CN107924883B - 电力用半导体装置 - Google Patents

电力用半导体装置 Download PDF

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CN107924883B
CN107924883B CN201580082525.7A CN201580082525A CN107924883B CN 107924883 B CN107924883 B CN 107924883B CN 201580082525 A CN201580082525 A CN 201580082525A CN 107924883 B CN107924883 B CN 107924883B
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power supply
control system
inverter
brake
resin body
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CN107924883A (zh
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山口公辅
田中智典
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Mitsubishi Electric Corp
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Abstract

逆变器控制元件(710、750)通过使用供给至逆变器控制系统电源端子(711、751)的电源电位进行动作，从而输出对逆变器开关元件(51～56)进行控制的信号。制动控制元件(810)通过使用供给至制动控制系统电源端子(811)的电源电位进行动作，从而输出对制动开关元件(59)进行控制的信号。第1金属部件(151)通过具有埋入至封装树脂体(300)中的部分而支撑于封装树脂体(300)，与逆变器控制系统电源端子(711、751)及制动控制系统电源端子(811)各自电连接，具有从封装树脂体(300)凸出的多个凸出部。

Description

电力用半导体装置
技术领域
本发明涉及电力用半导体装置，特别地涉及具有逆变器电路及制动电路的电力用半导体装置。
背景技术
根据日本特开2015-65339号公报(专利文献1)，公开了具有转换器电路、逆变器电路及制动电路的CIB(Converter Inverter Brake：转换器-逆变器-制动)功率模块。该功率模块具有：多个芯片焊盘；逆变器电路元件、转换器电路元件、制动电路元件及集成电路，它们安装于芯片焊盘之上；多个引线，它们与逆变器电路元件、转换器电路元件、制动电路元件及集成电路分别由导线连接；以及封装树脂体，其覆盖多个引线的一部分、逆变器电路元件、转换器电路元件、制动电路元件及集成电路，并且不覆盖多个引线的其余部分。封装树脂体由所谓的传递模塑法形成。
专利文献1：日本特开2015-65339号公报
发明内容
根据上述公报所记载的技术，在传递模塑法中，由于从流入模具中的树脂受到力，引线(金属部分)容易变形。其结果，引线的配置容易混乱。
本发明就是为了解决上述课题而提出的，其目的在于，提供在封装树脂体中能够以高精度配置金属部件的电力用半导体装置。
本发明的电力用半导体装置具有制动开关元件、制动控制元件、封装树脂体、第1金属部件、至少1个逆变器开关元件、至少1个逆变器控制元件。逆变器开关元件是逆变器电路所包含的开关元件。制动开关元件是制动电路所包含的开关元件。逆变器控制元件具有逆变器控制系统电源端子，该逆变器控制元件通过使用供给至逆变器控制系统电源端子的电源电位进行动作，从而输出对逆变器开关元件进行控制的信号。制动控制元件具有制动控制系统电源端子，该制动控制元件通过使用供给至制动控制系统电源端子的电源电位进行动作，从而输出对制动开关元件进行控制的信号。封装树脂体对逆变器开关元件、制动开关元件、逆变器控制元件及制动控制元件进行封装。第1金属部件通过具有埋入至封装树脂体中的部分而支撑于封装树脂体，与逆变器控制系统电源端子及制动控制系统电源端子各自电连接，具有从封装树脂体凸出的多个凸出部。
发明的效果
根据本发明，为了逆变器控制系统电源端子及制动控制系统电源端子的电连接，共通地设置第1金属部件。第1金属部件具有从封装树脂体凸出的多个凸出部，因此在形成封装树脂体时，能够通过对上述多个凸出部进行固定而稳定地得到保持。因此，与为了逆变器控制系统电源端子及制动控制系统电源端子的电连接而设置各自具有单一的凸出部的多个金属部件的情况相比，能够在封装树脂体中以高精度配置金属部件。
本发明的目的、特征、方案以及优点通过以下的详细说明和附图会变得更加清楚。
附图说明
图1是概略地表示本发明的实施方式1中的电力用半导体装置的结构的俯视图。
图2是概略地表示本发明的实施方式1中的电力用半导体装置的结构的电路图。
图3是概略地表示图1的金属部的结构的俯视图。
图4是概略地表示本发明的实施方式1中的电力用半导体装置的制造方法的一个工序的局部剖视图。
图5是概略地表示本发明的实施方式2中的电力用半导体装置的结构的俯视图。
图6是概略地表示本发明的实施方式2中的电力用半导体装置的结构的电路图。
图7是概略地表示图5的金属部的结构的俯视图。
具体实施方式
下面，基于附图，对本发明的实施方式进行说明。
<实施方式1>
(结构)
图1是概略地表示本实施方式中的智能功率模块900(电力用半导体装置)的结构的俯视图。此外，在图1中对于封装树脂体300，仅通过虚线示出了其外缘。图2是概略地表示智能功率模块900的结构的电路图。图3是通过与图1同样的视野概略地表示智能功率模块900的金属部件150的结构的俯视图。此外，在图3中为了使图容易观察而附加了剖面线。
智能功率模块900如图2所示，作为电路结构来说，具有转换器电路600、逆变器电路700、制动电路800。具体地说，智能功率模块900具有作为引线及芯片焊盘起作用的多个金属部件150(图3)、封装树脂体300、键合导线200、安装于作为芯片焊盘的金属部件150之上的多个电子部件。封装树脂体300将这些电子部件封装。另外，封装树脂体300将金属部件150局部地封装。金属部件150中的未被封装树脂体300封装而露出的部分作为智能功率模块900的外部端子起作用。金属部件150包含被封装树脂体300局部地封装的作为引线的第1金属部件151。另外，金属部件150包含被封装树脂体300局部地封装的作为引线及芯片焊盘的第2金属部件152。
作为转换器电路600所包含的电子部件，智能功率模块900具有转换器二极管41～46。转换器电路600所包含的金属部件150中的露出的部分形成交流输入外部端子33～35、正输出外部端子1、负输出外部端子2。输入至交流输入外部端子33～35的3相交流电压通过转换器二极管41～46所构成的转换器桥而被转换为从正输出外部端子1及负输出外部端子2输出的直流电压。
作为逆变器电路700所包含的电子部件，智能功率模块900具有逆变器LVIC(LowVoltage Integrated Circuit)710(逆变器控制元件)、逆变器HVIC(High VoltageIntegrated Circuit)750(逆变器控制元件)、IGBT(Insulated Gate BipolarTransistor)51～56(逆变器通断元件)、续流二极管61～66、自举二极管71～73、自举电阻81～83。逆变器LVIC710及逆变器HVIC750分别是逆变器电路700的低电位侧及高电位侧用驱动IC。逆变器LVIC710及逆变器HVIC750安装于作为芯片焊盘的第2金属部件152(图3)之上。IGBT51及续流二极管61构成了1个桥臂，通过IGBT52～56及续流二极管62～66还构成了5个桥臂。通过共6个桥臂构成了3相桥电路。逆变器电路700所包含的金属部件150中的露出的部分形成逆变器部控制电源外部端子23、逆变器部控制接地外部端子24、低电位侧控制输入外部端子16～18、高电位侧控制输入外部端子13～15、负连接外部端子25～27、交流输出外部端子28～30、正输入外部端子31、其他的外部端子7～12、19～22。
作为制动电路800所包含的电子部件，智能功率模块900具有制动控制IC(制动控制元件)810、IGBT59(制动开关元件)、二极管69。制动控制IC810安装于作为芯片焊盘的第2金属部件152(图3)之上。制动电路800所包含的金属部件150中的露出的部分形成制动部控制电源外部端子6、制动部控制接地外部端子4、制动控制输入外部端子5、制动外部端子32、制动接地外部端子3。
逆变器LVIC710具有LVIC逆变器控制系统电源端子711(逆变器控制系统电源端子)、LVIC逆变器控制系统接地端子712(逆变器控制系统接地端子)、LVIC逆变器控制输入端子721～723、LVIC逆变器控制输出端子741～743、其他的元件端子730。向LVIC逆变器控制系统接地端子712，供给被供给至LVIC逆变器控制系统电源端子711的电源电位的基准电位。逆变器LVIC710通过使用供给至LVIC逆变器控制系统电源端子711的电源电位进行动作，从而从LVIC逆变器控制输出端子741～743分别输出对IGBT51～53(逆变器开关元件)进行控制的栅极信号。
逆变器HVIC750具有HVIC逆变器控制系统电源端子751(逆变器控制系统电源端子)、HVIC逆变器控制系统接地端子752(逆变器控制系统接地端子)、HVIC逆变器控制输入端子764～766、HVIC逆变器控制输出端子784～786、偏移(offset)输出端子794～796、驱动电源端子771、驱动电源接地端子772。向HVIC逆变器控制系统接地端子752，供给被供给至HVIC逆变器控制系统电源端子751的电源电位的基准电位。逆变器HVIC750通过使用供给至HVIC逆变器控制系统电源端子751的电源电位进行动作，从而从HVIC逆变器控制输出端子784～786分别输出对IGBT54～56(逆变器开关元件)进行控制的栅极信号。
制动控制IC810具有制动控制系统电源端子811、制动控制系统接地端子812、制动控制输入端子829、制动控制输出端子839。向制动控制系统接地端子812，供给被供给至制动控制系统电源端子811的电源电位的基准电位。制动控制IC810通过使用供给至制动控制系统电源端子811的电源电位进行动作，从而从制动控制输出端子839输出对IGBT59(逆变器开关元件)进行控制的栅极信号。
封装树脂体300将IGBT51～56、59、逆变器LVIC710、逆变器HVIC750及制动控制IC810封装。另外，封装树脂体300将金属部件150局部地封装。
第1金属部件151通过具有埋入至封装树脂体300中的部分而支撑于封装树脂体300。第1金属部件151与LVIC逆变器控制系统电源端子711、HVIC逆变器控制系统电源端子751及制动控制系统电源端子811各自电连接。具体地说，第1金属部件151与LVIC逆变器控制系统电源端子711、HVIC逆变器控制系统电源端子751及制动控制系统电源端子811各自在封装树脂体300内通过键合导线200连接。第1金属部件151具有从封装树脂体300凸出的多个凸出部，由此构成了逆变器部控制电源外部端子23及制动部控制电源外部端子6。
第2金属部件152通过具有埋入至封装树脂体300中的部分而支撑于封装树脂体300。第2金属部件152与LVIC逆变器控制系统接地端子712、HVIC逆变器控制系统接地端子752及制动控制系统接地端子812各自电连接。具体地说，第2金属部件152与LVIC逆变器控制系统接地端子712、HVIC逆变器控制系统接地端子752及制动控制系统接地端子812各自在封装树脂体300内通过键合导线200连接。第2金属部件152具有从封装树脂体300凸出的多个凸出部，由此构成了逆变器部控制接地外部端子24及制动部控制接地外部端子4。
键合导线200与金属部件150共同构成了如图2所示的电路中的配线。键合导线200包含有将LVIC逆变器控制系统电源端子711、HVIC逆变器控制系统电源端子751及制动控制系统电源端子811各自与第1金属部件151连接的键合导线。在本实施方式中，第1金属部件151在封装树脂体300中仅与封装树脂体300及键合导线200相接。
(制造方法)
接下来，在下面对智能功率模块900的制造方法进行说明。
首先，准备带外框的金属部件150P，其最终成为金属部件150(图3)，具有将金属部件150的每一者连接起来的外框150f(图4)。在带外框的金属部件150P中的金属部件150之上，安装上述的电子部件。在安装了电子部件的金属部件150形成键合导线200。
另外，为了进行传递模塑成型，准备具有模具下部1001及模具上部1002的模具1000。模具1000在模具下部1001及模具上部1002之间具有型腔1100。
接下来，通过模具下部1001及模具上部1002夹持带外框的金属部件150P中的外框150f和金属部件150中的最终成为外部端子的部分，从而在型腔1100内将金属部件150悬吊起来。特别地，通过由模具1000分别固定成为制动部控制电源外部端子6(图4)的部分和成为逆变器部控制电源外部端子23的部分(在图4中未图示)，从而将第1金属部件151的一端及另一端悬吊起来。
接下来，在型腔1100中注入树脂。由此，形成封装树脂体300。此时，金属部件150受到来自注入的树脂的力，因此，会发生预料外的变形。特别地，在型腔1100中悬吊的金属部件150中的仅在一处由模具1000支撑者容易变形。相反地，在多处受到支撑者不容易变形。第1金属部件151不仅在成为制动部控制电源外部端子6(图4)的部位受到模具1000支持，而且在成为逆变器部控制电源外部端子23(在图4中未图示。参照图3。)的部位也受到模具1000支持。因此，在封装树脂体300的传递模塑成型时第1金属部件151难以变形。因此，能够高精度地在封装树脂体300中配置第1金属部件151。
接下来，从模具1000取出通过传递模塑成型得到的中间产品。接下来，通过切断来去除外框150f。由此，得到智能功率模块900。
(效果)
根据本实施方式，为了LVIC逆变器控制系统电源端子711、HVIC逆变器控制系统电源端子751及制动控制系统电源端子811(图2)的电连接，共通地设置第1金属部件151(图1)。第1金属部件151具有制动部控制电源外部端子6及逆变器部控制电源外部端子23作为从封装树脂体300凸出的多个凸出部。由此，在用于形成封装树脂体300的传递模塑成型时(图4)，能够通过对上述多个凸出部进行固定而使第1金属部件151稳定地得到保持。因此，与为了LVIC逆变器控制系统电源端子711、HVIC逆变器控制系统电源端子751及制动控制系统电源端子811的电连接而设置各自具有单一的凸出部的多个金属部件的情况不同，能够高精度地在封装树脂体300中对作为金属部件150之一的第1金属部件151进行配置。
在封装树脂体300中仅与封装树脂体300及键合导线200相接的第1金属部件151，在即将形成封装树脂体300的时刻实质上仅通过第1金属部件151的凸出部得到保持。键合导线200容易由于外力而变形，因此实质上不对第1金属部件151的保持做出贡献。在该情况下，在封装树脂体300的形成时，特别要求防止由第1金属部件151的变形导致的配置的混乱。根据本实施方式，如上所述，能够有效地抑制这样的配置的混乱。
此外，在本实施方式中，第1金属部件151在封装树脂体300中仅与封装树脂体300及键合导线200相接，但第1金属部件151也可以与其他的结构相接，例如也可以与用于提高热传递性的结构相接。作为这样的结构，也可以使用具有比封装树脂体300的热传递性高的热传递性的树脂片。树脂片的刚性比较低，因此树脂片对传递模塑成型时的第1金属部件151的配置的稳定化的贡献小。因此，即使在该情况下，使用能够以高精度配置的第1金属部件151的优点也大。
与第1金属部件151同样地，第2金属部件152也具有从封装树脂体300凸出的多个凸出部。由此，第2金属部件152也能够在封装树脂体300中以高精度配置。
制动部控制电源外部端子6及逆变器部控制电源外部端子23在封装树脂体300内被第1金属部件151短接。由此，通过制动部控制电源外部端子6及逆变器部控制电源外部端子23的哪一者都能够进行向逆变器电路700及制动电路800(图2)的电源的供给。即，仅通过向1个外部端子的连接即可进行向逆变器电路700及制动电路800(图2)的电源的供给。因此，在安装有智能功率模块900的装置(未图示)的制造中，能够以有利于智能功率模块900的周边的配线或部件的配置的方式，对使用制动部控制电源外部端子6及逆变器部控制电源外部端子23中的哪个进行选择。因此，智能功率模块900的周边处的配线或部件的配置的设计自由度提高。
另外，根据本实施方式，为了逆变器控制元件710的LVIC逆变器控制系统电源端子711和逆变器HVIC750的HVIC逆变器控制系统电源端子751之间的各自的电连接，共通地使用第1金属部件151。由此，作为用于逆变器控制元件710的LVIC逆变器控制系统电源端子711及逆变器HVIC750的HVIC逆变器控制系统电源端子751各自的电连接的金属部件，无需设置除了能够在封装树脂体300中以高精度配置的第1金属部件151以外的金属部件。因此，即使在逆变器控制元件的数量比1个多的情况下，也能够在封装树脂体300中以高精度配置金属部件。
<实施方式2>
图5是概略地表示本实施方式中的智能功率模块900V(电力用半导体装置)的结构的俯视图。此外，在图5中对于封装树脂体300，仅通过虚线示出了其外缘。图6是概略地表示智能功率模块900V的结构的电路图。图7是通过与图5同样的视野概略地表示智能功率模块900V的金属部件150V的结构的俯视图。此外，在图7中为了使图容易观察而附加了剖面线。
智能功率模块900V具有金属部件150V(图7)以取代金属部件150(图3)。金属部件150V具有第2金属部件152V以取代第2金属部件152。第2金属部件152V通过具有埋入至封装树脂体300中的部分而支撑于封装树脂体300。第2金属部件152V与LVIC逆变器控制系统接地端子712、HVIC逆变器控制系统接地端子752、制动控制系统接地端子812、IGBT59的发射极端子(制动电路800的接地侧)各自电连接。第2金属部件152V具有从封装树脂体300凸出的多个凸出部，由此构成了逆变器部控制接地外部端子24及制动接地外部端子3V。通过该结构，制动电路800在封装树脂体300中被接地至第2金属部件152V。另外，第2金属部件152V与第2金属部件152不同，不具有制动部控制接地外部端子4(图3)。
此外，对于上述以外的结构，由于与上述的实施方式1的结构大致相同，因此对相同或对应的要素标注相同的标号，省略其说明。
根据本实施方式，从封装树脂体300凸出的第2金属部件152V的凸出部包含逆变器部控制接地外部端子24和作为制动电路800的外部端子的制动接地外部端子3V这2个凸出部。由此，与第2金属部件152(实施方式1)同样地，第2金属部件152V也能够在封装树脂体300中以高精度配置。
另外，根据本实施方式，LVIC逆变器控制系统接地端子712、HVIC逆变器控制系统接地端子752、制动控制系统接地端子812、IGBT59的发射极端子在封装树脂体300内被第2金属部件152V短接。由此，通过逆变器部控制接地外部端子24及制动接地外部端子3V的哪一者都能够进行向逆变器电路700及制动电路800(图2)的基准电位的供给。另外，通过逆变器部控制接地外部端子24及制动接地外部端子3V的哪一者都能够进行制动电路800的接地。因此，在安装有智能功率模块900V的装置(未图示)的制造中，能够以有利于智能功率模块900V的周边的配线或部件的配置的方式，对使用逆变器部控制接地外部端子24及制动接地外部端子3V中的哪个进行选择。因此，智能功率模块900V的周边处的配线或部件的配置的设计自由度提高。
另外，第2金属部件152V不包含制动部控制接地外部端子4(图1：实施方式1)，由此在智能功率模块900V省略了制动部控制接地外部端子4。因此，能够削减智能功率模块900V的外部端子的数量。因此，能够减小智能功率模块900V的大小。
此外，在上述各实施方式中对作为开关元件使用IGBT的情况进行了说明，但也可以使用MISFET(Metal Insulator Semiconductor Field Effect Transistor)等其他的半导体开关元件。
本发明可以在其发明的范围内，将各实施方式自由地进行组合，或对各实施方式进行适当变形、省略。虽然对本发明详细地进行了说明，但上述的说明在所有方面都是例示，本发明并不限定于此。可以理解为在不脱离本发明的范围的情况下能够设想出未例示的无数的变形例。
标号的说明
1正输出外部端子，2负输出外部端子，3制动接地外部端子，4制动部控制接地外部端子，5制动控制输入外部端子，6制动部控制电源外部端子，7～12、19～22外部端子，13～15高电位侧控制输入外部端子，16～18低电位侧控制输入外部端子，23逆变器部控制电源外部端子，24逆变器部控制接地外部端子，25～27负连接外部端子，28～30交流输出外部端子，31正输入外部端子，32制动外部端子，33～35交流输入外部端子，41～46转换器二极管，150f外框，51～56 IGBT(逆变器开关元件)，59 IGBT(制动开关元件)，61～66续流二极管，69二极管，71～73自举二极管，81～83自举电阻，150、150V金属部件，150P带外框的金属部件，151第1金属部件，152、152V第2金属部件，200键合导线，300封装树脂体，600转换器电路，700逆变器电路，710逆变器LVIC(逆变器控制元件)，711 LVIC逆变器控制系统电源端子，712 LVIC逆变器控制系统接地端子，721～723 LVIC逆变器控制输入端子，730元件端子，741～743 LVIC逆变器控制输入端子，750逆变器HVIC(逆变器控制元件)，751 HVIC逆变器控制系统电源端子，752 HVIC逆变器控制系统接地端子，764～766 HVIC逆变器控制输入端子，771驱动电源端子，772驱动电源接地端子，784～786 HVIC逆变器控制输出端子，794～796偏移输出端子，800制动电路，810制动控制IC(制动控制元件)，811制动控制系统电源端子，812制动控制系统接地端子，829制动控制输入端子，839制动控制输出端子，900、900V智能功率模块(电力用半导体装置)，1000模具，1001模具下部，1002模具上部，1100型腔。

Claims (6)

1.一种电力用半导体装置，其具有：
至少1个逆变器开关元件，其是逆变器电路所包含的开关元件；
制动开关元件，其是制动电路所包含的开关元件；
至少1个逆变器控制元件，其具有逆变器控制系统电源端子，该逆变器控制元件通过使用供给至所述逆变器控制系统电源端子的电源电位进行动作，从而输出对所述逆变器开关元件进行控制的信号；
制动控制元件，其具有制动控制系统电源端子，该制动控制元件通过使用供给至所述制动控制系统电源端子的电源电位进行动作，从而输出对所述制动开关元件进行控制的信号；
封装树脂体，其对所述逆变器开关元件、所述制动开关元件、所述逆变器控制元件及所述制动控制元件进行封装；以及
第1金属部件，其通过具有埋入至所述封装树脂体中的部分而支撑于所述封装树脂体，与所述逆变器控制系统电源端子及所述制动控制系统电源端子各自电连接，具有从所述封装树脂体凸出的多个凸出部。
2.根据权利要求1所述的电力用半导体装置，其中，
所述至少1个逆变器控制元件包含各自具有所述逆变器控制系统电源端子的多个逆变器控制元件，所述第1金属部件与所述多个逆变器控制元件各自的所述逆变器控制系统电源端子电连接。
3.根据权利要求1所述的电力用半导体装置，其中，
还具有键合导线，该键合导线将所述逆变器控制系统电源端子及所述制动控制系统电源端子各自与所述第1金属部件连接，
所述第1金属部件在所述封装树脂体中仅与所述封装树脂体及所述键合导线相接。
4.根据权利要求2所述的电力用半导体装置，其中，
还具有键合导线，该键合导线将所述逆变器控制系统电源端子及所述制动控制系统电源端子各自与所述第1金属部件连接，
所述第1金属部件在所述封装树脂体中仅与所述封装树脂体及所述键合导线相接。
5.根据权利要求1至4中任一项所述的电力用半导体装置，其中，
所述逆变器控制元件具有逆变器控制系统接地端子，向该逆变器控制系统接地端子供给被供给至所述逆变器控制系统电源端子的电源电位的基准电位，所述制动控制元件具有制动控制系统接地端子，向该制动控制系统接地端子供给被供给至所述制动控制系统电源端子的电源电位的基准电位，
该电力用半导体装置还具有第2金属部件，该第2金属部件通过具有埋入至所述封装树脂体中的部分而支撑于所述封装树脂体，与所述逆变器控制系统接地端子及所述制动控制系统接地端子各自电连接，具有从所述封装树脂体凸出的多个凸出部。
6.根据权利要求5所述的电力用半导体装置，其中，
所述制动电路在所述封装树脂体中被接地至所述第2金属部件。
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