CN108048227A - 一种光学材料清洗液 - Google Patents
一种光学材料清洗液 Download PDFInfo
- Publication number
- CN108048227A CN108048227A CN201711361330.3A CN201711361330A CN108048227A CN 108048227 A CN108048227 A CN 108048227A CN 201711361330 A CN201711361330 A CN 201711361330A CN 108048227 A CN108048227 A CN 108048227A
- Authority
- CN
- China
- Prior art keywords
- cleaning solution
- optical material
- hydrogen bond
- phosphate
- potassium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 67
- 239000000463 material Substances 0.000 title claims abstract description 45
- 230000003287 optical effect Effects 0.000 title claims abstract description 38
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 47
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 30
- 239000001257 hydrogen Substances 0.000 claims abstract description 28
- 230000003750 conditioning effect Effects 0.000 claims abstract description 24
- 239000008139 complexing agent Substances 0.000 claims abstract description 23
- 150000001298 alcohols Chemical class 0.000 claims abstract description 22
- 239000003945 anionic surfactant Substances 0.000 claims abstract description 16
- -1 organic pollution Substances 0.000 claims abstract description 14
- 239000008367 deionised water Substances 0.000 claims abstract description 13
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000005498 polishing Methods 0.000 claims abstract description 12
- 239000003112 inhibitor Substances 0.000 claims abstract description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 33
- 235000019441 ethanol Nutrition 0.000 claims description 25
- 235000002639 sodium chloride Nutrition 0.000 claims description 23
- 229910019142 PO4 Inorganic materials 0.000 claims description 21
- 239000010452 phosphate Substances 0.000 claims description 21
- 150000003839 salts Chemical class 0.000 claims description 21
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 15
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims description 11
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 10
- 239000004094 surface-active agent Substances 0.000 claims description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 9
- 239000001103 potassium chloride Substances 0.000 claims description 9
- 235000011164 potassium chloride Nutrition 0.000 claims description 9
- KXDAEFPNCMNJSK-UHFFFAOYSA-N Benzamide Chemical compound NC(=O)C1=CC=CC=C1 KXDAEFPNCMNJSK-UHFFFAOYSA-N 0.000 claims description 8
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 8
- 229960001484 edetic acid Drugs 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 7
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 6
- 150000002191 fatty alcohols Chemical class 0.000 claims description 6
- LPXPTNMVRIOKMN-UHFFFAOYSA-M sodium nitrite Chemical compound [Na+].[O-]N=O LPXPTNMVRIOKMN-UHFFFAOYSA-M 0.000 claims description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 5
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 4
- PJJJBBJSCAKJQF-UHFFFAOYSA-N guanidinium chloride Chemical compound [Cl-].NC(N)=[NH2+] PJJJBBJSCAKJQF-UHFFFAOYSA-N 0.000 claims description 4
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims description 4
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 3
- HAMNKKUPIHEESI-UHFFFAOYSA-N aminoguanidine Chemical compound NNC(N)=N HAMNKKUPIHEESI-UHFFFAOYSA-N 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 239000004202 carbamide Substances 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 235000011187 glycerol Nutrition 0.000 claims description 3
- 229960000789 guanidine hydrochloride Drugs 0.000 claims description 3
- 150000003014 phosphoric acid esters Chemical class 0.000 claims description 3
- 235000010288 sodium nitrite Nutrition 0.000 claims description 3
- 229940087291 tridecyl alcohol Drugs 0.000 claims description 3
- PXBFMLJZNCDSMP-UHFFFAOYSA-N 2-Aminobenzamide Chemical compound NC(=O)C1=CC=CC=C1N PXBFMLJZNCDSMP-UHFFFAOYSA-N 0.000 claims description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 claims description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 2
- AZFNGPAYDKGCRB-XCPIVNJJSA-M [(1s,2s)-2-amino-1,2-diphenylethyl]-(4-methylphenyl)sulfonylazanide;chlororuthenium(1+);1-methyl-4-propan-2-ylbenzene Chemical compound [Ru+]Cl.CC(C)C1=CC=C(C)C=C1.C1=CC(C)=CC=C1S(=O)(=O)[N-][C@@H](C=1C=CC=CC=1)[C@@H](N)C1=CC=CC=C1 AZFNGPAYDKGCRB-XCPIVNJJSA-M 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims description 2
- 229940043237 diethanolamine Drugs 0.000 claims description 2
- DATYTXMEMXGAGL-UHFFFAOYSA-N formamide;piperidine Chemical compound NC=O.C1CCNCC1 DATYTXMEMXGAGL-UHFFFAOYSA-N 0.000 claims description 2
- 235000019253 formic acid Nutrition 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- 125000002467 phosphate group Chemical group [H]OP(=O)(O[H])O[*] 0.000 claims description 2
- IBBMAWULFFBRKK-UHFFFAOYSA-N picolinamide Chemical compound NC(=O)C1=CC=CC=N1 IBBMAWULFFBRKK-UHFFFAOYSA-N 0.000 claims description 2
- 239000011591 potassium Substances 0.000 claims description 2
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- CHKVPAROMQMJNQ-UHFFFAOYSA-M potassium bisulfate Chemical compound [K+].OS([O-])(=O)=O CHKVPAROMQMJNQ-UHFFFAOYSA-M 0.000 claims description 2
- 229910000343 potassium bisulfate Inorganic materials 0.000 claims description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 claims description 2
- 239000004323 potassium nitrate Substances 0.000 claims description 2
- 235000010333 potassium nitrate Nutrition 0.000 claims description 2
- 239000004304 potassium nitrite Substances 0.000 claims description 2
- 235000010289 potassium nitrite Nutrition 0.000 claims description 2
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 claims description 2
- 229910052939 potassium sulfate Inorganic materials 0.000 claims description 2
- 235000011151 potassium sulphates Nutrition 0.000 claims description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 2
- 235000017550 sodium carbonate Nutrition 0.000 claims description 2
- 239000011780 sodium chloride Substances 0.000 claims description 2
- 239000004317 sodium nitrate Substances 0.000 claims description 2
- 235000010344 sodium nitrate Nutrition 0.000 claims description 2
- 239000001488 sodium phosphate Substances 0.000 claims description 2
- 229910000162 sodium phosphate Inorganic materials 0.000 claims description 2
- 235000011008 sodium phosphates Nutrition 0.000 claims description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 2
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 claims 3
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims 2
- XFRVVPUIAFSTFO-UHFFFAOYSA-N 1-Tridecanol Chemical compound CCCCCCCCCCCCCO XFRVVPUIAFSTFO-UHFFFAOYSA-N 0.000 claims 1
- KLGQWSOYKYFBTR-UHFFFAOYSA-N 2-nitrobenzamide Chemical compound NC(=O)C1=CC=CC=C1[N+]([O-])=O KLGQWSOYKYFBTR-UHFFFAOYSA-N 0.000 claims 1
- 150000001412 amines Chemical class 0.000 claims 1
- MJEMIOXXNCZZFK-UHFFFAOYSA-N ethylone Chemical compound CCNC(C)C(=O)C1=CC=C2OCOC2=C1 MJEMIOXXNCZZFK-UHFFFAOYSA-N 0.000 claims 1
- 125000002485 formyl group Chemical group [H]C(*)=O 0.000 claims 1
- 235000011007 phosphoric acid Nutrition 0.000 claims 1
- PANBYUAFMMOFOV-UHFFFAOYSA-N sodium;sulfuric acid Chemical compound [Na].OS(O)(=O)=O PANBYUAFMMOFOV-UHFFFAOYSA-N 0.000 claims 1
- SOBHUZYZLFQYFK-UHFFFAOYSA-K trisodium;hydroxy-[[phosphonatomethyl(phosphonomethyl)amino]methyl]phosphinate Chemical compound [Na+].[Na+].[Na+].OP(O)(=O)CN(CP(O)([O-])=O)CP([O-])([O-])=O SOBHUZYZLFQYFK-UHFFFAOYSA-K 0.000 claims 1
- 239000000243 solution Substances 0.000 abstract description 39
- 239000002245 particle Substances 0.000 abstract description 22
- 239000011521 glass Substances 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 239000005350 fused silica glass Substances 0.000 abstract description 4
- 238000010790 dilution Methods 0.000 abstract description 2
- 239000012895 dilution Substances 0.000 abstract description 2
- 239000003344 environmental pollutant Substances 0.000 abstract 1
- 150000002500 ions Chemical group 0.000 abstract 1
- 231100000719 pollutant Toxicity 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 9
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 8
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 229910021645 metal ion Inorganic materials 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- 239000000080 wetting agent Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 4
- 229910052938 sodium sulfate Inorganic materials 0.000 description 4
- 235000011152 sodium sulphate Nutrition 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- DZCAZXAJPZCSCU-UHFFFAOYSA-K sodium nitrilotriacetate Chemical group [Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CC([O-])=O DZCAZXAJPZCSCU-UHFFFAOYSA-K 0.000 description 3
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- 235000019082 Osmanthus Nutrition 0.000 description 1
- 241000333181 Osmanthus Species 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical compound ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- IRPDISVJRAYFBI-UHFFFAOYSA-N nitric acid;potassium Chemical compound [K].O[N+]([O-])=O IRPDISVJRAYFBI-UHFFFAOYSA-N 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000011146 organic particle Substances 0.000 description 1
- NFIYTPYOYDDLGO-UHFFFAOYSA-N phosphoric acid;sodium Chemical compound [Na].OP(O)(O)=O NFIYTPYOYDDLGO-UHFFFAOYSA-N 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/34—Derivatives of acids of phosphorus
- C11D1/345—Phosphates or phosphites
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/042—Acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/046—Salts
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/046—Salts
- C11D3/048—Nitrates or nitrites
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/06—Phosphates, including polyphosphates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/10—Carbonates ; Bicarbonates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2006—Monohydric alcohols
- C11D3/201—Monohydric alcohols linear
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2041—Dihydric alcohols
- C11D3/2044—Dihydric alcohols linear
-
- C—CHEMISTRY; METALLURGY
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Abstract
本发明涉及一种光学材料清洗液，属于光学材料清洗技术领域。本发明的清洗液包括阴离子表面活性剂、氢键破坏剂、络合剂、醇类、PH调节剂、盐和水，本发明适用于熔石英、K9玻璃及微晶玻璃等光学材料抛光后表面颗粒的清洗。将本发明清洗液稀释1～10倍后，将抛光后的光学材料在清洗液中超声清洗5～10分钟，然后在去离子水中超声清洗1～10分钟去除光学材料表面的清洗液。使用该清洗液可以去除抛光后光学材料表面的污染物，包括有机污染物、颗粒和离子残留等。本发明清洗液中所含有的氢键抑制剂可以克服抛光后光学材料表面容易吸附颗粒的缺点，有效的去其除表面颗粒。
Description
技术领域
本发明涉及一种光学材料清洗液，属于光学材料清洗技术领域，特别涉及一种用于熔石英、K9玻璃及微晶玻璃抛光后表面颗粒清洗的技术领域。
背景技术
随着光学系统性能的不断提升，近年来光学元、部件的精度指标，表面质量等要求也越来越高。化学机械抛光过程作为光学元件的重要的加工工序，能够消除光学材料表面机械损伤、残留的亚表面裂纹及残余应力等缺陷，但是抛光后材料表面不可避免的会出现有机物、颗粒及金属离子等残留。尤其是作为典型光学材料的熔石英、K9玻璃及微晶玻璃等材料，抛光后表面存在大量活性羟基，极易与抛光液中的颗粒羟基形成氢键，使得材料表面吸附大量颗粒，很难清洗，从而降低光学元件激光损伤阈值。
涉及玻璃的清洗液的专利，目前报道较多如：CN 102504978 A，CN 102994254 A，CN101434891A，CN101580773A，CN102504980A等，但他们都是关于普通玻璃，如汽车玻璃表面污渍的清洗。专利CN105251745A公开了古典法抛光拼盘加工K9玻璃和熔石英元件的清洗方法，对精密抛光后的元件表面有机污染物和抛物粉残留颗粒有较高清洗效率。但是该专利中使用毒性较大的四氯化碳溶液作为清洗液，且步骤复杂，不适于大规模使用。
发明内容
本发明的目的在于克服现有技术中的不足，提出了一种光学材料清洗液，使用该清洗液可以破坏抛光后光学材料表面羟基与颗粒间形成的氢键，并通过其它化学试剂将颗粒带离材料表面，可以有效的避免颗粒的吸附。同时清洗液中的其它化学试剂可以去除光学材料表面的有机物及金属离子残留，避免了光学材料化学机械抛光后表面污染问题。
一种光学材料清洗液，其特征在于，该清洗液包括阴离子表面活性剂、氢键破坏剂、络合剂、醇类、PH调节剂、盐和水；该清洗液的组分重量配比为：
阴离子表面活性剂：0.01～10wt％；
氢键破坏剂：0.1～1wt％；
络合剂：0.1～5wt％；
醇类：1～10wt％；
PH调节剂：0.1～10wt％；
盐：0.1～2wt％；
去离子水：余量。
所述阴离子表面活性剂5-10wt％，氢键抑制剂0.1-0.3wt％，络合剂2-5wt％，醇类7-10wt％、PH调节剂0.1-2wt％，盐0.5-0.6wt％，去离子水余量。
所述阴离子表面活性剂为磷酸酯系列表面活性剂，包括：脂肪醇醚磷酸酯(MOA-3P)、脂肪醇醚磷酸酯(MOA-9P)、酚醚磷酸酯(TXP-4)、酚醚磷酸酯(TXP-10)、脂肪醇醚磷酸酯钾盐(MOA-3PK-40)、脂肪醇醚磷酸酯钾盐(MOA-3PK-70)、酚醚磷酸酯钾盐(NP-4PK)、酚醚磷酸酯钾盐(NP-10PK-40)、酚醚磷酸酯钾盐(NP-10PK-80)、异十三醇磷酸酯(ITAP)、异十三醇醚(6)磷酸酯钾盐(IT6APK)、月桂基磷酸酯(MA24P)、月桂基磷酸酯钾盐(MA24PK-30)、月桂基磷酸酯或钾盐(MA24PK-50)中的一种或几种。
所述氢键破坏剂通式为：H2N-(C＝R1)-R2的化合物中的一种或几种，其中R1为O或N元素，R2为C或H元素。
所述氢键破坏剂包括尿素、甲酰胺、哌啶甲酰胺、吡啶甲酰胺、氨基苯甲酰胺、硝基苯甲酰胺、苯甲酰胺、盐酸胍、氨基胍中的一种或几种。
所述络合剂为次氮基三乙酸三钠(NTA)、羟乙基二胺四乙酸(HEDTA)、二乙烯三胺五乙酸(DTPA)、乙二胺四乙酸(EDTA)中的一种或几种。
所述醇类包括甲醇、乙醇、异丙醇、乙二醇、丙二醇、丙三醇中的一种或几种。
所述PH调节剂选用甲酸、乙酸、盐酸、硝酸、硫酸、磷酸、氢氧化钾、氢氧化钠、氨、四甲基氢氧化铵、乙醇胺、二乙醇胺、三乙醇胺中的一种或几种。
所述盐包括氯化钠、硫酸钠、硝酸钠、亚硝酸钠、磷酸钠、碳酸钠、氯化钾、硫酸钾、硫酸氢钾、硝酸钾、亚硝酸钾、磷酸钾、碳酸钾中的一种或几种。
本发明清洗液PH值在4～10之间
本发明与现有技术相比具有如下优点：
1.加入磷酸酯系列表面活性剂，对残留在光学材料表面有机物和游离的颗粒具有吸附作用，将它们带离材料表面；
2.氢键破坏剂破坏颗粒与光学材料表面形成的氢键，减弱它们之间的作用，有利于其他化学试剂将颗粒带离材料表面；
3.抛光液中的金属离子会吸附在抛光后光学材料表面，造成金属离子污染，络合剂对金属离子有很强的螯合能力，能把这些金属离子封闭起来，以减少金属离子对材料表面的影响；
4.醇类物质有较小的表面张力，容易吸附在光学材料表面，形成一层膜，降低污染物与材料表面的接触几率；
5.PH调节剂可以调节清洗液的PH值来获得最佳的清洗效果；
6.盐可以调节清洗液的流变，增加清洗效果；
7.本发明清洗液可以稀释1～10倍后使用，成本低，清洗效果好。
附图说明
图1是本发明实施例三清洗后光学材料表面原子力显微镜图。
图2是对比例一清洗后光学材料表面原子力显微镜图。
具体实施方式
首先将本发明清洗液稀释1～10倍，将抛光后的光学材料在清洗液中超声清洗5～10分钟，然后在去离子水中超声清洗1～10分钟去除光学材料表面的清洗液，干燥后待检测。清洗过程中的温度保持在40～50摄氏度之间。然后，利用原子力显微镜(布鲁克)测量清洗之后的光学材料表面颗粒情况。
以下结合具体实施例对本发明进行详细说明。
实施例一
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入氢键破坏剂，络合剂，醇类和盐，最后加入PH调节剂，清洗液的PH＝8.6。使各组分含量分别为：阴离子表面活性剂(MOA-3P)10wt％，氢键破坏剂(尿素)0.1wt％，络合剂(NTA)5wt％，醇类(乙醇)10wt％，PH调节剂润湿剂(盐酸)0.1wt％，盐(硝酸钾)0.5wt％。原子力显微镜检测清洗后表面残留效果，表面颗粒无、其他残留无。
实施例二
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入氢键破坏剂，络合剂，醇类和盐，最后加入PH调节剂，清洗液的PH＝5.2。使各组分含量分别为：阴离子表面活性剂(TXP-10)4wt％，氢键破坏剂(甲酰胺)0.5wt％，络合剂(EDTA)1wt％，醇类(乙二醇)5wt％，PH调节剂润湿剂(乙酸)1wt％，盐(磷酸钠)0.1wt％。原子力显微镜检测清洗后表面残留效果，表面颗粒少量、其他残留无。
实施例三
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入氢键破坏剂，络合剂，醇类和盐，最后加入PH调节剂，清洗液的PH＝9.1。使各组分含量分别为：阴离子表面活性剂(NP-10PK-80)5wt％，氢键破坏剂(盐酸胍)0.3wt％，络合剂(EDTA)2wt％，醇类(丙三醇)7wt％，PH调节剂润湿剂(氢氧化钾)2wt％，盐(硫酸钠)0.6wt％。原子力显微镜检测清洗后表面残留效果，表面颗粒无、其他残留无。
实施例四
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入氢键破坏剂，络合剂，醇类和盐，最后加入PH调节剂，清洗液的PH＝10。使各组分含量分别为：阴离子表面活性剂(MA24P)0.01wt％，氢键破坏剂(苯甲酰胺)1wt％，络合剂(HEDTA)0.5wt％，醇类(甲醇)1wt％，PH调节剂润湿剂(氨)10wt％，盐(碳酸钾)2wt％。原子力显微镜检测清洗后表面残留效果，表面颗粒少量、其他残留中等。
实施例五
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入氢键破坏剂，络合剂，醇类和盐，最后加入PH调节剂，清洗液的PH＝9.7。使各组分含量分别为：阴离子表面活性剂(MOA-9P)1wt％，氢键破坏剂(氨基胍)0.2wt％，络合剂(DTPA)0.1wt％，醇类(丙二醇)4wt％，PH调节剂润湿剂(三乙醇胺)0.3wt％，盐(亚硝酸钠)1wt％。原子力显微镜检测清洗后表面残留效果，表面颗粒少量、其他残留少量。对比例一
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入络合剂，醇类和盐，最后加入PH调节剂，清洗液的PH＝8.5。使各组分含量分别为：阴离子表面活性剂(NP-10PK-80)5wt％，络合剂(EDTA)2wt％，醇类(丙三醇)7wt％，PH调节剂润湿剂(氢氧化钾)2wt％，盐(硫酸钠)0.6wt％。原子力显微镜检测清洗后表面残留效果，表面残留大量颗粒、其他残留无。
对比例二
清洗液的制备：在不断的搅拌情况下，向去离子水中加入磷酸酯系列表面活性剂至其完全溶解，然后依次加入氢键破坏剂，络合剂和盐，最后加入PH调节剂，清洗液的PH＝9.1。使各组分含量分别为：阴离子表面活性剂(NP-10PK-80)5wt％，氢键破坏剂(盐酸胍)0.3wt％，络合剂(EDTA)2wt％，PH调节剂润湿剂(氢氧化钾)2wt％，盐(硫酸钠)0.6wt％。原子力显微镜检测清洗后表面残留效果，表面颗粒少量、其他残留中等。
抛光后光学材料表面颗粒及其它残留情况分为四个等级：大量，中等，少量，无。
Claims (9)
1.一种光学材料清洗液，其特征在于，该清洗液包括阴离子表面活性剂、氢键破坏剂、络合剂、醇类、PH调节剂、盐和水；该清洗液的组分重量配比为：
阴离子表面活性剂：0.01～10wt％；
氢键破坏剂：0.1～1wt％；
络合剂：0.1～5wt％；
醇类：1～10wt％；
PH调节剂：0.1～10wt％；
盐：0.1～2wt％；
去离子水：余量。
2.根据权利要求1所述的光学材料清洗液，其特征在于，所述的阴离子表面活性剂5-10wt％，氢键抑制剂0.1-0.3wt％，络合剂2-5wt％，醇类7-10wt％、PH调节剂0.1-2wt％，盐0.5-0.6wt％，去离子水余量。
3.根据权利要求1或2所述的光学材料清洗液，其特征在于，所述阴离子表面活性剂为磷酸酯系列表面活性剂，包括：脂肪醇醚磷酸酯(MOA-3P)、脂肪醇醚磷酸酯(MOA-9P)、酚醚磷酸酯(TXP-4)、酚醚磷酸酯(TXP-10)、脂肪醇醚磷酸酯钾盐(MOA-3PK-40)、脂肪醇醚磷酸酯钾盐(MOA-3PK-70)、酚醚磷酸酯钾盐(NP-4PK)、酚醚磷酸酯钾盐(NP-10PK-40)、酚醚磷酸酯钾盐(NP-10PK-80)、异十三醇磷酸酯(ITAP)、异十三醇醚(6)磷酸酯钾盐(IT6APK)、月桂基磷酸酯(MA24P)、月桂基磷酸酯钾盐(MA24PK-30)、月桂基磷酸酯或钾盐(MA24PK-50)中的一种或几种。
4.根据权利要求1或2所述的光学材料清洗液，其特征在于，所述氢键破坏剂通式为：H2N-(C＝R1)-R2的化合物中的一种或几种，其中R1为O或N元素，R2为C或H元素。
5.根据权利要求4所述的抛光垫清洗液，其特征在于，所述氢键破坏剂包括尿素、甲酰胺、哌啶甲酰胺、吡啶甲酰胺、氨基苯甲酰胺、硝基苯甲酰胺、苯甲酰胺、盐酸胍、氨基胍中的一种或几种。
6.根据权利要求1或2所述的光学材料清洗液，其特征在于，所述络合剂为次氮基三乙酸三钠(NTA)、羟乙基二胺四乙酸(HEDTA)、二乙烯三胺五乙酸(DTPA)、乙二胺四乙酸(EDTA)中的一种或几种。
7.根据权利要求1或2所述的光学材料清洗液，其特征在于，所述醇类包括甲醇、乙醇、异丙醇、乙二醇、丙二醇、丙三醇中的一种或几种。
8.根据权利要求1或2所述的光学材料清洗液，其特征在于，所述PH调节剂选用甲酸、乙酸、盐酸、硝酸、硫酸、磷酸、氢氧化钾、氢氧化钠、氨、四甲基氢氧化铵、乙醇胺、二乙醇胺、三乙醇胺中的一种或几种。
9.根据权利要求1或2所述的光学材料清洗液，其特征在于，所述盐包括氯化钠、硫酸钠、硝酸钠、亚硝酸钠、磷酸钠、碳酸钠、氯化钾、硫酸钾、硫酸氢钾、硝酸钾、亚硝酸钾、磷酸钾、碳酸钾中的一种或几种。
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