CN108480841B - Beam scanning system and beam scanning method for laser micropore machining - Google Patents
Beam scanning system and beam scanning method for laser micropore machining Download PDFInfo
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- CN108480841B CN108480841B CN201810102221.8A CN201810102221A CN108480841B CN 108480841 B CN108480841 B CN 108480841B CN 201810102221 A CN201810102221 A CN 201810102221A CN 108480841 B CN108480841 B CN 108480841B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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Abstract
The application relates to a beam scanning system and a beam scanning method for laser micropore processing, wherein the beam scanning system comprises a laser module for emitting laser beams, and further comprises: the device comprises a light beam two-dimensional scanning module, a light beam traversing module, a light beam two-dimensional scanning module driving system, a light beam traversing module driving system, a focusing mirror and a cooperative control system. The system detects the current phase of the beam traversing module in real time, performs vector analysis on the current phase of the beam traversing module and the scanning track of the preset beam two-dimensional scanning module, solves the problem of synchronous control caused by large mechanical characteristic difference, can eliminate accumulated errors, and better ensures the long-term synchronous precision of the beam traversing module.
Description
Technical Field
The application relates to the field of laser processing, in particular to a beam scanning system and a beam scanning method for laser micropore processing.
Background
Since the 1960 bell laboratory invented ruby laser, lasers have been gradually applied to a variety of fields such as processing equipment, ranging equipment, communication equipment, etc. In the laser machining field, although laser transmitters are very expensive, laser machining has taken up more than 50% of the machining industry in developed countries in europe and america, due to its incomparable advantages over traditional machining. The laser beam can be focused to a very small size and is therefore particularly suitable for the field of precision micromachining. Compared with the traditional processing mode, the laser precision micro-processing has the following advantages: the processed material has wide selectable range, high processing precision, good processing quality, small thermal deformation, thin cutting seam, smooth cutting surface and material saving. In general, the laser precision machining technology has incomparable superiority to the traditional machining, and has very broad prospect.
The current common beam scanning mode applied to laser micropore precision machining is mainly divided into: wedge refractive and lens reflective. The optical wedge mainly comprises four optical wedges, three optical wedges and two optical wedges according to the constitution mode, wherein the two optical wedges scheme does not have the taper control function. The reflecting type optical beam scanning device mainly comprises a vibrating mirror, a PZT deflection mirror, a quick reflection mirror, an MEMS deflection mirror and the like according to the constitution modes, wherein the scanning modes do not have a taper control function, but a plurality of optical beam scanning devices adopting the multiple sets of reflecting devices are also provided, so that the optical beam scanning device has a certain taper control capability.
The existing optical wedge type light beam scanning cooperative control system is realized by controlling a servo motor to drive each optical wedge under the coordination of the motion cooperative control system, so that the cooperative motion among the optical wedges is completed, and the aim of controlling the light beam pointing is fulfilled. The method has the defects of complex system structure, more control objects, large control difficulty, complex equipment structure, large and heavy volume, complex system maintenance, difficult improvement of scanning speed, and difficult realization of special-shaped hole processing except round holes or the cost of efficiency by the limitation of the optical principle of the system, wherein the optical wedge type light beam scanning system is difficult to realize. The method has the advantages of less influence by environment, good round hole processing stability, easy taper control and online measurement, etc.
The system belongs to a high-speed synchronous cooperative control system, and mainly adopts a control strategy of synchronously controlling the angle postures of a single or a plurality of reflecting lenses at high speed to perform high-speed cooperative motion, and realizes the control of the light beam scanning track by accurately monitoring the angle postures of the single or the plurality of lenses at high speed in real time. The implementation method controls the attitude angle of the reflecting mirror under a special driving device, thereby controlling the direction of the light beam. The method has the defects of larger environmental influence, need of correction mechanism and correction and compensation of scanning shape, difficulty in realizing taper control and online measurement, difficulty in adjusting installation posture and the like. Its advantages are high scanning speed, small size, light weight and simple structure. For a composite reflective beam scanning system, although taper control can be achieved, the system will be more complex and lose its original advantages to some extent.
Disclosure of Invention
The embodiment of the application provides a light beam scanning system and a light beam scanning method for laser micropore processing, which at least solve the technical problem that a synchronous control method based on track control is difficult to realize synchronous movement of a light beam two-dimensional scanning module and a light beam traversing module.
According to an aspect of an embodiment of the present application, there is provided a beam scanning system for laser micro-hole machining, including a laser module emitting a laser beam, further including:
the light beam two-dimensional scanning module is used for scanning the incident laser beam;
the beam traversing module is used for transversely translating an incident laser beam;
a beam two-dimensional scanning module driving system configured to drive the beam two-dimensional scanning module;
a beam traversing module driving system configured to drive the beam traversing module;
a focusing mirror;
and the cooperative control system is respectively and electrically connected with the laser module, the light speed scanning module driving system and the light speed traversing module driving system, and is used for controlling an incident laser beam to sequentially pass through the beam two-dimensional scanning module, the beam traversing module and the focusing mirror and then processing micropores on the XY two-dimensional plane.
Further, the cooperative control system controls the beam traversing module driving system through a control signal to drive the beam traversing module to rotate so as to transversely translate the incident laser beam; the cooperative control system receives the real-time phase signal output by the beam traversing module, performs vector analysis on a scanning track preset by the beam two-dimensional scanning module by combining the real-time phase signal, analyzes the scanning track to generate an actual scanning track, generates an actual driving signal based on the actual scanning track, and sends the actual driving signal to the beam two-dimensional scanning module.
Further, the cooperative control system is further configured to control the laser module to correspondingly adjust the laser parameters according to the result of vector analysis.
Further, the light beam scanning system further includes:
and the upper control display system is configured to provide a human-computer interaction interface and perform two-way communication with the cooperative control system.
Further, the light beam scanning system further comprises a light path system for adjusting the light path.
In order to overcome the technical problems, the application also provides a beam scanning method using the beam scanning system, which comprises the following steps:
A. the driving beam traversing module rotates according to a set speed to transversely translate the incident laser beam;
B. detecting the current phase of the beam traversing module in real time;
C. vector analysis is carried out on a scanning track of a preset light beam two-dimensional scanning module by combining the current phase of the light beam traversing module, and an actual scanning track of the light beam two-dimensional scanning module is generated;
D. and driving the light beam two-dimensional scanning module to synchronously move with the light beam traversing module according to an actual scanning track, and controlling a laser beam to sequentially pass through the light beam two-dimensional scanning module, the light beam traversing module and the focusing mirror to process micropores on the XY two-dimensional plane.
Further, the steps B-D specifically include:
B1. detecting the phase of the beam traversing module in real time through a feedback sensor of the beam traversing module;
C1. analyzing scanning track points of the light beam two-dimensional scanning module at the moment according to the real-time phase of the light beam traversing module and the same principle of the phase by referring to the scanning track of the preset light beam two-dimensional scanning module, and calculating the actual scanning track of the light beam two-dimensional scanning module in the X and Y directions according to the scanning track points;
D1. and outputting corresponding control signals to X and Y axis control channels of the driving system of the light beam two-dimensional scanning module according to the actual scanning tracks of the light beam two-dimensional scanning module in the X and Y directions, controlling the X and Y axes of the light beam two-dimensional scanning module to synchronously move with the light beam traversing module according to the actual scanning tracks, and controlling a laser beam to sequentially pass through the light beam two-dimensional scanning module, the light beam traversing module and the focusing lens and then carrying out micropore processing on an XY two-dimensional plane.
Still further, the light beam scanning method further includes: and the control module controls the laser module to correspondingly adjust the parameters of the emitted laser beam according to the result of vector analysis.
In the embodiment of the application, the control module detects the current phase of the beam traversing module in real time, carries out vector analysis on the current phase of the beam traversing module and the scanning track of the preset beam two-dimensional scanning module, generates the actual scanning track of the beam two-dimensional scanning module, then drives the beam two-dimensional scanning module to synchronously move with the beam traversing module according to the actual scanning track, solves the synchronous control difficulty caused by large mechanical characteristic difference by adopting a synchronous control scheme of vector analysis, can eliminate accumulated errors, and better ensures the long-term synchronous precision of the beam two-dimensional scanning module.
The beam two-dimensional scanning module is used for controlling the pointing direction of the laser beam on the XY plane, the beam traversing module is used for synchronously providing a certain translation amount for the laser beam, and the beam two-dimensional scanning module and the beam traversing module are matched to realize the machining of micro holes with any shape on the XY plane.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:
FIG. 1 is a schematic diagram of an exemplary embodiment of a beam scanning system;
fig. 2 is a schematic diagram of a principle of a vector analysis synchronous control algorithm.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
According to an embodiment of the present application, there is provided a beam scanning processing system for laser micro-hole processing, referring to fig. 1, including a laser module emitting a laser beam, further including: the light beam two-dimensional scanning module is used for scanning the incident laser beam; the beam traversing module is used for transversely translating an incident laser beam; a beam two-dimensional scanning module driving system configured to drive the beam two-dimensional scanning module; the beam traversing module driving system is used for driving the beam traversing module; a focusing mirror; the laser module is used for emitting a processing light beam and adjusting laser parameters of the generated laser light beam; and the cooperative control system is respectively and electrically connected with the laser module, the light speed scanning module driving system and the light speed traversing module driving system, and is used for controlling an incident laser beam to sequentially pass through the beam two-dimensional scanning module, the beam traversing module and the focusing mirror and then processing micropores on the XY two-dimensional plane.
Specifically, after the XY two-dimensional plane is processed by the light beam, the cooperative control system further controls the laser beam emitted from the light beam traversing module to carry out micropore processing control in the Z-axis direction; in one embodiment, the cooperative control system controls the raising and lowering of the work piece; in another embodiment, the cooperative control system controls the raising and lowering of the entire scanning system to achieve the feeding in the Z-axis direction. And finally, the machining of the taper controllable special-shaped hole is realized by virtue of the feeding in the Z-axis direction.
The laser module may also perform laser parameter adjustment on the generated laser beam.
Specifically, the laser module includes a laser and an optical path system. The cooperative control system is further configured to control the laser module to correspondingly adjust the laser parameters according to the real-time processing state. And the control treatment is performed, and meanwhile, the laser parameters closely related to the laser processing can be synchronously and associatively regulated and controlled, so that the higher-quality micropore processing is realized.
In specific implementation, the cooperative control system is configured to control the beam traversing module driving system to drive the beam traversing module to rotate so as to transversely translate an incident laser beam, detect the current phase of the beam traversing module in real time, perform vector analysis on a scanning track of a preset beam two-dimensional scanning module by combining the current phase of the beam traversing module, generate actual scanning tracks of the beam two-dimensional scanning module in the X direction and the Y direction, and then control the beam two-dimensional scanning module driving system to drive the beam two-dimensional scanning module to synchronously move with the beam traversing module according to the actual scanning tracks, so that an incident laser beam sequentially passes through the beam two-dimensional scanning module, the beam traversing module and the focusing mirror and then performs micropore processing on an XY two-dimensional plane.
The beam two-dimensional scanning module completes surface scanning of the set hole shape, the beam traversing module synchronously provides proper translation amount for the beam in the two-dimensional scanning process, and the beam two-dimensional scanning module and the beam traversing module are precisely matched to finally realize taper-controllable special-shaped hole processing. A major difficulty with this system is how to achieve accurate synchronization of the two-dimensional scan and the translation of the beam, and if the synchronization is out of order, the hole morphology and taper will be affected, and the desired effect will not be obtained.
The beam reflected from the two-dimensional scanning module passes through the beam traversing module to generate a certain amount of translation suitable for microwell processing. In the processing process, the beam traversing module feeds back the position state of the beam traversing module in real time, and the proper control quantity is output through calculation of the cooperative control system, so that the beam traversing module rotates at a specific speed. And the beam emitted from the beam traversing module passes through the focusing mirror to reach the processing plane, and is fed in the Z-axis direction after the scanning processing of the XY plane is completed, so that the processing of the hole is realized, and the micropore scanning processing process is finally completed.
In the embodiment of the application, a cooperative control system detects the current phase of a beam traversing module in real time, receives a phase signal, performs vector analysis by referring to a preset scanning track of the beam two-dimensional scanning module based on the current phase of the beam traversing module, keeps the phases of the two-dimensional scanning module and the beam traversing module identical, generates actual scanning tracks of the beam two-dimensional scanning module in the X direction and the Y direction, generates an actual driving signal, and sends the actual driving signal to the beam two-dimensional scanning module to drive the beam two-dimensional scanning module to synchronously move with the beam traversing module according to the actual scanning tracks, so as to finish the scanning processing process meeting the preset input. The synchronous control scheme adopting vector analysis solves the synchronous control difficulty caused by large mechanical characteristic difference, can eliminate accumulated errors and better ensures the long-term synchronous precision; the beam two-dimensional scanning module is used for realizing the pointing control of the laser beam on the XY plane, further realizing the processing of micro holes with any shape on the XY plane, and the beam traversing module can synchronously provide a certain translation amount for the laser beam, so that the whole scanning processing is realized.
Preferably, the beam scanning system further includes: and the upper control display system is configured to provide a human-computer interaction interface and perform two-way communication with the cooperative control system.
In the preferred embodiment, the setting and input of the processing parameters and the processing track are realized through the upper control display system, the cooperative control system controls the laser to generate a laser beam for processing, and the generated laser beam can be expanded, shaped, modulated and transmitted through the optical path system and guided to the beam two-dimensional scanning module. The deflection of the light beam is generated by the reflection of the two-dimensional scanning module, the deflection angle can be realized by precisely controlling the two-dimensional scanning module, namely, the appropriate input quantity is input to the X control channel and the Y control channel by combining the gesture phase signal of the two-dimensional scanning module through feedback control, and the precise scanning on the two-dimensional plane is formed.
The following describes the present application in further detail with reference to fig. 1 and the embodiment, and the composition of the beam scanning system of the present application includes:
1. the light beam two-dimensional scanning module receives a driving signal from a light beam two-dimensional scanning module driving system and outputs a self-posture phase signal in real time, namely, the self-contained sensor capable of outputting the posture signal outputs the posture signal to the driving control module, and the driving control module is used for performing feedback control on the light beam, finishing pointing processing of the light beam on an XY two-dimensional plane and finally realizing the scanning punching processing of the planned special-shaped micro hole in cooperation with feeding in the Z-axis direction. The light beam two-dimensional scanning module comprises, but is not limited to, a scanning galvanometer, a two-dimensional deflection table based on a piezoelectric effect, a quick reflection mirror and an MEMS (micro electro mechanical system) deflection mirror.
2. And the driving system of the light beam two-dimensional scanning module receives the control signal output by the cooperative control system and the state signal from the light beam two-dimensional scanning module to form closed-loop control, and finally outputs a relevant driving signal to the light beam two-dimensional scanning module through a self control algorithm.
3. And the laser module receives a control signal from the cooperative control system and realizes real-time modulation of laser related parameters synchronous with the scanning track.
4. And the beam traversing module is used for providing a synchronous relative translation amount for the laser beam in the scanning processing process so as to realize micropore taper processing. The device receives a driving signal from a driving system of the beam traversing module and feeds back the real-time position state of the device, namely, the device outputs the attitude signal to a driving control module through a sensor which is contained in the device and can output the attitude signal, such as a strain gauge or an encoder, and the like, and the driving control module feeds back and controls the beam traversing quantity finally. The beam traversing module comprises a parallel plate glass or an adjustable plate glass assembly or other similar optical element assembly capable of performing a beam translating function.
5. The driving system of the beam traversing module receives the control signal output by the cooperative control system and the state signal from the beam traversing module to form internal closed-loop control, and the real-time accurate control of the beam traversing module is realized by calling the closed-loop control algorithm of the driving system, so that the real-time accurate control and driving of the beam traversing amount in the scanning processing process are finally realized.
6. And the cooperative control system is used for receiving real-time feedback signals of the driving system of the light beam two-dimensional scanning module, the laser module and the driving system of the light beam traversing module, so that the real-time processing state of the whole system is obtained. And receiving a control instruction from the upper control display system, calling a self-high-speed track algorithm, generating a real-time scanning track control signal according to a vector analysis method, forming closed-loop control with the state signals of all driving systems in the system, finally outputting the control instruction to all driving systems in the system, and uploading the system state to the upper control display system in real time.
7. The upper control display system is configured to provide a human-computer interaction interface, realize bidirectional communication with the cooperative control system and realize instruction issuing and state uploading.
According to the technical scheme, the synchronous scanning of the light beam two-dimensional scanning module and the light beam traversing module is used as a core of the whole control, and the laser precision micro-hole machining with the controllable taper is finally realized by matching with the longitudinal feeding of a Z axis. The control strategy of the whole system is to control the beam traversing module to rotate according to the set direction and speed, and has no special requirements on the speed precision and stability, so that the high-speed scanning is easier to realize. And then detecting the current running phase of the beam traversing module in real time by a cooperative control system and carrying out vector analysis by combining with the planned track, so as to generate an actual scanning track synchronous with the movement of the beam traversing module, carrying out scanning processing of an XY plane, and finally realizing the whole micropore scanning processing process by matching with the feeding in the Z axis direction.
With reference to the control strategy of the whole cooperative control system, the scanning speed of the laser precision micro-machining is determined by the rotating speed of the beam traversing module, and the scanning in the XY direction is controlled by the scanning track of the beam two-dimensional scanning module. The whole scanning processing scheme has the advantages that the structure of the system is greatly simplified compared with a common optical wedge type light beam scanning system, so that the system has the advantages of high precision, small volume and convenience in maintenance, and the functions of special-shaped holes and controllable taper can be realized. The special synchronous control method well solves the problem of synchronous motion control between large-difference mechanical systems, improves the synchronous precision and eliminates the accumulated error.
The working principle is as follows: when the system starts scanning processing, firstly, a laser module is controlled to realize laser opening and initial power setting according to an upper instruction, and a beam traversing module is driven to move in a speed direction set by the upper instruction; in the motion process, the cooperative control system receives the synchronous feedback position of the beam traversing module in real time, performs vector analysis according to the current real-time phase of the beam traversing module and the planning track instruction of the beam two-dimensional scanning module, and generates a signal for actually controlling the beam two-dimensional scanning module. After each layer of scanning is finished, the driving system of the light beam two-dimensional scanning module communicates with the cooperative control system through related handshake signals to perform feeding motion in the Z-axis direction of the whole system, so that the whole scanning processing is realized.
Example 2
According to another aspect of the embodiments of the present application, there is provided a beam scanning method using any one of the above-mentioned beam scanning systems, including the steps of:
A. the cooperative control system drives the beam traversing module to rotate according to a set speed to transversely translate the incident laser beam according to the input scanning track;
B. detecting the current phase of the beam traversing module in real time;
C. vector analysis is carried out on the current phase of the beam traversing module and a preset scanning track of the beam two-dimensional scanning module, so that an actual scanning control track of the beam two-dimensional scanning module in the X direction and the Y direction is generated;
D. and driving the light beam two-dimensional scanning module to synchronously move with the light beam traversing module according to the actual scanning track, and controlling the laser beam to sequentially pass through the light beam two-dimensional scanning module, the light beam traversing module and the focusing mirror to process micropores on the XY two-dimensional plane.
Preferably, referring specifically to fig. 2, taking the example of machining the strip-shaped holes as an illustration, steps a-D specifically include:
A1. the cooperative control system controls the beam traversing module to rotate at a high speed (generally at a uniform speed);
B1. the cooperative control system detects the phase of the beam traversing module in real time through a feedback sensor such as a strain gauge carried by the beam traversing module;
C1. the cooperative control system analyzes scanning track points of the light beam two-dimensional scanning module at the moment according to the real-time phase of the light beam traversing module and the same principle of the phase by referring to the scanning track of the preset light beam two-dimensional scanning module, and calculates the actual scanning track of the light beam two-dimensional scanning module in the X and Y directions according to the scanning track points;
D1. according to the actual scanning track of the light beam two-dimensional scanning module in the X and Y directions, a corresponding control signal is output to an X and Y axis control channel of a light beam two-dimensional scanning module driving system, the X and Y axes of the light beam two-dimensional scanning module are controlled to synchronously move with the light beam traversing module according to the actual scanning track, and a laser beam is controlled to sequentially pass through the light beam two-dimensional scanning module, the light beam traversing module and the focusing mirror to process micropores on an XY two-dimensional plane.
Preferably, the beam scanning method further includes: and controlling the laser module to correspondingly adjust the incident laser parameters according to the result of the vector analysis. The vector analysis can be carried out, meanwhile, the laser parameters closely related to the laser processing can be synchronously subjected to the association regulation and control combined processing technology, and different power is adopted at different phase positions of the processing outline, so that the micropore processing with higher quality is realized.
The whole method comprises the following control steps:
firstly, parameters such as the three-dimensional morphology of scanning processing, scanning speed and the like are set by upper software.
Then, the scanning process is started.
And then, the whole system starts to process according to a designed processing mode, and the real-time processing state is uploaded to an upper computer, namely an upper control display system.
Finally, after finishing the processing, the upper computer displays the processing end state and waits for the next processing start signal.
The application can improve the scanning speed of laser processing by utilizing the high response characteristic of the light beam two-dimensional scanning module, in particular to the scanning speed of processing the special-shaped holes, and improves the processing efficiency. Compared with the prior art, the application has the beneficial effects that:
1. the processing of typical special-shaped appearance and taper controllable micro holes can be realized.
2. The scanning processing efficiency is improved. As the light beam two-dimensional scanning module has a light structure and quick response, the typical round hole processing speed is more than or equal to 18000rpm.
3. The structure is simplified, and the maintenance period of the product system is improved. The application has simple structure, so that the maintainability is greatly improved.
4. Because the mechanical characteristics of the two-dimensional scanning module and the transverse scanning module are large, the two-dimensional scanning module is light in structure and high in response bandwidth, the transverse scanning module is heavy in relative structure and low in response bandwidth, synchronous motion of the two-dimensional scanning module and the transverse scanning module is difficult to realize by a synchronous control method based on track control, and the transverse scanning module does not have the capability of eliminating error accumulation. The synchronous control scheme adopting vector analysis solves the synchronous control difficulty caused by large mechanical characteristic difference, can eliminate accumulated errors and better ensures the long-term synchronous precision.
The foregoing embodiment numbers of the present application are merely for the purpose of description, and do not represent the advantages or disadvantages of the embodiments.
In the foregoing embodiments of the present application, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
In the several embodiments provided in the present application, it should be understood that the disclosed technology may be implemented in other manners. The above-described embodiments of the apparatus are merely exemplary, and the division of units may be a logic function division, and there may be another division manner in actual implementation, for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some interfaces, units or modules, or may be in electrical or other forms.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The foregoing is merely a preferred embodiment of the present application and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present application, which are intended to be comprehended within the scope of the present application.
Claims (7)
1. A beam scanning system for laser micro-machining comprising a laser module emitting a laser beam, further comprising:
the light beam two-dimensional scanning module is used for scanning the incident laser beam;
the beam traversing module is used for transversely translating an incident laser beam;
a beam two-dimensional scanning module driving system configured to drive the beam two-dimensional scanning module;
a beam traversing module driving system configured to drive the beam traversing module;
a focusing mirror;
the cooperative control system is respectively and electrically connected with the laser module, the light beam scanning module driving system and the light beam traversing module driving system, and is used for controlling an incident laser beam to sequentially pass through the light beam two-dimensional scanning module, the light beam traversing module and the focusing mirror and then carry out micropore processing on an XY two-dimensional plane;
the cooperative control system detects the current phase of the beam traversing module in real time, receives a phase signal, performs vector analysis by referring to a preset scanning track of the beam two-dimensional scanning module based on the current phase of the beam traversing module, keeps the phases of the two-dimensional scanning module and the beam traversing module identical, generates an actual scanning track of the beam two-dimensional scanning module in the X direction and the Y direction, generates an actual driving signal, and sends the actual driving signal to the beam two-dimensional scanning module to drive the beam two-dimensional scanning module to synchronously move with the beam traversing module according to the actual scanning track, so as to finish a scanning processing process meeting preset input.
2. The beam scanning system of claim 1, wherein the cooperative control system is further configured to control the laser module to correspondingly adjust the laser parameters based on a result of the vector resolution.
3. The beam scanning system of claim 1, further comprising:
and the upper control display system is configured to provide a human-computer interaction interface and perform two-way communication with the cooperative control system.
4. The beam scanning system of claim 1, further comprising an optical path system for adjusting the optical path.
5. A beam scanning method using the beam scanning system according to any one of claims 1 to 4, comprising the steps of:
A. the driving beam traversing module rotates according to a set speed to transversely translate the incident laser beam;
B. detecting the current phase of the beam traversing module in real time;
C. vector analysis is carried out on a scanning track of a preset light beam two-dimensional scanning module by combining the current phase of the light beam traversing module, and an actual scanning track of the light beam two-dimensional scanning module is generated;
D. and driving the light beam two-dimensional scanning module to synchronously move with the light beam traversing module according to an actual scanning track, and controlling a laser beam to sequentially pass through the light beam two-dimensional scanning module, the light beam traversing module and the focusing mirror to process micropores on the XY two-dimensional plane.
6. The method of claim 5, wherein steps B-D specifically include:
B1. detecting the phase of the beam traversing module in real time through a feedback sensor of the beam traversing module;
C1. analyzing scanning track points of the light beam two-dimensional scanning module at the moment according to the real-time phase of the light beam traversing module and the same principle of the phase by referring to the scanning track of the preset light beam two-dimensional scanning module, and calculating the actual scanning track of the light beam two-dimensional scanning module in the X and Y directions according to the scanning track points;
D1. and outputting corresponding control signals to X and Y axis control channels of the driving system of the light beam two-dimensional scanning module according to the actual scanning tracks of the light beam two-dimensional scanning module in the X and Y directions, and controlling the X and Y axes of the light beam two-dimensional scanning module to synchronously move with the light beam traversing module according to the actual scanning tracks, so that a laser beam sequentially passes through the light beam two-dimensional scanning module, the light beam traversing module and the focusing lens and then carries out micropore processing on an XY two-dimensional plane.
7. The beam scanning method according to claim 5, characterized in that the beam scanning method further comprises: and the cooperative control system controls the laser module to correspondingly adjust the parameters of the emitted laser beam according to the result of vector analysis.
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| CN110695523B (en) * | 2019-06-19 | 2021-01-15 | 西安中科微精光子制造科技有限公司 | Laser scanning device |
| CN110977153B (en) * | 2019-11-13 | 2020-12-25 | 中国科学院西安光学精密机械研究所 | Control method of spiral scanning laser processing head |
| CN111001928B (en) * | 2019-12-24 | 2020-09-25 | 西安中科微精光子制造科技有限公司 | Light beam scanning device for laser micropore processing |
| CN112264722A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for thin-wall parts |
| CN112264723A (en) * | 2020-10-16 | 2021-01-26 | 西安中科微精光子制造科技有限公司 | Laser micropore machining equipment and machining method suitable for small-sized complex curved surface part |
| CN115055842B (en) * | 2022-06-09 | 2024-02-27 | 中国工程物理研究院激光聚变研究中心 | Laser drilling scanning control system |
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