CN108717935A - Semiconductor packaging device - Google Patents

Semiconductor packaging device Download PDF

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Publication number
CN108717935A
CN108717935A CN201810511315.0A CN201810511315A CN108717935A CN 108717935 A CN108717935 A CN 108717935A CN 201810511315 A CN201810511315 A CN 201810511315A CN 108717935 A CN108717935 A CN 108717935A
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CN
China
Prior art keywords
conveyer belt
semiconductor
entrance
workpiece
guide
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Granted
Application number
CN201810511315.0A
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Chinese (zh)
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CN108717935B (en
Inventor
王加骇
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Jiangsu AISI Semiconductor Technology Co.,Ltd.
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王加骇
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Priority to CN201810511315.0A priority Critical patent/CN108717935B/en
Publication of CN108717935A publication Critical patent/CN108717935A/en
Application granted granted Critical
Publication of CN108717935B publication Critical patent/CN108717935B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Abstract

The present invention relates to technical field of semiconductors.Semiconductor packaging device, including rack components and semiconductor feeding equipment, semiconductor positioning device, conveying robot unit and automatic packing apparatus thereon;Semiconductor positioning device is mutually connected with semiconductor feeding equipment, and automatic packing apparatus is mutually connected with semiconductor positioning device.The advantages of semiconductor packaging device is the encapsulation that can be automatically finished the feeding of semiconductor element device, material cup and heat-sealing film, and complete semiconductor element device, high in machining efficiency.

Description

Semiconductor packaging device
Technical field
The present invention relates to the production equipments of technical field of semiconductors, especially semiconductor components and devices.
Background technology
It is necessary to which semiconductor components and devices is right in insulation material cup by being put into after semiconductor components and devices production and detection completion It is sealed afterwards with heat-sealing film.Existing packaged type is as follows:It is moved by manipulator, semiconductor components and devices is put into position one by one and is consolidated In the feeding chamber of fixed insulation material cup, material cup is regularly arranged multiple, and the insulate feeding chamber of material cup of a row piles semiconductor element After device, insulation material cup is moved to below hot pressing film device, hot pressing film closes feeding chamber, completes the envelope of semiconductor components and devices Dress.Deficiency existing for existing semiconductor components and devices sealed in unit is that processing efficiency is low.
Invention content
The object of the present invention is to provide a kind of full-automatic semiconductor packaging devices high in machining efficiency.
To achieve the goals above, the technical solution used in the present invention is:Semiconductor packaging device, including rack components And semiconductor feeding equipment, semiconductor positioning device, conveying robot unit and automatic packing apparatus thereon;Semiconductor positions Device is mutually connected with semiconductor feeding equipment, and automatic packing apparatus is mutually connected with semiconductor positioning device;
Semiconductor feeding equipment includes mounting bracket, first motor, gear set and endless apron mechanism and guide wheel tension assembly;Peace It shelves including two pieces of installation risers and connecting rod, two pieces of installation risers are fixed by the connecting rod connection;Gear set includes that engagement connects The first gear and second gear connect;Installation riser is fixed in rack components, and first motor is defeated by gear set connection cycle Tape-feed;Endless apron mechanism and guide wheel tension assembly are mounted on mounting bracket, and guide wheel tension assembly connects circulation conveying Band mechanism;Endless apron mechanism includes the first drive roll, the second drive roll, first conveyer belt, the second conveyer belt, blanking Slope, side shield, end baffle, end fixed block, entrance shrink slanted bar, entrance positioning strip and material folding channel parts;First actively Roller and the second drive roll are mounted on by bearing in installation riser;
Material folding channel parts are in the top of second conveyer belt one end, and end baffle is in the top of the second conveyer belt other end, falls Expect that the top of slope first conveyer belt one end, end baffle are in the top of the first conveyer belt other end, blanking slope is in folder The lower section of hopper component;First gear connects the first drive roll, and second gear connects the second drive roll;First conveyer belt twines It is wound on the first drive roll, the second conveyer belt is wrapped on the second drive roll, the fortune of first conveyer belt and the second conveyer belt Dynamic direction is opposite;
Blanking slope is mounted between two pieces of installation risers, and blanking slope is located above the second conveyer belt, and blanking slope is for holding Connect the workpiece fallen from first conveyer belt;Side shield is fixed in installation riser, the position of side shield and the second conveying Band matching, side shield is for the workpiece on regular second conveyer belt;End baffle is fixed at two pieces by end fixed block Between installation riser, end baffle is located above first conveyer belt and the second conveyer belt, and end baffle will be in first conveyer belt Workpiece shelves enter in the second conveyer belt;
Entrance shrinks slanted bar and entrance positioning strip is respectively at the both sides of the second conveyer belt, and entrance shrinks slanted bar and is located at the first conveying Band top, entrance shrink slanted bar one end and are mounted in material folding channel parts, and entrance shrinks the slanted bar other end towards end baffle, passes through Inclined entrance shrinks the workpiece direction on the second conveyer belt between slanted bar adjustment entrance contraction slanted bar and entrance positioning strip;Enter There are blanking ports, blanking port to be in the surface on blanking slope between mouth positioning strip and material folding channel parts;Second at blanking port Higher than the first conveyer belt position at blanking slope, the second conveyer belt position at end baffle, which is less than, to be leaned on for conveyer belt position First conveyer belt position at close end baffle.
Preferably, material folding channel parts include left fixed plate, right fixed plate, left guide pad, right guide pad, the first infrared biography Sensor, cylinder guide rod, left spring, right spring, left adjusting screw and right adjusting screw;Left fixed plate and right fixed plate are installed respectively In one piece of installation riser;Left guide pad is connected with right guide pad by cylinder guide rod, is set between left guide pad and right guide pad There are feed zone and charge region, feed zone to pass through for workpiece, charge region is parked for workpiece, the first infrared sensor Position corresponds to charge region, and the first infrared sensor is for confirming whether charge region has workpiece;Left fixed plate passes through left adjusting Screw connects left guide pad, is arranged with left spring on the cylinder guide rod between left fixed plate and left guide pad, right fixed plate passes through Right adjusting screw connects right guide pad, is arranged with right spring on the cylinder guide rod between right fixed plate and right guide pad, passes through rotation The adjusting screw that turns left and right adjusting screw adjust the position between left guide pad and right guide pad, that is, pass through left adjusting screw and the right side Adjusting screw adjusts the size of feed zone.
Preferably, the end baffle above the second conveyer belt is equipped with and is inclined from first conveyer belt to the second belt direction Oblique folded plate, folded plate enter the workpiece shelves in first conveyer belt in the second conveyer belt.
Preferably, guide wheel tension assembly connection tensioning guide wheel, tensioning guide wheel is two, and two tensioning guide wheels are separately connected First conveyer belt and the second conveyer belt, guide wheel tension assembly are tensioned guide wheel to be tensioned the in endless apron mechanism by adjusting One conveyer belt and the second conveyer belt.
The semiconductor packaging device of above-mentioned technical proposal is used, semiconductor feeding equipment is for realizing semiconductor to be packaged Feeding function, semiconductor positioning device is for positioning semiconductor to be packaged, and conveying robot unit is for semiconductor charging dress Set, between semiconductor positioning device and automatic packing apparatus semiconductor workpiece carrying, automatic packing apparatus is for material cup The heat-sealing of material, the feeding of heat-sealing film and heat-sealing film and material cup.The advantages of semiconductor packaging device is can be automatically finished The feeding of semiconductor element device, material cup and heat-sealing film, and the encapsulation of semiconductor element device is completed, it is high in machining efficiency.
Description of the drawings
Fig. 1 is the configuration schematic diagram of the embodiment of the present invention.
Fig. 2 is the configuration schematic diagram of the semiconductor feeding equipment of the embodiment of the present invention.
Fig. 3 is the configuration schematic diagram of the endless apron mechanism of the embodiment of the present invention.
Fig. 4 is the semiconductor schematic diagram to be packaged of the embodiment of the present invention.
Fig. 5 is the configuration schematic diagram of the material folding channel parts of the embodiment of the present invention.
Fig. 6 is the configuration schematic diagram of the semiconductor positioning device of the embodiment of the present invention.
Fig. 7 is the configuration schematic diagram of the conveying robot unit of the embodiment of the present invention.
Fig. 8 is the first of the embodiment of the present invention configuration schematic diagram for pipetting manipulator.
Fig. 9 is the second of the embodiment of the present invention configuration schematic diagram for pipetting manipulator.
Figure 10 is the configuration schematic diagram of the automatic packing apparatus of the embodiment of the present invention.
Figure 11 is the configuration schematic diagram of the material cup feeding receiving mechanism of the embodiment of the present invention.
Figure 12 is the configuration schematic diagram of the heat-sealing film feed mechanism of the embodiment of the present invention.
Figure 13 is the configuration schematic diagram of the semiconductor feeding port component of the embodiment of the present invention.
Figure 14 is the configuration schematic diagram of the flanging component of the embodiment of the present invention.
Figure 15 is the structural schematic diagram of the material cup Zou Liao mechanisms of the embodiment of the present invention.
Figure 16 is the configuration schematic diagram of the press mold guide rail of the embodiment of the present invention.
Specific implementation mode
The present invention is described further with embodiment with reference to the accompanying drawings of the specification.
The semiconductor packaging device as shown in Fig. 1-Figure 16, including rack components 1 and semiconductor feeding equipment 2 thereon, Semiconductor positioning device 3, conveying robot unit 4 and automatic packing apparatus 5;Semiconductor feeding equipment 2 is fixed at rack On component 1, semiconductor feeding equipment 2 for realizing semiconductor to be packaged feeding function.Semiconductor positioning device 3 and semiconductor 2 phase of feeding equipment is connected, and semiconductor positioning device 3 improves the accuracy of gripping for positioning semiconductor to be packaged.Handling machinery Arm device 4 is removed for semiconductor workpiece between semiconductor feeding equipment 2, semiconductor positioning device 3 and automatic packing apparatus 5 Fortune.Automatic packing apparatus 5 is connected with 3 phase of semiconductor positioning device, and automatic packing apparatus 5 is for the feeding of material cup, heat-sealing film The heat-sealing of feeding and heat-sealing film and material cup.
As shown in Fig. 2, Fig. 3, Fig. 4 and Fig. 5, semiconductor feeding equipment 2 include mounting bracket, first motor 22, gear set and Endless apron mechanism 25 and guide wheel tension assembly 26;Mounting bracket 21 include two pieces of installation risers 211 and connecting rod 212, two pieces Installation riser 211 is fixedly connected by connecting rod 212;Gear set includes the first gear 23 and second gear 24 of engagement connection; Installation riser 211 is fixed in rack components 1, and first motor 22 is fixed at by motor mounting rack on mounting bracket, and first Motor 22 connects endless apron mechanism 25 by gear set;Endless apron mechanism 25 and guide wheel tension assembly 26 are mounted on peace It shelves on 21, guide wheel tension assembly 26 connects endless apron mechanism 25;Endless apron mechanism 25 includes the first drive roll 251, the second drive roll 252, first conveyer belt 253, the second conveyer belt 254, tensioning guide wheel 255, blanking slope 256, side block Plate 257, end baffle 258, end fixed block 259, entrance shrink slanted bar 2510, entrance positioning strip 2512 and material folding channel parts 2511;First drive roll 251 and the second drive roll 252 are mounted on by bearing in installation riser 211.
Material folding channel parts 2511 are in the top of 254 one end of the second conveyer belt, and end baffle 258 is in the second conveyer belt The top of 254 other ends, the top of 256 first conveyer belt of blanking slope, 253 one end, end baffle 258 are in first conveyer belt The top of 253 other ends, blanking slope 256 are in the lower section of material folding channel parts 2511;The connection of first gear 23 first is actively rolled Cylinder 251, second gear 24 connect the second drive roll 252, and first gear 23 and second gear 24 form external toothing, and transmission ratio is 1:1 so that the first drive roll 251 and 252 constant speed of the second drive roll rotate backward;First conveyer belt 253 is wrapped in first On drive roll 251, the second conveyer belt 254 is wrapped on the second drive roll 252, first conveyer belt 253 and the second conveyer belt 254 direction of motion is on the contrary, the direction of motion of first conveyer belt 253 is to illustrate c to the direction of motion of the second conveyer belt 254 is Illustrate b to.
Blanking slope 256 is mounted between two pieces of installation risers 211, and blanking slope 256 is located on the second conveyer belt 254 Side, blanking slope 256 is for accepting the workpiece fallen from first conveyer belt 253;Side shield 257 is fixed at installation riser On 211, the position of side shield 257 is matched with the second conveyer belt 254, and side shield 257 is for the work on regular second conveyer belt 254 Part;Between end baffle 258 is fixed at two pieces of installation risers 211 by end fixed block 259, end baffle 258 is located at First conveyer belt 253 and the top of the second conveyer belt 254, it is defeated that the workpiece shelves in first conveyer belt 253 are entered second by end baffle 258 It send in band 254.
The end baffle 258 of the top of second conveyer belt 254 is equipped with from first conveyer belt 253 to 254 side of the second conveyer belt To inclined folded plate, folded plate enters the workpiece shelves in first conveyer belt 253 in second conveyer belt 254, and the second conveyer belt 254 is in b To when movement, the workpiece on the second conveyer belt 254 is fallen on after reaching end baffle 258 in first conveyer belt 253.
Entrance shrinks slanted bar 2510 and entrance positioning strip 2512 is respectively at the both sides of the second conveyer belt 254, and entrance is shunk Slanted bar 2510 is located at 253 top of first conveyer belt, and entrance shrinks 2510 one end of slanted bar and is mounted in material folding channel parts 2511, entrance 2510 other end of slanted bar is shunk towards end baffle 258, and slanted bar 2510 is shunk by inclined entrance and adjusts entrance contraction slanted bar The workpiece direction on the second conveyer belt 254 between 2510 and entrance positioning strip 2512, and prevent workpiece is premature from falling into first On conveyer belt 253;There are blanking ports, blanking port to be in blanking slope between entrance positioning strip 2512 and material folding channel parts 2511 256 surface;
Close end is leaned in 254 position of the second conveyer belt at blanking port higher than 253 position of first conveyer belt at blanking slope 256 254 position of the second conveyer belt at baffle 258 is less than 253 position of first conveyer belt at end baffle 258.
The connection tensioning guide wheel 255 of guide wheel tension assembly 26, tensioning guide wheel 255 is two, and two tensioning guide wheels 255 connect respectively First conveyer belt 253 and the second conveyer belt 254 are connect, it is defeated that guide wheel tension assembly 26 is tensioned cycle by adjusting tensioning guide wheel 255 First conveyer belt 253 on tape-feed 25 and the second conveyer belt 254.
Material folding channel parts 2511 include left fixed plate 25111, right fixed plate 25110, left guide pad 25112, right guide pad 25117, the first infrared sensor 25113, cylinder guide rod 25114, left spring 25115, right spring 25119, left adjusting screw 25116 and right adjusting screw 25118;Left fixed plate 25111 and right fixed plate 25110 are separately mounted to one piece of installation riser 211 On;Left guide pad 25112 is connected with right guide pad 25117 by cylinder guide rod 25114, left guide pad 25112 and right guide pad It being equipped with feed zone between 25117 and charge region, feed zone pass through for workpiece, charge region is parked for workpiece, the One infrared sensor, 25113 position corresponds to charge region, and the first infrared sensor 25113 is for confirming whether charge region has work Part, convenient for gripping workpiece so as to conveying robot unit 4;Left fixed plate 25111 connects left guide by left adjusting screw 25116 Block 25112 is arranged with left spring 25115 on the cylinder guide rod 25114 between left fixed plate 25111 and left guide pad 25112, right Fixed plate 25110 connects right guide pad 25117, right fixed plate 25110 and right guide pad 25117 by right adjusting screw 25118 Between cylinder guide rod 25114 on be arranged with right spring 25119, pass through and rotate left adjusting screw 25116 and right adjusting screw Position between the left guide pad 25112 of 25118 adjustment and right guide pad 25117, that is, pass through left adjusting screw 25116 and right adjusting Screw 25118 adjusts the size of feed zone, to adapt to various sizes of workpiece.
Semiconductor a shapes to be packaged are as shown in Figure 4.Semiconductor feeding equipment 2 is in use, the driving warp of first motor 22 After external gear pump transmission, first conveyer belt 253 and the second conveyer belt 254 is driven reversely to move at the uniform velocity, in first conveyer belt 253 Workpiece c to moving to left, pass through the posture that entrance shrinks slanted bar 2510 and entrance positioning strip 2512 adjusts workpiece, the work of vertical posture Part a enters in material folding channel parts 2511 just, and the inappropriate workpiece of posture is shunk the constraint of slanted bar 2510 from entrance by entrance It is fallen at blanking port between positioning strip 2512 and material folding channel parts 2511, workpiece falls into blanking slope 256, subsequently into second Conveyer belt 254, workpiece moves right along b, until being fallen on the second conveyer belt 254 after contact end baffle 258 so that workpiece is following 25 shuttling movement of endless conveying belt mechanism, the workpiece of some vertical states, which enters, waits for gripping in material folding channel parts 2511, improper Workpiece continues cycling through, until entering material folding channel parts 2511;Endless apron mechanism 25 drives semiconductor for recycling, and will partly lead Body is transported to suitable position and gripping is waited for carry.
As shown in fig. 6, semiconductor positioning device 3 includes fixing bracket 31, the second motor 32, shaft mounting base 33, positioning Shaft 34, positioning rotor 35, limit card slot 36, positioning plate 37, positioning side plate 38, locating piece 30 and the second infrared sensor 39;Fixing bracket 31 is fixed in rack components 1, and shaft mounting base 33 is arranged on fixing bracket 31, and locating piece 30 is pacified In shaft mounting base 33, the second motor 32 is mounted on by motor mount in shaft mounting base 33;Positioning rotating shaft 34 is pacified In shaft mounting base 33, positioning rotor 35 is arranged on positioning rotating shaft 34, and 34 left end of positioning rotating shaft connects the second motor 32 Output shaft, 34 right end of positioning rotating shaft are fixedly connected with limit card slot 36, and positioning rotating shaft 34 is in 37 lower section of positioning plate;Limiting card Arc groove e is provided on slot 36, arc groove e is matched with 33 right end pillar f of shaft mounting base so that 36 rotation amplitude of limit card slot It is restricted, to control the corner of positioning rotor 35;Positioning plate 37 is arranged in shaft mounting base 33, and positioning side plate 38 is pacified On positioning plate 37,38 one end of positioning side plate is against on locating piece 30, and positioning side plate 38 is two pieces of left and right, two pieces of oriented sides Plate 38 is mounted on by adjusting screw on positioning plate 37, and material passing passage, two pieces of oriented sides are formed between two blocks of positioning side plates 38 Feeding chamber is formed between plate 38 and locating piece 30, material passing passage is connected to feeding chamber, and two blocks of positioning side plates are adjusted by adjusting screw The size of material passing passage between 38, to adapt to various sizes of workpiece;Second infrared sensor 39 is mounted on locating piece 30, the Two infrared sensors, 39 position corresponds to feeding chamber, and the second infrared sensor 39 is for confirming in feeding chamber whether there is workpiece;Shaft Position and the matched through-hole of material passing passage are respectively equipped in mounting base 33 and positioning plate 37,35 position of positioning rotor corresponds to punishment in advance Channel, positioning rotor 35 are used for the piece-holder in feeding chamber at it between locating piece 30.
Semiconductor positioning device 3 in use, conveying robot unit 4 by workpiece handling to two pieces positioning side plates 38 between In feeding chamber, the second motor 32 is driven to rotate after being detected by the second infrared sensor 39, to drive positioning rotor 35 to rotate, Positioning rotor 35 passes through the through-hole in shaft mounting base 33 and positioning plate 37 that workpiece a is clamped in positioning rotor 35 and locating piece Between 30,
Realize workpiece positioning.The amplitude that positioning rotor 35 rotates is controlled by limit card slot 36, after 36 turns of limit card slot is motionless, instead It is resetted to rotation.
As shown in Figure 7, Figure 8 and Figure 9, conveying robot unit 4 includes first movement component 41, traversing mounting plate 42, limit Bit detector 43, first pipette manipulator 44, second pipette manipulator 45, gantry fixed frame 46 and traversing slide 47;First moves Dynamic 41 level of component is fixedly mounted on gantry fixed frame 46, and gantry fixed frame 46 is fixed in rack components 1, and first moves Dynamic component 41 is located at 5 top of semiconductor feeding equipment 2, semiconductor positioning device 3 and automatic packing apparatus.
Third motor 48 drives traversing slide 47 to be moved on first movement component 41, and traversing mounting plate 42 is arranged traversing On slide 47, limit detector 43, second pipette manipulator 45 and first and pipette manipulator 44 on traversing mounting plate 42, Limit detector 43 is used to control the second distance for pipetting the decline of manipulator 45;First, which pipettes manipulator 44, is used for workpiece from partly Conductor feeding equipment 2 is transported in semiconductor positioning device 3, and second pipettes manipulator 45 fills for positioning workpiece from semiconductor 3 are set to be transported in automatic packing apparatus 5.
Conveying robot unit 4 is in use, first movement component 41 is driven by third motor 48, through feed screw nut's auxiliary driving After drive traversing slide 47 to move horizontally, displacement distance can be controlled by limit sensors;Manipulator 44 is pipetted by work by first Part is transported to from semiconductor feeding equipment 2 in semiconductor positioning device 3, and manipulator 45 is pipetted by workpiece from semiconductor by second Positioning device 3 is transported in automatic packing apparatus 5.
First, which pipettes manipulator 44, includes the first cylinder 441, the first cylinder fixed seat 442, the first linear guide rail assembly 443, the second cylinder mounting base 444, contact switch 445, the second cylinder 446 and movable chuck 447;The fixation of first cylinder 441 is set It sets in the first cylinder fixed seat 442, the first cylinder fixed seat 442 is fixed in the first cylinder fixed seat 442, the second gas Cylinder mounting base 444 is mounted on by the first linear guide rail assembly 443 in the first cylinder fixed seat 442;Contact switch 445 is mounted on In second cylinder mounting base 444, contact switch 445 is used to control the minimum allowable distance of the second cylinder mounting base 444 decline;Second gas 446 fixing end of cylinder is vertically arranged in the second cylinder mounting base 444, and two movable chucks 447 are fixed at the second cylinder 446 Lower end.
First pipettes manipulator 44 in use, the second cylinder 446 control movable chuck 447 moves, to realize clamping work Workpiece is transported to semiconductor positioning dress by part by the first cylinder 441 and 48 collective effect of third motor from semiconductor feeding equipment 2 It sets in 3.
Second pipette manipulator 45 include the 4th motor 451, vertical shaft bearing 452, leading screw 453, feed screw nut seat 454, Second linear guide rail assembly 455, third cylinder 456 and pneumatic chuck 457;4th motor 451 is arranged on traversing mounting plate 42, 456 output shaft of third cylinder is connect with leading screw 453 by shaft coupling;453 upper end of leading screw is mounted in vertical shaft bearing 452, silk 453 lower end of thick stick is mounted in traversing mounting plate 42;Feed screw nut seat 454 is fitted to by screw pair in leading screw 453; Second linear guide rail assembly 455 includes sliding rail and slide, and the two forms prismatic pair connection, and sliding rail is fixed at traversing mounting plate In 42, slide is fixedly connected with 454 phase of feed screw nut seat;Third cylinder 456 is fixed on feed screw nut seat 454, third Collet 458 is arranged in the output axis connection pneumatic chuck 457 of cylinder 456,457 bottom end of pneumatic chuck;
Second pipettes manipulator 45 in use, by screw nut driven, and feed screw nut seat 454 is driven to move up and down, it is mobile away from It is controlled from the limit detector 43 by being arranged on traversing mounting plate 42;Pneumatic chuck is controlled by 456 inflation/deflation of third cylinder The folding of 457 upper grips 458, realization pick and place workpiece, are lifted after workpiece is clamped in the decline of pneumatic chuck 457, by third electricity The workpiece clamped is transported to from semiconductor positioning device 3 in automatic packing apparatus 5 by 451 collective effect of machine 48 and the 4th motor.
As shown in Figure 10, Figure 11, Figure 12, Figure 13, Figure 14, Figure 15 and Figure 16, automatic packing apparatus 5 includes packaging rack 51, material cup feeding receiving mechanism 52, heat-sealing film feed mechanism 53, semiconductor feeding port component 54, flanging component 55, material cup guide rod 56, material cup Zou Liao mechanisms 57 and press mold guide rail 58;Packaging rack 51 is fixed in rack components 1, material cup feeding collecting machine The setting of structure 52 is in packaging rack 51;The setting of heat-sealing film feed mechanism 53 is in packaging rack 51, heat-sealing film feed mechanism 53 Above press mold guide rail 58, heat-sealing film feed mechanism 53 for realizing heat-sealing film feeding;Semiconductor feeding port component 54 and pressure Component 55 position in side corresponds to the material cup in press mold guide rail 58, and conveying robot unit 4 is placed at material mouth component 54 on the semiconductor Workpiece to be packaged, workpiece slide from feeding port component 54 to falling into material cup;Flanging component 55 is used to heat-sealing film being pressed on material On cup;Material cup guide rod 56 is fixed in packaging rack 51, and material cup guide rod 56 is located at 58 lower section of press mold guide rail, material cup guide rod 56 Position corresponds to material cup, and material cup guide rod 56 is for keeping material cup horizontal;Material cup Zou Liao mechanisms 57 are mounted on 58 lower section of press mold guide rail, material Bei Zouliao mechanisms 57 are used to material cup realizing step-by-step movement feed motion;Along direction of feed feeding port component 54, the heat-sealing film of material cup Feed mechanism 53, flanging component 55 are arranged in order;
Automatic packing apparatus 5 is in use, material cup feeding receiving mechanism 52 and material cup Zou Liao mechanisms 57 realize the feeding of material cup, by heat Sealer feed mechanism 53 realizes the feeding of heat-sealing film, and material cup and heat-sealing film realize synchro-feed, workpiece material mouth group on the semiconductor It is put into material cup at part 54, each material cup places a semiconductor, by realizing heat sealed package after flanging component 55, after packaging Workpiece is completed to collect in left end material cup feeding receiving mechanism 52;
Press mold guide rail 58 includes that the first pressure rail 581 and second presses rail 582, the first pressure rail 581 and second that rail 582 is pressed to be mounted on packaging In rack 51, there are the material cup channels that supply cup passes through between the first pressure pressure rail 582 of rail 581 and second;
First pressure rail 581 includes that rail and first is pressed to push rail on first, and the second pressure rail 582 includes pressure rail and the second pushing on second Rail, the inner end of pressure rail and the second pushing rail is equipped with inwardly projecting flanging 583 on second, and material cup be in below flanging 583, from The heat-sealing film g exported on heat-sealing film feed mechanism 53 is pressed in the material cup between two pieces of flanging.
Material cup feeding receiving mechanism 52 includes the 5th motor 520, loading plate 521, loading plate pillar 522, rewinding disk pillar 523, the first rotation seat 524, the second rotation seat 525, the first idler wheel 526, the second idler wheel 527, third idler wheel 528, rubber strip 529 With rewinding disk 5210;Loading plate 521 is mounted in the shaft 5211 of loading plate pillar 522, and loading plate pillar 522 is fixed at On the one end for packing rack 51;Rewinding disk pillar 523 is fixed on the other end of packaging rack 51, the first rotation seat 524 It is separately positioned on 523 both sides of rewinding disk pillar with the second rotation seat 525;5th motor 520 exports the first idler wheel of axis connection 526, In packaging rack 51, the second idler wheel 527 is mounted on the first rotation seat 524 setting of 5th motor 520, and third idler wheel 528 is pacified On the second rotation seat 525;It is realized by rubber strip 529 between first idler wheel 526, the second idler wheel 527 and third idler wheel 528 Synchronous Transmission;Rewinding disk 5210 is arranged on the central shaft of the second rotation seat 525;Heat-sealing film feed mechanism 53, semiconductor feeding Mouth component 54, flanging component 55, material cup guide rod 56, material cup Zou Liao mechanisms 57 and press mold guide rail 58 are in loading plate 521 and rewinding Between disk 5210;
52 left end portions of material cup feeding receiving mechanism, that is, rewinding disk 5210 workpiece good for collecting packing, material cup feeding collecting machine Right end portion, that is, loading plate 521 of structure 52 is for sending out material cup to be packaged.Material cup feeding receiving mechanism 52 is in use, loading plate It is sky material cup in 521, is packaged material cup in rewinding disk 5210, is driven by the 5th motor 520, the transmission through rubber strip 529, Rewinding disk 5210 is driven to rotate so that rows of material cup movement.
Heat-sealing film feed mechanism 53 includes hold-down support 531, heat-sealing film material tray 532, fixed seat 533, compresses adjusting screw 534, guide roller 535, swing idler wheel 536 and adjusting block 537;Hold-down support 531 and the setting of fixed seat 533 are in packaging rack 51 On, heat-sealing film material tray 532 is mounted on 531 upper end of hold-down support;Adjusting block 537 is turned with fixed seat 533 by guide roller 535 Axis forms revolute pair connection, swings idler wheel 536 and is mounted on adjusting block 537;Adjusting screw 534 is compressed to be mounted on by screw pair In fixed seat 533, compresses 534 lower end of adjusting screw and contacted with adjusting block 537;Guide roller 535 and swing idler wheel 536 are located at pressure 58 top of film guide rail;
Heat-sealing film feed mechanism 53 by rotation in use, compress adjusting screw 534 so that adjusting block 537 is to the bottom, to change Become the angle for swinging idler wheel 536, and heat-sealing film g is wrapped in guide roller 535 and swings on idler wheel 536 so that heat-sealing film g is compressed In material cup upper limb, heat-sealing film and the frictional force that material cup generates and drive heat-sealing film g feedings.
Semiconductor feeding port component 54 includes blanking track 541 and blanking guiding block 542;The setting of blanking track 541 is being wrapped Install frame 51 on, blanking track 541 be equipped with the matched horizontal concrete chute 5411 of workpiece shapes and blanking sliding slot 5412, blanking is led Draw block 542 to be connected on the outlet end of blanking track 541, blanking guiding block 542 is equipped with and the matched guiding of workpiece shapes Sliding slot, and guiding chute position is matched with blanking sliding slot 5412, workpiece is by blanking sliding slot and blanking guiding block 542 from blanking rail It is slid into the accommodating chamber of material cup in the horizontal concrete chute in road 541.
Semiconductor feeding port component 54 in use, workpiece by blanking sliding slot and blanking guiding block 542 from blanking track 541 Horizontal concrete chute in slide into material cup accommodating chamber in, wait for heat-sealing be packaged;
Flanging component 55 includes flanging fixed seat 551, flanging frame 552 and flanging idler wheel 553;Flanging fixed seat 551 is fixedly installed In packaging rack 51, flanging frame 552 forms revolute pair with flanging fixed seat 551 by axis pin and connect, and 552 upper end of flanging frame is logical Screw 554 is crossed to connect with flanging fixed seat 551;Flanging idler wheel 553 is mounted on flanging frame 552, and 553 position of flanging idler wheel is in Right over material cup channel;The height of flanging idler wheel 553 is adjusted by screw 554.
Screw 554 adjusts the height of flanging idler wheel 553, and flanging idler wheel 553 contacts heat-sealing film g, while flanging idler wheel 553 has Heat-sealing film is bonded in material cup by certain temperature, when rolling.
Material cup Zou Liao mechanisms 57 include bearing block 571, indexing drive disk 572 and third infrared sensor 573;5th motor 520 output shaft passes through the connection indexing drive disk 572 of bearing block 571;572 outer ring of indexing drive disk is provided with pillar, and pillar is straight Diameter is adapted with the circular hole on material cup h, and the circular arc distance of two neighboring pillar on material cup h at a distance from adjacent circular holes it is equal, So that pillar is inserted in circular hole, rotated by indexing drive disk 572 so that material cup h makees straight-line feed movement;The infrared biography of third Sensor 573 is fixed in packaging rack 51, corresponding with the graduated disk of 572 end of indexing drive disk, third infrared sensor 573 for controlling indexing 572 stepwise motion of drive disk;
Material cup Zou Liao mechanisms 57 in use, indexing 572 circumference of drive disk on pillar be inserted in the circular hole of charging tray, drive material cup H makees straight-line feed movement;5th motor 520 drives the transmission of the first idler wheel 526, realizes the movement of material cup feeding receiving mechanism 52, The two holding moves synchronously.
In use, semiconductor feeding equipment 2 carries out cycle feeding to workpiece, then by conveying robot unit 4 by work Part is transported to semiconductor positioning device 3 and is positioned, and then again positions workpiece from semiconductor by conveying robot unit 4 and fills It is transported in setting 3 in automatic packing apparatus 5, the automatic charging of material cup and heat-sealing film is realized in automatic packing apparatus 5, when partly leading After body falls into material cup, the process that heat-sealing is packaged is realized, then automatic coiling is collected, and completes the packing work to semiconductor.

Claims (4)

1. semiconductor packaging device, it is characterised in that including rack components(1)And semiconductor feeding equipment thereon(2), partly lead Body positioning device(3), conveying robot unit(4)And automatic packing apparatus(5);Semiconductor positioning device(3)With semiconductor into Expect device(2)Mutually it is connected, automatic packing apparatus(5)With semiconductor positioning device(3)Mutually it is connected;
Semiconductor feeding equipment(2)Including mounting bracket, first motor(22), gear set and endless apron mechanism(25)And guide wheel Tension assembly(26);Mounting bracket(21)Including two pieces of installation risers(211)And connecting rod(212), two pieces of installation risers(211)It is logical Cross connecting rod(212)It is fixedly connected;Gear set includes the first gear of engagement connection(23)And second gear(24);Installation riser (211)It is fixed on rack components(1)On, first motor(22)Endless apron mechanism is connected by gear set(25);It recycles defeated Tape-feed(25)With guide wheel tension assembly(26)Mounted on mounting bracket(21)On, guide wheel tension assembly(26)Connect circulation conveying Band mechanism(25);Endless apron mechanism(25)Including the first drive roll(251), the second drive roll(252), first conveying Band(253), the second conveyer belt(254), blanking slope(256), side shield(257), end baffle(258), end fixed block (259), entrance shrink slanted bar(2510), entrance positioning strip(2512)With material folding channel parts(2511);First drive roll(251) With the second drive roll(252)It is mounted on installation riser by bearing(211)On;
Material folding channel parts(2511)In the second conveyer belt(254)The top of one end, end baffle(258)In the second conveyer belt (254)The top of the other end, blanking slope(256)First conveyer belt(253)The top of one end, end baffle(258)In One conveyer belt(253)The top of the other end, blanking slope(256)In material folding channel parts(2511)Lower section;First gear (23)Connect the first drive roll(251), second gear(24)Connect the second drive roll(252);First conveyer belt(253)It twines It is wound on the first drive roll(251)On, the second conveyer belt(254)It is wrapped in the second drive roll(252)On, first conveyer belt (253)With the second conveyer belt(254)The direction of motion it is opposite;
Blanking slope(256)Mounted on two pieces of installation risers(211)Between, blanking slope(256)Positioned at the second conveyer belt(254) Top, blanking slope(256)For accepting from first conveyer belt(253)On the workpiece that falls;Side shield(257)It is fixed at Installation riser(211)On, side shield(257)Position and the second conveyer belt(254)Matching, side shield(257)For regular Two conveyer belts(254)On workpiece;End baffle(258)Pass through end fixed block(259)It is fixed at two pieces of installation risers (211)Between, end baffle(258)Positioned at first conveyer belt(253)With the second conveyer belt(254)Top, end baffle(258) By first conveyer belt(253)On workpiece shelves enter the second conveyer belt(254)In;
Entrance shrinks slanted bar(2510)With entrance positioning strip(2512)It is respectively at the second conveyer belt(254)Both sides, entrance receive Contracting slanted bar(2510)Positioned at first conveyer belt(253)Top, entrance shrink slanted bar(2510)One end is mounted on material folding channel parts (2511)On, entrance shrinks slanted bar(2510)The other end is towards end baffle(258), slanted bar is shunk by inclined entrance (2510)It adjusts entrance and shrinks slanted bar(2510)With entrance positioning strip(2512)Between the second conveyer belt(254)On workpiece side To;Entrance positioning strip(2512)With material folding channel parts(2511)Between there are blanking ports, blanking port to be in blanking slope(256)'s Surface;The second conveyer belt at blanking port(254)Position is higher than blanking slope(256)The first conveyer belt at place(253)Position, Close to end baffle(258)Second conveyer belt at place(254)Position is less than close to end baffle(258)The first conveyer belt at place (253)Position.
2. semiconductor packaging device according to claim 1, it is characterised in that including being tensioned guide wheel(255), guide wheel tensioning Component(26)Connection tensioning guide wheel(255), it is tensioned guide wheel(255)It is two, two tensioning guide wheels(255)It is defeated to be separately connected first Send band(253)With the second conveyer belt(254), guide wheel tension assembly(26)It is tensioned guide wheel by adjusting(255)It is defeated with tensioning cycle Tape-feed(25)On first conveyer belt(253)With the second conveyer belt(254).
3. semiconductor packaging device according to claim 1, it is characterised in that the second conveyer belt(254)The end of top is kept off Plate(258)It is equipped with by first conveyer belt(253)To the second conveyer belt(254)The inclined folded plate in direction, folded plate are conveyed first Band(253)On workpiece shelves enter the second conveyer belt(254)In.
4. semiconductor packaging device according to claim 1, it is characterised in that material folding channel parts(2511)Including left fixation Plate(25111), right fixed plate(25110), left guide pad(25112), right guide pad(25117), the first infrared sensor (25113), cylinder guide rod(25114), left spring(25115), right spring(25119), left adjusting screw(25116)With right adjusting Screw(25118);Left fixed plate(25111)With right fixed plate(25110)It is separately mounted to one piece of installation riser(211)On;It is left Guide pad(25112)With right guide pad(25117)Pass through cylinder guide rod(25114)It is connected, left guide pad(25112)With right guide Block(25117)Between be equipped with feed zone and charge region, the first infrared sensor(25113)Position corresponds to charge region, the One infrared sensor(25113)For confirming whether charge region has workpiece;Left fixed plate(25111)Pass through left adjusting screw (25116)Connect left guide pad(25112), left fixed plate(25111)With left guide pad(25112)Between cylinder guide rod (25114)On be arranged with left spring(25115), right fixed plate(25110)Pass through right adjusting screw(25118)Connect right guide pad (25117), right fixed plate(25110)With right guide pad(25117)Between cylinder guide rod(25114)On be arranged with right spring (25119), by rotating left adjusting screw(25116)With right adjusting screw(25118)Adjust left guide pad(25112)It is led with the right side Expect block(25117)Between position, that is, pass through left adjusting screw(25116)With right adjusting screw(25118)Adjust feed zone Size.
CN201810511315.0A 2018-05-25 2018-05-25 Semiconductor packaging equipment Active CN108717935B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101093555A (en) * 2006-06-23 2007-12-26 矽品精密工业股份有限公司 Method for preparing electronic equipment
CN102324453A (en) * 2011-09-30 2012-01-18 深圳市灏天光电有限公司 High-power LED (Light Emitting Diode) packaging process of double-layer lens
CN102332409A (en) * 2010-07-13 2012-01-25 均豪精密工业股份有限公司 Integrated manufacturing equipment for semiconductor component and manufacturing method thereof
CN103165549A (en) * 2011-12-14 2013-06-19 三星电机株式会社 Semiconductor package
US20150325525A1 (en) * 2014-05-08 2015-11-12 Globalfoundries Inc. Forming interconnect structure with polymeric layer and resulting device
CN105364330A (en) * 2015-11-17 2016-03-02 深圳市德沃先进自动化有限公司 Semiconductor packaging bonding wire equipment

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101093555A (en) * 2006-06-23 2007-12-26 矽品精密工业股份有限公司 Method for preparing electronic equipment
CN102332409A (en) * 2010-07-13 2012-01-25 均豪精密工业股份有限公司 Integrated manufacturing equipment for semiconductor component and manufacturing method thereof
CN102324453A (en) * 2011-09-30 2012-01-18 深圳市灏天光电有限公司 High-power LED (Light Emitting Diode) packaging process of double-layer lens
CN103165549A (en) * 2011-12-14 2013-06-19 三星电机株式会社 Semiconductor package
US20150325525A1 (en) * 2014-05-08 2015-11-12 Globalfoundries Inc. Forming interconnect structure with polymeric layer and resulting device
CN105364330A (en) * 2015-11-17 2016-03-02 深圳市德沃先进自动化有限公司 Semiconductor packaging bonding wire equipment

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