2A‧‧‧Upstream side external transport mechanism

2B‧‧‧Downside external transport mechanism

3‧‧‧ Cleaning institutions

3A‧‧‧Side side cleaning mechanism

3B‧‧‧Back side cleaning mechanism

4‧‧‧Side side brush roller unit

5‧‧‧Side side cleaning roller unit

6‧‧‧Back side opposite roller unit

7‧‧‧Back side brush roller unit

8‧‧‧Back side cleaning roller unit

9‧‧‧Side-side counter roller unit

10‧‧‧ Plate-like members

11‧‧‧ great

12‧‧‧Axis

13, 44, 55‧ ‧ Foreign Body Recycling Department

20A, 20B‧‧‧With transport department

21A, 21B, 130‧‧‧ Roll

22A, 22B‧‧ ‧ annulus

40, 90‧‧‧ frame

40A, 44A, 50A, 55A, 90A‧‧‧ grip

40B, 50B, 90B‧‧‧ openings

41, 52, 71, 81, 141‧‧ ‧ brush roller

41A, 51A, 52A, 71A, 81A‧‧‧ mandrel

41B, 52B, 71B, 81B‧‧‧Next layer

41C, 52C, 71C, 81C‧‧‧ bristles

42, 53, 72, 82‧‧‧ recycling rolls

42A‧‧‧ Roller body

42B‧‧‧corrosion resistant layer

43, 54, 73, 83‧‧‧ blades

43a, 54a, 73a, 83a‧‧‧ blade support

45, 85‧‧‧Transport roller

45A‧‧‧ mandrel

45B‧‧‧Resin Department

50‧‧‧ frame

51, 80, 151‧‧‧ cleaning rollers

51B‧‧‧Inner Department

51C‧‧‧Outer Ministry

60, 91‧‧‧ opposite metal rolls

61, 92‧‧‧ opposite resin roller

62‧‧‧Auxiliary roller

101‧‧‧Fixed components

102‧‧‧Sliding members

103‧‧‧ top board

104, 112‧‧‧ Cover

110‧‧‧unit side terminal

111‧‧‧Unit side electrode plate

120‧‧‧Retainer side terminal

121‧‧‧Base section

122‧‧‧Retainer side electrode plate

123‧‧‧ Surrounding

130a‧‧‧ dent

131‧‧‧Frame side electrode

132‧‧‧ plate spring

D‧‧‧Transfer direction

L1, L2‧‧‧ distance

S, Sa, Sb, Sc, Sd, Se, Sf‧‧‧ objects

S1‧‧‧Side side surface

S2‧‧‧ Back side surface

Xa, Xb, Xc, Xd, Xe, Xf‧‧‧ foreign objects

Z‧‧‧ axis

Fig. 1 is a perspective view showing a cleaning device according to an embodiment of the present invention. Figure 2 is a schematic cross-sectional view of the cleaning device shown in Figure 1. Figure 3 is a schematic cross-sectional view of the brush roller of the cleaning device shown in Figure 1. Figure 4 is a schematic cross-sectional view of the recovery roller of the cleaning device shown in Figure 1. Fig. 5 is a schematic front view of a conveying roller of the cleaning device shown in Fig. 1. Fig. 6 is a schematic cross-sectional view taken along line X-X of Fig. 5; Fig. 7 is a schematic cross-sectional view showing an example of a height adjusting mechanism of a cleaning device which can be applied to an embodiment of the present invention. Fig. 8 is a schematic cross-sectional view showing a step of height adjustment using the height adjusting mechanism of Fig. 7. Fig. 9 is a schematic perspective view showing the height adjusting mechanism of Fig. 8; Figure 10 is a schematic cross-sectional view of the cleaning roller of the cleaning device shown in Figure 1. Fig. 11 is a schematic perspective view showing a unit-side terminal of a cleaning device applicable to an embodiment of the present invention. Fig. 12 is a schematic perspective view showing a holder-side terminal of a cleaning device applicable to an embodiment of the present invention. Fig. 13 is a schematic cross-sectional view showing a voltage applying mechanism applicable to a cleaning device according to an embodiment of the present invention. Figure 14 is a schematic cross-sectional view of a cleaning device different from that of Figure 1. Fig. 15 is a view showing a charging sequence of an object, a brush, and a foreign matter. Fig. 16 is a schematic view for explaining an optimum experimental method of applying voltage of a brush roller in the brush roller unit. 17 is a graph showing measurement results of an adsorption width of a foreign matter with respect to an applied voltage of a brush roller. FIG. 18 is an imaging result of the surface of the object showing the result of the confirmation of the cleaning performance. FIG. 19 is an imaging result of the surface of the object showing the result of the confirmation of the cleaning performance. FIG. 20 is an imaging result of the surface of the object showing the result of the confirmation of the cleaning performance.

Claims (8)

A cleaning device that removes foreign matter on the surface while conveying a plate-shaped or film-like object, and includes a brush roller that is substantially perpendicular to the conveyance direction and conveyed in a direction opposite to the conveyance direction. The cleaning roller is rotationally driven by a substantially parallel rotating shaft; the cleaning roller is rotationally driven by a rotating shaft substantially perpendicular to the conveying direction and substantially parallel to the conveying surface in a direction of normal rotation with respect to the conveying direction; the first counter roller, The object is disposed to face the brush roller so as to face substantially parallel to each other; and the second facing roller is disposed to face the cleaning roller in a substantially parallel manner by the object. The cleaning device according to claim 1, wherein a surface hardness of the first counter roller is higher than a surface hardness of the second counter roller. The cleaning device according to claim 2, wherein the first counter roller is a metal roller. The cleaning device according to claim 2, wherein the second counter roller is an elastic roller. The cleaning device of claim 4, wherein the elastic roller comprises: a conductive core rod; an inner layer portion covering an outer surface of the conductive core rod and having electrical conductivity; and an outer layer portion, Covering the outer surface of the inner layer portion. The cleaning device according to claim 5, wherein the outer layer portion has a hardness higher than that of the inner layer portion. The cleaning device according to claim 6, wherein the inner layer portion has a JIS-A hardness of 15° or more and 70° or less, and the outer layer portion has a JIS-A hardness of 50° or more. The cleaning device according to any one of claims 1 to 7, wherein the brush roller and the cleaning roller are charged, and the first counter roller and the second counter roller are The potential is set to a fixed potential.