200526324 (1) 九、發明說明 【發明所屬之技術領域】 本發明係有關用於在基板面上之特定位置，或特定圖 案（pattern )上塗敷電糊之電糊塗敷機及塗敷方法。 【先前技術】 先前，在構成液晶面板之一邊基板塗敷電糊（黏著劑 )以與另一邊之基板黏合之電糊塗敷機有如特開2 0 〇 3 _ 2 6 605號公報所揭示，在塗敷四角形之圖案（1^&1^)角 部時，係以測定基板與噴嘴之相對距離之距離計測定振動 ’藉由事先測定振動之發生部與該振盪模式（oscilUfion mode)，並且在實際上塗敷電糊時，在該振盪發生位置 發生反相之振盪圖案以抑制振盪之發生。 可是，基板尺寸因爲大型化超過1 m X 1 m，要將載置 基板之台面（table)移動至ΧΥ0方向時，會增加移動至 該ΧΥΘ方向之ΧΥΘ台之重量。因此，要以高速塗敷電糊 圖案（paste pattern )時，由於台操作之關係，在裝置各 部分發生XYZ方向之振盪，不容易將電糊圖案均勻塗敷成 企望之形狀。另外，要移動噴嘴方面以代替X Υ Θ台面時 ，也必須移動設置有噴嘴之門形框架部，若基板尺寸大型 化時，該門形框架部之重量也增加，在移動時，裝置整體 發生振盪，而發生與移動台面時相同之問題。 【發明內容】 (2) 200526324 因此，本發明之目的在提供一種縱使基板變大也不致 於擴大裝置之佔有面積，且可以抑制台面等所發生之振盪 而以高速度而高精確度形成企望形狀之電糊圖案之電糊塗 敷機。 爲達成上述目的，構造上具備收容電糊之電糊收容筒 ，用於排出電糊收容筒內之電糊之噴嘴，載置基板俾與噴 嘴之排出口面對之台面，以及用於變化噴嘴與台面相對之 關係位置之驅動部；而且設置由排出口在基板表面形成四 角形之電糊圖案時，在角部開始時，使噴嘴與台面之相對 速度分2階段變化之速度控制手段，以及依照速度變化將 電糊之排出壓切換爲兩段之兩個調壓手段。 要描繪四角形之電糊圖案時，在塗敷噴嘴與基板之相 對速度急劇變化之角部時，可以藉使相對速度分兩段變化 ’並在該變化之同時，將電糊之排出壓切換成兩段以抑制 速度之劇變並抑制其伴隨之振盪之發生。藉由變化伴隨速 度變化之電糊之塗敷量即可進行適當之塗敷量，描繪高精 確度之電糊圖案並有防止生產節拍時間（Tact Time )降 低之效果。 【實施方式】 以下，利用圖式說明本發明之實施例。 圖]爲表示本發明之電糊塗敷機之一實施例之斜視圖 。圖2爲表示塗敷頭8 0 a之擴大圖。 架台1上設有多個梁2 a、2 b之一使Y軸方向之架台間之 (3) 200526324 間隔成可變狀態，俾使用於塗敷電糊之塗敷頭80a至8 Of相 面對。另外，該梁2a、2b具備塗敷頭X軸移動機構（兼做 X軸方向間隔調整）。亦即，雖未具體圖示，在梁2a、2b 之每一塗敷頭設有線性馬達8 a至8 f俾可以移動至每一塗敷 頭。如圖2所示，塗敷頭8 0 a之線性馬達8 a至8 f上設有Z軸 移動台支撐托架81a至8 If。支撐托架81a至81f上設有Z軸 移動台9a至9f與Z軸伺服馬達（servo motor) 10a至l〇f° 另外，設置於Z軸移動台9a至9f上之支撐構件91a至91 f設 置有距離計1 6 a至1 6 f，其上方設有電糊收容筒（s y r i n g e ) 13 a至13 f與噴嘴支撐台14a至14f成可交換狀態（拆卸自如 )。另外，與電糊收容筒並排設有具有可照明光源之影像 識別攝影機15a至15f。分別設置於Z軸移動台9a至9f之距 離計，電糊收容筒，影像識別攝影機係由Z軸伺服馬達1 Oa 至I 〇f移動於Z軸方向（上下）並可以調整與基板7之間隔 〇 在本實施例中，梁2b之兩端下部設有用於將梁2b 移動於Y軸方向之間隔（Y軸方向）調整用之線性馬達4 a 、4 b俾在線性軌道3 a、3 b上移動。線性軌道3 a、3 b係固定 於架台1上面。另外，本實施例中，梁2 a係在架台1之γ軸 方向之一端側固定於支撑台3 c、3 d上。如上述，可將梁2 a 設成固定，惟也可以將線性馬達與線性軌道配置成梁2 a可 以移動於Y軸方向，俾使粱2a與梁2b協調其間隔而移動。 另外，在架台]之上部設有將台面移動至Y軸方向之 台面移動機構6。在該台面移動機構6上面設有載置基板7 (4) 200526324 台面之基板保持機構5。 在上述實施例中，對向設置之多個塗敷頭之各零件編 號爲避免繁雜，在說明中於各部分之編號添加a至f各字。 在架台1之下部，設有主控制部1 7 a，副控制部]7 b， 外部記憶裝置之硬碟1 7 c，以及磁片1 7 d，而分別以信號電 纜1 7e連接。另外，由控制部1 7a以信號電纜另設監視器 17f與鍵盤17g。 主控制部1 7a如圖4所示，係用於控制驅動上述各機構 之線性馬達4 a m、4 b m、8 m a、8 m f，以及移動台面之伺服 馬達6 m。副控制器1 7 b係用控制驅動Z軸移動台面之伺服 馬達l〇a至10f。另外，各種處理資料被由鍵盤17g輸入， 而以影像識別攝影機I 5 a至1 5 f所捕捉之影像或主控制部 I 7 a之處理狀況被顯示於監視器1 7 f。另外，由鍵盤所輸入 之各種資料被記憶保管於外部記憶裝置之硬碟]7 c或磁片 1 7 d等之記憶媒體中。 此外，在圖1雖未圖示，惟如圖4所示，在負壓源2 2 v 或正壓源23p連接有塗敷頭之數目之負壓調節器22a、22f ，以及正壓調節器23a至23f以及閥單元243至2打做爲空壓 電路。 圖3爲將圖1之電糊收谷1¾ 13a與距離計i6a之部分擴大 表示之斜視圖。 在電糊收容同1 3 a之下邰設有噴嘴支撐亘]4 a，噴嘴 ]3 n a設成由該處突出於距離計]6 a側。距離計1 6 a設成可以 (5) 200526324 上面）之距離。亦即，在距離計1 6 a之框體內設有發光元 件，而由該發光元件放射出來之雷射光L在基板7之計測點 反射，該反射光係以受光元件受光。 此外，在基板7上之雷射光之計測點S與噴嘴1 3na之正 下位置在基板7上僅偏差些許距離，但是此些許距離之偏 差在基板7 表面之起伏上沒有差，因此，在距離1 6 a之計 測結果與由噴嘴13na之前端部到基板7之表面（上面）之 距離之間幾乎沒有差。 因此，依據該距離計1 6a之計測結果進行控制，即可 保持連同基板7表面之起伏（凹凸），由噴嘴13na之前端 部到基板7之表面（上面）之距離（間隔）於固定。 如此一來，由噴嘴1 3 a之前端部到基板7之表面之距離 可以保持固定，且由噴嘴1 3 n a排出之每單位時間之電糊量 被保持於等量，而描繪於基板7上之電糊圖案之寬度與厚 度成爲固定。 其次’要說明本實施例之控制方法。 圖4爲表示圖1所示之主控制部等之控制系統之方塊線 圖。 在主控制部17a中，微電腦17aa透過資料通信匯流排 17ac連接到馬達控制器17ab，外界介面17ad，影像識別 裝置17ae等。另外，馬達控制器]7ab上分別連接有用於驅 動各塗敷頭之X軸線性馬達用驅動器〗7 a f，用於調整兩個 '梁2 a ' 2 b間之間隔（分別設置於梁2 a、2 b之塗敷頭之間隔 )之Y軸線性馬達用驅動器丨7 a g、1 7 a h，以及台面用Y軸 (6) 200526324 馬達用驅動器1 7 a i。 在各X軸線性馬達用驅動器1 7af連接有用於移動各塗 敷頭於X軸方向之線性馬達8 m a至8 m f。在Y軸線性馬達用 驅動器1 7ag、1 7ah連接有γ軸線性馬達4ma、4mb。此外， 在台面用Y軸線性馬達用驅動器連接有伺服馬達6 m。 影像識別裝置1 7ae連接有影像識別攝影機1 5 a至1 5 f 以處理由攝影機送來之影像信號並進行基準標誌位置等之 識別處理。另外，在外界介面1 7 a d連接有副控制部1 7 b與 調整器22a至22f，23a至23f，以及閥單元24a至24f。 另外’雖未圖示，但在微電腦1 7aa具備用於儲存主運 算部或進行後面所述之塗敷描繪之處理程式的r 0M，用於 儲存主運算部之處理結果或來自外部介面i 7 ad與馬達控制 器]7 a b之資料的R a Μ，以及與外界介面1 7 a d或馬達控制器 ]7 at進行資料交接之輸出入部。 此外，各馬達8 m a至8 ni f、4 m b、6 m中內裝有用於檢測 位置之線性標度（1 i n e a r s c a】e )以及用於檢測旋轉量之編 碼器（e n c o d e r )，其檢測結果回授至各軸之驅動器} 7 f至 以進行位置控制。 圖5圖示副控制部之方塊線圖。 在圖中，微電腦17ba藉由資料通信匯流排]7bc連接 有馬達控制器1 7 b b或外界介面1 7 b d。另外，馬達控制器 1 7 b b連接有Z軸馬達用驅動器1 7 b c。Z軸馬達用驅動器 1 7 b e分別連接有設置於各塗敷頭之z軸馬達1 〇 a至〗〇 f。另 外，在各Z軸馬達設有用於計測旋轉量之編碼器。在外界 -10- (7) 200526324 介面17bd 連接有設置於各塗敷頭之距離計16a至]6f，以 及主控制部1 7 a之外界介面1 7 a d。 另外，雖然未圖示，微電腦1 7ba具備用於儲存主運算 部或用於控制後面所述之塗敷描繪對之噴嘴1 3 n a之高度之 處理程式的ROM，用於儲主運算部之處理結果或來自外界 介面1 7bd或馬達控制器1 7bb之輸入資料之RAM，或與外界 介面bd或馬達控制器17bb進行資料交接之輸出入部。來自 Z軸馬達l〇a至i〇f所具備之編碼器之檢測結果被回授至z軸 驅動器be以進行位置控制。 在主控制部17a與副控制部17b聯合控制下，各馬達 8ma至8mf、4ma、6m、1 0 a至1 0 f根據鍵盤1 7 a所輸入而儲 存於微電腦17aa之RAM之資料移動旋轉。藉此，可以將保 持於基板保持機構5之基板7在Y軸方向移動任何距離，且 藉由將噴嘴部上下移動之Z軸移動台9 a至9 f將被支撐於粱 2a、2b之噴嘴13na至13nf在X軸方向移動任何距離。在移 動於該X軸與Y軸方向當中，設定於電糊收容筒]3 a至I 3 f 中之氣壓被繼續施加，並由噴嘴1 3 n a至1 3 n f之前端部之排 出口排出電糊，而在基板7上形成企望之電糊圖形。 當噴嘴至]3 nf水平移動於X軸方向時，距離計16a 至1 6 f測定噴嘴]3 n a至1 3 n f與基板7之間隔，並控制Z軸移 動台9a至9f之上下移動。 接著’在圖6表示本實施例之裝置之操作流程圖。另 外，在本實施例中，如圖1所示，利用6個塗敷頭全部在基 板上一次描繪6個電糊圖案者。但是，僅使用任意之塗敷 -11 - (8) 200526324 頭可以在一個基板上描繪一個電糊圖案，自不待言。 在圖6中一輸入電源（步驟]〇 〇 )，首先執行塗敷機之 起始設定（步驟2 0 0 )，而在此起始設定工程中，除了驅 動圖1之各移動用馬達及Z軸移動台9之外，另外，將基板 保持機構5移動至Y方面，並將各別之部位定位於特定之 基準位置。亦即，除了將兩梁之間隔（Y軸方向間隔）設 定於特定之間隔之外，並將一梁上之噴嘴間隔（X軸方向 間隔）定位於特定之間隔。另外，並將噴嘴1 3na (圖3 ) 置設定於特定之原點位置俾使電糊排出口位於開始電糊塗 敷之位置（即電糊塗敷起始點）。此外，也應設定電糊圖 案資料或基板位置資料，電糊塗敷結束位置資料等。 此種資料之輸入係由鍵盤1 7 g進行，所輸入之資料如 上所述，被儲存於內裝於微電腦17aa之RAM中。 此起始工程（步騾2 0 0 ) —結束，接將基板7載置於基 板保持機構5上面（步驟3 0 0 )。基板之保持可以利用設置 於基板保持機構面之多個吸口供應負壓以吸引吸住之方法 ，或以靜止吸著機構吸附之方法以及機械式地夾入基板保 持之方法等。 接著，進行基板預備定位（步驟4 0 0 )。在該處理中 ，利用設置於影像識別攝影機1 5 a至1 5 f之中心之攝影機拍 攝設置於載置基板保持機構5之基板7上之定位用標誌，以 影像處理求得定位用標誌之重心位置並檢測基板7之β方 向之傾斜。然後依照檢測出之傾斜驅動伺服馬達3 0 m a至 3 0 m f，並移動塗敷頭於Y軸方向以修正該0方向之傾斜。 -12 - (9) 200526324 藉由上述，結束基板預備定位之處理（步驟4 0 0 )。 然後，執行電糊圖案描繪處理（步驟5 0 0 )。 在本處理中，將噴嘴13na至]3 nf之排出口移動至基板 7之塗敷起始位置以進行噴嘴位置之比較與調整。然後， 操作伺服馬達至1 Of及Z軸移動台9a至9f俾將各噴嘴 】3na至1 3nf之高度設定於電糊塗敷之高度。 再依據噴嘴之起始移動距離資料’將噴嘴Una至Unf 下降起始移動距離部分。後續操作中’利用距離計1 63至 1 6 f測定基板7之表面局度，並確認噴卩角1 J n a至1 J n f則纟而疋 否設定於描繪電糊圖案之高度。如未能設定於描繪高度時 ，即使噴嘴1 3 n a至1 3 n f移動微小距離’重複將上述之基 板7之表面測定與噴嘴13na至1311纟之微小距離下降之操作 俾將噴嘴1 3 n a至1 3 n f前端設定於電糊圖案之描鉍局度。 以上處理一結束，即依據儲存於微電腦1 7 a a之R A M之 電糊圖案資料與Θ方向之傾斜修正驅動線性馬達 至8mf。藉此，噴嘴13na至]3nf之電糊排出口即以面對基 板之狀態，依照電糊圖案資料，噴嘴1 7 η 3至1 7 Π丨與基板分 別一邊移動至χγ方向，一邊施加設定於電糊收容筒中之 氣壓，俾由電糊排出口排出電糊。如此一來，對基板7之 電糊圖案之描繪即告開始。 然後，如上所述，與此同時’藉由距離計]6a至】^在 副控制部17b之微電腦輸入各噴嘴13以至13nf之電糊 排出口與基板7表面之間隔之實測資料。微電腦1 7ba依據 被輸入之資料求得基板7表面之起伏（waviness)，並依 -13- (10) 200526324 求彳9之起伏’驅動伺服馬達1 o a至1 0 f以執行保持由基板] 之表面到噴嘴之排出口之高度於固定之控制。藉此，即可 描繪企望塗敷量之電糊圖案。 接著，要利用圖7至圖]〇詳細說明角部之電糊塗敷方 法。 首先’在圖9表不要描繪之圖案形狀之一例。要以高 速塗敷描繪圖中所示之四角形電糊圖案時，在角部（C之 部分）’噴嘴與基板之相對移動速度變化很大。因此，在 裝置內之台面或噴嘴部等會發生XYZ方向之振盪。若該振 盪之振幅較大時，即不容易將電糊圖案描繪成企望之形狀 。因此’爲獲得企望形狀之電糊圖案，接下去說明抑制振 盪發生之電糊塗敷方法。另外，在此以雙重圓部分爲起點 描繪電糊圖案。此外，如圖所示，角部呈圓弧形狀。 電糊圖案內之角部C之塗敷描繪中，對於直線部分之 相對移動速度（電糊排出口與基板之相對移動速度），一 邊減低在角部之開始部分之相對速度，一邊相對地減輕塗 敷壓力’並修正由於減速而引起之塗敷量之增加。接著， 於以設定速度通過角部後，一邊加速，一邊增強塗敷壓力 以修正塗敷量。在角結束部控制成直線塗敷之塗敷速度與 壓力°角起始部分與角結束部分之判定係利用線性標度（ linear scale)測定塗敷頭之移動距離與基板保持機構之移 動距離。 茲將實現上述之控制之空壓電路圖示於圖7。 另外，在本實施例之構造中，描繪成開始時是在X軸 -14 - (11) 200526324 方向，以特定之速度一邊移動塗敷頭一邊由噴嘴排出電糊 。當噴嘴到達角部之起始點時，即將X軸方向之移動速度 減速至第1段。與其同時，將電糊之排出壓減小。X軸方 向之第1段減速結束時，X軸方向即進行第2段之減速（停 止）。與其同時，開始將保持基板之基板保持機構5向Y 軸方向之第1段之加速。此間之電糊排出量是以X軸方向 之第1段減速時所設定之壓力（圖8之壓力2 )繼續排出。 當Y軸方向之加速成爲第1段之加速狀態，而X軸之減速結 束（走出角部之狀態）時，即進行第2段之加速，俾使基 板保持機構之Y軸方向之移動速度成爲正常速度（直線部 分之速度）。此時，排出壓回復到正常之壓（圖8之壓力1 )。藉此，將噴嘴與基板之相對移動速度切換於兩段，同 時將電糊之排出壓切換於兩段，即可抑制隨著速度變化而 發生之振盪，且將電糊之排出量保持固定。另外，上面是 以第1角部爲例來說明，但是第2角部僅爲XY之驅動相 反而已，基本上操作法相同。 除了第1壓力調整器23 a至23 f之外，另設用於設定角 部之壓力之第2壓力調整器50a至50f，另外在高速塗敷控 制閥2 4 a至2 4 f之正前設定用於切換第1及第2壓力調整器之 壓力之正壓高速切換閥5 1 a至5】f ° 茲以圖8之操作計時圖說明該等操作法。 在此要說明之操作首先爲用於描繪圖9所說明之四角 形之電糊圖案時之操作。一開始’壓力切換閥5 1 a至5 1 f被 設定成向設定有直接圖案之塗敷壓之第]壓調整器（壓力] - 15- (12) 200526324 )一邊輸出。在此設定狀態下，開始先前說明之電糊圖^ 之塗敷。爲將四角形圖案塗敷描繪成逆時鐘方向，首先# X軸方向開始噴嘴與基板之相對位置之移動。然後，依言受 定之資料進行描繪圖案之移動而到達起始之角部C。 在該角部始部之X軸方向之移動以2段之減速而停& ，Y軸方向之移動以2階段加速。以第1階段之減速、加速 時之角部之相對速度假設爲裝置之振盪少發生，並可以^ 敷描繪企望之電糊圖案之速度。同時實施塗敷壓力之切_ 做爲平行處理。亦即，控制由線性圖案之第1 塗敷黯力 切換至角部之塗敷壓力之第2塗敷壓力。藉此，降低排 出電糊收容筒（syringe)中之電糊之壓力而設定於角部$ 排出壓力。接著，在角部之結束部，X軸方向之移動停t ，而Y軸方向之移動速度被加速到線性圖案之塗敷速度。 又同時被執行壓力之切換而設定於直線部之塗敷壓力之^ 1 塗敷壓力。 開始塗敷時之噴嘴高度hg被控制成可保持其狀態。 藉由進行上述之控制，如圖I 0所示，配合X Y軸方向 之合成速度之變化調節塗敷壓力，即可不增加在減速之g 部分之塗敷量而調整到容許範圍（5之範圍內。 上述之空壓電路在構造上設置2種正壓調節用之壓力 調節器，並在該2種壓力調節器23a至23f、50a至50f與高 速塗敷控制閥2 4 a至2 4 f之間設置壓力切換閥5 1 a至5 1 f。惟 也可以如圖1 1所示，設置將高速塗敷控制閥與壓力切換閥 一體化之塗敷控制閥60a至60f以取代上述構造。另外，若 - 16- (13) 200526324 電糊收容筒容積過大時，如圖1 1所示，因爲減壓費時，也 可以將局速之排氣閥70a至7〇f設置於收谷1¾上部之配受中 途。圖1 2表示使用圖]1之構造之空壓電路時之計時圖（ Timing Chart ) 〇 在本實施例中，與圖8之計時圖之不同點是構成由第1 壓力調節器切換至第2壓力調節器時，可以將排氣閥7〇a至 7 0 f開放以快速減壓壓力。 電糊圖案之描繪如上述，惟噴嘴13η. a至13nf之電糊排 出口依據基板上之上述電糊圖案資料所決定是否描繪圖案 之終端之判斷，若非末端，則再回到基板表面之起伏測定 處理，接著，重複上述之塗敷操作，繼續處理到電糊圖案 形成至描繪圖案之末端。 到達描繪圖案之末端時，即驅動伺服馬達1 0以揚升噴 嘴.1 3 n a至1 3 n f而結束該電糊圖案之描繪工程（步驟5 0 0 ) 〇 接著，進行基板搬出處理（步驟6 0 0 )以解除基板保 持，並將描繪有電糊之基板搬出裝置之外。以上之工程一 結束，接著判定是否有以相同圖案描繪之基板（步驟7 0 0 )，沒有時，即停止裝置（步驟8 0 0 )。若有，即回到基 板載置處理（步驟3 00 )以重複相同之工程。 如上所述’在本實施例中’在塗敷會對裝置發生大振 盪之角部時，藉由延緩基板與噴嘴之相對移動速度，並將 塗敷壓切換到高速，即可抑制裝置發生振盪，並描繪恰當 塗敷量之電糊圖案。 -17- (14) 200526324 另外，在上述實施例中，在構造上，僅使保持基板之 基板保持機構移動至Y軸方向，而X軸方向係藉由移動塗 敷頭塗敷基板面，惟如果不用多個塗敷頭而分別在每一支 _ 梁配置一個塗敷頭時，因爲同一支梁上沒有塗敷頭，也可 以將基板保持機構側移動至XY方向。但是，要將基板保 持機構移動至χγ方向而在基板上塗敷大面積時，必須使 各個方向（基板之寬度與長度方向）可以移動基板之寬度 或長度之倍數之距離。 【圖式簡單說明】 圖1爲本發明之電糊塗敷機之一實施例之斜視圖。 圖2爲塗敷頭部之擴大圖。 圖3爲塗敷頭之噴嘴前端部與基板間距離之測定狀況 之說明圖。 圖4爲表示圖1之主控制部之系統之方塊圖。 圖5爲表示圖1之副控制部之系統之方塊圖。 鲁 圖6爲圖]之裝置中之整體操作之計時圖。 圖7爲空壓電路部之一實施例之構成圖。 圖8爲利用圖7之空壓電路時之操作計時圖。 圖9爲用於說明電糊圖案之描繪狀態之圖。 圖1 〇爲用於說明塗敷角部時之塗敷壓力與相對移動速 度之關係之圖。 圖U爲用於說明空壓電路部之另一構造之圖。 圖1 2爲使用圖].1之空壓電路時之計時圖。 -18- (15) (15)200526324 【主要元件符號說明】 1 架台 2a 梁 3a 線性軌道 3c 支撐台 4 a. 線性馬達 4am^ b m 線性馬達 5 基板保持機構 6 台面移動機構 6 m 伺服馬達 6 m 線性馬達 7 基板 8 m a線性馬達 9 a Z軸移動台面 9 Z軸移動台面 10a Z軸伺服馬達 1 3 a電糊收容筒 1 3na 噴嘴 ]4a支撐台 ]5 a影像識別攝影機 16a距離計 1 7 a主控制部 ]7 b副控制部 -19 - (16)200526324 17c 硬 碟 1 7d 磁 片 1 7e 信 號 電纜 1 7f 監 視 器 1 7g 鍵 盤 ΠΤΤ 1 7 a a 微電腦 1 7 a c 資料通信匯流排 1 7ab 馬達控制器 1 7ad 外界介面 1 7 a e 影像識別裝置 1 7af X軸線性馬達用驅動 1 7 ag Y軸線性馬達用驅動 1 7 a h Y軸線性馬達用驅動: 1 7ai Y軸馬達用驅動器 1 7bb 馬達控制器 1 7bd 外界介面 ]7ba 微電腦 22 v 負 壓 源 22a 負壓調節器 23p 正 壓 源 23 a 正 壓 調節器/壓力調節器 24a 閥 單 元/高速塗布控制閥 3 0 m a 伺服馬達 50a 壓力調節器 -20- (17) (17)200526324 5 1 a 閥 6 0a 塗敷控制閥 7 0a 排氣閥 8 0 a塗敷頭 8 1 a支撐托架 9 1 a支撐構件 C 角部200526324 (1) IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to an electric paste applicator and a coating method for applying an electric paste to a specific position on a substrate surface or a specific pattern. [Prior Art] Previously, an electric paste coating machine for applying an electric paste (adhesive) to a substrate constituting one side of a liquid crystal panel to adhere to a substrate on the other side was disclosed in Japanese Patent Application Laid-Open No. 2 〇3 _ 2 6 605. When applying a quadrilateral pattern (1 ^ & 1 ^) corner, the vibration is measured by a distance meter that measures the relative distance between the substrate and the nozzle. The vibration generator is measured in advance and the oscillation mode (oscilUfion mode), and When the electric paste is actually applied, an inverse oscillation pattern occurs at the oscillation occurrence position to suppress the occurrence of oscillation. However, because the size of the substrate exceeds 1 m X 1 m, moving the table on which the substrate is placed to the XYZ direction will increase the weight of the XYZ table that moves to the XYZ direction. Therefore, when the paste pattern is to be applied at a high speed, due to the operation of the table, oscillations in the XYZ direction occur in various parts of the device, and it is not easy to uniformly apply the paste pattern into a desired shape. In addition, when moving the nozzle side to replace the X Υ Θ table, it is necessary to move the gate-shaped frame portion provided with the nozzle. If the size of the substrate is increased, the weight of the gate-shaped frame portion also increases. Oscillations cause the same problems as when moving the table. [Summary of the Invention] (2) 200526324 Therefore, an object of the present invention is to provide a desired shape with high speed and high accuracy while suppressing oscillations occurring on a table or the like without increasing the area occupied by the device even if the substrate becomes large. Electric paste coating machine for electric paste pattern. In order to achieve the above object, an electric paste containing cylinder for containing electric paste is configured on the structure, a nozzle for discharging the electric paste in the electric paste containing cylinder, a table on which the substrate 俾 and the discharge opening of the nozzle face, and a nozzle for changing the nozzle. The driving part of the position opposite to the table; and when a rectangular electric paste pattern is formed on the substrate surface by the discharge port, at the beginning of the corner, the speed control means that changes the relative speed of the nozzle and the table in two stages, and according to The speed change switches the discharge pressure of the electric paste to two pressure regulating means in two stages. When drawing a quadrangle pattern of electric paste, when coating corners where the relative speed of the nozzle and the substrate changes drastically, the relative speed can be changed in two steps, and at the same time, the discharge pressure of the electric paste can be switched to The two paragraphs are designed to suppress the drastic changes in speed and the accompanying oscillations. By changing the coating amount of the electric paste with a change in speed, an appropriate coating amount can be performed, a highly accurate electric paste pattern can be drawn, and the effect of preventing a decrease in production tact time (Tact Time) can be achieved. [Embodiment] Hereinafter, an embodiment of the present invention will be described using drawings. Figure] is a perspective view showing an embodiment of an electric paste coating machine according to the present invention. Fig. 2 is an enlarged view showing a coating head 80a. One of a plurality of beams 2 a and 2 b is provided on the gantry 1 so that the interval between the gantry members in the Y-axis direction (3) 200526324 is variable, and the coating heads 80a to 8 Of which are used to apply electric paste Correct. In addition, the beams 2a and 2b are provided with an X-axis movement mechanism of the applicator head (also serving as an interval adjustment in the X-axis direction). That is, although not specifically shown, each of the application heads of the beams 2a, 2b is provided with linear motors 8a to 8f 俾, and can be moved to each application head. As shown in Fig. 2, the linear motors 8a to 8f of the coating head 80a are provided with Z-axis moving stage support brackets 81a to 8If. The support brackets 81a to 81f are provided with Z-axis moving tables 9a to 9f and Z-axis servo motors 10a to 10f °. Further, support members 91a to 91f are provided on the Z-axis moving tables 9a to 9f. A distance gauge 16a to 16f is provided, and an electric paste containing cylinder 13a to 13f is provided above the nozzle gauges 14a to 14f in an exchangeable state (removable). In addition, image recognition cameras 15a to 15f having an illuminable light source are provided side by side with the electric paste containing tube. Set on the Z-axis moving tables 9a to 9f, distance gauges, electric paste storage cylinders, image recognition cameras are moved in the Z-axis direction (up and down) by the Z-axis servo motors 10a to 10f and the distance from the substrate 7 can be adjusted 〇 In this embodiment, linear motors 4 a and 4 b for adjusting the interval (Y-axis direction) for moving the beam 2 b in the Y-axis direction are provided at the lower ends of both ends of the beam 2 b. On the linear tracks 3 a and 3 b Move up. The linear rails 3 a and 3 b are fixed on the platform 1. In addition, in this embodiment, the beam 2 a is fixed to the support bases 3 c and 3 d at one end side in the γ-axis direction of the base frame 1. As described above, the beam 2 a can be set to be fixed, but the linear motor and the linear track can also be arranged so that the beam 2 a can be moved in the Y-axis direction, and the beam 2 a and the beam 2 b can be moved in coordination with the interval. Further, a table moving mechanism 6 for moving the table to the Y-axis direction is provided on the upper portion of the table. The substrate moving mechanism 6 is provided with a substrate holding mechanism 5 on which a substrate 7 (4) 200526324 table is placed. In the above embodiment, the parts of the plurality of coating heads arranged oppositely are numbered in order to avoid complication, and the numbers a to f are added to the numbers of the parts in the description. Below the gantry 1, there are a main control unit 17a, a subcontrol unit 7b, a hard disk 17c of an external memory device, and a magnetic disk 17d, which are connected by signal cables 17e respectively. A monitor 17f and a keyboard 17g are separately provided by the control unit 17a with a signal cable. The main control unit 17a is shown in Fig. 4 and is used to control the linear motors 4 a m, 4 b m, 8 m a, 8 m f and the servo motor 6 m of the moving table. The sub-controller 17b is a servo motor 10a to 10f that drives the Z-axis moving table by control. In addition, various processing data are input from the keyboard 17g, and the images captured by the image recognition cameras I 5a to 15f or the processing status of the main control unit I7a are displayed on the monitor 17f. In addition, various data input by the keyboard are stored in a storage medium such as a hard disk of an external memory device] 7 c or a magnetic disk 17 d. In addition, although not shown in FIG. 1, as shown in FIG. 4, the number of negative pressure regulators 22 a and 22 f and the positive pressure regulator are connected to the negative pressure source 2 2 v or the positive pressure source 23 p. 23a to 23f and the valve units 243 to 2 are used as air compressor circuits. Fig. 3 is an oblique view showing an enlarged portion of the electric paste receiving valley 13a and 13a and the distance meter i6a of Fig. 1. Below the electric paste containing same 1 a, there is a nozzle support 亘] 4 a, and the nozzle 3 3 n a is set to protrude from the distance meter 6 a side from there. The distance meter 16a is set to a distance (5) (200526324 or more). That is, a light emitting element is provided in the frame of the distance meter 16a, and the laser light L emitted from the light emitting element is reflected at the measurement point of the substrate 7, and the reflected light is received by the light receiving element. In addition, the measurement point S of the laser light on the substrate 7 and the position directly below the nozzle 13a are only slightly different from each other on the substrate 7, but there is no difference in the undulations on the surface of the substrate 7. There is almost no difference between the measurement result of 16 a and the distance from the front end of the nozzle 13na to the surface (upper surface) of the substrate 7. Therefore, by controlling according to the measurement result of the distance meter 16a, the distance (interval) from the front end of the nozzle 13na to the surface (upper surface) of the substrate 7 can be maintained together with the undulations (concavities and convexities) on the surface of the substrate 7. In this way, the distance from the front end of the nozzle 1 3 a to the surface of the substrate 7 can be kept constant, and the amount of electric paste per unit time discharged by the nozzle 1 3 na is maintained at the same amount, and is drawn on the substrate 7 The width and thickness of the electric paste pattern are fixed. Next, the control method of this embodiment will be described. Fig. 4 is a block diagram showing a control system of a main control unit and the like shown in Fig. 1. In the main control section 17a, the microcomputer 17aa is connected to the motor controller 17ab, the external interface 17ad, the image recognition device 17ae, and the like through the data communication bus 17ac. In addition, the motor controller] 7ab is respectively connected with an X-axis linear motor driver for driving each coating head. 7 af is used to adjust the interval between two 'beams 2 a' 2 b (separately provided on the beam 2 a , 2 b, the distance between the coating heads) Y-axis linear motor driver 7 ag, 1 7 ah, and Y-axis for table (6) 200526324 Motor driver 17 ai. Each of the X-axis linear motor drivers 17af is connected with a linear motor 8 m a to 8 m f for moving each coating head in the X-axis direction. Γ-axis linear motors 4ma and 4mb are connected to the Y-axis linear motor drivers 17g and 17ah. In addition, a servo motor for 6 meters is connected to the Y-axis linear motor driver for the table. The image recognition device 17ae is connected to the image recognition cameras 15a to 15f to process the image signal sent from the camera and perform recognition processing such as a reference mark position. In addition, an external interface 17 a d is connected to a sub-controller 17 b and regulators 22a to 22f, 23a to 23f, and valve units 24a to 24f. In addition, although not shown, the microcomputer 1 7aa is provided with r 0M for storing a main computing unit or a processing program for coating and drawing described later, for storing the processing result of the main computing unit or from an external interface i 7 ad and motor controller] 7 ab of the data R a M, and the input and output part of the data interface with the external interface 17 ad or motor controller] 7 at. In addition, each of the motors 8 ma to 8 ni f, 4 mb, and 6 m is equipped with a linear scale (1 inearsca) e for detecting the position and an encoder for detecting the amount of rotation. The detection results are returned. Drive to each axis} 7 f to position control. FIG. 5 illustrates a block diagram of the sub-control section. In the figure, the microcomputer 17ba is connected to a motor controller 17b b or an external interface 17b d through a data communication bus] 7bc. A motor controller 1 7 b b is connected to a Z-axis motor driver 17 b c. Z-axis motor drivers 17 b e are connected to z-axis motors 10a to 0f provided on each coating head, respectively. In addition, each Z-axis motor is provided with an encoder for measuring the amount of rotation. On the outside -10- (7) 200526324, the interface 17bd is connected with the distance meters 16a to 6f provided at each coating head, and the external interface 17a d of the main control unit 17a. In addition, although not shown, the microcomputer 17ba is provided with a ROM for storing a main processing unit or a processing program for controlling the height of the nozzle 1 3 na of the coating and drawing pair described later, and is used for storing the processing of the main computing unit. The result is either a RAM from the external interface 17bd or the input data of the motor controller 17bb, or an input / output unit that performs data transfer with the external interface bd or the motor controller 17bb. The detection results from the encoders provided in the Z-axis motors 10a to 10f are fed back to the z-axis driver be for position control. Under the joint control of the main control section 17a and the sub-control section 17b, each of the motors 8ma to 8mf, 4ma, 6m, 10a to 10f is stored in the RAM of the microcomputer 17aa according to the input from the keyboard 17a, and is rotated. Thereby, the substrate 7 held by the substrate holding mechanism 5 can be moved by any distance in the Y-axis direction, and the Z-axis moving tables 9 a to 9 f by moving the nozzle portion up and down will be supported by the nozzles of the beams 2 a and 2 b. 13na to 13nf move any distance in the X-axis direction. While moving in the X-axis and Y-axis directions, the air pressure set in the electric paste containing cylinder] 3 a to I 3 f is continuously applied, and electricity is discharged from the discharge port at the front end of the nozzles 1 3 na to 1 3 nf. The desired electric paste pattern is formed on the substrate 7. When the nozzle to] 3 nf moves horizontally in the X-axis direction, the distance meters 16a to 16 f measure the distance between the nozzle] 3 n a to 1 3 n f and the substrate 7 and control the Z-axis moving tables 9a to 9f to move up and down. Next, Fig. 6 shows an operation flowchart of the apparatus of this embodiment. In addition, in this embodiment, as shown in FIG. 1, all of the six coating heads are used to draw six electric paste patterns on the substrate at a time. However, using only any coating -11-(8) 200526324 head can draw an electric paste pattern on a substrate, it goes without saying. As shown in FIG. 6 after an input power source (step) 〇〇), the initial setting of the coater (step 2000) is performed first. In this initial setting process, in addition to driving the moving motors and Z of FIG. 1, In addition to the axis moving stage 9, the substrate holding mechanism 5 is moved to the Y side, and each part is positioned at a specific reference position. That is, in addition to setting the interval between the two beams (the interval in the Y-axis direction) to a specific interval, the nozzle interval on one beam (the interval in the X-axis direction) is positioned at a specific interval. In addition, set the nozzle 1 3na (Figure 3) to a specific origin position so that the electric paste discharge port is located at the position where the electric paste application is started (that is, the starting point of the electric paste application). In addition, you should also set the electrical paste pattern data or substrate position data, and the electrical paste application end position data. The input of such data is performed by the keyboard 17 g. The input data is stored in the RAM built in the microcomputer 17aa as described above. This starting project (step 2 0 0) — ends, and then the substrate 7 is placed on the substrate holding mechanism 5 (step 3 0 0). The substrate can be held by using a plurality of suction ports provided on the substrate holding mechanism surface to supply negative pressure to attract the suction, or by a static suction mechanism to suck and mechanically sandwich the substrate to hold. Next, the substrate preliminary positioning is performed (step 400). In this process, the positioning mark provided on the substrate 7 on which the substrate holding mechanism 5 is mounted is photographed by a camera set at the center of the image recognition cameras 15 a to 15 f, and the center of gravity of the positioning mark is obtained by image processing. Position and detect the tilt in the β direction of the substrate 7. Then, the servo motor is driven from 30 m a to 30 m f according to the detected tilt, and the coating head is moved in the Y-axis direction to correct the tilt in the 0 direction. -12-(9) 200526324 With the above, the processing for substrate preliminary positioning is finished (step 4 0 0). Then, an electric paste pattern drawing process is performed (step 5 0 0). In this process, the discharge ports of the nozzles 13na to 3nf are moved to the coating start position of the substrate 7 to perform comparison and adjustment of the nozzle positions. Then, operate the servo motor to 1 Of and the Z-axis moving tables 9a to 9f 俾 to set the heights of the nozzles 3na to 1nf to the height of the electric paste application. Then, according to the data of the initial moving distance of the nozzle, the starting moving distance of the nozzle Una to Unf is lowered. In the subsequent operations, the distance of the surface of the substrate 7 is measured using the range gauge 1 63 to 16 f, and it is confirmed whether the spray angles 1 J n a to 1 J n f are 纟 and 疋 is not set to the height at which the electric paste pattern is drawn. If it cannot be set to the drawing height, even if the nozzles 1 3 na to 1 3 nf move a small distance ', repeat the operation of measuring the surface of the substrate 7 described above and the minute distance from the nozzles 13na to 1311. The 1 3 nf front end is set to the bismuth localization degree of the electric paste pattern. As soon as the above process is finished, the linear motor is driven to 8mf based on the electrical paste pattern data of R A M stored in the microcomputer 17 a a and the tilt in the Θ direction. As a result, the electrical paste discharge openings of the nozzles 13na to 3nf are facing the substrate. According to the electrical paste pattern data, the nozzles 1 7 η 3 to 1 7 Π 丨 and the substrate are moved to the χγ direction and set at The air pressure in the electric paste containing cylinder is discharged from the electric paste discharge port. In this way, the drawing of the electric paste pattern of the substrate 7 is started. Then, as described above, at the same time, 'by a distance meter] 6a to] ^, the microcomputer of the sub-control unit 17b inputs the measured data of the distance between the electrical paste discharge port of each nozzle 13 to 13nf and the surface of the substrate 7. The microcomputer 1 7ba obtains the waviness on the surface of the substrate 7 according to the input data, and calculates the 9's fluctuation according to -13- (10) 200526324 to drive the servo motor 1 oa to 10 f to perform the holding by the substrate]. The height from the surface to the discharge port of the nozzle is controlled in a fixed way. With this, the electric paste pattern of the desired application amount can be drawn. Next, the electric paste coating method of the corner portion will be described in detail using FIG. 7 to FIG. First, an example of a pattern shape not shown in FIG. 9 is shown. In order to apply a high-speed coating to draw the rectangular electric paste pattern shown in the figure, the relative movement speed of the nozzle and the substrate at the corner (part C) varies greatly. Therefore, oscillations in the XYZ direction occur on the table surface, the nozzle portion, and the like in the device. If the amplitude of the oscillation is large, it is not easy to draw the electric paste pattern into a desired shape. Therefore, in order to obtain an electric paste pattern having a desired shape, an electric paste coating method for suppressing the occurrence of oscillation will be described next. Here, an electric paste pattern is drawn with a double-circle portion as a starting point. In addition, as shown in the figure, the corners have a circular arc shape. In the coating drawing of the corner portion C in the electric paste pattern, the relative movement speed of the linear portion (the relative movement speed of the electric paste discharge port and the substrate) is relatively reduced while reducing the relative speed at the beginning portion of the corner portion. Application pressure 'and correct for increase in application amount due to deceleration. Next, after passing through the corner portion at a set speed, the application pressure was increased while accelerating to correct the application amount. The application speed and pressure of the linear application are controlled at the end of the angle. The determination of the start and end of the angle is made by measuring the moving distance of the coating head and the moving distance of the substrate holding mechanism using a linear scale. The circuit diagram of the air compressor for realizing the above control is shown in FIG. 7. In addition, in the structure of the present embodiment, it is depicted that the electric paste is discharged from the nozzle while moving the coating head at a specific speed in the direction of the X axis -14-(11) 200526324. When the nozzle reaches the starting point of the corner, it decelerates the movement speed in the X-axis direction to the first step. At the same time, the discharge pressure of the electric paste is reduced. When the first step deceleration in the X axis direction is completed, the second step deceleration (stop) is performed in the X axis direction. At the same time, the substrate holding mechanism 5 holding the substrate is accelerated at the first stage in the Y-axis direction. The discharge amount of electric paste during this time is continuously discharged at the pressure set during the first stage of deceleration in the X-axis direction (pressure 2 in Fig. 8). When the acceleration in the Y-axis direction becomes the acceleration state in the first stage, and the deceleration in the X-axis is completed (the state out of the corner), the acceleration in the second stage is performed, so that the Y-axis movement speed of the substrate holding mechanism becomes Normal speed (speed of straight part). At this time, the discharge pressure returns to the normal pressure (pressure 1 in Fig. 8). Therefore, by switching the relative moving speed of the nozzle and the substrate to two stages, and simultaneously switching the discharge pressure of the electric paste to two stages, it is possible to suppress the oscillation that occurs with the speed change and keep the discharge amount of the electric paste fixed. In the above description, the first corner is used as an example, but the second corner is only driven by XY. The operation is basically the same. In addition to the first pressure regulators 23a to 23f, second pressure regulators 50a to 50f for setting the pressure at the corners are provided, and in front of the high-speed coating control valves 2 4a to 2 4f The positive pressure high-speed switching valves 5 1 a to 5 for setting the pressures for switching the pressures of the first and second pressure regulators are described below with reference to the operation timing chart in FIG. 8. The operation to be described here is first the operation for drawing a rectangular electric paste pattern as illustrated in FIG. 9. Initially, the 'pressure switching valves 5 1 a to 5 1 f are set to output to the [pressure regulator] (pressure)-15- (12) 200526324) where the application pressure of the direct pattern is set. In this setting state, the application of the electric paste ^ described above is started. In order to paint the quadrangular pattern in a counterclockwise direction, first, the relative position of the nozzle and the substrate is moved in the X-axis direction. Then, according to the predetermined data, the drawing pattern is moved to reach the initial corner C. The movement in the X-axis direction at the beginning of the corner is stopped by two steps of deceleration and the movement in the Y-axis direction is accelerated by two steps. It is assumed that the relative speed of the corners during the deceleration and acceleration in the first stage is that the oscillation of the device is less likely to occur, and the speed of drawing the desired electric paste pattern can be applied. At the same time, the cutting of the application pressure is performed as a parallel process. That is, the second application pressure is switched from the first application dark force of the linear pattern to the application pressure of the corner. Thereby, the pressure of discharging the electric paste in the electric paste accommodating cylinder (syringe) is reduced to set the discharge pressure at the corner. Next, at the end of the corner, the movement in the X-axis direction stops, and the movement speed in the Y-axis direction is accelerated to the application speed of the linear pattern. At the same time, the application pressure is set to ^ 1 the application pressure which is set in the linear portion by switching the execution pressure. The nozzle height hg at the start of coating is controlled to maintain its state. By performing the above-mentioned control, as shown in Fig. I0, the coating pressure is adjusted in accordance with the change in the combined speed in the XY axis direction, so that the coating amount in the g portion of the deceleration can be adjusted to an allowable range (within 5) The above-mentioned air pressure circuit is provided with two types of pressure regulators for positive pressure adjustment in the structure, and the two types of pressure regulators 23a to 23f, 50a to 50f and high-speed coating control valves 2 4 a to 2 4 f Pressure switching valves 5 1 a to 5 1 f are provided therebetween. However, as shown in FIG. 11, coating control valves 60 a to 60 f integrating a high-speed coating control valve and a pressure switching valve may be provided instead of the above-mentioned structure. In addition, if-16- (13) 200526324 electric paste container is too large, as shown in Figure 11, because decompression takes time, you can also set the local speed exhaust valves 70a to 70f on the upper part of the valley 1¾. The matching is halfway through. Figure 12 shows the timing chart (Timing Chart) when the air compressor circuit of Figure 1 is used. ○ In this embodiment, the difference from the timing chart of Figure 8 is that it is constituted by the first pressure. When the regulator is switched to the second pressure regulator, the exhaust valves 70a to 70f can be opened for rapid pressure reduction. Pressure. The drawing of the electric paste pattern is as described above, but the electric paste discharge outlets of the nozzles 13η. A to 13nf are determined according to the above electric paste pattern data on the substrate. The fluctuation measurement process is then repeated, and the above-mentioned coating operation is repeated, and the process is continued until the electric paste pattern is formed to the end of the drawing pattern. When the end of the drawing pattern is reached, the servo motor 10 is driven to lift the nozzle. 1 3 na to 1 3 nf to end the drawing process of the electric paste pattern (step 500). Then, the substrate carrying out process (step 600) is performed to release the substrate holding, and the substrate on which the electric paste is drawn is removed from the device. Once the project is completed, it is then determined whether there is a substrate drawn in the same pattern (step 7 0 0), if not, the device is stopped (step 8 0 0). If there is, it returns to the substrate placement process (step 3 00) to Repeat the same process. As described above, 'in this embodiment', when the corner where the coating oscillates greatly to the device, the relative moving speed of the substrate and the nozzle is delayed, and the coating is cut. At high speeds, it is possible to suppress the device from oscillating and draw an electric paste pattern with an appropriate coating amount. -17- (14) 200526324 In addition, in the above embodiment, only the substrate holding mechanism that holds the substrate is moved to the structure The Y-axis direction and the X-axis direction are used to coat the substrate surface by moving the coating head. However, if multiple coating heads are not used and one coating head is configured for each beam, there is no coating on the same beam. The head can also move the substrate holding mechanism side to the XY direction. However, when the substrate holding mechanism is moved to the χγ direction and a large area is coated on the substrate, the substrate must be moved in all directions (width and length of the substrate). Distance in multiples of width or length. [Brief Description of the Drawings] FIG. 1 is a perspective view of an embodiment of an electric paste coating machine according to the present invention. Fig. 2 is an enlarged view of a coating head. Fig. 3 is an explanatory diagram of a measurement condition of a distance between a tip end portion of a nozzle of a coating head and a substrate. FIG. 4 is a block diagram showing a system of the main control section of FIG. 1. FIG. FIG. 5 is a block diagram showing a system of the sub-controller of FIG. 1. FIG. FIG. 6 is a timing chart of the overall operation in the device shown in FIG. FIG. 7 is a configuration diagram of an embodiment of an air-compressed circuit section. FIG. 8 is an operation timing chart when the air-compressing circuit of FIG. 7 is used. FIG. 9 is a diagram for describing a drawing state of an electric paste pattern. Fig. 10 is a diagram for explaining the relationship between the application pressure and the relative moving speed when the corners are applied. FIG. U is a diagram for explaining another structure of the air circuit section. Figure 12 is the timing chart when using the air compressor circuit of Figure] .1. -18- (15) (15) 200526324 [Description of main component symbols] 1 stand 2a beam 3a linear track 3c support 4 a. Linear motor 4 am^ bm linear motor 5 substrate holding mechanism 6 table movement mechanism 6 m servo motor 6 m Linear motor 7 Base plate 8 ma Linear motor 9 a Z-axis moving table 9 Z-axis moving table 10a Z-axis servo motor 1 3 a Electric paste container 1 3na nozzle] 4a support table] 5 a Image recognition camera 16a distance meter 1 7 a Main Control Section] 7 b Deputy Control Section-19-(16) 200526324 17c Hard disk 1 7d Magnetic disk 1 7e Signal cable 1 7f Monitor 1 7g Keyboard ΠΤΤ 1 7 aa Microcomputer 1 7 ac Data communication bus 1 7ab Motor control 1 7ad External interface 1 7 ae Image recognition device 1 7af X axis linear motor driver 1 7 ag Y axis linear motor driver 1 7 ah Y axis linear motor driver: 1 7ai Y axis motor driver 1 7bb motor controller 1 7bd external interface] 7ba microcomputer 22 v negative pressure source 22a negative pressure regulator 23p positive pressure source 23 a positive pressure regulator / pressure regulator 24a valve unit / high-speed coating Control valve 3 0 ma Servo motor 50a Pressure regulator -20- (17) (17) 200526324 5 1 a valve 6 0a coating control valve 7 0a exhaust valve 8 0 a coating head 8 1 a support bracket 9 1 a Corner of support member C
-21 --twenty one -