KR100303617B1 - Paste coating apparatus - Google Patents

Abstract

The present invention increases the application rate of the paste by increasing the paste coating speed, suppressing the vibration of the movable portion, and favorably applying a paste pattern having a desired shape.

In the present invention, a dummy substrate is used (step 300), and a simulation application operation in which paste is not applied with paste pattern data actually used is performed (step 600). In this simulation application, the distance between the nozzle and the substrate is measured (step 700), and a coating position that generates a large vibration outside the allowable range is searched (step 700). If such an application position exists, the application speed is corrected to the new application speed only at this application position (step 1100), and at the same time, the same simulation application operation is performed at this new application speed. Repeat with changing the application speed in turn until it is finished. In this way, the application position at which the vibration is generated depends on the magnitude of the vibration generated, but an application speed at which such vibration does not occur is set.

Description

Paste Coating Machine {PASTE COATING APPARATUS}

According to the present invention, a substrate is placed on a table so as to face a discharge port of a nozzle, the relative distance between the nozzle and the substrate in a direction perpendicular to the main surface of the substrate is maintained as defined, and the paste container is filled in a paste container. A paste spreader for changing a relative positional relationship between the substrate and the nozzle while discharging a paste from the discharge port onto the substrate, and applying a paste pattern having a desired shape on the substrate, particularly a paste for improving productivity. Relates to an applicator.

Conventional paste applicator is a method for improving productivity, and the relative movement speed between the nozzle and the substrate, that is, the speed when applying the paste pattern while discharging the paste filled in the paste container from the nozzle to the substrate (hereinafter referred to as , The application speed).

By the way, in the paste coating machine, if the application speed is increased as in the above-described conventional technique, there is no problem in the straight portion of the paste pattern, but in the curved portion having a small radius of curvature, the application direction changes at a right angle, that is, for example, When the application direction changes from the X-axis direction to the Y-axis direction or from the Y-axis direction to the X-axis direction, vibration occurs in the moving part. For example, if the moving part is a nozzle and the fixing part is a substrate adsorption board on which the substrate is placed (that is, the nozzle is moving relative to the substrate), the direction of movement of the nozzle is changed perpendicular to the nozzle (Z axis) direction. However, vibration in the horizontal (X, Y-axis) direction occurs, and vibration in the vertical direction is particularly large. Even if the fixed part is a nozzle and the moving part is a substrate adsorption board (i.e., the substrate is moving), if the moving direction of the substrate adsorption board is changed, the same vibration is applied to the substrate adsorption board, and thus the substrate mounted and fixed thereon. This occurs, and in particular, the vibration in the vertical direction becomes large. This vibration is large at the periphery of the substrate, in particular at the corners. For this reason, the (relative) distance in the direction perpendicular to the main surface of the substrate between the nozzle and the substrate fluctuates, and the coating accuracy decreases.

That is, as shown in FIG. 10, since the relative (position) distance between the nozzle 13a and the substrate 22 varies between δ-z, the paste coating amount per unit time changes, and the paste pattern 23 having a desired shape is changed. ) Cannot be coated and formed, and the higher the application speed, the greater the variation in the relative distance (position) between the nozzle 13a and the substrate 22. For this reason, it becomes impossible to raise a coating | coating speed and the improvement of productivity was not able to be aimed at.

SUMMARY OF THE INVENTION An object of the present invention is to provide a paste applicator that solves such a problem and enables to apply and form a paste pattern having a desired shape while improving the productivity by increasing the application speed.

1 is a perspective view showing an embodiment of a paste applicator according to the present invention,

FIG. 2 is an enlarged perspective view of a part of the paste storage container and the distance meter in FIG. 1; FIG.

3 is a block diagram showing the configuration of the control unit and its control system in FIG. 1;

4 is a flowchart showing the overall operation of the embodiment shown in FIG. 1;

5 is a flowchart showing details of a vibration measurement processing step in FIG. 4;

FIG. 6 is a flowchart showing details of a search and determination processing step of the vibration generating paste pattern in FIG. 4; FIG.

7 is an explanatory diagram of a distance data reading and converting step and a determining step in the allowable range in FIG. 6;

8 is a flowchart showing details of a coating condition correction processing step in FIG. 4;

9 is a view for explaining a change in coating conditions by the coating condition correction step in FIG. 4;

10 is a view showing a thickness change of a paste pattern applied by a conventional paste applicator.

In order to achieve the above object, the paste applicator according to the present invention places a substrate on a table so as to face a discharge port of a nozzle, and measures a relative distance between the nozzle and the substrate in a direction perpendicular to the main surface of the substrate. A paste having a desired shape on the substrate is maintained by changing the relative positional relationship on the main surface of the substrate between the substrate and the nozzle while discharging the paste filled in the paste container from the discharge port onto the substrate. In paste coating machine which draws pattern,

Relative distance in the direction perpendicular to the main surface of the desired substrate between the nozzle and the desired substrate while varying the relative positional relationship between the desired substrate placed on the table and the nozzle at a predetermined relative moving speed. First means for detecting,

Second means for determining whether the relative distance detected by the first means is within a preset allowable range;

When it is determined by the second means that the relative distance is out of the allowable range, the new predetermined relative moving speed is set as the new predetermined relative moving speed, the speed of which is reduced by a predetermined amount from the predetermined relative speed. Third means for operating the first means described above,

When it is determined by the second means that the relative distance is within the allowable range, the paste is discharged from the discharge port of the nozzle so as to draw a paste pattern having a desired shape at the predetermined relative moving speed at that time. And fourth means for setting a relative moving speed between the substrate and the nozzle.

EMBODIMENT OF THE INVENTION Hereinafter, one Embodiment of this invention is described using drawing.

1 is a perspective view showing an embodiment of a paste applicator according to the present invention, wherein 1 is a mount, 2a, 2b is a substrate conveying conveyor, 3 is a support, 4 is a substrate adsorption plate, 5 is a θ axis 6a, 6b is the X axis movement table, 7 is the Y axis movement table, 8a, 8b is the servo motor, 9 is the Z axis movement table, 10 is the servo motor, 11 is the ball screw, 12 is the servo motor, 13 is Paste container (syringe), 14 is a rangefinder, 15 is a support plate, 16a, 16b is an image recognition camera, 17 is a control unit, 18 is a monitor, 19 is a keyboard, 20 is a personal computer body having an external storage device, 21 is Cable.

In the drawing, on the mount 1, two substrate conveying conveyors 2a and 2b which are parallel to and liftable in the X-axis direction are provided, and the substrate not shown is directly forward from the inside of the drawing, that is, It conveys horizontally in an X-axis direction. Moreover, the support stand 3 is provided on the mount 1, and the board | substrate adsorption board 4 is mounted on this support stand 3 via the (theta) axis | shaft movement table 5. As shown in FIG. This [theta] axis | shaft movement table 5 rotates the board | substrate adsorption board 4 to the (theta) direction of Z-axis rotation.

On the mount 1, further, the X-axis movement tables 6a and 6b are provided parallel to the X-axis from the outside of the substrate transport conveyors 2a and 2b, so as to cross between these X-axis movement tables 6a and 6b. Y-axis movement table 7 is provided. The Y-axis movement table 7 is moved in the X-axis direction by the electrostatic or reverse rotation of the servo motors 8a and 8b provided in the X-axis movement tables 6a and 6b. Is conveyed horizontally. On the Y-axis movement table 7, a Z-axis movement table 9 which moves in the Y-axis direction by the reverse rotation of the ball screw 11 by the drive of the servo motor 10 is provided. The Z-axis movement table 9 is provided with a support plate 15 for holding and fixing the paste storage container 13 and the rangefinder 14, and the servobore 12 has these paste storage containers 13 and the rangefinder 14 thereon. ) Is moved in the Z-axis direction via the movable part of the omitted linear guide provided in this support plate 15. The paste storage container 13 is detachably attached to the movable part of this linear guide. Moreover, the image recognition cameras 16a and 16b for aligning the board | substrate which are not shown in figure are provided in the ceiling board of the mount 1 toward upward direction.

Inside the mount 1, a control unit 17 for controlling the servo motors 8a, 8b, 10, 12, 24 (not shown) and the like is provided, and the control unit 17 passes through the cable 21. It is connected to the monitor 18, the keyboard 19, and the personal computer main body 20, and the data for the various processes in this control part 17 are input from the keyboard 19, and the image recognition cameras 16a and 16b are carried out. The captured image and the processing status by the control unit 17 are displayed by the monitor 18.

The data input from the keyboard 19 is stored in a storage medium such as a floppy disk by an external storage device of the personal computer main body 20.

FIG. 2 is an enlarged perspective view of portions of the paste storage container 13 and the distance meter 14 shown in FIG. 1, wherein 13a is a nozzle, 22 is a substrate, 23 is a paste pattern, and the same reference numerals are used for parts corresponding to FIG. Attaching.

In the figure, the distance meter 14 has a triangular cutting portion at its lower end, and a light emitting element and a plurality of light receiving elements are provided at the cutting portion. The nozzle 13a is positioned below the cutting portion of the distance meter 14. The rangefinder 14 measures the distance from the end part of the nozzle 13a to the surface (upper surface) of the board | substrate 22 which consists of glass by a noncontact triangulation method. That is, a light emitting element is provided on one slope of the cutting portion of the triangle, and the laser light L emitted from the light emitting element is reflected at the measurement point S on the substrate 22 to reflect the cutting portion. The light is received by any one of the plurality of light receiving elements provided on the other slope. Therefore, the laser beam L is not blocked by the paste storage container 13 or the nozzle 13a.

Moreover, the measurement point S of the laser beam L on the board | substrate 22 and the position just under the nozzle 13a are shift | deviated by the slight distance (DELTA X, DELTA Y) on the board | substrate 22, and this small distance Since there is no difference in the undulation (unevenness) of the surface of the substrate 22 between the positions shifted by (ΔX, ΔY), the substrate 22 is measured from the measurement result of the distance meter 14 and the end of the nozzle 13a. There is little difference between the distances to the surfaces. Therefore, by controlling the servo motor 12 based on the measurement result of this distance meter 14, the distance from the end of the nozzle 13a to the surface of the board | substrate 22 according to the ups and downs of the surface of the board | substrate 22 is adjusted. It can be kept constant and the width | variety and thickness of the paste pattern 23 apply | coated on the board | substrate 22 become uniform.

FIG. 3 is a block diagram showing the configuration of the controller 17 shown in FIG. 1, the control of the air pressure in the paste storage container 13, and the control of the substrate 22, where 17a is a microcomputer, 17b is a motor controller, 17c1, 17c2 is X1, X2-axis driver, 17d is Y-axis driver, 17e is θ-axis driver, 17f is Z-axis driver, 17g is data communication bus, 17h is external interface, 24 is θ-axis shift table 5 (Fig. 1) Servo motor for driving the motor, 25 to 29 is an encoder, 30 is a positive pressure source, 30a is a positive pressure regulator, 31 is a negative pressure source, 31a is a negative pressure regulator, 32 is a valve unit, Figs. Parts corresponding to 2 are given the same reference numerals.

In the figure, the control unit 17 is obtained by the microcomputer 17a, the motor controller 17b, the axis drivers 17c1 to 17f of X, Y, Z, and θ, and the image recognition cameras 16a and 16b. The external interface 17h for transmitting signals between the image processing apparatus 17i for processing video signals, the keyboard 19, and the like is incorporated.

The control unit 17 further includes a drive control system for the substrate transfer conveyors 2a and 2b, but is not shown here.

In addition, although not shown, the microcomputer 17a includes a ROM containing a processing program for performing application drawing of the main computing unit and the paste to be described later, the results of the processing at the main computing unit, the external interface 17h, and the motor controller 17b. RAM for storing the input data from the module, and an input / output unit for exchanging data with the external interface 17h or the motor controller 17b. Each servo motor 8a, 8b, 10, 12, 24 is provided with encoders 25 to 29 for detecting the amount of rotation, and the detection results are shown in the respective axis drivers 17c1 to X, Y, Z and θ. Returning to 17f), position control is performed.

The servo motors 8a, 8b, and 10 are rotated forward and backward based on data input from the keyboard 19 and stored in the RAM of the microcomputer 17a, so that the substrate adsorption board is driven by the negative pressure distributed from the negative pressure source 131. (4) With respect to the substrate 22 vacuum-adsorbed to (FIG. 1), the nozzle 13a (FIG. 2) passes an arbitrary distance in the X and Y-axis directions via the Z-axis movement table 9 (FIG. 1). During the movement, the microcomputer 17a controls the valve unit 32 so that a slight air pressure from the constant pressure source 30 is passed through the constant pressure regulator 30a and the valve unit 32 to the paste container 13. The paste is applied, and the paste is discharged from the discharge port of the end of the nozzle 13a, and the desired pattern of the paste is applied to the substrate 22. During the horizontal movement of the Z-axis movement table 9 in the X and Y-axis directions, the distance meter 14 measures the distance between the nozzle 13a and the substrate 22 and maintains this distance at all times. 12 is controlled by the Z-axis driver 17f.

In the standby state in which the paste is not applied, the microcomputer 17a controls the valve unit 32 so that the negative pressure source 31 passes through the negative pressure regulator 31a and the valve unit 32 so that the paste storage container 13 ), And the paste flowing out from the discharge port of the nozzle 13a is returned to the paste storage container 13. Thereby, the liquid dripping of the paste from this discharge port can be prevented. The discharge port of this nozzle 13a may be monitored by an image recognition camera, not shown, and the negative pressure source 31 may be passed through the paste storage container 13 only when liquid drops occur.

4 is a flow chart showing a series of operations of the embodiment shown in FIG. 1.

In the figure, first, when power is supplied to the paste applicator of this embodiment (step 100), the initial setting is executed (step 200). In this initial setting step, in Fig. 1, by driving the servo motors 8a, 8b, and 10, the Z-axis movement table 9 is moved in the X and Y directions to position at a predetermined reference position, and the nozzle ( 13A) (FIG. 2) is set at a predetermined origin position so that the paste ejection opening is positioned at a position at which the paste ejection starts to discharge (i.e., the paste application start point), and the substrate to be subjected to the paste pattern drawing again ( Hereafter, the data for one or more paste patterns (hereinafter referred to as paste pattern data) to be applied to the yarn substrate, the position data of the actual substrate, and the actual substrate when the paste is actually applied to the actual substrate and The relative speed between the nozzles (this is called the application speed, in particular the application speed in this case is called the initial application speed) and the height of the nozzle from the substrate surface (this is called the application height, in particular the application height in this case) Application height Data and paste discharged from the pressure applied to the paste storage container 13 which determines the amount of paste discharged from the nozzle (this is called a coating pressure, in particular, the coating pressure in this case is an initial application coating pressure). The position data indicating the end position, the measurement position data of the applied paste pattern, and the like are set. Such data is input from the keyboard 19 (FIG. 1), and the input data is stored in a RAM built in the microcomputer 17a (FIG. 3).

When the initial setting processing step (step 200) is completed, a dummy substrate (not shown) used to determine whether or not a paste pattern having a desired shape is applied with high precision in FIG. It puts on and keeps adsorption (step 300). In the dummy substrate raising step, the dummy substrates are conveyed by the substrate conveying conveyors 2a and 2b to the upper side of the substrate adsorption plate 4 in the X-axis direction, and then the substrate conveying conveyors 2a are provided by the elevating means not shown. , 2b) is lowered and placed on the substrate adsorption board 4.

Next, in order to measure the presence or absence of vibration of the movable portion during the paste coating operation, the dummy substrate is used to simulate the paste application (paste simulation application operation). The purpose of the paste simulation application operation is to detect the vibration occurrence point of the movable part when applying and drawing the paste pattern on the actual substrate, and to determine the maximum application speed at which vibration at such a location does not occur. The application height and the application pressure are determined for the obtained application speed. The initial application speed, initial application height, and initial application pressure set in the initial setting processing step (step 200) above are for applying the straight portion of the paste pattern determined by experience or the like.

In such paste simulation application, the presence or absence of vibration is measured from the distance change between the nozzle 13a and the substrate 22 (FIG. 2), and the distance meter 14 is used as a vibration measurement sensor for this purpose. The paste patterns used for this paste simulation application are n paste patterns (where n is an integer of 1 or more in general) used for the actual substrate, and as described above, the paste pattern data is stored in the keyboard 19 ( 1) input to the RAM (hereinafter simply referred to as memory) of the microcomputer 17a (FIG. 3), for example, 1, 2,... … are numbered and stored.

In starting the paste simulation application operation, the distance meter 14 used as the vibration measuring sensor is first positioned at a predetermined height on the dummy substrate (step 400). Then, the paste pattern data used for the simulation application operation is selected from the paste pattern data stored in the memory, and the number is stored in the memory. Initially, paste pattern data of number 1 is selected (step 500).

Then, the microcomputer 17a (FIG. 3) immediately controls the servo motors 8a, 8b, and 10 using the paste pattern data of the selected number (1), and sets the nozzle 13a to this number (1). The simulation pattern operation is started by moving at the above initial set coating speed along the paste pattern defined by the paste pattern data of step (step 600). In this case, the paste is not discharged from the nozzle 13a, and the servo motor 12 is not controlled.

With the start of this simulation application operation, the distance meter 14 sequentially measures the distance between the nozzle 13a and the substrate 22 in the direction perpendicular to the main surface of the substrate 22, and measures the measured data vertically. As a result of the distance measurement in the direction, it is stored in the memory in association with the position data indicated by the paste pattern data (step 700).

5 is a flowchart showing the details of this distance measuring processing step (step 700).

In the figure, the distance between the nozzle 13a and the substrate 22 is sequentially measured by the distance meter 14 (step 710), and the measurement results obtained in turn are stored in the memory in association with the position data as distance data. (Step 720). The process of measuring and storing such distance data is continued until the paste pattern of number 1 which is performing the simulation application operation ends (step 730).

When the distance measuring process (step 700) is completed, the distance meter 14 is evacuated upward (step 800), and the vibration data generated outside the allowable range, i.e., outside the allowable range on the paste pattern, is generated from the obtained distance data. The paste application position is searched and determined (step 900).

6 is a flowchart showing the details of the search processing step (step 900) of the vibration generation pattern outside the allowable range.

In the figure, first of all, it is determined whether there is distance data to be searched and determined (step 910). When the search / decision on the distance data is completed, the value 0 is substituted into the variable V_F for the allowable range determination flag as if there is no distance data to be searched and determined (step 950). On the other hand, when the search and determination in the distance data are not finished, the next distance data is read and data conversion is performed (step 920).

Referring to Fig. 7, this data conversion process shows distance data (waveform 1) obtained by distance measurement. The gentle undulation of this distance data is caused by the undulation of the surface of the dummy substrate. Since the motor 12 is not controlled, the distance meter 14 measures the change of the distance between the nozzle 13a and the board | substrate 22 by this ups and downs. The abrupt change in the portion a of the distance data is caused by the up and down vibration of the rangefinder 14 (hence the nozzle 13a), and the application speed of the nozzle 13a in a state in which the application speed of the nozzle is too fast. Occurs when the moving direction changes.

In order to be able to determine whether the vibrating portion shown in Fig. 7 (a) is outside the preset allowable range, the change caused by the undulation of the surface of the dummy substrate is removed from the distance data so that the change due to the vibration appears remarkably. The conversion is performed. One such method is a method of differentially processing distance data, and the data obtained by such a process is shown in Fig. 7B.

In Fig. 7 (b), in the conversion data (waveform 2), the change due to the ups and downs of the dummy substrate surface falls within the above allowable range, and the change due to the vibration of the nozzle 13a appears remarkably.

Step 930 in Fig. 6 determines whether there is a part b outside the above allowable range with respect to the converted distance data. If there is only one part b, it is out of this allowable range. The position data (i.e., the position on the paste pattern by this paste pattern data) of the paste pattern data of the number (1) of all the portions (b) to be used are detected, and the variable V_F for the allowable range determination flag is detected. The value 1 is substituted (step 940). Also, even when the above determination process is performed to the end of the detected distance data with respect to the paste pattern data of this number (step 910) (step 910), when there is no part b outside the allowable range (step 930), as described above. A value (0) is substituted into the variable V_F for the allowable range determination flag (step 950).

In addition, the data conversion method of the distance data is not limited to the above-described method by differential processing, but the change due to the ups and downs of the surface of the dummy substrate, such as the method by the difference processing which takes the difference of the data values before and after. Any method may be used as long as it can suppress the minute so that the change caused by the vibration can be made remarkable.

As described above, in step 900 of FIG. 4, the position where the vibration is generated is detected by the first simulation application operation in which the application speed by the paste pattern data of No. 1 is performed at the initial application application speed. According to this, the application speed at the time of carrying out actual paste application of a real board with the paste pattern data of number (1) can be made into the said initial application | coating speed | rate at the position where vibration did not generate | occur | produce.

When the process of this step 900 is complete | finished, it is next determined whether the value of the variable V_F is 1 (step 1000), and when the value is 1, it transfers to the application | coating condition correction process (step 1100). Hereinafter, this coating condition correction processing step (step 1100) will be described with reference to FIG.

In the figure, first, the initial application rate is set by a predetermined value to obtain a new application rate (step 1110).

By the way, in general, when the application speed is reduced, the paste ejection amount per unit moving distance from the nozzle 13a increases, so that the width of the paste pattern is increased, the height is high, and a paste pattern having a desired shape is not obtained. . For this reason, it is necessary to reduce the paste discharge amount by reducing the discharge pressure of the paste, that is, the coating pressure, so that a paste pattern having a desired shape can be obtained.

For this reason, in step 1110, the initial application speed is decreased by the predetermined amount to make a new application speed, and it is determined whether or not a reduction in application pressure is required for this new application speed (step 1120). When a change in pressure is required, the coating pressure is decreased by a predetermined value based on the change value of the new coating speed (step 1130).

Next, with respect to the new coating speed, it is determined whether the change of the nozzle setting height (coating height) at the time of application is necessary (step 1140), and when the change is required, the application speed is changed in the same manner as the change of the coating pressure. The application height is increased by a predetermined value based on the changed value (step 1150).

After the processing of step 1100 is completed, the newly set application of the application speed, application pressure, and application height described above at the vibration occurrence point detected by the first simulation application operation using the paste pattern data of No. 1 above. Speed, application pressure, application height

In FIG. 4, the series of second simulation applications described above from step 400 using paste pattern data of the same number (1) at these new coating speeds, coating pressures, and coating heights are performed.

In the second simulated application operation, in the case where vibrations exist outside the allowable range, in the coating condition correction step (step 1100), the coating speed used at this time is corrected as described above, and a new coating speed is set again. At the same time, the coating pressure and coating height are also corrected as needed (steps 1130 and 1150 in FIG. 8), and vibration is applied to the coating speed, coating pressure, and coating height at a point outside the allowable range. Change it. Therefore, the new application speed, application pressure, and application height obtained by the first simulation application operation are set as they are at the place where the vibration is reduced within the allowable range by the second simulation application operation.

In this way, when a new application speed, application pressure and application height are obtained by the second simulation application operation, the third simulation application operation using the paste pattern data of the same number (1) under these conditions is performed (step 400). From this point on, the process is repeated until the variable V_F becomes the value 0 (step 1000). In this way, with respect to the paste pattern data of No. 1, the application speed, application pressure, and application height of each position on the paste pattern are thereby obtained. In this case, at each point of the linear portion of the paste pattern, the initial application speed, initial application pressure, and initial height are assigned, and the higher the vibration vibration point is, the smaller the application speed is assigned and thus the application pressure or application The height is determined.

FIG. 9 schematically shows data obtained by the above simulation application operation, wherein seven application positions S1 to S7 are applied on the paste pattern by the paste pattern data of No. (1).

Fig. 9 (a) shows the case of the first simulation application operation, in which the initial application speed is set to V ₀ , the initial application pressure is set to F ₀ , and the initial application height is set to H ₀ . At this time, assuming that vibrations outside the allowable range have occurred at the application positions S2 and S5 by the first simulation application, the application speeds to these application positions S2 and S5 are shown in FIG. The initial application rate (V ₀ ) is modified from V ₁ to V ₁ (in this case, the application pressures in these cases need to be modified from F ₀ to F ₁ , but the application height does not need to be modified). The second simulated coating operation is performed at the coating speed V ₁ . If vibration outside the permissible range occurs at the application position S2 due to the second simulation application operation, as shown in Fig. 9C, the application speed for this application position S2 is determined from the application speed V ₁ to V. By modifying it to ₂ (in this case, it is not necessary to modify the coating pressure, but it is necessary to modify the coating height from H ₀ to H ₁ ), and then the third simulated coating operation is performed at this new coating speed (V ₂ ). Do it. If vibration outside the permissible range does not occur at any application position in the third simulation application operation, the simulation application operation using the paste pattern data of this number (1) is terminated, and the paste pattern data is applied at each application position. The application speed, application pressure, and application height are determined as shown in Fig. 9C.

When the simulation application operation for the paste pattern data of the number (1) is completed as described above (step 1000), the paste pattern data of the number (2) is selected next (step 1200). The simulation application operation is repeated, hereinafter numbers 3, 4,... … The simulation application operation by the paste pattern data is performed in the following order. In this case, in the first simulation application operation of each paste pattern data, the initial application speed, initial application pressure, and initial height set in step 200 are used as the application speed, application pressure, and application height.

When the simulation application is terminated (step 1200) with the variable V_F being the value (0) for all the paste pattern data up to the last number (n) (step 1200), the respective paste pattern data at each position on the paste pattern The coating speed, the coating pressure, and the coating height are set so that the vibration generated in the nozzle 13a at the time of paste application drawing on the actual substrate does not affect the accuracy of the desired coating paste pattern. The dummy substrate is discharged (step 1300), and the process proceeds to production of the actual substrate (coating drawing of a paste pattern) described below.

First, the real substrate is placed on the substrate adsorption board 4 (FIG. 1) and held by adsorption (step 1400). In this substrate raising step, the actual substrates are conveyed to the upper side of the substrate adsorption plate 4 in the X-axis direction by the substrate conveying conveyors 2a and 2b (Fig. 1), and these substrate conveying conveyors are shown by the elevating means (not shown). The actual substrate is placed on the substrate adsorption board 4 by lowering (2a, 2b).

Next, the substrate preliminary positioning process (step 1500) is performed. In this process, in Fig. 1, alignment of the actual substrate in the X and Y directions is performed by the positioning chuck shown in Fig. 1. In addition, the positioning marks of the actual substrate placed on the substrate adsorption board 4 are photographed by the image recognition cameras 16a and 16b, and the center positions of the positioning marks are obtained by image processing. The inclination is detected and the servo motor 24 (FIG. 3) is driven accordingly to correct the inclination in the θ direction.

In addition, when the remaining amount of paste in the paste storage container 13 decreases and there is a possibility that the paste may be cut off in the middle of the paste pattern coating operation, the paste storage container 13 is replaced with the nozzle 13a in advance. When the nozzle 13a is replaced, the position of the installation position may be displaced as compared with before the replacement, and the reproducibility may be impaired. Therefore, in order to ensure reproducibility, the paste is applied in the shape of a cross using a new nozzle 13a which is replaced in a place where the paste is not applied on the actual substrate, and the center position of the intersection point of the cross coating pattern is subjected to image processing. The distance between this center position and the center position of the positioning mark on the actual substrate is calculated and this is taken as the displacement amount (dx, dy) (Fig. 2) of the paste ejection outlet of the nozzle 13a, and the microcomputer 17a. In the built-in RAM. This is the substrate pre-positioning process (step 1500) with respect to the actual substrate, and the positional deviation of the nozzle 13a at the time of application drawing of the paste pattern to be performed next by using the positional displacement amounts (dx, dy) of the nozzle 13a. To compensate.

Next, the paste pattern application process (step 1600) is performed in sequence from the paste pattern data of number (1). In this process, in order to position the discharge port of the nozzle 13a at the application start position, the Z-axis movement table 9 (FIG. 1) is moved, and the nozzle position comparison and adjustment movement are performed. For this reason, first, the nozzle 13a shown in FIG. 2 shows the positional displacement amount (dx, dy) of the nozzle 13a obtained by the previous board | substrate prepositioning process (step 1500), and stored in RAM of the microcomputer 17a. It is judged whether or not is within the allowable ranges DELTA X and DELTA Y of the position deviation amount. If it is within the allowable range (that is, ΔX≥dx and ΔY≥dy), it is left as it is, and if it is outside the allowable range (that is, ΔX <dx or ΔY <dy), Z is based on this deviation amount (dx, dy). By moving the shaft movement table 9 to adjust the paste storage container 13, the positional deviation between the paste discharge port of the nozzle 13a and the desired position of the actual substrate is eliminated, and the nozzle 13a is positioned at the desired position. Decide

Next, the height setting of the nozzle 13a is performed. When the paste container 13 is not replaced, there is no data of the positional displacement amount (dx, dy) of the nozzle 13a. Therefore, the height of the nozzle 13a immediately at the place where the paste pattern coating process (step 1600) is entered. Set it. This set height is set to the initial application height used in the previous simulation application operation so that the distance from the discharge port of the nozzle 13a to the surface of the actual substrate becomes the thickness of the paste, that is, the application height.

After the above processing is finished, the servo motors 8a, 8b, 10 (FIG. 1) are driven based on the paste pattern data stored in the RAM of the microcomputer 17a, thereby pasting the nozzle 13a. The discharge port moves in the X and Y directions in accordance with the paste pattern data in a state facing the actual substrate, and a slight air pressure is applied from the positive pressure source 30 (FIG. 3) to the paste container 13 so that the nozzle ( The paste starts to be discharged from the paste discharge outlet of 13a). The application speed at this time is the initial application speed used in the previous simulation application, and the air pressure is in accordance with the initial application application pressure used in the previous simulation application. As a result, application of the paste pattern to the actual substrate is started at the application speed obtained in the previous simulation application.

With the start of this coating drawing operation, the microcomputer 17a controls the coating speed, the coating pressure, and the coating height in accordance with the application position of the paste pattern based on the data obtained in the previous simulation application operation. Taking the data shown in Fig. 9C as an example, in the application position S1, the application speed is set to V ₀ , the application pressure is set to F ₀ , the application height is set to H ₀ , and the application speed is approached. Is V ₂ , the coating pressure is F ₁ , and the coating height is H ₁ , so that the coating speed, the coating pressure, and the coating height are made at this coating position (S2).

As a result, when pasting the coating position S2, no large vibration occurs outside the above allowable range in the movable portion. Also, the coating speed, applied pressure, applied in height after the coating position (S2) and return to the original V _0, F _0, H _0, the coating speed when close to the coating position (S5) to V _1, and then, Change the coating pressure to F ₁ , respectively.

In addition to drawing such a paste pattern, the microcomputer 17a inputs actual measurement data of the distance between the distance from the distance meter 14 to the paste discharge port of the nozzle 13a and the surface of the real substrate to measure the undulation of the surface of the real substrate. By driving the servo motor 12 in accordance with this measured value, the set height of the nozzle 13a from the surface of the actual substrate is maintained to be constant, and the application of the paste pattern is performed.

In this way, the application of the paste pattern is performed. However, the determination of whether to continue or finish the application of the paste pattern is performed by determining whether the application point is the end of the paste pattern to be applied, which is determined by the paste pattern data. If it is determined that the terminal is not terminated, the process returns to the measurement process of the undulation of the surface of the real substrate, and then the above steps are repeated until the end of the application of the paste pattern is reached.

This paste pattern coating operation is performed on all the n pieces of the paste pattern data set. When the paste pattern ends by the paste pattern data of the last number n, the servo motor 12 is driven to drive the nozzle 13a. ) Is raised and the paste pattern application step (step 1600) is completed.

Next, the process proceeds to the substrate discharge process (step 1700). In this processing step, in Fig. 1, the adsorption of the real substrate to the substrate adsorption board 4 is released, and the substrate transport conveyors 2a and 2b are raised to place the real substrate 22 thereon. The substrate conveyance conveyors 2a and 2b are used to discharge them out of the apparatus.

Then, it is determined whether all the above steps have been completed (step 1800), and when the paste pattern is applied to the plurality of real substrates using the same paste pattern data, the substrate raising process is performed on the other real substrates (step 1400). ) Is repeated. And when such a series of processes are complete | finished for all the real board | substrates, all the work will complete | finished (step 1900).

In addition, in the said embodiment, although a nozzle was used as a movable part and a board | substrate was used as a fixed part, this invention is not limited to this, You may make a nozzle a fixed part and a board | substrate as a moving part.

As described above, in this embodiment, it is not necessary to perform an unnecessary coating operation on the actual substrate in order to perform the simulation application operation using the dummy substrate and to determine the application conditions in the paste pattern data to be applied in advance. Improvement is planned.

In addition, since the application conditions (i.e., application speed, application pressure, application height) on the actual substrate are determined according to the shape of the straight and curved portions of the paste pattern, that is, the paste pattern, the application of the paste pattern on the actual substrate is performed. In this case, the paste pattern can be made small so as not to affect the paste pattern for drawing the vibration of the movable portion (nozzle portion or the actual substrate), and the coating accuracy can be ensured to make the paste coating amount per unit time constant. It becomes possible to apply | coat and form with high precision.

In addition, in the curved portion of the paste pattern, since the influence of vibration in the movable portion is large, even if it is impossible to increase the coating speed there, it is possible to set the maximum coating speed at which the influence of vibration does not occur. Since the influence is small, the application speed there can be increased. Therefore, the application time of a paste pattern can be shortened, the application | coating drawing of a paste pattern can be performed favorably, and productivity improvement is aimed at.

By the way, in the search processing step (step 900) of the vibration generating paste pattern outside the permissible range of FIG. 4 shown in detail in FIG. 6, no vibration exists even when the presence or absence of vibration is searched for all the distance data at the initial application speed. May not be. This is because the application speed is set low in the initial setting, and it can be said that vibration does not occur even at a faster application speed.

Therefore, the presence or absence of vibration may be searched for in the process of searching for the vibration generating paste pattern outside the allowable range of FIG. 4 (step 900) by performing the coating condition modification process (step 1100) of FIG. 4 shown in detail in FIG. do.

That is, in step 1110 of FIG. 8, the initial application speed is set to a new application speed by decreasing the initial application speed by a predetermined value. On the contrary, the initial application speed is increased to a new application speed by a predetermined value. Step 1120 determines whether a pressure change is necessary as in FIG. 8, and if so, in step 1130, the application pressure is increased by a set value, and step 1140 also needs to be changed in application height as in FIG. 8. In step 1150, the application height is reduced by the set value. In this manner, the process returns to step 400 of FIG. 4 and the process is executed up to step 900, and it is examined to what extent vibration occurs when the application speed is increased. When the vibration is generated, the generated position (coating position) corresponds to the application speed just before the day when the vibration does not occur, and is registered as shown in Fig. 9C.

In this way, the application speed limit immediately before the vibration of the paste applicator can be searched, and the application time per sheet can be shortened by increasing the application speed.

As described above, according to the present invention, it is possible to set the maximum coating speed possible within the range in which vibration of the movable portion can be suppressed, and to enable good coating drawing of a paste pattern having a desired shape, thereby greatly improving productivity. .

Claims (6)

The substrate is placed on the table so as to face the discharge port of the nozzle, the relative distance between the nozzle and the substrate in the direction perpendicular to the main surface of the substrate is maintained as defined, and the paste filled in the paste container is removed from the discharge port. In the paste applicator which draws a paste pattern of a desired shape on the said board | substrate by changing the relative positional relationship in the main surface of the said board | substrate of the said board | substrate and the said nozzle, discharging on a board | substrate, The above-mentioned desired substrate between the nozzle and the desired substrate while changing the relative positional relationship of the desired substrate placed on the table with the nozzle on the main surface of the desired substrate at a predetermined relative moving speed. First means for detecting a relative distance in a direction perpendicular to the main surface of the substrate; Second means for determining whether the relative distance detected by the first means is within a preset allowable range; When it is determined by the second means that the relative distance is out of the allowable range, the new predetermined relative moving speed is set as the new predetermined relative moving speed, the speed of which is reduced by a predetermined amount from the predetermined relative speed. Third means for operating the first means described above, When it is determined by the second means that the relative distance is within the allowable range, the paste is discharged from the discharge port of the nozzle so as to draw a paste pattern having a desired shape at the predetermined relative moving speed at that time. And a fourth means for setting the relative movement speed between the substrate and the nozzle. The method of claim 1, Fifth means for determining whether or not the discharge pressure of the paste from the discharge port of the nozzle is reduced whenever the new predetermined relative moving speed is set by the third means; Sixth means for reducing the discharge pressure of the paste to be set from the discharge port of the nozzle by a predetermined amount each time the fifth discharge means determines that the discharge pressure of the paste should be reduced; When it is determined by the second means that the relative distance is within the allowable range, the discharge pressure of the paste obtained by the sixth means is to be set from the discharge port of the nozzle when the paste pattern is drawn. And a seventh means for setting a discharge pressure of the paste. The method of claim 1, The relative distance in the direction perpendicular to the main surface of the desired substrate detected by the first means is related to the relative positional relationship between the desired substrate and the main surface of the desired substrate with the nozzle. Equipped with an eighth means for storing, The second means is to read a relative distance in a direction perpendicular to the main surface of the desired substrate stored in the eighth means to determine whether the relative distance is within a preset allowable range. Paste spreader. The method of claim 1, The second means may differentiate the data of the relative distance in the direction perpendicular to the main surface of the desired substrate detected by the first means or take a difference between the data before and after the relative distance. A paste applicator, characterized in that it is subjected to a partial process to determine whether or not the processed data are within a predetermined allowable range. The method of claim 1, When it is determined by the second means that the relative distance is within the allowable range, the speed that is increased by a predetermined amount from the predetermined relative speed is set as the new predetermined relative moving speed, and the new predetermined relative moving speed is A ninth means for operating the first means described above, The fourth means repeats determining that the relative distance is within the allowable range by the second means and increasing the predetermined relative speed by a predetermined amount by the ninth means. When it is determined by the means that the relative distance is out of the allowable range, the paste is discharged from the discharge port of the nozzle to draw a paste pattern having a desired shape before the predetermined relative speed is increased by a predetermined amount. The paste applicator, characterized in that the relative movement speed between the substrate and the nozzle is discharged. The method of claim 5, Tenth means for determining whether or not the discharge pressure of the paste from the discharge port of the nozzle is increased each time the new predetermined relative moving speed is set by the ninth means; An eleventh means for increasing the discharge pressure of the paste to be set from the discharge port of the nozzle at the time of drawing the paste pattern by a predetermined amount each time it is determined by the tenth means that the discharge pressure of the paste should be increased; When it is determined by the second means that the relative distance is out of the allowable range, the discharge pressure of the paste immediately before the predetermined amount daily increased by the eleventh means is used to draw the paste pattern. And a twelfth means for setting the discharge pressure of the paste to be set from the discharge port of the nozzle.