CN106825918A - A kind of hybrid laser beam scanning device and control method - Google Patents
A kind of hybrid laser beam scanning device and control method Download PDFInfo
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- CN106825918A CN106825918A CN201710146821.XA CN201710146821A CN106825918A CN 106825918 A CN106825918 A CN 106825918A CN 201710146821 A CN201710146821 A CN 201710146821A CN 106825918 A CN106825918 A CN 106825918A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
The present invention is a kind of rational in infrastructure, simple and easy to do hybrid laser beam scanning device and control method.XY axle galvanometer scanning systems are provided with the present invention, angled drive mechanisms are provided with XY axle galvanometer scanning systems, angled drive mechanisms drive X-axis vibration mirror reflected mirror and Y-axis vibration mirror reflected mirror under the control instruction of scanning monitor, workbench side is provided with Piezoelectric Driving component, workbench dither under the driving of Piezoelectric Driving component, laser beam is formed by stacking by the scanning motion of XY axle galvanometer scanning systems in the actual scanning track on part to be processed surface with the dither of workbench.By the ratio for changing the movement velocity of XY axle galvanometer scanning systems and the dither speed of workbench, adjustable dither track forms the dense degree of micro structure array on part to be processed surface, ratio is bigger, and microstructured ar-rangement is more sparse, otherwise then more intensive.
Description
Technical field
The invention belongs to optics and technical field of electromechanical control, specifically a kind of hybrid laser beam scanning device and control
Method.
Background technology
Existing laser beam scanning device mainly uses XY galvanometer systems, and it is inclined that XY galvanometer systems can do quick angle including two
Turn speculum, they be geometrically orthogonal be laid out and be respectively adopted angle servo control mechanism drive；Angle servo control mechanism passes through
Two deflection angles of speculum of regulation, control laser facula is continuously scanned by set path on X/Y plane.Laser beam
Scan mode can be divided into vector expression and bit map type again, and the laser beam mobile route of wherein vector expression scanning is typically around part wheel
Wide full curve；The laser beam mobile route of bit map type scanning is then uniform fold machining area line by line, and according to swashing
Light beam is presently in whether position is located at area to be machined and carries out switching manipulation to it.Vector expression and the essence of bit map type scanning
It is that laser beam is moved into formed scan line dense arrangement, and then is spliced into the process in required form scan face；And due to
Scan line is produced by laser facula continuous moving, therefore the generation moment of adjacent scanning lines is the asynchronous and time difference with scan wheel
Wide elongated and increase, the heating and cooling procedure that correspondingly laser beam is triggered are also asynchronous.This easily causes scan line spelling
Being heated of socket part position, inhomogeneous cooling, and then form internal stress and cause intensity decreases and deformation；Additionally, single, regular splicing
Texture is easily caused part and tear damage occurs at splicing position under external force.
CN201510296762.5 discloses a kind of method that laser scanning powder carries out melting shaping, is swept using large spot
The double laser beam scheme that center regular domain, small light spot scan edge irregular area is retouched, scan efficiency is improved and so that is received
Heat fusing process evenly, but its large spot light intensity homogenizing, the planning parameters of scanning paths of big small light spot joint portion do not illustrate clear.
The front/rear double laser beam sweeping scheme in addition with document report, laser beam above is responsible for melt-shaping, laser beam below
Surface quality for second melting to increase intensity, improve formation of parts, but get on to analyze from scanning pattern form, these sides
Case does not change the regularly arranged fundamental way of scan line and many limitations for resulting from yet.In field of laser processing, at present
Also lack a kind of arbitrary scan section, scanning plane of building and splice intensity laser beam flying control method high and easy to implement.
The content of the invention
The present invention is in view of the shortcomings of the prior art, provide hybrid laser beam flying dress a kind of rational in infrastructure, simple and easy to do
Put and control method.
Technical scheme is as follows：A kind of hybrid laser beam scanning device, the hybrid laser beam scanning device
Including laser, XY axles galvanometer scanning system, angled drive mechanisms, field lens, workbench, Piezoelectric Driving component and scan control
Device, wherein, XY axles galvanometer scanning system includes X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror and angled drive mechanisms, field lens
The top of part to be processed is located at, XY axle galvanometer scanning systems are located at the top of field lens, X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected
The orthogonal setting of mirror, angled drive mechanisms drive X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror, part to be processed to be placed in work respectively
On platform, Piezoelectric Driving component is located at the side of workbench, and workbench can do a little under the driving of Piezoelectric Driving component
Rectilinear movement；The workbench high frequency two dimensional surface vibration parallel with the plane generation of XY axle galvanometer scanning systems；Laser sends
Laser beam through X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror reflect after into field lens focus on, then project part to be processed
Surface；Scanning monitor is connected with laser, with the real-time control laser beam switch in scanning process, laser beam power, swashs
The pulsewidth of light pulse and interval time etc.；Scanning monitor is connected with angled drive mechanisms, to control laser beam flying path；Sweep
Controller is retouched to be connected to control the high frequency two dimensional surface oscillation trajectory of workbench with Piezoelectric Driving component；Start laser beam flying
During processing, scanning monitor control angled drive mechanisms routinely scan mode operation, at the same time, scanning monitor is according to reality
When scanning coordinate determine parameters of laser beam, and send control instruction to laser to realize that the switch of laser beam is controlled and power is adjusted
Section；During angled drive mechanisms are scanned, scanning monitor is according to type of microstructure data such as regular hexagon, output coordinated signals letter
Number to Piezoelectric Driving component, to control workbench that the high frequency of corresponding modes is generated on the direction parallel with the XY axle planes of scanning motion
Two dimensional surface oscillation trajectory；Because laser beam flying track depends on the relative motion between laser facula and processing part, because
The scanning motion of this XY axle galvanometer scanning system is superimposed with the dither of Piezoelectric Driving component, has synthesized laser beam flying rail
Mark, wherein XY axles galvanometer scanning system are responsible for macro scan path, and Piezoelectric Driving component is responsible for scanning micro-structural；Because piezoelectricity drives
The scanning motion speed of the vibration velocity much larger than XY axle galvanometer scanning systems of dynamic component, synthesized laser beam flying track is
By the complex array pattern of a large amount of micro-structural dense arrangements.
In described a kind of hybrid laser beam scanning device, described Piezoelectric Driving component includes orthogonal thereto setting
A axles piezoelectric actuator and U axle piezoelectric actuators, A axles piezoelectric actuator, U axle piezoelectric actuators set up separately in the side of workbench
And be connected with scanning monitor, A axles piezoelectric actuator, U axles piezoelectric actuator are moved under the control of scanning monitor.
In described a kind of hybrid laser beam scanning device, described angled drive mechanisms include angle servo control mechanism
One and angle servo control mechanism two, angle servo control mechanism one is connected with angle servo control mechanism two with scanning monitor, and X-axis galvanometer is anti-
Mirror is penetrated by the driving of angle servo control mechanism one, Y-axis vibration mirror reflected mirror is driven by angle servo control mechanism two, complete sweeping for macroscopical path
Retouch.
In a kind of hybrid laser beam flying control method, the hybrid laser beam flying control method includes following step
Suddenly：
(1) before starting laser beam flying processing, scanning monitor calculates scanning pattern according to cross sectional shape to be scanned, and will
It is loaded into procedure in the lump with sweep speed, laser power and for filling the type of microstructure data of scanning cross-section；
(2) procedure is started, and scanning monitor exports deflection angle control instruction to XY axles and shakes according to scanning path data
The angled drive mechanisms of scarnning mirror system, control laser beam performs each section of scanning pattern successively by setting sweep speed, and exports
Synchro switch is instructed to laser so that the real-time deflection angle coordinate of X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror enters scanning
During cross sectional shape institute definition region, laser beam is opened, and then laser beam is closed during disengaging；
(3) laser power data output control of the scanning monitor in procedure is instructed to laser, to determine to swash
Light device average output power；Type of microstructure data output dither control signal of the scanning monitor in procedure
A axles piezoelectric actuator, U axle piezoelectric actuators to workbench both sides, to control the high frequency two dimension of workbench generation mode
Plane vibration track, such as hexagon, triangle, circle；In the continuous scanning machining region process of XY axle galvanometer scanning systems, work
Make medelling vibration and X-axis vibration mirror reflected mirror, the angular deflection campaign collective effect of Y-axis vibration mirror reflected mirror of platform so that swash
The scanning track that light beam is formed on part to be processed surface, the micro-structural of dense arrangement is changed into from cluster parallel lines.
In described a kind of hybrid laser beam flying control method, the dither speed of the workbench is far high
In the movement velocity of XY axle galvanometer scanning systems, by the coordinated signals to Piezoelectric Driving component, workbench can generate triangle
Shape, hexagon, the dither track of circular isotype；It is flat with work by the movement velocity for changing XY axle galvanometer scanning systems
The ratio of the dither speed of platform, adjustable dither track forms the close of micro structure array on part to be processed surface
Collection degree, ratio is bigger, and microstructured ar-rangement is more sparse, otherwise then more intensive.
In the described a kind of hybrid laser beam flying control method, A axles piezoelectric actuator, U axle piezoelectric actuators
Oscillation control signal is quadrature phase relationship, is believed by simultaneous bias A axles piezoelectric actuator, the vibration control of U axle piezoelectric actuators
Number absolute phase angle, adjustable part to be processed surface forms the orientation of micro structure array.
In the present invention laser beam part to be processed surface actual scanning track by XY axle galvanometer scanning systems scanning
Motion is formed by stacking with the dither of workbench, and dress is vibrated by setting a set of high frequency two dimensional surface on workbench
Put, by laser beam flying track from continuous long scan splicing state transformation be micro structure array form, dither track
During for regular hexagon, the scan pattern of similar honeycomb, graphene-structured can be generated；Laser beam flying control method of the present invention is given birth to
Into micro structure array, be completely embedded between its micro-structural and connected mode be without obvious directionality, therefore part to be processed can be lifted
Deformation caused by structural strength, reduction stress concentration degree, mitigation Stress Release；By adjusting different scanning layer micro structure array
Orientation, the present invention can also be avoided in 3D printing application same scan pattern repeatedlys be superimposed cause forming part melting
Texture is concentrated, the situation of intensity difference；The present invention is carried out without the scanning direction of the XY axle galvanometer scanning systems to different scanning layer
Extra planning, simplifies the calculating of XY axle galvanometer scanning system scanning patterns.
The high frequency two dimensional surface vibration of workbench is conducive to emptying powder in powder melts 3D printing application in the present invention
Last space, the compaction rate and structural strength that increase part after melting consolidation；Additionally, under heating environment, the height of workbench
Frequency plane vibration also has the booster action of release inside parts stress, helps to reduce the deformation in part to be processed later stage；This
The hybrid laser beam flying control method of invention is using XY axles galvanometer scanning system and A axles piezoelectric actuator, U axle Piezoelectric Drivings
Device drives the mode that workbench is combined, its optics and reasonable mechanical structure, and control process is simple and easy to do, is led in Laser Processing
There is applications well prospect in domain.
Brief description of the drawings
Fig. 1 is the overall structure figure of the embodiment of the present invention.
Fig. 2 is the control signal connection figure of the embodiment of the present invention.
Fig. 3 is typical scan pattern of the invention.
In accompanying drawing 1~3,1 represents laser；2 represent X-axis vibration mirror reflected mirror；3 represent Y-axis vibration mirror reflected mirror；4 represent
Field lens；5 represent part to be processed；6 represent workbench；7 represent angle servo control mechanism one；8 represent angle servo control mechanism two；9
Represent A axle piezoelectric actuators；10 represent U axle piezoelectric actuators；11 represent scanning monitor.
Specific embodiment
The embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.
As shown in Figures 1 to 3, a kind of hybrid laser beam scanning device, the hybrid laser beam scanning device includes laser
Device 1, XY axles galvanometer scanning system, angled drive mechanisms, field lens 4, workbench 6, Piezoelectric Driving component and scanning monitor 11,
Wherein, XY axles galvanometer scanning system includes X-axis vibration mirror reflected mirror 2, Y-axis vibration mirror reflected mirror 3 and angled drive mechanisms, and X-axis is shaken
Mirror speculum 2, the orthogonal setting of Y-axis vibration mirror reflected mirror 3, angled drive mechanisms include angle servo control mechanism 1 and angle servo
Structure 28, angle servo control mechanism 1 is connected with angle servo control mechanism 28 with scanning monitor 11, and X-axis vibration mirror reflected mirror 2 is by angle
Degree servo control mechanism 1 is driven, and Y-axis vibration mirror reflected mirror 3 is driven by angle servo control mechanism 28, completes the scanning in macroscopical path；Field lens
4 tops for being located at part to be processed 5, XY axle galvanometer scanning systems are located at the top of field lens 4, and part to be processed 5 is placed in work and puts down
On platform 6, Piezoelectric Driving component includes the A axles piezoelectric actuator 9 and U axles piezoelectric actuator 10 of orthogonal thereto setting, A axle Piezoelectric Drivings
Device 9, U axles piezoelectric actuator 10 set up the adjacent side in workbench 6 separately and are connected with scanning monitor 11, A axle Piezoelectric Drivings
Device 9, U axles piezoelectric actuator 10 are moved under the control of scanning monitor 11, and workbench 6 is under the driving of Piezoelectric Driving component
Can do and move linearly a little, the workbench high frequency two dimensional surface vibration parallel with the plane generation of XY axle galvanometer scanning systems；Swash
The laser beam that light device 1 sends is focused on after being reflected through X-axis vibration mirror reflected mirror 2, Y-axis vibration mirror reflected mirror 3 into field lens 4, is then projected
To the surface of part to be processed 5；Scanning monitor 11 is connected with laser 1, is opened with the real-time control laser beam in scanning process
Pass, laser beam power, the pulsewidth of laser pulse and interval time etc.；Scanning monitor 11 is connected with angled drive mechanisms, to control
Controlling laser beam scanning pattern；Scanning monitor 11 is connected to control the high frequency two dimensional surface of workbench to shake with Piezoelectric Driving component
Dynamic rail mark；When starting laser beam flying processing, the control of scanning monitor 11 angled drive mechanisms routinely scan mode operation, with
This simultaneously, scanning monitor 11 determines parameters of laser beam according to real time scan coordinate, and sends control instruction to laser 1 with reality
The switch control of existing laser beam and power adjusting；During angled drive mechanisms are scanned, scanning monitor 11 is according to type of microstructure
Data such as regular hexagon, output coordinated signals signal to Piezoelectric Driving component, with control workbench 6 with the XY axle planes of scanning motion
The high frequency two dimensional surface oscillation trajectory of corresponding modes is generated on parallel direction；Because laser beam flying track depends on laser light
Relative motion between spot and processing part 5, thus scanning motion and the Piezoelectric Driving component of XY axle galvanometer scanning systems height
Frequency vibration is superimposed, has synthesized laser beam flying track, and wherein XY axles galvanometer scanning system is responsible for macro scan path, and piezoelectricity drives
Dynamic component is responsible for scanning micro-structural；Because the vibration velocity of Piezoelectric Driving component is transported much larger than the scanning of XY axle galvanometer scanning systems
Dynamic speed, synthesized laser beam flying track is by the complex array pattern of a large amount of micro-structural dense arrangements.
A kind of hybrid laser beam flying control method, the hybrid laser beam flying control method is comprised the following steps：
(1) before starting laser beam flying processing, scanning monitor 11 calculates scanning pattern according to cross sectional shape to be scanned, and
It is loaded into procedure in the lump with sweep speed, laser power and for filling the type of microstructure data of scanning cross-section；
(2) procedure is started, and scanning monitor 11 exports deflection angle control instruction to XY axles according to scanning path data
The angled drive mechanisms of galvanometer scanning system, control laser beam performs each section of scanning pattern successively by setting sweep speed, and defeated
Go out synchro switch to instruct to laser 1 so that X-axis vibration mirror reflected mirror 2, the real-time deflection angle coordinate of Y-axis vibration mirror reflected mirror 3 enter
During scanning cross-section shape institute definition region, laser beam is opened, and then laser beam is closed during disengaging；Scanning monitor 11 according to sweeping in real time
Retouch coordinate and determine parameters of laser beam, and send control instruction to laser 1 and controlled and power adjusting with realizing the switch of laser beam；
(3) laser power data output control of the scanning monitor 11 in procedure is instructed to laser 1, with true
Determine the average output power of laser 1；Type of microstructure data output dither of the scanning monitor 11 in procedure
A axle piezoelectric actuator 9, U axle piezoelectric actuator 10 of the control signal to the both sides of workbench 6, to control the generation mode of workbench 6
The high frequency two dimensional surface oscillation trajectory of change, such as hexagon, triangle, circle；The continuous scanning machining of XY axle galvanometer scanning systems
In region process, medelling vibration and X-axis vibration mirror reflected mirror 2, the angular deflection campaign of Y-axis vibration mirror reflected mirror 3 of workbench 6
Collective effect so that the scanning track that laser beam is formed on part to be processed surface, dense arrangement is changed into from cluster parallel lines
Micro-structural, X-axis vibration mirror reflected mirror 2, Y-axis vibration mirror reflected mirror 3 are responsible for macro scan path, A axles piezoelectric actuator 9, U axle piezoelectricity
Driver 10 is responsible for scanning micro-structural；Because the vibration velocity of A axles piezoelectric actuator 9, U axles piezoelectric actuator 10 is much larger than X-axis
The scanning motion speed of vibration mirror reflected mirror 2, Y-axis vibration mirror reflected mirror 3, synthesized laser beam flying track is by a large amount of micro-structurals
The complex array pattern of dense arrangement；
The dither speed of the workbench 6 is far above the movement velocity of XY axle galvanometer scanning systems, by pressure
The coordinated signals of electric drive assembly, workbench can generate triangle, hexagon, the dither track of circular isotype；It is logical
The ratio of the movement velocity with the dither speed of workbench that change XY axle galvanometer scanning systems is crossed, dither is can adjust
Track forms the dense degree of micro structure array on part to be processed surface, and ratio is bigger, and microstructured ar-rangement is more sparse, otherwise
It is then more intensive；A axles piezoelectric actuator 9, the oscillation control signal of U axles piezoelectric actuator 10 are quadrature phase relationship, by synchronization
Skew A axles piezoelectric actuator 9, the absolute phase angle of the oscillation control signal of U axles piezoelectric actuator 10, can adjust part to be processed 5
Surface forms the orientation of micro structure array.
It is the typical scan pattern made using hybrid laser scanning control method of the invention in Fig. 3, including honeycomb battle array
Row, circular array, triarray.
The present invention controls the macro scan process of laser beam using XY axles galvanometer scanning system, is driven using Piezoelectric Driving component
The dynamic generation high frequency of workbench 6 two dimensional surface vibration, to control the micro-structural scanning process of laser beam, both be combined generation by
The scan pattern that micro structure array is constituted；Compared with long scan splicing mode, the cellular construction of micro structure array is small, between unit
It is completely embedded, particularly part to be processed bulk strength does not have obvious directional difference, part to be processed can be avoided along melting
There is tear and damage in skin texture direction；Hybrid laser beam flying control method of the invention, rationally make use of XY axle vibration mirror scannings
System stroke is big and A axles piezoelectric actuator 9, the fireballing advantage of dither of U axles piezoelectric actuator 10, is realizing that complexity sweeps
While tracing case, the dynamic performance requirements to angled drive mechanisms in XY axle galvanometer scanning systems are not increased.
Hybrid laser beam flying control method of the invention, when the scanning motion speed and A of XY axle galvanometer scanning systems
Axle piezoelectric actuator 9, the dither speed of U axles piezoelectric actuator 10 ratio it is larger when, its produce scan pattern in micro- knot
Structure arrangement is sparse, on the contrary then comparatively dense；Hybrid laser beam flying control method of the invention can be additionally used in material surface
Extensive micro structure array is made, is allowed to possess the characteristics such as hydrophobic, oleophobic.
The preferred embodiments of the present invention are the foregoing is only, is not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.It is all within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (6)
1. a kind of hybrid laser beam scanning device, it is characterised in that the hybrid laser beam scanning device includes laser, XY
Axle galvanometer scanning system, angled drive mechanisms, field lens, workbench, Piezoelectric Driving component and scanning monitor, wherein, XY axles
Galvanometer scanning system includes X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror and angled drive mechanisms, and field lens is located at processed zero
The top of part, XY axle galvanometer scanning systems are located at the top of field lens, X-axis vibration mirror reflected mirror, the orthogonal setting of Y-axis vibration mirror reflected mirror,
Angled drive mechanisms drive X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror, part to be processed to be placed on workbench respectively, piezoelectricity
Drive component is located at the side of workbench, and workbench can do under the driving of Piezoelectric Driving component and move linearly a little；Swash
The laser beam that light device sends through X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror reflect after into field lens focus on, then project by
Process the surface of part；Scanning monitor is connected realization control with laser, angled drive mechanisms, Piezoelectric Driving component.
2. a kind of hybrid laser beam scanning device according to claim 1, it is characterised in that described piezoelectric drive groups
Part includes the A axles piezoelectric actuator and U axle piezoelectric actuators of orthogonal thereto setting, A axles piezoelectric actuator, U axles piezoelectric actuator point
It is located at the side of workbench and is connected with scanning monitor, A axles piezoelectric actuator, U axle piezoelectric actuators is in scanning monitor
Control under move.
3. a kind of hybrid laser beam scanning device according to claim 1 and 2, it is characterised in that described angle drives
Mechanism includes angle servo control mechanism one and angle servo control mechanism two, angle servo control mechanism one and angle servo control mechanism two with scanning
Controller is connected, and X-axis vibration mirror reflected mirror is driven by angle servo control mechanism one, and Y-axis vibration mirror reflected mirror is driven by angle servo control mechanism two
It is dynamic.
4. in a kind of hybrid laser beam flying control method, the hybrid laser beam flying control method is comprised the following steps：
(1) start laser beam flying processing before, scanning monitor according to cross sectional shape to be scanned calculate scanning pattern, and by its with
Sweep speed, laser power and procedure is loaded into the lump for filling the type of microstructure data of scanning cross-section；
(2) procedure is started, and scanning monitor exports deflection angle control instruction to XY axle galvanometers and sweeps according to scanning path data
The angled drive mechanisms of system are retouched, control laser beam performs each section of scanning pattern successively by setting sweep speed, and exports synchronization
Switch order is to laser so that the real-time deflection angle coordinate of X-axis vibration mirror reflected mirror, Y-axis vibration mirror reflected mirror enters scanning cross-section
During shape institute definition region, laser beam is opened, and then laser beam is closed during disengaging；
(3) laser power data output control of the scanning monitor in procedure is instructed to laser, to determine laser
Average output power；Type of microstructure data output dither control signal of the scanning monitor in procedure is to work
Make A axles piezoelectric actuator, the U axle piezoelectric actuators of platform both sides, to control the high frequency two dimensional surface of workbench generation mode
Oscillation trajectory；In the continuous scanning machining region process of XY axle galvanometer scanning systems, medelling vibration and the X-axis galvanometer of workbench
The angular deflection campaign collective effect of speculum, Y-axis vibration mirror reflected mirror so that laser beam is in sweeping that part to be processed surface is formed
Track is retouched, the micro-structural of dense arrangement is changed into from cluster parallel lines.
5. a kind of hybrid laser beam flying control method according to claim 4, it is characterised in that the workbench
Dither speed far above XY axle galvanometer scanning systems movement velocity, by the coordinated signals to Piezoelectric Driving component,
Workbench can generate dither track；By changing the movement velocity of XY axle galvanometer scanning systems and the high frequency of workbench
The ratio of vibration velocity, adjustable dither track forms the dense degree of micro structure array on part to be processed surface,
Ratio is bigger, and microstructured ar-rangement is more sparse, otherwise then more intensive.
6. a kind of hybrid laser beam flying control method according to claim 4 or 5, it is characterised in that described A axles
Piezoelectric actuator, the oscillation control signal of U axle piezoelectric actuators are quadrature phase relationship, by simultaneous bias A axle Piezoelectric Drivings
The absolute phase angle of device, U axle piezoelectric actuator oscillation control signals, adjustable part to be processed surface forms micro structure array
Orientation.
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| CN113182672A (en) * | 2021-05-13 | 2021-07-30 | 广东宏石激光技术股份有限公司 | Thick material cutting method and system thereof based on dynamic control of three-dimensional track of laser spot |
| CN114545619A (en) * | 2022-02-24 | 2022-05-27 | 华中科技大学 | Telecentric scanning device based on 4f system |
| CN116174747A (en) * | 2022-12-06 | 2023-05-30 | 杭州爱新凯科技有限公司 | Multichannel laser 3D printing device and scanning method thereof |
| CN116551215A (en) * | 2023-07-06 | 2023-08-08 | 北京新科以仁科技发展有限公司 | Laser scanning control method, device, equipment and storage medium of laser |
| CN110877456B (en) * | 2019-12-10 | 2023-08-08 | 杭州德迪智能科技有限公司 | High-efficiency rotary scanning plane imaging device and method |
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| CN116551215A (en) * | 2023-07-06 | 2023-08-08 | 北京新科以仁科技发展有限公司 | Laser scanning control method, device, equipment and storage medium of laser |
| CN116551215B (en) * | 2023-07-06 | 2023-09-05 | 北京新科以仁科技发展有限公司 | Laser scanning control method, device, equipment and storage medium of laser |
| CN117733343A (en) * | 2024-02-21 | 2024-03-22 | 北京金橙子科技股份有限公司 | Shaking welding method and control device based on motion speed feedback |
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