CN105700130A - Cylindrical coordinate laser scanning galvanometer - Google Patents

Cylindrical coordinate laser scanning galvanometer Download PDF

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Publication number
CN105700130A
CN105700130A CN201510954229.3A CN201510954229A CN105700130A CN 105700130 A CN105700130 A CN 105700130A CN 201510954229 A CN201510954229 A CN 201510954229A CN 105700130 A CN105700130 A CN 105700130A
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CN
China
Prior art keywords
laser scanning
scanning galvanometer
cylindrical coordinates
scanning
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510954229.3A
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Chinese (zh)
Inventor
周明飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing Yuhua Cancer Prevention Institute
Original Assignee
Nanjing Yuhua Cancer Prevention Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Yuhua Cancer Prevention Institute filed Critical Nanjing Yuhua Cancer Prevention Institute
Priority to CN201510954229.3A priority Critical patent/CN105700130A/en
Publication of CN105700130A publication Critical patent/CN105700130A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

The invention discloses a cylindrical coordinate laser scanning galvanometer. The device comprises four lenses, wherein two lenses are fixed, and the other two are driven by a stepping motor to independently adjust positions. According to data obtained by lens parameter calculation or actual measurement, position adjustment of the two of the four lenses is performed, and the focusing spot size is adjustable while the focusing distance is unchanged. The cylindrical coordinate laser scanning galvanometer is provided by the invention which realizes size adjustment of laser focusing spots without changing the focus point distance.

Description

A kind of cylindrical coordinates laser scanning galvanometer
Technical field
Patent of the present invention belongs to laser technology and manufacture field, particularly relates to a kind of cylindrical coordinates laser scanning galvanometer。
Background technology
Laser scanning galvanometer is widely used in laser marking, stage performance and laser medicine field。The basic comprising principle of conventional two-dimensional laser scanning galvanometer is as shown in Figure 1。Adopt two one-dimensional rotation reflecting mirrors of driven by motor, two reflecting mirrors axially distinguish parallel vertical and horizontal direction, and laser passes through two secondary reflections, it is achieved the two-dimensional scan of X-direction and Y-direction in the horizontal plane, can optional position on horizontal scan face, scanning pattern constitutes arbitrary shape。Such as in marking machine, laser passes through lens focus, can form strong-focusing at working surface, thus realizing the processing of two dimension arbitrary graphic。This kind of mode is relatively suitable for the pattern that processing is parallel with X or Y-axis, and when pattern form is circular arc, owing to X and Y-axis are linked by needs, circular arc needs to adopt broken line mode to simulate, it is easy to cause the shortcoming that pattern resolution is low, symmetry is poor。In order to solve this problem, for circular arc particularly circular pattern, the present invention proposes to construct two-dimensional scanning mirrors in cylindrical coordinates mode, the scanning to two-dimensional pattern can be realized only with a piece of reflecting mirror, while simplifying structure, improve the scanning resolution to arc patterns and speed, and circular pattern scanning can be made more symmetrical attractive in appearance。
Summary of the invention
The invention provides a kind of cylindrical coordinates laser scanning galvanometer, it is achieved use when scanning circular arc camber line mode to connect scanning element, compared with X-Y dimension scanning, there is higher resolution and scanning speed。
It is an object of the invention to be achieved through the following technical solutions:
A kind of cylindrical coordinates laser scanning galvanometer, it is characterised in that: this device is made up of a reflecting mirror and two motors, realizes cylindrical coordinates scanning on working face in the way of rotary reflection mirror angle。
Motor is fixed on below vertical rotating shaft and rotates therewith, and adjusts mirror angle by rotation mode。
Motor is fixed on self-contained unit, does not rotate together with vertical rotating shaft, is connected with vertical rotating shaft by hinges, adjusts mirror angle by stretch mode and lever principle。
Compared with prior art, the present invention at least has the advantage that
By the technical scheme of the invention described above, target is hollow structure, is fixed on work top。Workbench is circular, and there is the circular port for laser traverse at center, and target vacancy overlaps。Laser is upwards incident by lower section, converges through plus lens, through the circular hole of work top。Reflecting mirror is fixed on the axle in vertical direction (z direction), motor driving rotate, and changes plane angleThe angle theta adjustment of reflecting mirror and z-axis has two ways。First kind of way motor is fixed in z-axis, rotates together with z-axis, adjusts self anglec of rotation thus changing θ angle simultaneously;The second motor is fixed on attachment device, does not rotate together with z-axis, is connected with z-axis by cross-garnet butt structure, changes θ angle by z to displacement and lever principle。This kind of scan mode by change reflecting mirror θ andAngle, makes reflection laser at working faceAngle and with initial point distance r change, it is achieved cylindrical coordinates mode scans。This kind of scan mode only needs a reflecting mirror, two kinds of orthogonal scanning path respectively circular arcs and straight line, thus realizing using camber line mode to connect scanning element when scanning circular arc, has higher resolution and scanning speed compared with X-Y dimension scanning。
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment of the present invention cylindrical coordinates laser scanning galvanometer。
Detailed description of the invention
Below in conjunction with the accompanying drawing in the present invention, the technical scheme in the present invention is clearly and completely described, it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments。Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under not making creative work premise, broadly fall into the scope of protection of the invention。
As it is shown in figure 1, a kind of cylindrical coordinates laser scanning galvanometer proposed for the embodiment of the present invention, this device is made up of a reflecting mirror and two motors, realizes cylindrical coordinates scanning on working face in the way of rotary reflection mirror angle。
Motor is fixed on below vertical rotating shaft and rotates therewith, and adjusts mirror angle by rotation mode。
Motor is fixed on self-contained unit, does not rotate together with vertical rotating shaft, is connected with vertical rotating shaft by hinges, adjusts mirror angle by stretch mode and lever principle。
Below in conjunction with accompanying drawing, the work process of the present invention is illustrated as follows:
First workpiece being positioned over work top and fixes with table top, the laser converged through lens is incident by work top circular hole。First electric rotating machine rotating shaft is vertically placed, and rotating shaft overlaps with laser;Rotating shaft lower end is fixing connects second electric rotating machine, and the rotating shaft of this motor is connected with reflecting mirror by bending head。By controlling the anglec of rotation of two motors, change reflecting mirror and vertical axes angle and Plane Rotation angle, make reflection laser in cylindrical coordinates mode on work surface, namely to adjust the anglec of rotation and to be scanned from zero point length wise
Compared with prior art, the present invention at least has the advantage that
By the technical scheme of the invention described above, target is hollow structure, is fixed on work top。Workbench is circular, and there is the circular port for laser traverse at center, and target vacancy overlaps。Laser is upwards incident by lower section, converges through plus lens, through the circular hole of work top。Reflecting mirror is fixed on the axle in vertical direction (z direction), motor driving rotate, and changes plane angleThe angle theta adjustment of reflecting mirror and z-axis has two ways。First kind of way motor is fixed in z-axis, rotates together with z-axis, adjusts self anglec of rotation thus changing θ angle simultaneously;The second motor is fixed on attachment device, does not rotate together with z-axis, is connected with z-axis by cross-garnet butt structure, changes θ angle by z to displacement and lever principle。This kind of scan mode by change reflecting mirror θ andAngle, makes reflection laser at working faceAngle and with initial point distance r change, it is achieved cylindrical coordinates mode scans。This kind of scan mode only needs a reflecting mirror, two kinds of orthogonal scanning path respectively circular arcs and straight line, thus realizing using camber line mode to connect scanning element when scanning circular arc, has higher resolution and scanning speed compared with X-Y dimension scanning。
The above; being only the present invention preferably detailed description of the invention, but protection scope of the present invention is not limited thereto, any those familiar with the art is in the technical scope that the invention discloses; the change that can readily occur in or replacement, all should be encompassed within protection scope of the present invention。Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims。

Claims (3)

1. a cylindrical coordinates laser scanning galvanometer, it is characterised in that: this device is made up of a reflecting mirror and two motors, realizes cylindrical coordinates scanning on working face in the way of rotary reflection mirror angle。
2. cylindrical coordinates laser scanning galvanometer according to claim 1, it is characterised in that: motor is fixed on below vertical rotating shaft and rotates therewith, and adjusts mirror angle by rotation mode。
3. cylindrical coordinates laser scanning galvanometer according to claim 1, it is characterised in that: motor is fixed on self-contained unit, does not rotate together with vertical rotating shaft, is connected with vertical rotating shaft by hinges, adjusts mirror angle by stretch mode and lever principle。
CN201510954229.3A 2015-12-18 2015-12-18 Cylindrical coordinate laser scanning galvanometer Pending CN105700130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510954229.3A CN105700130A (en) 2015-12-18 2015-12-18 Cylindrical coordinate laser scanning galvanometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510954229.3A CN105700130A (en) 2015-12-18 2015-12-18 Cylindrical coordinate laser scanning galvanometer

Publications (1)

Publication Number Publication Date
CN105700130A true CN105700130A (en) 2016-06-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510954229.3A Pending CN105700130A (en) 2015-12-18 2015-12-18 Cylindrical coordinate laser scanning galvanometer

Country Status (1)

Country Link
CN (1) CN105700130A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106695118A (en) * 2017-03-13 2017-05-24 浙江师范大学 Four-freedom-degree XY vibrating mirror scanning device and control method
CN106825918A (en) * 2017-03-13 2017-06-13 浙江师范大学 A kind of hybrid laser beam scanning device and control method
CN109323211A (en) * 2017-07-28 2019-02-12 Zodiac航空电器 Lighting system for aircraft
CN106272318B (en) * 2016-06-29 2019-03-29 昆山国显光电有限公司 A kind of laser point marking arrangement and its method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1653372A (en) * 2002-05-14 2005-08-10 奥林巴斯株式会社 Barcode reader
CN101256232A (en) * 2007-02-28 2008-09-03 电装波动株式会社 Laser radar apparatus for three-dimensional detection of objects
US7468824B2 (en) * 2004-01-19 2008-12-23 Ricoh Company, Ltd. Imaging apparatus including optical scanning device with deflecting mirror module, and method of deflecting with the mirror module
CN201889584U (en) * 2010-12-01 2011-07-06 杭州中科新松光电有限公司 High-power laser remote flying processing head

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1653372A (en) * 2002-05-14 2005-08-10 奥林巴斯株式会社 Barcode reader
US7468824B2 (en) * 2004-01-19 2008-12-23 Ricoh Company, Ltd. Imaging apparatus including optical scanning device with deflecting mirror module, and method of deflecting with the mirror module
CN101256232A (en) * 2007-02-28 2008-09-03 电装波动株式会社 Laser radar apparatus for three-dimensional detection of objects
CN201889584U (en) * 2010-12-01 2011-07-06 杭州中科新松光电有限公司 High-power laser remote flying processing head

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106272318B (en) * 2016-06-29 2019-03-29 昆山国显光电有限公司 A kind of laser point marking arrangement and its method
CN106695118A (en) * 2017-03-13 2017-05-24 浙江师范大学 Four-freedom-degree XY vibrating mirror scanning device and control method
CN106825918A (en) * 2017-03-13 2017-06-13 浙江师范大学 A kind of hybrid laser beam scanning device and control method
CN106695118B (en) * 2017-03-13 2018-10-09 浙江师范大学 A kind of four-degree-of-freedom XY galvanometer scanning devices and control method
CN109323211A (en) * 2017-07-28 2019-02-12 Zodiac航空电器 Lighting system for aircraft
CN109323211B (en) * 2017-07-28 2022-05-27 赛峰电子与国防舱方案公司 Lighting system for an aircraft

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Application publication date: 20160622