CN108480841A - Optical beam scanning system and beam scanning method for laser micropore processing - Google Patents
Optical beam scanning system and beam scanning method for laser micropore processing Download PDFInfo
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- CN108480841A CN108480841A CN201810102221.8A CN201810102221A CN108480841A CN 108480841 A CN108480841 A CN 108480841A CN 201810102221 A CN201810102221 A CN 201810102221A CN 108480841 A CN108480841 A CN 108480841A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
Abstract
The present invention relates to a kind of optical beam scanning system and beam scanning method for laser micropore processing, which includes the laser module for emitting laser beam, further includes：Light beam two-dimensional scan module, the traversing module of light beam, light beam two-dimensional scan module drive system, the traversing module drive system of light beam, focus lamp, cooperative control system.The system of the present invention detects the current phase of the traversing module of light beam in real time, current phase and preset light beam two-dimensional scan module scans track to the traversing module of light beam carry out vector analysis, solves the problems, such as the synchronous control that mechanical property difference is brought greatly, and accumulated error can be eliminated, preferably ensure its long-term synchronization accuracy.
Description
Technical field
The present invention relates to field of laser processing, and system is scanned in particular to a kind of light beam for laser micropore processing
System and beam scanning method.
Background technology
Since nineteen sixty AT＆T Labs's invention ruby laser, laser is just gradually applied to process equipment, is surveyed
Away from various fields such as equipment, communication apparatus.In field of laser processing, although laser emitter price is very expensive, due to swashing
The advantage that light processing has traditional processing incomparable, in European and American developed countries, laser processing has occupied 50% or more processing industry
Share.Laser beam can focus on the size of very little, be therefore particularly suitable for super micro-processing field.With traditional processing mode phase
Than laser accurate micro Process has the following advantages that：Machined material selectable range is wide, high precision machining, and processing quality is good, heat
Deform small, cutting seam is thin, and cutting surfaces are smooth, saves material.Generally speaking, laser precision machining technology have traditional processing without
The superiority of method analogy, foreground are very wide.
It is currently common to be broadly divided by principle applied to the precision machined light beam scan mode of laser micropore：Wedge reflects
Formula and lens reflecting formula.Light wedge type is mainly had four wedges, three wedges and two wedge several modes by constituted mode, wherein two
Wedge scheme does not have mould taper control function.It is reflective mainly to have galvanometer, PZT beats mirror, fast anti-mirror, MEMS pendulum by constituted mode
Mirror etc., these scan modes do not have mould taper control function, but also several light beams using above-mentioned more set reflection units are swept
Imaging apparatus, to have the ability of certain taper control.
Existing light wedge type light beam scans cooperative control system, and its implementation is the coordination in movement cooperative control system
Lower control servomotor drives each wedge, completes the cooperative motion between each wedge, achievees the purpose that be directed toward control to light beam.
The shortcomings that the method, is system structure complexity, and control object is more, therefore causes control difficulty big, and device structure is complicated, body
Product is big and weighs, and system maintenance is complicated, and sweep speed is not easy to improve, and is limited by its optical principle, the scanning of light wedge type light beam
System special-shaped hole machined relatively difficult to achieve in addition to circular hole will be to sacrifice efficiency as cost.Advantage be then it is affected by environment compared with
It is small, circular hole good processing stability, mould taper control easy to implement and on-line measurement etc..
Reflecting light beam scanning system, the system belong to high-speed synchronous cooperative control system, and control strategy is mainly height
The fast single or multiple reflecting optics angular poses of synchronous control carry out high speed cooperative motion, by real-time to single or multiple eyeglasses
The high speed of angular pose accurately monitors, and realizes that light beam scans TRAJECTORY CONTROL.Its implementation controls instead under specific drive means
The attitude angle for penetrating mirror, to control the direction of light beam.The shortcomings that the method, is affected by environment larger, needs correction mechanism
And scanning shape correction compensation, it is not easy to realize mould taper control and on-line measurement, the pose adjustment difficulty of installation etc..Advantage
It is then that sweep speed is high, volume is small and light, simple in structure etc..For compound reflecting light beam scanning system, although can be real
Existing mould taper control, but system will be more complicated, lose its original advantage to a certain extent instead.
Invention content
An embodiment of the present invention provides a kind of optical beam scanning systems and beam scanning method for laser micropore processing, until
It solves the synchronisation control means based on TRAJECTORY CONTROL less and is difficult to realize light beam two-dimensional scan module and the traversing module synchronization of light beam
The technical issues of movement.
One side according to the ... of the embodiment of the present invention provides a kind of optical beam scanning system for laser micropore processing,
Include transmitting laser beam laser module, further include：
Light beam two-dimensional scan module, for being scanned movement to incident laser beam；
The traversing module of light beam, for carrying out transverse translation to incident laser beam；
Light beam two-dimensional scan module drive system is configured to drive the light beam two-dimensional scan module；
The traversing module drive system of light beam is configured to drive the traversing module of the light beam；
Focus lamp；
Cooperative control system, it is horizontal with the laser module, the light velocity scan module drive system, the light velocity respectively
Shifting formwork block drive system is electrically connected, and is controlled incident laser beam and is passed sequentially through the light beam two-dimensional scan module, light beam cross
Capillary processing is carried out to XY two dimensional surfaces after shifting formwork block, focus lamp.
Further, the cooperative control system controls the traversing module drive system of light beam by controlling signal, drives
The dynamic traversing module rotation of the light beam carries out transverse translation to incident laser beam；Wherein, the cooperative control system receives
The real-time phase signal of the traversing module output of light beam, and in conjunction with the real-time phase signal to the light beam two-dimensional scan mould
The preset scanning track of block carries out vector analysis, and parsing generates actual scanning track, is generated based on the actual scanning track real
The actual drive signal is sent to the light beam two-dimensional scan module by border drive signal.
Further, the cooperative control system is further configured to laser die described in the output control according to vector analysis
Block carries out corresponding adjustment to laser parameter.
Further, the optical beam scanning system further includes：
Upper control display system is configured to provide human-computer interaction interface, is carried out with the cooperative control system two-way
Communication.
Further, the optical beam scanning system further includes the light path system for light path to be adjusted.
In order to overcome above-mentioned technical problem, the application also to provide a kind of light beam scanning side using above-mentioned optical beam scanning system
Method includes the following steps：
A. the driving traversing module of light beam carries out transverse translation according to the speed rotation of setting to incident laser beam；
B. the current phase of the traversing module of the light beam is detected in real time；
C. preset light beam two-dimensional scan module scans track is carried out in conjunction with the current phase of the traversing module of the light beam
Vector analysis generates the actual scanning track of the light beam two-dimensional scan module；
D. the light beam two-dimensional scan module is driven to be synchronized according to actual scanning track and the traversing module of the light beam
Movement, control laser beam equal XY two dimensions after passing sequentially through the light beam two-dimensional scan module, the traversing module of light beam, focus lamp
Face carries out capillary processing.
Further, step B-D is specifically included：
B1. the feedback transducer carried by the traversing module of the light beam detects the phase of the traversing module of the light beam in real time
Position；
C1. it according to the real-time phase of the traversing module of the light beam, and is swept with reference to the preset light beam two-dimensional scan module
Track is retouched, according to phase principle of identity, parses the scanning tracing point of the light beam two-dimensional scan module this moment, according to scanning rail
Mark point calculates the light beam two-dimensional scan module in the actual scanning track of X and Y-direction；
D1. corresponding control letter is exported in the actual scanning track of X and Y-direction according to the light beam two-dimensional scan module
Number to the light beam two-dimensional scan module drive system X and Y-axis control channel, control the X of the light beam two-dimensional scan module
Movement is synchronized according to the actual scanning track and the traversing module of the light beam with Y-axis, control laser beam passes sequentially through
Capillary processing is carried out to XY two dimensional surfaces after the light beam two-dimensional scan module, the traversing module of light beam, focus lamp.
Further, the beam scanning method further includes：The control module is according to the output control of vector analysis
Laser module carries out corresponding adjustment to the parameter for projecting laser beam.
In embodiments of the present invention, control module detects the current phase of the traversing module of light beam to the traversing module of light beam in real time
Current phase and preset light beam two-dimensional scan module scans track carry out vector analysis, generate light beam two-dimensional scan module
Actual scanning track then drives light beam two-dimensional scan module to synchronize fortune according to actual scanning track and the traversing module of light beam
It is dynamic, the synchronous control difficulty that mechanical property difference is brought greatly is then solved using the synchronous control scheme of vector analysis, and can eliminate
Accumulated error preferably ensures its long-term synchronization accuracy.
Wherein light beam two-dimensional scan module be used for control laser beam X/Y plane direction, the traversing module of light beam be used for be
Laser beam simultaneously provides certain translational movement, and the two cooperation realizes the arbitrary pattern micro hole machining of X/Y plane.
Description of the drawings
Attached drawing described herein is used to provide further understanding of the present invention, and is constituted part of this application, this hair
Bright illustrative embodiments and their description are not constituted improper limitations of the present invention for explaining the present invention.In the accompanying drawings：
Fig. 1 is that optical beam scanning system builds figure in specific embodiment；
Fig. 2 is vector analysis synchronization control algorithm principle schematic.
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The every other embodiment that member is obtained without making creative work should all belong to the model that the present invention protects
It encloses.
It should be noted that term " first " in description and claims of this specification and above-mentioned attached drawing, "
Two " etc. be for distinguishing similar object, without being used to describe specific sequence or precedence.It should be appreciated that using in this way
Data can be interchanged in the appropriate case, so as to the embodiment of the present invention described herein can in addition to illustrating herein or
Sequence other than those of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that cover
It includes to be not necessarily limited to for example, containing the process of series of steps or unit, method, system, product or equipment to cover non-exclusive
Those of clearly list step or unit, but may include not listing clearly or for these processes, method, product
Or the other steps or unit that equipment is intrinsic.
Embodiment 1
According to embodiments of the present invention, a kind of light beam scanning machining system for laser micropore processing is provided, referring to figure
1, include the laser module of transmitting laser beam, further includes：Light beam two-dimensional scan module, for being carried out to incident laser beam
Scanning motion；The traversing module of light beam, for carrying out transverse translation to incident laser beam；Light beam two-dimensional scan module drive system
System is configured to driving light beam two-dimensional scan module；The traversing module drive system of light beam, for driving the traversing module of light beam；It is poly-
Jiao Jing；Laser module carries out laser parameter adjustment for sending out machining beams, and to the laser beam of generation；Collaborative Control
System is electric with the traversing module drive system of the laser module, the light velocity scan module drive system and the light velocity respectively
Property connection, control incident laser beam pass sequentially through it is right after the light beam two-dimensional scan module, the traversing module of light beam, focus lamp
XY two dimensional surfaces carry out capillary processing.
Specifically, after light beam processes XY two dimensional surfaces, further control goes out cooperative control system from the traversing module of light beam
The laser beam penetrated carries out the capillary processing control of Z-direction；In one embodiment, cooperative control system control processing work
The raising and lowering of part；In another embodiment, cooperative control system controls the raising and lowering reality of entire scanning system
The feeding of existing Z-direction.By the feeding of Z-direction, the final processing for realizing the controllable profiled holes of taper.
Laser module can also carry out laser parameter adjustment to the laser beam of generation.
Specifically, laser module includes laser and light path system.Cooperative control system is further configured to according in real time
Machining state controls laser module and carries out corresponding adjustment to laser parameter.Carry out control process simultaneously can also will and laser
The laser parameter that processing is closely related, which synchronizes, is associated regulation and control, realizes higher-quality capillary processing.
In the specific implementation, it is traversing to be configured to the control traversing module drive system drive light beam of light beam for cooperative control system
Module rotation carries out transverse translation to incident laser beam, and detects the current phase of the traversing module of light beam in real time, in conjunction with light
The current phase of the traversing module of beam carries out vector analysis to preset light beam two-dimensional scan module scans track, generates light beam two dimension
Scan module then controls light beam two-dimensional scan module drive system drive light beam in the actual scanning track of X-direction and Y-direction
Two-dimensional scan module synchronizes movement according to actual scanning track and the traversing module of light beam so that incident laser beam is successively
By carrying out capillary processing to XY two dimensional surfaces after light beam two-dimensional scan module, the traversing module of light beam and focus lamp.
Wherein light beam two-dimensional scan module completes the shape Surface scan of setting hole shape, and then synchronization is two to the traversing module of light beam
It ties up the light beam in scanning process and appropriate translational movement is provided, the two precision-fit finally realizes the controllable special-shaped hole machined of taper.It should
The a big difficulty of system is how to realize the precise synchronization of two-dimensional scan and light beam translation, the hole if synchronizing and error occur
Pattern and taper will be affected, to obtain desired effect.
The light beam reflected from two-dimensional scan module passes through the traversing module of light beam, generates certain translation suitable for capillary processing
Amount.In process, the traversing module Real-time Feedback self-position state of light beam, it is appropriate to be exported via the calculating of cooperative control system
Controlled quentity controlled variable, so that the traversing module of light beam is rotated with specific speed.The light beam projected from the traversing module of light beam passes through focus lamp, reaches
Plane is processed, after the scanning machining for completing X/Y plane, the feed of Z-direction is carried out, realizes the processing in hole, be thus finally completed micro-
Hole scanning machining process.
In embodiments of the present invention, cooperative control system detects the current phase of the traversing module of light beam, receiving phase in real time
Signal, and based on the current phase of the traversing module of light beam, sweared with reference to preset light beam two-dimensional scan module scans track
Amount parsing, keeps two-dimensional scan module identical with the phase of the traversing module of light beam, generate light beam two-dimensional scan module in X-direction and
The actual scanning track of Y-direction generates actual drive signal, which is sent to the light beam two-dimensional scan mould
Block then drives light beam two-dimensional scan module to synchronize movement according to actual scanning track and the traversing module of light beam, completes to meet
The scanning machining process of predetermined input.Using the synchronous control scheme of vector analysis solve mechanical property difference bring greatly it is same
Control difficulty is walked, and accumulated error can be eliminated, preferably ensures its long-term synchronization accuracy；Wherein light beam two-dimensional scan module is used for
It realizes that laser beam is controlled in the direction of X/Y plane, and then realizes the arbitrary pattern micro hole machining of X/Y plane, the traversing module of light beam
Can be that laser beam simultaneously provides certain translational movement, to realize entire scanning machining.
Preferably, optical beam scanning system further includes：Upper control display system is configured to provide human-computer interaction circle
Face carries out two-way communication with cooperative control system.
In the preferred embodiment, machined parameters, the setting of machining locus and defeated are realized by upper control display system
Enter, cooperative control system controls laser and generates the laser beam for being used for processing, and the laser beam of generation can pass through light path system
System expanded, shaping, modulation and transmission and is guided to light beam two-dimensional scan module.The reflection that light beam passes through two-dimensional scan module
Deviation is produced, deviation angle can combine the appearance of two-dimensional scan module by the realization that accurately controls to two-dimensional scan module
State phase signal inputs input quantity appropriate to X control channels and Y control channels by feedback control, is formed in two dimensional surface
On accurate scan.
With reference to Fig. 1 and specific embodiment, the invention will be further described, the group of optical beam scanning system of the invention
At including：
1. it is simultaneously defeated in real time to receive the drive signal from light beam two-dimensional scan module drive system for light beam two-dimensional scan module
Come from figure state phase signal, i.e., the foil gauge that can export attitude signal or encoder etc. for including by its own
Sensor exports attitude signal to drive control module, by drive control module feedback control, is used to complete light beam in XY bis-
Direction processing on dimensional plane, coordinates the feeding in Z-direction, finally realizes that the special-shaped pattern micro hole scanning punching of planning adds
Work.Wherein light beam two-dimensional scan module includes but not limited to scanning galvanometer, the two-dimentional beat platform based on piezoelectric effect, fast anti-mirror with
And MEMS puts mirror.
2. light beam two-dimensional scan module drive system receives the control signal exported from cooperative control system and comes from light
The status signal of beam two-dimensional scan module forms closed-loop control, by itself control algolithm final output relevant drive signals to light
Beam two-dimensional scan module.
3. laser module receives the control signal from cooperative control system, the laser of trajectory synchronization is realized and scanned
The modulated in real time of associated arguments.
4. the traversing module of light beam, for providing a synchronous relative translation during scanning machining for laser beam
Amount, to realize micropore taper WEDM.It receives the drive signal from the traversing module drive system of light beam and feeds back itself for it
Real time position state, that is, pass through the sensing of its own foil gauge that can export attitude signal or encoder etc. that include
Device exports attitude signal to drive control module, by drive control module feedback control, the final control realized to the traversing amount of light beam
System and driving.The traversing module of light beam, which includes parallel plate glass, either adjustable plate glass component or can realize light beam translation
Other of function are similar to optical component package.
5. the traversing module drive system of light beam receives the control signal exported from cooperative control system and from light beam cross
The status signal of shifting formwork block forms internal closed loop control, by calling the closed loop control algorithm of itself, realizes to the traversing mould of light beam
Block accurately controls in real time, final to realize accurately controlling and driving in real time to the traversing amount of light beam during scanning machining.
6. cooperative control system receives the traversing module of light beam two-dimensional scan module drive system, laser module, light beam and drives
The Real-time Feedback signal of dynamic system, to obtain the processing on real-time state of whole system.It receives and comes from upper control display system
Control instruction, call itself high speed Trajectory Arithmetic, according to vector analysis method generate real time scan TRAJECTORY CONTROL signal, with
The status signal of each drive system forms closed-loop control in system, finally exports control instruction to each driving system in system
System, and system mode is uploaded to upper control display system in real time.
7. upper control display system is configured to provide human-computer interaction interface, realize two-way with cooperative control system
Communication is realized that instruction is issued and is uploaded with state.
The technical solution adopted by the present invention is using light beam two-dimensional scan module and the traversing module synchronization scanning of light beam as entirely
The core of control coordinates Z axis length feed, the final laser accurate capillary processing for realizing that taper is controllable.The control of whole system
Strategy is rotated according to the direction of setting with speed for the control traversing module of light beam first, to its velocity accuracy and stability without spy
It is different to require, therefore be relatively easy to realize high-velocity scanning.Cooperative control system detects working as the traversing module operation of light beam in real time later
Preceding phase simultaneously combines the track of planning to carry out vector analysis, to generate the actual scanning rail synchronous with the traversing block motion of light beam
Mark carries out the scanning machining of X/Y plane, and the feeding in Z-direction is finally coordinated to realize entire micropore scanning machining process.
With reference to the control strategy of entire cooperative control system, the micro-machined sweep speed of laser accurate is by the traversing module of light beam
Rotary speed determine, the scanning in the directions XY by light beam two-dimensional scan module scanning TRAJECTORY CONTROL.Entire scanning machining scheme
It is advantageous in that the relatively common light wedge type optical beam scanning system of the structure of system is greatly simplified, to bring precision height, volume
Benefit small and exquisite, easy to maintain, and can realize irregularly-shaped hole and the controllable function of taper.Special synchronisation control means is preferable
Synchronous motion control between solving the problems, such as big difference mechanical system, improve synchronization accuracy, eliminate accumulated error.
Its working principle is that：When system proceeds by scanning machining, it is real that laser module is controlled according to upper bit instruction first
Existing laser is opened to be arranged with initial power, the directional velocity movement of the above bit instruction setting of the driving traversing module of light beam；It is moving
In the process, cooperative control system is by the synchronous feedback position of the traversing module of real-time reception light beam, according to the traversing module of light beam
Current real-time phase and light beam two-dimensional scan module planning path instructions carry out vector analysis, generate practical control light beam two dimension
The signal of scan module, because two-dimensional light beam two-dimensional scan module has the mechanical response spy far above the traversing module of light beam
Property, therefore angular speed identical with the traversing module of light beam may be implemented and synchronize scanning, it is real-time according to scanning in scanning process
Position can also modulated in real time laser output, realize more abundant technology controlling and process ability.After every layer of end of scan, light beam
Two-dimensional scan module drive system is communicated by related handshake and cooperative control system, carries out the Z-direction of whole system
Feed motion, realize entire scanning machining.
Embodiment 2
Other side according to the ... of the embodiment of the present invention provides a kind of using above-mentioned any one optical beam scanning system
Beam scanning method includes the following steps：
A. cooperative control system drives speed rotation pair of the traversing module of light beam according to setting according to the scanning track of input
Incident laser beam carries out transverse translation；
B. the current phase of the traversing module of light beam is detected in real time；
C. the current phase to the traversing module of light beam and preset light beam two-dimensional scan module scans track carry out vector solution
Analysis generates the actual scanning of light beam two-dimensional scan module in the x-direction and the z-direction and controls track；
D. driving light beam two-dimensional scan module synchronizes movement according to actual scanning track and the traversing module of light beam, controls
Laser beam passes sequentially through light beam two-dimensional scan module, the traversing module of light beam, focus lamp and carries out capillary processing to XY two dimensional surfaces.
Preferably, referring specifically to Fig. 2, illustrated for processing strip-shaped hole, step A-D is specifically included：
A1. the traversing module high speed rotation of cooperative control system control light beam (generally at the uniform velocity)；
B1. cooperative control system detects light beam cross in real time by the feedback transducer such as foil gauge that the traversing module of light beam carries
The phase of shifting formwork block；
C1. cooperative control system is according to the real-time phase of the traversing module of light beam, and with reference to preset light beam two-dimensional scan mould
Block scan track parses the scanning tracing point of the module of light beam two-dimensional scan this moment according to phase principle of identity, according to scanning rail
Mark point calculates light beam two-dimensional scan module in the actual scanning track of X and Y-direction；
D1. corresponding control signal is exported extremely in the actual scanning track of X and Y-direction according to light beam two-dimensional scan module
The X of light beam two-dimensional scan module drive system and Y-axis control channel, the X and Y-axis of control light beam two-dimensional scan module are according to reality
Scanning track synchronizes movement with the traversing module of light beam, and control laser beam passes sequentially through light beam two-dimensional scan module, light beam
Capillary processing is carried out to XY two dimensional surfaces after traversing module and focus lamp.
Preferably, beam scanning method further includes：According to the output control laser module of vector analysis to incidence
Laser parameter carries out corresponding adjustment.It can also be synchronous by the laser parameter being closely related with laser processing while vector analysis
It is associated regulation and control and combines processing technology, use different capacity in machining profile out of phase position, realize higher-quality micro-
Hole machined.
Its whole method rate-determining steps is：
First, in parameters such as upper software set scanning machining three-dimensional appearance, sweep speeds.
Then, start scanning machining.
Later, whole system will start to process according to the processing method of design, and processing on real-time state is uploaded to upper
Machine, i.e. upper control display system.
Finally, after process finishing, host computer will show process finishing state and wait for processes commencing signal next time.
The present invention utilize light beam two-dimensional scan module high response characteristic, can improving laser process sweep speed, especially
For the sweep speed of processing special holes, processing efficiency is promoted.Compared with prior art, the beneficial effects of the invention are as follows：
1. typical special-shaped pattern, the controllable micro hole machining of taper can be realized.
2. improving scanning machining efficiency.Since light beam two-dimensional scan modular structure is light and handy, response is fast, typical circular hole processing
Speed >=18000rpm.
3. simplifying structure, product systems maintenance period is improved.Due to the configuration of the present invention is simple so that it is maintainable big
Width improves.
4. since the mechanical property difference of light beam two-dimensional scan module and the traversing module of light beam is larger, light beam two-dimensional scan mould
Block structure is light and handy, and responsive bandwidth is high, and the traversing module opposed configuration of light beam is heavy, and responsive bandwidth is low, commonly uses and is based on TRAJECTORY CONTROL
Synchronisation control means be difficult to realize it and move synchronously, and do not have the ability for eliminating error accumulation.Using the same of vector analysis
Step control program then solves the synchronous control difficulty that mechanical property difference is brought greatly, and can eliminate accumulated error, preferable to ensure
Its long-term synchronization accuracy.
The embodiments of the present invention are for illustration only, can not represent the quality of embodiment.
In the above embodiment of the present invention, all emphasizes particularly on different fields to the description of each embodiment, do not have in some embodiment
The part of detailed description may refer to the associated description of other embodiment.
In several embodiments provided herein, it should be understood that disclosed technology contents can pass through others
Mode is realized.Wherein, the apparatus embodiments described above are merely exemplary, for example, unit division, can be one kind
Division of logic function, formula that in actual implementation, there may be another division manner, such as multiple units or component can combine or can
To be integrated into another system, or some features can be ignored or not executed.Another point, shown or discussed is mutual
Coupling, direct-coupling or communication connection can be by some interfaces, the INDIRECT COUPLING or communication connection of unit or module,
Can be electrical or other forms.
The unit illustrated as separating component may or may not be physically separated, and be shown as unit
Component may or may not be physical unit, you can be located at a place, or may be distributed over multiple units
On.Some or all of unit therein can be selected according to the actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in each embodiment of the present invention can be integrated in a processing unit, it can also
It is that each unit physically exists alone, it can also be during two or more units be integrated in one unit.Above-mentioned integrated list
The form that hardware had both may be used in member is realized, can also be realized in the form of SFU software functional unit.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (8)
1. a kind of optical beam scanning system for laser micropore processing, includes the laser module of transmitting laser beam, feature exists
In further including：
Light beam two-dimensional scan module, for being scanned movement to incident laser beam；
The traversing module of light beam, for carrying out transverse translation to incident laser beam；
Light beam two-dimensional scan module drive system is configured to drive the light beam two-dimensional scan module；
The traversing module drive system of light beam is configured to drive the traversing module of the light beam；
Focus lamp；
Cooperative control system, respectively with the laser module, the light velocity scan module drive system, the traversing mould of the light velocity
Block drive system is electrically connected, and is controlled incident laser beam and is passed sequentially through the light beam two-dimensional scan module, the traversing mould of light beam
Capillary processing is carried out to XY two dimensional surfaces after block, focus lamp.
2. optical beam scanning system according to claim 1, which is characterized in that the cooperative control system is by controlling signal
The traversing module drive system of the light beam is controlled, the traversing module rotation of the light beam is driven to carry out laterally incident laser beam
Translation；Wherein, the cooperative control system is configured to receive the real-time phase signal of the traversing module output of the light beam, and ties
It closes the real-time phase signal and vector analysis is carried out to the preset scanning track of the light beam two-dimensional scan module, parsing generates real
Track is scanned on border, generates actual drive signal based on the actual scanning track, which is sent to the light
Beam two-dimensional scan module.
3. optical beam scanning system according to claim 1, which is characterized in that the cooperative control system is further configured to root
Laser module described in output control according to vector analysis carries out corresponding adjustment to laser parameter.
4. optical beam scanning system according to claim 1, which is characterized in that the optical beam scanning system further includes：
Upper control display system, is configured to provide human-computer interaction interface, and two-way communication is carried out with the cooperative control system.
5. optical beam scanning system according to claim 1, which is characterized in that the optical beam scanning system further include for pair
The light path system that light path is adjusted.
6. a kind of beam scanning method using any one of the claim 1-5 optical beam scanning systems, which is characterized in that including
Following steps：
A. the driving traversing module of light beam carries out transverse translation according to the speed rotation of setting to incident laser beam；
B. the current phase of the traversing module of the light beam is detected in real time；
C. vector is carried out to preset light beam two-dimensional scan module scans track in conjunction with the current phase of the traversing module of the light beam
Parsing, generates the actual scanning track of the light beam two-dimensional scan module；
D. the light beam two-dimensional scan module is driven to synchronize movement according to actual scanning track and the traversing module of the light beam,
Control laser beam pass sequentially through after the light beam two-dimensional scan module, the traversing module of light beam, focus lamp to XY two dimensional surfaces into
Row capillary processing.
7. beam scanning method according to claim 6, which is characterized in that step B-D is specifically included：
B1. the feedback transducer carried by the traversing module of the light beam detects the phase of the traversing module of the light beam in real time；
C1. according to the real-time phase of the traversing module of the light beam, and with reference to the preset light beam two-dimensional scan module scans rail
Mark parses the scanning tracing point of the light beam two-dimensional scan module this moment according to phase principle of identity, according to scanning tracing point
The light beam two-dimensional scan module is calculated in the actual scanning track of X and Y-direction；
D1. corresponding control signal is exported extremely in the actual scanning track of X and Y-direction according to the light beam two-dimensional scan module
The X of the light beam two-dimensional scan module drive system and Y-axis control channel, control the X and Y-axis of the light beam two-dimensional scan module
Movement is synchronized according to the actual scanning track and the traversing module of the light beam, laser beam is made to pass sequentially through the light beam
Capillary processing is carried out to XY two dimensional surfaces after the traversing module of two-dimensional scan module, light beam, focus lamp.
8. beam scanning method according to claim 6, which is characterized in that the beam scanning method further includes：It is described
Cooperative control system carries out corresponding adjustment according to the output control laser module of vector analysis to the parameter for projecting laser beam.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110695523A (en) * | 2019-06-19 | 2020-01-17 | 西安中科微精光子制造科技有限公司 | Laser scanning device |
| CN110977153A (en) * | 2019-11-13 | 2020-04-10 | 中国科学院西安光学精密机械研究所 | Control method of spiral scanning laser processing head |
| CN111001928A (en) * | 2019-12-24 | 2020-04-14 | 西安中科微精光子制造科技有限公司 | Light beam scanning device for laser micropore processing |
| CN112264722A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for thin-wall parts |
| CN112264723A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for small-sized complex curved surface part |
| CN115055842A (en) * | 2022-06-09 | 2022-09-16 | 中国工程物理研究院激光聚变研究中心 | Laser drilling scanning control system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000071086A (en) * | 1998-08-31 | 2000-03-07 | Yasuoka:Kk | Method and device for shape processing by laser light |
| US20070148567A1 (en) * | 2005-12-09 | 2007-06-28 | Joerg Ferber | Method and apparatus for laser-drilling an inkjet orifice in a substrate |
| CN202021423U (en) * | 2011-04-21 | 2011-11-02 | 中科中涵激光设备（福建）股份有限公司 | Laser scanning device for processing micro circular holes based on PZT (piezoelectric lead zirconate titanate ceramics) |
| CN202199931U (en) * | 2011-06-15 | 2012-04-25 | 中科中涵激光设备（福建）股份有限公司 | Laser scanning device for processing micro round hole on the basis of acoustooptic effect |
| CN202224847U (en) * | 2011-08-16 | 2012-05-23 | 中科中涵激光设备（福建）股份有限公司 | Scanning laser processing device for inverted taper hole based on PZT (Pb-based Lanthanumdoped Zirconate Titanates) and parallel plate |
| CN104690423A (en) * | 2015-01-23 | 2015-06-10 | 深圳英诺激光科技有限公司 | Machining device and method capable of realizing zero taper and reverse taper drilling |
| CN208289223U (en) * | 2018-02-01 | 2018-12-28 | 西安中科微精光子制造科技有限公司 | Optical beam scanning system for laser micropore processing |
-
2018
- 2018-02-01 CN CN201810102221.8A patent/CN108480841B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000071086A (en) * | 1998-08-31 | 2000-03-07 | Yasuoka:Kk | Method and device for shape processing by laser light |
| US20070148567A1 (en) * | 2005-12-09 | 2007-06-28 | Joerg Ferber | Method and apparatus for laser-drilling an inkjet orifice in a substrate |
| CN202021423U (en) * | 2011-04-21 | 2011-11-02 | 中科中涵激光设备（福建）股份有限公司 | Laser scanning device for processing micro circular holes based on PZT (piezoelectric lead zirconate titanate ceramics) |
| CN202199931U (en) * | 2011-06-15 | 2012-04-25 | 中科中涵激光设备（福建）股份有限公司 | Laser scanning device for processing micro round hole on the basis of acoustooptic effect |
| CN202224847U (en) * | 2011-08-16 | 2012-05-23 | 中科中涵激光设备（福建）股份有限公司 | Scanning laser processing device for inverted taper hole based on PZT (Pb-based Lanthanumdoped Zirconate Titanates) and parallel plate |
| CN104690423A (en) * | 2015-01-23 | 2015-06-10 | 深圳英诺激光科技有限公司 | Machining device and method capable of realizing zero taper and reverse taper drilling |
| CN208289223U (en) * | 2018-02-01 | 2018-12-28 | 西安中科微精光子制造科技有限公司 | Optical beam scanning system for laser micropore processing |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110695523A (en) * | 2019-06-19 | 2020-01-17 | 西安中科微精光子制造科技有限公司 | Laser scanning device |
| CN110977153A (en) * | 2019-11-13 | 2020-04-10 | 中国科学院西安光学精密机械研究所 | Control method of spiral scanning laser processing head |
| CN111001928A (en) * | 2019-12-24 | 2020-04-14 | 西安中科微精光子制造科技有限公司 | Light beam scanning device for laser micropore processing |
| CN111001928B (en) * | 2019-12-24 | 2020-09-25 | 西安中科微精光子制造科技有限公司 | Light beam scanning device for laser micropore processing |
| CN112264722A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for thin-wall parts |
| CN112264723A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for small-sized complex curved surface part |
| CN115055842A (en) * | 2022-06-09 | 2022-09-16 | 中国工程物理研究院激光聚变研究中心 | Laser drilling scanning control system |
| CN115055842B (en) * | 2022-06-09 | 2024-02-27 | 中国工程物理研究院激光聚变研究中心 | Laser drilling scanning control system |
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