JP5286775B2 - Paste applicator - Google Patents

Paste applicator Download PDF

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JP5286775B2
JP5286775B2 JP2007330886A JP2007330886A JP5286775B2 JP 5286775 B2 JP5286775 B2 JP 5286775B2 JP 2007330886 A JP2007330886 A JP 2007330886A JP 2007330886 A JP2007330886 A JP 2007330886A JP 5286775 B2 JP5286775 B2 JP 5286775B2
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pressure
coating
syringe
speed
paste
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JP2009148732A (en
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弓人 近藤
洋平 川口
康治 石丸
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Hitachi Plant Technologies Ltd
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本発明は基板表面に線上パターンを塗布するペースト塗布機関する。 The present invention relates to a paste application machine for applying the line pattern on the substrate surface.

近年、LCDパネルは大型化・高精度化が進んでおり、そのガラス基板間に液晶を封止するためのシール材を線状に塗布するシールディスペンサには、タクトタイム短縮のための高速化と、それによってさらに難しくなる塗布断面積の高精度化が求められている。このため、運転条件を求めるための調整はより困難になり、時間を要するようになっている。   In recent years, LCD panels have become larger and more accurate, and a seal dispenser that linearly applies a sealing material for sealing liquid crystal between its glass substrates has a higher speed to reduce tact time. Thus, there is a demand for higher accuracy in the cross-sectional area of coating, which becomes more difficult. For this reason, the adjustment for obtaining the operating conditions becomes more difficult and takes time.

特許文献1には塗布調整方法として、描画線形状に関する断面積、塗布線幅、塗布高さ、及び塗布径かなる群から選ばれる一つのパラメータを計測して、次回の描画作業において、計測値が許容範囲を越えている場合に液体の加圧量を予め入力してあるシフト圧力値の値分増減することが開示されている。また、特許文献2には、塗布ノズルの移動速度に応じて吐出圧を予め測定してメモリに記憶しておき移動速度を計測して、計測された値に応じて吐出圧を制御することが開示されている。   In Patent Document 1, as a coating adjustment method, one parameter selected from the group consisting of a cross-sectional area, a coating line width, a coating height, and a coating diameter related to a drawing line shape is measured. When the pressure exceeds the allowable range, it is disclosed that the amount of pressurization of the liquid is increased or decreased by a shift pressure value that has been input in advance. In Patent Document 2, the discharge pressure is measured in advance according to the moving speed of the coating nozzle and stored in a memory, the moving speed is measured, and the discharge pressure is controlled in accordance with the measured value. It is disclosed.

特許第3877038号公報Japanese Patent No. 3877038 特開2000−31171号公報JP 2000-31171 A

引用文献1では1度塗布を行い、線幅等を計測し、その値が許容値を越えている場合に、次に塗布する時の塗布圧力を変更するもので、1回目は塗布不良になる可能性が大で、基板やペーストが無駄となる可能性が大きい。   In Cited Document 1, the coating is performed once, the line width and the like are measured, and when the value exceeds the allowable value, the coating pressure at the next coating is changed. There is a great possibility that the substrate and paste are likely to be wasted.

引用文献2の方法では、移動速度と塗布圧力の関係を予め求めて制御するものであるが、外乱による変動を防ぐことができない。   In the method of Cited Document 2, the relationship between the moving speed and the application pressure is obtained and controlled in advance, but fluctuation due to disturbance cannot be prevented.

塗布断面積は線状パターンのどの位置においても均一でないと、液晶を封止するための2枚のガラス基板を貼り合わせた際、内側の液晶側や外側のガラス基板外部にはみ出してしまったり、シール性能の劣る箇所からの漏れが発生したりする恐れがあり、均一な塗布を実現する必要がある。   If the coating cross-sectional area is not uniform at any position of the linear pattern, when two glass substrates for sealing the liquid crystal are bonded together, they may protrude outside the inner liquid crystal side or outside the glass substrate, There is a risk of leakage from a location with poor sealing performance, and it is necessary to achieve uniform application.

本発明の目的は、調整に手間がかからず、外乱による変動に強い塗布の行える塗布装置を提供するものである。 An object of the present invention is not applied troublesome adjustment, there is provided a can Ru coating cloth device strongly applied to fluctuation due to disturbance.

架台上に基板を載置するテーブルと、テーブルをまたいで一方向に移動可能に設置された門型フレームと、門型フレームに設けられこの門型フレームの移動方向とは直角方向に移動可能塗布ヘッドと、塗布ヘッドのペーストを収納するシリンジと、シリンジに空気圧を供給する空圧手段と、シリンジに設けた吐出口であるノズルと、塗布ヘッドを移動させながら空気圧をシリンジに加えてノズルからペースト塗布するため、門型フレーム及び塗布ヘッドの移動制御と空圧手段の圧力制御を行う制御手段とを備えたペースト塗布機に門型フレーム及び塗布ヘッドの移動速度を計測する速度計測手段と、空圧手段の空気圧を計測する圧力計測手段とを設け、制御手段は、シリンジ内のペーストの残量が微量であるときにおける速度計測手段及び圧力計測手段が計測した結果に基づいて、圧力応答曲線を速度変化曲線に重ね塗布断面積を一定に保持するように圧力指令値を多段に切替制御することを特徴とする。 A table for placing a substrate on a pedestal, which can move the portal frame which is movably installed in one direction across the table, the direction perpendicular to the moving direction of the portal frame is provided on the portal frame a coating head, a syringe for containing the paste of the coating head, a pneumatic means for supplying air pressure to the syringe, the nozzle is a discharge port provided in a syringe, from a pressurized strong point nozzle air pressure to the syringe while moving the coating head for applying a paste, portal frame and paste applying machine and a control means for performing pressure control of the movement control and pneumatic means of the coating head, the speed measuring means for measuring a moving speed of the portal frames and the coating head when provided a pressure measuring means for measuring the air pressure of the pneumatic means, the control means, the speed measuring means at the time the remaining amount of the paste in the syringe is very small Based on the results fine pressure measuring means has measured, characterized and Turkey to the switching control pressure command value in multiple stages so as to hold the coated sectional area overlapping the pressure response curve to the speed change curve constant.

本発明によると、速度変化の曲率と圧力応答変化の曲率を合わせることで、容易にシールディスペンサの塗布断面積を均一化するための調整することができる。   According to the present invention, by adjusting the curvature of the speed change and the curvature of the pressure response change, it is possible to easily adjust the application cross-sectional area of the seal dispenser.

図1に本発明を適用した塗布装置の全体構成の概略図を示す。   FIG. 1 shows a schematic diagram of the overall configuration of a coating apparatus to which the present invention is applied.

図示していない架台上に基板を搭載し固定保持するためのテーブル1が設けてある。また、架台にはテーブル1の両側にX方向に延伸されたリニアレールが設けられている。リニアレール上には脚部に駆動機構(Xモータ)を備えたガントリ(門型フレーム)3が設けてある。門型フレーム3のテーブル1の上部に位置するフレーム(長手方向(Y方向))上には、リニアレールが設けてあり、リニアレール上を移動するための駆動機構(Yモータ)を備えたテーブルに塗布ヘッド4が設けてある。塗布ヘッド4にはシール材(ペースト)を内蔵したシリンジ5が取り付け取り外し可能に設けてある。シリンジ5にはCDA(Crean Dry Air)源(空圧源6)からCDAを供給するための配管が接続されている。前記配管又はシリンジ5には圧力を測定するための圧力計10が設けてある。空圧源6からシリンジ5内の圧力を計測しながらCDAを供給することによって、ノズル7から線状パターンにペースト8を塗布する。なお、図示していないが塗布ヘッド4にはシリンジ5を上下(Z軸方向)に移動するための移動テーブルや、シリンジ5の吐出口(ノズル7)とガラス基板2の間隔を測定するセンサが設けてある。さらに、テーブル1上に載置されたガラス基板の位置や向きを計測するためや、ガラス基板に設けた複数の位置合せマークを観測するための図示していないカメラ等が設けてある。さらに、門型フレーム3や、塗布ヘッド4の駆動機構には速度を計測するための図示していない速度計が設けてある。この速度計や空圧源からの供給圧力を計測する圧力計10からの信号に基づいて、空気圧の制御、位置合せ制御を行うための制御手段9が設けてある。   A table 1 for mounting and holding a substrate on a gantry not shown is provided. The frame is provided with linear rails extending in the X direction on both sides of the table 1. On the linear rail, a gantry (gate frame) 3 having a drive mechanism (X motor) at its leg is provided. A linear rail is provided on the frame (longitudinal direction (Y direction)) located on the upper part of the table 1 of the portal frame 3 and is provided with a drive mechanism (Y motor) for moving on the linear rail. The coating head 4 is provided. The application head 4 is provided with a syringe 5 containing a sealing material (paste) so as to be attached and detached. A pipe for supplying CDA from a CDA (Clean Dry Air) source (pneumatic pressure source 6) is connected to the syringe 5. The pipe or syringe 5 is provided with a pressure gauge 10 for measuring pressure. By supplying CDA while measuring the pressure in the syringe 5 from the air pressure source 6, the paste 8 is applied to the linear pattern from the nozzle 7. Although not shown, the coating head 4 has a moving table for moving the syringe 5 up and down (Z-axis direction) and a sensor for measuring the distance between the discharge port (nozzle 7) of the syringe 5 and the glass substrate 2. It is provided. Further, a camera (not shown) for measuring the position and orientation of the glass substrate placed on the table 1 and observing a plurality of alignment marks provided on the glass substrate are provided. Furthermore, the portal frame 3 and the drive mechanism of the coating head 4 are provided with a speedometer (not shown) for measuring the speed. Based on a signal from a pressure gauge 10 for measuring the supply pressure from the speedometer and the pneumatic pressure source, a control means 9 is provided for performing air pressure control and alignment control.

図1(b)に、ガラス基板2上にノズル7から塗布されたシール材8の塗布断面積を斜線部で示す。又図1(c)には塗布圧力又は塗布速度と塗布されたシール材の断面積の関係を示す。   In FIG. 1B, the application cross-sectional area of the sealing material 8 applied from the nozzle 7 on the glass substrate 2 is indicated by hatched portions. FIG. 1C shows the relationship between the application pressure or application speed and the cross-sectional area of the applied sealing material.

塗布断面積は、図1(c)のように塗布速度が大きくなるほど小さくなり、塗布圧力が大きくなるほど大きくなる傾向がある。このため塗布断面積を均一にしようとすると、塗布速度が小さいときには塗布圧力を小さくし、塗布速度が大きくなると塗布圧力を大きくする必要がある。   As shown in FIG. 1C, the coating cross-sectional area tends to decrease as the coating speed increases and increases as the coating pressure increases. Therefore, in order to make the coating cross-sectional area uniform, it is necessary to decrease the coating pressure when the coating speed is low, and increase the coating pressure when the coating speed increases.

そこで、塗布速度が最大となる直線部中央付近において、使用するノズル径・塗布ギャップ・シール材等の条件下で必要な塗布断面積が得られる塗布圧力を求め、どの瞬間でも塗布速度と塗布圧力の比を一定にすることによって、塗布断面積を一定にすることができる。しかし、塗布圧力の応答と、移動速度の応答では、時間的なずれが生じる。そのため、塗布断面積を常に一定に保持するためには、圧力応答曲線に速度変化曲線を重ねるように制御すればよい。   Therefore, in the vicinity of the center of the straight line where the coating speed is maximum, find the coating pressure that will give the necessary cross-sectional area under the conditions of the nozzle diameter, coating gap, seal material, etc. to be used. The application cross-sectional area can be made constant by making the ratio of the above constant. However, there is a time lag between the application pressure response and the movement speed response. Therefore, in order to keep the coating cross-sectional area constant at all times, control may be performed so that the speed change curve is superimposed on the pressure response curve.

図2に圧力応答曲線と速度変化曲線の関係を示す。図2(a)は従来の応答曲線を、(b)は本発明になる応答曲線を示している。   FIG. 2 shows the relationship between the pressure response curve and the speed change curve. 2A shows a conventional response curve, and FIG. 2B shows a response curve according to the present invention.

図2(a)のように塗布圧力の応答は立ち上り始めと立ち下り始めは鋭く変化するが、目標圧力又は終点圧力に近づくに連れ、なだらかに変化するという特性がある。このため、立ち上り初め側と、目標値から立ち下り始めの部分を同等の曲率を設けた速度変化曲線で合わせようとすると、どちらかが合わなくなる。また、立ち上り側及び立ち下がり側をそれぞれ異なる曲率で合わせようとすると、立ち上り始めと立ち下り始めの鋭い変化に合わせた速度変化ではシール材がノズルの動きに追従できず、断線が発生し易い。そこで、図2(b)のように、圧力指令値を多段階に切替制御することで塗布速度に追従させることが可能となる。多段に圧力指令値を切替制御することで図のように、見かけ上、圧力変化時間を単段で切替た場合の圧力応答時間より充分長くしたものである。これにより、速度変化の立ち上り立ち下りに関わらず、圧力の変化し始めと変化し終わりの曲率を速度変化の曲率とほぼ同等にすると共に、シリンジ内の塗布するペースト残量の変化による圧力応答性の変化が小さくなるように制御した。このとき、圧力指令値の変化のピッチを多段階にする場合、ピッチを細かくして見かけ上連続的になるように変化させても構わない。   As shown in FIG. 2A, the response of the coating pressure changes sharply at the beginning of rising and at the beginning of falling, but has a characteristic that it gradually changes as the target pressure or end point pressure is approached. For this reason, when trying to match the rising start side and the falling start portion from the target value with a speed change curve provided with an equivalent curvature, either of them does not match. Further, when trying to match the rising side and the falling side with different curvatures, the seal material cannot follow the movement of the nozzle due to a speed change in accordance with a sharp change at the beginning of rising and at the beginning of falling, and disconnection is likely to occur. Therefore, as shown in FIG. 2B, it is possible to follow the coating speed by switching and controlling the pressure command value in multiple stages. By controlling the pressure command value to be switched in multiple stages, as shown in the figure, the pressure change time is apparently sufficiently longer than the pressure response time when switching in a single stage. This makes the curvature at the beginning and end of the pressure change almost equal to the curvature of the speed change, regardless of the rise and fall of the speed change, and the pressure responsiveness due to the change in the remaining paste amount in the syringe The change was controlled so that the change in was small. At this time, when the pitch of the change of the pressure command value is made multistage, the pitch may be finely changed so as to be apparently continuous.

図3(a)に圧力応答時間・応答遅れと、圧力切替指令時間との関係をシリンジ内のペースト残量をパラメータとして示したものである。一般に単段で圧力指令値を出すと、垂直に目標値に到達する。すなわち、単段切替時は応答切替指令時間は0となる。例えば、目標の圧力値を2つに分割して1段目の指令値(目標値よりは小さい圧力値)を与えてから、次に目標の圧力指令値を与えるまでの時間を応答切替指令時間と称している。すなわち、1段目の指令を与えてから最終目標の圧力指令値を与えるまでの時間を圧力切替指令時間と称している。このとき、できるだけ応答曲線を滑らかにするには切替回数を多段に多くしたほうが良い。図3(b)にシリンジ内のペースト残量による応答時間の差を縦軸に、横軸に圧力切替指令時間を示したものである。圧力切替指令時間を長くするに連れて圧力応答時間は延び、圧力応答時間が圧力切替指令時間に近づいてくるが、応答遅れは逆に小さくなる(図3(a))。また、塗布材残量が満杯時より微量時の方が応答時間も応答遅れも大きくなる(図3(a))。この塗布材残量微量時と満杯時の応答遅れの差は、圧力切替指令時間を長くするに従って小さくなる(図3(a))。これより、圧力切替時間を、単段で切替えた場合の圧力応答時間より充分長くすると、シリンジ内のペースト残量の変化による圧力応答性の変化は小さくなる。 FIG. 3 (a) shows the relationship between the pressure response time / response delay and the pressure switching command time with the remaining paste amount in the syringe as a parameter. In general, when a pressure command value is issued in a single stage, the target value is reached vertically. That is, at the time of single stage switching, the response switching command time is zero. For example, the time from when the target pressure value is divided into two and given the first step command value (pressure value smaller than the target value) until the next target pressure command value is given is the response switching command time It is called. That is, the time from when the first-stage command is given until the final target pressure command value is given is referred to as the pressure switching command time. At this time, in order to make the response curve as smooth as possible, it is better to increase the number of times of switching. FIG. 3B shows the difference in response time depending on the remaining amount of paste in the syringe on the vertical axis and the pressure switching command time on the horizontal axis. As the pressure switching command time is lengthened, the pressure response time increases and the pressure response time approaches the pressure switching command time, but the response delay becomes conversely small (FIG. 3A). In addition, the response time and response delay become larger when the remaining amount of the coating material is small than when it is full (FIG. 3A). The difference between the response delay when the coating material remaining amount is small and when the coating material is full becomes smaller as the pressure switching command time is increased (FIG . 3A) . Thus, if the pressure switching time is sufficiently longer than the pressure response time when switching in a single stage, the change in pressure response due to the change in the remaining amount of paste in the syringe is reduced.

LCDパネルのシールパターンは、コーナ部に微小なRを持つ長方形であり、コーナ部の塗布形状を整えるためにコーナ手前で減速しコーナ通過後に加速している。また始終端形状を整えるために、始端で加速し終端で減速している。   The seal pattern of the LCD panel is a rectangle having a minute R at the corner, and decelerates before the corner and accelerates after passing the corner in order to adjust the coating shape of the corner. In addition, in order to adjust the start / end shape, the vehicle accelerates at the start and decelerates at the end.

図4を用いて本発明の1実施例を説明する。   An embodiment of the present invention will be described with reference to FIG.

図4(a)にシール材線状パターンの一例を示す。図に示すように、今回対象とする線状パターンは各コーナに微小なRを有する、閉じた長方形である。図4(b)には図4(a)に示すパターンを塗布する際の、圧力多段切替における塗布圧力と、XY方向移動用のモータ速度制御の一例を示したものである。   FIG. 4A shows an example of the sealing material linear pattern. As shown in the figure, the target linear pattern is a closed rectangle with a minute R at each corner. FIG. 4B shows an example of coating pressure in pressure multistage switching and motor speed control for movement in the XY directions when the pattern shown in FIG. 4A is applied.

図4(a)に示すように、最初は始点(直線部の中間点)から加速しながらX方向に塗布し、第一コーナ手前で減速する。この時、塗布圧力はX方向の速度に重なるように多段に圧力が切替られる。第一コーナでXモータは減速、Yモータは加速するが、塗布速度は一定である。
従って塗布圧力も一定となる。コーナを抜けてからYモータはさらに加速し、第二コーナ手前で減速する。第一コーナを抜けた後はYモータの速度変化に追従して塗布圧力を変化するよう制御する。第二コーナでYモータは減速、Xモータは逆方向に加速するが、塗布速度は一定である。この時塗布圧力は一定に制御する。コーナを抜けてからXモータはさらに加速し、第三コーナ手前で減速する。すなわち第2コーナを抜けると図のようにXモータの速度が逆方向になるが、塗布圧力は徐々に増加する。しかし、速度の絶対値と塗布圧力の増加は重なるように制御されている。第三コーナでXモータは減速、Yモータは逆方向に加速するが、塗布速度は一定であり、塗布圧力も一定に制御される。コーナを抜けてからYモータはさらに加速し、第四コーナ手前で減速する。コーナを抜けてから塗布圧力はYモータの絶対値に重なるように制御している。第四コーナでYモータは減速、Xモータは正方向に加速するが、塗布速度は一定である。コーナを抜けてからXモータはさらに加速し、終点手前で減速して一つのパターンの塗布が終了する。塗布圧力は基本的に、Xモータ速度とYモータ速度を合成した塗布速度の絶対値と、グラフ形状が重なるように調整する。各コーナでは塗布圧力は一定になるが、その前後の直線における加減速部では塗布圧力指令値を多段階乃至は見かけ上連続的に切替制御することで、立ち上り初めと立ち下り初めは鋭く変化するが、目標圧力に近づくにつれなだらかに変化する圧力応答カーブを人為的に制御することが可能となり、上下に同等の曲率を設けた速度変化曲線で合わせることが容易になる。
As shown in FIG. 4 (a), the coating is first applied in the X direction while accelerating from the starting point (intermediate point of the straight line portion) and decelerated before the first corner. At this time, the application pressure is switched in multiple stages so as to overlap the speed in the X direction. At the first corner, the X motor decelerates and the Y motor accelerates, but the coating speed is constant.
Accordingly, the coating pressure is also constant. After exiting the corner, the Y motor further accelerates and decelerates before the second corner. After exiting the first corner, the application pressure is controlled to change following the speed change of the Y motor. At the second corner, the Y motor decelerates and the X motor accelerates in the opposite direction, but the coating speed is constant. At this time, the coating pressure is controlled to be constant. After exiting the corner, the X motor further accelerates and decelerates before the third corner. That is, when passing through the second corner, the speed of the X motor is reversed as shown in the figure, but the coating pressure gradually increases. However, the absolute value of the speed and the increase in the coating pressure are controlled to overlap. At the third corner, the X motor decelerates and the Y motor accelerates in the reverse direction, but the coating speed is constant and the coating pressure is also controlled to be constant. After exiting the corner, the Y motor further accelerates and decelerates before the fourth corner. After exiting the corner, the coating pressure is controlled to overlap the absolute value of the Y motor. In the fourth corner, the Y motor decelerates and the X motor accelerates in the positive direction, but the coating speed is constant. After exiting the corner, the X motor further accelerates, decelerates before the end point, and the coating of one pattern is completed. The coating pressure is basically adjusted so that the absolute value of the coating speed obtained by combining the X motor speed and the Y motor speed overlaps the graph shape. The application pressure is constant at each corner, but the acceleration / deceleration section on the straight lines before and after it changes sharply at the beginning of the rise and at the beginning of the fall by controlling the application pressure command value in multiple steps or apparently continuously. However, it becomes possible to artificially control the pressure response curve that gradually changes as the target pressure is approached, and it is easy to match with the speed change curve having the same curvature up and down.

LCD用シールディスペンサ構成例と塗布断面積の説明図である。It is explanatory drawing of the sealing dispenser structure for LCD, and application | coating cross-sectional area. 圧力指令値の切替における塗布速度の関係を示した図である。It is the figure which showed the relationship of the coating speed in switching of a pressure command value. 圧力切替における立ち下り圧力切替指令時間・圧力応答時間関係説明図である。FIG. 6 is a diagram for explaining a relationship between a falling pressure switching command time and a pressure response time in pressure switching. シール材線状パターン例説明図である。It is explanatory drawing of a sealing material linear pattern example.

符号の説明Explanation of symbols

1…テーブル、2…基板、3…門型フレーム、4…塗布ヘッド、5…シリンジ、6…空圧源、7…ノズル、8…ペースト、9…制御手段、10…圧力計。   DESCRIPTION OF SYMBOLS 1 ... Table, 2 ... Board | substrate, 3 ... Portal frame, 4 ... Application | coating head, 5 ... Syringe, 6 ... Air pressure source, 7 ... Nozzle, 8 ... Paste, 9 ... Control means, 10 ... Pressure gauge.

Claims (1)

架台上に基板を載置するテーブルと、前記テーブルをまたいで一方向に移動可能に設置された門型フレームと、前記門型フレームに設けられこの門型フレームの移動方向とは直角方向に移動可能塗布ヘッドと、前記塗布ヘッドのペーストを収納するシリンジと、前記シリンジに空気圧を供給する空圧手段と、前記シリンジに設けた吐出口であるノズルと、前記塗布ヘッドを移動させながら空気圧を前記シリンジに加えて前記ノズルから前記ペースト塗布するため、前記門型フレーム及び前記塗布ヘッドの移動制御と前記空圧手段の圧力制御を行う制御手段とを備えたペースト塗布機において、
前記門型フレーム及び前記塗布ヘッドの移動速度を計測する速度計測手段と、前記空圧手段の空気圧を計測する圧力計測手段とを設け、
前記制御手段は、前記シリンジ内の前記ペーストの残量が微量であるときにおける前記速度計測手段及び前記圧力計測手段が計測した結果に基づいて、圧力応答曲線を速度変化曲線に重ね塗布断面積を一定に保持するように圧力指令値を多段に切替制御することを特徴とするペースト塗布機。
A table on which a substrate is placed on a gantry, a portal frame that can be moved in one direction across the table, and a moving direction of the portal frame that is provided on the portal frame and moves in a direction perpendicular thereto a coating head capable of, a syringe for containing a paste of the coating head, a pneumatic means for supplying air pressure to the syringe, and the nozzle is a discharge port provided in the syringe, air pressure while moving the coating head for applying the paste from the nozzle in addition to the syringe, the paste applying machine and a control means for performing pressure control of the movement control and the pneumatic means of the gantry frame and the coating head,
A speed measuring means for measuring a moving speed of the gantry frame and the coating head, and a pressure measuring means for measuring the air pressure of the pneumatic means is provided,
The control means overlaps the pressure response curve with the speed change curve based on the result of measurement by the speed measurement means and the pressure measurement means when the remaining amount of the paste in the syringe is very small, and calculates the coating cross-sectional area. paste applying machine according to claim and Turkey to switching control in the multi-stage pressure command value so as to hold constant.
JP2007330886A 2007-12-21 2007-12-21 Paste applicator Expired - Fee Related JP5286775B2 (en)

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