CN108069717B - 结构物 - Google Patents

结构物 Download PDF

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Publication number
CN108069717B
CN108069717B CN201710888647.6A CN201710888647A CN108069717B CN 108069717 B CN108069717 B CN 108069717B CN 201710888647 A CN201710888647 A CN 201710888647A CN 108069717 B CN108069717 B CN 108069717B
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China
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peak intensity
less
diffraction angle
yttrium
ray diffraction
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CN201710888647.6A
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English (en)
Chinese (zh)
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CN108069717A (zh
Inventor
芦泽宏明
清原正胜
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Toto Ltd
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Toto Ltd
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/553—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on fluorides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/624—Sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/781—Nanograined materials, i.e. having grain sizes below 100 nm
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963—Surface properties, e.g. surface roughness
    • C04B2235/9638—Tolerance; Dimensional accuracy

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Drying Of Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Coating By Spraying Or Casting (AREA)
CN201710888647.6A 2016-11-10 2017-09-27 结构物 Active CN108069717B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016219787 2016-11-10
JP2016-219787 2016-11-10

Publications (2)

Publication Number Publication Date
CN108069717A CN108069717A (zh) 2018-05-25
CN108069717B true CN108069717B (zh) 2021-09-28

Family

ID=62159371

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710888647.6A Active CN108069717B (zh) 2016-11-10 2017-09-27 结构物

Country Status (4)

Country Link
JP (1) JP6834881B2 (ja)
KR (2) KR102057480B1 (ja)
CN (1) CN108069717B (ja)
TW (2) TWI663142B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7426796B2 (ja) 2019-10-10 2024-02-02 三星電子株式会社 部材、その製造方法、その製造装置、及び半導体製造装置
CN114829667A (zh) * 2019-12-18 2022-07-29 信越化学工业株式会社 氟化钇系喷涂被膜、喷涂构件及氟化钇系喷涂被膜的制造方法
CN117957641A (zh) 2022-08-30 2024-04-30 株式会社日立高新技术 等离子处理装置、等离子处理装置的内部构件以及等离子处理装置的内部构件的制造方法
WO2024053257A1 (ja) * 2022-09-09 2024-03-14 日本イットリウム株式会社 成膜用材料及び皮膜の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016129457A1 (ja) * 2015-02-10 2016-08-18 日本イットリウム株式会社 成膜用粉末及び成膜用材料

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101110371B1 (ko) * 2010-04-26 2012-02-15 한국세라믹기술원 내플라즈마 결정질 세라믹 코팅막 및 그 제조방법
JP5911036B1 (ja) 2014-11-21 2016-04-27 日本イットリウム株式会社 焼結体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016129457A1 (ja) * 2015-02-10 2016-08-18 日本イットリウム株式会社 成膜用粉末及び成膜用材料

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"氟化钇微/纳米结构的合成、表征及其性能研究";吕蕴海;《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》;20130215;B020-369 *

Also Published As

Publication number Publication date
KR102057480B1 (ko) 2019-12-19
TW201932435A (zh) 2019-08-16
TWI663142B (zh) 2019-06-21
CN108069717A (zh) 2018-05-25
JP6834881B2 (ja) 2021-02-24
JP2018082154A (ja) 2018-05-24
TW201829352A (zh) 2018-08-16
KR20180052518A (ko) 2018-05-18
KR20190139820A (ko) 2019-12-18

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