CN108385066A - 一种无氢金属掺杂类金刚石涂层制备方法及其制品 - Google Patents
一种无氢金属掺杂类金刚石涂层制备方法及其制品 Download PDFInfo
- Publication number
- CN108385066A CN108385066A CN201810160012.9A CN201810160012A CN108385066A CN 108385066 A CN108385066 A CN 108385066A CN 201810160012 A CN201810160012 A CN 201810160012A CN 108385066 A CN108385066 A CN 108385066A
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- CN
- China
- Prior art keywords
- metal
- target
- diamond
- coating
- arc
- Prior art date
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- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 84
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 81
- 239000002184 metal Substances 0.000 title claims abstract description 79
- 239000011248 coating agent Substances 0.000 title claims abstract description 77
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 29
- 239000010432 diamond Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 99
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 53
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 52
- 239000010439 graphite Substances 0.000 claims abstract description 52
- 239000002245 particle Substances 0.000 claims abstract description 37
- 238000000151 deposition Methods 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 30
- 230000008569 process Effects 0.000 claims abstract description 26
- 238000001914 filtration Methods 0.000 claims abstract description 15
- 238000007667 floating Methods 0.000 claims abstract description 12
- 238000005516 engineering process Methods 0.000 claims abstract description 11
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 11
- 238000000605 extraction Methods 0.000 claims abstract description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 230000008021 deposition Effects 0.000 claims description 18
- 150000002739 metals Chemical class 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 17
- 229910052739 hydrogen Inorganic materials 0.000 claims description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 16
- 238000007733 ion plating Methods 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 238000002360 preparation method Methods 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 8
- 230000004913 activation Effects 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 125000004429 atom Chemical group 0.000 claims description 8
- 238000000429 assembly Methods 0.000 claims description 7
- 230000000712 assembly Effects 0.000 claims description 7
- 238000005137 deposition process Methods 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 6
- 229910021645 metal ion Inorganic materials 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 150000001721 carbon Chemical group 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 230000005672 electromagnetic field Effects 0.000 claims description 2
- 230000002708 enhancing effect Effects 0.000 claims description 2
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 239000002131 composite material Substances 0.000 abstract description 14
- 239000011159 matrix material Substances 0.000 abstract description 6
- 238000004062 sedimentation Methods 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000011435 rock Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- -1 carbon ion Chemical class 0.000 description 2
- 239000011195 cermet Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
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CN201810160012.9A CN108385066B (zh) | 2018-02-26 | 2018-02-26 | 一种无氢金属掺杂类金刚石涂层制备方法及其制品 |
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CN201810160012.9A CN108385066B (zh) | 2018-02-26 | 2018-02-26 | 一种无氢金属掺杂类金刚石涂层制备方法及其制品 |
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CN108385066A true CN108385066A (zh) | 2018-08-10 |
CN108385066B CN108385066B (zh) | 2020-05-12 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109576652A (zh) * | 2018-12-20 | 2019-04-05 | 江苏徐工工程机械研究院有限公司 | 一种电弧离子镀膜装置 |
CN110205589A (zh) * | 2019-07-12 | 2019-09-06 | 江苏徐工工程机械研究院有限公司 | 一种脉冲碳离子激发源装置 |
CN110257797A (zh) * | 2019-07-22 | 2019-09-20 | 上海妙壳新材料科技有限公司 | 一种热阳极法生产高性能类金刚石的装置及其使用方法 |
CN112063975A (zh) * | 2020-07-28 | 2020-12-11 | 温州职业技术学院 | 一种通过调制强流脉冲电弧制备ta-C涂层的方法 |
CN112497483A (zh) * | 2020-11-30 | 2021-03-16 | 江苏利宇剃须刀有限公司 | 一种镀有金刚石膜的陶瓷剃须刀的制备工艺 |
CN115961243A (zh) * | 2022-12-29 | 2023-04-14 | 集美大学 | 一种高致密度的Ta-C涂层的制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101787512A (zh) * | 2009-12-31 | 2010-07-28 | 中国地质大学(北京) | 一种多元金属元素掺杂类金刚石膜的制备方法 |
CN102936718A (zh) * | 2012-11-08 | 2013-02-20 | 温州职业技术学院 | 一种多结构耦合磁场适应型旋转弧离子镀装置 |
CN102965618A (zh) * | 2012-12-07 | 2013-03-13 | 中国地质大学(北京) | 一种金属掺杂无氢类金刚石碳膜的制备方法 |
KR20160009785A (ko) * | 2014-07-16 | 2016-01-27 | 한국광기술원 | 자장여과 아크 플라즈마를 이용한 dlc 코팅 장치 |
-
2018
- 2018-02-26 CN CN201810160012.9A patent/CN108385066B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101787512A (zh) * | 2009-12-31 | 2010-07-28 | 中国地质大学(北京) | 一种多元金属元素掺杂类金刚石膜的制备方法 |
CN102936718A (zh) * | 2012-11-08 | 2013-02-20 | 温州职业技术学院 | 一种多结构耦合磁场适应型旋转弧离子镀装置 |
CN102965618A (zh) * | 2012-12-07 | 2013-03-13 | 中国地质大学(北京) | 一种金属掺杂无氢类金刚石碳膜的制备方法 |
KR20160009785A (ko) * | 2014-07-16 | 2016-01-27 | 한국광기술원 | 자장여과 아크 플라즈마를 이용한 dlc 코팅 장치 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109576652A (zh) * | 2018-12-20 | 2019-04-05 | 江苏徐工工程机械研究院有限公司 | 一种电弧离子镀膜装置 |
CN109576652B (zh) * | 2018-12-20 | 2024-04-30 | 江苏徐工工程机械研究院有限公司 | 一种电弧离子镀膜装置 |
CN110205589A (zh) * | 2019-07-12 | 2019-09-06 | 江苏徐工工程机械研究院有限公司 | 一种脉冲碳离子激发源装置 |
CN110205589B (zh) * | 2019-07-12 | 2023-12-08 | 江苏徐工工程机械研究院有限公司 | 一种脉冲碳离子激发源装置 |
CN110257797A (zh) * | 2019-07-22 | 2019-09-20 | 上海妙壳新材料科技有限公司 | 一种热阳极法生产高性能类金刚石的装置及其使用方法 |
CN112063975A (zh) * | 2020-07-28 | 2020-12-11 | 温州职业技术学院 | 一种通过调制强流脉冲电弧制备ta-C涂层的方法 |
CN112063975B (zh) * | 2020-07-28 | 2022-08-12 | 温州职业技术学院 | 一种通过调制强流脉冲电弧制备ta-C涂层的方法 |
CN112497483A (zh) * | 2020-11-30 | 2021-03-16 | 江苏利宇剃须刀有限公司 | 一种镀有金刚石膜的陶瓷剃须刀的制备工艺 |
CN115961243A (zh) * | 2022-12-29 | 2023-04-14 | 集美大学 | 一种高致密度的Ta-C涂层的制备方法 |
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Application publication date: 20180810 Assignee: Hebei macro target Technology Co.,Ltd. Assignor: WENZHOU VOCATIONAL & TECHNICAL College Contract record no.: X2020330000059 Denomination of invention: A preparation method of hydrogen free metal doped diamond-like carbon coating and its products Granted publication date: 20200512 License type: Exclusive License Record date: 20200819 |
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Effective date of registration: 20220815 Address after: Building 10-11 West Taishan Avenue, Luotang Village, Taishan Street, Haiyan County, Jiaxing City, Zhejiang Province 314300 Patentee after: Jiaxing aitico nanotechnology Co.,Ltd. Address before: 325000 incubator of Wenzhou National University Science Park, 38 Dongfang South Road, Ouhai District, Wenzhou City, Zhejiang Province Patentee before: WENZHOU VOCATIONAL & TECHNICAL College |
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