CN100535756C - Control method for coaxial alignment signal acquisition and processing, and key subsystem thereof - Google Patents
Control method for coaxial alignment signal acquisition and processing, and key subsystem thereof Download PDFInfo
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Abstract
The invention discloses a method for coaxial aligning signal collection and processing control method and key subsystem thereof. The method comprises: implementing pulse laser generation and synchronizing control of light intensity signal collection via coordinating plural control modules; synchronizing control of light intensity collection and position signal collection; synchronizing control of aligning signal processing and silicon chip desk scanning action; supporting on continuous aligning scanning mechanism, in the key subsystem, the weak light signal being able to be reliably transferred to light probing control unit for pre-processing and sampling via fiber; transferring the light intensity data to signal processing unit via parallel light intensity data general bus.
Description
Technical field
The invention belongs to the information Control field, relate in particular to a kind of advanced scanning projecting photoetching machine mask aerial image signals collecting and process control method.
Background technology
Litho machine is the equipment of most critical in the ic processing, two main technique flow processs of projection lithography equipment are exposures and aim at, exposure makes mask graph image in silicon chip clearly, aligning is determined spatial relation between them by the special marking on mask, mask platform, silicon chip, the silicon chip platform, make mask graph can accurately image in assigned address on the silicon chip, realize alignment precision.Therefore, before every silicon wafer exposure, all must aim at.To being divided into coaxial alignment and off-axis alignment, coaxial alignment is determined the position relation before mask (platform) and the silicon chip platform, uses the optical system identical with exposure process,
In the coaxial alignment process, mask platform is motionless, alignment mark on the mask images in the silicon chip plane, the motion of silicon chip platform, make the reference marker scanning alignment mark imaging on the silicon chip platform, the light intensity of the imaging of sampling is simultaneously handled to seek its maximal value, and the position of largest light intensity correspondence is an alignment point.The movement locus of silicon chip platform is made of the movement locus of two dimension (XZ or YZ) as shown in Figure 1 the motion of a plurality of different levels.
As seen,, must realize light source---DUV laser instrument for finishing coaxial alignment one time, alignment mark imaging light intensity and silicon chip platform position sampling, registration signal is handled the coordination control of three aspects.Simultaneously,, can carry out continuously in the scanning motion of different level, promptly between twice adjacent horizontal scanning, not pause wishing the silicon chip platform on time for boosting productivity.Therefore to finish coaxial alignment one time, necessarily require:
1) is equipped with coaxial alignment signals collecting and processing controls subsystem, guarantees collection, transmission and the processing registration signal of precise and high efficiency;
2) pulse laser generation and light intensity signal collection is synchronous, guarantees accurately to sample light intensity signal;
3) light intensity signal collection and position signal acquisition is synchronous, guarantees that light intensity data is corresponding with position data
4) registration signal processing and the scanning motion of silicon chip platform is synchronous, guarantees the real-time that registration signal is handled
5) support continuous sweep mechanism, guarantee that alignment procedures does not influence equipment productivity.
Summary of the invention
The technical issues that need to address of the present invention are to provide a kind of coaxial alignment signals collecting and process control method, with realize pulse laser produce with light intensity signal collection synchronously, light intensity signal collection and position signal acquisition synchronously, that registration signal is handled with the scanning motion of silicon chip platform is synchronous.
Technical scheme of the present invention comprises the steps:
Step 1): coaxial alignment signals collecting and processing controls subsystem main control unit calculate correlation parameter according to the alignment mark that the user selects, and start one time coaxial alignment;
Step 2): coaxial alignment signals collecting and processing controls subsystem main control unit are issued the expectation value and the number of samples of each horizontal scanning interval, sample frequency synchronously and the motion control subsystem main control unit;
Step 3): reach the motion control subsystem main control unit synchronously and calculate actual sample frequency and number, and the result is returned coaxial alignment signals collecting and processing controls subsystem main control unit, finish first order negotiation process;
Step 4): according to the sample frequency and the number of reality execution, coaxial alignment signals collecting and processing controls subsystem main control unit generate signals collecting and processing parameter, and issue signal processing unit and photodetection interface unit in coaxial alignment signals collecting and the processing controls subsystem; And notice laser controlling subsystem main control unit is prepared the beginning alignment scanning;
Step 5): coaxial alignment signals collecting and processing controls subsystem main control unit send beginning alignment scanning motion command to reaching the motion control subsystem main control unit synchronously, and first order sampling delay time and relevant range of movement parameter are issued synchronously and the motion control subsystem main control unit;
Step 6): reach motion control subsystem main control unit and motion control unit synchronously and carry out second level negotiation, negotiation is horizontal scanning setup time and uniform speed scanning time for the first time;
Step 7): reach the motion control subsystem main control unit synchronously and in driver element, line up and start horizontal scanning for the first time, negotiate setup time of horizontal scanning next time and uniform speed scanning time then;
Step 8): the synchronous control unit that reaches synchronously in the motion control subsystem produces the synchronized movement signal, and coordination mask platform carrying mask moves to assigned address and the silicon chip platform carries out a horizontal scanning campaign;
Step 9): reach synchronously synchronous control unit in the motion control subsystem produce the state synchronized signal and send to the coaxial alignment signals collecting and the processing controls subsystem in timing control unit, timing control unit only receives other signal when the state synchronized signal is effective, otherwise is in final state;
Step 10): the silicon chip platform enters uniform speed scanning after the stage, and the synchronous control unit that reaches synchronously in the motion control subsystem produces laser trigger signal, and the laser controlling interface unit will produce the laser lighting pulse according to this trigger pip control laser instrument;
Step 11): according to the first order sampling delay time, synchronously and the synchronous control unit in the motion control subsystem produce luminosity sampling signal and the timing control unit in coaxial alignment signals collecting and processing controls subsystem and send to photodetection interface unit in coaxial alignment signals collecting and the processing controls subsystem, the photodetection interface unit is according to the second level sampling delay time, photodetection control module in control coaxial alignment signals collecting and the processing controls subsystem carries out luminosity sampling, and reads sampled data;
Step 12): according to the first order sampling delay time, synchronously and the synchronous control unit in the motion control subsystem produce the position signalling sampling unit that the position sampling signal controlling reaches in the motion control subsystem synchronously and carry out mask platform and silicon chip platform position sampling, after the sampling of position signalling sampling unit is finished position data issued the signal processing unit in coaxial alignment signals collecting and the processing controls subsystem;
Step 13): the signal processing unit in coaxial alignment signals collecting and the processing controls subsystem receives the timing control unit request light intensity data in coaxial alignment signals collecting and processing controls subsystem after the position data, if timing control unit is in nonfinal state, the photodetection interface unit that it will be controlled in coaxial alignment signals collecting and the processing controls subsystem is transferred to signal processing unit in coaxial alignment signals collecting and the processing controls subsystem with light intensity data by parallel light-intensity data bus;
Step 14): the signal processing unit in coaxial alignment signals collecting and the processing controls subsystem is finished the synthetic and Processing Algorithm of single-point registration signal one time according to position and light intensity data;
Step 15): repeating step 8～14, up to all aligning sampled point signals collecting and processing procedures of finishing this horizontal scan period;
Step 16): reach synchronously the motion control subsystem main control unit the first time horizontal scan period will finish the negotiation and the queuing horizontal scanning for the second time of horizontal scanning next time, begin the negotiation and the queuing of horizontal scanning for the third time simultaneously;
Step 17): will begin horizontal scanning for the second time immediately after horizontal scanning for the first time finishes, and with repeating step 8～15, carry out the registration signal collection and the processing procedure of horizontal scan period for the second time during this;
Step 18): horizontal scanning for the second time will begin horizontal scanning for the third time after finishing immediately, so finish up to whole horizontal scannings;
Step 19): the synchronous control unit that reaches synchronously in the motion control subsystem makes synchronous state signal invalid, timing control unit in coaxial alignment signals collecting and the processing controls subsystem will be in final state, signal processing unit in coaxial alignment signals collecting and the processing controls subsystem begins to carry out the aftertreatment of registration signal at this moment, and result returned coaxial alignment signals collecting and processing controls subsystem main control unit, finish the coaxial alignment process one time.
As improvement of the present invention, the alignment mark that the user selects in the step 1) calculates correlation parameter and comprises alignment mark type, numbering and each markers align number of times;
Step 2) can can be 200 for 1KHz, number of samples the horizontal scanning interval described in for 500ms, sample frequency expectation value;
The first order described in the step 5) can be 2750ns time delay, and described relevant range of movement parameter comprises horizontal uniform speed scanning reference position and vertical reference position;
The second level sampling delay time described in the step 11) can be 300ns, adopt the time delay of described trigger pip relative light intensity sampled signal one-level to store, in (9), finish, sampling delay divides two-stage to store, the first order is finished in (9), and precision is 250ns, and finish in (15) second level, precision is 100ns, and two-stage stores and can reach the control of 50ns precision;
Another technical matters that the present invention need solve is to provide the key subsystem-signals collecting of coaxial alignment system in a kind of said method and processing controls subsystem to realize the accurate collection and the processing of coaxial alignment signal.
Technical scheme at this technical matters is as follows:
Comprise light intensity detector, signal processing unit, timing control unit, photodetection interface unit, photodetection control module is characterized in that: also comprise optical fiber, high-speed serial bus and parallel light-intensity data bus; Light intensity detector is connected with the photodetection control module by optical fiber, signal processing unit, timing control unit, photodetection interface unit insert parallel light-intensity data bus respectively, thereby these three unit constitute parallel syndeton, directly be connected between timing control unit and the photodetection interface unit simultaneously, and the photodetection interface unit is connected by the high-speed serial bus high speed serialization with the photodetection control module.
The flank speed of described parallel light-intensity data bus can reach 256M bps; The flank speed of described high-speed serial bus can reach 1M bps.
The invention has the beneficial effects as follows, compared with prior art, make the faint optical signal reliable transmission carry out pre-service and sampling to the photodetection control module by optical fiber; By parallel light-intensity data bus the light intensity data high efficiency of transmission is arrived signal processing unit; Realized the synchronous of pulse laser generation and light intensity signal collection by control laser trigger signal and luminosity sampling signal; Realized the synchronous of light intensity signal collection and position signal acquisition by control position sampled signal and luminosity sampling signal; Realized the synchronous of registration signal processing and the scanning motion of silicon chip platform by controlled motion synchronizing signal and state synchronized signal; Realized support by secondary mechanisms for negotiation and queue mechanism to the successive alignment scan mechanism.
Description of drawings
Fig. 1 is the movement locus of silicon chip platform;
Fig. 2 is a coaxial alignment system architecture synoptic diagram;
Fig. 3 is the main control unit relativeness synoptic diagram of three control subsystem among Fig. 2;
Fig. 4 is the control timing synoptic diagram of coaxial alignment system;
Fig. 5 is a method flow diagram of the present invention.
Embodiment
Below in conjunction with tool figure and specific embodiment the present invention is elaborated.
As shown in Figure 2, the coaxial alignment system comprises DUV LASER Light Source 1, projection imaging object lens 2, the silicon chip platform 3 of being furnished with the light intensity detector 26 of reference marker, be carved with the mask 4 of alignment mark, laser controlling subsystem 6, coaxial alignment signals collecting and processing controls subsystem 7 and synchronous and motion control subsystem 8.
Wherein signals collecting and processing controls subsystem are an independent particle system, comprise light intensity detector 25, signal processing unit 13, timing control unit 14, photodetection interface unit 15, photodetection control module 5, optical fiber 22 and parallel light-intensity data bus 21; Light intensity detector 26 is connected with photodetection control module 5 by optical fiber 22, signal processing unit 13, timing control unit 14, photodetection interface unit 15 insert parallel light-intensity data bus 21 respectively, and the photodetection interface unit is connected by the high-speed serial bus high speed serialization with photodetection control module 5.
In the coaxillay aligned horizontal scanning process, synchronously and the synchronous control unit 9 in the motion control subsystem 8 laser pulse trigger pip 19 is issued laser controlling interface unit in 6, make the DUV laser instrument produce laser pulse according to the frequency and the number of gating pulse; Synchronous control unit 9 is issued timing control unit 14 in 7 with luminosity sampling gating pulse 16,14 are given to photodetection interface unit 15 again, 15 issue photodetection control module 5 by high-speed serial bus 18 with the luminosity sampling signal in the high-speed serial bus, and photodetection control module 5 directly links to each other by optical fiber 22 with light intensity detector 26; Light signal is converted into electric signal in photodetection control module 5, to carry out pre-service and digital sample, again the light intensity signal after the digitizing is passed back 15 by high-speed serial bus; Timing control unit 14 and according to the requirement of signal processing unit 13, control 15 is transferred to 13 with the luminosity sampling data by parallel light-intensity data bus 21, handles to carry out coaxial signal; Because 9 provide the motion state reference for motion control unit 10, it can accurately be controlled silicon chip platform position signalling sampling unit 11 by position sampling gating pulse 20 and carry out position sampling, 11 can be transferred to 13 by high speed fibre 17 with the position sampling data, finish the synthetic of registration signal and handle in 13.Repeatedly horizontal scanning constitutes a coaxial alignment.
The control timing of above-mentioned coaxial alignment system can be as shown in Figure 4:
1) the synchronized movement signal issues 10 by 9, be that silicon chip platform control module provides the motion state reference, a horizontal scanning campaign comprises acceleration, and at the uniform velocity, the deceleration three phases, coaxial alignment comprises N continuous horizontal scanning, during continuous sweep, the non-at the uniform velocity stage is called the scanning preparatory stage, also is in vertical positioning stage, i.e. the vertical stage as shown in Figure 1, N=2 among Fig. 3, N represents number of times.Because coaxial alignment requires to carry out luminosity sampling at different surface levels, so the preparatory stage, the silicon chip platform is finished vertical location simultaneously.The sampling of light intensity signal and position signalling was carried out in stage at the uniform velocity, promptly scanned the preparatory stage not carry out controlling of sampling.Scanning time preparatory stage, parameters such as time in uniform speed scanning stage are determined in advance by tailor-made algorithm.
2) the state synchronized signal issues 14 by 9, it has connected repeatedly continuous horizontal scanning, when it is in logic high state, expression coaxial alignment signal sampling process is carried out, 5 can carry out luminosity sampling, 13 can obtain the luminosity sampling data, otherwise 13 will finish laggard line data aftertreatment in sampling.
3) the position sampling signal is issued 11,11 by 9 and is received and carry out the sampling of silicon chip platform 6DOF position signalling behind this signal immediately, and sampled data is issued 13 by 17; 13 receive the position sampling data after, the application of luminosity sampling data is proposed, wait for the luminosity sampling data.After receiving the luminosity sampling data, 13 with position data and the synthetic registration signal data of light intensity data, and carry out standalone processes, and the standalone processes process will be finished before position data arrival next time.Sample frequency and number are determined in advance by tailor-made algorithm.
4) laser trigger signal issues 12 by 9, is the laser instrument control wave, and 12 will directly issue 1 after this signal shaping; 1 whenever receive a trigger pulse after, send a laser pulse.
5) luminosity sampling signal source freedom 9 is issued 14 luminosity sampling gating pulse 16,14 gating pulse directly is given to 15, produces the luminosity sampling signals by 15, and carries out luminosity sampling by high-speed serial bus 18 with the probe unit on the control far-end silicon chip platform.Send laser trigger signal from 9 and have delay,, therefore should postpone necessary strict control, otherwise the light intensity signal of can't correctly sampling is referred to as trigger delay because laser pulse duration is extremely short to carrying out alignment mark imaging luminosity sampling; Finish at the volley owing to aim at gatherer process, require the luminosity sampling moment and the delay of position sampling between the moment also necessary by stricter control,, otherwise will cause alignment error.This two class postpones to be determined in advance by tailor-made algorithm that wherein trigger delay adopts one-level to store, and finishes in 9; Sampling delay divides two-stage to store, and the first order is finished in 9, and precision is 250ns, and finish in 15 the second level, and precision is 100ns, so two-stage can reach the control of 50ns precision.
The alignment parameter that said process relates to has: scanning time preparatory stage, time in uniform speed scanning stage, sample frequency and number, time delay etc., described parameter all requires tailor-made algorithm to determine in advance, and described algorithm will be coordinated to finish by the main control unit 23,24,25 of control subsystem 6,7,8, and communication network is connected to each other between the main control unit 23,24,25, as shown in Figure 4.
Need not determine that they are in a single day definite, promptly relatively stable time delay before each coaxial alignment, therefore irrelevant with actual alignment procedures, can be definite by 24 and 23,25 coordinations in unproductive time.
Scanning time preparatory stage, the time in uniform speed scanning stage, sample frequency and number must be determined before each coaxial alignment, are similar to the mechanisms for negotiation in the exposure scan-synchronized control system, and difference is alignment request is carried out the secondary negotiation.The first order 24 and 25 negotiations are determined actual samples frequency and number, and this result of the negotiation are dealt into 13; Second level negotiation is the same with exposure process, and 24 issue 25 with the alignment scanning reference position, further determine to scan time preparatory stage and time in uniform speed scanning stage with the motion control unit negotiation by 25, begin to aim at horizontal scanning more one by one.For boosting productivity, 25 and motion control unit realize continuous sweep by queue mechanism, therefore signal samplings such as 23,13 and processing module also realize continuous signal collection and processing with synchronized movement by queue mechanism.Method flow of the present invention as can be seen from Figure 5, promptly once coaxillay aligned signals collecting and processing controls process.
Though disclose the preferred embodiments of the present invention, those skilled in the art will appreciate that under the situation that does not deviate from disclosed scope of the present invention in claims any various modifications, interpolation and replacement all belong to protection scope of the present invention.
Claims (15)
1. coaxial alignment signals collecting and process control method is characterized in that may further comprise the steps:
Step 1): signals collecting and processing controls subsystem (7) main control unit (24) calculate correlation parameter according to the alignment mark that the user selects, and start one time coaxial alignment;
Step 2): signals collecting and processing controls subsystem (7) main control unit (24) are issued each horizontal scanning interval, sample frequency expectation value and number of samples synchronously and motion control subsystem (8) main control unit (25);
Step 3): reach motion control subsystem main control unit (25) synchronously and calculate actual sample frequency and number, and, finish first order negotiation process with return signal collection as a result and processing controls subsystem main control unit (24);
Step 4): according to the sample frequency and the number of reality execution, signals collecting and processing controls subsystem main control unit (24) generate signals collecting and processing parameter, and issue signal processing unit (13) and photodetection interface unit (15) in signals collecting and the processing controls subsystem (7); And notice laser controlling subsystem (6) main control unit (23) is prepared the beginning alignment scanning;
Step 5): signals collecting and processing controls subsystem main control unit (24) send beginning alignment scanning motion command to reaching motion control subsystem main control unit (25) synchronously, and first order sampling delay time and relevant range of movement parameter are issued synchronously and motion control subsystem main control unit (25);
Step 6): reach motion control subsystem main control unit (25) and motion control unit (10) synchronously and carry out second level negotiation, negotiation is horizontal scanning setup time and uniform speed scanning time for the first time;
Step 7): reach motion control subsystem main control unit (25) synchronously and in motion control unit (10), line up and start horizontal scanning for the first time, negotiate setup time of horizontal scanning next time and uniform speed scanning time then;
Step 8): the synchronous control unit (9) that reaches synchronously in the motion control subsystem (8) produces the synchronized movement signal, and coordination mask platform carrying mask (4) moves to assigned address and silicon chip platform (3) carries out a horizontal scanning campaign;
Step 9): reach synchronously synchronous control unit (9) in the motion control subsystem produce the state synchronized signal and send to signals collecting and the processing controls subsystem in timing control unit (14), timing control unit (14) only receives other signal when the state synchronized signal is effective, otherwise is in final state;
Step 10): silicon chip platform (3) enters uniform speed scanning after the stage, the synchronous control unit (9) that reaches synchronously in the motion control subsystem produces laser trigger signal, and the laser controlling interface unit (12) in the laser controlling subsystem produces the laser lighting pulse according to the trigger pip control laser instrument (1) that receives;
Step 11): according to the first order sampling delay time, synchronously and the synchronous control unit (9) in the motion control subsystem produce luminosity sampling signal and the timing control unit (14) in signals collecting and processing controls subsystem and send to photodetection interface unit (15) in signals collecting and the processing controls subsystem, photodetection interface unit (15) is according to the second level sampling delay time, photodetection control module in control signal collection and the processing controls subsystem carries out luminosity sampling, and reads sampled data;
Step 12): according to the first order sampling delay time, synchronously and the synchronous control unit (9) in the motion control subsystem produce the silicon chip platform position signalling sampling unit (11) that the position sampling signal controlling reaches in the motion control subsystem synchronously and carry out mask platform and silicon chip platform position sampling, after silicon chip platform position signalling sampling unit (11) sampling is finished position data issued the signal processing unit (13) in signals collecting and the processing controls subsystem;
Step 13): the signal processing unit (13) in signals collecting and the processing controls subsystem receives timing control unit (14) the request light intensity data in collection of position data backward signal and the processing controls subsystem, if timing control unit is in nonfinal state, it is transferred to signal processing unit (13) in signals collecting and processing controls subsystem with light intensity data by parallel light-intensity data bus (21) with the photodetection interface unit (15) in control signal collection and the processing controls subsystem;
Step 14): the signal processing unit (13) in signals collecting and the processing controls subsystem is finished the synthetic and Processing Algorithm of single-point registration signal one time according to position and light intensity data;
Step 15): repeating step 8)～14), up to all aligning sampled point signals collecting and processing procedures of finishing this horizontal scan period;
Step 16): reach synchronously motion control subsystem main control unit (25) the first time horizontal scan period will finish the negotiation of horizontal scanning for the second time and carry out the queuing of horizontal scanning for the second time, begin the negotiation and the queuing of horizontal scanning for the third time simultaneously;
Step 17): will begin horizontal scanning for the second time immediately after horizontal scanning for the first time finishes, during this with repeating step 8)～15), carry out the registration signal collection and the processing procedure of horizontal scan period for the second time;
Step 18): horizontal scanning for the second time will begin horizontal scanning for the third time after finishing immediately, so finish up to whole horizontal scannings;
Step 19): reach synchronous control unit (9) in the motion control subsystem synchronously and make the state synchronized invalidating signal, timing control unit (14) in signals collecting and the processing controls subsystem will be in final state, signal processing unit (13) in signals collecting and the processing controls subsystem begins to carry out the aftertreatment of registration signal at this moment, and, finish the coaxial alignment process one time with collection of result return signal and processing controls subsystem main control unit (24).
2. coaxial alignment signals collecting as claimed in claim 1 and process control method, it is characterized in that: a horizontal scanning campaign of described method comprise acceleration, at the uniform velocity, the deceleration three phases, the collection of position and light intensity data, and the processing after its synthetic single-point registration signal occurred in the at the uniform velocity stage.
3. coaxial alignment signals collecting as claimed in claim 1 and process control method is characterized in that: the described coaxial alignment of this method comprises repeatedly continuous horizontal scanning.
4. coaxial alignment signals collecting as claimed in claim 1 and process control method is characterized in that: this method comprises scanning preparatory stage and uniform speed scanning stage, and wherein when continuous sweep, the non-at the uniform velocity stage is the scanning preparatory stage.
5. coaxial alignment signals collecting as claimed in claim 1 and process control method is characterized in that: the alignment mark that user described in the step 1) selects calculates correlation parameter and comprises alignment mark type, numbering and each markers align number of times.
6 coaxial alignment signals collecting as claimed in claim 1 and process control methods is characterized in that: step 2) described in horizontal scanning interval be that 500ms, sample frequency expectation value are that 1KHz, number of samples are 200.
7. coaxial alignment signals collecting as claimed in claim 1 and process control method is characterized in that: the first order sampling delay time described in the step 5) is 2750ns.
8. coaxial alignment signals collecting as claimed in claim 1 and process control method is characterized in that: the relevant range of movement parameter described in the step 5) comprises the uniform speed scanning reference position of horizontal direction and the motion reference position of vertical direction.
9. coaxial alignment signals collecting as claimed in claim 1 and process control method is characterized in that: the second level sampling delay time described in the step 11) is 300ns.
10 coaxial alignment signals collecting as claimed in claim 1 and process control methods, it is characterized in that: adopt the time delay of the relative light intensity of trigger pip described in the step 10) sampled signal one-level to store, in synchronous control unit, finish, sampling delay divides two-stage to store, the first order is finished in synchronous control unit, precision is 250ns, and finish in the photodetection interface unit second level, and precision is 100ns.
11. coaxial alignment signals collecting as claimed in claim 10 and process control method is characterized in that: described two-stage stores and reaches the control of 50ns precision.
12. coaxial alignment signals collecting and processing controls subsystem, comprise light intensity detector (26), signal processing unit (13), timing control unit (14), photodetection interface unit (15), photodetection control module (5), it is characterized in that: also comprise optical fiber (22), high-speed serial bus (18) and parallel light-intensity data bus (21); Light intensity detector (26) is connected with photodetection control module (5) by optical fiber (22), signal processing unit (13), timing control unit (14), photodetection interface unit (15) insert parallel light-intensity data bus (21) respectively, thereby these three unit constitute parallel syndeton, directly be connected between timing control unit (14) and the photodetection interface unit (15) simultaneously, and photodetection interface unit (15) is connected by high-speed serial bus (18) high speed serialization with photodetection control module (5).
13. signals collecting as claimed in claim 12 and processing controls subsystem is characterized in that the flank speed of described parallel light-intensity data bus reaches 256M bps.
14. signals collecting as claimed in claim 12 and processing controls subsystem is characterized in that the flank speed of described high-speed serial bus reaches 1M bps.
15. signals collecting as claimed in claim 12 and processing controls subsystem, it is characterized in that, light intensity signal is converted into electric signal in described photodetection control module (5), to carry out pre-service and digital sample, again the light intensity signal after the digitizing is passed back photodetection interface unit (15) by high-speed serial bus (18).
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| CN100510816C (en) * | 2007-03-05 | 2009-07-08 | 北京航空航天大学 | Online alignment device of Y-type waveguide chip and polarization maintaining fiber and online alignment method thereof |
| CN101526748B (en) * | 2009-01-13 | 2010-12-08 | 上海微电子装备有限公司 | Memory device, method and aligning control system for photoetching aligning data detection |
| CN103163746B8 (en) * | 2011-12-08 | 2016-07-13 | 上海微电子装备有限公司 | A kind of have the mask registration detector of temperature detection function, lithographic equipment and alignment detection method |
| CN106323916A (en) * | 2016-08-18 | 2017-01-11 | 中国科学院嘉兴微电子仪器与设备工程中心 | Wafer scanning detection location method |
| CN114035474A (en) * | 2021-11-10 | 2022-02-11 | 中国科学院微电子研究所 | Sampling signal synchronous control system |
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