CN100456136C - Method for controlling multi bus time and sequence synchronization of advanced scanning projecting photoetching machine - Google Patents
Method for controlling multi bus time and sequence synchronization of advanced scanning projecting photoetching machine Download PDFInfo
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Abstract
The present invention discloses a method for controlling multibus time sequence synchronization of a step scanning projection mask aligner. A unified time reference is provided for all control units relevant to scanning exposure by a synchronous bus controller. Exposure control software transmits scan parameters to the synchronous bus controller through a VME bus interface of a CPU board of an industrial control computer, and the synchronous bus controller accurately and synchronously controls all the control units by a multibus synchronous control system according to the parameters designated by the CPU board of the industrial control computer. The method has the advantages that the method can strictly control the trigger time of each synchronous signal, and thereby, the real time and the synchronization of signals among all the control units are realized.
Description
Technical field
The invention belongs to the photoetching machine control system field, relate in particular to the synchronisation control means of advanced scanning projecting photoetching machine multi bus time and sequence.
Background technology
Photoetching is the operation of most critical in the ic processing, so litho machine is the equipment of most critical in the ic processing.Abroad as far back as just having proposed the notion of photoetching of future generation many years ago, and technology such as extreme ultraviolet linear light quarter, electron beam projection lithography, ion beam projection lithography have been carried out a large amount of research, but owing to many reasons such as technology, production efficiency, costs, these technology still are difficult to practicability at present.Account for the deep UV projection lithography equipment that remains of market leading position at present.
Current, what the overwhelming majority came into operation is the step and repeat lithography machine.The step and repeat lithography machine adopts Polaroid technology, for the lens combination that increases image field requirement larger diameter as support, but this requirement has run into the dual restriction of technical elements and economic aspect, thereby has limited the step and repeat lithography machine to more high precision, larger sized chip manufacture direction develop.So produced a kind of novel litho machine---advanced scanning projecting photoetching machine.The exposure process of step-by-step scanning photo-etching device and step and repeat lithography machine are different.Light beam projects on the mask face by a slit and transmission illumination system, mask with set at the uniform velocity by this Shu Guang.Simultaneously, silicon chip motion in the opposite direction below lens.This step-by-step scanning photo-etching device is compared with the step and repeat lithography machine, has lower distortion and more large-area image field; Simultaneously, the mask platform of the work stage of carrying silicon chip and carrying mask can both realize high-speed motion, makes step-by-step scanning photo-etching device have very high throughput rate, thereby has satisfied the demand of market to semi-conductor chip processing better.
The ultimate principle of advanced scanning projecting photoetching machine is seen Fig. 1, and Fig. 1 is image field and slit exposure area schematic, and zone 10 is an image field, and its scope is greater than common step and repeat lithography machine, and step and repeat lithography machine image field is generally 22*22mm
2, step-by-step scanning photo-etching device can reach 26*33mm
2, zone 11 is the slit exposure zone shown in the shade.Fig. 2 is the advanced scanning projecting photoetching machine working state schematic representation, step-by-step scanning photo-etching device is when carrying out exposure scanning, at first will treat on the silicon chip 27 that exposed areas moves to the below of lens 22, silicon slice placed is on work stage 21, and the motion that remains a constant speed in exposure process.The mask 26 on this motion and the mask platform 23 and the motion parts of scanning slit unit 24 in time be strict synchronism on the position, silicon chip surface remains in exposure process in the best focal plane of lens 22 always simultaneously.When illuminator 25 arrives assigned address in work stage 21 and mask platform 23 with command speed, by synchronous triggering and the light dosage 28 that provides exposure required is provided.
Step-by-step scanning photo-etching device is by mask platform 23 and the work stage 21 relative modes that are synchronized with the movement, and waits other submodule collaborative work with illumination, realizes exposure actions.Because the factor of decision exposure quality such as alignment precision, critical size requires each submodule precise synchronization on action sequence that participation exposes in the litho machine.
Step-by-step scanning photo-etching device is compared with the step and repeat lithography machine, need note synchronous problem more, this be because:
(1) to all submodules that relates to, scanning must be finished in the identical time period.Specifically, work stage and mask platform must be passed through track planned in advance in the identical time period; Illuminator must provide equally distributed correct dose in the identical time period; The slit control system must synchronously open and close its slit with mask platform.
(2) for all submodules that relates to, the initial moment of scanning must be identical with the finish time.Particularly, work stage and mask platform must begin to provide the moment of exposure dose in illuminator, arrive correct position with correct speed.
Can draw by above analysis,, require all submodules that relate on scanning sequence, to obtain strictness and cause for the exposure scan-synchronized.
In addition, it is that actual scanning is prepared that the submodule that participates in exposing needs a period of time, and this time period is called setup time, is mainly used in the speed that laser instrument precharge and work stage and mask platform begin to quicken finally to reach and remain on appointment.The actual scanning time be meant illuminator provide light source, simultaneously work stage and mask platform with uniform motion, silicon chip uniform exposure, finish the required time of exposure actions.
Therefore, single pass was made of preparatory stage and actual scanning stage in the litho machine.
Because throughput rate and performance demands should be able to directly enter into scanning next time after single pass finishes, and not occur pausing in the middle of twice scanning, such scanning is called continuous exposure scanning.In order to realize continuous exposure scanning, require when carrying out current scanning, can prepare essential information for scanning next time.In the continuous exposure scanning, Sao Miao setup time and actual scanning time need be according to the information acquisitions of current scanning next time, so system can only plan by jump ahead; Simultaneously, in the continuous exposure synchronous scanning process, because the variation of external condition need be used the follow-up exposure parameter of before having finished of scanning information correction.
Can draw as drawing a conclusion from above analysis: realize the control of continuous exposure scan-synchronized, what need that specific mechanism guarantees the control module that relates in the scanning process is strict synchronism in time; In order to guarantee that the synchronizing signal error between each control module is strict controlled in the scope of permission, needs the synchro control system to control accurately in time.
Summary of the invention
The technical issues that need to address of the present invention are to provide in the many total sizes of a kind of advanced scanning projecting photoetching machine, need the synchro control system to control accurately in time.
Summary of the invention
The technical issues that need to address of the present invention are to provide a kind of advanced scanning projecting photoetching machine multi bus time and sequence synchronous control method, so that the synchro control system accurately controls in time, thereby realize the synchro control of multi bus time and sequence.
Isochronous bus controller is the core of real-time synchro control process, and the control module that relates to for all scan exposures provides the unified time benchmark.The exposure Control Software passes to isochronous bus controller to sweep parameter by the VME bus interface of industrial computer CPU board, isochronous bus controller is according to industrial computer CPU board designated parameters, by the synchro control system of multibus, realize accurate synchro control to each control module.
Technical scheme of the present invention may further comprise the steps:
(1) upper computer software is imported and is provided with by the user exposure parameter is outputed in the work stage mask platform real time operating system that comprises isochronous bus controller;
(2) work stage mask platform real time operating system converts exposure parameter to various required synchro control relations;
(3) work stage mask platform real time operating system sends the synchro control relation to isochronous bus controller by the VME bus;
(4) isochronous bus controller converts actual synchronous data bus signal to according to given synchro control relation, guarantees the synchronous and state synchronized in servo interval of laser numbered card and motion control card;
(5) isochronous bus controller converts actual outer synchronous signal to according to given synchro control relation, guarantees the state synchronized of illumination for exposure control system and track control system;
(6) motion control card receives the synchronous and state synchronized signal in servo interval of isochronous bus controller, carry out real-time synchronous processing produce to interrupt for the high-speed data process chip of motion control card and servocontrol is handled, motion control card with servo interval as the servo sample cycle;
(7) motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, convert optical fiber trigger pip TRGGER and status signal respectively to, send to the I/O of lower floor control panel, guarantee the synchronous and state synchronized in the servo interval of the I/O of lower floor control panel;
(8) motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, convert optical fiber trigger pip TRGGER and status signal respectively to, send to leveling and focusing control system and track control system, guarantee the synchronous and state synchronized in servo interval of these two subsystems;
(9) I/O of lower floor control panel, track control system and leveling and focusing control system receive the synchronous and state synchronized signal in servo interval, trigger the high-speed data process chip and carry out real-time synchronous processing.
The aforesaid operations system can be Vxworks, pSOS, RTLinux, WinCE or OSE real time operating system.
Above-mentioned high-speed data process chip can be dsp chip, fpga chip, ARM chip or PPC chip.
Above-mentioned host computer can be workstation or industry control PC.
The invention has the beneficial effects as follows since with the synchronous bus data transfer cycle as strictness
Fig. 1 is step-by-step scanning photo-etching device exposure image field and scanning slit synoptic diagram;
Fig. 2 is advanced scanning projecting photoetching machine exposure scanning ultimate principle figure;
Fig. 3 is the structured flowchart of multi bus time and sequence synchro control system;
Fig. 4 is synchronous data bus and outer synchronous signal block diagram;
Fig. 5 is an optical-fibre communications data transmission blocks structural drawing;
Fig. 6 is an optical-fibre communications data reception block structural diagram;
Fig. 7 is applied to scan-synchronized control procedure block diagram for multi bus time and sequence synchro control system.
Embodiment
Advanced scanning projecting photoetching machine is a very complicated control system, with the isochronous bus controller is in the control core system, exist the various control bus, in order to make each control module that connects different bus realize strict synchro control, must realize by a kind of multi bus time and sequence synchro control system.
The structured flowchart of multi bus time and sequence synchro control system as shown in Figure 3.Isochronous bus controller is the core controller of advanced scanning projecting photoetching machine synchro control.After all subsystems that participate in the synchronous scanning process consult under the exposure Control Software, isochronous bus controller is implemented the real-time synchro control on the whole scanning process control module, and multi bus time and sequence synchro control system can guarantee the real-time control of control module.
Isochronous bus controller is realized the synchro control to work stage motion control card, mask platform motion control card, alignment motion control card, work stage laser numbered card, mask platform laser numbered card by synchronous data bus mechanism.Isochronous bus controller is by the synchro control of outer synchronous signal sequential realization to illumination for exposure control system, track control system.
Motion control card converts the synchronous control signal that obtains from isochronous bus controller to the optical-fibre communications agreement and is transmitted to the I/O of lower floor control panel in real time, guarantees that the I/O of lower floor control panel keeps synchronous in time.Simultaneously motion control card is transmitted to leveling and focusing control system and track control system to synchronizing signal in real time by optical-fibre communications equally, guarantee its in time synchronously.
The bus that advanced scanning projecting photoetching machine participates in synchro control has SDB synchronous data bus, outer synchronous signal and optical-fibre communications, wherein:
(1) synchronous data bus is controlled by isochronous bus controller, and motion control card, laser numbered card participate in the data transmission procedure of synchronous data bus, as shown in Figure 4.Isochronous bus controller is in the control data exchange, and each servo interval sends synchronous state signal to motion control card, guarantees that all motion controls are stuck in servo interval and state synchronization in the servocontrol process.Servo interval is exactly the servo sample cycle of motion control;
(2) outer synchronous signal is controlled by isochronous bus controller, as shown in Figure 4, and synchronous implication of a signal indication.In the process of exposure, outer synchronous signal guaranteed illumination for exposure control system, track control system and work stage mask platform in time synchronously;
(3) optical-fibre communications is by the motion control card control, (# sends priority ratio * height among the figure) as shown in Figure 5, by host-host protocol module TRIGGER COMMAND submodule, the servo interval synchronizing signal one synchrodata bus that synchronous data bus sends is interrupted, convert optical fiber to and trigger (TRIGGER) signal, the synchronous data bus of dsp processor response simultaneously interrupts, current state is converted to data frame signal by sending the Frame submodule, be transmitted to the I/O of lower floor control panel through optical fiber FPGA sending module and optical fiber transmission chip, track control system and leveling and focusing control system.Optical fiber trigger pip (TRIGGER) is a high priority preemptive type signal, has the highest real-time.The receiving end of optical-fibre communications is (# sends priority ratio * height among the figure) as shown in Figure 6, by optical fiber receiving chip and optical fiber FPGA receiver module, obtain optical fiber trigger pip and data frame signal and give reception TRIGGER COMMAND submodule and receiving data frames submodule respectively.Receive TRIGGER COMMAND submodule after receiving optical fiber trigger pip (TRIGGER) signal, produce the trigger pip (TRIGGER COMMAND arrival) of a hard real time at once, trigger corresponding real-time operation, dsp processor carries out the state synchronized processing to the status signal that receives simultaneously, has guaranteed the synchronous and state synchronization at servo interval.
For a better understanding of the present invention, be that most preferred embodiment illustrates in greater detail method proposed by the invention with Fig. 7.
As shown in Figure 7, control system is made up of host computer, industrial computer CPU board, isochronous bus controller, motion control card, laser numbered card and track control system, illumination for exposure control system.
Host computer adopts workstation or industry control PC, uses operating systems such as Unix or Windows; The industrial computer CPU board adopts as Vxworks, pSOS, RTLinux, WinCE or OSE real time operating system; Host computer and industrial computer CPU board are by the interconnection of Industrial Ethernet communication mode.Adopt the VME bus to link together between industrial computer CPU board and isochronous bus controller, motion control card, the laser numbered card, so that carry out real-time embedded message exchange.Adopt self-defining synchronous data bus SDB to carry out exchanges data between isochronous bus controller, motion control card, the laser numbered card.Connection between isochronous bus controller and track control system, the illumination for exposure control system adopts RS422 or RS485 differential signal to connect.Optical-fibre communications uses optical fiber cable to connect.The acp chip of uses such as isochronous bus controller, motion control card, laser numbered card is FPGA, DSP etc.Exposure Control Software module is positioned at host computer; The scan control software module is positioned at the industrial computer CPU board.
In order to realize the sequential synchro control of multibus, isochronous bus controller is issued synchronizing information to work stage motion control card, mask platform motion control card and alignment motion control card in real time by synchronous data bus, isochronous bus controller sends synchronizing information by outer synchronous signal to track control system and illumination for exposure control system simultaneously, is fully synchronous with work stage, mask platform, exposure dose and slit motion in the strict guarantee continuous exposure scan control.Motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip (TRGGER) and status signal, send to the I/O of lower floor control panel, track control system and leveling and focusing control system, guarantee the synchronous and state synchronized in servo interval of the I/O of lower floor control panel, track control system and leveling and focusing control system.
At first, the exposure Control Software module that is positioned at host computer sends to the industrial computer CPU board to exposure parameter by Industrial Ethernet; After the industrial computer CPU board received exposure parameter, by the Vxworks operating system of industrial computer CPU board, the invoke synchronous driver module was transferred to isochronous bus controller to the corresponding synchronous controlled variable; And the industrial computer CPU board starts isochronous bus controller by the invoke synchronous driver module; Isochronous bus controller reinforms motion control card and laser numbered card, informs that current state enters the preparation sweep phase, and work stage begins to move to sweep starting point; Synchronizing signal beacon scanning slit blade 1 setting in motion of isochronous bus controller output scanning slit movable blade.Isochronous bus controller is the output laser precharging signal simultaneously, indicates the high-voltage capacitor charging of first light pulse, and this moment, the preparation sweep phase of isochronous bus controller control was finished; Then, isochronous bus controller interrupts to the request of industrial computer CPU board, the current preparation sweep phase of notice industrial computer CPU board is finished, so isochronous bus controller notice motion control card and laser numbered card, current state enters the actual scanning stage, and output laser explosure synchronizing signal, indication illumination for exposure control system produces laser pulse, and laser instrument continues to keep charged state; And motion control card is finished scanning motion control according to the requirement of sweep phase; Simultaneously, motion control card sends to the I/O of lower floor control panel, leveling and focusing control system and track control system to servo interval synchronizing signal by optical-fibre communications, to guarantee servo synchronous and state synchronized, and notice enters the actual scanning state, finish scanning motion control, the sampling period at servo interval is 1000us, 800us, 500us, 400us, 250us or 200us.
After finishing scanning motion control, isochronous bus controller output blade synchronizing signal beacon scanning slit blade 2 setting in motions, at this moment, the actual scanning stage of isochronous bus controller finishes, so isochronous bus controller interrupts to the request of industrial computer CPU board, the notice industrial computer current actual scanning stage of CPU board finishes; Then, if continuous sweep, then isochronous bus controller turns back to and prepares the sweep phase circulation, otherwise, notice motion control card, laser numbered card enter idle condition, and the motion control card notice I/O of lower floor control panel, leveling and focusing control system and track control system enter idle condition.
Claims (6)
1. control method that the advanced scanning projecting photoetching machine multi bus time and sequence is synchronous is characterized in that may further comprise the steps:
(1) upper computer software is imported and is provided with by the user exposure parameter is outputed in the work stage mask platform real time operating system that comprises isochronous bus controller;
(2) work stage mask platform real time operating system converts exposure parameter to various required synchro control relations;
(3) work stage mask platform real time operating system sends the synchro control relation to isochronous bus controller by the VME bus;
(4) isochronous bus controller converts actual synchronous data bus signal to according to given synchro control relation, guarantees the synchronous and state synchronized in servo interval of laser numbered card and motion control card;
(5) isochronous bus controller converts actual outer synchronous signal to according to given synchro control relation, guarantees the state synchronized of illumination for exposure control system and track control system;
(6) motion control card receives the synchronous and state synchronized signal in servo interval of isochronous bus controller, carry out real-time synchronous processing produce to interrupt for the high-speed data process chip of motion control card and servocontrol is handled, motion control card with servo interval as the servo sample cycle;
(7) motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, convert optical fiber trigger pip and status signal respectively to, send to the I/O of lower floor control panel, guarantee the synchronous and state synchronized in the servo interval of the I/O of lower floor control panel;
(8) motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, convert optical fiber trigger pip and status signal respectively to, send to leveling and focusing control system and track control system, guarantee the synchronous and state synchronized in servo interval of these two subsystems;
(9) I/O of lower floor control panel, track control system and leveling and focusing control system receive the synchronous and state synchronized signal in servo interval, trigger the high-speed data process chip and carry out real-time synchronous processing.
2. the synchronous control method of advanced scanning projecting photoetching machine multi bus time and sequence as claimed in claim 1 is characterized in that described operating system is one of Vxworks, pSOS, RTLinux, WinCE or OSE real time operating system.
3. the synchronous control method of advanced scanning projecting photoetching machine multi bus time and sequence as claimed in claim 1, the sampling period that it is characterized in that described servo interval is one of 1000us, 800us, 500us, 400us, 250us or 200us.
4. the synchronous control method of advanced scanning projecting photoetching machine multi bus time and sequence as claimed in claim 1, it is characterized in that described various required synchro control relation comprises that synchronous data bus is synchronous, outer synchronous signal is synchronous, and servo interval is synchronous, and system state is synchronous.
5. the synchronous control method of advanced scanning projecting photoetching machine multi bus time and sequence as claimed in claim 1 is characterized in that described high-speed data process chip is one of dsp chip, fpga chip, ARM chip, PPC chip.
6. the synchronous control method of advanced scanning projecting photoetching machine multi bus time and sequence as claimed in claim 1 is characterized in that described host computer adopts workstation or industry control PC.
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