KR20180123083A - Cleaning device - Google Patents

Abstract

An object of the present invention is to provide a cleaning device capable of efficiently removing both relatively large foreign matter and fine foreign matter from the surface of an object. The present invention relates to a cleaning device for removing foreign matter on a surface while conveying a plate-like or film-like object, the cleaning device being driven and rotated in the direction of reverse rotation with respect to the conveying direction by a rotation axis which is substantially perpendicular to the conveying direction, A cleaning roller which is driven to rotate in the forward rotational direction with respect to the carrying direction by a rotating shaft which is substantially perpendicular to the carrying direction and substantially parallel to the carrying face, and a cleaning roller which is substantially parallel to the brush roller And a second opposing roller disposed substantially parallel to the cleaning roller so as to face the object with the object interposed therebetween. And the surface hardness of the first opposing roller is higher than the surface hardness of the second opposing roller. The first counter roller may be a metal roller.

Description

Cleaning device

The present invention relates to a cleaning device.

BACKGROUND OF THE INVENTION [0002] In recent years, a ceramic green sheet, a resin thin plate, a film or the like for forming a glass substrate for a flat panel display (FPD), a printed substrate on which a resin substrate or an electronic component is mounted, a multilayer ceramic capacitor, There has been developed a cleaning device for removing foreign matter such as dust adhering to the surface of an object of the apparatus.

As such a cleaning device, there has been proposed a cleaning device that removes foreign matter on the surface of an object by, for example, a charging brush, and transfers and removes the removed foreign matter by a cleaning roller using the force of an electric field Japanese Unexamined Patent Application Publication No. 2011-92846).

However, in the above-described cleaning apparatus, a relatively large foreign matter of a milli-size can be removed by the charging brush, but a portion where the charging brush does not contact the surface of the object occurs, There is a possibility that it can not be sufficiently removed. In addition, it is difficult to say that the above-described cleaning apparatus has a sufficient efficiency of removing foreign matter from the surface of the object by the charging brush as described above, and that the efficiency of transportation and recovery of the foreign matter by the cleaning roller is sufficient It is hard to say. Therefore, in the cleaning apparatus, there is room for improvement in the removal efficiency of the foreign matter.

: Japanese Patent Application Laid-Open No. 11-92846

It is an object of the present invention to provide a cleaning device capable of efficiently removing both relatively large foreign matter and fine foreign matter from the surface of an object.

In order to solve the above problems, the present invention provides a cleaning apparatus for removing foreign matter on a surface while conveying a plate-like or film-like object, the cleaning apparatus comprising: A cleaning roller which is rotationally driven in a counterclockwise direction with respect to the carrying direction by a rotating shaft which is substantially perpendicular to the carrying direction and substantially parallel to the carrying face; And a second opposing roller disposed substantially parallel to the cleaning roller so as to face the object and sandwiching the object therebetween.

According to the cleaning apparatus, relatively large foreign substances can be removed from the object by the brush roller, and fine foreign substances can be efficiently removed from the object by the cleaning roller. Further, the cleaning device includes a first opposing roller opposed to the brush roller and a second opposing roller opposed to the cleaning roller, so that it is possible to remove relatively large foreign matter by the brush roller and to remove minute foreign matter by the cleaning roller more efficiently .

And the surface hardness of the first opposing roller is higher than the surface hardness of the second opposing roller. By making the surface hardness of the first opposing roller higher than that of the second opposing roller in this manner, the brush roller and the cleaning roller can be brought into contact with the object appropriately by the first opposing roller and the second opposing roller, Can be further improved.

The first counter roller may be a metal roller. Since the first opposing roller is a metal roller which is a relatively hard roller, the brush roller can be brought into contact with the object in an appropriate manner, so that relatively large foreign matter can be removed more effectively.

And the second opposing roller is an elastic roller. By using the elastic roller as the second opposing roller, it is possible to secure a suitable nip width between the second opposing roller and the cleaning roller. As a result, the adhesion between the cleaning roller and the object can be enhanced, and the removal of fine foreign matter from the surface of the object can be more effectively performed.

The elastic roller may have a conductive core, an inner layer portion that covers the outer surface of the conductive core rod and has conductivity, and an outer layer portion that covers the outer surface of the inner layer portion. Since the elastic roller has the inner layer portion and the outer layer portion in this manner, it is possible to secure the dirt prevention property and the wear resistance by the outer layer portion while securing the elasticity by the inner layer portion. As a result, since the adhesion between the elastic roller and the cleaning roller can be appropriately maintained, it is possible to appropriately remove minute foreign matter by the cleaning roller over a long period of time. Further, since the core and the inner layer have conductivity, a desired electric field can be more reliably formed between the elastic roller and the cleaning roller, and the foreign matter can be effectively removed by the cleaning roller.

And the hardness of the outer layer portion is higher than the hardness of the inner layer portion. When the hardness of the outer layer portion is higher than the hardness of the inner layer portion, the effect of improving the adhesion between the cleaning roller and the object by providing the inner layer portion and the effect of improving the contamination prevention property and wear resistance by providing the outer layer portion are more remarkably obtained .

The JIS-A hardness of the inner layer portion is preferably not less than 15 degrees and not more than 70 degrees, and the JIS-A hardness of the outer layer portion is preferably not less than 50 degrees. By setting the JIS-A hardness of the inner layer portion and the outer layer portion within the above ranges, the effect of improving the adhesion between the cleaning roller and the object by providing the inner layer portion and the effect of improving the contamination prevention property and the wear resistance by providing the outer layer portion Can be obtained more remarkably.

The brush roller and the cleaning roller are charged, and the electric potentials of the first opposing roller and the second opposing roller may be fixed potentials. By thus charging the brush roller and the cleaning roller and setting the potentials of the first opposing roller and the second opposing roller at a fixed potential, a potential difference between the brush roller and the first opposing roller and between the cleaning roller and the second opposing roller It is possible to effectively form an electric field, so that it is possible to remove both the relatively large foreign matter and the fine foreign matter more efficiently from the object.

In the description of the directions of rotation of the rollers in the present specification, it is referred to as " rotation in the forward rotation direction " in the direction of rotation of the object or the other rollers in the direction of rotation, Rotation ". The term " substantially perpendicular " means that the intersection angle with respect to the vertical line is within 10 [deg.], And may be vertical. Also, "approximately parallel" means that the acute angle of the angle formed by the two straight lines exceeds 0 ° and is within 10 ° or parallel. In the present specification, the terms "front side" and "back side" of the object are merely distinctions for convenience, and they do not always correspond to the front side and back side when the object is used.

Since the cleaning device of the present invention can remove not only a relatively large foreign matter of a millimeter size but also a minute foreign substance, it can be suitably used for removing foreign matter such as dust adhering to the surface of a plate or film shaped object.

1 is a perspective view showing a cleaning apparatus according to an embodiment of the present invention.
2 is a schematic cross-sectional view of the cleaning apparatus shown in Fig.
3 is a schematic cross-sectional view of the brush roller of the cleaning apparatus shown in Fig.
4 is a schematic cross-sectional view of the recovery roller of the cleaning apparatus shown in Fig.
5 is a schematic front view of the conveying roller of the cleaning apparatus shown in Fig.
6 is a schematic cross-sectional view taken along line XX of Fig.
7 is a schematic cross-sectional view showing an example of a height adjusting mechanism applicable to a cleaning apparatus according to an embodiment of the present invention.
8 is a schematic cross-sectional view showing one step of height adjustment using the height adjusting mechanism of Fig.
Fig. 9 is a schematic perspective view showing the height adjusting mechanism of Fig. 8. Fig.
10 is a schematic cross-sectional view of a cleaning roller of the cleaning apparatus shown in Fig.
11 is a schematic perspective view showing a unit-side terminal applicable to the cleaning apparatus according to the embodiment of the present invention.
12 is a schematic perspective view showing a holder-side terminal that can be applied to a cleaning apparatus according to an embodiment of the present invention.
13 is a schematic cross-sectional view showing a voltage applying mechanism applicable to a cleaning apparatus according to an embodiment of the present invention.
14 is a schematic cross-sectional view of a cleaning apparatus which is different from that of FIG.
Fig. 15 is a view showing a charging column of an object, a brush, and a foreign matter.
16 is a schematic diagram for explaining an experimental method of optimizing the applied voltage of the brush roller in the brush roller unit.
Fig. 17 is a graph showing the measurement results of the adsorption width of the foreign matter with respect to the applied voltage of the brush roller. Fig.
18 is a photographing result of the object surface showing the confirmation result of the cleaning performance.
Fig. 19 is a photographing result of the surface of the object showing the confirmation result of the cleaning performance.
20 is a photographing result of the surface of the object showing the confirmation result of the cleaning performance.

Hereinafter, an example of a cleaning device according to the present invention will be described in detail with reference to the drawings as appropriate. It is needless to say that specific configurations and details of the present invention can be appropriately changed within the scope of using the essence of the present invention.

<Cleaning device>

The cleaning apparatus shown in Figs. 1 and 2 transports the flat-shaped object S in the carrying direction D while removing foreign substances from the surfaces (the front surface side surface S1 and the back surface side S2) will be. The cleaning apparatus mainly includes a holder 1, an outer carrying mechanism (an upstream-side external carrying mechanism 2A and a downstream-side external carrying mechanism 2B), and a cleaning mechanism (cleaning mechanism)

[quid pro quo]

The object S is a plate-like member in Fig. 2, but it is not particularly limited as long as it is a plate-like or film-like member. Concretely, the surface of the object may be flat as shown in Fig. 2, but a recess may be present. The object may be provided with a hole or the like.

Examples of the plate-shaped object include a ceramic green sheet and a resin thin plate for forming a glass substrate or a resin substrate of FPD, a printed substrate for mounting electronic components, a multilayer ceramic capacitor, . Examples of the film-shaped object include a resin film and the like.

The average thickness of the object is not particularly limited, but the lower limit thereof is preferably 30 占 퐉, and more preferably 50 占 퐉. If the average thickness of the object is less than the above-mentioned lower limit, there is a fear that it becomes difficult to convey the object. On the other hand, the upper limit of the average thickness of the object is, for example, 5 mm.

[holder]

The holder (1) supports the cleaning mechanism (3). This holder 1 is formed by connecting a pair of opposing plate members 10 by a plurality of rods 11 and shafts 12.

[External carrier]

The external conveying mechanism is provided outside the cleaning mechanism 3 to impart a thrust for conveyance to the object S, The outer transporting mechanism includes an upstream side external transport mechanism 2A disposed on the upstream side of the cleaning mechanism 3 in the transport direction and a downstream side external transport mechanism 2B disposed on the downstream side of the cleaning mechanism 3 in the transport direction. . The conveying speed of the object S by the external conveying mechanism is not particularly limited as long as the object can be removed from the object S by the cleaning mechanism 3. [ The lower limit of the conveying speed of the object S is preferably 5 m / min, more preferably 10 m / min. On the other hand, the upper limit of the conveying speed of the object S is preferably 30 m / min, more preferably 20 m / min. If the conveying speed of the object S is less than the lower limit, the time required for removing the foreign matter becomes longer, which may lower the efficiency of removing foreign matter. On the other hand, if the conveying speed of the object S exceeds the upper limit, there is a fear that the foreign substance on the surface of the object S can not be sufficiently removed by the cleaning mechanism 3.

&Lt; Upstream External Carrier >

The upstream-side external transport mechanism 2A has a plurality of belt transport sections 20A for transporting the object S into the cleaning mechanism 3. The upstream- The belt conveying section 20A is an endless belt 22A wound around a pair of rollers 21A disposed so as to be spaced apart from each other along the conveying direction D. One of the pair of rollers 21A is a driving roller to which a rotational force is applied and the other is a driven roller that is rotated together with the endless belt 22A by the rotation of the driving roller Dynamic roller). The plurality of belt conveying sections 20A are arranged at regular intervals in a horizontal direction perpendicular to the conveying direction D (hereinafter also referred to as &quot; conveying width direction &quot;).

&Lt; Downstream External Carrier >

The downstream side external transport mechanism 2B is to transport the object S from the cleaning mechanism 3 and has a plurality of belt transport sections 20B. The belt conveying section 20B has the same configuration as the plurality of belt conveying sections 20A of the upstream side external conveying mechanism 2A. In other words, the plurality of belt conveying sections 20B are those in which the endless belt 22B is wound between a pair of rollers 21B constituted by driving rollers and driven rollers which are disposed apart from each other along the conveying direction D. The plurality of belt conveying sections 20B are also arranged at regular intervals in the conveying width direction.

[Cleaning equipment]

The cleaning mechanism 3 is a mechanism capable of cleaning both surfaces of the front surface side surface S1 and the rear surface side S2 of the object S and includes a front surface side cleaning mechanism 3A and a back surface side cleaning mechanism 3B, .

&Lt; Surface side cleaning mechanism >

The surface-side cleaning mechanism 3A is a unit for removing foreign substances on the front surface S 1 of the object S to be transported. The front side cleaning mechanism 3A has a front side brush roller unit 4, a front side cleaning roller unit 5, and a back side opposite roller unit 6. The cleaning apparatus is mounted such that the front side brush roller unit 4 and the front side cleaning roller unit 5 can be attached to and detached from the holder 1 provided on a base of a bottom surface of a factory or the like. The holder 1 may be fixed on the base by a fixing tool such as a screw or the like, but is preferably mounted on a movable base without using a fixing tool. The front side brush roller unit 4 and the front side cleaning roller unit 5 are disposed above the object S to be transported (above the transport path) and are detachably attached to the holder 1.

[Surface brush roller unit]

The front side brush roller unit 4 is a unit for removing foreign matter on the front surface side S1 of the object S by a brush roller 41 housed in the housing 40 and has a milli-size It is suitable for removal of relatively large foreign matter. A collection roller 42, a blade 43, a foreign matter collecting portion 44 and a conveying roller 45 are accommodated in the housing 40 of the front side brush roller unit 4 in addition to the brush roller 41, The whole is unitized. The front side brush roller unit 4 can be easily detached from the holder 1 by being unitized so that the front side brush roller unit 4 can be attached to and detached from the holder 1. [ As a result, when it is necessary to replace the brush roller 41 in accordance with the type of the object S or the foreign matter, it is possible to replace the brush roller 41 for each unit, so that it is possible to easily remove the foreign matter effectively. Further, by removing the front side brush roller unit 4 from the holder 1, the opposite metal roller 60, which will be described later, facing the brush roller 41 can be exposed to facilitate exchange and cleaning, Do. In addition, the brush roller 41 and the like housed in the housing 40 can be more easily maintained than the case where the brush roller 41 and the like are assembled and fixed to the holder 1.

(housing)

The housing 40 accommodates the brush roller 41 or the like so that the housing 40 can be attached to or detached from the holder 1. [ The housing 40 includes an upstream plate and a downstream plate disposed so as to be opposed to each other so as to be substantially perpendicular to the conveying surface and a pair of upper and lower plates A pair of side plates (side plates), an upper plate connected to the upper end of the upstream plate, the downstream plate and the pair of side plates, and an upper plate connected to the lower ends of the upstream plate, the downstream plate and the pair of side plates It has a bottom plate. The upper plate is provided with a pair of gripping portions (gripping portions) 40A spaced apart in the width direction. The pair of grip portions 40A are used when attaching / detaching the front side brush roller unit 4. [ An opening portion 40B is formed in the bottom plate and the front end portion of the brush bristles 41C of the brush roller 41 described later protrudes from the opening portion 40B. The material constituting the housing 40 is not particularly limited, but stainless steel and the like can be mentioned, for example.

(Brush roller)

The brush roller 41 is a surface side brush roller which abuts on the object S to be conveyed and removes foreign matter on the surface side surface S1, particularly, a relatively large foreign matter (for example, millimeter size foreign matter). The brush roller 41 is rotated in the reverse direction with respect to the carrying direction D by a rotating shaft which is substantially perpendicular to the carrying direction D and substantially parallel to the carrying face by the power from the external driving source in the charging state In the clockwise direction of Fig. The brush roller 41 may be rotationally driven in the non-charged state or rotated in the counterclockwise direction with respect to the carrying direction D, although it is preferable that the brush roller 41 is rotationally driven in the reverse rotational direction with respect to the carrying direction D in the charging state. .

3, the brush roller 41 includes a cylindrical rod 41A and a plurality of brush bristles 41C provided on the outer peripheral surface of the mandrel 41A with the adhesive layer 41B interposed therebetween ).

The mandrel 41A is formed of a material having electrical conductivity such as a metal, a carbon material, a synthetic resin composite, or the like. The upper limit of the volume resistivity of the conductive material is, for example, 10 ⁵ ? Cm. To the stem 41A, a voltage is applied by a voltage applying mechanism such as an external power source, which will be described later. The voltage applied to the mandrel 41A is set to be the same polarity and absolute value as the cleaning roller 51 of the surface-side cleaning roller unit 5 described later.

The lower limit of the voltage applied to the mandrel 41A is preferably -800V, more preferably -600V. On the other hand, the upper limit of the voltage is preferably -200V, more preferably -300V.

As the brush bristles 41C, it is preferable that the brush bristles 41C are physically easy to adhere to foreign matter, and for example, they may be synthetic resin fibers. It is preferable that the brush bristles 41C are capable of charging electric charges for adsorbing foreign substances adhered to the surface S 1 of the object S and include, for example, carbon black, carbon fiber, metal powder ), A metal whisker, or the like, may be appropriately used.

The cross-sectional shape of the brush bristles 41C is not particularly limited, and examples thereof include a round shape, an elliptical shape, a star shape, and the like. Further, the outer shape of the bristles 41C is not particularly limited. For example, the shape of the brush bristles 41C may be a linear shape, a wavy shape, or a combination of a curve and a straight line. Further, the larger the surface area of the brush bristles 41C, the more easily the foreign substances are adsorbed. Therefore, as the bristles 41C, those having different cross-sectional shapes capable of securing a large surface area, for example, star-shaped ones can be used.

The brush roller 41 is rotatively driven so as to be in the reverse rotation direction with respect to the carrying direction D of the object S so as to scrape foreign matter adhering to the surface S 1 side of the object S, ). Further, by applying a voltage to the brush roller 41 and charging it, an attraction force by the force of an electric field is exerted, so that the foreign substances on the surface S 1 of the object S can be effectively adsorbed on the brush bristles 41C. Particularly, by charging the brush roller 41, it is possible to efficiently remove foreign matter in the hole or the concave portion even when a hole or a concave portion on the surface exists in the object S. By applying a voltage in the above range to the mandrel 41A, a relatively large foreign matter can be more effectively adsorbed to the brush roller 41 from the surface S 1 of the surface S of the object S.

The brush roller 41 of the front side brush roller unit 4 is configured to have a brush bristle 41C, to rotate in the reverse rotation direction with respect to the carrying direction D, The relatively large foreign matter in the millimeter unit can be removed from the surface S 1 of the surface S of the object S by applying a voltage having a large absolute value.

The lower limit of the average pressure contact amount (average pressure contact amount) of the brush roller 41 with respect to the object S is preferably 0.3 mm, more preferably 0.5 mm. On the other hand, the upper limit of the average pressure-bonding amount is preferably 1.5 mm, more preferably 1 mm. If the average amount of press-fit is less than the lower limit, foreign matter on the surface S 1 of the surface S of the object S may not be sufficiently scratched. Conversely, if the average amount of the indentations exceeds the upper limit, the resistance between the brush bristles 41C and the surface S 1 of the surface of the object S becomes large, which may lower the conveying speed of the object S There is a possibility that the surface S 1 of the object S may be damaged. Refers to the amount of the brush bristles 41C penetrating the object S from the average length of the brush bristles 41C to the surface of the stem 41A and the surface side surface of the object S And a minimum distance from the target position S1.

The lower limit of the circumferential speed of the brush roller 41 is preferably 1 m / min, more preferably 2 m / min. On the other hand, the upper limit of the circumferential speed of the brush roller 41 is preferably 30 m / min, more preferably 15 m / min. If the circumferential speed of the brush roller 41 is less than the lower limit, there is a possibility that foreign matters on the surface S 1 of the surface S of the object S can not be sufficiently scratched. On the other hand, when the circumferential speed of the brush roller 41 exceeds the upper limit, the resistance between the brush bristles 41C and the surface S 1 of the surface of the object S becomes large, There is a fear that the surface S 1 of the object S may be damaged. The upper limit of the ratio B / W of the circumferential speed B of the brush roller 41 to the conveying speed W of the object S is preferably 25%. If the circumferential speed B of the brush roller 41 is excessively large with respect to the conveying speed W of the object S, there is a fear that it is difficult to scrape off a relatively large foreign matter by the brush roller 41. [

(Recovery roller)

The collecting roller 42 is a first collecting roller that is substantially in parallel with the brush roller 41 and contacts the brush bristles 41C to collect foreign matter adhered to the brush bristles 41C. This collection roller 42 is smaller in diameter than the brush roller 41 and is disposed on the upstream side of the brush roller 41 in the conveying direction above the brush roller 41. By arranging in this way, it is possible to reduce adverse effects such as foreign matter scraped off by the blade 43, which will be described later, reattached to the member such as the collection roller 42 or the like.

The recovery roller 42 has a roller body 42A formed of a conductive material as shown in Fig. 4, and a corrosion-resistant layer (corrosion-resistant layer) 42B laminated on the outer peripheral surface thereof. The material of the roller main body 42A is not particularly limited as long as it is a conductive material. Examples of the material of the roller main body 42A include metal materials such as stainless steel, copper and aluminum, and conductive resin materials in which a conductive material such as a conductive filler is mixed with synthetic resin Among them, a metal material is preferable. The corrosion-resistant layer 42B may be a metal plating layer formed by a plating process such as nickel plating or gold plating. It should be noted that the collecting roller 42 may be formed entirely of a conductive material such as stainless steel which is hardly oxidized and may not have the corrosion-resistant layer 42B.

The recovery roller 42 is driven to rotate in the reverse rotation direction (clockwise direction in FIG. 2) with respect to the brush roller 41 by the power from the external driving source in a state of being charged by the external power source. As described above, the rotating direction of the collection roller 42 is set to the reverse rotation direction with respect to the brush roller 41, whereby the efficiency of collection of the foreign matter can be increased. The lower limit of the magnification of the rotation speed of the collection roller 42 with respect to the rotation speed of the brush roller 41 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Accordingly, it is possible to effectively move the foreign matter from the brush roller 41 to the collection roller 42. However, the rotation direction of the collection roller 42 may be a direction in which the brush roller 41 rotates in the counterclockwise direction.

The voltage applied to the collection roller 42 is the same in polarity and absolute value with respect to the voltage applied to the brush roller 41. [ The lower limit of the absolute value of the applied voltage to the collection roller 42 and the applied voltage to the brush roller 41 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. The lower limit of the voltage applied to the collection roller 42 is preferably -1,500V, and more preferably -1,200V. On the other hand, the upper limit of the applied voltage is preferably -400V, and more preferably -600V. The potential of the outer circumferential surface of the collection roller 42 becomes equal to the voltage of the brush roller 41 of the brush roller 41 so that the voltage applied to the collection roller 42 becomes the same polarity and absolute value with respect to the voltage applied to the brush roller 41, The foreign matter adhering to the brush roller 41 can be adsorbed on the outer circumferential surface of the collection roller 42 because the polarity and the absolute value of the same polarity are higher with respect to the potential of the brush roller 41C. Particularly, by setting the difference in the applied voltage between the collection roller 42 and the brush roller 41 within the above-mentioned range and setting the voltage applied to the collection roller 42 within the above range, the foreign substances adhering to the brush roller 41 are collected It can be effectively adsorbed on the outer peripheral surface of the roller 42. [ The upper limit of the electric resistance of the collection roller 42 is preferably 10 &lt; ⁸ &gt; By setting the electric resistance of the collecting roller 42 to 10 ⁸ Ω or less, it is possible to charge effectively by applying a voltage even when the surface of the collecting roller 42 is treated or when a film is formed.

(blade)

The blade 43 is a first blade that scrapes and removes foreign matter from the collection roller 42. The blade 43 is, for example, a rectangular plate member having elasticity.

The tip of the blade 43 is a free end and the starting portion is fixed to the blade supporting portion 43a. The free end of the blade 43 is in contact with the outer circumferential surface of the collecting roller 42 in the axial direction of the collecting roller 42. It is preferable that the blade 43 is in contact with the outer circumferential surface of the collection roller 42 in an inclined state. The lower limit of the inclination angle between the blade 43 and the recovery roller 42 and the imaginary tangential line of the outer periphery of the blade 43 is preferably 5 deg. More preferable. On the other hand, the upper limit of the inclination angle is preferably 30 °, more preferably 25 °. If the angle is less than the lower limit, the foreign matter can not be scratched sufficiently by the blade 43 due to the insufficient pressure force, and the foreign matter exiting the blade 43 is reattached to the object S, There is a possibility that a re-transfer phenomenon may occur. On the other hand, when the inclination angle exceeds the upper limit, the blade 43 is caught by the rotation of the collection roller 42, and the blade 43 may be detached. Therefore, by bringing the blade 43 into contact with the collection roller 42 so that the inclination angle is within the above range, the foreign matter can be effectively scraped off the collection roller 42. The blade 43 is disposed upstream of the collection roller 42 in the conveying direction, that is, above the conveying roller 45. Accordingly, the space above the conveying roller 45 can be utilized effectively, and the surface side brush roller unit 4 can be downsized. Further, a configuration in which the foreign matter collecting section 44 described later is drawn out in the upstream direction in the transport direction can be adopted to improve the convenience.

The material of the blade 43 is not particularly limited, but a material having elasticity is preferable, and a synthetic resin is more preferable. Specifically, it may be formed by a synthetic resin such as thermosetting polyurethane in order to impart appropriate elasticity. At least the leading end of the blade 43 may be coated with fluorine by a fluorine-containing compound such as a fluorine resin in order to reduce friction with the contacted recovery roller 42. The lower limit of the average thickness of the fluorine coating is preferably 5 占 퐉. On the other hand, the upper limit of the average thickness is preferably 15 占 퐉. When the average thickness is less than the lower limit, the friction reducing effect is not sufficiently manifested, and the blade 43 may be easily caught in the rotation of the collection roller 42. On the other hand, when the average thickness exceeds the upper limit, the fluorine coating may be broken. The shape of the blade 43 is not limited to the rectangular plate shape shown in Fig. 2, and may be a shape bent or curved from the beginning to the tip.

(Foreign matter collecting section)

The foreign matter collecting section 44 is a first foreign matter collecting section for collecting and storing the foreign matter scraped off from the collecting roller 42 by the blade 43. [ The foreign matter collecting portion 44 is disposed below the tip end of the blade 43 and upstream of the brush roller 41 in the conveying direction. The foreign matter collecting portion 44 is fitted in the opening portion of the upstream plate of the housing 40 and is capable of being drawn out from the opening portion to the upstream side in the carrying direction. A gripping portion 44A is provided on the upstream side of the foreign material collecting portion 44 and the foreign material collecting portion 44 is easily carried in and out by using the gripping portion 44A. Further, since the foreign material collecting portion 44 can be drawn out to the upstream side in the carrying direction, the front side brush roller unit 4 can be taken out while being fixed to the holder 1 to recover the foreign matter, Do.

(Conveying roller)

The conveying roller 45 guides the movement of the object S brought into the cleaning mechanism 3 together with the auxiliary roller 62 of the back side opposing roller unit 6 described later. The conveying roller 45 and the auxiliary roller 62 are urged to urge the object S with urging force in order to allow the object S to enter under the brush roller 41 rotating in the reverse direction with respect to the carrying direction D And the like. The conveying roller 45 is disposed so as to face the auxiliary roller 62 of the back side opposite roller unit 6 described later. The conveying roller 45 rotates in a counterclockwise direction (counterclockwise in FIG. 2) with respect to the conveying direction D. If the force of sandwiching the object S by the auxiliary roller 62 and the conveying roller 45 is too strong, there is a possibility that the foreign matter is likely to be pressed by the object S, There is a risk that it will be taken out. In consideration of these, the conveying roller 45 is arranged so as to press the auxiliary roller 62 with a force of about 0.49N. However, the pressing force can be appropriately adjusted in consideration of the material and the thickness of the object S. When the hardness of the object S is relatively high and it is possible to enter the lower side of the brush roller 41 with only the auxiliary roller 62, it is also possible to omit the conveying roller 45 from the cleaning device.

5 and 6, the conveying roller 45 is a ring-shaped member that is stacked on the outer periphery of the core shaft 45A and the outer periphery of the core shaft 45A, And a plurality of resin portions (resin portions) 45B arranged. As shown in Figs. 5 and 6, the resin portion 45B has irregularities on the outer peripheral surface. Since the plurality of resin portions 45B having irregularities on the outer circumferential surface are disposed apart from each other in this way, the contact area between the conveying roller 45 and the surface S 1 of the object S can be reduced. As a result, clogging of the object S between the conveying roller 45 and the sub-roller 62 when the object S is carried into the cleaning mechanism 3 can be suppressed.

The shaft 45A is formed of a metal such as stainless steel, copper, or aluminum. The resin portion 45B is formed of, for example, polyurethane or the like. Examples of the polyurethane include acrylic mixed urethane and fluorine mixed urethane. Here, the term &quot; acrylic mixed urethane &quot; refers to a resin mainly composed of polyester polyurethane or polyether polyurethane, which is a mixture of (1) a mixture of thermoplastic polyurethane and silicone acrylic copolymer resin, (2) acrylic resin A graft compound obtained by grafting an aminoethyl group onto a main chain made of a methacrylic acid-methyl methacrylate copolymer) and a thermoplastic polyurethane, or (3) a mixture comprising an acrylic resin, a polyurethane and a fluorine surface coating agent . The term &quot; fluorine mixed urethane &quot; means a resin containing polyurethane as a main component, which means that a urethane / fluorine copolymer is mixed with a thermoplastic polyurethane. The &quot; main component &quot; is a component having the highest content, for example, a component contained at 50 mass% or more.

(Height adjustment mechanism)

The surface side brush roller unit 4 may be configured to be adjustable in height by a height adjusting mechanism. By adjusting the height of the front side brush roller unit 4 by means of the height adjusting mechanism as described above, the amount of the brush roller 41 to be pressed against the object S can be adjusted so that the brush roller 41 can be relatively large The foreign matter can be removed more efficiently.

7 to 9 show an example of a state in which the front side brush roller unit 4 is disposed on the plate member 10 of the holder 1 with the height adjusting mechanism of the front side brush roller unit 4 interposed therebetween (Members other than the holder 1, the height adjusting mechanism, and members other than the top plate 103 of the housing 40 of the front side brush roller unit 4 are omitted from the drawings). The height adjusting mechanism shown in Figs. 7 to 9 includes a substantially plate-like fixing member 101 fixed to the plate member 10 of the holder 1 and a fixing member 101 fixed on the upper surface of the fixing member 101, D and a cover 104 covering the fixing member 101. The slide member 102 is movable in the horizontal direction and the upward and downward directions along the guide rails D, The upper plate 103 of the front side brush roller unit 4 is supported by the slide member 102 in the longitudinal direction and moves up and down along the slide member 102. The height adjusting mechanism shown in Figs. 7 to 9 includes a gauge fixed to the plate member 10 and capable of measuring the vertical position of the slide member 102 and the like, and an adjustment mechanism for fixing the horizontal position of the slide member 102 May be further provided. Fig. 7 shows a state in which the height of the front side brush roller unit 4 is adjusted to be minimum. 8 and 9 show a state in which the height of the front side brush roller unit 4 is adjusted to the maximum.

On the upper surface of the fixing member 101, an inclined surface whose height gradually increases from the vicinity of the substantially central portion of the carrying direction D to the downstream side (the right side in Figs. 7 and 8) is formed. On the other hand, the slide member 102 has a sloped surface whose height gradually increases from a portion near the center of the carrying direction D to a downstream side. The inclined surface of the upper surface of the fixing member 101 and the inclined surface of the lower surface of the slide member 102 have the same inclination and abut against each other. Therefore, by horizontally moving the slide member 102 along the carrying direction D, the height of the slide member 102 can be moved up and down while maintaining the upper surface of the slide member 102 in a substantially horizontal plane state. The height of the upper plate 103 supported by the slide member 102 (the distances L1 and L2 between the upper surface of the upper plate 103 and the upper end of the plate member 10) is changed, The front side brush roller unit 4 can be adjusted to a desired height by changing the height of the front side brush roller unit 4.

7 to 9, the relatively large horizontal movement of the slide member 102 can be steplessly converted by the relatively fine up-and-down movement of the top plate 103, so that the height of the slide member 102 can be changed depending on the type and thickness of the object S The height of the brush roller unit 4 can be finely adjusted in a stepless manner. Since the height adjusting mechanism of Figs. 7 to 9 can be disposed near the upper end of the holder 1, the space of the holder 1 can be utilized effectively and the workability at the time of height adjustment is excellent .

However, the manner and structure of the height adjusting mechanism of the brush roller unit 4 are not limited to those shown in Figs. As another method of adjusting the height, for example, a method of disposing a spacer having a predetermined height on the fixed portion of the brush roller unit 4 of the holder 1 or forming a protrusion on the front side brush roller unit 4 And a method of arranging the rail-shaped member which is engaged with the projecting portion along the vertical direction on the holder 1 so that the height of the surface-side brush roller unit 4 can be adjusted steplessly.

[Surface-side cleaning roller unit]

The surface side cleaning roller unit 5 is a unit for removing foreign matter on the surface S 1 side of the object S by the cleaning roller 51 housed in the housing 50. A brush roller 52, a collecting roller 53, a blade 54 and a foreign matter collecting part 55 are housed in the housing 50 of the surface side cleaning roller unit 5 in addition to the cleaning roller 51, The whole is unitized. The front surface side cleaning roller unit 5 is suitable for removing minute foreign matter smaller than the millimeter size and is disposed at a position adjacent to the front side brush roller unit 4 on the downstream side in the carrying direction so as to be detachable from the holder 1 . Here, the cleaning roller 51 is set so as to apply pressure from both surfaces of the object S together with the opposite resin roller 61, which will be described later, in order to effectively move the fine foreign matter to the surface thereof. Therefore, when the surface-side cleaning roller unit 5 is disposed on the upstream side of the front-side brush roller unit 4, the cleaning roller 51 presses the relatively large foreign matter onto the object S, There is a possibility that the foreign matter can not be completely removed even by the gasket 41. Therefore, it is preferable that the front surface side cleaning roller unit 5 is disposed on the downstream side of the front surface side brush roller unit 4.

The surface-side cleaning roller unit 5 can be easily detached from the holder 1 by being unitized so that the surface-side cleaning roller unit 5 can be detached from the holder 1. As a result, when it is necessary to change the cleaning roller 51 in accordance with the type of the object S or the foreign matter, it is possible to replace the cleaning roller 51 for each unit, so that effective removal of foreign matter can be performed easily. Since the surface-side cleaning roller unit 5 is detached from the holder 1, the opposite resin roller 61, which will be described later, facing the cleaning roller 51 can be exposed to facilitate exchange and cleaning, great. In addition, the cleaning roller 51 and the like housed in the housing 50 are also housed in the housing 50 to form a unit, which facilitates maintenance compared with a case where the cleaning roller 51 is assembled and fixed to the apparatus.

(housing)

The housing 50 accommodates the cleaning roller 51 or the like so that the housing 50 can be detached and attached to the holder 1 as a unit. The housing 50 has an upstream plate, a downstream plate, a pair of side plates, an upper plate, and a bottom plate similarly to the front side brush roller unit 4. The upper plate is provided with a pair of grip portions 50A spaced apart in the conveying width direction. The pair of gripper portions 50A are used when attaching / detaching the surface-side cleaning roller unit 5. An opening 50B is formed in the bottom plate, and a part of the cleaning roller 51 protrudes from the opening 50B. The downstream plate is bent from above to below. The material constituting the housing 50 is not particularly limited, and for example, a metal such as stainless steel is suitably used.

(Cleaning roller)

The cleaning roller 51 removes foreign substances on the front surface S 1 of the object S, particularly relatively fine foreign substances (foreign matters smaller than the millimeter size, for example) (Counterclockwise direction in FIG. 2) with respect to the carrying direction D by a rotating shaft which is substantially perpendicular to the carrying direction and substantially parallel to the carrying face. 10, the cleaning roller 51 includes a core 51A, an inner layer 51B formed on the outer circumferential surface of the core 51A, an outer layer 51B covering the outer surface of the inner layer 51B, And an elastic roller 51C.

The mandrel 51A is formed into a cylindrical shape by a conductive material. Specifically, as the roller main body 42A of the collecting roller 42 of the front side brush roller unit 4, the conductive material used for the mandrel 51A may be stainless steel, Copper, aluminum, and the like.

The inner layer portion 51B secures a constant pressing force or nip width for the object S by the cleaning roller 51 and the opposing resin roller 61 described later. That is, the inner layer portion 51B secures a desired adhesion force and contact width with respect to the object S, and contributes to the efficient removal of relatively fine foreign matter from the surface side surface S1 thereof. As the material for forming the inner layer portion 51B, a resin material having elasticity and conductivity is preferable, and a resin material such as polyurethane, silicone resin, natural rubber, synthetic rubber and the like and a resin material containing carbon are more preferable . As the polyurethane, the same polyurethane as that of the resin portion 45B of the conveying roller 45 described above is appropriately used. As the material forming the inner layer portion 51B, a conductive elastomer containing a polyester-based polyurethane and carbon black is more preferable. By virtue of these materials, the elasticity of the cleaning roller 51 is sufficiently secured, and foreign substances are prevented from being excessively pressed on the object S by the cleaning roller 51, whereby deterioration of the foreign matter removal efficiency can be suppressed have. The lower limit of the JIS-A hardness of the inner layer portion 51B is preferably 15 deg. The upper limit of the JIS-A hardness is preferably 70 deg. The electrical resistance of the inner layer portion 51B is preferably 10 ⁸ Ω or less. The elasticity of the cleaning roller 51 is sufficiently ensured and the elasticity of the cleaning roller 51 is secured between the opposing resin rollers 61 of the back side opposing roller unit 6 It is possible to secure a nip width capable of effectively removing foreign substances from the exhaust gas.

The outer layer portion 51C plays a role of avoiding adverse effects due to moisture and the like while ensuring the dirt prevention property and the abrasion resistance of the cleaning roller 51 without hindering the adhesion with the object S and the application of an appropriate surface potential will be. The material of the outer layer portion 51C may be any material that can be charged so as to attract foreign substances adhering to the surface S 1 of the surface S of the object S by the force of the electric field, and for example, acrylic mixed polyurethane or fluorine And polyurethane such as a mixed polyurethane, a silicone resin, a natural rubber, a synthetic rubber and the like. Of these, polyurethane is preferable. By forming the outer layer portion 51C with polyurethane, the abrasion resistance is improved and the contamination of the cleaning roller 51 by the addition of the plasticizer and the low molecular weight compound is reduced as compared with the case of forming the outer layer portion 51C by polyurethane . The outer layer portion 51C preferably has a hardness higher than that of the inner layer portion 51B, and more specifically, it is preferable that the JIS-A hardness is 50 degrees or more. The outer layer portion 51C has a JIS-A hardness of 50 DEG or more, whereby the abrasion resistance of the cleaning roller 51 can be sufficiently secured.

The use of the acrylic mixed polyurethane as the material of the outer layer portion 51C makes it easier to remove negatively charged foreign matter from the surface S 1 side of the object S. On the other hand, by using the fluorine-mixed polyurethane as the material of the outer layer portion 51C, the cleaning roller 51 is easily negatively charged, and positively charged foreign matter can be easily removed from the object S.

If the adhesion of the outer layer portion 51C is too strong, there is a fear that the cleaning roller 51 pulls the object S in a case where the thickness of the object S is thin. It is therefore preferable that fine protrusions are formed on the surface (outer layer portion 51C) of the cleaning roller 51 in order to prevent the object S from being pulled. As a specific method of forming the fine protrusions, a method of blending particles as a raw material of the fine protrusions into a resin material such as thermoplastic polyurethane used for forming the outer layer portion 51C is preferable. The particles may be amorphous particles (amorphous particles) even if they are regular particles (regular particles), but are preferably spherical particles from the viewpoint of uniformizing the protruding shape of the fine projections. The lower limit of the average particle diameter of the spherical particles is preferably 2 탆, more preferably 2.5 탆. On the other hand, the upper limit of the average particle diameter is preferably 5 탆, more preferably 4.5 탆. The lower limit of the coefficient of variation (CV value) obtained by dividing the standard deviation (?) Of the spherical particles by the average particle diameter is preferably 3.0%, more preferably 3.5%. On the other hand, the upper limit of the coefficient of variation is preferably 5.0%, more preferably 4.5%. Here, "average particle diameter" means volume average particle diameter (Mv) determined by laser diffraction / scattering method.

The spherical particles are preferably harder than thermoplastic polyurethane. However, if the spherical particles are excessively hard, such as glass beads or ceramics beads, they may damage the object S, so that they are preferably made of a resin. Examples of the hard resin for forming the spherical particles include melamine resin and acrylic resin, and among them, melamine resin is preferable.

The lower limit of the average thickness of the outer layer portion 51C is preferably 2 占 퐉, more preferably 5 占 퐉. On the other hand, the upper limit of the average thickness of the outer layer portion 51C is preferably 500 mu m, more preferably 300 mu m. If the average thickness of the outer layer portion 51C is less than the lower limit, the surface of the cleaning roller 51 can not be sufficiently charged, and there is a possibility that the effect of adsorbing foreign matter may not be sufficiently obtained. Conversely, if the average thickness of the outer layer portion 51C exceeds the upper limit, there is a fear that good charging characteristics for adsorbing foreign matter may not be obtained.

The cleaning roller 51 is charged by application of a voltage by an external power source, and a surface potential (surface charge) is given. That is, the cleaning roller 51 contacts the surface S 1 of the object S in a state in which the surface of the object S is electrified, and the cleaning roller 51 contacts the surface S 1 of the object S Absorbs foreign matter and removes it. By charging the cleaning roller 51 in this way, even when there is a hole or a concave portion on the surface of the object S, it is possible to efficiently remove the foreign matter in the hole or the concave portion.

The applied voltage to the cleaning roller 51 is made to have the same polarity and lower absolute value with respect to the voltage applied to the brush roller 41 of the front side brush roller unit 4. [ The lower limit of the voltage to be applied to the cleaning roller 51 is, for example, -400V, preferably -200V. On the other hand, the applied voltage is, for example, less than 0 V and preferably -50 V or less. By thus making the applied voltage to the cleaning roller 51 the same polarity and lower in absolute value with respect to the voltage applied to the brush roller 41 of the front side brush roller unit 4, S from the surface-side surface S1 of the substrate. Particularly, by setting the applied voltage to the cleaning roller 51 within the above range, it is possible to efficiently remove the relatively fine foreign matter from the surface S 1 of the surface S of the object S. The upper limit of the electric resistance of the cleaning roller 51 is preferably 10 &lt; ⁸ &gt; Since the electric resistance of the cleaning roller 51 is 10 &lt; ⁸ &gt; OMEGA or less, it can be charged effectively when a voltage is applied.

It is preferable that the cleaning roller 51 is set to a height at which a proper pressure can be applied to the object S between the cleaning roller 51 and the opposing resin rollers 61 in order to increase the recovery efficiency of fine foreign matter. The pressure applied to the object S by the cleaning roller 51 and the opposite resin roller 61 may be, for example, linear pressure of 2.4 kg / 250 mm. Here, 250 mm is the axial length of the outer layer portion 51C of the cleaning roller 51 in the present embodiment. The cleaning roller 51 also serves as a function of imparting an appropriate thrust to the object S together with the opposing resin roller 61. This facilitates entry of the object S into the area below the brush roller 71 of the back side brush roller unit 7, which will be described later, rotating in the reverse rotation direction with respect to the carrying direction D.

(Brush roller)

The brush roller 52 is arranged so that the cleaning roller 51 collects foreign matter removed from the object S and is substantially parallel to and in contact with the cleaning roller 51 just above the cleaning roller 51. [ The brush roller 52 is driven to rotate in the reverse rotation direction (counterclockwise direction in FIG. 2) with respect to the cleaning roller 51 by the power from the external driving source in the charging state. The brush roller 52 includes a cylindrical stem 52A and a plurality of brush bristles 52C disposed on the outer peripheral surface of the mandrel 52A with the adhesive layer 52B interposed therebetween (see FIG. 3) And details thereof are the same as those of the mandrel 41A and the brush bristle 41C of the brush roller 41 of the front side brush roller unit 4, and thus duplicate explanations are omitted. The voltage applied to the brush roller 52 (the voltage applied to the mandrel 52A) is the same in polarity and absolute value with respect to the voltage applied to the cleaning roller 51. The lower limit of the voltage to be applied to the brush roller 52 is preferably -800 V, more preferably -600 V, similarly to the brush roller 41 of the front side brush roller unit 4. On the other hand, the upper limit of the applied voltage is preferably -200V, more preferably -300V.

(Recovery roller)

The collecting roller 53 is a second collecting roller for collecting the foreign material recovered from the cleaning roller 51 by the brush roller 52 and is disposed substantially parallel to the brush roller 52 above the brush roller 52 And is arranged to be in contact with the brush bristles 52C. The recovery roller 53 is driven to rotate in the reverse rotation direction (counterclockwise direction in FIG. 2) with respect to the brush roller 52 by the power from the external driving source in the charging state. The details of the collection roller 53 can be the same as that of the collection roller 42 of the front side brush roller unit 4 described above, and a duplicate description will be omitted.

The voltage applied to the collection roller 53 is the same in polarity and higher in absolute value with respect to the voltage applied to the brush roller 52. [ The lower limit of the absolute value of the difference between the voltage applied to the collection roller 53 and the voltage applied to the brush roller 52 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. The lower limit of the voltage applied to the collection roller 53 is preferably -1,500 V, more preferably -1,200 V. On the other hand, the upper limit of the applied voltage is preferably -400V, and more preferably -600V. The potential of the outer circumferential surface of the collecting roller 53 becomes equal to the voltage applied to the brush roller 52 so that the voltage applied to the collecting roller 53 becomes the same polarity and the absolute value with respect to the voltage applied to the brush roller 52, The foreign matter adhered to the brush roller 52 can be adsorbed to the outer circumferential surface of the collection roller 53 because the polarity of the brush roller 52 is the same as that of the brush roller 52C and the absolute value thereof is high. Particularly, by setting the difference between the voltage applied between the collection roller 53 and the brush roller 52 within the above range and setting the voltage applied to the collection roller 53 within the above range, foreign matter adhered to the brush roller 52 is collected Can be effectively adsorbed on the outer peripheral surface of the roller (53).

The collection roller 53 is disposed on the downstream side of the brush roller 52 in the conveying direction. As a result, even if the collection roller 53 has a diameter smaller than that of the brush roller 52, foreign matter can be scraped toward the downstream side in the carrying direction by the blade 53 described later, .

The direction of rotation of the collection roller 53 may be either a forward rotation direction or a reverse rotation direction with respect to the brush roller 52 and may be a rotation direction in which foreign matter may be easily recovered from the outer peripheral surface by a blade 54 described later. In this embodiment, the rotation direction of the collection roller 53 is a reverse rotation direction (counterclockwise direction in FIG. 2) with respect to the brush roller 52 as shown in FIG. 2, The recovery efficiency is increasing. The lower limit of the magnification of the rotation speed of the collection roller 53 with respect to the rotation speed of the brush roller 52 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Accordingly, foreign matter can be effectively transferred from the brush roller 52 to the collection roller 53.

(blade)

The blade 54 is a second blade for scraping off foreign matter from the collection roller 53. Details of the blade 54 and the blade supporting portion 54a supporting the blade 54 are the same as those of the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4 described above.

(Foreign matter collecting section)

The foreign matter collecting portion 55 recovers and accommodates foreign matter scraped off from the collecting roller 53 by the blade 54. [ The foreign matter collecting portion 55 is disposed below the tip of the blade 54 and downstream of the brush roller 52 in the carrying direction. The foreign substance collecting portion 55 is fitted in the opening of the downstream plate of the housing 50 and is capable of being drawn out to the downstream side in the carrying direction through the opening. A grasping portion 55A is provided on the downstream side of the foreign substance collecting portion 55. The foreign matter collecting portion 55 can be easily put in or taken out by using the grasping portion 55A. Since the foreign matter collecting unit 55 can draw out to the downstream side in the carrying direction, the surface-side cleaning roller unit 5 can be taken out while being fixed to the holder 1, Do.

(Height adjustment mechanism)

The surface side cleaning roller unit 5 may be configured to be adjustable in height by a height adjusting mechanism. By adjusting the height of the surface-side cleaning roller unit 5 by the height adjusting mechanism as described above, the pressing force (nip width) of the cleaning roller 51 with respect to the object S is adjusted. As a result, .

As a concrete example of the height adjusting mechanism of the surface side cleaning roller unit 5, for example, the same mechanism as that exemplified as the height adjusting mechanism of the front side brush roller unit 4 can be used.

As described above, since the front surface side brush roller unit 4 and the surface side cleaning roller unit 5 are both detachable, it is possible to provide a height adjusting mechanism independently for each unit. Therefore, the cleaning apparatus is capable of adjusting the conditions of the most appropriate pressing for the object S by the brush roller 41 of the front side brush roller unit 4 and the optimum pressing condition for the cleaning roller 51 of the front side cleaning roller unit 5, Even in the case where the optimum pressure condition for the object S by the pressure sensor is different.

[Back side opposite roller unit]

The back side opposite roller unit 6 is configured to specify the conveying path of the object S together with the brush roller 41 of the front side brush roller unit 4 and the cleaning roller 51 of the front side cleaning roller unit 5 And is disposed on the back side of the object S (below the conveyance path). The back side opposing roller unit 6 includes a pair of opposing rollers consisting of a counter metal roller 60 which is a first back side counter roller and a counter resin roller 61 which is a second back side counter roller, ). The back side counter roller unit 6 is preferably mounted so as to be detachable from the holder 1 from the viewpoint of maintenance.

Here, in order to precisely control the amount of the brush bristles 41C of the brush roller 41 against the object S, it is advantageous that the hardness of the first opposing roller for supporting the object S on its lower surface is high. The brush roller 41 of the brush roller 41 of the front side brush roller unit 4 is properly brought into contact with the object S so that the front surface side It is possible to effectively remove a relatively large foreign matter from the surface S1. On the other hand, the cleaning roller 51 needs to apply appropriate pressure to the object S with the second opposing roller in order to efficiently adsorb fine foreign matter on the surface thereof. However, if excessive pressure is applied, And there is a fear that the recovery may be difficult. Therefore, as the second opposing roller, for example, a roller having a high hardness such as metal is not suitable, and it is preferable that the roller is a resin roller having hardness substantially equal to that of the cleaning roller 51. [ Therefore, the opposite resin roller 61 is a resin roller (elastic roller) having elasticity, so that an appropriate pressure is applied to the object S with the cleaning roller 51 of the surface side cleaning roller unit 5 to increase the adhesion It is possible to efficiently remove minute foreign matter from the surface S 1 of the surface of the object S by the cleaning roller 51.

(Opposite metal roller)

The opposing metal roller 60 faces the brush roller 41 of the front side brush roller unit 4 with the object S sandwiched therebetween and is disposed directly below the brush roller 41 so as to come into contact with the object S Side opposite-side roller disposed on the first back side. The counter metal roller 60 is driven to rotate in the counterclockwise direction (clockwise direction in FIG. 2) with respect to the conveying direction D of the object S. That is, the opposing metal roller 60 is driven to rotate in the reverse rotation direction with respect to the brush roller 41 of the front side brush roller unit 4. The details of the opposing metal roller 60 are the same as those of the collection roller 42 of the front side brush roller unit 4. However, the opposing metal roller 60 is electrically connected to the brush roller 41 without being connected to an external power source, so that when the brush roller 41 is charged, an electric field suitable for removing foreign matter can be generated.

A urethane resin or the like may be coated on the surface of the opposed metal roller 60 to prevent scratches on the back surface S2 of the object S. It is preferable that the electrical resistance of the opposing metal roller 60 is 10 ⁸ Ω or less when the opposing metal roller 60 is surface-treated or when a film is formed. Since the electrical resistance of the opposing metal roller 60 is 10 ⁸ Ω or less, it is easy to electrically ground the opposing metal roller 60.

As described above, it is necessary for the brush roller 41 to precisely control the amount by which the brush S rubs into the object S. For this purpose, it is necessary for the first back side opposite roller opposed to the brush roller 41 to stably support the object S. Therefore, it is preferable that the first back side facing roller has a high hardness, and specifically, the opposite metal roller 60 is preferable as in the present embodiment. However, the first back side facing roller is not necessarily a metal roller, and a conductive resin roller or the like may be used.

(Opposite resin roller)

The opposite resin roller 61 faces the cleaning roller 51 of the surface side cleaning roller unit 5 with the object S interposed therebetween so as to come into contact with the object S directly below the cleaning roller 51 Respectively. This opposite resin roller 61 is driven to rotate in the forward rotational direction (clockwise direction in FIG. 2) with respect to the carrying direction D of the object S. That is, the opposing resin rollers 61 are driven to rotate in the counterclockwise direction with respect to the cleaning roller 51. The details of the opposing resin rollers 61 are substantially the same as those of the cleaning roller 51 of the surface side cleaning roller unit 5. [ However, in forming the outer layer portion of the opposite resin roller 61, titanium oxide, barium titanate or the like is preferably blended as the raw material of the fine projections used for forming the fine projections. By using titanium oxide, barium titanate or the like as the above-mentioned particles, the density of micro-projections is lowered, and the object S can be properly transported. Further, the opposing resin roller 61 is electrically connected to the cleaning roller 51 without being connected to an external power source, so that an electric field suitable for removing foreign matter can be generated between the opposing resin roller 61 and the charged cleaning roller 51.

As described above, the cleaning roller 51 is set so as to apply appropriate pressure to the object S with the opposing resin rollers 61 in order to increase the recovery efficiency of fine foreign matter. If the pressure is excessively weak, the cleaning roller 51 and the opposing resin roller 61 can sufficiently apply the driving force for inserting the object S into the brush roller 71 of the back side brush roller unit 7 If it is too strong, foreign matter may be pressed against the object S, and the object S may not be recovered. Therefore, in order to adjust the pressure, an elastic body or the like may be used to press the opposing resin roller 61 in the direction of the cleaning roller 51. [

(Auxiliary roller)

The auxiliary roller 62 guides the movement of the object S carried into the cleaning mechanism 3 by the upstream side external transport mechanism 2A together with the transport roller 45 of the front side brush roller unit 4 will be. The layer structure of the auxiliary roller 62 and the like can be the same as that of the opposing resin roller 61.

<Back Side Cleaning Mechanism>

The back side cleaning mechanism 3B removes foreign matter from the back surface S2 of the object S. The back side cleaning mechanism 3B is constructed by inverting the upper and lower sides of the front side cleaning mechanism 3A and the back side brush roller unit 7, the back side cleaning roller unit 8, Unit 9 as shown in Fig.

[Back side brush roller unit]

The back side brush roller unit 7 removes foreign matters on the back surface S2 of the object S by the brush roller 71 and is provided on the back side of the object S Side cleaning unit 3A is disposed adjacent to the downstream side in the carrying direction than the back-side facing roller unit 6 of the front side cleaning mechanism 3A. The back side brush roller unit 7 mainly includes a brush roller 71, a collection roller 72 and a blade 73. The basic configuration of the back side brush roller unit 7 is the same as that of the surface side cleaning mechanism 3A And is the same as the brush roller unit 4. However, the back side brush roller unit 7 is different from the front side brush roller unit 4 in that no member corresponding to the conveying roller 45 and the foreign matter collecting portion 44 is provided . The reason why the back side brush roller unit 7 is not provided with the member corresponding to the conveying roller 45 is that the brush roller 71 is driven to rotate in the direction opposite to the conveying direction D, Since the cleaning roller 51 and the opposing resin roller 61 disposed upstream of the roller 71 in the conveying direction apply an appropriate thrust to the object S for the entrance of the brush roller 71 downward to be. The back side brush roller unit 7 is not provided with a member corresponding to the foreign matter collecting portion 44, but the foreign matter can be discharged to the outside of the unit by opening the bottom portion thereof. The foreign matter discharged from the back side brush roller unit 7 is collected by the foreign matter collecting portion 13 provided at the lowermost portion of the holder 1 together with the foreign matter discharged from the back side cleaning roller unit 8 to be described later. The back side brush roller unit 7 is preferably mounted so as to be detachable from the holder 1 from the viewpoint of maintenance.

(Brush roller)

The brush roller 71 contacts the back surface S2 of the object S in a charged state and rotates in the counterclockwise direction of the object S in the conveying direction D Is a back side brush roller which is driven to remove a relatively large foreign material having a millimeter size on the back surface (S2) of the object (S). The brush roller 71 has a cylindrical stem 71A and a plurality of bristles 71C provided on the outer circumferential surface of the stem 71A with the adhesive layer 71B interposed therebetween (see FIG. 3) And details thereof are the same as those of the mandrel 41A and the brush bristle 41C of the brush roller 41 of the front side brush roller unit 4, and thus duplicate explanations are omitted. The voltage applied to the brush roller 71 (the voltage applied to the stem 71A) is the same polarity as the voltage applied to the cleaning roller 80 of the back side cleaning roller unit 8 . The lower limit of the applied voltage to the brush roller 71 is preferably -800 V, more preferably -600 V, similarly to the brush roller 41 of the front side brush roller unit 4. On the other hand, the upper limit of the applied voltage is preferably -200V, more preferably -300V.

The brush roller 71 is preferably rotationally driven in the direction opposite to the cleaning roller 80 in the charging state, but may be rotationally driven without being charged.

(Recovery roller)

The collection roller 72 is a third collection roller for collecting foreign matter removed from the back side surface S2 of the object S by the brush roller 71. The collection roller 72 is disposed below the brush roller 71, And is disposed in contact with the brush bristles 71C. The recovery roller 72 is driven to rotate in the reverse rotation direction (counterclockwise direction in FIG. 2) with respect to the brush roller 71 by the power from the external driving source in the charging state. The details of the collection roller 72 can be the same as that of the collection roller 42 of the front side brush roller unit 4 described above, so duplicate descriptions will be omitted.

The voltage applied to the collection roller 72 is the same in polarity with respect to the voltage applied to the brush roller 71 and the absolute value is made higher. The lower limit of the absolute value of the difference between the voltage applied to the collection roller 72 and the voltage applied to the brush roller 71 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. The lower limit of the voltage to be applied to the collection roller 72 is preferably -1,500V, more preferably -1,200V. On the other hand, the upper limit of the applied voltage is preferably -400V, and more preferably -600V. The potential of the outer circumferential surface of the collecting roller 72 becomes equal to the voltage applied to the brush roller 71 so that the voltage applied to the collecting roller 72 becomes the same polarity and the absolute value with respect to the voltage applied to the brush roller 71, The foreign matter adhered to the brush roller 71 can be adsorbed to the outer circumferential surface of the collection roller 72 because the polarity and the absolute value of the polarity of the brush roller 71 are the same. Particularly, by setting the difference between the voltage applied between the collection roller 72 and the brush roller 71 within the above range and setting the voltage applied to the collection roller 72 within the above range, foreign matter adhered to the brush roller 71 is recovered And can be effectively adsorbed on the outer peripheral surface of the roller 72. [

The rotation direction of the collection roller 72 may be any of the forward rotation direction and the reverse rotation direction with respect to the brush roller 71 and may be driven in the rotation direction in which foreign matter on the outer circumferential surface can be easily recovered by the blade 73 described later . In the present embodiment, the rotation direction of the collection roller 72 is a reverse rotation direction (counterclockwise direction in FIG. 2) with respect to the brush roller 71 as shown in FIG. 2, The recovery efficiency is increasing. The lower limit of the magnification of the rotation speed of the collection roller 72 with respect to the rotation speed of the brush roller 71 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Accordingly, the foreign matter can be effectively moved from the brush roller 71 to the collection roller 72.

(blade)

The blade 73 is a third blade for scraping off foreign matter from the collection roller 72. [ The details of the blade 73 and the blade supporting portion 73a supporting the same are the same as those of the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4 of the surface side cleaning mechanism 3A described above Do.

[Back side cleaning roller unit]

The back side cleaning roller unit 8 removes minute foreign matters on the back side surface S2 of the object S by the cleaning roller 80 and is provided on the back side of the object S Side brush roller unit 7 is disposed adjacent to the downstream side of the back side brush roller unit 7 in the transport direction. The back side cleaning roller unit 8 is mainly provided with a cleaning roller 80, a brush roller 81, a collecting roller 82, a blade 83 and a conveying roller 85, Side cleaning roller unit 5 of the surface-side cleaning mechanism 3A described in the first embodiment. It is to be noted that the back side brush roller unit 7 has a conveying roller 85 as compared with the front side brush roller unit 4 and has no member corresponding to the foreign matter collecting unit 55 And so on. The back side brush roller unit 7 is not provided with a member corresponding to the foreign matter collecting portion 55 but is capable of opening the bottom portion and discharging the foreign matter to the outside of the unit. The foreign matter discharged from the back side cleaning roller unit 8 is collected by the foreign matter collecting part 13 provided at the lowermost part of the holder 1 together with the foreign matter discharged from the back side brush roller unit 7. It is preferable that the back side cleaning roller unit 8 is mounted so as to be detachable from the holder 1 from the viewpoint of maintenance.

(Cleaning roller)

The cleaning roller 80 is disposed on the back side of the object S (below the conveyance path) as a back side cleaning roller for removing minute foreign matter on the back side surface S2 of the object S. [ The cleaning roller 80 is rotated in the counterclockwise direction (clockwise direction in FIG. 2) with respect to the carrying direction D by a rotating shaft which is substantially perpendicular to the carrying direction D and substantially parallel to the carrying face, And is rotationally driven. The details of the cleaning roller 80 can be the same as the cleaning roller 51 of the surface-side cleaning roller unit 5 described above, and therefore, a duplicate description will be omitted.

The applied voltage to the cleaning roller 80 is made to have the same polarity and lower absolute value with respect to the voltage applied to the brush roller 71 of the back side brush roller unit 7. [ The lower limit of the applied voltage to the cleaning roller 80 is, for example, -400 V, preferably -200 V. On the other hand, the applied voltage is, for example, less than 0 V and preferably -50 V or less. In this way, by applying the voltage applied to the cleaning roller 80 to the brush roller 71 of the back side brush roller unit 7 with the same polarity and with an absolute value lower than the voltage applied to the brush roller 71, S from the back surface S2 of the back surface. Particularly, by setting the voltage applied to the cleaning roller 80 within the above range, it is possible to remove the relatively fine foreign matter from the back surface S2 of the object S. Particularly, by setting the applied voltage to the cleaning roller 80 within the above range, it is possible to efficiently remove the relatively fine foreign matter from the back surface S2 of the object S.

(Brush roller)

The brush roller 81 collects fine foreign substances removed from the back side surface S2 of the object S by the cleaning roller 80 and is disposed below the cleaning roller 80 in contact with the cleaning roller 80 . The brush roller 81 rotates in the counterclockwise direction (clockwise direction in FIG. 2) with respect to the cleaning roller 80 by a rotation axis that is substantially perpendicular to the conveying direction D and substantially parallel to the conveying surface in a charged state, . The brush roller 81 is provided with a plurality of brush bristles 81C with an adhesive layer 81B sandwiched therebetween in the mandrel 81A in the same manner as the brush roller 41 of the front side brush roller unit 4 described above And details thereof are the same as those of the brush roller 41 of the front side brush roller unit 4.

The voltage applied to the brush roller 81 (the voltage applied to the mandrel 81A) is the same in polarity and higher in absolute value with respect to the voltage applied to the cleaning roller 80. [ The lower limit of the applied voltage to the specific brush roller 81 is preferably -800 V, more preferably -600 V, similarly to the brush roller 41 of the front side brush roller unit 4. On the other hand, the upper limit of the applied voltage is preferably -200V, more preferably -300V.

(Recovery roller)

The collecting roller 82 is a fourth collecting roller for collecting fine foreign substances recovered from the cleaning roller 80 by the brush roller 81. The collecting roller 82 is substantially parallel to the brush roller 81 below the brush roller 81 And is disposed in contact with the brush bristles 81C. The recovery roller 82 is rotationally driven in the reverse rotation direction (clockwise direction in FIG. 2) with respect to the brush roller 81 by the power from the external driving source in the charging state. The details of the collection roller 82 can be the same as that of the collection roller 42 of the front side brush roller unit 4 described above, so duplicate descriptions will be omitted.

The applied voltage to the collection roller 82 is the same in polarity and absolute value with respect to the voltage applied to the brush roller 81. [ The lower limit of the absolute value of the difference between the voltage applied to the collection roller 82 and the voltage applied to the brush roller 81 is preferably 200 V, more preferably 300 V. On the other hand, the upper limit of the absolute value of the difference is preferably 600 V, more preferably 500 V. The lower limit of the voltage applied to the collection roller 82 is preferably -1,500V, more preferably -1,200V. On the other hand, the upper limit of the applied voltage is preferably -400V, and more preferably -600V. The potential of the peripheral surface of the collecting roller 82 becomes equal to the voltage of the brush roller 81 of the brush roller 81 so that the voltage applied to the collecting roller 82 becomes the same in polarity and absolute value with respect to the voltage applied to the brush roller 81, The foreign matter adhering to the brush roller 81 can be adsorbed to the outer circumferential surface of the collection roller 82 because the polarity and the absolute value are the same as the potential of the brush roller 81C. Particularly, by setting the difference between the voltage applied between the collection roller 82 and the brush roller 81 within the above-mentioned range and setting the voltage applied to the collection roller 82 within the above range, the foreign substances adhering to the brush roller 81 are collected And can be effectively adsorbed on the outer peripheral surface of the roller (82).

The direction of rotation of the collection roller 82 may be either the forward rotation direction or the reverse rotation direction with respect to the brush roller 81 and may be driven in the rotation direction in which foreign matter can be easily recovered from the outer peripheral surface by a blade 83 . In this embodiment, the rotation direction of the collection roller 82 is a reverse rotation direction (clockwise direction in Fig. 2) with respect to the brush roller 81 as shown in Fig. 2, and the collection of foreign matters by the blade 83 Efficiency is increasing. The lower limit of the magnification of the rotation speed of the collection roller 82 with respect to the rotation speed of the brush roller 81 is preferably 1.0 times. On the other hand, the upper limit of the magnification of the rotation speed is preferably 1.5 times. Accordingly, it is possible to effectively move the foreign matter from the brush roller 81 to the collection roller 82.

(blade)

The blade 83 is a fourth blade for scraping off foreign matter from the collection roller 82. Details of the blade 83 and the blade supporting portion 83a supporting the same are the same as those of the blade 43 and the blade supporting portion 43a of the front side brush roller unit 4 of the surface side cleaning mechanism 3A described above Do.

(Conveying roller)

The conveying roller 85 guides the conveyance of the object S and is disposed on the downstream side of the cleaning roller 80 in the conveying direction. As the conveying roller 85, the same as the opposing resin roller 61 is suitably used.

[Surface side opposite roller unit]

The front side opposing roller unit 9 is configured to specify the conveying path of the object S together with the brush roller 71 of the back side brush roller unit 7 and the cleaning roller 80 of the back side cleaning roller unit 8 And is disposed on the surface side (above the conveying path) of the object S. The front surface side facing roller unit 9 mainly includes a housing 90, a counter metal roller 91 as a first surface side counter roller, and a counter resin roller 92 as a second surface side counter roller , And is detachably attached to the holder (1). The cleaning device is disposed so that the surface side opposite roller unit 9 can be attached to and detached from the apparatus main body which is fixed to a base of a ground such as a factory. The surface side facing roller unit 9 is detachably attached to the holder 1 so that the surface side facing roller unit 9 is easily detached from the holder 1 and the back side brush roller unit 7 is detached from the holder 1, The brush roller 71 and the cleaning roller 80 of the back side cleaning roller unit 8 can be exposed. Therefore, the brush roller 71 and the cleaning roller 80 can be easily exchanged and cleaned, and thus the maintenance property is excellent. In addition, maintenance of the opposing metal roller 91 and the opposing resin roller 92 housed in the housing 90 is facilitated as compared with the case where the opposing metal roller 91 and the opposing resin roller 92 are assembled and fixed to the holder 1.

(housing)

The housing 90 accommodates the opposing metal roller 91 and the opposing resin roller 92 so that the housing 90 can be attached to and detached from the holder 1 by uniting. The upper plate of the housing 90 is provided with a pair of grip portions 90A spaced apart in the horizontal direction perpendicular to the carrying direction D. [ The pair of grip portions 90A is used when attaching / detaching the surface side opposite roller unit 9. An opening 90B is formed in the bottom plate of the housing 90. A portion of the opposing metal roller 91 and the opposing resin roller 92 protrude from the opening 90B. The material constituting the housing 90 is not particularly limited, and for example, a metal such as stainless steel is suitably used.

(Opposite metal roller)

The opposing metal roller 91 faces the brush roller 71 of the back side brush roller unit 7 with the object S interposed therebetween so as to be in contact with the object S immediately above the brush roller 71 Respectively. The opposing metal roller 91 is rotationally driven and rotates in a reverse rotation direction (counterclockwise direction in FIG. 2) with respect to the brush roller 71 of the back side brush roller unit 7. The details of the opposing metal roller 91 are the same as the collecting roller 42 of the front side brush roller unit 4. However, the opposing metal roller 91 is electrically connected to the brush roller 71 without being connected to an external power source, so that an electric field suitable for removing foreign matter can be generated between the brush roller 71 and the counter roller.

The brush bristles 71C of the brush roller 71 of the back side brush roller unit 7 can be properly brought into contact with the object S because the opposing metal roller 91 is a relatively hard metal roller, It is possible to effectively remove a relatively large foreign matter from the back side surface S2 of the object S by the roller 71. [

(Opposite resin roller)

The opposing resin roller 92 faces the cleaning roller 80 of the back surface side cleaning roller unit 8 with the object S interposed therebetween and is disposed directly above the cleaning roller 80 so as to be in contact with the object S Respectively. This opposite resin roller 92 is rotationally driven and rotates in a counterclockwise direction (counterclockwise direction in FIG. 2) with respect to the cleaning roller 80. The details of the opposing resin rollers 92 are the same as those of the opposing resin rollers 61 of the surface side opposite roller unit 6. However, the opposing resin roller 92 is electrically connected to the cleaning roller 80 without being connected to the external power source, so that an electric field suitable for removing foreign matter can be generated between the opposing resin roller 92 and the cleaning roller 80.

Since the opposing resin roller 92 is a resin roller having elasticity, a proper nip width can be ensured between the cleaning roller 80 and the cleaning roller 80 of the back side cleaning roller unit 8, It is possible to effectively remove fine foreign matter from the back side surface S2 of the object S by the cleaning roller 80. [ The back side brush roller unit 7 and the back side cleaning roller unit 8 of the back side cleaning mechanism 3B are each provided with a height adjusting mechanism for adjusting the height of each of the back side brush roller unit 7 and the back side cleaning roller unit 8, .

<Charging Circuit>

The outer circumferential surfaces of the collection rollers 42, 53, 72 and 82, the cleaning rollers 51 and 80 and the brush rollers 52 and 81 are charged and the brush rollers 41 and 71 are charged . It is also preferable that the auxiliary roller 62, the opposing metal rollers 60 and 91, and the opposing resin rollers 61 and 92 are electrically grounded. As a charging circuit for charging or electrically grounding these rollers (including fixing them at 0 V), a known circuit can be used. This charging circuit is a countermeasure for safety when two rollers having different potentials are short-circuited through elongated conductive foreign matter or the like. For example, a current of 500 μA is set as a threshold value, and when a current exceeding a threshold value flows, (For example, a fuse or the like).

[Terminals of Unit and Holder]

Hereinafter, an example of a unit used for electrically connecting each unit with an external power source or ground, etc., and a terminal of the holder 1 will be described. Fig. 11 shows unit-side terminals 110 disposed at one or both ends in the conveying width direction of each unit. Fig. 12 shows a holder-side terminal 120 disposed on the inner surface of the holder 1. Fig. In the cleaning device, it is preferable that the whole unit is electrically connected to an external power supply or the like by this connection structure, but some or all units may be electrically connected to an external power supply or the like by a conventionally known connection structure.

The unit side terminal 110 of Fig. 11 includes two unit side metal plates 111 arranged in parallel along the axis Z parallel to the carrying direction D and two unit side metal plates 111 111, respectively, as shown in Fig. The unit-side metal plate 111 is electrically connected to the rollers of each unit through the wirings (not shown). The number of unit-side metal plates 111 included in the unit-side terminal 110 in Fig. 11 is two, but the number of unit-side metal plates 111 can be appropriately changed according to the number of rollers of each unit. Further, the shape of the cover 112 can be appropriately changed in accordance with the number of unit-side metal plates 111 and the like.

The holder-side terminal 120 of Fig. 12 includes a toe 121 formed by an insulating member, and a metal plate 111 disposed on the top surface of the toe 121, Side metal plates 122 that can be inserted from above and folded so that the inserted unit-side metal plates 111 can be gripped from both sides, and a pair of holder-side metal plates 122 And a surrounding portion 123 which is disposed so as to surround the outer circumferential surface. The holder-side metal plate 122 is electrically connected to an external power supply or the like through wiring or the like not shown in the figure. The two upper portions 123 are in such a shape that the outer surface thereof can contact the inner surface of the cover 112 of the unit side terminal 110. The number of the holder-side metal plates 122 of the holder-side terminal 120 of FIG. 12 and the shape of the upper portion 123 are the same as the number of the unit-side metal plates 111 in the unit- 112 and the like.

By attaching each unit to the holder 1, the unit side terminal 110 of Fig. 11 is electrically connected to the holder side terminal 120 of Fig. Specifically, the unit-side metal plates 111 of the unit-side terminals 110 are inserted into the holder-side metal plates 122 of the respective holder-side terminals 120, whereby both metal plates are electrically connected and the unit-side terminals 110 The cover 112 is covered with the upper portion 123 so that the cover 112 and the upper portion 123 are engaged. As described above, since the cover 112 and the upper portion 123 serve as guides for connecting the unit-side terminal 110 and the holder-side terminal 120, it is possible to easily connect both terminals, The terminal can be firmly fixed. Therefore, by using the unit side terminal 110 and the holder side terminal 120 described above in the cleaning apparatus, it is possible to easily connect the units simultaneously and electrically, so that convenience can be improved, Further, since a strong connection structure can be formed, it is easy to keep the voltage applied to each roller constant even if vibration or the like occurs during operation.

[Voltage applying mechanism for roller]

In each unit, a voltage applying mechanism (including a mechanism for electrically grounding) is provided near one end of each roller, and between the unit side terminal 110 and the voltage applying mechanism described above is connected to the wiring Respectively. The voltage supplied to each unit from an external power supply or the like is supplied to each roller through the above-described unit side terminal 110, the wiring, and the voltage applying mechanism described above. In this case, a driving mechanism such as a gear for driving each roller may be provided near the other end of each roller after using a member formed of an insulating material. 13 shows a cone-shaped concave portion 130a formed on one end surface of the roller 130 and a concave portion 130a having a hemispherical tip portion and having a conical concave portion 130a of the roller 130, A metal plate spring 131 connected to the housing side electrode 131 and for pressurizing the housing side electrode 131 toward the roller 130 side, the housing side electrode 131 being in contact with the inner peripheral surface of the housing 130a, (132). The centers of the central axis and conical recesses of the roller 130 and the centers of the hemispheres of the front end portion of the housing side electrode 131 substantially coincide when viewed in the conveying width direction. The gap between the roller 130 and the housing-side electrode 131 may be lubricated by a conductive grease.

In this voltage applying mechanism, the unit side terminal 110 and the leaf spring 132 are electrically connected by a wiring not shown in the drawing, and the wiring, the leaf spring 132, the housing side electrode 131, A voltage is applied to the roller 130 through the portion 130a. This voltage applying mechanism is a mechanism for applying voltage to the roller 130 and the housing side electrode 131 by contacting the housing side electrode 131 to a portion near the central axis of the roller 130, ) Can be suppressed. The hemispherical tip of the housing-side electrode 131 is brought into contact with the conical recess formed in the roller 130 and the housing-side electrode 131 is pressed to the roller 130 side by the leaf spring 132 , It is easy to maintain the electrical contact even when the roller 130 vibrates. The housing side electrode 131 is brought into contact with the end face of the roller 130 and the housing side electrode 131 is pressed in the carrying width direction by the leaf spring 132 so that even if the roller 130 vibrates up and down, The bending of the bellows portion 132 is suppressed, so that it is easy to reliably pressurize. Further, since the inner circumferential surface of the conical concave portion 130a and the hemispherical tip portion of the housing-side electrode 131 are brought into contact with each other, a space surrounded by the end portions of the concave portion 130a and the housing-side electrode 131 is formed , And grease can be enclosed in this space to suppress scattering of grease. However, a cover or the like may be provided around the voltage applying mechanism as necessary in order to further suppress scattering of grease.

However, the voltage applying mechanism in each unit is not limited to the one shown in Fig. 13 described above. For example, a conductive sliding member such as a conductive brush or a conductive bearing may be provided in the housing, And a method of applying a voltage by bringing the voltage into contact.

[How to clean]

A cleaning method for removing foreign matter from the object S using the cleaning apparatuses of Figs. 1 and 2 will be described. In this cleaning method, a voltage having the same polarity and a high absolute value as the cleaning roller 51 of the surface side cleaning roller unit 5 is applied to the brush roller 41 of the front side brush roller unit 4. The brush roller 71 of the back side brush roller unit 7 likewise applies a voltage having the same polarity and a high absolute value as the cleaning roller 80 of the back side cleaning roller unit 8. By applying a voltage having the same polarity and a high absolute value as those of the cleaning rollers 51 and 80 to the brush rollers 41 and 71 as described above, the brush rollers 41 and 71 remove relatively large foreign matter having a millimeter level Fine foreign matters can be removed by the cleaning rollers 51 and 80. In addition, Various conditions such as applied voltage and rotation to the rollers in this cleaning method can be the same as those of the above-described cleaning apparatus, and thus duplicated description will be omitted.

[Other Embodiments]

The present invention is not limited to the above-described embodiment, but can be carried out by various modifications and improvements other than those described above. 1 and 2 show only one example of the cleaning apparatus, and the layer structure of each roller may be different from that of FIG. 2, for example.

The cleaning roller of the front side cleaning roller unit and the back side cleaning roller unit may not be charged. In this case, as the cleaning roller, for example, an adhesive roller or a resin roller having adsorptivity can be used. Further, among the rollers of the cleaning apparatus, the rollers other than the front side brush roller, the front side cleaning roller and the pair of back side opposite rollers may be driven rollers. Even if a part of the roller of the cleaning device is used as a driven roller in this manner, the driven roller is in contact with other rollers or transported articles which are driven to rotate, and can function and exhibit its function. The rotation direction of the front side brush roller is preferably a reverse rotation direction with respect to the conveying direction of the object, but may be a forward rotation direction. The rotational direction of the surface-side cleaning roller is preferably a forward rotation direction with respect to the conveyance direction of the object, but may be a reverse rotation direction.

The cleaning apparatus may be provided with at least one brush roller, a cleaning roller, a first counter roller arranged to face the brush roller, and a second counter roller arranged to face the cleaning roller, The configuration is arbitrary. The second opposing roller is preferably an elastic roller, but may be a hard roller within a range in which the foreign matter is not excessively pressed against the object S.

In the embodiments of Figs. 1 and 2, the cleaning device has a configuration in which the brush roller is disposed on the upstream side of the cleaning roller in the transport direction. However, as in the cleaning device of Fig. 14, ) On the upstream side in the transport direction. The cleaning apparatus shown in Fig. 14 is different from the cleaning apparatus according to the embodiment shown in Figs. 1 and 2 in the arrangement of the cleaning roller and the brush roller in the carrying direction (D). In Fig. 14, parts other than the cleaning roller 151 and the brush roller 141 are not shown in the figure. In this cleaning apparatus, the foreign substances adhering to the surface of the object S are first adsorbed by the cleaning roller 151, and then foreign substances remaining on the surface of the object S are adsorbed and removed by the brush roller 141. Here, the cleaning roller 151 mainly adsorbs fine foreign matter, and the brush roller 141 scrapes a relatively large foreign matter on the surface of the object S, and mainly adsorbs the scraped foreign matter. Also in this case, it is preferable that the surface hardness (surface hardness) of the first opposing roller facing the brush roller 141 is higher than the surface hardness of the second opposing roller facing the cleaning roller 151.

1 and 2, foreign matter attached to the cleaning roller and the brush roller are separately collected by the two recovery rollers. However, the cleaning roller and the brush roller may be separated from each other by the outer peripheral surface of the brush roller and the outer peripheral surface of the cleaning roller, And a single collection roller for collecting and collecting the foreign substances adhered to the respective rollers. By adopting such a configuration that the collection roller is provided, the number of parts can be reduced, and cost and space can be saved.

Further, in the above embodiment, foreign matter collecting units may be provided on the back side cleaning roller unit and the back side brush roller unit, respectively, instead of forming the openings in the bottoms of the back side cleaning roller unit and the back side brush roller unit .

In the example of this embodiment, all of the pair of opposing rollers are electrically grounded, but other configurations may be employed. For example, the pair of opposing rollers may be fixed at 0 V, or may be fixed at a predetermined positive potential depending on the charging condition of the foreign matter. As a condition to be satisfied, a fixed potential serving as a reference for the charged brush roller 41 and the charged cleaning roller 51 is applied to the pair of opposing rollers. Therefore, different fixed potentials may be applied to each of the pair of opposing rollers, if necessary. If the voltage difference between the fixed potential and the charged cleaning roller 51 is too small, it is not possible to generate a sufficient electric field for the removal of foreign substances. Therefore, the lower limit of this potential difference is preferably 50V.

It is needless to say that it is also within the scope of the present invention to set the brush rollers 41 and 71 and the cleaning rollers 51 and 80 to the positive potential in the case where foreign matters are negatively charged. In this case also, the pair of opposing rollers may be electrically grounded, or a fixed potential as a reference may be applied. The fixed potential may be 0V, and it may be a predetermined negative potential or a positive potential depending on the charging condition of the foreign matter.

(Example)

Hereinafter, the present invention will be described by way of examples, but the present invention is not limited by the following examples.

<Optimization of Brush Roller (brush bristle)>

From the viewpoint of triboelectric chargeability, a charging current was determined by evaluating the electrification property of a work (object) and a brush for the purpose of selecting a brush-like material suitable for removing foreign matter.

As the bristles, materials having the characteristics shown in the following Table 1 were used. In the following Table 1, &quot; - &quot; indicates that the corresponding property is not measured.

As objects and foreign substances, objects of the target market and foreign matter which is a problem in the market were used. Specifically, an acrylic plate, a glass plate, a green sheet and a PET film were used as objects, and acrylic cutting residue, copper powder, ceramics residue, glass cutting residue, polyester particles and fibers were used as foreign substances.

The triboelectric chargeability of the object and the bristles was evaluated by measuring the polarity of each of the objects, between the objects, between the object and the bristles, or between the bristles by friction electrification, with a surface electrometer. Also, the charging relationship between the foreign matter and the object was evaluated by frictionally charging the foreign matter with the object sandwiched therebetween, drawing the foreign matter, and measuring the charge amount by a digital electrometer. These evaluation results are shown in Fig. 15 as a charging column.

Generally, in the charging heat, the attraction force of the foreign matter increases as the number of bristles using a material which can be positioned in a place which is opposite to the object and foreign matter and is as far as possible. Therefore, it can be considered from the result of Fig. 15 that the materials 1 and 4, which are conductive polyesters, are suitable for removing foreign matter.

Next, regarding the conductive polyester which can be regarded as most suitable for the removal of foreign matters, the removal performance of the foreign matters using the materials 1 and 4 was evaluated. In this evaluation, the foreign material of the object S is removed by using the cleaning apparatus shown in Figs. 1 and 2, and the material of the brush bristles 41C of the brush roller 41 of the front side brush roller unit 4 The foreign matter recovery rate with respect to the foreign substance collection unit 44 when the material 1 or the material 4 was used was calculated. As the object S, a green sheet to which a ceramic residue was attached was used. As a result, the recovery rate of the foreign matter was 86.6% when the material 1 was used, and 26.7% when the material 4 was used. Therefore, it is judged that a material 1 having relatively large fineness, that is, relatively thick fiber, is preferable as a bristles. The reason why the recovery rate when the material 4 is used is lower than the recovery rate when the material 1 having the same triboelectrification property is used is thought to be as follows. That is, it can be considered that the material 4 is a fiber having a relatively small fineness, that is, a relatively thin fiber, and therefore, the rigidity of the brush bristles 41C is insufficient, and the relatively large ceramic scraps adhered to the object S can not be moved .

<Optimization of Applied Voltage to Brush Roller>

The optimization of the applied voltage to the brush roller is carried out by bringing a brush roller, to which a predetermined voltage is applied, into contact with an object to which the garbage is applied as shown in Fig. 16 (A) Respectively. Next, as shown in Fig. 16 (B), the brush roller was separated from the object, and the width of the band-shaped region formed by removing the trash was evaluated as the adsorption width (electric field action width) of the trash.

As the brush model of the brush roller, a conductive polyester of material 1 was used which was obtained a suitable result in the first evaluation. As the object, a PET film having a thickness of 50 탆 was used. As foreign matters, polyester particles having a particle size of 50 mu m to 150 mu m were used. The predetermined voltage to be applied to the brush roller was 0V, -100V, -400V, -800V, or -1,600V. The results of the evaluation of the adsorption width of the garbage are shown in Fig.

As can be seen from Fig. 17, when the applied voltage to the brush roller was -400 V, it was confirmed that the waste adsorption width was the largest, that is, the adsorption ability was high. From the results shown in Fig. 17, it can be said that the lower limit of the voltage applied to the brush roller is preferably -800V, and more preferably -600V. On the other hand, the upper limit of the applied voltage is preferably -200V, and more preferably -300V.

&Lt; Examination of circumferential speed and amount of brush of brush &

The cleaning apparatus shown in Figs. 1 and 2 was used to remove foreign matters from the object while varying the circumferential speed of the brush roller 41 of the front side brush roller unit 4 and the amount of pressure applied to the object. The influence of the circumferential speed of the brush roller and the amount of the brush roller against the object on the removal of foreign matter was examined.

The ratio B / W of the circumferential speed B of the brush roller to the conveying speed W of the object was affected by the circumferential speed of the brush roller, and evaluated as a relation between the removal performance of the ceramic debris. As a result, when the B / W was 50% (for example, at a circumferential speed of the brush roller of 6 m / min with respect to the conveying speed of the object of 12 m / min), the ceramic residue was repelled to the entrance side of the work and flew. On the other hand, when the circumferential speed of the brush roller was changed to 3 m / min to set the B / W to 25%, the above-described repulsive flying was suppressed. In general, since foreign matter smaller than a large foreign matter is repelled and is likely to fly, it is judged that B / W is preferably 25% or less.

The influence of the amount of pressure of the brush roller on the object was evaluated by removing the ceramic residue while varying the amount of pressure applied to 0.3 mm or 0.6 mm. As a result, when the amount of indentation was 0.3 mm, a part of the ceramics residue left the brush roller and remained on the object. On the other hand, when the amount of pressure applied was set to 0.6 mm, the ceramic residue could be removed. Here, the larger the amount of pressure applied is, the better the removability of the foreign matter. However, if it is excessively large, scratches may occur depending on the kind and condition of the object. However, the upper limit of the amount of pressure-applied is different for each object. Therefore, by adjusting the height of the brush roller unit by using the height adjusting mechanism, even when the thickness, type, state, and the like of the object are different, the amount of the brush roller can be optimized.

<Confirmation of cleaning performance>

The cleaning performance of the cleaning device was evaluated. Specifically, the cleaning apparatus shown in Figs. 1 and 2 is used for various combinations of foreign substances and objects, and the circumferential speed and the applied voltage of each roller are measured as shown in Table 2, and the surface of the object before and after cleaning is photographed .

The combination of the specific foreign matter and the object is made of ceramic punch residue and green sheet, sebum and polarizer, cotton fiber and acrylic plate, polyester fiber and green sheet, or polyester particle and PET film. The conveying speed of the object was set at 10 m / min. Photographing results of the respective combinations are shown in Figs. 18 to 20 (A) to (F). 18 to 20 (A) to (F) show photographs taken before the cleaning on the left side and after the cleaning on the right side, respectively. 18A, the object Sa is a green sheet, and the foreign matter Xa is a ceramic punch residue (? 4 mm, thickness 120 占 퐉). The combination of FIG. 18 (B) is a green sheet of the object Sb and a ceramic residue (length 0.1 to 3 mm, thickness 170 占 퐉) of foreign matter Xb of various sizes and shapes. In the combination of FIG. 19C, the object Sc is a deflecting plate, and the foreign matter Xc is sebum. In the combination of FIG. 19D, the object Sd is an acrylic plate and the foreign matter Xd is a cotton fiber. 20 (E), the object Se is a green sheet and the foreign matter Xe is a polyester fiber (length 2 to 15 mm). 20F is a combination of the object Sf as the PET film and the foreign matter Xf as the polyester particle (particle diameter 50 to 150 mu m).

As shown in Figs. 18 to 20, it was confirmed that foreign matter was appropriately removed from the object even for all the combinations.

Since the cleaning apparatus of the present invention can remove fine foreign substances as well as relatively large foreign substances of millimeter size, it can be suitably used for removing foreign matter such as dust adhering to the surface of a plate-like or film-like object.

1: Holder
2A: Upstream side external transport mechanism
2B: downstream side external transport mechanism
3: Cleaning apparatus
4: Front side brush roller unit
41, 141: Brush roller
42: Collection roller
43: the blade
45: conveying roller
5: Surface side cleaning roller unit
51, 151: Cleaning roller
51A: mandrel
51B:
51C: outer layer portion
52: Brush roller
53: Collection roller
54: blade
6: reverse side reverse roller unit
60: Opposed metal roller
61: Opposed resin roller
62: Auxiliary roller
7: back side brush roller unit
71: Brush roller
72: Collection roller
73: Blade
8: reverse side cleaning roller unit
80: Cleaning roller
81: Brush roller
81A: mandrel
81B:
81C: Brush Mo
82: Collection roller
83: The blade
9: Surface side opposite roller unit
91: Opposed metal roller
92: Opposed resin roller
101: Fixing member
102: slide member
103: Top plate
104: cover
110: Unit side terminal
111: Unit side electrode plate
112: cover
120: Terminal on the holder side
121:
122: holder side electrode plate
123: upper lumbar
130: roller
130a:
131: Housing side electrode
132: leaf spring
S: Object
S1: surface side surface
S2: back side surface
D: conveying direction

Claims (8)

1. A cleaning device for removing foreign matter on a surface while conveying a plate-like or film-like object,
A brush roller rotatably driven in a reverse rotation direction with respect to the carrying direction by a rotating shaft which is substantially perpendicular to the carrying direction and substantially parallel to the carrying face,
A cleaning roller which is rotationally driven in a forward rotational direction with respect to the carrying direction by a rotating shaft which is substantially perpendicular to the carrying direction and approximately parallel to the carrying surface,
A first counter roller (first counter roller) disposed substantially parallel to the brush roller so as to face the object,
And a second opposing roller disposed substantially parallel to the cleaning roller so as to oppose the object therebetween
And the cleaning device.
The method according to claim 1,
(Surface hardness) of the first opposing roller is higher than the surface hardness of the second opposing roller.
3. The method of claim 2,
Wherein the first opposing roller is a metal roller.
The method according to claim 2 or 3,
And the second opposing roller is an elastic roller.
5. The method of claim 4,
Wherein the elastic roller comprises an electrically conductive core (conductive core), an inner layer portion covering the outer surface of the conductive core rod and having conductivity, and an outer layer portion covering the outer surface of the inner layer portion, .
6. The method of claim 5,
And the hardness of the outer layer portion is higher than the hardness of the inner layer portion.
The method according to claim 6,
Wherein the inner layer portion has a JIS-A hardness of 15 ° or more and 70 ° or less,
Wherein the outer layer portion has a JIS-A hardness of at least 50
Cleaning device.
8. The method according to any one of claims 1 to 7,
Wherein the brush roller and the cleaning roller are charged and the potentials of the first opposing roller and the second opposing roller are fixed potentials.

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